CN101572130B - Device and method for monitoring irradiation field on line in real time - Google Patents
Device and method for monitoring irradiation field on line in real time Download PDFInfo
- Publication number
- CN101572130B CN101572130B CN2008101054338A CN200810105433A CN101572130B CN 101572130 B CN101572130 B CN 101572130B CN 2008101054338 A CN2008101054338 A CN 2008101054338A CN 200810105433 A CN200810105433 A CN 200810105433A CN 101572130 B CN101572130 B CN 101572130B
- Authority
- CN
- China
- Prior art keywords
- electron beam
- irradiation field
- real time
- field
- scan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The invention relates to a device and a method for monitoring irradiation field on line in real time. The device for monitoring an electron beam irradiation field on line in real time comprises an irradiation field detection device, an analysis device and a control device, wherein the irradiation field detection device is used for receiving electron beams at an edge part and is placed on a position where the electron beams at the edge part of the electron beam irradiation field can be received and the normal scanning range of the electron beams is not blocked; the analysis device is connected with the irradiation field detection device and used for analyzing and processing signals of the electron beams, which are received from the irradiation field detection device; the control device is connected with the analysis device and used for receiving an analysis result signal and outputs the distribution information of the irradiation field according to the received analysis result signal. The device has the advantages of simple structure, low production and manufacturing costs and real-time detection to the distribution of the irradiation field, thereby improving the irradiation processing process and the processing quality.
Description
Technical field
The present invention relates to electronic beam irradiation technology, more specifically, relate to the electron beam radiation accelerator that uses in the electronic beam irradiation technology, the monitoring device and the monitoring method thereof of on-line real time monitoring radiation scanning effect.
Background technology:
The electron beam irradiation process technology is that the electron beam and the object that utilize electron accelerator to produce interact, and utilizes the physical influence, chemical effect and the biological effect that are produced that processed object is handled, to realize its intended purposes.This technology can be applied to fields such as industry, agricultural, medical treatment & health, environmental protection and public security.Advantages such as the electron beam irradiation process technology has that technology is simple, beam power is big, control easily, security is good, energy consumption is low, efficient is high, pollution-free, noresidue, technical value added are high, profitable.In fields such as irradiation chemical industry, radiation sterilizations very ripe application has been arranged, for example made heterogeneous high molecular polymer behind x ray irradiation x, produce polymerization, thus the better chemical products of production performance.
In the electron beam irradiation process technology, irradiation technique is the key factor of decision crudy, and the distribution situation of irradiation field is the key factor that influences irradiation technique.Electron accelerator and scan box are the high vacuum structure of sealing, and the high-power electron beam that accelerator produces is scanned into fan-shaped distribution during through sweeping magnet, and is drawn out in the atmosphere through the extraction window of scan box bottom, can carry out irradiation processing to article then.Electron beam is in the outlet of accelerator, to getting into before the scan box, is generally the circular beam spot of certain area, is half elliptic thick lines shape receiving to be projected as elongated two ends, middle part on the irradiated material after the scanning therefore.Below extraction window, the distributed areas that the irradiated electrons bundle forms are called the electron irradiation field.Have only when the installation site of sweeping magnet, scan box when correct and field scan electric current has no distortion, the center of the center of electron irradiation field extraction window bottom retouching box overlaps.The stability of sweeping magnet and field scan electric current thereof directly influences the distribution and the homogeneity thereof of irradiation field.
In the existing electron accelerator, adopt the method for regularly checking the irradiation field distribution situation to confirm the effect of irradiation processing, rather than the distribution and the stability of on-line real time monitoring electron irradiation field.Like this, the electron irradiation field of electron accelerator output is along with the difference of sweeping magnet duty has certain fluctuation, and the instability of electron irradiation field must influence the quality of irradiation processing, even scan box and extraction window are caused damage.Therefore, be sought after a kind of have can the on-line real time monitoring function electron beam radiation accelerator.
Summary of the invention
Fundamental purpose of the present invention provide a kind of in electron beam radiation accelerator the monitoring device and the monitoring method thereof of on-line real time monitoring electron beam irradiation field; Distribution situation and stability thereof that can on-line real time monitoring electron irradiation field; The information such as change in location, field scan current distortion that can reflect sweeping magnet in real time; When finding deviation, can deviation signal be offered operating personnel and perhaps when the field scan current distortion takes place, can proofread and correct the field scan electric current automatically, thereby improve the quality of irradiation processing.
