CN101581886A - Photoetching machine control system - Google Patents
Photoetching machine control system Download PDFInfo
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- CN101581886A CN101581886A CNA2009100535994A CN200910053599A CN101581886A CN 101581886 A CN101581886 A CN 101581886A CN A2009100535994 A CNA2009100535994 A CN A2009100535994A CN 200910053599 A CN200910053599 A CN 200910053599A CN 101581886 A CN101581886 A CN 101581886A
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- control system
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention relates to a photoetching machine control system, comprising a plurality of branch control systems, a plurality of control panels, a master control board, a general control system; wherein, each branch control system is provided with a CPU for controlling the branch control system; the master control panel is connected with a plurality of slave control panels by an open control bus; the general control system controls the branch control systems by the master control panels and the slave control panels; the photoetching machine control system adjusts the number of the slave control panels connected with the master control panels so as to adjust the number of the branch control systems of the photoetching machine control system. The invention features simple structure and relatively good compatibility and expansibility.
Description
Technical field
The present invention relates to a kind of photoetching machine control system.
Background technology
In the control system of litho machine, the control module of each subsystem is to be realized by VME (VersaModule Eurocard) cabinet separately, and is provided with central processing unit (Power PC) in the VME cabinet usually.For realizing operated from a distance to the central processing unit in the VME cabinet, in current industrial design, usually will be connected the control signal of all central processing units on the control integrated circuit board, and realize central processing unit is operated according to set agreement or electric signal.
See also Fig. 1, Fig. 1 is a kind of structural representation of photoetching machine control system of prior art.Described photoetching machine control system 10 comprises the control panel 12 that general control system 11 links to each other with described general control system 11 and the central processing unit 13 of each subsystem.Described central processing unit 13 is connected with described control panel 12 respectively.
Fig. 1 is an example with the photoetching machine control system 10 with 4 subsystems, five external interfaces of described control panel 12 bags, and one of them interface is used for and described general control system 11 communications, and all the other four interfaces are used for central processing unit 13 communications with each subsystem.The advantage of this design is that the structural design of described control panel 12 is simple, does not need complex circuit design and design of control program.
But, when described photoetching machine control system 10 needs upgrade-system or increases the quantity of subsystem, because the quantity of described control panel 12 external interfaces is fixed, the central processing unit 13 of the subsystem that increases newly can't carry out communication with described general control system 11 by the interface of described control panel 12.Therefore, the poor expandability of described photoetching machine control system 10.
When the physical construction of the litho machine that uses described photoetching machine control system 10 redesigns, be subject to new mounting means and installation dimension, described control panel 13 has to carry out the change of corresponding mechanical dimension, cause control panel 13 to be of different sizes with a kind of function, the compatibility of described photoetching machine control system 10 is poor, is unfavorable for reducing the cost of development of described photoetching machine control system 10.
Summary of the invention
For the extendability of the photoetching machine control system that solves prior art and the technical matters of poor compatibility, be necessary to provide a kind of extendability and compatible photoetching machine control system that can increase litho machine.
A kind of photoetching machine control system comprises a plurality of minutes control system, and each branch control system includes a central processing unit that is used to control described minute control system; A plurality of from control panel, each connects the central processing unit of one described minute control system from control panel; One master control board a plurality ofly is connected from control panel with described by the Open Control bus; General control system is by described master control board with describedly control described a plurality of minutes control system from control panel; The quantity that described photoetching machine control system adjustment is connected with described master control board from control panel, thus the quantity of the branch control system of described photoetching machine control system adjusted.
Wherein, described Open Control bus is RS232 bus or RS485 bus or I2C bus or CAN bus.Described master control board comprises a storer, and described master control board is describedly obtained the data of the described central processing unit that connects from control panel from control panel by visiting, and the gained data are recorded in the described storer, for described general control system inquiry.
Describedly be arranged at the integrated circuit board box from control panel, described integrated circuit board box comprises a data line interface and a bus interface, and described data line interface is connected by the central processing unit of data line with described minute control system.Described master control board is arranged in the integrated circuit board box, described integrated circuit board box comprises one first bus interface and one second bus interface, described first bus interface connects described bus interface from control panel integrated circuit board box by described Open Control bus, and described second bus interface is connected with described general control system.
Described bus interface from control panel is arranged at a side of described integrated circuit board box, described integrated circuit board box be provided with a jack with opposing another side, described side, described jack is used to accommodate another contact pin from the bus interface of control panel.First bus interface of described master control board is arranged at a side of described integrated circuit board box, described integrated circuit board box be provided with a jack with opposing another side, described side, jack is used to accommodate the contact pin of described bus interface from control panel.Described photoetching machine control system also comprises a guide rail, describedly is installed on the described guide rail by described jack from the integrated circuit board box of control panel and the integrated circuit board box of described master control board.
