CN101583896B - A sample positioning stage and method of operation - Google Patents
A sample positioning stage and method of operation Download PDFInfo
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- CN101583896B CN101583896B CN2008800025374A CN200880002537A CN101583896B CN 101583896 B CN101583896 B CN 101583896B CN 2008800025374 A CN2008800025374 A CN 2008800025374A CN 200880002537 A CN200880002537 A CN 200880002537A CN 101583896 B CN101583896 B CN 101583896B
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Abstract
A sample positioning stage (4) for positioning a sample (8) to be inspected relative to an optical inspection device (2). The stage comprises a first generally planar body (18) on which a sample to beinspected can be carried and a second body (20) directly coupled to the first body via bearings (43,45,47) extending between them which constrain movement of the first body relative to the second bod y to a first plane that is substantially parallel to the plane of the first body. There is 'also provided a drive system being selectively operable in a first mode and a second mode in which the drivesystem provides less resistance to the relative movement of the first and second bodies in the plane by an external force exerted on the first body than in the first mode, the drive system being enga ged in both the first and second modes. The stage further comprises a selector operable to change the mode of operation from the first mode to the second mode.
Description
Technical field
The present invention relates to a kind of sample positioning stage, for example be used to locate and be used for by the optical detection apparatus platform of the sample that detects of microscope or spectroscope for example.
Background technology
Can adopt sample positioning stage for example to come with respect to microscope and spectroscope location sample, these positioning tables can comprise the check-out console of placing sample to be detected.Basically the check-out console on plane is installed at least one carriage usually, makes this plate to move with respect to carriage at least one substantially horizontal degree of freedom.This makes the position be positioned at the sample on the check-out console to move with respect to the pick-up unit in test sample just.Power-actuated sample positioning stage comprises drive system, can operate this drive system and move check-out console with respect to carriage.Drive system can and/or be come the relative position of control detection plate according to the algorithm of pre-programmed according to the input signal that the input media from for example tracking ball or operating rod receives.
Yet, gone into and can outside transfer table under the control of power-actuated drive system, also wish and can come manual transfer table by platform being dragged to the desired position.
The present invention relates to a kind of sample positioning stage, wherein, can under the control of electronic input apparatus, move this by this platform of physical manipulation.
Summary of the invention
Therefore, an aspect according to basic invention provides a kind of sample positioning stage, and it is used for respect to optical detection apparatus location sample to be detected, described sample positioning stage comprises: first main body on plane basically, and sample to be detected can be carried on this first main body; Second main body, described second main body is directly connected on described first main body by extend bearing between described first main body and described second main body, and described bearing arrives the limit movement of described first main body with respect to described second main body and the first substantially parallel plane of the plane of described first main body; Drive system, it is optionally with first pattern and the operation of second pattern, in described first pattern, described drive system relative to each other drives described first main body and second main body in described first plane towards the demand relative position that receives from the electronic position input media, in described second pattern, described drive system is than providing in first pattern for first main body that causes by the external force that is applied on described first main body and second main body at the littler resistance of the relative motion on first plane, and described drive system is bonded in described first pattern and second pattern; And selector switch, described selector switch operationally changes over second pattern with operator scheme from first pattern in response to the input that receives at described sample positioning stage place.
Advantageously, change operator scheme in response to the input that receives at described sample positioning stage place according to the selector switch of sample positioning stage of the present invention, like this user can in the change operator scheme, remain on platform near.
Another advantage of the present invention is that drive system is bonded in first pattern and second pattern, because this means that not needing to throw off drive system is convenient to manually dilatory platform.Therefore, do not need to provide motor that clutch mechanism throws off drive system from first or second main body, that is to say this drive system no-clutch so that make platform manually to be moved.Drive system of the present invention and main body permanent engagement, it all acts on the main body in first pattern and second pattern, and owing to is applied to first main body that the external force on first plane on first main body causes and any relative motion of second main body makes this drive system be driven (returned automatically or manually and drive) in second pattern.This has reduced the complicacy and the cost of platform equipment.Because the resistance that is provided by drive system is more medium and small than first pattern in second pattern, then easier win main body and second main body of making in second pattern of user relative to each other moved.This make the user can mobile agent to desired location than adopting drive system to move that they are faster.This means that also user's hand does not need to handle the device of remote connection, and for example operating rod, so hand can freely be worked near first main body and second main body.
Of the present invention another is a little, if one of first main body and second main body and object collision, then drive system can switch in second pattern and operate, so that prevent the infringement to platform and/or object.
This drive system can be constructed such that its resistance that provides can change.The resistance that drive system provides can depend on the size of external force.The preferred maximum resistance that drive system can provide can depend on a plurality of factors, for example size and the quality of first main body and second main body, and the environment that uses of platform equipment.
Should be appreciated that drive system and external force are in balance when external force equals resistance that drive system provides.In this state, first main body and second main body can relative to each other not moved, although applied external force.
When resistance that external force provides greater than drive system, first main body and second main body are relative to each other moved.
Preferably, the resistance that drive system provides in second pattern than littler at least by 50% in first pattern, in second pattern than preferably littler at least by 75% in first pattern, in second pattern than in first pattern especially preferably littler at least 90%.Preferably, the level for the resistance of the relative motion of first main body and second main body that drive system provides in second pattern is enough low, can not detected by the user.Preferably, the level for the resistance of the relative motion of first main body and second main body that drive system provides in second pattern is not more than 50N, more has choosing to be not more than 10N, especially preferably is not more than 1N.Most preferably, drive system provides the user undetectable resistance to the relative motion of first main body and second main body.Specifically, preferred drive system does not actively stop the relative motion of first main body and second main body in second pattern.
Drive system can comprise the controller of the driver element that is used to control the motor transmission.Therefore, in this case, the driver element of motor transmission can in first pattern, apply driving force on first main body or second main body to cause relative motion.This controller can be controlled the operation of the driver element of motor transmission in response to the demand relative position that receives from the electronic position input media, so that first main body and second main body are relative to each other driven.
The suitable driver element of the present invention that is used for comprises that band driving, ball-screw, rack and pinion drive and directly drive.In a kind of particularly preferred embodiment, driver element comprises motor body, is used to control engage with first main body or second main body so that drive first or the driver part of the relative motion of second portion.For example, this driver part can be a driving shaft, and it extends from this motor body and is used for engaging with track, and the rotation of the feasible driving shaft that is caused by motor body causes the scope relative motion along track of driving shaft and track.Preferably, the driver element of motor transmission is constructed such that the rotation of driving shaft causes the relative motion on perpendicular to the direction of the rotation of driving shaft of driving shaft and track.Preferably, driving shaft is configured to the friction lever that is frictionally engaged.Therefore, preferably, this driver element comprises friction-driven.
Preferably, at least one bearing between first main body and second main body comprises in the embodiment of track that (below meeting be described in more detail), the drive system of motor transmission act on the track of bearing to cause relative motion.
This is favourable, because it makes that platform can be compacter and in light weight.It has also reduced motor and has centered on the amount that bearing is applied to the moment of torsion on the main body.For example, comprise embodiment with the motor that is used for the driving shaft that engages with friction lever in the drive system of motor transmission, preferably, the be frictionally engaged track of bearing of driving shaft.Therefore, the track of bearing can be a friction lever.
Can obtain many suitable electronic position input medias that are used to import the demand relative position.For example, the electronic position input media can comprise that operating rod, tracking ball or user can handle other devices of importing the demand relative position.The electronic position input media can be the memory storage that comprises the demand relative position of pre-stored.Optionally, processor unit during location input device, multi-purpose computer for example, it can provide the demand relative position from computer program.Therefore, the user can be to the programming of a series of positions, and this program is moved so that the position of console device on these positions.This provides the straightforward procedure that obtains the assembling of detected sample to be obtained.
Preferably, selector switch is configured to detect in first plane external force applying at least one of first main body and second main body.Optionally, equipment can be constructed such that selector switch can detect external force and be applied on the predetermined point at least one of first main body and second main body.Preferably, equipment is constructed such that selector switch can detect at least one any position that external force is applied to first main body and second main body.Selector switch can be configured to export the signal that applies that expression detects external force.This output signal can be can be by the signal of user's detection.For example, this output signal can be an audible signal.Optionally, described output signal can be a visual signal.This can be used to refer to the user has thing disturbing the relative position of first main body and second main body.