The invention provides a kind of monitoring device that is used for on-line real time monitoring electron beam irradiation field; It comprises: the irradiation field sniffer that is used to receive the marginal portion electron beam; This device is placed on the position of the marginal portion electron beam that can receive equally distributed electron beam irradiation field, and does not stop normal electron beam scanning scope; With the analytical equipment that the irradiation field sniffer is connected, be used for the beam signal that receives from this irradiation field sniffer is carried out analyzing and processing; Be connected the control device with the receiving and analyzing consequential signal with analytical equipment, this control device is according to the distributed intelligence of the analysis result signal output irradiation field that receives.
The present invention also provides the electron beam radiation accelerator with above-mentioned monitoring device.
The present invention also provides a kind of method of electron beam irradiation field of on-line real time monitoring electron beam radiation accelerator; Wherein this electron beam radiation accelerator comprises electron accelerator, scanister, scan box, monitoring device and bundle lower device; This monitoring device comprises irradiation field sniffer, analytical equipment and control device; Wherein this irradiation field sniffer is placed on the position of the marginal portion electron beam that can receive equally distributed electron beam irradiation field, does not stop normal electron beam scanning scope.This method comprises: this irradiation field sniffer receiving unit edge electron beam and output signal to analytical equipment; This analytical equipment is analyzed the signal that is received and the analysis result signal is offered control device; This control device is according to the distributed intelligence of the analysis result signal output irradiation field that receives.
Beneficial effect:
The present invention mainly provides a kind of electron beam radiation accelerator and method with on-line real time monitoring scanning effect function; The distribution and the stability of ability on-line real time monitoring electron irradiation field; The signal of distortion situation of installation site, the sweep current of installation site, the scanister of reflection scan box can be provided in real time; When deviation occurring, can the deviation situation be offered operating personnel; Perhaps when the field scan current distortion takes place, automatically the electric current of scanister is proofreaied and correct, thereby improved the quality of irradiation processing.
The present invention compares with existing electron beam radiation accelerator; Increased the supervising device of on-line monitoring scanning effect, this monitoring device is simple in structure, and manufacturing cost is low; Because the distribution of detected electrons irradiation field and stability in real time; Therefore practical, to improving irradiation processing technology, it is highly beneficial to improve crudy.
Description of drawings
Only with reference to following accompanying drawing embodiment of the present invention is described now through the mode of example, wherein:
Fig. 1 has schematically shown the electron beam radiation accelerator that has the monitoring device that is used for on-line real time monitoring scanning effect according to of the present invention;
Fig. 2 has schematically shown the electron beam irradiation field at the perspective view that receives on irradiated material and the sniffer;
Fig. 3 has schematically shown according to the monitoring device that is used for on-line real time monitoring electron beam irradiation field of the present invention;
Fig. 4 has schematically shown a kind of concrete structure of the included analytical equipment of the monitoring device of Fig. 2;
Fig. 5 a is the oscillogram of field scan current symmetry deviation;
Fig. 5 b meaning property shows the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 a is caused;
Fig. 5 c is another oscillogram of field scan current symmetry deviation;
Fig. 5 d has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 c is caused;
Fig. 5 e is another oscillogram of field scan current symmetry deviation;
Fig. 5 f has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 e is caused;
Fig. 5 g is another oscillogram of field scan current symmetry deviation;
Fig. 5 h has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 g is caused;
Fig. 6 a has schematically shown the synoptic diagram of the installation site of scanister with respect to the clockwise inclination in correct installation site;
Fig. 6 b shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scanister among Fig. 6 a caused;
Fig. 6 c has schematically shown the synoptic diagram of the installation site of scanister with respect to the counterclockwise inclination in correct installation site;
Fig. 6 d shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scanister among Fig. 6 c caused;
Fig. 7 a has schematically shown the synoptic diagram that squints with respect to correct installation site in the installation site of scan box left;
Fig. 7 b shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scan box among Fig. 7 a caused;
Fig. 7 c has schematically shown the synoptic diagram that squints with respect to correct installation site in the installation site of scan box to the right;
Fig. 7 d shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scan box among Fig. 7 c caused;
Fig. 8 a has schematically shown the agonic irradiation field synoptic diagram of monitoring according to monitoring device of the present invention;
Fig. 8 b has schematically shown the irradiation field synoptic diagram devious of monitoring according to monitoring device of the present invention.
