CN101568727B - Cryotrap and vacuum processing device with cryotrap - Google Patents
Cryotrap and vacuum processing device with cryotrap Download PDFInfo
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- CN101568727B CN101568727B CN2008800012764A CN200880001276A CN101568727B CN 101568727 B CN101568727 B CN 101568727B CN 2008800012764 A CN2008800012764 A CN 2008800012764A CN 200880001276 A CN200880001276 A CN 200880001276A CN 101568727 B CN101568727 B CN 101568727B
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Abstract
A cryotrap (1) is placed in a vacuum container (3) and has an exhaust panel (7) for cooling gas to condense it and exhausting the condensed gas, and also has a cooling stage (5) connected to a refrigeration machine (2) and cooled. The cryotrap (1) is further provided with a cold storage body (6) held in thermal contact with the cooling stage (5) and fixedly placed, and with a mechanism for thermally connecting and disconnecting between the cold storage body (6) and the exhaust panel (7). The mechanism for the thermal connection and disconnection has a highly thermally conductive movable section capable of being in contact with and separated from the exhaust panel (7) and the cold storage body (6).
Description
Technical field
The present invention relates to carry out the cryotrap of vacuum exhaust and vaccum treating apparatus with this cryotrap by main use cryogenic condensation water vapor.
Background technique
When exhaustion plate being cooled to 200 ° of K or when following, cryotrap is discharged the steam of the material in the vacuum vessel of vaccum treating apparatus and is carried out vacuum exhaust by the condensation of using material.Cryotrap usually is used for condensation and discharge water steam, so it usually is called as " water separator ".
For example, use the cryotrap 101 of G-M type refrigeration system to have the structure shown in Fig. 7.
Cryotrap 101 has a kind of structure, and wherein freezer 102 directly is set on the vaccum treating apparatus 113.When by pressure hose 112 during by the compressor 111 supply helium that are installed in cryotrap 101 outsides freezer 102 operations with the temperature regulation of cooling table 105 to 150-50 ° of K.
Exhaustion plate is set on the cooling table 105, guarantees good heat conductivity simultaneously, and condensation and discharge water steam.
Usually, the inside of vaccum treating apparatus 113 is slightly taken out by the coarse vacuum pump, and for example is evacuated to predetermined pressure by turbine-molecular pump that main valve 115 is attached to vaccum treating apparatus 113 by main scavenging pump 116 (also will only be called as " exhaust pump " hereinafter) thereafter.Except main scavenging pump 116, use cryotrap 101 main condensation and discharge water steam.
Therefore in the structure of cryotrap shown in Figure 7 101, exhaustion plate 107 has the big conduction of the inside that is used for vaccum treating apparatus 113, and can expect and obtain high exhaust velocity.Yet,, must spended time the temperature of exhaustion plate 107 be increased to room temperature so that for example prevent the formation of any condensation for the inside with vaccum treating apparatus 113 is exposed to atmosphere from vacuum state.In addition, after the operation in atmosphere, exhaustion plate 107 must be cooled to the temperature that exhaust may be carried out when slightly vacuumizing the inside of processing equipment 113 from room temperature.That is to say that for example exhaustion plate is got back to room temperature in the maintenance of vaccum treating apparatus, so that make vacuum vessel get back to barometric pressure or cryotrap must be cooled once more with the emptying vacuum vessel.
In recent years, the cryotrap with following structure begins to put on market.That is to say that cryotrap is inserted between main valve and the main scavenging pump, make and by closing main valve exhaustion plate to be remained on low temperature, even the inside of vaccum treating apparatus is exposed to atmosphere from vacuum state.
In having the cryotrap of this structure, as long as main valve is closed exhaustion plate and can remains on low temperature, even the inside of vaccum treating apparatus is exposed to atmosphere from vacuum state.Yet exhaustion plate almost can not guarantee to be used for the big conduction of the inside of vaccum treating apparatus, and reason is that main scavenging pump is connected in the vaccum treating apparatus by main valve.Owing to this reason, exhaustion plate not expectability obtains high exhaust velocity, therefore identical with situation in the intermittent vacuum processing equipment when steam is stayed in the vacuum in a large number its exhaust performance deficiency.