Operator scheme with drive system when preferably, described selector switch is formed at and detects external force and be applied on one of first main body and second main body on first plane changes over second pattern from first pattern.This is favourable, does not change to second operator scheme because it does not need the user to get involved.This is useful in the situation that platform operating period user does not always occur, and/or needn't switch under the situation of second operator scheme consciously the user be useful.
Preferably, described selector switch only is configured to when external force surpasses predetermined threshold power just the operator scheme of drive system is changed to second pattern from first pattern.This is favourable, because it can help to prevent that accident from switching to second pattern with operator scheme.Predetermined threshold power can depend on multiple factor, for example size and the quality of at least one of first main body and second main body, and the environment that uses of platform equipment.Preferably, predetermined threshold power is not more than 100N, more preferably no more than 50N, especially preferably is not more than 10N, for example is not more than 3N.Preferably, predetermined threshold power is not less than 0.5N, more preferably is not less than 1N, especially preferably is not less than 2N.
Operator scheme with drive system when selector switch can be formed at and detect external force and apply preset time length changes to second pattern from first pattern.This is favourable, because it can help to prevent that accident from switching to second pattern with operator scheme.Preset time length can depend on multiple factor, for example the environment of platform equipment use.Preferably, schedule time length is not more than 5 seconds, more preferably no more than 3 seconds, especially preferably is not more than 1 second.Preferably, schedule time length is not less than 1ms, more preferably is not less than 10ms, especially preferably is not less than 25ms.
Described selector switch can comprise sensor, and described sensor is used to measure external force applying on one of first main body and second main body.This selector switch can be the power transducer.When the size that this selector switch can be formed at the power that the power transducer measures surpasses predetermined threshold operator scheme is changed to second pattern from first pattern.
Preferably, selector switch is configured to detect external force applying on one of first main body and second main body by determining whether that first main body and second main body are operated in the mode of expecting.If first main body and second main body are not operated in the mode of expecting, then selector switch can be configured to operator scheme is changed to second pattern from first pattern.
Preferably, selector switch can comprise sensor, and described sensor is configured to detect the relative motion of first main body and second main body.For example, this sensor can comprise the accelerometer on each that is positioned at first main body and second main body, is used to determine whether that first main body and second main body relative to each other just quicken.Preferably, described sensor is configured to detect the relative position of first main body and second main body.This is favourable, because it can make this equipment can determine the relative position of first main body and second main body.Therefore, this equipment can keep following the tracks of the relative position of first main body and second main body, even relative to each other manually move under the situation that external force applies when first main body and second main body.Preferably, described sensor comprises the read head that is positioned on one of first main body and second main body, and it can read the rule on another of described first main body and second main body, so that detect the variation of the relative position of first main body and second main body.
Suitable rule comprises the rule with sign, and described sign is limited with the pattern that can read by read head, so that determine the relative motion between them.For example, described rule can be the incremental scale with rule sign, and described rule sign is limited with periodic patterns, and described periodic patterns produces cyclical signal at read head when between rule and the read head relative motion taking place.These cyclical signals produce the counting of the up/down that can determine the displacement between rule and the read head.For example, described this suitable rule among the european patent application No.0207121, this european patent application its full content is by reference incorporated this paper into.This rule can have can be by the reference identification of read head detection, so that it can determine the exact position of read head with respect to rule.For example, disclose this rule among the international patent application publication WO 2005/124282, the full content of this international patent application is incorporated in this instructions by reference.Optionally, rule can be the absolute calibration chi, and it has makes read head with respect to the scale marker of the accurate absolute position of rule, and does not need to count from the preposition increment.This rule has the scale marker that limits the unique location data usually.These data can be the forms of pseudo-random sequence or discrete codewords for example.This rule discloses in International Patent Application PCT/GB2002/001629, and the full content of this international patent application is incorporated in this instructions by reference.
Can be used for determining the relative position of first main body and second main body from the position data of read head.Optionally, position data can be used for control algolithm and is used for detecting when first main body and the relative to each other motion of second main body.In addition, can use by drive system from the positional information of read head, for example the controller by drive system uses, as the part of servo loop, so that accurately first main body and second main body relative to each other are driven into the demand relative position.
Preferably, described selector switch be configured to the data of the relative motion of the expectation of expression first main body and second main body with from the data of the actual relative motion of described first main body of the expression of sensor and second main body relatively, and simultaneously the operator scheme of drive system is not changed over second pattern from first pattern when actual relative motion and expectation relative motion.
The data of representing the expectation relative motion (expectation relative motion) of first main body and second main body can be received from location input device by selector switch.Described selector switch can be configured to determine expectation relative motion data according to the data that receive from location input device.For example, location input device can offer the demand relative position of selector switch first main body and second main body, and relative position is determined the expectation relative position according to demand.Described selector switch can be determined actual relative motion then, and itself and expectation relative motion are compared.
Expectation relative motion data can represent whether to expect that first main body and second main body are just with respect to motion each other.Expectation relative motion data can comprise the direction parts, and it indicates the desired orientation of the relative motion between first main body and second main body.Expectation relative motion data can quantize the expectation relative motion between first main body and second main body.
Drive system can be constructed such that it is driven (back driven) by manual returning.Therefore, drive system can be configured to by only apply power on one of first main body and second main body win main body and second main body relative to each other to be moved.For example, described drive system can be included in screw drive mechanism.In this case, preferably, drive system is along direction forward drive first main body and second main body that are applied to the external force on one of first main body and second main body.Therefore, in this case, when drive system was in second pattern, drive system is auxiliary to make win main body and second main body move along the direction that is applied to the external force on one of first main body and second main body.
Preferably, described drive system can manually be returned and be driven.Preferably, described drive system is formed to stop in first pattern manually to return and drives, and described drive system is formed at not stop in second pattern manually to return and drives.That is to say that preferably, described drive system is formed at any manual time of can not resist drive system in second pattern and drives and forward drive.
Preferably, described drive system comprises motor and power supply.Preferably, platform equipment is configured to control the power that motor applies by power supply.Preferably, in first pattern, motor is configured to provide resistance to returning to drive.Preferably, in second pattern, motor does not provide resistance to returning to drive.
Preferably, power supply operationally changes the clean power that motor applies, so that make driver element carry out the relative motion between first main body and second main body.Preferably, power supply can cause motor to apply multiple different clean power, so that carry out the driving of varying level.
Preferably, in described first pattern, described power supply is configured to when the actual relative motion of described first main body and second main body and wishes that relative motion will not be increased to maximum net power by the clean power that motor applies simultaneously.Therefore, when being in first pattern, if external force is applied on one of first main body and second main body, power supply preferably increases power output, so that increase the resistance of drive system.Therefore, preferably, motor is servo to remain on the desired position with first main body and second main body.
Preferably, selector switch is configured to monitor the clean power that motor applies.Preferably, selector switch is configured to simultaneously the operator scheme of drive system not changed over second pattern from first pattern in preset time length when the clean power that applies is in maximum net power and in definite actual relative motion and expectation relative motion.Selector switch can be configured to only change operator scheme when this condition satisfies on preset time length.Preferably, preset time length can depend on multiple factor, for example the environment of platform equipment use.Preferably, schedule time length is not more than 5 seconds, more preferably no more than 3 seconds, especially preferably is not more than 1 second.Preferably, schedule time length is not less than 1ms, more preferably is not less than 10ms, especially preferably is not less than 25ms.
Preferably, motor is electrically driven (operated) motor.Therefore, preferably, platform equipment is constructed such that in first pattern and applies clean voltage by power supply, so that the resistance that drives for returning is provided.Preferably, in second pattern, power supply does not apply clean voltage, so that motor does not provide back the resistance that drives.
When drive system comprises at least one electric drive unit, electro-motor for example, selector switch can be determined applying of external force by the back electromotive force of monitoring electric drive unit.Therefore, the increase of not expecting of the back electromotive force of electric drive unit can show: because first main body and second main body increase towards the feasible power output for driver element of the increase of the resistance of the relative motion of demand relative position.
Preferably, sample positioning stage is constructed such that in second pattern, first main body and second main body tend to be applied to first main body and second main body at least one on external force relative to each other do not move when removing, irrelevant with the relative position of first main body and second main body.Therefore, preferably, first main body and second main body can be not biased towards any specific stop relative position.