Embodiment
Fig. 1 shows the electron beam radiation accelerator that has on-line real time monitoring scanning effect function according to of the present invention; It is by electron accelerator 1, scanister 2, scan box 3; The monitoring device that is used for on-line real time monitoring scanning effect; Form with bundle lower device 9, this monitoring device comprises irradiation field sniffer 5, analytical equipment 6 and control device 7.High-power electron beam is produced by electron accelerator 1; It gets in the scan box 3 after scanister 2 scannings; Drawing the back from the extraction window (not shown) of scan box bottom forms fan-shaped electron irradiation field 4 and projects on the processed object 8; Processed object 8 is carried with the main part of certain speed through electron irradiation field 4 by bundle lower device 9, thereby is accomplished the irradiation processing process by the electron beam irradiation of the main part of irradiation field 4.In two fringe regions of the direction of scanning of electron irradiation field,, be not used for usually processed object is carried out irradiation processing because this regional electron beam is by force littler than the stream of normal irradiation field.Irradiation field sniffer 5 is installed in the position of the fringe region of the electron irradiation field that is in the scan box below symmetrically; Can carry out receiving under the situation of irradiation processing the portions of electronics line in the fringe region like this at the electron beam of the main part that does not hinder the electron irradiation field to processed object; To be used for monitoring the distribution situation of irradiation field; Whether the installation site that can know scanister thus is correct, and whether the installation site of scan box is correct, and whether sweep current distortion occurs.The electronics that irradiation field sniffer 5 obtains edge region comes signal and sends it to analytical equipment 6; 6 pairs of these beam signals of this analytical equipment carry out analyzing and processing; And send the result of analyzing and processing to control device 7; Control device 7 is shown to operating personnel with this result in real time, perhaps when the field scan current distortion takes place, also can proofread and correct the electric current of scanister automatically, so that obtain best irradiation effect.
Fig. 2 has represented that the electron beam irradiation field is in the projection situation that receives on irradiation object 8 and the irradiation field sniffer 5.Electron accelerator produces the circular beam spot of series of identical size, after scanister 2 scannings, passes the extraction window of scan box bottom, projects to different positions, and the side-play amount of its position distance center point is directly proportional with the amplitude of field scan electric current.When the field scan electric current was zero, the bundle spot was projected in the center that receives the irradiation object; When the field scan electric current reached maximum, the bundle spot projected to the outside, edge that receives the irradiation object, and a part wherein projects on the irradiation sniffer 5.The waveform of field scan electric current is generally periodic triangular wave or sawtooth wave, and the bundle spot is distributed by the thick line type that is projected as on the irradiated material 8, and the two ends of this distribution are owing to the overlapping half elliptic that becomes less of bundle spot.This distribution of beam spot has reflected the distribution of electron irradiation field, and it is by the characteristic decision of field scan electric current.
Fig. 3 has represented the structural representation that is used for the monitoring device of on-line real time monitoring scanning beam irradiation field according to of the present invention.This monitoring device comprises irradiation field sniffer 5, analytical equipment 6 and control device 7.This irradiation field sniffer 5 is by 4 identical detecting plates 501,502,503; 504 form, and are installed in to their symmetry the position of the fringe region of the equally distributed electron irradiation field that is in the scan box below, these 4 detecting plates 501; 502; 503,504 are in the same plane, the central lines of the standard electronic irradiation field of its symmetrical center line when correct and sweep current is undistorted with installation site correct in the installation site of scanister, scan box.These 4 detecting plates 501,502,503; Each piece of 504 all receives the part of electronic beam current in the fringe region, forms output signal A separately respectively, B; C, D also sends analytical equipment 6 to, and this analytical equipment 6 is analyzed these signals; Provide the installation site of the installation site of reflecting scan box respectively, scanister then, the signal of field scan current distortion situation is given control device 7; Control device 7 is shown to operating personnel with these information with suitable form, for example can adopt audio form, visual form, optical form or the like, and perhaps the electric current to scanister carries out from NMO correction when the field scan current distortion.When each parts of electron beam radiation accelerator all install correct and the field scan current work just often, the irradiation field detecting plate 501,502 that symmetry is installed; 503; 504 signal intensities that receive respectively are identical, and output signal A=B=C=D is so the signal value that analytical equipment 6 provides is zero.
Fig. 4 shows the concrete structure synoptic diagram of the analytical equipment in the monitoring device of on-line real time monitoring scanning beam irradiation field.This analytical equipment 6 is made up of three same parts 1,2 and 3, and each parts all comprises two totalizers and a comparer.As shown in Figure 4, parts 1 with signal A and B's and with signal C and D with compare, this comparative result has reflected whether the field scan electric current distorts.Parts 2 with signal A and C's and with signal B and D with compare, this comparative result has reflected whether the installation site of scanister deviation occurs.Parts 3 with signal A and D's and with signal B and C with compare, this comparative result has reflected whether the installation site of scan box deviation occurs.