Disclosed cryopump has shortened the Regeneration Treatment time in the references of enumerating below 1, simultaneously by in regeneration, separating cooling plate (being equivalent to) and cooling unit side cylinder operation freezer according to " exhaustion plate " of the present invention, and the heating cooling plate.Be used for the marmem of cooling plate attachment portion by use, and externally control its temperature execution cooling plate and separating of cooling unit side cylinder.
Disclosed cryopump is by by mechanism combination cooling table (being configured to have the good thermo-contact character that is used for freezer) and cooling plate with variable thermal conduction characteristic in references 2, and the heat conductivity that increases described mechanism is cooled off cooling plate.For cooling plate is got back to room temperature, the heat conductivity of described mechanism is reduced.Helium introduce mechanism to/from mechanism's supply/discharges helium with variable heat conductivity with by with the supply of described gas/discharge synchronously expansion bellows structure or pass through supply/discharge helium self the convection current startup it.
Disclosed cryopump has heat conducting bar in references 3, described heat conducting bar can be freely near the surface of cold drawing (exhaustion plate), be in contact with it and separate from it.The temperature control source that is used to cool off and heats heat conducting bar is attached in its edge in outside.Use this structure, starting time and recovery time are shortened.References 1: the Japan Patent spy opens No.63-124880 references 2: the Japan Patent spy opens No.10-122143 references 3: the Japan Patent spy opens No.61-11474
Summary of the invention
The present invention is with the problem that solves
Disclosed cryopump according to prior art can shorten the recovery time in above-mentioned references 1 or 2, and reason is that freezer does not need to stop so that cooling plate is got back to room temperature.Yet, cooling plate being cooled to low temperature so that discharge in the process of gas, it can not be cooled to predetermined temperature or following immediately, even when freezer thermo-contact cooling plate, reason is that cooling table has bad cooling storing function and therefore has little thermal capacitance.
And this structure can not form the cooling with enough thermal capacitances and store body.
In references 3 disclosed cryopumps, freezer must be stopped in the room temperature process in that cold drawing is turned back to, and is supplied to temperature control source extremely to bother liquid nitrogen.
Target of the present invention provides a kind of cryotrap and has the vaccum treating apparatus of cryotrap, described cryotrap can shorten the starting time and the recovery time of cryotrap, simultaneously by adopting compact structure operation freezer, described compact structure allow exhaustion plate and cooling table each other thermo-contact with separate.
The means of dealing with problems
The problems referred to above can solve by following parts are provided: cooling stores body, and it is fixed on the cooling table, keeps and its thermo-contact simultaneously; And mechanism, its allow exhaustion plate and cooling storage body each other thermo-contact with separate.
That is to say, according to the present invention, a kind of cryotrap that is arranged in the vaccum treating apparatus is provided, described vaccum treating apparatus comprises the exhaust pump that the inner pumping of described vaccum treating apparatus is arrived predetermined pressure, described cryopump comprises the exhaustion plate by internal condensation that cools off described vaccum treating apparatus and discharge gas, cooling table with by the cooling of connected freezer is characterized in that also comprising: cooling stores body, the described cooling table of its thermo-contact and kept by described cooling table; Be connected/release mechanism, the described exhaustion plate of its hot connecting or disconnection and described cooling store body.
Alternatively,, provide a kind of vaccum treating apparatus, it is characterized in that having above-mentioned cryotrap according to the present invention.
According to the present invention, a kind of cryotrap has high venting capacity and can shorten the starting time and the recovery time of cryotrap.And a kind of have according to the vaccum treating apparatus of cryotrap of the present invention coolant exhaust plate apace.Even the intermittent vacuum processing equipment of the transformation between this feasible repeating vacuum state continually and the atmospheric exposure state also might keep service speed.