Compared with prior art, photoetching machine control system of the present invention comprises master control board and a plurality of from control panel, and described master control board is connected by the Open Control bus from control panel with described.When described photoetching machine control system need increase new subsystem, described newly-increased subsystem inserted described Open Control bus from control panel, described master control board by the described newly-increased subsystem of described Open Control bus access from control panel, and then visit the central processing unit of described newly-increased subsystem, be that described photoetching machine control system is by adjusting the quantity from control panel that is connected with described master control board, adjust the quantity of the branch control system of described photoetching machine control system, thereby improved the compatibility and the extendability of described photoetching machine control system.The master control board of photoetching machine control system of the present invention and all be arranged on the integrated circuit board box from control panel, the bus interface of described integrated circuit board box from control panel is inserted the socket of the integrated circuit board box of described master control board, thereby realizes that described master control board is connected with described bus from control panel.When the physical construction of the subsystem of described photoetching machine control system changes or the interface size of each subsystem when inconsistent, also can realize being connected with the integrated circuit board box of described master control board from control panel by described.Photoetching machine control system of the present invention is easy to assembly, and is little to the dependence of system architecture size.
Description of drawings
Fig. 1 is a kind of structural representation of photoetching machine control system of prior art.
Fig. 2 is the structural representation of photoetching machine control system of the present invention.
Fig. 3 is the perspective view from the first embodiment integrated circuit board box of control panel of photoetching machine control system of the present invention.
Fig. 4 is the perspective view at another visual angle of integrated circuit board box from control panel shown in Figure 3.
Fig. 5 is the perspective view of the guide rail of photoetching machine control system of the present invention.
Fig. 6 is that the integrated circuit board box from control panel of photoetching machine control system of the present invention is installed in the synoptic diagram on the guide rail shown in Figure 5.
Fig. 7 is that the integrated circuit board box from control panel and master control board of photoetching machine control system of the present invention is installed in the synoptic diagram on the guide rail.
Fig. 8 is the perspective view from the second embodiment integrated circuit board box of control panel of photoetching machine control system of the present invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, the present invention is described in further detail below in conjunction with accompanying drawing.
See also Fig. 2, Fig. 2 is the structural representation of photoetching machine control system of the present invention.Described photoetching machine control system 20 comprises general control system 21, a master control board 22, a plurality of from control panel 23 and a plurality of minutes control system.Described general control system 21 is by described master control board 22 and described from described a plurality of minutes control system of control panel 23 controls.Each branch control system includes a central processing unit 24 that is used to control described minute control system.Described master control board 22 a plurality ofly is connected from control panel 23 with described by the Open Control bus, described photoetching machine control system 20 is adjusted the quantity of the branch control system of described photoetching machine control system 20 by adjusting the quantity from control panel 23 that is connected with described master control board 22.In the present invention, described Open Control bus is RS232 bus or RS485 bus or I2C bus or CAN bus.Described central processing unit 24 from control panel 23 and described minute control system is connected by data line, and described master control board 22 and described general control system 20 are connected by bus.
See also Fig. 3, Fig. 3 is the perspective view from the first embodiment integrated circuit board box of control panel 23 of photoetching machine control system 20 of the present invention.Describedly be arranged at the integrated circuit board box from control panel 23, described integrated circuit board box from control panel 23 comprises data line interface 233 and bus interface 235, and described data line interface 233 is connected with the central processing unit 24 of described minute control system by data line.The side adjacent that described bus interface 235 is arranged at described integrated circuit board box with described data line interface 233.
See also Fig. 4, Fig. 4 is the perspective view at another visual angle of integrated circuit board box from control panel 23 shown in Figure 3.The another side relative with side, described bus interface 235 place of described integrated circuit board box from control panel 23 is provided with a jack 237, and described jack 237 is used to accommodate another contact pin from the bus interface 235 of the integrated circuit board box of control panel 23.Contact pin from the bus interface 235 of the integrated circuit board box of control panel 23 is inserted into another jack 237 from the integrated circuit board box of control panel 23, can realizes that the bus of two adjacent integrated circuit board boxes from control panel 23 connects.
Described master control board 22 is arranged in the integrated circuit board box, the structural similarity of the integrated circuit board box of described master control board 22 and described integrated circuit board box from control panel 23.The integrated circuit board box of described master control board 22 comprises first bus interface and second bus interface.First bus interface of the integrated circuit board box of described master control board 22 connects the bus interface 235 of described integrated circuit board box from control panel 23 by described Open Control bus.Second bus interface of the integrated circuit board box of described master control board 22 is connected with described general control system 20 buses.Described first bus interface is arranged at a side adjacent with described second bus interface of the integrated circuit board box of described master control board 22.