In electron beam radiation accelerator; Usually adopt triangular current or sawtooth current as the field scan electric current; Sawtooth current also is a kind of of triangular current strictly speaking, and the triangular voltage sweep electric current can guarantee the homogeneity of scanning effect, and promptly the electron beam after the scanning is equally distributed in the main part of the thick line shape of its projection; Field scan electric current positive half period and negative half-cycle symmetry, the irradiation field left-right symmetric after guaranteeing to draw.If distortion appears in the field scan electric current,, peak value disappearance asymmetric like the positive and negative cycle etc. will cause irradiation field inhomogeneous and influence the irradiation processing effect.In the electron beam radiation accelerator with on-line real time monitoring function of the present invention; Value to signal A+B and C+D in the parts 1 of analytical equipment 6 compares; Obtain a signal that reflects difference between them, this signal can reflect that the situation of distortion appears in the field scan electric current.
Fig. 5 a is a kind of oscillogram of field scan current symmetry deviation, and Fig. 5 b has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 a is caused.Shown in Fig. 5 a; Curve r representes normal field scan current waveform figure; Curve e representes the oscillogram that field scan electric current integral body moves down, and promptly its positive amplitude is less than the positive amplitude of normal magnetic field sweep current, and its negative amplitude is greater than the negative amplitude of normal magnetic field sweep current.When the field scan current distortion of situation shown in Fig. 5 a takes place; Electron beam integral body is partial to the left end of the extraction window of scan box; Then the left side is partial to regard to integral body in the electron irradiation field below extraction window, and shown in Fig. 5 b, the edge electronic beam current that the irradiation field detecting plate 501 on the left of being positioned at and 502 receives is more more; And the edge electronic beam current that the irradiation field detecting plate 503 and 504 that is positioned at the right side receives more still less; Make that like this signal A and the B of said detecting plate 501 and 502 outputs are bigger than standard value, and the signal C and the D of said detecting plate 503 and 504 outputs are littler than standard value, so A+B＞C+D.The parts 1 output signal A+B of analytical equipment 6 and the difference signal of C+D are given control device, and control device is made corresponding action according to deviation information.
Fig. 5 c is the another kind of oscillogram of field scan current symmetry deviation, and Fig. 5 d has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 c is caused.Shown in Fig. 5 c; Curve r representes normal field scan current waveform figure; Curve e representes the oscillogram that field scan electric current integral body moves up, and promptly its positive amplitude is greater than the positive amplitude of normal magnetic field sweep current, and its negative amplitude is less than the negative amplitude of normal magnetic field sweep current.When the field scan current distortion of situation shown in Fig. 5 c takes place; Electron beam integral body is partial to the right-hand member of the extraction window of scan box; Then the right side is partial to regard to integral body in the electron irradiation field below extraction window, and shown in Fig. 5 d, it is more more to be positioned at the edge electronic beam current that the irradiation field detecting plate 503 and 504 on right side receives; And the edge electronic beam current that the irradiation field detecting plate 501 and 502 that is positioned at the left side receives more still less; Make that like this signal C and the D of said detecting plate 503 and 504 outputs are bigger than standard value, and the signal A and the B of said detecting plate 501 and 501 outputs are littler than standard value, A+B＜C+D occurs.The parts 1 output signal A+B of analytical equipment 6 and the difference signal of C+D are given control device, and control device is made corresponding action according to deviation information.
Fig. 5 e is another oscillogram of field scan current symmetry deviation, and Fig. 5 f has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 e is caused.Shown in Fig. 5 e, curve r representes normal field scan current waveform figure, and curve e representes the oscillogram of field scan electric current forward peak value defective, and promptly its positive amplitude is lower than normal value, and its negative sense amplitude is normal.When the field scan current distortion of situation shown in Fig. 5 e takes place; Electron beam is positioned at the part scanning shift amount of extraction window right-hand member after scanning less than normal; And left end is normal, and shown in Fig. 5 f, it is on the low side to be positioned at the edge electronic beam current that the irradiation field detecting plate 503 and 504 on right side receives; And the edge electronic beam current that the irradiation field detecting plate 501 and 502 that is positioned at the left side receives is normal; Make that like this signal C and the D of said detecting plate 503 and 504 outputs are littler than standard value, and the signal A and the B of said detecting plate 501 and 502 outputs are standard value, A+B＞C+D occurs.The parts 1 output signal A+B of analytical equipment 6 and the difference signal of C+D are given control device, and control device is made corresponding action according to deviation information.