Description of drawings
The accompanying drawing that is comprised in the specification and constitutes its part shows embodiments of the invention, and is used from embodiment's description one and explains principle of the present invention.Fig. 1 is the view of demonstration according to the structure of the cryotrap of the use G-M type refrigeration system of the first embodiment of the present invention; Fig. 2 is the sectional view according to first embodiment's cryotrap of the line A-A ' acquisition in Fig. 1; Fig. 3 A is the view that shows a kind of state, and the cryotrap according to first embodiment in this state is attached to vaccum treating apparatus, and the thermo-contact between exhaustion plate and the cooling storage body is held; Fig. 3 B is the view that shows a kind of state, and the cryotrap according to first embodiment in this state is attached to vaccum treating apparatus, and the thermo-contact between exhaustion plate and the cooling storage body is cut off; Fig. 4 A is the view that shows an example, and it is separable to be configured to part according to first embodiment's cryotrap in this example; Fig. 4 B is the view that shows a kind of state, and the cryotrap part in this state shown in Fig. 4 A is separable; Fig. 4 C is the view that shows a kind of state, and valve is set in the vaccum treating apparatus in this state; Fig. 5 A be show when exhaustion plate with cool off thermo-contact between the storage body according to a second embodiment of the present invention the view of structure of cryotrap when being held; Fig. 5 B be show when exhaustion plate with cool off thermo-contact between the storage body view according to the structure of second embodiment's cryotrap when being cut off; Fig. 6 is the view of structure that shows the cryotrap of a third embodiment in accordance with the invention; With Fig. 7 be the view of structure that show to use the cryotrap of conventional G-M type refrigeration system.
Embodiment
At length illustrate the preferred embodiments of the present invention below with reference to the accompanying drawings.It should be noted that the member described in these embodiments only is an example, and technical scope of the present invention is limited by the scope of claim and is not subjected to following single embodiment's restriction.
The something in common of vacuum-pumping equipment (cryotrap) and prior art is when the steam execution vacuum exhaust that exhaustion plate (cooling plate) is cooled to 200 ° of K or it discharges the material in the vacuum vessel of vaccum treating apparatus for example by the condensation of using material when following.Although will suppose steam is that water vapor provides description, steam can be another material.
In cryotrap, exhaustion plate is set on the outer surface that newly is arranged at the vacuum vessel in the cryotrap, guarantees good heat conductivity simultaneously.It is that the twice of exhaustion plate or above cooling store body and cooling unit that vacuum vessel keeps the thermal capacitance of refrigeration system.Exhaustion plate and cooling store body and have a kind of structure, and they can hot connecting/disconnection in this structure, that is to say to have a kind of structure, and their transmission of heat and thermal insulation can be switched in this structure.
Refrigeration system always cools off and stores body.Cooling stores body can freely be designed to have big thermal capacitance.
Cooling stores body and has thermal capacitance, under this thermal capacitance when being stored body by the cooling of heat cooling and contact exhaustion plate under the room temperature, exhaustion plate is cooled to a temperature, water vapor pressure becomes and is lower than the target vacuum room pressure under this temperature.Cooling stores body and exhaustion plate is fixed.
Cryotrap has a kind of structure, if exhaustion plate is heated to room temperature in this structure, it stores body heat with cooling and disconnects, and if exhaustion plate be cooled, it is connected with cooling storage body heat.Owing to this reason, although exhaustion plate can be set in the vaccum treating apparatus to guarantee big conduction, it can be cooled fast.Even the intermittent vacuum processing equipment of the transformation between this feasible repeating vacuum state continually and the atmospheric exposure state also might keep high service speed.
In order to obtain this structure, be specifically designed to cooling that cooling stores and store body and be specifically designed to hot-swap and removable unit that heat conductivity is outstanding is used and is endowed different role.
Removable unit only need have little heat resistance and outstanding thermo-contact character, and it preferably has little thermal capacitance.Therefore, removable unit can be compact and damage not too easily.