Selector switch can be configured in response to second input that receives at the platform place operator scheme be changed over second pattern from first pattern.Operator scheme with described drive system when preferably, described selector switch is formed at external force and is removed changes over first pattern from second pattern.Preferably, described selector switch is formed to detect when first main body and second main body relative to each other maintain static and determines that external force is removed.Preferably, described selector switch is formed at determines that external force is not later than 2 seconds operator schemes with drive system after being removed and changes over first pattern from second pattern, preferably is not later than 1 second operator scheme with drive system after definite external force has been removed and changes over first pattern from second pattern.Preferably, described selector switch is formed at and determines that external force is not later than 100ms after being removed the operator scheme of drive system is changed over first pattern from second pattern.
Described drive system can be formed at win main body and second main body are moved towards predetermined relative location.Preferably, when external force removed, first main body and second main body remained on their relative position.Therefore, the user can be simply by one of manually dilatory first main body and second main body to the desired position and let go and reorientate first main body and second main body.Preferably, described drive system is configured to: when external force is removed, only when receiving the second demand relative position from location input device, make described first main body and second main body relative to each other move.
As mentioned above, drive system can be configured to as long as first main body and second main body are relative to each other driven the demand relative position of the reception towards this from location input device when first main body and second main body are not in the demand relative position.In this case, preferably, when operator scheme when second pattern changes over first pattern, described demand relative position is set up the current relative position as described first main body when reentering first pattern and second main body.
Described selector switch can comprise switch, and this switch can be operated by the user, comes to change operator scheme between first pattern and second pattern, does not need to cause the relative motion between first main body and second main body.This switch can be the device that is used to open with interrupt circuit.This switch can comprise and can be used for switching between first pattern and second pattern by the button of user's operation.This switch can comprise transducer.This switch can comprise photoelectric detector.Optionally, this switch can comprise loudspeaker.Preferably, this switch is positioned on first main body or second main body.
Preferably, at least one in described first main body and second main body comprises the handle that is used to be convenient to described first main body of manual control and second main body.This helps external force is applied at least one of first main body and second main body.Preferably, described handle dangles from one of first main body and second main body.Optionally, described handle can comprise selector switch, make when handle is handled by the user, this selector switch with operator scheme from first mode switch to second pattern.
Described equipment can comprise the ejection selector switch.This drive system can be formed at and make win main body and second main body move to predetermined ejected position when start ejecting selector switch.
Preferably, the relative motion of first main body and second main body is restricted to first degree of freedom substantially parallel with the plane of first main body by bearing.This first degree of freedom can be a rotary freedom.Therefore, in this case, first main body and second main body can relative to each other be rotated around an axis.First degree of freedom can be linear degree of freedom.
Preferably, this equipment can comprise the 3rd main body, and it is directly connected on second main body by the bearing that extends between second main body and the 3rd main body, makes second main body and the 3rd main body relative to each other to move on second degree of freedom.Preferably, first degree of freedom and second degree of freedom are linear.Preferably, first degree of freedom and second degree of freedom quadrature relative to each other.Preferably, second degree of freedom is positioned at the plane on the plane that is arranged essentially parallel to first main body.
In this case, preferably, provide second drive system, its optionally in first pattern operation drive second main body and the 3rd main body in second degree of freedom relative to each other towards the demand relative position motion that receives from the electronic position input media.Preferably, second drive system also can be operated in second pattern, and wherein, described second drive system provides littler resistance than the relative motion that is caused by external force in second degree of freedom for second main body and the 3rd main body in first pattern.Preferably, the same with the drive system that is used to drive first main body and second main body (first drive system), second drive system also is bonded in first main body and second main body.
Second selector can be provided, and it operationally changes to second pattern with the operator scheme of second drive system from first pattern in response to the input that receives at the platform place.Preferably, described selector switch operationally changes to second pattern with the operator scheme of first drive system and second drive system from its first pattern in response to the input that receives at the platform place.The operationally independent operator scheme that changes first drive system with the operator scheme of second drive system of described selector switch.Therefore, described selector switch can be configured to only change in response to the input that receives at the platform place operator scheme of first drive system or second drive system, and perhaps the operator scheme with first drive system and second drive system changes to second pattern from its first pattern.For example, described selector switch can be configured to only only the operator scheme of first drive system be changed to second pattern from first pattern when first degree of freedom is applied on first main body when detecting external force.In addition, described selector switch can be configured to only only the operator scheme of second drive system be changed to second pattern from first pattern when second degree of freedom is applied on first main body when detecting external force.Preferably, described selector switch can be configured to when detecting external force and be applied on first main body on first degree of freedom and second degree of freedom operator scheme of first drive system and second drive system is changed to second pattern from first pattern.
This can be used for optical detection apparatus, for example microscope or spectroscope.Preferably, this is used for High Definition Systems.For example, this can be used for High Definition Systems, wherein the precision of locating first main body with respect to second main body at least four orders of magnitude of scope height that can relative to each other move than first main body and second main body at least, be more preferably up to and lack five orders of magnitude, be preferably up to few six orders of magnitude especially.
Preferably, at least a portion of each of first main body and second main body (the 3rd main body can be arranged) allows to see through light.Should be appreciated that light can be visible light, infrared or ultraviolet light.This is favourable, because it can make the sample that is placed on first main body be illuminated.This part can be the transparent part or the translucent portion of main body.Optionally, this part can be the opening in the main body.Preferably, be that the part of at least one of preferred first main body and second main body is elongated in the embodiment of linearity in first degree of freedom.This part can be elongated on the direction of the linear degree of freedom that can relative to each other move perpendicular to first main body and second main body.Directly connect in the embodiment of the 3rd main body in second main body, preferably, the part of second main body is elongated on the direction that is parallel to the linear degree of freedom that second main body and the 3rd main body can relative to each other move.
Described second main body can be connected on described first main body by at least one rigid bearing and at least one the bullet flexible bearing that is arranged between described first main body and described second main body.Preferably, described at least one rigid bearing and at least one play flexible bearing and arrange relative to one another basically, and by described bearing make described first main body and second main body on the direction on the plane of first main body that is arranged essentially parallel to described plane basically to prestrain each other.Preferably, described is constructed such that by described first main body of described bearing and is limited to first plane substantially parallel with the plane of described first main body with respect to the motion of described second main body; Preferably, described drive system applies driving force than described at least one the nearer position of bullet flexible bearing of distance at described at least one rigid bearing of distance on described platform.Described also can comprise position sensing device, and described position sensing device is positioned at least one of described first main body and described second main body, and described position sensing device is used to provide the measurement of the relative position of described first main body and described second main body.Preferably, described at least one rigid bearing of described position sensing device distance is nearer than described at least one the bullet flexible bearing of distance.Preferably, at least one rigid bearing and at least one play flexible bearing and are arranged to basically toward each other, make the direction of the clean biasing force that at least one rigid bearing bears play direction opposite basically of the clean biasing force that flexible bearing bears basically with at least one.Preferably, at least one rigid bearing and at least one play flexible bearing and are arranged such that playing flexible bearing at least one provides in the embodiment of biasing force, and each of at least one bullet flexible bearing is configured at least one rigid bearing supporting of bias voltage and engages.Preferably, at least one rigid bearing and at least one bullet flexible bearing are arranged such that the clean power that at least one bullet flexible bearing provides is biased into the supporting joint with each rigid bearing.Preferably at least one plays flexible bearing and is arranged such that with at least one rigid bearing the power that acts on each rigid bearing that is provided by the bias voltage that plays flexible bearing is substantially the same.
The agent docket of submitting to the application that is entitled as " sample positioning apparatus " that the details of this sample locating device is described in common pending trial is that this PCT application has required the right of priority of UK Patent Application No.0700519.2, No.0700507.7 and No.0700506.9 in the PCT application of 0766/WO/0.Content during open and this PCT applies for is incorporated this paper by reference into.
Be used for suitable bearing of the present invention and comprise sliding bearing and roller bearing, for example crossed roller bearing.For example, at least one the comprised roller bearing in the gentle bearing of rigid bearing and property, ball bearing for example, it is between the track on first main body and second main body.
Preferably, each at least one rigid bearing and at least one the bullet flexible bearing comprises first supporting structure that is positioned on first main body and second supporting structure that is positioned on second main body, and their cooperations form bearing.This supporting structure can comprise the supporting part of being convenient to main body relative motion in degree of freedom.This supporting structure also can comprise bearing, and supporting part is installed on one of first main body and second main body by this bearing.For example, first supporting structure and second supporting structure can comprise the glider on another of the track that is positioned on one of first main body and second main body and first main body and second main body, and glider is used for and the track cooperate.Should be appreciated that track can be any suitable structure on one of main body, it defines the path that the glider on another of main body is followed.The profile of this track can for example have tooth.In this case, glider can be a gear shape, makes track and glider be similar to the joint of rack and pinion mechanism.Preferably, track is smooth.In this case, glider can be configured to engage rail, makes it slide along the track.Optional is, glider can be a roller, and it rolls along track.For example, glider can be a wheel.