Fig. 5 g is another oscillogram of field scan current symmetry deviation, and Fig. 5 h has schematically shown the irradiation field deviation that the field scan current symmetry deviation among Fig. 5 g is caused.Shown in Fig. 5 g, curve r representes normal field scan current waveform figure, and curve e representes the oscillogram of field scan electric current negative peak defective, and promptly its negative sense amplitude ratio normal value is low, and its positive amplitude is normal.When the field scan current distortion of situation shown in Fig. 5 g takes place; Electron beam is positioned at the part scanning shift amount of extraction window left end after scanning less than normal; And right-hand member is normal, and shown in Fig. 5 h, the edge electronic beam current that the irradiation field detecting plate 501 on the left of being positioned at and 502 receives is on the low side; And the edge electronic beam current that the irradiation field detecting plate 503 and 504 that is positioned at the right side receives is normal; Make that like this signal A and the B of said detecting plate 501 and 502 outputs are littler than standard value, and the signal C and the D of said detecting plate 503 and 504 outputs are standard value, A+B＜C+D occurs.The parts 1 output signal A+B of analytical equipment 6 and the difference signal of C+D are given control device, and control device is made corresponding action according to deviation information.
In electron beam radiation accelerator; Scanister produces a scanning magnetic field with the corresponding variation of field scan electric current under the effect of field scan electric current; Electron beam receives acting on the plane perpendicular to this scanning magnetic field of this scanning magnetic field and produces deflection, is scanned into fan-shaped distribution line by original straight line line.As long as scanister is in correct installation site, when promptly making the magnetic field of its generation perpendicular to scan box, the plane of fan-shaped line is consistent with the central plane of triangle scan box, and fan-shaped line could be drawn bottom scan box smoothly, the formation irradiation field.When deviation appears in the installation site of scanister, cause the scanning magnetic field of its generation to be not orthogonal to the triangle projective planum of scan box, then produces between the fan-shaped line that produces of scanning and the scan box and reverse, line can be beaten on the scan box wall in the time of seriously, can not normally draw.In the electron beam radiation accelerator with on-line real time monitoring electron beam irradiation field function of the present invention; Value to signal A+C and B+D in the parts 2 of analytical equipment 6 compares; Obtain a signal that reflects difference between them, this signal can reflect that the situation of deviation appears in the installation site of aforementioned scanister.
Fig. 6 a has schematically shown the synoptic diagram of the installation site of scanister with respect to the clockwise inclination in correct installation site, and Fig. 6 b shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scanister among Fig. 6 a caused.When the situation of the installation site deviation shown in Fig. 6 a appears in scanister, whole deflection appears and not parallel with the scan box extraction window through the electron beam of scanning.Shown in Fig. 6 b, 4 irradiation field detecting plates 501,502; Difference appears in the quantity of the 503 and 504 edge electronic beam currents that obtained; Wherein the edge electronic beam current of irradiation field detecting plate 501 and 503 receptions is more more, and the edge electronic beam current that irradiation field detecting plate 502 and 504 receives more still less, makes that output signal A and C are bigger than standard value; And B and D are littler than standard value; A+C＞B+D occurs, the parts 2 output signal A+C of analytical equipment 6 and the difference signal of B+D are given control device, and control device provides corresponding scanister installation deviation information to operating personnel.Fig. 6 c has schematically shown the synoptic diagram of the installation site of scanister with respect to the counterclockwise inclination in correct installation site, and Fig. 6 d shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scanister among Fig. 6 c caused.When the situation of the installation site deviation shown in Fig. 6 c appears in scanister, whole deflection appears and with the scan box extraction window when not parallel through the electron beam of scanning.Shown in Fig. 6 d, 4 irradiation field detecting plates 501,502; Difference appears in the quantity of the 503 and 504 edge electronic beam currents that obtained; Wherein the edge electronic beam current of irradiation field detecting plate 502 and 504 receptions is more more, and the edge electronic beam current that irradiation field detecting plate 501 and 503 receives more still less, makes that output signal A and C are littler than standard value; And B and D are bigger than standard value; A+C＜B+D occurs, the parts 2 output signal A+C of analytical equipment 6 and the difference signal of B+D are given control device, and control device provides corresponding scanister installation deviation information to operating personnel.
In the structure of electron beam radiation accelerator; The correct installation site of scan box 3 is that its center line overlaps with the center line of accelerator 1 fully; The electron beam that is arranged in center line to guarantee the accelerator generation can pass from scan box, and can not lose because of beating on the sidewall of scan box.If the lateral deviation on plane, triangle place appears in the installation site of scan box; Then the center line of scan box does not overlap with the center line of accelerator; The electron beam of coming from accelerator centre line direction advances along set direction; Thereby depart from the center line of scan box bottom extraction window, can get on the sidewall of scan box 3 when serious.Value to signal A+D and B+C in the parts 3 of analytical equipment 6 compares, and obtains a signal that reflects difference between them, and this signal has reflected that the situation of deviation appears in the installation site of scan box.