When cooling store body be removable unit and deformable member for example bellows be inserted into cooling when storing between body and the freezer, their thermo-contact can be limited.This may reduce to cool off the cooling efficiency of storage that stores body.In this case, the cooling effectiveness of exhaustion plate also may reduce.According to the present invention, cooling stores body and freezer keeps enough thermo-contacts, and they have outstanding serviceability.
Exhaustion plate can return room temperature and need not stop freezer.After that, will cool off when storing body and taking to before refrigeration system reaches steady state with the exhaustion plate thermo-contact, exhaustion plate can be cooled to predetermined temperature or following so that carry out vacuum exhaust from room temperature.This makes to have and can shorten the device stop time greatly, has therefore increased service speed.
The mechanism of any one qualification below mechanism's (also will be called as " connection/release mechanism " hereinafter) of permission hot connecting/disconnection adopts in (1)-(3).
(1) connection/release mechanism is formed by removable unit, the exhaustion plate thermo-contact that described removable unit has good thermal conduction characteristic (also will be called as " good heat conductivity " hereinafter) and can store body and fix in position with cooling with separate.Removable unit can be moved by (i) mechanical handling or the distortion that is (ii) produced by the thermal distortion device that uses marmem.The mobile control cooling of removable unit store between body and the exhaustion plate contact with separate.
(2) connection/release mechanism is formed by deformable member, described deformable member has good thermal conduction characteristic, and be fixed to cooling and store in the exhaustion plate of body and fix in position one, and be arranged to can with cooling store in the exhaustion plate of body and fix in position another thermo-contact with separate.Deformable member for example has bellows and the contact that has good thermal conduction characteristic.Deformable member can be activated in the following manner: (i) gas is introduced the bellows of deformable member or discharged gas from bellows interior, or (ii) make the deformable member distortion by the thermal distortion device that uses marmem.The cooling of the start-up control of deformable member store between body and the exhaustion plate contact with separate.
(3) connection/release mechanism is formed the heat-transfer character between using gases convection current change cooling storage body and the exhaustion plate, and described gaseous exchange generates by gas being introduced in the space between the exhaustion plate that is formed at cooling storage body and fix in position or being discharged gas from described space.
In cryotrap, if exhaustion plate is heated, the mechanism that hot connecting/disconnection exhaustion plate and cooling store body can remain on low temperature with cooling storage body, and the thermo-contact that exhaustion plate and cooling simultaneously stores between the body is cut off.If exhaustion plate is cooled, the thermo-contact between exhaustion plate and the cooling storage body can recover in this mechanism.
To illustrate that then cooling stores the design example of body.
The cooling of (about 50 ° of K) of being cooled store body be brought to room temperature (about 280 ° of K) under the exhaustion plate thermo-contact.It should be noted that cooling store thermal capacitance that body has be 3.8 times of exhaustion plate or more than, thereby the temperature of exhaustion plate is reduced to about 120 ° of K or following (water vapor pressure becomes the pressure (10 that common sputter equipment can reach under this temperature
-7Pa) one of percentage or following (10
-9Pa or following)).
As another example, the cooling of be cooled (about 50 ° of K) store body be brought to room temperature (about 280 ° of K) under the exhaustion plate thermo-contact.It should be noted that cooling store thermal capacitance that body has be 2.0 times of exhaustion plate or more than, thereby the temperature of exhaustion plate is reduced to about 150 ° of K or following (water vapor pressure becomes the pressure (10 that common deposition apparatus can reach under this temperature
-4Pa) 1/10th or below, just 10
-5Pa or following).
[first embodiment] describes structure and the operation according to the cryotrap of the first embodiment of the present invention below with reference to the accompanying drawings.First embodiment is the example corresponding to (i) in (1) of the said mechanism (connection/release mechanism) that allows hot connecting/disconnection.
Fig. 1 is the view of demonstration according to the structure of the cryotrap 1 of this embodiment's use G-M type refrigeration system.