Described master control board 22 integrated circuit board boxes be provided with a jack with opposing another side, side, the described first bus interface place, described jack is used to accommodate the contact pin of the bus interface 235 of described integrated circuit board box from control panel 23.Contact pin from the bus interface 235 of the integrated circuit board box of control panel 23 is inserted into the jack of the integrated circuit board box of described master control board 22, and the integrated circuit board box that can realize master control board 22 is connected with bus from the integrated circuit board box of control panel 23.
Described master control board 22 comprises storer, described master control board 22 is describedly obtained data with the described central processing unit 24 that is connected from control panel 23 from control panel 23 by visiting, and the gained data are recorded in the described storer, for described general control system 21 inquiries.
See also Fig. 5, Fig. 5 is the perspective view of the guide rail 25 of photoetching machine control system 20 of the present invention.Described guide rail 25 is used to assemble the integrated circuit board box and the described integrated circuit board box from control panel 23 of described master control board 22.The center section of described guide rail 25 forms a groove 251, described groove 251 and described master control board 22, the projection from the integrated circuit board box of control panel 23 match, fix described master control board 22, from the integrated circuit board box of control panel 23, thereby make described master control board 22 with described from realizing between the control panel 23 that the Open Control bus is connected.
See also Fig. 6, Fig. 6 is that the integrated circuit board box from control panel 23 of photoetching machine control system 20 of the present invention is installed in the synoptic diagram on the guide rail shown in Figure 5 25.The described side relative with described data line interface 233 from control panel 23 integrated circuit board boxes is provided with projection, and described projection slides in the described guide rail 25 along the groove 251 of described guide rail 25, thereby described integrated circuit board box from control panel 23 is fixed on the described guide rail 25.Similar to the principle of Fig. 6, the side relative with second bus interface of described master control board 22 integrated circuit board boxes is provided with projection, described projection slides in the described guide rail 25 along the groove 251 of described guide rail 25, thereby the integrated circuit board box of described master control board 22 is fixed on the described guide rail 25.
See also Fig. 7, Fig. 7 is that the integrated circuit board box from control panel 23 and master control board 22 of photoetching machine control system 20 of the present invention is installed in the synoptic diagram on the described guide rail 25.For described installation process clearly is described, the integrated circuit board box from control panel 23 that definition at first is installed on the described guide rail 25 is the first integrated circuit board box, and the integrated circuit board box from control panel 23 that next is installed on the described guide rail 25 is the second integrated circuit board box.At first, the integrated circuit board box with described master control board 22 is installed on the described guide rail 25.Then, described integrated circuit board box from control panel 23 (the first integrated circuit board box) is installed in a side of the integrated circuit board box of described master control board 22, described bus interface 235 from control panel 23 integrated circuit board boxes is inserted the jack of described master control board 22, thereby realize that described master control board 22 is connected with described bus from control panel 23, and described master control board 22 and describedly all be fixed on the described guide rail 25 from control panel 23.When described photoetching machine control system 20 needs to increase new subsystem, the integrated circuit board box from control panel 23 (the second integrated circuit board box) that new subsystem is housed is installed on the described guide rail 25, simultaneously the bus interface 235 of the described second integrated circuit board box is inserted the jack of the described first integrated circuit board box, thereby realize that described newly-increased subsystem is connected with the bus of described master control board 22.
Compared with prior art, photoetching machine control system 20 of the present invention comprises master control board 22 and a plurality of from control panel 23, and described master control board 22 is connected by the Open Control bus from control panel 23 with described.When described photoetching machine control system 20 needs to increase new subsystem, described newly-increased subsystem inserted described Open Control bus from control panel, described master control board 22 by the described newly-increased subsystem of described Open Control bus access from control panel, and then visit the central processing unit of described newly-increased subsystem, be that described photoetching machine control system 20 is by adjusting the quantity from control panel 23 that is connected with described master control board 22, adjust the quantity of the branch control system of described photoetching machine control system 20, thereby improved the compatibility and the extendability of described photoetching machine control system 20.
Compared with prior art, the master control board 22 of photoetching machine control system 20 of the present invention and all be arranged on the integrated circuit board box from control panel 23, the structural similarity of the structure of the integrated circuit board box of described master control board 22 and described integrated circuit board box from control panel 23, the bus interface 235 of described integrated circuit board box from control panel 23 is inserted the socket of the integrated circuit board box of described master control board 22, thereby realizes that described master control board 22 is connected with described bus from control panel 23.When described photoetching machine control system 20 needs to increase new subsystem, the bus interface from control panel 23 that increases newly is inserted into described jack from control panel 23, that can realize increasing newly is connected from the bus of control panel 23 with described master control board 22.When the physical construction of the subsystem of described photoetching machine control system 20 changes or the interface size of each subsystem when inconsistent, also can realize being connected with the integrated circuit board box of described master control board 22 from control panel 23 by described.Photoetching machine control system of the present invention 20 is easy to assembly, and is little to the dependence of system architecture size.
See also Fig. 8, Fig. 8 is the perspective view from the second embodiment integrated circuit board box of control panel of photoetching machine control system of the present invention.The side relative that the structural similarity from the integrated circuit board box of the structure of the integrated circuit board box of control panel and first embodiment of present embodiment, the bus interface 835 from the integrated circuit board box of control panel of present embodiment are arranged at described integrated circuit board box with data line interface 833.When the negligible amounts that is connected with master control board from control panel, and connect described master control board and described Open Control bus structure when simple from control panel, described Open Control bus is arranged in the groove of guide rail, thereby realizes that described master control board is connected with a plurality of buses from control panel.
Under situation without departing from the spirit and scope of the present invention, can also constitute many very embodiment of big difference that have.Should be appreciated that except as defined by the appended claims, the invention is not restricted at the specific embodiment described in the instructions.
Claims (10)
1. photoetching machine control system comprises:
A plurality of minutes control system, each branch control system include a central processing unit that is used to control described minute control system, it is characterized in that this photoetching machine control system also comprises:
A plurality of from control panel, each connects the central processing unit of one described minute control system from control panel;
One master control board a plurality ofly is connected from control panel with described by the Open Control bus;
General control system is by described master control board with describedly control described a plurality of minutes control system from control panel;
Described photoetching machine control system is adjusted the quantity of the branch control system of described photoetching machine control system by adjusting the quantity from control panel that is connected with described master control board.
2. photoetching machine control system as claimed in claim 1 is characterized in that: described Open Control bus is RS232 bus or RS485 bus or I2C bus or CAN bus.
3. photoetching machine control system as claimed in claim 1, it is characterized in that: described master control board comprises storer, described master control board is by visiting the described data of obtaining the described central processing unit that connects from control panel from control panel, and the gained data are recorded in the described storer, for described general control system inquiry.
4. photoetching machine control system as claimed in claim 1, it is characterized in that: describedly be arranged at the integrated circuit board box from control panel, described integrated circuit board box comprises data line interface and bus interface, and described data line interface is connected by the central processing unit of data line with described minute control system.
5. photoetching machine control system as claimed in claim 4, it is characterized in that: described master control board is arranged in the integrated circuit board box, the integrated circuit board box of described master control board comprises first bus interface and second bus interface, described first bus interface connects described bus interface from control panel integrated circuit board box by described Open Control bus, and described second bus interface is connected with described general control system.
6. photoetching machine control system as claimed in claim 5, it is characterized in that: the bus interface of described integrated circuit board box from control panel is arranged at a side of described integrated circuit board box from control panel, the another side of described integrated circuit board box from control panel is provided with a jack, the described side that is provided with jack is relative with the side at described bus interface place, and described jack is used to accommodate another contact pin from the bus interface of the integrated circuit board box of control panel.
7. photoetching machine control system as claimed in claim 6, it is characterized in that: first bus interface of the integrated circuit board box of described master control board is arranged at a side of the integrated circuit board box of described master control board, the integrated circuit board box of described master control board the another side be provided with a jack, the described side that is provided with jack is relative with the side at the described first bus interface place, and the jack of described master control board is used to accommodate the contact pin of described bus interface from control panel.
8. photoetching machine control system as claimed in claim 7 is characterized in that: described photoetching machine control system also comprises a guide rail, describedly is installed on the described guide rail from the integrated circuit board box of control panel and the integrated circuit board box of described master control board.
9. photoetching machine control system as claimed in claim 4 is characterized in that: the bus interface of described integrated circuit board box from control panel is arranged at a side relative with described data line interface of described integrated circuit board box from control panel.
10. photoetching machine control system as claimed in claim 5 is characterized in that: first bus interface of the integrated circuit board box of described master control board is arranged at a side relative with described second bus interface of the integrated circuit board box of described master control board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100535994A CN101581886A (en) | 2009-06-23 | 2009-06-23 | Photoetching machine control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100535994A CN101581886A (en) | 2009-06-23 | 2009-06-23 | Photoetching machine control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101581886A true CN101581886A (en) | 2009-11-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100535994A Pending CN101581886A (en) | 2009-06-23 | 2009-06-23 | Photoetching machine control system |
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| CN (1) | CN101581886A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102063398A (en) * | 2010-12-16 | 2011-05-18 | 国网电力科学研究院 | Board card equipment-based inter-board seamless data exchange method |
-
2009
- 2009-06-23 CN CNA2009100535994A patent/CN101581886A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102063398A (en) * | 2010-12-16 | 2011-05-18 | 国网电力科学研究院 | Board card equipment-based inter-board seamless data exchange method |
| CN102063398B (en) * | 2010-12-16 | 2012-07-25 | 国网电力科学研究院 | Board card equipment-based inter-board seamless data exchange method |
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Open date: 20091118 |