Fig. 7 a has schematically shown the synoptic diagram that squints with respect to correct installation site in the installation site of scan box left, and Fig. 7 b shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scan box among Fig. 7 a caused.When the situation of the installation site deviation shown in Fig. 7 a appearred in scan box, a side of whole deflection scan box extraction window appearred through the electron beam of scanning.Shown in Fig. 7 b, 4 irradiation field detecting plates 501,502; Difference appears in the quantity of the 503 and 504 edge electronic beam currents that obtained; Wherein the edge electronic beam current of irradiation field detecting plate 501 and 504 receptions is more more, and the edge electronic beam current that irradiation field detecting plate 502 and 503 receives more still less, makes that output signal A and D are bigger than standard value; And B and C are littler than standard value; A+D＞B+C occurs, the parts 3 output signal A+D of analytical equipment 6 and the difference signal of B+C are given control device, and control device provides corresponding scan box installation deviation information to operating personnel.Fig. 7 c has schematically shown the synoptic diagram that squints with respect to correct installation site in the installation site of scan box to the right, and Fig. 7 d shows the synoptic diagram of the irradiation field deviation that the installation site deviation of the scan box among Fig. 7 c caused.When the situation of the installation site deviation shown in Fig. 7 c appearred in scan box, a side of whole deflection scan box extraction window appearred through the electron beam of scanning.Shown in Fig. 7 d, 4 irradiation field detecting plates 501,502; Difference appears in the quantity of the 503 and 504 edge electronic beam currents that obtained; Wherein the edge electronic beam current of irradiation field detecting plate 502 and 503 receptions is more more, and the edge electronic beam current that irradiation field detecting plate 501 and 504 receives more still less, makes that output signal A and D are littler than standard value; And B and C are bigger than standard value; A+D＜B+C occurs, the parts 3 output signal A+D of analytical equipment 6 and the difference signal of B+C are given control device, and control device provides corresponding scan box installation deviation information to operating personnel.
Fig. 8 a shows the synoptic diagram of the agonic irradiation field of monitoring according to monitoring device of the present invention; Fig. 8 b shows the synoptic diagram of the irradiation field devious of monitoring according to monitoring device of the present invention.When Fig. 8 a shows the correct and field scan electric current operate as normal in the installation site of each parts of electron beam radiation accelerator, the center of electron irradiation field and 4 irradiation field probing blocks 501,502; 503 is consistent with 504 symcenter; These 4 irradiation field probing blocks 501,502,503 and 504 receive the electronic beam current that equates respectively; The signal of output equates separately, i.e. signal A=B=C=D.The output signal of the parts 1-3 of analytical equipment 6 is zero, and control device receives the agonic information of expression, and display system is normal.Fig. 8 b has represented that the installation position of each parts of electron beam radiation accelerator is equipped with the synoptic diagram of deviation or the field scan electric current irradiation field when distortion is arranged, and the electronic beam current that 4 probing blocks receive has nothing in common with each other output signal A; B; Also each is unequal for C, D, and the output signal of the parts 1-3 of analytical equipment 6 is all non-vanishing; Control device will demonstrate various deviation informations to operating personnel simultaneously, need adjust respectively the installation site of field scan electric current, scanister, the installation site of scan box.
Introduced the present invention with the mode of exemplary specific embodiment above.For the present invention, the number of said detecting plate is not limited to 4, also can be more than 4.Analytical equipment also is not limited to only comprise 3 parts, can also comprise more than 3 parts, and analytical approach can also be that the detectable signal that is obtained is compared separately respectively or uses multiplier, divider that detectable signal is made up relatively and wait.The number of probing blocks parts more, that analyzed are many more, and the information that correspondingly obtains is also abundant more.Above through instantiation described separately field scan electric current, scanister position, scan box position are monitored, but in practice, can monitor this three kinds of situation simultaneously.When the detecting plate that adopts more than 4, when analytical equipment comprises more than 3 parts, can monitor more kinds of situation simultaneously.
The present invention has only listed and a kind ofly can realize that the present invention comprises the simplified example that field scan electric current, scanister position, scan box position are monitored simultaneously; For those of ordinary skill in the art; Be appreciated that under the situation that does not break away from principle of the present invention and spirit and can change that scope of the present invention is limited accompanying claims and equivalent thereof to these embodiment.