Fig. 2 is the sectional view according to this embodiment's cryotrap of the line A-A ' in Fig. 1.
G-M type refrigeration system can be by for example pulsed tube refrigeration system replacement of another refrigeration system.
The exhaustion plate 7 that is attached on the bottom surface (33 surface is divided in the bottom that just is exposed in the vaccum treating apparatus 13) of vacuum vessel 3 is attached to cryotrap 1, keeps good heat conductivity simultaneously.The bottom divide 33 self by the made that also has good heat conductivity.Exhaustion plate 7 and bottom divide 33 by for example being made by copper (Cu).
The side part 32 of vacuum vessel 3 by the material with low relatively heat conductivity for example stainless steel (SUS) make, suppress heat when small bore is long-pending to be set at low temperature with convenient exhaustion plate 7 and be delivered to exhaustion plate 7 to have from room temperature environment.
The thermal capacitance that has is that the twice of exhaustion plate 7 or cooling table 5 that above cooling stores body 6 and freezer 2 are accommodated in the vacuum vessel 3 and always keep in a vacuum to cut off the heat transfer with vacuum vessel 3.Cooling stores body 6 and is connected to cooling table 5 outsides, guarantees good heat conductivity simultaneously, and is cooled thus always to remain on low temperature.Cooling storage body 6 can be designed to have big thermal capacitance and for example be made by copper (Cu).Cooling storage body 6 has the part cylindrical outer shape in cylindrical vacuum vessel 3, as shown in Figure 2.
Can move to vacuum environment from the outside and be contained in the vacuum vessel 3 by the thermal conductor 8 of made with high thermal conductivity, form the thermal switch structure thus, described thermal switch structure can divide in the bottom of vacuum vessel 3 33 and cooling store between heat transmission between the body 6 and the thermal insulation and switch.Thermal switch is usually made by for example copper (Cu), but can be by indium or graphite manufacturing so that thermo-contact.Thermal switch shown in Fig. 1 has a kind of structure, thermal conductor 8 is as the removable unit that is connected to by a rod at the knob 9 of element 31 outsides of vacuum vessel 3 in this structure, and by knob 9 move make the bottom divide 33 and cooling storage body 6 contact with each other and separate.
Fig. 3 A is the view that shows a kind of state, and the cryotrap according to this embodiment in this state is attached to vaccum treating apparatus, and the thermo-contact between exhaustion plate and the cooling storage body is held.
By operation knob 9 with thermal conductor 8 take to the bottom divide 33 and cooling store body 6 and contact and carry out exhaustion plate 7 and the thermo-contact of cooling off between the storage body 6.
Same as the prior art, the inside of vaccum treating apparatus 13 is slightly taken out by coarse vacuum pump 14, and for example is evacuated to predetermined pressure by turbine-molecular pump that main valve 15a is attached to vaccum treating apparatus 13 by main scavenging pump 16 thereafter.Except main scavenging pump 16, use cryotrap 1 main condensation and discharge water steam.When by pressure hose 12 during by the compressor 11 supply helium that are installed in cryotrap 1 outside freezer 2 operations with the temperature regulation of cooling table 5 to 150-50 ° of K.
Fig. 3 B is the view that shows a kind of state, and the thermo-contact that exhaustion plate and cooling store between the body in this state is cut off.
By handle knob 9 with thermal conductor 8 and bottom divide 33 and cooling store body 6 separation cut exhaustion plates 7 and the thermo-contact of cooling off between the storage body 6.
In this embodiment, exhaustion plate 7 is set in the vaccum treating apparatus 13.With the internal exposure of vaccum treating apparatus 13 in the process of atmosphere, the bottom of vacuum vessel 3 divide 33 and cooling store body 6 by operation thermal conductor 8 by thermal insulation, and the temperature of exhaustion plate 7 is reduced thereafter.This does not need to increase the temperature that cooling stores the cooling table 5 of body 6 and freezer 2.In order to shorten the time of the temperature that increases exhaustion plate 7, the bottom that effectively heater 10 is arranged on exhaustion plate 7 or vacuum vessel 3 is divided on 33.
