CN101576488A - Optoelectronic hybrid integration sensor device of sulfureted hydrogen gas concentration and test method thereof - Google Patents
Optoelectronic hybrid integration sensor device of sulfureted hydrogen gas concentration and test method thereof Download PDFInfo
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Abstract
本发明公开了一种光电混合集成硫化氢气体浓度传感器装置,其特点是该传感器装置由激光器(1)引出的激光经偏振器(2)通过透镜(3)光纤(4)将聚焦的偏振光传入气体盒(13)内,输入耦合元件(12)上实现光纤与波导耦合,耦合后的光进入马赫-曾德波导干涉仪(14),然后由分支波导(5、19)分别与参考臂波导(15)和信号臂波导(6)并联连接,通过模场匹配确定两波导端面尺寸,以减少耦合损失,提高耦合效率,波导相位调制器(16)为集总型波导相位调制器结构,设在参考臂波导和信号臂波导之间,经马赫-曾德波导干涉仪干涉后的光由输出耦合元件(18)耦合出气体盒,进入光电信号转换及处理系统,由光纤经透镜(7)和检偏器(8)导入光电二极管(9),将光强转化为电信号输入微信号处理器(10),经运算得到待测的硫化氢气体的浓度值。
The invention discloses a photoelectric hybrid integrated hydrogen sulfide gas concentration sensor device, which is characterized in that the laser light drawn out by the laser (1) passes through the polarizer (2) and the focused polarized light through the lens (3) and the optical fiber (4) of the sensor device Into the gas box (13), the optical fiber and the waveguide are coupled on the input coupling element (12), and the coupled light enters the Mach-Zehnder waveguide interferometer (14), and then the branch waveguides (5, 19) are respectively connected to the reference The arm waveguide (15) and the signal arm waveguide (6) are connected in parallel, and the dimensions of the end faces of the two waveguides are determined by mode field matching to reduce coupling loss and improve coupling efficiency. The waveguide phase modulator (16) is a lumped waveguide phase modulator structure , set between the reference arm waveguide and the signal arm waveguide, the light after the interference of the Mach-Zehnder waveguide interferometer is coupled out of the gas box by the output coupling element (18), enters the photoelectric signal conversion and processing system, and is transmitted by the optical fiber through the lens ( 7) and the polarizer (8) are introduced into the photodiode (9), and the light intensity is converted into an electrical signal input to the micro signal processor (10), and the concentration value of the hydrogen sulfide gas to be measured is obtained through calculation.
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Cited By (22)
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CN101936879A (en) * | 2010-07-28 | 2011-01-05 | 山东大学 | A Photoacoustic Spectroscopic Gas Detection System Based on Mach-Zehnder Interferometer |
CN101968441A (en) * | 2010-09-15 | 2011-02-09 | 山东大学 | New-type gas detection system based on fiber interferometer |
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CN102401666A (en) * | 2010-09-10 | 2012-04-04 | 北京邮电大学 | Method and device for demodulating reflection wavelength of fiber Bragg grating |
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2009
- 2009-06-05 CN CN2009100595139A patent/CN101576488B/en active Active
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