Claims (17)
1. monitoring device that is used in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field, wherein said electron beam radiation accelerator also comprises electron accelerator, scanister, scan box and bundle lower device, said monitoring device comprises:
Be used to receive the irradiation field sniffer of marginal portion electron beam, this device is placed on the position that can receive electron beam irradiation field edge portions of electronics bundle, and does not stop normal electron beam scanning scope;
With the analytical equipment that the irradiation field sniffer is connected, be used for the beam signal that receives from this irradiation field sniffer is carried out analyzing and processing so that the installation site of reflecting scan box respectively, the installation site of scanister, the analysis result signal of field scan current distortion situation to be provided;
Be connected with analytical equipment receiving the control device of said analysis result signal, this control device show said analysis result signal according to the said analysis result signal that receives or when the field scan current distortion electric current to scanister carry out from NMO correction.
2. according to the monitoring device in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field that is used for of claim 1, wherein analytical equipment comprises 3 parts, and each parts comprises 2 totalizers and 1 comparer.
3. according to the monitoring device in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field that is used for of claim 1, wherein the irradiation field sniffer comprises 4 detecting plates or more.
4. according to the monitoring device that is used for of claim 3 in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field; Wherein said a plurality of detecting plate symmetry is installed in the position of the fringe region that is in equally distributed irradiation field to receive edge electron beam, the central lines of the symmetrical center line of said a plurality of detecting plates and standard irradiation field.
5. according to the monitoring device in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field that is used for of claim 1, when the field scan current distortion wherein occurring, control device can this field scan electric current of active correction.
6. according to the monitoring device in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field that is used for of claim 1, wherein said control device is with the distributed intelligence of audio form, visual form or optical form output irradiation field.
7. according to the monitoring device in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field that is used for of claim 1, wherein said scanister is a sweeping magnet.
8. according to the monitoring device in electron beam radiation accelerator on-line real time monitoring electron beam irradiation field that is used for of claim 1, wherein analytical equipment comprises multiplier and comparer.
9. one kind comprises the electron beam radiation accelerator according to the monitoring device of one of claim 1-8.
10. the method for the electron beam irradiation field of an on-line real time monitoring electron beam radiation accelerator; Wherein this electron beam radiation accelerator comprises electron accelerator, scanister, scan box, monitoring device and bundle lower device; This monitoring device comprises irradiation field sniffer, analytical equipment and control device; Wherein this irradiation field sniffer is placed on the position of the marginal portion electron beam that can receive equally distributed electron beam irradiation field; Do not stop normal electron beam scanning scope, this method comprises:
This irradiation field sniffer receives the marginal portion electron beam and outputs signal to analytical equipment;
This analytical equipment analyzes and will reflect respectively that the installation site of scan box, the installation site of scanister, the analysis result signal of field scan current distortion situation offer control device to the signal that is received; With
This control device show said analysis result signal according to the analysis result signal that receives or when the field scan current distortion electric current to scanister carry out from NMO correction.
11. according to the method for the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 10, wherein analytical equipment comprises 3 parts, each parts comprises 2 totalizers and 1 comparer.
12. according to the method for the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 10, wherein analytical equipment comprises multiplier and comparer.
13. according to the method for the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 10, wherein the irradiation field sniffer comprises 4 detecting plates or more.
14. method according to the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 13; Wherein said a plurality of detecting plate symmetry is installed in the position of the fringe region that is in equally distributed irradiation field to receive edge electron beam, the central lines of the symmetrical center line of said a plurality of detecting plates and standard irradiation field.
15. according to the method for the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 10, when the field scan current distortion wherein occurring, control device can this field scan electric current of active correction.
16. according to the method for the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 10, wherein said control device is with the distributed intelligence of audio form, visual form or optical form output irradiation field.