After the operation of vaccum treating apparatus 13 in atmosphere or like environment finished, the inside of vaccum treating apparatus 13 was slightly taken out to recover bottom branch 33 and to cool off the transmission of heat that stores between the body 6 once more by operation exhaustion plate 7 as shown in Fig. 3 A.Exhaustion plate 7 is cooled off fast in this mode, and this makes might recover its water vapor condensation/venting capacity at short notice.
Cooling stores the bottom of body 6 and exhaustion plate 7 and vacuum vessel 3 and divides the difference of the thermal capacitance between 33 big more, and the temperature of cooling storage body 6 is low more before transmission of heat recovers, and it is good more that the cooling effect of acquisition becomes.
Fig. 4 A is the view that shows an example, and it is separable to be configured to part according to this embodiment's cryotrap in this example.
In this embodiment, the element of vacuum vessel 3 is divided into two parts 34 and 35, and their outer part be configured to can be separated from one another.
Use this structure, the member that is supported by element 35 can be disassembled, and element 34, side part 32 and the bottom of exhaustion plate 7 and vacuum vessel 3 divide 33 to keep being attached to vaccum treating apparatus 13 simultaneously.This demountable structure is convenient to safeguard for example cleaning.Safeguard and annually to carry out one to twice that wherein the analog in hermetic unit, bearing, valve and the freezer is with new replacement.
Fig. 4 B is the view that shows a kind of state, and the cryotrap shown in Fig. 4 A is partly separated in this state.
A part 34 of element remains fixed to vaccum treating apparatus 13, and another part 35 of element can be from a part 34 dismountings of element simultaneously.
Fig. 4 C is the view that shows a kind of state, in this state the inside of vaccum treating apparatus 13 valve divided into two parts is set at wherein.Valve 15b can be divided into the inside of vaccum treating apparatus 13 and remains on vacuum state and the inner space of processing object (first space) and be exposed to the inner space (second space) of atmosphere by dismounting cryotrap 1 therein.That is to say that Fig. 4 C has shown a kind of structure, the inside of vaccum treating apparatus 13 is separated by valve 15b in this structure, and comprises that the cryotrap 1 of exhaustion plate 7 is contained in the inner space (second space) of vaccum treating apparatus 13.Valve 15b is arranged on feasible might in dismounting cryotrap 1 inner space (first space) that cryotrap 1 will not be set therein the maintenance in a vacuum in the vaccum treating apparatus 13.This feasible time that might after cryotrap 1 is set, shorten to the second space exhaust.In this case, the pressure controlled valve that is used for connecting first space and second space can be set at vaccum treating apparatus 13.
Better, even when cooling storage body 6 remains on enough low temperature, cryotrap 1 also can be disassembled from the element 34 of vaccum treating apparatus 13.Therefore, after exhaustion plate 7 was by new replacing it, it can be cooled fast.
Cryotrap 1 can have a kind of structure, and the cooling table 5 of exhaustion plate 7 and cryotrap 1 is in direct contact with one another in this structure.
In this case, the cryotrap 1 that is in direct contact with one another of exhaustion plate 7 and cooling table 5 can be inserted between main valve 15a and the main scavenging pump 16 therein.It should be noted that main valve 15a plays with valve 15b similarly acts on, so valve 15b can be omitted.Although explained example corresponding to (i) in (1) of the said mechanism that allows hot connecting/disconnections, as with (ii) in the thermal conductor 8 of identical removable unit can move by the hot mechanism of use marmem.That is to say, can be by marmem being attached to thermal conductor 8, and from the outside temperature that changes marmems of vacuum vessel 3 so that its distortion, thereby mobile thermal conductor 8.
According to this embodiment, cryotrap can be endowed high venting capacity, and exhaustion plate can be cooled fast.Even the intermittent vacuum processing equipment of the transformation between this feasible repeating vacuum state continually and the atmospheric exposure state also might keep high service speed.
[second embodiment] second embodiment is the example corresponding to (i) in (2) of the said mechanism (connection/release mechanism) that allows hot connecting/disconnection.
Fig. 5 A be show when exhaustion plate with cool off thermo-contact between the storage body view according to the structure of this embodiment's cryotrap when being held.
Have good heat conductivity, be fixed to cooling and store in body 6 and the exhaustion plate 7 one and store another thermo-contact in body 6 and the exhaustion plate 7 with cooling and the deformable member that separates is inserted into cooling and stores between body 6 and the exhaustion plate 7.Deformable member comprises bellows 18 or analog and the contact 17 with good heat conductivity.By by the gas access flexible pipe 19 that is used for gas is introduced bellows 18 gas being introduced in the bellows 18 or deformable member being taken from the inner gases of discharging of bellows 18 to both contact with cooling off storage body 6 and exhaustion plate 7.
Fig. 5 B is the view that shows a kind of state, and the thermo-contact that exhaustion plate 7 and cooling store between the body 6 in this state is cut off.
Remove non-pneumatic and be introduced in the bellows 18, the thermo-contact that cooling stores between body 6 and the exhaustion plate 7 is cut off.
With (2) (ii) in situation identical, deformable member can be by the hot deformation of using marmem.
Fig. 4 A among first embodiment and the wherein cryopump shown in the 4B are configured to the separable example of part and also are applicable to this embodiment.
According to this embodiment, cryotrap can be endowed high venting capacity, and exhaustion plate can be cooled fast.Even the intermittent vacuum processing equipment of the transformation between this feasible repeating vacuum state continually and the atmospheric exposure state also might keep high service speed.
[the 3rd embodiment] the 3rd embodiment is the example corresponding to (3) of the said mechanism (connection/release mechanism) that allows hot connecting/disconnection.(connection/release mechanism)
Fig. 6 is the view of structure that shows the cryotrap of a third embodiment in accordance with the invention.
In the 3rd embodiment, the removable unit and the deformable member that are used for first and second embodiments all are not used.Cryotrap is configured to use gaseous exchange to change cooling and stores heat-transfer character between body 6 and the exhaustion plate 7, and the gas by will having high thermal conductivity for example helium is introduced cooling and stored in the empty chamber 20 between body 6 and the exhaustion plate 7 or by gas inlet pipe 21 and generate described gaseous exchange from empty chamber 20 inside discharge gases.According to this embodiment, cryotrap can be endowed high venting capacity, and exhaustion plate can be cooled fast.Even the interruption vaccum treating apparatus of the transformation between this feasible repeating vacuum state continually and the atmospheric exposure state also might keep high service speed.
Although explained the preferred embodiments of the present invention above with reference to the accompanying drawings, the present invention is not limited to these embodiments, and can be transformed into various forms in the technical scope that is defined by the claims.
The present invention is not limited to the foregoing description, and can carry out various types of variations and modification under the situation that does not break away from the spirit and scope of the present invention.Therefore, following claim is attached to the scope of the present invention that discloses.
The application requires the Japanese patent application No.2007-131706 of submission on May 17th, 2007, the rights and interests of the Japanese patent application No.2007-131707 that on May 17th, 2007 submitted to, and above-mentioned application is incorporated in this as a reference in full.
Claims (9)
1. cryotrap that is arranged in the vaccum treating apparatus, described vaccum treating apparatus comprises the inner pumping of the described vaccum treating apparatus exhaust pump to predetermined pressure, described cryotrap comprises by the inside of cooling off described vaccum treating apparatus and carries out condensation and discharge the exhaustion plate of gas and by the cooling table of connected freezer cooling, and comprises:
Cooling stores body, the described cooling table of its thermo-contact and kept by described cooling table; And
Connection/release mechanism, its hot connecting or disconnect described exhaustion plate and described cooling stores body.
2. cryotrap according to claim 1, it is characterized in that, described connection/release mechanism is configured to comprise removable unit, and described removable unit has good heat conductivity and can store the body contact and separate with described exhaustion plate and described cooling.
3. cryotrap according to claim 1, it is characterized in that, described connection/release mechanism is configured to change described cooling by gaseous exchange and stores heat-transfer character between body and the described exhaustion plate, and described gaseous exchange forms by gas being introduced in the space that is formed between described exhaustion plate and the described cooling storage body or from described space discharge gas.
4. cryotrap according to claim 1 is characterized in that, a heater is set on the described exhaustion plate with the described exhaustion plate of rapid heating.
5. cryotrap according to claim 1 is characterized in that, the thermal capacitance that described cooling stores body is not less than 2.0 times of thermal capacitance of described exhaustion plate.
6. cryotrap according to claim 1 is characterized in that, described exhaustion plate is attached on the outer surface that is arranged at the vacuum vessel in the described vaccum treating apparatus, and described cooling stores body and described cooling table is contained in the described vacuum vessel.
7. cryotrap according to claim 1, it further comprises a valve, described valve is divided into the inside of described vaccum treating apparatus first space that keeps vacuum state and is exposed to second space of atmosphere by dismantling an element,
Wherein described cooling storage body and the described cooling table that is contained in second space by described element can be by the described element of dismounting and second apart.
8. vaccum treating apparatus, it comprises cryotrap according to claim 1.
9. vaccum treating apparatus according to claim 8, it further comprises a valve that described exhaust pump is connected to described vaccum treating apparatus,
Wherein said cryotrap is inserted between described valve and the described exhaust pump.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007131706A JP5028142B2 (en) | 2007-05-17 | 2007-05-17 | Cryo trap |
| JP131706/2007 | 2007-05-17 | ||
| JP2007131707A JP2009019501A (en) | 2007-05-17 | 2007-05-17 | Cryotrap |
| JP131707/2007 | 2007-05-17 | ||
| PCT/JP2008/058782 WO2008143067A1 (en) | 2007-05-17 | 2008-05-13 | Cryotrap and vacuum processing device with cryotrap |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101568727A CN101568727A (en) | 2009-10-28 |
| CN101568727B true CN101568727B (en) | 2011-08-17 |
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ID=40359369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008800012764A Active CN101568727B (en) | 2007-05-17 | 2008-05-13 | Cryotrap and vacuum processing device with cryotrap |
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| Country | Link |
|---|---|
| JP (1) | JP5028142B2 (en) |
| CN (1) | CN101568727B (en) |
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| JP5711424B2 (en) | 2012-05-11 | 2015-04-30 | キヤノンアネルバ株式会社 | Refrigerator, cooling trap |
| JP6124776B2 (en) * | 2013-12-02 | 2017-05-10 | 住友重機械工業株式会社 | Cold trap |
| CN104747539B (en) * | 2013-12-26 | 2017-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | A kind of sealing device and plasma processing device |
| DE112015001149B4 (en) * | 2014-04-03 | 2023-09-28 | Hitachi High-Tech Corporation | Cryostation system |
| JP6001015B2 (en) | 2014-07-04 | 2016-10-05 | 株式会社日立国際電気 | Substrate processing apparatus, semiconductor device manufacturing method, program, and recording medium |
| JP6410590B2 (en) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | Cold trap and cold trap control method |
| JP6562503B2 (en) * | 2015-07-13 | 2019-08-21 | アルバック・クライオ株式会社 | Cryo trap |
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| JP6762672B2 (en) * | 2017-03-10 | 2020-09-30 | 住友重機械工業株式会社 | Cryopump |
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| CN110291291A (en) * | 2017-02-07 | 2019-09-27 | 住友重机械工业株式会社 | Cryogenic pump |
| CN110291291B (en) * | 2017-02-07 | 2021-07-20 | 住友重机械工业株式会社 | Low-temperature pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5028142B2 (en) | 2012-09-19 |
| JP2009019500A (en) | 2009-01-29 |
| CN101568727A (en) | 2009-10-28 |
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