Should be appreciated that the combination that to adopt different bearing types.For example, at least one rigid bearing can be a sliding bearing, and the bearing of at least one resiliency compressible can be a roller bearing.Preferably, the bearing of same type is used for each bearing.Preferably, bearing each all comprise track and the roller that rolls along track.
Can track be set by at least one groove in first main body or second main body.Can track be set by at least one projection in first main body or second main body.Track profile perpendicular to the length direction of track can be crooked, and for example at least a portion is oval, and preferred at least a portion is a circular arc, and is for example semicircle.Track can be arranged to the part of the one of first main body and second main body.For example, track can be an integral body with the main body that it is set.Track also can be arranged to independent parts, and it is installed on one of first main body and second main body.For example, one of first main body and second main body can comprise the bearing that is used for track.Preferably, this bearing is basically along the length supporting track of track.
First main body is with respect to first plane that bearing is restricted to the plane that is arranged essentially parallel to first main body that moves through of second main body.Therefore, first main body and second main body are limited at the bearing that moves through perpendicular to the plane of first main body.Cooperate on first main body and second main body forms the structure that supporting structure that at least one rigid bearing and at least one play flexible bearing can comprise cooperation, and it prevents the relative to each other motion in perpendicular to the plane of first main body of first main body and second main body.For example, supporting structure can have the structure that is bonded with each other, for example projection and channel layout, and it prevents the relative to each other motion in perpendicular to the plane of first main body of first main body and second main body.Optional is, cooperate on first main body and second main body forms supporting structure that at least one rigid bearing and at least one play flexible bearing and can be formed under the effect that preloads and be frictionally engaged, so that prevent the relative to each other motion in perpendicular to the plane of first main body of first main body and second main body by bearing.
According to a second aspect of the invention, provide a kind of optical detection apparatus, it comprises: optical detection apparatus; And according to the foregoing sample positioning stage that is used for the sample to be detected with respect to the optical detection apparatus location.Suitable optical detection apparatus comprises microscope and spectroscope.Therefore, should be appreciated that suitable optics can be object lens, be used for from being placed on the sample mobile phone optical information on the sample positioning stage.
According to a third aspect of the invention we, provide a kind of method of operating sample positioning stage, described sample positioning stage comprises: first main body on plane basically, and sample to be detected can be carried on this first main body; Second main body, described second main body is directly connected on described first main body by extend bearing between described first main body and described second main body, described bearing with described first main body with respect to the limit movement of described second main body to substantial horizontal and with the first substantially parallel plane of the plane of described first main body; And drive system, it operationally makes described first main body and second main body relative to each other towards the first demand relative position motion that receives from location input device, described method comprises the steps: that i. operates described drive system with first pattern, wherein, described drive system relative to each other drives described first main body and second main body in described first plane towards the demand relative position that receives from the electronic position input media, described drive system is for owing to be applied to first main body that the external force on one of first main body and second main body causes and second main body provide first level in the first plane relative motion resistance in first plane; And ii. is in response to the input that receives at described sample positioning stage place, in second pattern, operate described drive system subsequently, wherein, described drive system is for owing to be applied to the resistance that first main body that the external force on one of first main body and second main body causes and the relative motion of second main body at least one degree of freedom provide second level, the resistance of described second level is less than the resistance of described first level, wherein, described drive system is bonded in described first pattern and second pattern.
Preferably, described method also comprises detection the applying of external force on one of first main body and second main body.
Preferably, the operator scheme that also is included in when detecting the applying of external force automatically described drive system of described method changes over second pattern from first pattern.
Preferably, the step that applies of described detection external force comprises the data of the expectation relative motion of expression described first main body and second main body data with the actual relative motion of described first main body of expression and second main body is compared.
Preferably, described method also comprise when described actual relative motion and described expectation relative motion at the fixed time length not simultaneously the operator scheme of described drive system is not changed over second pattern from first pattern.
Preferably, the step of operation of drive system comprises that drive system is applied clean voltage arrives maximum net voltage in first pattern.
Preferably, the step of operation of drive system does not comprise drive system is applied clean voltage in second pattern.
Preferably, the clean voltage that described method also comprises monitoring and applied, and work as the clean voltage that is applied and apply length not simultaneously predetermined when being in its maximum net voltage and in described actual relative motion and described expectation relative motion, the operator scheme of described drive system is changed over second pattern from first pattern.
Operator scheme with described drive system when preferably, described method also is included in and detects external force and remove changes over first pattern from second pattern.
According to the fourth aspect of this law, a kind of sample positioning stage is provided, it is used for the sample to be detected with respect to optical detection apparatus location, and described sample positioning stage comprises: first main body on plane basically, sample to be detected can be carried on this first main body; Second main body, described second main body is directly connected on described first main body by extend bearing between described first main body and described second main body, and described bearing arrives the limit movement of described first main body with respect to described second main body and the first substantially parallel plane of the plane of described first main body; Drive system, it can first pattern be operated, so that described first main body and second main body are relative to each other driven towards the demand relative position that receives from the electronic position input media in described first plane; And selector switch, it is configured to detect external force applying on first plane on first main body, and the operator scheme with described drive system when detecting the applying of external force changes over second pattern from first pattern, wherein, in described second pattern, described drive system is than the littler resistance of relative motion that provides in first pattern for first main body that causes by the external force that is applied on described first main body and second main body.
The application has also described sports equipment, and it comprises: first main body; Second main body, it has track, and described second main body is connected on described first main body, makes described first main body and second main body relative to each other to move; Driver element, it has motor body and driving shaft, and at least a portion of described driving shaft exposes and is used for engaging with track friction, makes driving shaft cause first main body and the second main body relative motion around the rotation of its axis; And bias mechanism, its exposure at first main body and driving shaft be used for and the track friction engaging portion between act on engage so that driving shaft is biased into track friction.
The application has also described the platform assembly, and it comprises: first main body, and it has track; Second main body, described second main body is configured to be attached on described first main body, makes described first main body and second main body relative to each other to move; Glider, it is connected with described first main body, is used for cooperating with described track when assembling, so that be convenient to described first main body and the second main body relative motion; And the mechanism of elastically deformable, it can be out of shape so that act between second main body and the glider, make and when first main body and second main body fit together, glider to be biased into track, wherein, the mechanism of described elastically deformable is configured to plastic yield when described first main body and second main body fit together.Therefore, preferably, this assembly is constructed such that when proper first main body and second main body fitted together, the power in the mechanism of elastically deformable made it be deformed above its yield point.Therefore, when first main body and second main body were opened, the more Kubo of elastically deformable was held some distortion, can not get back to shape and position before its assembling.The mechanism of elastically deformable can be set to the parts that separate separately with second main body.For example, the mechanism of elastically deformable can be a spring assembly, volute spring for example, and it acts between second main body and the glider.In this case, glider can be connected on second main body by arm, so that support glider.This arm can be hinged on second main body, so that allow arm and glider to move with respect to second main body.Optionally, arm can be out of shape, so that allow arm and glider to move with respect to second main body.Preferably, the mechanism of second main body and elastically deformable forms an integrated member.More preferably, the mechanism of second main body and elastically deformable is formed by identical materials.This can reduce the complicacy of platform assembly, because it has reduced the quantity of required parts.This can reduce manufacturing cost, and can improve the reliability of platform.
Description of drawings
Below will the present invention exemplarily be described by the reference accompanying drawing.Wherein:
Fig. 1 has shown the skeleton view that has according to the optical detection apparatus of sample positioning stage of the present invention;
Fig. 2 has shown the side view of optical detection apparatus shown in Figure 1;
Fig. 3 has demonstrated the skeleton view of the plate of sample positioning stage shown in Figure 1;
Fig. 4 has shown the skeleton view of the downside of sample positioning stage shown in Figure 1, and shows first carriage and plate;
Fig. 5 a and 5b have demonstrated the planimetric map and the skeleton view of carriage shown in Figure 4;
Fig. 6 a has shown the skeleton view of the downside of the sample positioning stage shown in Fig. 1, and shows first carriage, second carriage and plate;
Fig. 6 b has demonstrated the skeleton view of the top side of second carriage separately;
Fig. 7 has shown the detailed view of the driving mechanism of installing in the sample positioning stage shown in Figure 1;
Fig. 8 a and 8b have demonstrated the skeleton view of driving mechanism shown in Figure 7;
Fig. 9 has shown the skeleton view of the supporting member of driving mechanism shown in Figure 7;
Figure 10 schematically illustrates the distortion that the glider of the carriage of sample positioning stage is installed;
Figure 11 schematically illustrates the control system that is connected with the sample positioning stage of the present invention that follows up and the explanatory view of input media;
Figure 12 shows the process flow diagram that the method for module is kept in the position of operating control system shown in Figure 11;
Figure 13 shows the collision of operation control system shown in Figure 11/the pull process flow diagram of the method for detection module;
Figure 14 shows the basiscopic perspective view according to second embodiment of sample positioning stage of the present invention;
Figure 15 a shows the downside synoptic diagram of the bogie wheel of first and second carriages shown in second guide rod, driving shaft and Fig. 1 to 14; And
Figure 15 b shows the schematic cross sectional views of driving shaft shown in Figure 15 a and guide rod;
Figure 15 c shows the cut-open view of bogie wheel shown in Figure 15 a and guide rod.
Embodiment
Referring now to Fig. 1 and 2, show optical detection apparatus 2, it comprises the optical detection apparatus of sample positioning stage 4 (hereinafter referred to as platform 4) and microscope 6 forms.
Should be appreciated that optical detection apparatus must not be a microscope, it can be to be suitable for detecting any device that is placed on the platform 4.For example, pick-up unit can be a spectroscope.In addition, should be appreciated that at all there is not optical detection apparatus.For example, platform 4 can be used for supporting the sample 8 for the treatment of that naked eyes detect.
With reference to Fig. 2-5, platform comprises plate 18, first carriage 20 and second carriage 22.Should be appreciated that sample positioning stage 4 exemplary plate 18 horizontal location that are constructed such that.
A corner that is essentially columniform handle 40 slave plates 18 is sagging.Handle 40 is arranged on the side away from arm 16 of plate.This helps to be easy near handle 40.Groove 42 is arranged in the upper surface 24 of plate 18, is used to receive user's opposing thumb.Handle 40 and groove 42 are convenient to user's grasping plate 18.
The primary importance measurement mechanism is arranged to the form of first rule (Fig. 4 shows its part), and it is arranged on the downside of plate 18, and can read by first read head 33 (shown in Fig. 5 a and 5b) that is installed on first carriage 20.First read head 33 is electrically connected with control system by the line in the cable 146 (not showing), and can output signal, and this signal can be made by control system and be used for determining the position of plate 18 with respect to first carriage 20.Suitable rule is that the model that can obtain from Renishaw PLC is the rule product of RGS40.Suitable read head is that the model that can obtain from Renishaw PLC is the read head product on sale of RGH34.
With reference to Fig. 4,5,6a and 6b, first carriage 20 has main body 21, and the shape and size of this main body 21 make it be slidingly matched between first edge 28 of plate 18 and second edge 30.
The main body 21 of first carriage 20 has elongated perforate 64, and a plurality of part with the degree of depth that reduces, and for example is expressed as the part of mark 65.These perforates 64 allow as the following more detailed description flash of light preceding an earthquake passes through main body 21, and the degree of depth part 65 that reduces has reduced the weight of main body 21.
Second place measurement mechanism is set to the form of second rule, and it is arranged on the downside of first carriage 20, and can read by second read head 37 that is installed on second carriage 22.Second read head 37 is electrically connected with control system 200 by the line in the cable 146 (not showing), and can output signal, and this signal can be made by control system 200 and be used for determining the position of first carriage 20 with respect to second carriage 22.Suitable rule is that the model that can obtain from Renishaw PLC is the rule product of RGS40.Suitable read head is that the model that can obtain from Renishaw PLC is the read head product on sale of RGH34.
The 3rd edge 66 and the 4th edge 68 are sagging from main body 21, and be equipped with the first round 44, second take turns 46 and first and second sides of third round 48 between extend.The 3rd edge 66 has the 3rd elongate grooves 70 of extending along its length, is used to receive the 3rd guide rod 72.The 4th edge 68 has the 4th elongate grooves 74 of extending along its length, is used to receive the 4th guide rod 78.The 3rd guide rod 72 and the 4th guide rod 78 remain in the 3rd elongate grooves 70 and the 4th elongate grooves 74.
First and second rigid bearings are designated as 43 and 45, are arranged between the plate 18 and first carriage 20 in a side of platform 4.First plays flexible bearing is expressed as 47, and it is being arranged on opposite side of platform 4 between the plate 18 and first carriage 20. Bearing 43,45,47 is convenient to make plate 18 and first carriage 20 relative motion on directions X.
With more detailed description, bearing 43,45 and 47 is provided by the bearing arrangement that is arranged on the cooperation on plate 18 and the carriage 20 below.
First rigid wheel 44 and second rigid wheel 46 are installed in first circular groove 58 and second circular groove 60 in the main body 21, and its part extends beyond the border of main body 21.Come to this when sample positioning stage such as Fig. 4 assemble, first rigid wheel 44 and second rigid wheel 46 engage with first guide rod 34, and first rigid bearing 43 and second rigid bearing 45 are provided thus.Similar, the 3rd rigid wheel 48 is installed in the 3rd circular groove 62 in the main body 21, and the part of the 3rd rigid wheel 48 extends beyond the border of main body 21.When sample positioning stage was assembled, the 3rd rigid wheel 48 engaged with second guide rod 38, provided first to play flexible bearing 47 thus.
The plate 18 and first carriage 20 be constructed such that proper they when fitting together, on the wheel on first carriage 20 and the power on the respective guide bar on the check-out console low as to be enough to make and to win carriage 20 along guide rod free movement plate 18 in, but highly must be enough to make very close to each other on every other size is tieed up between the plate 18 and first carriage 20.
Each all has round hole first rigid wheel 44, second rigid wheel 46 and the 3rd rigid wheel 48, and these interference engagement of taking turns by its perforate and first square bolt 52, the second square bolt 54 and third party's shape bolt 56 are installed in first circular groove 58, second circular groove 60 and the 3rd circular groove 62.The use of round hole and square bolt makes to form accurately and reliably between wheel and bolt and installs.First rigid wheel 44, second rigid wheel 46 and the 3rd rigid wheel 48 comprise makes that they can be with respect to the bearing of bolt rotation.The periphery edge of first rigid wheel 44, second rigid wheel 46 and the 3rd rigid wheel 48 has groove, makes these take turns and can partly hold its corresponding guide rod.This has prevented that wheel and carriage from moving on the Z direction with respect to plate, promptly in the plane motion perpendicular to plate 18.
Specifically, the 3rd bolt 56 is installed on the planar substrates 82, and this planar substrates 82 is connected with main body 21 with the 4th arm 90 by first arm 84, second arm 86 and the 3rd arm 88 that limits first perforate 92, second perforate 94 and the 3rd perforate 96.First arm 84, second arm 86 and the 3rd arm 88 and the 4th arm 90 elastically deformables, it allows planar substrates 82 and bolt 56 and third round 48 mounted thereto to move in the main body 21 in the direction along arrow A under the effect that is applied to the power on the planar substrates 82 of arrow A direction.First arm 84, second arm 86 and the 3rd arm 88 and the 4th arm 90 are configured to along the distortion shown in Figure 10 (it shows the amplification of the amount that arm in the present embodiment can be out of shape) of its length.
In described embodiment, platform 4 is constructed such that the yield stress of the power that is applied on the planar substrates 82 (causing with power on the third round 48 that second guide rod 38 engages by third round 48) greater than first arm 84, second arm 86 and the 3rd arm 88 and the 4th arm 90.Therefore, first arm 84, second arm 86 and the 3rd arm 88 and the 4th arm 90 plastic yield when plate 18 and 20 assemblings of first carriage.
Have main body 23 with reference to Fig. 6 a, 6b and 7, the second carriages 22, the shape and size of this main body 23 make it be slidingly matched between the 3rd edge 66 of first carriage 20 and the 4th edge 68.Second carriage 22 is consistent with first carriage 20 basically, except the shape of its perforate 67 (as described in more detail below, as to allow light by second carriage 22) is circle rather than elongated.This is fine, because second carriage 22 fixes with respect to light source, and first carriage 20 can move on the Y direction with respect to first carriage 20.
Third and fourth rigid bearing is designated as 81 and 83, is arranged between first carriage 20 and second carriage 22 in a side of platform 4.Second plays flexible bearing is expressed as 85, and it is being arranged between first carriage 20 and second carriage 22 on relative side of side with the 3rd rigid bearing 81 and the 4th rigid bearing 83 are set of platform 4. Bearing 81,83,85 is convenient to make win carriage 20 and second carriage 22 relative motion on the Y direction.
With more detailed description, bearing 81,83,85 is provided by the bearing arrangement that the cooperation on first carriage 20 and second carriage 22 is set below.
The 4th guide rod 78 on first carriage 20 is provided for the supporting part of the supporting structure on first carriage 20 of the 3rd rigid bearing 81 and the 4th rigid bearing 83.The 3rd guide rod 72 on first carriage 20 is provided for second supporting part that plays the supporting structure on first carriage 20 of flexible bearing 85.
Similar with first carriage 20, second carriage 22 has first rigid wheel 77 and second rigid wheel 79 of spaced apart location on first side of second carriage 22.First rigid wheel 77 and second rigid wheel 79 are provided for the supporting part of the supporting structure on second carriage 22 of the 3rd rigid bearing 81 and the 4th rigid bearing 83.Second carriage 22 also has the 3rd rigid wheel 80 on second side relative with first side that is positioned at second carriage 22.The 3rd rigid wheel 80 makes it be positioned at first rigid wheel 77 and second rigid wheel, 79 centres on first side along the length location of second side.The 3rd rigid wheel 80 is provided for second supporting part that plays the supporting structure on second carriage 22 of flexible bearing 85.
First rigid wheel 77 and second rigid wheel 79 are installed on second carriage 22, and they can not be with respect to main body 23 motions.By contrast, the 3rd rigid wheel 80 is installed on second carriage 22, and it can move on the direction perpendicular to the length of the 4th guide rod 72 of plate 18 with respect to main body 23 when sample positioning stage 4 is assembled.
Specifically, the 3rd rigid wheel 80 is installed on the bolt 87, this bolt 87 is installed on the planar substrates 89, and this planar substrates 89 is connected with main body 23 with the 4th arm 97 by the first arm 91, second arm 93 and the 3rd arm 95 that limits first perforate 99, second perforate 101 and the 3rd perforate 103.The first arm 91, second arm 93 and the 3rd arm 95 and the 4th arm 97 can be along its length elastic deformations, and it allows planar substrates 89 and bolt 87 and third round 80 mounted thereto to move in the main body 23 in the direction along arrow B under the effect that is applied to the power on the planar substrates 89 of arrow B direction.
In described embodiment, platform 4 is constructed such that the yield stress of the power that is applied on the planar substrates 89 (causing by power on third round 80 and the third round 80 that the 3rd guide rod 72 engages) greater than the first arm 91, second arm 93 and the 3rd arm 95 and the 4th arm 97.Therefore, the first arm 91, second arm 93 and the 3rd arm 95 and the 4th arm 97 plastic yield when first carriage 20 and 22 assemblings of second carriage.
With reference to Fig. 6 a, 6b and 7, be used for being installed near the third round 48 that is positioned at first carriage on first carriage 20, and be frictionally engaged with second guide rod 38 with respect to first driver element 98 that sample positioning stage drives first carriage 20 along directions X.Be used for respect to second driver element 100 that first carriage 20 drives second carriage 22 along the Y direction be installed on second carriage 22 take turns 79 in the first round 77 and second of second carriage between near, and be frictionally engaged with the 4th guide rod 78.First driver element 98 is identical with second driver element 100.
Have been found that being provided with and on the side of rigid wheel driver element is set and positioning measuring device has improved sample locating accuracy and repeatability.Figure 14 shows the embodiment of platform 1004, and with consistent referring to figs. 1 through 13 platforms of describing 4, similarly part has similar Reference numeral basically for it.But, not that first driver element 98 that will provide the relative motion between the plate 18 and first carriage 20 is arranged on bullet flexible bearing (not shown) one side, it is arranged on rigid bearing (only visible first rigid bearing of figure 43, the second rigid bearings the are more unclear) side.With the same, provide second driver element 100 of the relative motion between first carriage 20 and second carriage 22 also to be arranged on rigid bearing (the only visible first rigid bearing 83) side referring to figs. 1 through the platform 4 of 13 embodiments of describing.
With reference to Fig. 7-9, the second driver element 100 comprise motor body 102 and from motor body 102 extend can be by the driving shaft 104 of motor body 102 driven in rotation.Motor body 102 is the direct CD-ROM drive motor of 12 volts DC.Motor body 102 is passed through the cable (not shown) from power supply (not shown) received energy.
Driving shaft 104 has first tapering part 106 and second tapering part (not showing), and each part converges to the diameter parts that reduces towards the centre of the length of driving shaft.When sample positioning stage 4 was assembled, first tapering part 106 contacted the 4th guide rod 78 with second tapering part.Therefore, have two contact points between driving shaft 104 and the guide rod 78.To shown in the 15c, each all is positioned at the first make contact 105 and second contact point 107 on the supporting contact plane shown in the dotted line 109 as Figure 15 a, and the first round 77 and second that this plane comprises second carriage 22 is taken turns the contact point between the 79 and the 4th guide rod 78.Specifically, contact point 105 between the downside of driving shaft 104 and guide rod 78 is positioned at down on the side bearing osculatory, this osculatory comprise contact point 111 and second between the downside of the first round 77 and guide rod take turns 79 and the downside of guide rod between contact point 113.In addition, contact point 107 between the upside of driving shaft 104 and guide rod 78 is positioned on the side bearing osculatory, this osculatory comprise contact point 115 and second between the upside of the first round 77 and guide rod take turns 79 and the upside of guide rod between the contact point (not shown).
First end of arm 132 is fixed on the head 130, and arm 132 has perforate 141 at second end away from head 130.Bias mechanism 126 is by extending through the perforate 141 in the arm 132 and being connected on the main body 23 with the bolt 142 of engage threaded in the main body 23.Arm 132 is flexible, makes head 130 to be biased on second guide rod 78 by spring 144.
In order to assemble sample positioning stage 4, first carriage 20 slides in the plate 18, make the first round 44 and second take turns 46 and engage first guide rod 34, and make the driving shaft 104 of third round 48 and first driver element 98 (it is installed on first carriage 20 in aforesaid mode) engage second guide rod 38.
The size of the plate 18 and first carriage 20 may be received in the plate 18 carriage 20 of winning, and first arm 84, second arm 86 and the 3rd arm 88 and 90 distortion of the 4th arm make third round 48 be compressed in the main body 21 of first carriage 20.In addition, in described embodiment, first arm 84, second arm 86 and the 3rd arm 88 and the 4th arm 90 deformation extents make first arm 84, second arm 86 and the 3rd arm 88 and 90 plastic yield of the 4th arm.Therefore, when first carriage 20 was received in the plate 18, first arm 84, second arm 86 and the 3rd arm 88 and the 4th arm 90 were biased into third round 48 on second guide rod 38.
In addition, spring 144 by first driver element 98 driving shaft 104 and the interaction between second guide rod 38 of plate 18 be compressed, make driving shaft 104 be biased on second guide rod 38.
The light source (not shown) can be positioned at the below of sample positioning stage 4.Can pass perforate 67 in second carriage 22, perforate 65 in first carriage and the perforate 27 in the plate 18 from the light of light source, so that illuminate the sample 8 that is positioned on the plate 18.
As shown in figure 11, sample positioning stage 4 is linked on the control system 200 by input/output line 202 (in the cable 46).Control system 200 comprises that initialization module 204, position keep module (PMM) 206 and collide/pull detection module 208.Control system 200 is linked on the input media 210 by input/output line 212.
Basic operation below with reference to Figure 12 description control system 200.The position keeps module 206 to begin in step 300 when control system 200 at first is opened connection.One starting, position keep module 206 to carry out initialization procedure in step 302.This comprises from initialization module 204 and calls calibration procedure, is used for calibration sample positioning table 4.In case finish calibration procedure, the position keep module 206 dash receivers 18 with respect to first carriage 20 at the current location of directions X and first carriage 20 (so plate 18) in the current location of Y direction with respect to second carriage 22, and these data are put into the current location variable.As the part of initialization procedure 302, the position keeps module 206 that the demand location variable is set, and its initial value is identical with the current location variable.
Can change the demand location variable via the new demand position of input media 210 inputs by the user.Specifically, the user can be input to demand X position and demand Y position in the control system by input media 210.In described embodiment, the user imports absolute demand position (that is, plate 18 being moved to a certain X/Y position).But, should be appreciated that the demand position that is input to control system 200 can be relative position (that is, in X/Y direction upper shifting board 18 somes).
The position keeps the output of module 206 continuous monitorings from first read head 33 and second read head 37, and upgrades the current location variable when detecting position change.
In step 304, the position keeps module 206 continuation detections to see whether the demand position is identical with current location.If not, then keep module 206 to apply at least one in the motor body 102 of first driver element 98 and second driver element 100 of DC output voltage (" V ") as required, so that towards demand position movable plate 18 in step 306 position.Input voltage V can be increased to maximum output voltage, so that progressively towards demand position movable plate 18.When plate 18 was moved to, the current location variable is continued to be upgraded, so that react current physical location.This process continues, and knows that the current location variable is identical with the demand location variable.
The user is by being applied to manual dragging plate 18 on the plate 18 with power along X and/or Y direction.The user can be applied to this power on the plate 18 by operating grip 40.
Collide/pull detection module 208 and keep module 206 parallel runnings, be used for determining whether plate 18 is manually pulled by the user, and perhaps whether plate 18 has bumped in object with the position.Detect this situation if collide/pull detection module 208, then the motor body 102 of its first driver element 98 that is and/or second driver element 100 is stopped using, and drives so that stop their opposing external force.The operation of colliding/pulling detection module 208 is described below with reference to Figure 13.
When control system is opened connection, collide/pull detection module 208 and begin in step 500.In step 502, the output voltage V that keeps module 206 to apply in step 306 by the position is continued monitoring and is seen whether it is in maximum horizontal.
As shown in figure 12, when plate 18 and object collision, when perhaps it is pulled away from the demand position, the position keeps module 206 attempts to be applied to output voltage (" V ") on the motor body 102 of first driver element 98 and/or second driver element 100 by increase to total power, more approaches the demand position so that current location taken to.Therefore, only in current location and demand position not simultaneously output voltage V just be in its maximum horizontal.
If output voltage V is in its maximum voltage, then process proceeds to step 504.In step 504, site error is recorded among the PositionError0, and timer (" t ") is activated.Site error is the difference between demand position and the current location.
Control proceeds to step 506, and wherein timer continues increment, arrives half of maximal value (" T ") up to it.In described embodiment, " T " is 25ms.Therefore, after about 12.5ms, determine whether that output voltage V also is in its maximal value.If output voltage V no longer is in its maximum horizontal, mean that then the external force that is applied on the plate 18 is removed, so process restarts.
If output V also is in its maximum horizontal, then control proceeds to step 508, and wherein current location error log is in variable PositionError1.
In step 510, timer continues increment, knows that it arrives its maximum of T.Therefore, after about 25ms, determine whether that output voltage V also is in its maximum horizontal from timer initiation.If output voltage V no longer is in its maximum horizontal, mean that then the external force that is applied on the plate 18 is removed, and therefore process restarts.
If output voltage V still is in its maximum horizontal, then control continues road step 512, and wherein current location error log is in variable PositionError2.
In step 514, determine whether that external force just is being applied on the plate 18.If sample positioning stage 4 is with object collision and stop, then do not take place obviously to change in the position that timer t just is being activated and timer t arrives plate between the maximum of T.Therefore, if the difference between the position of the position of PositionError0 and PositionError2 less than predetermined maximum mobile threshold X, then this method proceeds to step 518.Predetermined maximum mobile threshold X makes that collision can also be detected, even plate 18 moves little distance between the record of PositionError0 and PositionError2.In described embodiment, predetermined maximum mobile threshold X is 100 μ m.
If do not determine that in this method of step 514 plate 18 has bumped in object, then this method proceeds to step 516, determines whether that wherein plate 18 is manually pulled.
In step 514, determine whether below in each establishment:
0＞PositionError0＞PositionError1＞PositionError2
0＜PositionError0＜PositionError1＜PositionError2
No matter when left its demand position as long as plate 18 pulls, these conditions are set up.If the arbitrary establishment of these conditions, then process proceeds to step 518.If neither one is set up, then process turns back to step 502.
In step 518, motor body 102 is closed.This is to cause in the following way: collide/pull detection module 208 and interrupted that the position keeps module 206 and the DC output voltage V that will be applied on the driver element is reduced to zero.Therefore, motor body 102 will no longer attempt plate 18 is driven into the demand position, and driver element 100 can easily be returned by the user and drive.
Control proceeds to step 520 then, and wherein timer Voff is activated.Timer Voff has one second maximal value.In step 522, determine whether that plate 18 is static.If check-out console is not static, then control turns back to step 520, and timer Voff is reset to zero.
If determine that plate 18 is static, then control proceeds to step 526, determines whether that wherein timer Voff has arrived its maximal value (promptly a second).If no, then control turns back to step 522, and makes in this process, does not have 200 μ s to carry out a step 524 after timer Voff is activated.If timer Voff has arrived its maximal value (promptly a second), then control proceeds to step 528, and wherein the demand location variable is set to current location, and the position keeps module 206 to be restarted (from step 304).
Independently carry out for first driver element 98 and second driver element 100 with reference to the process that accompanying drawing 13 is described.
Other mechanism except said method of should be appreciated that can be used for determining when closes motor 100 and 104, so that can not resist external force drive plate 18 to the demand position.For example, can on platform 4, switch be set, be used to make the user attempting drive plate to the pattern of demand position with freely allow the user to return to drive driver element 98 and driver element 100 so that switching operation modes between the pattern of manual positioning plate 18.This switch can be set, for example on platform 4, button be set.For example, button can be arranged on the position of the groove 42 on the plate 18.
Claims (30)
1. sample positioning stage, it is used for respect to optical detection apparatus location sample to be detected, and described sample positioning stage comprises:
Basically first main body on plane, sample to be detected can be carried on this first main body;
Second main body, described second main body is directly connected on described first main body by the bearing that extends between described first main body and described second main body, and described bearing arrives the limit movement of described first main body with respect to described second main body and the first substantially parallel plane of the plane of described first main body;
Drive system, it is optionally with first pattern and the operation of second pattern, in described first pattern, described drive system relative to each other drives described first main body and second main body in described first plane towards the demand relative position that receives from the electronic position input media, in described second pattern, described drive system is than providing in first pattern for first main body that causes by the external force that is applied on described first main body and second main body at the littler resistance of the relative motion on first plane, and described drive system is bonded in described first pattern and second pattern; And
Selector switch, described selector switch operationally change over second pattern with operator scheme from first pattern in response to the input that receives at described sample positioning stage place.
2. sample positioning stage according to claim 1, it is characterized in that described drive system is configured to: since be applied to first main body and second main body at least one plane at least one on first main body that causes of external force and any relative motion of second main body make described drive system in second pattern, manually be returned to drive.
3. according to claim 1 or 2 described sample positioning stages, it is characterized in that the operator scheme with drive system when described selector switch is formed at and detects external force and be applied on one of first main body and second main body changes over second pattern from first pattern at least one plane.
4. sample positioning stage according to claim 3 is characterized in that described selector switch comprises sensor, and described sensor is configured to detect the relative motion of described first main body and second main body.
5. sample positioning stage according to claim 4, it is characterized in that, described selector switch be configured to the data of the relative motion of the expectation of expression first main body and second main body with from the data of the actual relative motion of described first main body of the expression of sensor and second main body relatively, and the operator scheme that can not return the drive system of driving simultaneously when actual relative motion and expectation relative motion changes over second pattern from first pattern.
6. sample positioning stage according to claim 2 is characterized in that, described drive system is formed at not stop in second pattern manually to return and drives.
7. sample positioning stage according to claim 1, it is characterized in that, described drive system comprises motor and power supply, and the clean power that makes described motor apply by described power supply is controlled to the resistance of the relative motion that first main body that causes for external force and second main body are provided.
8. sample positioning stage according to claim 7 is characterized in that, in described second pattern, described motor does not apply clean power.
9. sample positioning stage according to claim 7, it is characterized in that, in described first pattern, described power supply is configured to when the actual relative motion of described first main body and second main body and wishes that relative motion will not be increased to maximum net power by the clean power that motor applies simultaneously.
10. sample positioning stage according to claim 9, it is characterized in that, described selector switch is configured to monitor the clean power that is applied by motor, and is configured to simultaneously the operator scheme of drive system not changed over second pattern from first pattern in preset time length when the clean power that applies is in maximum net power and in definite actual relative motion and expectation relative motion.
11. sample positioning stage according to claim 3 is characterized in that, the operator scheme with described drive system when described selector switch is formed at and detects external force and be removed changes over first pattern from second pattern.
12. sample positioning stage according to claim 1, it is characterized in that, described drive system is configured to: when external force is removed, only when receiving the second demand relative position, make described first main body and second main body relative to each other move by drive system from the electronic position input media.
13. sample positioning stage according to claim 1, it is characterized in that, with operator scheme when second operator scheme changes over first operator scheme, described drive system with described first main body and second main body drive towards described demand relative position be provided as the current relative position of described first main body and second main body.
14. sample positioning stage according to claim 1 is characterized in that, described selector switch comprises switch, and the user can make described switch with respect to described first main body and the motion of second main body, so that operator scheme is changed over second pattern from first pattern.
15. sample positioning stage according to claim 1 is characterized in that, at least one in described first main body and second main body comprises the handle that is used to be convenient to described first main body of manual control and second main body.
16. sample positioning stage according to claim 1 is characterized in that, described first main body is a plate, and described second main body is a carriage.
17. sample positioning stage according to claim 1 is characterized in that, described first main body and second main body can relative to each other be moved on linear dimension.
18. an optical detection apparatus, it comprises:
Optical detection apparatus; And
According to the described sample positioning stage that is used for the sample to be detected of each claim in the aforementioned claim with respect to the optical detection apparatus location.
19. a method of operating sample positioning stage, described sample positioning stage comprises: first main body on plane basically, and sample to be detected can be carried on this first main body; Second main body, described second main body is directly connected on described first main body by the bearing that extends between described first main body and described second main body, described bearing with described first main body with respect to the limit movement of described second main body to substantial horizontal and with the first substantially parallel plane of the plane of described first main body; And drive system, it operationally makes described first main body and second main body relative to each other towards the first demand relative position motion that receives from an electronic position input media, described method comprises:
I. operate described drive system with first pattern, wherein, described drive system relative to each other drives described first main body and second main body in described first plane towards the demand relative position that receives from described electronic position input media, described drive system is for owing to be applied to first main body that the external force on one of first main body and second main body causes and second main body provide first level in the first plane relative motion resistance in first plane; And
Ii. in response to the input that receives at described sample positioning stage place, in second pattern, operate described drive system subsequently, in described second pattern, described drive system is for owing to be applied to the resistance that first main body that the external force on one of first main body and second main body causes and the relative motion of second main body at least one degree of freedom provide second level, the resistance of described second level is less than the resistance of described first level
Wherein, described drive system is bonded in described first pattern and second pattern.
20. method according to claim 19 is characterized in that, owing to be applied to first main body that the external force on one of described first main body and second main body causes and the relative motion of second main body, described drive system is manually returned in second pattern and is driven.
21., it is characterized in that described method also comprises detection external force applying at least one degree of freedom on one of first main body and second main body according to claim 19 or 20 described methods.
22. method according to claim 21 is characterized in that, the operator scheme that described method also is included in when detecting the applying of external force automatically described drive system changes over second pattern from first pattern.
23. method according to claim 21, it is characterized in that the step that applies of described detection external force comprises that the data with the actual relative motion of the data of the expectation relative motion of described first main body of expression and second main body and described first main body of expression and second main body compare.
24. method according to claim 23, it is characterized in that, described method also comprise when described actual relative motion and described expectation relative motion at the fixed time length not simultaneously the operator scheme of described drive system is not changed over second pattern from first pattern.
25. method according to claim 19 is characterized in that, the step of operation of drive system comprises that drive system is applied clean voltage arrives maximum net voltage in first pattern.
26. method according to claim 25 is characterized in that, the step of operation of drive system does not comprise drive system is applied clean voltage in second pattern.
27. method according to claim 24, it is characterized in that, the clean voltage that described method also comprises monitoring and applied, and work as the clean voltage that is applied when being in its maximum net voltage and described actual relative motion and described expectation relative motion at the fixed time length not simultaneously the operator scheme of described drive system is not changed over second pattern from first pattern.
28. method according to claim 19 is characterized in that, the operator scheme with described drive system when described method also is included in and detects external force and remove changes over first pattern from second pattern.
29. method according to claim 19, it is characterized in that described method only also comprises when receiving the second demand relative position from the electronic position input media just subsequently operation of drive system so that win main body and second main body are relative to each other moved.
30. method according to claim 19, it is characterized in that, described method also be included in operator scheme described drive system made when second operator scheme changes over first operator scheme described first main body and second main body be driven towards described demand relative position be provided as the current relative position of described first main body and second main body.
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0700507.7 | 2007-01-11 | ||
| GB0700507A GB0700507D0 (en) | 2007-01-11 | 2007-01-11 | A Movement Apparatus |
| GB0700519A GB0700519D0 (en) | 2007-01-11 | 2007-01-11 | A stage apparatus and method of operation |
| GB0700506.9 | 2007-01-11 | ||
| GB0700519.2 | 2007-01-11 | ||
| GB0700506A GB0700506D0 (en) | 2007-01-11 | 2007-01-11 | A stage kit |
| PCT/GB2008/000089 WO2008084242A1 (en) | 2007-01-11 | 2008-01-11 | A sample positioning stage and method of operation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101583896A CN101583896A (en) | 2009-11-18 |
| CN101583896B true CN101583896B (en) | 2011-07-06 |
Family
ID=37809783
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008800017626A Pending CN101578543A (en) | 2007-01-11 | 2008-01-11 | A sample positioning apparatus |
| CN2008800025374A Active CN101583896B (en) | 2007-01-11 | 2008-01-11 | A sample positioning stage and method of operation |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008800017626A Pending CN101578543A (en) | 2007-01-11 | 2008-01-11 | A sample positioning apparatus |
Country Status (2)
| Country | Link |
|---|---|
| CN (2) | CN101578543A (en) |
| GB (1) | GB0700507D0 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103323940B (en) * | 2013-05-29 | 2015-04-15 | 哈尔滨工业大学 | Electric translation device based on two-photon microscope and two-dimensional spiral scanning method thereof |
| CN106940471B (en) * | 2017-04-13 | 2019-05-03 | 梧州学院 | A kind of intelligent microscope of intelligent microscope lifting mechanism for objective table and its composition |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1098575A (en) * | 1965-07-07 | 1968-01-10 | Ti Group Services Ltd | Apparatus for use in studying the surface of a specimen |
| US4189953A (en) * | 1977-04-15 | 1980-02-26 | Semprex Corporation | Drive system for mensuration stages or the like |
| GB2201809A (en) * | 1986-12-09 | 1988-09-07 | Microworld Of Inner Space | Improvements in or relating to display means |
| US5228357A (en) * | 1990-05-28 | 1993-07-20 | Olympus Optical Co., Ltd. | Stage driving device for optical examining apparatus |
| CN1254098A (en) * | 1998-11-16 | 2000-05-24 | 奥林巴斯光学工业株式会社 | Object stage for microscope |
| CN1670562A (en) * | 2004-03-17 | 2005-09-21 | 阿尔卑斯电气株式会社 | Positioning method and device |
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2007
- 2007-01-11 GB GB0700507A patent/GB0700507D0/en not_active Ceased
-
2008
- 2008-01-11 CN CNA2008800017626A patent/CN101578543A/en active Pending
- 2008-01-11 CN CN2008800025374A patent/CN101583896B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1098575A (en) * | 1965-07-07 | 1968-01-10 | Ti Group Services Ltd | Apparatus for use in studying the surface of a specimen |
| US4189953A (en) * | 1977-04-15 | 1980-02-26 | Semprex Corporation | Drive system for mensuration stages or the like |
| GB2201809A (en) * | 1986-12-09 | 1988-09-07 | Microworld Of Inner Space | Improvements in or relating to display means |
| US5228357A (en) * | 1990-05-28 | 1993-07-20 | Olympus Optical Co., Ltd. | Stage driving device for optical examining apparatus |
| CN1254098A (en) * | 1998-11-16 | 2000-05-24 | 奥林巴斯光学工业株式会社 | Object stage for microscope |
| CN1670562A (en) * | 2004-03-17 | 2005-09-21 | 阿尔卑斯电气株式会社 | Positioning method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101583896A (en) | 2009-11-18 |
| GB0700507D0 (en) | 2007-02-21 |
| CN101578543A (en) | 2009-11-11 |
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