17. according to the method for the electron beam irradiation field of the on-line real time monitoring electron beam radiation accelerator of claim 10, the distributed intelligence of wherein said irradiation field comprises the information that irradiation field is whether even, symmetrical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101054338A CN101572130B (en) | 2008-04-29 | 2008-04-29 | Device and method for monitoring irradiation field on line in real time |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101054338A CN101572130B (en) | 2008-04-29 | 2008-04-29 | Device and method for monitoring irradiation field on line in real time |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101572130A CN101572130A (en) | 2009-11-04 |
| CN101572130B true CN101572130B (en) | 2012-03-21 |
Family
ID=41231451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101054338A Active CN101572130B (en) | 2008-04-29 | 2008-04-29 | Device and method for monitoring irradiation field on line in real time |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101572130B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012216269A1 (en) * | 2012-09-13 | 2014-03-13 | Siemens Aktiengesellschaft | X-ray system and method for generating image data |
| CN103064103A (en) * | 2012-12-18 | 2013-04-24 | 中国原子能科学研究院 | On-line measuring method and device of electron accelerator energy |
| CN106793444B (en) * | 2016-12-09 | 2023-09-19 | 四川智研科技有限公司 | Electron beam control method |
| CN108780471B (en) * | 2018-06-07 | 2022-09-20 | 新瑞阳光粒子医疗装备(无锡)有限公司 | Method and device for correcting magnetic field center error, equipment and storage medium |
| CN108971737B (en) * | 2018-08-06 | 2020-12-18 | 河北众航高能科技有限公司 | Electron beam secondary electron collecting device and electron beam equipment |
| CN114839665A (en) * | 2021-02-02 | 2022-08-02 | 湖州超群电子科技有限公司 | Detection system for electron beam irradiation beam and application method thereof |
| CN112822831A (en) * | 2021-02-09 | 2021-05-18 | 上海高鹰科技有限公司 | Irradiation accelerator and beam irradiation uniformity adjusting method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3934143A (en) * | 1972-11-10 | 1976-01-20 | Siemens Aktiengesellschaft | Detector for ionizing radiation |
| EP0147132A2 (en) * | 1983-12-27 | 1985-07-03 | The Babcock & Wilcox Company | Electron beam welding control |
| CN1987521A (en) * | 2006-11-02 | 2007-06-27 | 中国工程物理研究院环境保护工程研究中心 | System for measuring electronic beam scan uniformity |
-
2008
- 2008-04-29 CN CN2008101054338A patent/CN101572130B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3934143A (en) * | 1972-11-10 | 1976-01-20 | Siemens Aktiengesellschaft | Detector for ionizing radiation |
| EP0147132A2 (en) * | 1983-12-27 | 1985-07-03 | The Babcock & Wilcox Company | Electron beam welding control |
| CN1987521A (en) * | 2006-11-02 | 2007-06-27 | 中国工程物理研究院环境保护工程研究中心 | System for measuring electronic beam scan uniformity |
Non-Patent Citations (6)
| Title |
|---|
| JP平2-153070A 1990.06.12 |
| JP昭53-95499 1978.08.21 |
| JP特开2004-197121A 2004.07.15 |
| JP特开2004-71822A 2004.03.04 |
| JP特开2007-51326A 2007.03.01 |
| 张化一等.4.5MeV/2.5kW辐照灭菌加速器.《高科技与产业化》.2003,(第5期),全文. * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101572130A (en) | 2009-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101572130B (en) | Device and method for monitoring irradiation field on line in real time | |
| JP2969788B2 (en) | Ion beam parallelism measurement method, scanning waveform shaping method, and ion implantation apparatus | |
| JPH0628141B2 (en) | Implant dose measurement and uniformity monitoring device for ion implantation | |
| CN103247044B (en) | Based on the defective mode detection method of high ferro contact net insulator curve-like and point-like singularity characteristics | |
| CN104916518A (en) | Ion implanter, beam energy measuring device, and method of measuring beam energy | |
| US6525327B1 (en) | Ion implanter and beam stop therefor | |
| CN109239555B (en) | Automatic directional transformer station partial discharge monitoring and positioning device and method | |
| EP0488067B1 (en) | Ion-scattering spectrometer | |
| US4687936A (en) | In-line beam scanning system | |
| CN102956428A (en) | Ion implanter | |
| GB1480562A (en) | Detecting a registration mark on a target | |
| JPS62190641A (en) | Method and apparatus for detecting secondary particle on specimen | |
| JP2003068241A (en) | Scanning electron beam device | |
| JPH0526294B2 (en) | ||
| JP2015049151A (en) | Movable structure inspection device | |
| JPS6329786B2 (en) | ||
| JP4784544B2 (en) | Method of measuring beam width and divergence angle of ion beam and ion implantation apparatus | |
| CN101101849A (en) | Multiple angle multiple area X ray source device | |
| US20220406558A1 (en) | Electron gun and electron microscope | |
| JPH08339952A (en) | Mark position identification device and mark position identification method | |
| US6972551B2 (en) | Beam profile monitor with accurate horizontal and vertical beam profiles | |
| JP2006172919A (en) | Scanning electron microscope having three-dimensional shape analysis function | |
| Freyberger | Large dynamic range beam profile measurements | |
| JPS5811011Y2 (en) | X-ray detection device | |
| Shiloh et al. | Electron beam probe for charge neutralization studies of heavy ion beams |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |