CN101563769A - Disc holding apparatus and defect/foreign material detecting apparatus - Google Patents
Disc holding apparatus and defect/foreign material detecting apparatus Download PDFInfo
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- CN101563769A CN101563769A CNA2007800458963A CN200780045896A CN101563769A CN 101563769 A CN101563769 A CN 101563769A CN A2007800458963 A CNA2007800458963 A CN A2007800458963A CN 200780045896 A CN200780045896 A CN 200780045896A CN 101563769 A CN101563769 A CN 101563769A
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- 230000007547 defect Effects 0.000 title claims description 27
- 239000000463 material Substances 0.000 title claims description 27
- 230000002093 peripheral effect Effects 0.000 claims description 72
- 230000007246 mechanism Effects 0.000 claims description 56
- 230000002950 deficient Effects 0.000 claims description 20
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 11
- 210000001364 upper extremity Anatomy 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000012360 testing method Methods 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 2
- 210000000078 claw Anatomy 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 164
- 230000001276 controlling effect Effects 0.000 description 145
- 230000009471 action Effects 0.000 description 31
- 231100000241 scar Toxicity 0.000 description 16
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
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- 230000004888 barrier function Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000012015 optical character recognition Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A disc holding apparatus is provided with a plurality of movable holding claws (3), which have a holding section (3a) abutting to the outer circumference of a wafer (1) having a notch (1A) and are arranged in the circumference direction of the wafer (1). Since the wafer (1) is held by having each holding section (3a) on the inner edge side of each movable holding claw (3) abut to the outer circumference of the wafer (1), at the time of detecting the notch by a sensor composed of a light source and a light receiving section, even when one of the holding sections (3a) abuts to the outer circumference of the wafer (1) at a part where the notchexists, light from the light source is permitted to enter the light receiving section through the notch without being blocked by the holding section (3a). Even when the wafer (1) is held at the part where the notch exists, the wafer (1) is not required to be correctly held again and throughput is improved with a shortened process time.
Description
Technical field
The present invention relates to positive and negative and the defective of peripheral part and the defect/foreign material detecting apparatus that adheres to of foreign matter that plectane with silicon wafer etc. is kept the disc holding apparatus of locating and detects described plectane.
Background technology
In the past, the known holding device (for example, Japan refers to Patent Document 1) that the wafer of the center of regulating the wafer that the wafer transport robot loaded and direction is arranged.The holding device of being put down in writing in the document in the past possesses a plurality of travelling arms (handle sturcture) that have towards center wafer direction driven for opening and closing, forms the periphery of controlling wafer with the pawl of the outboard end of each travelling arm.
Patent documentation 1:(Japan) spy opens the 2006-222190 communique
Silicon wafer (hereinafter referred to as " wafer ") has the direction (crystal orientation) of riving easily.In order to manifest this direction (crystal orientation), be typically provided with breach on the wafer, the position of breach is as benchmark of wafer cut direction etc., and uses as the reference position in the variety of processes.In addition, can also with the breach position that benchmark manifests scar.So breach becomes mark (reference position), so need detect breach.If do not know the direction of breach, then can't mark (marks on image) such as positions of scar.
Yet, above-mentioned in the past holding device or the defective of the positive and negative of wafer and peripheral part and foreign matter adhere to the different affair checkout gear of the defective that detects, because of the pawl with the outboard end of a plurality of travelling arms is controlled the periphery of wafer, so have following problem.
(1) a plurality of travelling arms are positioned at the following side of wafer.Thereby, control wafer with position jaggy, travelling arm then can be positioned at breach below, so breach can be hidden by travelling arm and cause transducer can't detect this position.For example, to the light of the periphery of wafer irradiation from light source, detect the situation of this light with light accepting part, when controlling wafer with position jaggy, the handle part that irradiates light is subjected to travelling arm blocks the incident intensity step-down that causes light accepting part, be mistaken for non-notch, have the situation that can't detect gap position.Just to be subjected to the ratio (area) that travelling arm blocks very big for breach, and the detected value of light accepting part then can become less than threshold value, and is in fact jagged, but can't detect the breach that is positioned at this position.
(2) controlling under the situation of wafer at position jaggy, need control the action of wafer 1 again, make the handle part of travelling arm control breach position in addition, promptly is to control the position to utilize incident light can detect breach.Utilize this mode, the time of step that is used for detecting breach is elongated, and output then can reduce.
(3) because a plurality of travelling arms are positioned at the following side of wafer, so the two sides of wafer is taken under the situation of the surface information of obtaining each face with video camera, with video camera one side (surface) is wherein taken, then, wafer is given the positive and negative counter-rotating, with video camera another side is taken, can be expended the considerable time so the two sides of a wafer is taken.
Summary of the invention
The present invention proposes in view of such problem in the past, even its purpose is to provide at the position with breach and controls under the situation of plectane, still can detect the position of breach, disc holding apparatus and the defect/foreign material detecting apparatus that improves output and can take the two sides simultaneously reliably.
In order to solve above-mentioned problem, the disc holding apparatus of first mode of the present invention is characterized in that, possesses: a plurality of controlling used movable pawl, it is at the interior distolateral handle part that has the peripheral part that is connected to the plectane with breach respectively, and along described plectane circumferentially with uniformly-spaced configuration; And the movable pawl driving mechanism, its make described a plurality of control with movable pawl respectively control described handle part with movable pawl be connected to described plectane peripheral part control the position, and described handle part leave controlling of described peripheral part and remove between the position moving radially along the center by described plectane.
According to this mode, be positioned at the peripheral part that a plurality of each distolateral handle part of controlling with movable pawl are connected to plectane and control plectane because of making, when so the sensor of being made up of light source and light accepting part goes out breach, even a plurality of peripheral parts that are connected to plectane with any one handle part of movable pawl with position jaggy of controlling, light from light source can not blocked by handle part, still can be incident upon light accepting part by breach.Utilize this mode, in the above-mentioned technology in the past, the situation of wafer is controlled at position jaggy, breach by travelling arm hidden ratio very big, so can't detect breach, arrive breach but can prevent to control, and can detect the position of breach reliably with movable pawl is hidden.
In addition, even control at position under the situation of wafer with breach, still needn't control the action of plectane again, just needn't change the action of controlling with the relative position of the handle part of movable pawl and breach, shorten the time of treatment step, output then can improve.And then, because of the surface of plectane and the back side be subjected to a plurality of control with each handle part of movable pawl hidden area seldom, so the video camera that configuration is taken the surface and the back side of plectane respectively once just can be taken the two sides of plectane simultaneously.
In addition, wherein so-called " plectane " is meant the discoideus thing that comprises silicon wafer or mask etc.
The disc holding apparatus of second mode of the present invention, it is characterized in that, described a plurality of each handle part of controlling with movable pawl forms following shape, promptly, described each handle part be connected to the peripheral part of described plectane and described plectane by described a plurality of controlling under the state of controlling with movable pawl, described plectane is maintained in the horizontal plane, and the center of described plectane is consistent with the pivot of this plectane.
According to this mode, can be subjected to a plurality of controlling under the state of controlling at plectane with movable pawl, make a plurality of controlling with movable pawl and plectane, the center with plectane in horizontal plane is that pivot comes the one rotation.Utilize this mode, utilize a plurality of controlling to control plectane more reliably, so that plectane is not easy torsional deformation than vacuum suction with movable pawl.
The disc holding apparatus of Third Way of the present invention is characterized in that, described a plurality of each handle part of controlling with movable pawl are to be connected to the upper limb of peripheral part of described plectane and the concave surface of lower edge.
According to this mode, the upper limb and the lower edge that are connected to the peripheral part of plectane because of the concave surface of each handle part are respectively controlled plectane, so can control plectane reliably.
The disc holding apparatus of cubic formula of the present invention is characterized in that: described a plurality of each handle part of controlling with movable pawl are the conical surface that is connected to the V-arrangement of the top of peripheral part of described plectane and bottom respectively.
According to this mode, plectane is controlled in the upper and lower that is connected to the peripheral part of plectane because of the conical surface of the V-arrangement of each handle part respectively, so can control plectane reliably.
The disc holding apparatus of the 5th mode of the present invention, it is characterized in that, possess: be supported in the base and the interior side ring that can rotate, be supported in described in side ring and the outer ring that can rotate and make described in the rotary drive mechanism of side ring rotation, described movable pawl driving mechanism makes described outer ring carry out rotating with respect to side ring in described so that described respectively control with movable pawl described control the position with described control between the releasing position mobile.
According to this mode, because of the movable pawl driving mechanism is to make the outer ring rotating with respect to interior side ring, make and respectively control with movable pawl controlling the position and controlling to remove between the position and move, so the drive division of movable pawl driving mechanism can be configured in the inboard of outer ring and interior side ring.Utilize this mode, can control plectane and rotate, simultaneously the two sides of plectane is taken still with video camera and can not counteracted.Just will make a plurality of drive divisions of controlling, possess the object that is rotated as the moving part that belongs to inboard ring or outer ring (rotation side), and then the problem that distribution or pipe arrangement are twisted or block can take place with the movable pawl rotation.In order to prevent this point, need be returned the amount that plectane has rotated, promptly be to produce restriction to rotation amount.Eliminate so loaded down with trivial detailsly, can realize simple mechanism.
The disc holding apparatus of the 6th mode of the present invention, it is characterized in that described rotary drive mechanism possesses: drive source, with described in the side ring one rotatably be supported in described base belt pulley, and the rotation of described drive source is passed to the belt of described belt pulley.
The disc holding apparatus of the 7th mode of the present invention, it is characterized in that, described a plurality of controlling with movable pawl utilizes first spring to carry out the application of force to described radially foreign side respectively, described movable pawl driving mechanism possesses: a plurality of handles, it is supported on the described outer ring and also can rotates according to being connected to described a plurality of mode of controlling with each outer end of movable pawl with an end respectively; Second spring, it is set at the other end of described a plurality of handles and is arranged between the steady pin on the described outer ring, utilize an end of described a plurality of handles, with active force, to described a plurality of controlling with movable pawl respectively to described interior side's application of force radially greater than the active force of described first spring; Connect mechanism, it links side ring in described and described outer ring, and limits the relative rotation angle of described interior side ring and described outer ring; And relatively rotation produces mechanism, and it makes, and side ring is relative with described outer ring in described rotates.
The disc holding apparatus of all directions of the present invention formula, it is characterized in that, described connect mechanism limits the angle of carrying out rotating with respect to the described outer ring of side ring in described between the primary importance and the second place, described primary importance be each end of described a plurality of handles push described a plurality of control will respectively control with movable pawl with movable pawl remain on the described position of controlling the position, the described second place is to remove described each end described a plurality of controlling with pushing of movable pawl remained on the described position of controlling the releasing position with described a plurality of controlling with movable pawl.
According to this mode, when connect mechanism is positioned at primary importance, a plurality of each end that is subjected to a plurality of handles with movable pawl of controlling are pushed and are maintained at and control the position, when connect mechanism is positioned at the second place, a plurality of control to be maintained at movable pawl pushing of removing each of a plurality of handles an end applied control the position.Utilize mode, can be when connect mechanism be positioned at primary importance, will respectively control to remain on reliably and control the position, and can be when connect mechanism is positioned at the second place with movable pawl, will respectively control to remain on reliably to control and remove the position with movable pawl.
The disc holding apparatus of the 9th mode of the present invention is characterized in that, described connect mechanism possesses: handle, and it is supported in described interior side ring and can rotates; Rotation transmission member, it is set on the described outer ring, fastens with this handle, and described outer ring is passed to described handle with respect to rotating and reverse of side ring in described; And the 3rd spring, its be set at the leading section of described handle and be arranged on described between the steady pin on the side ring, be that the application of force can be carried out rotationally in the center with the dead point between the described primary importance and the described second place to described handle.
The disc holding apparatus of the tenth mode of the present invention, it is characterized in that, possesses the cancel system of controlling, the described cancel system of controlling is connected to the peripheral part of described plectane and under the state that described plectane is controlled at described each handle part, described a plurality of control rotate a circle with movable pawl side ring and outer ring in described during, fasten with described a plurality of handles successively one by one, remove each handle to described a plurality of controlling, make successively one by one to be positioned at and describedly control the described a plurality of of position and control with movable pawl to the described releasing position displacement of controlling with the pushing of movable pawl.
According to this mode, when the surface of plectane and the back side are taken by video camera respectively, or to the upper limb of the peripheral part of plectane and upper side (below, be called edge upper part) and the lower edge of the peripheral part of plectane and lower side (below, be called edge lower part) when taking by edge detecting sensor respectively, even a plurality of damaged, the scar of each one of plectane of controlling with each handle part of movable pawl, image informations of adhering to foreign matter etc. of controlling also can obtain with video camera or edge detecting sensor.
In addition, (for example have under the situation of plectane of small gap, have small gap controlled with movable pawl under the situation of plectane of hidden small gap), even abut to the peripheral part of plectane at position with breach, when controlling with movable pawl is when controlling the state of removing the position, light from light source can not blocked by handle part, still can be incident to light accepting part by breach.Utilize this mode, can detect the position of breach reliably.
The disc holding apparatus of the 11 mode of the present invention, it is characterized in that, described relative rotation produces mechanism and constitutes, possess: be configured in second drive source on every side of described outer ring and the friction belt that utilizes this drive source drives power to be rotated, by described friction belt is contacted with the periphery of described outer ring, make described outer ring carry out rotating with respect to side ring in described.
According to this mode, because of change the line of production second drive source of green hand's section of circling round relatively of producing of the relative rotation that makes outer ring and interior side ring is configured in the outside of outer ring, so distribution or the distortion of pipe arrangement or the problem of fracture of complexity can take place when the situation of the inboard of the motor that enter rotary driving part.In order to prevent this point, returned the amount that plectane has rotated, promptly be can realize not having rotation amount is produced the loaded down with trivial details simple structure of restriction.
The disc holding apparatus of the 12 mode of the present invention, it is characterized in that, described relative rotation produces mechanism and constitutes, possess: be configured in described outer ring around second drive source, the ring gear that is driven the gear that is rotated and is fixed on the periphery of described outer ring by this drive source, by described gear is meshed with described ring gear, make described outer ring carry out rotating with respect to side ring in described.
According to this mode, second drive source of the green hand's section of changing the line of production because of circling round relatively is configured in the outside of outer ring, so the situation when the inboard of the object that enter rotary driving part of can realizing does not have the problem of complicated distribution or pipe arrangement or returned the loaded down with trivial details simple structure of the amount that plectane rotated.Second drive source that produces mechanism because of the relative rotation that makes the outer ring rotating with respect to interior side ring is configured in the outside of outer ring, so can realize not having the problem of complicated distribution or pipe arrangement or being returned the loaded down with trivial details simple structures such as amount that plectane has rotated when the situation of the inboard of the object that enter rotary driving part.
The disc holding apparatus of the 13 mode of the present invention is characterized in that, possesses: can be in the bearing position and the wafer mounting table from carrying out lifting between the retreating position of this bearing position decline at the back side of supporting the described plectane of carrying from the outside.
According to this mode, there is supporting to utilize wafer transport robot etc. to be transported to the wafer mounting table at the back side of the plectane in the device from the outside because of possessing, so can be under the state of wafer mounting table support plate disc, make a plurality of controlling with movable pawl toward described moving radially, utilize a plurality of each handle part of controlling, can control the periphery of plectane safely with movable pawl.
The defect/foreign material detecting apparatus of first mode of the present invention, it is characterized in that possessing: the disc holding apparatus of the mode of the invention described above, be configured in the position that can take the surface and the back side of described plectane a plurality of video cameras, and according to the image information of described shot by camera and on the surface of described plectane and defective on the back side and foreign matter adhere to the test section that detects.
According to this mode, can obtain the equal effect of disc holding apparatus with the mode of the invention described above.In addition, once just the surface and the back side of plectane can be taken simultaneously with multiple cameras.In addition, control plectane, be rotated, simultaneously the two sides of plectane is taken still with video camera and can not counteracted so can control plectane because of the peripheral part that makes a plurality of each handle part of controlling with movable pawl be connected to plectane.In addition, in the above-mentioned technology in the past,,, with the plectane counter-rotating, with video camera the back side is taken, then so output is not good because of this surface being taken with video camera when the situation of the two sides of plectane being taken with video camera.For this point, according to this mode, can shorten the situation of the two sides of plectane being taken with video camera step time and improve output.Herein, video camera is a kind of video camera general designation of sensor function of the image information with adhering to of the defective that obtains the positive and negative that can differentiate plectane and peripheral part or foreign matter etc.
And then, once just the surface and the back side of plectane can be taken simultaneously with one or more video camera, with the surface of obtaining plectane and the image information at the back side, when the situation of the two sides of plectane being taken with video camera, with video camera this surface is taken, then plectane is reversed, with video camera the back side is taken, obtain the situation in past of the image information at the surface of plectane and the back side, situation is compared therewith, can shorten the time of obtaining step of the image information at the surface of plectane and the back side, improve and utilize obtained image information to detect two sides damaged of plectane, the output of the treatment step that adheres to etc. of the defective of scar etc. or foreign matter.
In addition, video camera is moved take, make the lip-deep area of plectane of each shot by camera roughly the same, so that utilize the amount of information of the obtained photographing information of each video camera roughly identical.Utilize this mode, can improve the processing speed of image information more, and improve the output of the treatment step of adhering to of the defective of damaged, scar etc. on the two sides detect plectane or foreign matter etc.
The defect/foreign material detecting apparatus of second mode of the present invention is the defect/foreign material detecting apparatus as above-mentioned first mode of the present invention, wherein, and the rim detection mechanism that the peripheral part of described plectane is taken; And test section, its according to the image information of the upper limb of the peripheral part of the captured described plectane of described rim detection mechanism and upper side by face side possessed and by rear side possessed the lower edge of the peripheral part of the captured described plectane of described rim detection mechanism and the image information of lower side, detect the defective of peripheral part and the adhering to of foreign matter of described plectane.
According to this mode, can simultaneously the edge upper part and the edge lower part of plectane be taken, obtain the edge upper part of plectane and the image information of edge lower part.And then, be not only according to a plurality of edge upper part of the plectane of not controlling and image informations of edge lower part of controlling with each handle part of movable pawl, also control the cancel system displacement toward controlling under the state of removing the position in utilization, the edge upper part and the edge lower part of plectane are taken, also can obtain a plurality of edge upper part of the plectane of not controlling and image informations of edge lower part of controlling by this with each handle part of movable pawl.Utilize mode, can shorten the time of obtaining step of the image information of the edge upper part of plectane and edge lower part, and improve the output of the treatment step of adhering to of the defective of damaged, scar etc. of the peripheral part that utilizes the obtained detected plectane of image information or foreign matter etc.In addition, the rim detection mechanism of indication also can be above-mentioned video camera herein.
Disc holding apparatus according to first mode of the present invention, be positioned at the peripheral part that a plurality of each distolateral handle part of controlling with movable pawl are connected to plectane and control plectane because of making, so when detecting breach with the transducer of forming by light source portion and light accepting part, even a plurality of any one handle part of controlling with movable pawl, be connected to the peripheral part of plectane with position jaggy, light from light source can not blocked by handle part, still can inject light accepting part by breach.Utilize mode, in the above-mentioned technology in the past, control the situation of wafer when jagged position, to hide latent ratio very big because breach is subjected to travelling arm, so can't detect breach, hide the latent breach that arrives but can prevent to control with movable pawl, can detect the position of breach reliably.
In addition, even control at position under the situation of wafer with breach, still needn't be through controlling the action of plectane again, just needn't change the action of controlling with handle part with the relative position of breach of movable pawl, the time of shortening step, output then can improve.And then, because of being subjected to a plurality of each handle part of controlling with movable pawl, the surface of plectane and the back side hides latent area seldom, so the video camera that configuration is taken the surface and the back side of plectane respectively once just can be taken the two sides of plectane simultaneously.
In addition, according to the disc holding apparatus of second mode of the present invention, can be controlled under the state of controlling with movable pawl by a plurality of at plectane, make a plurality of controlling with movable pawl and plectane, the center with plectane in horizontal plane is that pivot rotates integratedly.Utilize this mode, make comparisons, can keep plectane reliably, so that plectane is unlikely crooked or distortion with a plurality of controlling with movable pawl with vacuum suction.
In addition, according to the disc holding apparatus of Third Way of the present invention, the upper limb and the lower edge that are connected to the peripheral part of plectane because of the concave surface of each handle part are respectively controlled plectane, can control plectane reliably.
In addition, according to the disc holding apparatus of cubic formula of the present invention, plectane is controlled in the top and the bottom that are connected to the peripheral part of plectane because of the conical surface of the V-arrangement of each handle part respectively, can control plectane reliably.
In addition, disc holding apparatus according to the 5th mode of the present invention or the 6th mode, because of the movable pawl driving mechanism is to make the outer ring rotating with respect to interior side ring, make and respectively control with movable pawl controlling the position and controlling to remove between the position and move, so can be with the outside of movable pawl actuator configuration side ring in the outside also reaches.Utilize this mode, can control plectane and be rotated, simultaneously the two sides of plectane is taken still with video camera and can not counteracted.Just will make a plurality of drive divisions of controlling, possess the object that is rotated as the moving part that belongs to inboard ring or outer ring (rotation side), and then the problem that distribution or pipe arrangement are twisted or block can take place with the movable pawl rotation.In order to prevent this point, need be returned the amount that plectane has rotated, promptly be to produce restriction to rotation amount.Eliminate so loaded down with trivial detailsly, can realize simple mechanism.
In addition, disc holding apparatus according to the 7th, eight or nine modes of the present invention, when connect mechanism is positioned at primary importance, a plurality of each end that is subjected to a plurality of handles with movable pawl of controlling are pushed and are maintained at and control the position, when connect mechanism is positioned at the second place, a plurality of control to be maintained to control with movable pawl pushing of removing each of a plurality of handles an end applied remove the position.Utilize this mode, can be when connect mechanism be positioned at primary importance, will respectively control to remain on reliably and control the position, and can be when connect mechanism is positioned at the second place with movable pawl, will respectively control to remain on reliably to control and remove the position with movable pawl.
In addition, disc holding apparatus according to the tenth mode of the present invention, when when the surface of plectane and the back side being taken respectively or with edge detecting sensor the edge upper part of the peripheral part of plectane and edge lower part being taken respectively with video camera, even the image information of adhering to etc. of damaged, the scar at a plurality of each position of controlling the plectane of controlling with each handle part of movable pawl, foreign matter, also available video camera or edge detecting sensor obtain.
In addition, (for example have under the situation of plectane of small gap, have breach controlled with movable pawl under the situation of plectane of hidden small gap), even position jaggy abuts to the peripheral part of plectane, when controlling with movable pawl is when controlling the state of removing the position, light from light source can not blocked by handle part, still can be incident to light accepting part by breach.Utilize this mode, can detect the position of breach reliably.
In addition, disc holding apparatus according to the 11 mode of the present invention, because of change the line of production second drive source of green hand's section of circling round relatively of producing of the relative rotation that makes outer ring and interior side ring is configured in the outside of outer ring, so the distribution of complexity or the problem that pipe arrangement is twisted or blocks take place sometimes when the situation of the inboard of the object that enter rotary driving part.In order to prevent this point, returned the amount that plectane has rotated, promptly be to realize not having the loaded down with trivial details simple structure that rotation amount is produced restriction.
In addition, disc holding apparatus according to the 12 mode of the present invention, second drive source of the green hand's section of changing the line of production because of circling round relatively is configured in the outside of outer ring, so the situation when the inboard of the object that enter rotary driving part of can realizing does not have the problem of complicated distribution or pipe arrangement or returned the loaded down with trivial details simple structure of the amount that plectane rotated.Second drive source that produces mechanism because of the relative rotation that makes the outer ring rotating with respect to interior side ring is configured in the outside of outer ring, so can realize not having the problem of complicated distribution or pipe arrangement or being returned the loaded down with trivial details simple structures such as amount that plectane has rotated when the situation of the inboard of the object that enter rotary driving part.
In addition, the disc holding apparatus of the 13 mode of the present invention, there is supporting to utilize wafer transport robot etc. to be transported to the wafer mounting table at the back side of the plectane in the device from the outside because of possessing, so can be under the state of wafer mounting table support plate disc, make a plurality of controlling with movable pawl toward described moving radially, utilize a plurality of each handle part of controlling, can control the periphery of plectane safely with movable pawl.
In addition, according to the defect/foreign material detecting apparatus of first mode of the present invention, can obtain the equal effect of disc holding apparatus of the arbitrary mode in the first to the 13 mode with the invention described above.
And then, because of once just the surface and the back side of plectane being taken simultaneously with one or more video camera.In addition, control plectane, be rotated, simultaneously the two sides of plectane is taken still with video camera and can not counteracted so can control plectane because of the peripheral part that makes a plurality of each handle part of controlling with movable pawl be connected to plectane.In addition, when the situation of the two sides of plectane being taken with video camera, with video camera this surface is taken, then plectane is reversed, with video camera the back side is taken, situation with past of the image information at the surface of obtaining plectane and the back side, situation is compared therewith, can shorten the time of obtaining step of the image information at the surface of plectane and the back side, improve and utilize obtained image information to detect the output of the treatment step of adhering to of the defective of damaged, scar etc. on two sides of plectane or foreign matter etc.
In addition,, can simultaneously the edge upper part and the edge lower part of plectane be taken, obtain the edge upper part of plectane and the image information of edge lower part according to the defect/foreign material detecting apparatus of second mode of the present invention.And then, be not only according to a plurality of edge upper part of the plectane of not controlling and image informations of edge lower part of controlling with each handle part of movable pawl, also controlling the cancel system displacement toward controlling under the state of removing the position, the edge upper part and the edge lower part of plectane are taken, also can obtain a plurality of edge upper part of the plectane of not controlling and image informations of edge lower part of controlling with each handle part of movable pawl.Utilize mode, can shorten the time of obtaining step of the image information of the edge upper part of plectane and edge lower part, and improve the output of the treatment step of adhering to of the defective of damaged, scar etc. of the peripheral part that utilizes the obtained detected plectane of image information or foreign matter etc.
Description of drawings
Control the key diagram of state of controlling the peripheral part of wafer with the handle part of movable pawl in the disc holding apparatus of Fig. 1 for expression first execution mode.
Fig. 2 is the summary construction diagram of expression with the whole partly cut-away of the disc holding apparatus of first execution mode.
Fig. 3 is the summary construction diagram of expression with the whole partly cut-away of the disc holding apparatus of first execution mode.
Fig. 4 is the figure of expression with the whole clipped structure of identical disc holding apparatus, and is the stereogram that the relative O shape ring that rotates generating unit of expression is connected to the state of outer ring.
Fig. 5 is the figure same with Fig. 4, is the expression stereogram of the state of the O shape ring disengaging outer ring of rotation generating unit relatively.
Fig. 6 is the amplification stereogram of the part of expression cutaway view 4.
Fig. 7 is for representing to rotate the schematic diagram that links parts and link handle from the arrow A direction of Fig. 6.Among the figure, only the expression rotation links parts and links the leading section (arrow A side end) of handle, then omits to the leading section of the outstanding binding handle in the top that links handle.
Fig. 8 A is the action specification figure of expression bond sites state of the holding section of slot and engagement pin when the centre position, and Fig. 8 B is the action specification figure of bond sites state of the holding section of slot and engagement pin when the primary importance and the second place.
Fig. 9 A controls the action specification figure of state that releasing portion moves closer to the handle of movable pawl drive division for expression, and Fig. 9 B controls the action specification figure that releasing portion is sticked in the state of same handle for expression.
Figure 10 A is for representing bond sites in the action specification figure of the state of primary importance, and Figure 10 B is for representing bond sites in the action specification figure of the state in centre position, and Figure 10 C is that the expression bond sites is in the action specification figure of the state of the second place.
Figure 11 controls the wafers rotation of controlling with movable pawl for expression makes by a plurality of, the key diagram of the state of this surface being taken with four video cameras.
The summary construction diagram that Figure 12 represents for the whole partly cut-away with the disc holding apparatus of first execution mode.
Control the key diagram of state of controlling the peripheral part of wafer with the handle part of movable pawl in the disc holding apparatus of Figure 13 for expression second execution mode.
Control releasing portion in the disc holding apparatus of Figure 14 A for expression the 3rd execution mode and break away from the action specification figure of state of the handle of movable pawl drive division, Figure 14 B controls the action specification figure that releasing portion is sticked in the state of same handle for expression.
Control releasing portion in the disc holding apparatus of Figure 15 A for expression the 4th execution mode and break away from the action specification figure of state of the handle of movable pawl drive division, Figure 15 B controls the action specification figure that releasing portion is sticked in the state of same handle for expression.
Figure 16 A is for rotating the action specification figure of the non-action status of generating unit relatively in the disc holding apparatus of expression the 5th execution mode, Figure 16 B is the expression action specification figure of the operate condition of rotation generating unit relatively.
Figure 17 rotates for making in the disc holding apparatus of expression the 6th execution mode by a plurality of wafers of controlling with movable pawl of controlling, the key diagram of the state of this surface being taken with three video cameras.
Label declaration
1: wafer (plectane)
1A: breach
1a: upper limb
1b: lower edge
1c: top
1d: bottom
2: movable pawl drive division (movable pawl driving mechanism)
3: control and use movable pawl
3a: handle part
3b: concave surface
The conical surface of 3c:V shape
3d: outer end
4: base
5: interior side ring
6: outer ring
7: rotary driving part (rotary drive mechanism)
8: motor (drive source)
9: belt pulley
10: steel band (belt)
11: the first springs
12: handle
12a a: end
12b: the other end
12c: pivot
12d: base end part
13: steady pin
14: the second springs
15: linking part (connect mechanism)
16,16A: rotate generating unit (rotation produces mechanism relatively) relatively
17: link handle
17a: the leading section that links handle
18: engagement pin
19: rotation transmission member
20: steady pin
21: the three springs
22,22A: control releasing portion (controlling cancel system)
23: motor (second drive source)
24: the first belt pulleys
25:O shape ring (friction belt)
26: the second belt pulleys
27: the wafer mounting table
27a: bearing-surface
30: belt pulley
31: engaging part
31a: snap-latch surface
32: cylinder
33: linear guides
61: ring gear
62: gear
63: motor
64: cylinder
71～73: video camera
Embodiment
Below, each execution mode that the present invention specializes is described with reference to the accompanying drawings.In addition, in the explanation of each execution mode, the label identical to identical position note, the repetitive description thereof will be omitted.
(first execution mode)
The disc holding apparatus of first execution mode is described and possesses the defect/foreign material detecting apparatus that disc holding apparatus is arranged according to Fig. 1～Figure 12.
This disc holding apparatus, as depicted in figs. 1 and 2, possess a plurality of controlling with movable pawls 3 arranged, these are a plurality of controls with movable pawl 3 at the interior distolateral handle part 3a that has the outside of the discoideus wafer 1 that is connected to jagged 1A respectively, wafer 1 circumferentially uniformly-spaced to dispose.In this example, be provided with six and control with movable pawl 3 (with reference to figure 4).In addition, disc holding apparatus, as Fig. 1～Fig. 3 and shown in Figure 6, possess to have and make a plurality of controlling control the position and control and remove between the position movable pawl drive division 2 that radially (wafer 1 radially) at the center by wafer 1 moves as the movable pawl driving mechanism with movable pawl 3.
Herein, control the position and be meant shown in Fig. 1 and Figure 10 (A), respectively control the peripheral part that handle part 3a with movable pawl 3 is connected to wafer 1 and control the position of (clamping) wafer 1.In addition, control the releasing position and be meant that shown in Figure 10 (C) each handle part 3a breaks away from the peripheral part of wafer 1, remove the position of controlling of wafer 1.
In addition, as depicted in figs. 1 and 2, on disc holding apparatus, rear side from wafer 1 is set, detects the gap detecting sensor of the position of breach 1A the outer circumferential side of rayed to wafer 1.This gap detecting sensor be possess have irradiation be configured in wafer 1 rear side laser etc. light source 90, and receive light accepting part 91 from the laser of light source 90, the value and the threshold value that form the photoelectric yield of this light accepting part 91 compare, to detect having or not and the position of breach 1A.Light source 90 and light accepting part 9 constitute rim detection mechanism.Also can and be subjected to optical mechanism 91 to replace with video camera respectively,, detect the edge according to the photographed data of video camera as rim detection mechanism with light source 90.
A plurality of each handle part 3a that controls with movable pawl 3 form: be connected to the peripheral part of wafer 1 and wafer 1 is a plurality ofly controlled under the state of being controlled with movable pawl 3, wafer 1 is maintained in the horizontal plane and the center of wafer 1 is consistent with the pivot of wafer 1 shape at each handle part 3a.Specifically, as shown in Figure 1, a plurality of each handle part 3a that controls with movable pawl 3 are connected to the upper limb 1a of peripheral part of wafer 1 and the concave surface 3b of lower edge 1b.In addition,, can not blocked yet, still can be incident to light accepting part 91 by breach 1A by handle part 3a from the light of light source 90 even a plurality of controlling with any one handle part 3a of movable pawl 3 is connected to the peripheral part of wafer 1 with the position with breach 1A.
In addition, disc holding apparatus, as Fig. 2～shown in Figure 6, possess the interior side ring 5 that base 4 arranged and can be rotated to support on base 4, and rotatably be supported in via bearing 95 (with reference to figure 6) in side ring 5 outer ring 6, and as the rotary driving part 7 of the rotary drive mechanism of side ring rotation in making.
As Fig. 2～shown in Figure 6, rotary driving part 7 possesses: as the motor 8 of drive source, be fixed in side ring 5 the bottom and rotatably be supported in the belt pulley 9 of base 4, with the output shaft arranged coaxial of motor 8 and be passed to the steel band 10 of belt pulley 9 by the rotation that motor 8 is rotated the belt pulley 30 of driving, the belt pulley 30 that is wound on belt pulley 9 and the belt pulley 30 and will be driven by motor 8 rotations.When motor 8 rotations, then the rotation of rotary driving part 7 is transmitted via belt pulley 30, steel band 10 and belt pulley 9, makes interior side ring 5 rotations with belt pulley 9 one.
As shown in Figure 6, a plurality of control with movable pawl 3 form utilize be configured in the top linear guides 33 of side ring 5, move towards the straight line that radially carries out respectively of wafer 1.In addition, a plurality of controlling with movable pawl 3 is to utilize first spring 11 (with reference to figure 6), and the foreign side radially of past wafer 1 (removing position side toward above-mentioned controlling) is by the application of force respectively.Among Fig. 6, respectively control with movable pawl 3 by movable pawl drive division 2 towards the center of the diameter of wafer 1, be positioned at the active force of opposing first spring 11 and the above-mentioned position of controlling moved to the inner orientation radially of wafer 1 by the application of force.
Movable pawl drive division 2, as Fig. 2～shown in Figure 6, constitute make in side ring 5 and outer ring 6 relative rotations, make respectively to control and controlling the position and controlling between the releasing position mobile with movable pawl 3.In the present embodiment, movable pawl drive division 2 forms with respect to interior side ring 5 and makes outer ring 6 carry out forward or reverse at the angular range of regulation, is controlling the position and is controlling to remove between the position and move and make respectively to control with movable pawl 3.
This movable pawl drive division 2 possesses a plurality of handles 12 that are supported in rotationally on the outer ring 6.As shown in Figure 6, an end 12a of each handle 12 is connected to the pairing outer end 3d that respectively controls with movable pawl 3 respectively.In addition, movable pawl drive division 2 possesses corresponding to each handle 12 and is arranged on the steady pin 13 and second spring 14 on the outer ring 6.Second spring 14 is set between the other end 12b of each steady pin 13 and each handle 12, can use the movable pawl 3 inside side's application of force in footpath of past wafer 1 respectively with controlling via the active force of handle 12 utilizations greater than first acting force of the spring.
Among Fig. 6, respectively control with movable pawl 3 and be positioned at the active force of opposing first spring 11 and the above-mentioned position of controlling moved towards the radially inner orientation of wafer 1.Each end 12a of handle 12 is connected to the pairing outer end 3d that respectively controls with movable pawl 3 respectively, utilizes the active force of second spring 14, makes respectively to control with movable pawl 3 to resist the active force of first spring 11 and be maintained at and control the position.
And then movable pawl drive division 2 possesses and interior side ring 5 and outer ring 6 are connected and limits the linking part 15 as connect mechanism of outer ring 6 with respect to the rotation angle range (the relative rotation angle scope of interior side ring 5 and outer ring 6) of interior side ring 5.In addition, movable pawl drive division 2 possesses and makes outer ring 6 rotate the relative rotation generating unit 16 (with reference to figure 2) that produces mechanism relatively with respect to the conduct that the rotation of the interior side ring 5 relative rotation of interior side ring 5 (outer ring 6 with) produces.
As shown in Figure 6, linking part 15 constitutes outer ring 5 is carried out with relative being rotated between the primary importance and the second place of interior side ring 6, described primary importance is that an end 12a of each handle 12 pushes respectively to control will respectively control with movable pawl 3 with the outer end 3d of movable pawl 3 and remains on the position (position shown in Fig. 6 and Figure 10 (A)) of controlling the position, and the described second place is to remove each end 12a to respectively controlling with the pushing of movable pawl 3, will respectively controlling with movable pawl 3 and remain on the position (with reference to Figure 10 (C)) of controlling the releasing position.
As Fig. 6～shown in Figure 8, linking part 15 possesses: the binding handle 17 and the rotation transmission member 19 of side ring 5 in being supported in rotationally, described rotation transmission member 19 is set on the outer ring 6, with fasten with linking the engagement pin 18 that handle 17 becomes one, the forward or reverse of outer ring 6 be passed to link handle 17.Rotation transmission member 19 is to utilize groove forming part 19b and groove forming part 19c to form slot 19a.In this example, groove forming part 19b and groove forming part 19c be for independently, but also can be that groove forming part 19b and groove forming part 19c form as one and form slot 19a.Engaging engagement pin 18 in the slot of this rotation transmission member 19 forms outer ring 6 with respect to the forward or reverse of interior side ring 5, be passed to binding handle 17 via the holding section of the slot 19a of rotation transmission member 19 and engagement pin 18.
In addition, linking part 15 has the 3rd spring 21 that is set between leading section 17a that links handle 17 and the steady pin 20 that is arranged on the interior side ring 5, constitute and utilize the 3rd spring 21, corresponding to the rotation angle range of outer ring 6, towards any one direction application of force of the second place shown in the primary importance shown in Figure 10 (A) or Figure 10 (C) with respect to interior side ring 5.
Promptly, linking part 15 is under the state that is positioned at the primary importance shown in Fig. 6, Fig. 8 (B) and Figure 10 (A), push the outer end 3d that respectively controls with movable pawl 3 with an end 12a of each handle 12 and remain on the mode of controlling the position, keep the rotary angle position of outer ring 6 with respect to interior side ring 5 with respectively controlling with movable pawl 3.On this primary importance, the slot end 19d of rotation transmission member 19 with and link handle 17 all-in-one-piece engagement pins 18 and offset and fetch the restriction rotation so that outer ring 6 can be from the primary importance shown in Fig. 8 (B) and Figure 10 (A), more toward counterclockwise rotating.Simultaneously,, engagement pin 18 is pushed (counterclockwise rotation carry out the application of force) because of utilizing the active force of the 3rd spring 21, so outer ring 6 remains on this primary importance with respect to the position of interior side ring 5 to this position.Just, linking part 15 has and outer ring 6 is remained on the function of the primary importance shown in Fig. 8 (B) and Figure 10 (A) with respect to the relatively rotation place of interior side ring 5 and make the outer ring 6 can be from this primary importance more towards the rotation regulating function (barrier functionality) of rotation counterclockwise.
In addition, outer ring 6 utilizes relative rotation generating unit 16 described later, from the position shown in Fig. 6, Fig. 8 (B) and Figure 10 (A), toward the clockwise direction rotation, 17 of the binding handles of linking part 15 can exceed dead-centre position (being positioned at the state in the centre position shown in Fig. 8 (A) and Figure 10 (B)), arrive the second place shown in Fig. 8 (B) and Figure 10 (C).Outer ring 6 links handle 17 and exceeds the dead-centre position towards the clockwise direction rotation, and the 3rd spring 21 constitutes outer ring 6 towards the right handed mode application of force.When outer ring 6 when primary importance moves to the second place, 18 of the engagement pins position from Fig. 8 (B) in slot 19a moves to the position of Fig. 8 (A), and then returns the piston motion of the position of Fig. 8 (B).
Therefore, even in the second place, the slot end 19d of rotation transmission member 19 with and link handle 17 all-in-one-piece engagement pins 18 and still can offset and fetch the restriction rotation, outer ring 6 can not rotated towards clockwise direction more from the second place shown in Fig. 8 (B) and Figure 10 (C).Simultaneously,, engagement pin 18 is pushed (counterclockwise rotation carry out the application of force) because of utilizing the active force of the 3rd spring 21, so outer ring 6 remains on this primary importance with respect to the position of interior side ring 5 to this position.Just linking part 15 has and outer ring 6 is remained on the function of the second place shown in Fig. 8 (B) and Figure 10 (C) with respect to the relatively rotation place of interior side ring 5 and make the outer ring 6 can be from this second place, more towards right handed rotation regulating function (barrier functionality).
And then disc holding apparatus possesses and Fig. 9 is arranged the releasing portion 22 of controlling of cancel system is controlled in the conduct shown in (A), Fig. 9 (B).This is controlled 22 meetings of releasing portion and controls under the state of wafer 1 at the peripheral part that each handle part 3a (with reference to figure 1, Fig. 6) is connected to wafer 1, respectively control be rotated with interior side ring 5 and outer ring 6 with movable pawl 3 week during, engage successively one by one with a plurality of handles 12, remove 12 pairs of each handles and respectively control, make to be positioned at and control respectively the controlling with movable pawl 3 of position one by one successively toward controlling the releasing position displacement with the pushing of movable pawl 3.In this example, control releasing portion 22 and constituted (with reference to Figure 12) by the engaging part 31 that is fixed on the base 4 with pillar etc.
This engaging part 31 is configured to the rotational trajectory that this snap-latch surface 31a is positioned at each the other end 12b of a plurality of handles 12.Respectively controlling with movable pawl 3 between interior side ring 5 and outer ring rotate, the snap-latch surface 31a of engaging part 31 engages successively with the other end 12b of each handle 12.Utilize this mode, form each handle 12 from the position shown in Fig. 6 and Fig. 9 (A), resist the active force of second spring 14, with center of rotation 12c is fulcrum, toward counterclockwise rotating, remove 12 pairs of each handles and control, be positioned at and control the controlling with movable pawl 3 of position one by one successively toward controlling the releasing position displacement with the pushing of movable pawl 3.
As Fig. 2～shown in Figure 5, relatively rotation generating unit 16 possesses: be configured in the motor 23 of conduct second drive source in the outside that is configured in outer ring 6 on the base 4, directly be attached at the output shaft of motor 23, first belt pulley 24 that rotates with this actuating force, the rotation that utilizes motor 23, pivot with first belt pulley 24 is that fulcrum rotates, and the second rotatably mounted belt pulley 26 and be wound on O shape ring (friction belt) 25 of two belt pulleys 24,26.
Relatively rotation generating unit 16 can be positioned at the primary importance shown in Figure 10 (A) and respectively controls with movable pawl 3 and be positioned under the state of controlling the position at linking part 15, motor 23 is as Fig. 2 counter-rotating and first belt pulley, 24 counter-rotatings (rotating toward counter clockwise direction as Fig. 2), then second belt pulley 26 and O shape ring, 25 pivots with first belt pulley 24 are fulcrum, toward counterclockwise rotating, 25 on O shape ring as shown in Figure 4 butt to the lateral surface of outer ring 6.Utilize this mode, the rotation (counter-rotating) of O shape ring is delivered to outer ring 6, forms outer ring 6 is come from the position shown in Figure 10 (A) toward clockwise direction, through the position shown in Figure 10 (B) with respect to interior side ring 5, come till the position shown in Figure 10 (C), be rotated.
In addition, relatively rotation generating unit 16 also can be positioned at the second place shown in Figure 10 (C) and respectively controls with movable pawl 3 and be positioned under the state of controlling the releasing position at linking part 15, motor 23 is just changeing and first belt pulley 24 is just changeing (rotating toward clockwise direction as Fig. 4), then second belt pulley 26 and O shape ring, 25 pivots with first belt pulley 24 are fulcrum, rotate toward clockwise direction, O shape ring 25 abuts to the outer peripheral face of outer ring 6 as shown in Figure 2.Utilize this mode, the rotation (just changeing) of O shape ring 25 is passed to outer ring 6, forms outer ring 6 is come from the position shown in Figure 10 (C) toward counterclockwise, through the position shown in Figure 10 (B) with respect to interior side ring 5, come till the position shown in Figure 10 (A), be rotated.
In addition, as shown in Figure 2, the plectane holding position possesses to be had with a plurality of bearing-surface 27a, supporting utilize the back side of the wafer 1 that wafer transport robot etc. carries from the outside bearing position (position shown in Figure 2), with the retreating position that descends from this bearing position between, the wafer mounting table of utilizing icon abridged cylinder to wait to carry out the lifting driving 27.
And then as Fig. 3 and shown in Figure 11, disc holding apparatus is in the face side of wafer 1 and rear side, disposes the video camera 41～44 and 51～54 (with reference to figure 3) of many (this example is four) respectively.In this example, four video cameras 41～44 are fixed on and keep version 45, are to utilize diagram abridged cylinder etc. to be configured on the base 4 with the handle 46 of these holding plate 45 one with moving up and down.Utilize this mode, four video cameras 41～44 can move up and down, and loaded with wafers 1 still can not counteract.
In addition, as shown in figure 11, four video cameras 41～44 are configured to take respectively going up different some 41a～44a along 1 surface of wafer radially of wafer 1.As for the video camera 51～54 of the rear side that is configured in wafer 1, also be same with video camera 41～44, be configured to different point on 1 back side of wafer radially of wafer 1 is taken respectively.
And then as shown in figure 12, disc holding apparatus disposes an edge of table detecting sensor 97 and 98 respectively in the face side and the rear side of wafer 1.Edge detecting sensor 97 is configured to come the top of the fringe region of wafer 1 is taken from the outside of tiltedly going up of the upper limb 1a of wafer 1, edge detecting sensor 98 is configured to come from the tiltedly down outside of the lower edge 1b of wafer 1 bottom of the fringe region of wafer 1 is taken, and edge detecting sensor 97 and 98 all is configured to utilize controls releasing portion 22 and makes to control to be displaced to movable pawl 3 and control under the state of removing the position, and the peripheral part of controlling the wafer 1 of controlling with each handle part of movable pawl 3 is taken.In addition, in this example, be configured to edge detecting sensor 97 is taken respectively with 98 pairs 180 positions of spending the peripheral part of different wafers 1.Utilize this mode, edge detecting sensor 97 and 98 not only can be taken the edge of wafer, can also take the side and the circumference of wafer.Promptly be that edge detecting sensor 97 and 98 is not only to take 1 point, but utilize point that scope is to a certain degree taken, can check certain zone of side, edge and periphery.
In addition, the defect/foreign material detecting apparatus that possesses the disc holding apparatus that above-mentioned first execution mode is arranged is as shown in Figure 3, possesses test section 47 and video camera 44～44 and 51～54 are arranged.In first execution mode.Test section 47 and video camera 41～44 and 51～54 constitute the checkout gear that detects defective and foreign matter.Test section 47 is to be connected to video camera 41～44 and 51～54, obtain and utilize video camera 41～44 and the surface of 51～54 captured wafers 1 and the image information at the back side, according to obtained information, bestow image processing with image analysis apparatus (not shown), detect the defective of damaged, scar etc. or the adhering to of foreign matter at the surface of wafer 1 and the back side.
In addition, the test section 47 that possesses the defect/foreign material detecting apparatus of the disc holding apparatus that above-mentioned first execution mode is arranged, also can utilize and be connected to edge detecting sensor shown in Figure 12 97 and 98 (not shown), obtain and utilize edge detecting sensor 97 and the edge upper part of 98 captured wafers 1 and the image information of edge lower part, according to obtained information, implement image processing with image analysis apparatus (not shown), carry out defective of damaged, scar etc. or the detection of adhering to foreign matter etc. for the peripheral part (edge upper part and edge lower part) of wafer 1.
Secondly, according to Fig. 9 (A), 9 (B) and Figure 10 (A)～Figure 10 (C) etc., the action of the disc holding apparatus with above structure is described.
Before wafer 1 is transported to disc holding apparatus from the outside, make wafer mounting table 27 rise to position shown in Figure 2.At this moment, linking part 15 is positioned at the second place shown in Figure 10 (C), and respectively control the position that is positioned at the base end part 12d (with reference to figure 6) that is connected to handle 12 with the outer end 3d of movable pawl 3, respectively control shown in Figure 10 (C), to remain on to control and remove the position with 3 of movable pawls.
Under this state, wafer 1 utilizes transfer robot to be transported to disc holding apparatus from the outside, and mounting is on wafer mounting table 27.
Secondly, the motor 23 of relative rotation generating unit 16 is just being changeed.Utilize this mode, be positioned at the second place shown in Figure 10 (C) and respectively control to be positioned at and control under the state of removing the position at linking part 15 with movable pawl 3, first belt pulley 24 is just changeing (rotating toward clockwise direction as Fig. 4), then second belt pulley 26 and O shape ring 25, pivot with first belt pulley 24 is a fulcrum, rotate 25 outer peripheral faces that abut to outer ring 6 as shown in Figure 2 of O shape ring toward clockwise direction.Utilize this mode, the rotation (just changeing) of O shape ring 25 is delivered to outer ring 6, and 6 of outer rings from the position shown in Figure 10 (C), toward counterclockwise, through the position shown in Figure 10 (B), are come the position shown in Figure 10 (A) with respect to interior side ring 5, are rotated.Utilize this mode, an end 12a of each handle 12 abuts to the outer end 3d that respectively controls with movable pawl 3, respectively controls with movable pawl 3 and utilizes second spring 14 to come the application of force, and shown in Figure 10 (A), move to and control the position.This is controlled the position and is that linking part 15 is positioned at primary importance, respectively controls to utilize linking part 15 to remain on movable pawl 3 to control the position.
In this way, controlled under the state of being controlled with movable pawl 3 by a plurality of at wafer 1, make motor 8 rotations, then this rotation is delivered to belt pulley 9 via belt pulley 30 and steel band 10, interior side ring, a plurality of controlling with movable pawl 3 and 1 rotation of wafer.
Under the state that wafer is rotated a circle, with video camera 41～44 and 51～54 should the surface and the back side take respectively.In addition, captured image information sends to image analysis apparatus via defect/foreign material detecting apparatus, bestows with image processing, detects adhering to of the defective of damaged, scar etc. at the surface of wafer 1 and the back side or foreign matter etc.
At this moment, be rotated between one-period at wafer 1, control 22 in releasing portion shown in Fig. 9 (B), engage successively one by one with a plurality of handles 12, remove 12 pairs of each handles and respectively control, make to be positioned at and control respectively the controlling with movable pawl 3 of position one by one successively toward controlling the releasing position displacement with the pushing of movable pawl 3.In this way one by one successively migration control and remove respectively the controlling of position with movable pawl 3, by controlling releasing portion 22, then utilize the active force of second spring 14, carry out displacement respectively toward controlling the position once more.
In addition, above-mentioned respectively control with movable pawl 3 toward control remove position displacement during, with edge detecting sensor 97 and 98, utilization being controlled the edge upper part and the edge lower part of the peripheral part of the wafer 1 of being controlled with movable pawl 3 takes respectively, and under the state of wafer 1 rotation, with edge detecting sensor 97 and 98, the edge upper part and the edge lower part in 1 full week of wafer are taken respectively.In addition, captured image information sends to image analysis apparatus via defect/foreign material detecting apparatus, bestows with image processing, carries out detections such as adhering to of the defective of damaged, scar etc. or foreign matter for the peripheral part (edge upper part and edge lower part) of wafer 1.
Finish video camera 41～44 and the surface of 51～54 pairs of wafers 1 and shooting and the edge upper part of edge detecting sensor 97 and 98 pairs of wafers 1 and the shooting of edge lower part at the back side, when disc holding apparatus takes off wafer 1, the motor 23 of relative rotation generating unit 16 is reversed as Fig. 2, and make first belt pulley, 24 counter-rotatings (as Fig. 2 toward rotation counterclockwise).Utilize this mode, second belt pulley 26 and O shape ring 25 pivots with first belt pulley 24 are fulcrum, toward counterclockwise rotating 25 outer peripheral faces that abut to outer ring 6 as shown in Figure 3 of O shape ring.Utilize this mode, the rotation (counter-rotating) of O shape ring 25 is passed to outer ring 6, and outer ring 6 is come from the position shown in Figure 10 (C) toward clockwise direction, through the position shown in Figure 10 (B) with respect to interior side ring 5, till the position shown in Figure 10 (C), be rotated.
Utilize this mode, respectively control the base end part 12d that abuts to each handle 12 with the outer end 3d of movable pawl 3, respectively control the active force that utilizes first spring 11 with movable pawl 3, shown in Figure 10 (C), move to control and remove the position.This is controlled and removes the position and be that linking part 15 is positioned at the second place, respectively controls to utilize linking part 5 to remain on movable pawl 3 to control the releasing position.
Removing under the state of controlling of respectively controlling in this way, wafer 1 is transported to next procedure with 3 pairs of wafers 1 of movable pawl.
According to above first execution mode that constitutes, can reach following action effect.
(1) is positioned at the outer circumferential side that a plurality of each distolateral handle part 3a that control with movable pawl 3 abut to wafer 1 and controls wafer 1 because of making, so use the gap detecting sensor of being formed by light source 90 and light accepting part 91, when detecting breach 1A (with reference to figure 1), even a plurality of peripheral parts that are connected to wafer 1 with any one handle part 3a of movable pawl 3 with the position of jagged 1A of controlling, light from light source can not blocked by handle part 3a, still can be incident upon light accepting part by breach 1A.Utilize this mode, make comparisons, be connected to the situation of the peripheral part of wafer 1, can prevent to control and hide latently with movable pawl 3, can detect the position of breach 1A reliably to breach 1A with the position of jagged 1A with travelling arm.
(2) even the situation of wafer 1 is controlled at the position of jagged 1A, still needn't just needn't change and control through controlling the action of wafer 1 again with the action of movable pawl 3 with the relative position of breach 1A, shorten the time of treatment step, output then can improve.
(3) because of being subjected to a plurality of each handle part 3a that controls with movable pawl 3, the surface of wafer 1 and the back side hides latent area seldom, so the video camera that configuration is taken the surface and the back side of wafer 1 respectively once just can be taken the two sides of wafer 1 simultaneously.
(4) can be controlled under the state of being controlled with movable pawl 3 by a plurality of at wafer 1, make a plurality of controlling with movable pawl 3 and wafers 1, in horizontal plane, be pivot with the center of wafer 1, rotation integratedly.Utilize this mode, make comparisons with vacuum suction, wafer 1 can torsional deformation, can keep wafer 1 reliably with a plurality of controlling with movable pawl 3.
(5) upper limb 1a and the lower edge 1b that abuts to the peripheral part of plectane respectively because of a plurality of concave surface 3b that control with each handle part 3a of movable pawl 3 controls wafer 1, so can control wafer 1 reliably with each handle part 3a.
(6) because of movable pawl drive division 2 make in relative outer rings 6 rotations of side ring 5, and make respectively control with movable pawl 3 control the position with control between the releasing position mobile, so the drive division of movable pawl drive division 2 can be configured in the outside of outer ring 6 and interior side ring 5.Utilize this mode, can control wafer 1 and be rotated, simultaneously the two sides of wafer 1 is taken still with video camera and can not counteracted.Just will make a plurality of drive divisions of controlling, possess the object that is rotated as the moving part that belongs to inboard ring or outer ring (rotation side), the distortion of distribution or pipe arrangement or the problem of blocking then can take place with the movable pawl rotation.In order to prevent this point, need be returned the amount that plectane has rotated, promptly be to produce restriction to rotation amount.Eliminate so loaded down with trivial detailsly, can realize simple mechanism.
When (7) linking part 15 is positioned at primary importance, respectively controlling an end 12a who is subjected to each handle 12 with movable pawl 3 pushes and is maintained at and control the position, when linking part 15 is positioned at the second place, respectively controls to remain on to control and remove the position with movable pawl 3 pushing of removing that an end 12a of each handle 12 applied.Utilize this mode, can be when linking part 15 be positioned at primary importance, will respectively control to remain on reliably and control the position, and can be when linking part 15 is positioned at the second place with movable pawl 3, will respectively control to remain on reliably to control and remove the position with movable pawl 3.
(8) form respectively control be rotated with interior side ring 5 and outer ring 6 with movable pawl 3 week during, the snap-latch surface 31a of engaging part 31 engages successively with the other end 12b of each handle 12, remove 12 pairs of each handles and respectively control, make to be positioned at and control respectively the controlling with movable pawl 3 of position one by one successively toward controlling the releasing position displacement with the pushing of movable pawl 3.Utilize this mode, when when the surface of wafer 1 and the back side being taken respectively or with edge detecting sensor the edge upper part of wafer 1 and edge lower part being taken respectively with video camera, even a plurality of image informations of controlling adhering to of damaged, scar with each position of the wafer that each handle part 3a controlled 1 of movable pawl 3, foreign matter etc., also available video camera is obtained.In addition, have small gap 1A wafer 1 situation (for example, have breach 1A be subjected to controlling with movable pawl 3 the situation of wafer 1 of hidden small gap 1A), even be connected to the peripheral part of wafer 1 with the position of jagged 1A, when controlling with movable pawl 3 is when controlling the state of removing the position, light from 90 can not blocked by handle part 3a, still can be incident to light accepting part 91 by breach 1A.Utilize this mode, can detect the position of breach 1A reliably.
(9) because of the motor 23 that makes outer ring 6 relative inner rings 5 rotate the relative rotation generating unit 16 that produces is configured in the outside of outer ring 6, so work as the situation of the inboard of the motor that enters rotary driving part complicated distribution or the distortion of pipe arrangement or the problem of fracture can take place.In order to prevent this point, returned the amount that plectane has rotated, promptly can realize not having to the loaded down with trivial details simple structure of rotation amount generation restriction.
(10) there is supporting to utilize wafer transport robot etc. to be transported to the wafer mounting table 27 at the back side of the wafer 1 in the device from the outside because of possessing, so can be under the state of wafer mounting table 27 supporting wafers 1, a plurality of controlling with movable pawl 3 inwardly moved the side toward the footpath of wafer 1, utilize each the handle part 3a that respectively controls with movable pawl 3, can control the peripheral part of wafer 1 safely.
(11), dispose four video cameras 41～44 and 51～54 respectively, so once just the surface and the back side of wafer 1 can be taken simultaneously because of face side and rear side at wafer 1.In addition, control wafer 1, be rotated, simultaneously the two sides of wafer 1 is taken still with video camera 41～44 and 51～54 and can not counteracted so can control wafer 1 because of controlling the peripheral part that each handle part 3a with movable pawl 3 is connected to wafer 1.In addition, can shorten time of obtaining step of image information on the two sides of wafer 1, improve and utilize obtained image information to detect the output of the treatment step of adhering to of the defective of damaged, scar etc. on two sides of wafer 1 or foreign matter etc.
(12), dispose an edge of table detecting sensor 97 and 98 respectively, so can simultaneously the edge upper part and the edge lower part of wafer 1 be taken because of face side and rear side at wafer 1.And then, respectively controlling with movable pawl 3 toward controlling between the releasing position displacement, with edge detecting sensor 97 and 98, utilization being controlled the edge upper part and the edge lower part of the peripheral part of the wafer 1 of being controlled with movable pawl 3 takes respectively, and can be under the state of wafer 1 rotation, with edge detecting sensor 97 and 98, the edge upper part and the edge lower part in 1 full week of wafer are taken respectively.Utilize this mode, can shorten the time of obtaining step of the image information of the edge upper part of wafer 1 and edge lower part, improve the output of the treatment step of adhering to of the defective of damaged, scar etc. of peripheral part of the detected wafer 1 of image information that utilization obtains or foreign matter etc.
(second execution mode)
Secondly, the disc holding apparatus of second execution mode of the present invention is described and possesses the defect/foreign material detecting apparatus that disc holding apparatus is arranged according to Figure 13.
The disc holding apparatus of second execution mode and possess the defect/foreign material detecting apparatus that disc holding apparatus is arranged, its characteristic point is: a plurality of each handle part 3a that controls with movable pawl 3 are the conical surface 3c that is connected to the V-arrangement of the top 1c of peripheral part of wafer 1 and bottom 1d respectively.
The top 1c and the bottom 1d that are connected to the peripheral part of plectane because of the conical surface 3c of the V-arrangement of each handle part 3a respectively control plectane, so can control plectane reliably.
Second execution mode according to this formation, not only reach the action effect that above-mentioned first execution mode is reached, and, the top 1c and the bottom 1d that are connected to the peripheral part of wafer 1 because of the conical surface 3c of the V-arrangement of each handle part 3a respectively control wafer 1, so also can reach the action effect that can control wafer 1 reliably.
(the 3rd execution mode)
Secondly, the disc holding apparatus of the 3rd execution mode of the present invention is described and possesses the defect/foreign material detecting apparatus that disc holding apparatus is arranged according to Figure 14 (A), 14 (B) figure.
The disc holding apparatus of the 3rd execution mode and possess the defect/foreign material detecting apparatus that disc holding apparatus is arranged is above-mentioned first execution mode shown in Fig. 9 (A), 9 (B) figure, and its characteristic point is: be provided with to control and remove parts 22A and replace the releasing portion 22 of controlling.
This controls the cylinder 32 that the 22A of releasing portion possesses to be had engaging part 31 and make these engaging part 31 forward-reverses.This is controlled releasing portion 22 and is to utilize cylinder 32 to make engaging part 31 be displaced to the clamped position shown in Figure 14 (B) from the retreating position shown in Figure 14 (A) figure, and the snap-latch surface 31a of engaging part 31 then is positioned at the rotational trajectory of each the other end 12b of a plurality of handles 12.Utilize this mode, be rotated between one-period with interior side ring 5 and outer ring 6 respectively controlling with movable pawl 3, the snap-latch surface 31a of engaging part 31 engages successively with each the other end 12b of a plurality of handles 12.Utilize this mode, form each handle 12 from the position shown in Fig. 6 and Fig. 9 (A), resist the active force of second spring 14, with center of rotation 12c is fulcrum, toward counterclockwise rotating, remove 12 pairs of each handles and control, be positioned at and control respectively the controlling with 3 of movable pawls of position one by one successively toward controlling the releasing position displacements with the pushing of movable pawl 3.
(the 4th execution mode)
Secondly, the disc holding apparatus of the 4th execution mode of the present invention is described and possesses the defect/foreign material detecting apparatus that disc holding apparatus is arranged according to Figure 15 (A), 15 (B) figure.
The disc holding apparatus of the 4th execution mode and possess the defect/foreign material detecting apparatus that disc holding apparatus is arranged, its characteristic point is: the relative rotation generating unit 16 that relative rotation generating unit 16A replaces above-mentioned first execution mode is set.
Relatively rotation generating unit 16A possess annulus 80 that the periphery that is fixed on outer ring 6 is arranged and the outer peripheral face that is connected to this annulus 80, was used for fixing the engaging part 81 of outer ring 6 and made the cylinder 82 of these engaging part 80 forward-reverses.
Relatively rotation generating unit 16A is to utilize cylinder 82 to make engaging part 81 be displaced to the position shown in Figure 15 (B) from the retreating position shown in Figure 15 (A) to fix outer ring 6.Form under this state, side ring 5 carries out forward or reverse with the motor 8 of rotary driving part 7 in making, so that interior side ring 5 is rotated with respect to outer ring 6, switch the controlling between the releasing position shown in position and Figure 15 (B) of controlling shown in Figure 15 (A) and make to control with movable pawl 3.
Shown in Figure 15 (A), be maintained under the state of controlling the position respectively controlling with movable pawl 3, utilize cylinder 82 that engaging part 81 is displaced to till the position shown in Figure 15 (B), the snap-latch surface 31a of engaging part 31 then can be connected to the outer peripheral face of annulus 80 and fixing outer ring 6 (become and can't rotate).Under this state, make motor 8 counter-rotatings of rotary driving part 7, side ring 5 counterclockwise rotates with respect to outer ring 6 dealings from the position shown in Figure 15 (A) in making, and becomes the state shown in Figure 15 (B).Utilize this mode, control and switch to controlling shown in Figure 15 (B) with movable pawl 3 and remove the position, remain on this position.
In contrast, shown in Figure 15 (B), control under the state of removing the position respectively controlling to be maintained at movable pawl 3, utilize cylinder 82 that engaging part 81 is displaced to till the position shown in Figure 15 (B), the snap-latch surface 31a of engaging part 31 then can be connected to the outer peripheral face of annulus 80 and fixing outer ring 6.Under this state, the motor 8 of rotary driving part is just being changeed, side ring 5 with respect to the rotation of outer ring 6 dealing clockwise directions, becomes the state shown in Figure 15 (A) from the position shown in Figure 15 (B) in making.Utilize this mode, control with movable pawl 3 and switch to the position of controlling shown in Figure 15 (A), remain on this position.
The 4th execution mode according to above formation, not only reach the action effect that above-mentioned first execution mode is reached, be rotated with respect to outer ring 6 because of side ring 5 in making again, utilize the motor 8 of rotary driving part 7 to be used as switching a plurality of drive sources of controlling between the position controlling the position and controlling to remove, so in that rotation generating unit 16A needn't special-purpose drive source relatively with the relative rotation generating unit 16A of movable pawl 3.Utilize this mode, can reach the action effect that simplifies the structure and reduce manufacturing cost.
(the 5th execution mode)
Secondly, the disc holding apparatus of the 5th execution mode of the present invention is described and possesses the defect/foreign material detecting apparatus that disc holding apparatus is arranged according to Figure 16 (A), 16 (B) figure.
The disc holding apparatus of the 5th execution mode and possess the defect/foreign material detecting apparatus that disc holding apparatus is arranged, its characteristic point is: the relative rotation generating unit 16 that relative rotation generating unit 16B replaces above-mentioned first execution mode is set.
Relatively rotation generating unit 16B possesses ring gear 61 that the periphery that is fixed on outer ring 6 is arranged, and the gear 62 that is meshed with this ring gear 61 and can be provided with and make the motor 63 of gear 62 rotatings with this gear 62 movably and make gear 62 and the cylinder 64 of motor 63 forward-reverses.
Rotation generating unit 16B is that one side makes gear 62 forward or reverse with motor 63 relatively, and one side utilizes cylinder 64 to make gear 62 and motor 63 be displaced to the position of engagement shown in Figure 16 (B) from the retreating position shown in Figure 16 (A) figure.
Shown in Figure 16 (A) figure, be maintained under the state of controlling the position respectively controlling with movable pawl 3, one side makes gear 62 counter-rotatings (toward rotation counterclockwise) with motor 63, one side utilizes cylinder 64 to make gear 62 and motor 63 be displaced to the position of engagement shown in Figure 16 (B), and 62 of gears can be meshed with ring gear 61.Utilize this mode, because of ring gear 61 from the position shown in Figure 16 (A) figure toward clockwise direction rotation, so rotate to the position shown in Figure 16 (B) with respect to interior side ring 5 toward clockwise direction with the outer ring 6 of ring gear 61 one.Utilize this mode, respectively control shown in Figure 16 (B), to switch to control and remove the position, remain on this position with movable pawl 3.
In contrast, shown in Figure 16 (B), control under the state of removing the position respectively controlling to be maintained at movable pawl 3, one side makes gear 62 just change (toward the clockwise direction rotation) with motor 63, one side utilizes cylinder 64 that gear 62 and motor 63 are displaced to till the position of engagement shown in Figure 16 (B), and 62 of gears can be meshed with ring gear 61.Utilize this mode, because of ring gear 61 rotates from the position shown in Figure 16 (B) toward counter clockwise direction, so outer ring 6 rotates to the position shown in Figure 16 (A) figure with respect to interior side ring 5 toward counter clockwise direction.Utilize this mode, respectively control shown in Figure 16 (A) figure, to switch to and control the position, remain on this position with movable pawl 3.
The 5th execution mode according to above formation, not only reach the action effect that above-mentioned first execution mode is reached, make gear 62 forward or reverse because of one side with the motor 63 that rotates generating unit 16B relatively again, till one side utilizes cylinder 64 to make gear 62 and motor 63 be displaced to the position shown in Figure 16 (B) from the retreating position shown in Figure 16 (A) figure, so also can reach the action effect that gear 62 is meshed with ring gear 61 reliably.
(the 6th execution mode)
Secondly, the disc holding apparatus of the 6th execution mode of the present invention is described and possesses the defect/foreign material detecting apparatus that disc holding apparatus is arranged according to Figure 17.
The disc holding apparatus of the 6th execution mode and possess the defect/foreign material detecting apparatus that disc holding apparatus is arranged, three video cameras 71～73 that the surface of wafer 1 is taken and three video cameras that the back side is taken (diagram is omitted) are set, replacing in above-mentioned first execution mode, four video cameras 41～44 that the surface of wafer 1 and the back side are taken respectively and video camera 51～54.
This disc holding apparatus and possess the defect/foreign material detecting apparatus that disc holding apparatus is arranged, its characteristic point is: be rotated between one-period the moving method of three video cameras 71～73 that the surface of wafer 1 is taken and three video cameras that the back side is taken at wafer 1.
Promptly, video camera 71 becomes the mode of track 85 toward moving radially with motion track, video camera 72 becomes the mode of track 86 toward moving radially with motion track, video camera 73 mode that becomes track 87 with motion track is kept fixingly then, makes the captured area of three video cameras that the surface is taken 71～73 roughly the same.Video camera 73 is that the zone of wafer 1 outermost band shape is taken.As for three video cameras that the back side is taken, also be that the mode with three video cameras 71～73 that the surface is taken moves.
The 6th execution mode according to above structure, not only reach the action effect that above-mentioned first execution mode is reached, video camera 71～73 is moved (only, video camera 73 is kept fixing), make the captured area of three video cameras that the surface is taken 71～73 roughly the same, three video cameras that the back side is taken again also are that the mode with three video cameras 71～73 that the surface is taken moves.Thereby the amount of information of the photographing information of each shot by camera is roughly identical, can improve the processing speed of image information, reaches the action effect that output improves.
In addition, the present invention also can be specialized as following the change.
Be to use multiple cameras to obtain the information at the surface and the back side of wafer in the above-mentioned execution mode, but also can utilize the optical profile type character reading device of OCR (Optical Character Reader) etc. to replace multiple cameras, with the surface of obtaining wafer and the id information at the back side etc.
Claims (15)
1. disc holding apparatus is characterized in that possessing:
A plurality of controlling used movable pawl, and it is at the interior distolateral handle part that has the peripheral part that is connected to the plectane with breach respectively, and along described plectane circumferentially with uniformly-spaced configuration; And
The movable pawl driving mechanism, its make described a plurality of control with movable pawl respectively control described handle part with movable pawl be connected to described plectane peripheral part control the position, and described handle part leave controlling of described peripheral part and remove between the position moving radially along the center by described plectane.
2. disc holding apparatus as claimed in claim 1 is characterized in that,
Described a plurality of each handle part of controlling with movable pawl forms following shape, promptly, described each handle part be connected to the peripheral part of described plectane and described plectane by described a plurality of controlling under the state of controlling with movable pawl, described plectane is maintained in the horizontal plane, and the center of described plectane is consistent with the pivot of this plectane.
3. disc holding apparatus as claimed in claim 1 or 2 is characterized in that,
Described a plurality of each handle part of controlling with movable pawl is to be connected to the upper limb of peripheral part of described plectane and the concave surface of lower edge.
4. disc holding apparatus as claimed in claim 1 or 2 is characterized in that,
Described a plurality of each handle part of controlling with movable pawl is the conical surface that is connected to the V-arrangement of the top of peripheral part of described plectane and bottom respectively.
5. as each described disc holding apparatus of claim 1 to 4, it is characterized in that,
Possess: be supported in the base and the interior side ring that can rotate, be supported in described in side ring and the outer ring that can rotate and make described in the rotary drive mechanism of side ring rotation,
Described movable pawl driving mechanism makes described outer ring carry out rotating with respect to side ring in described so that described respectively control with movable pawl described control the position with described control between the releasing position mobile.
6. disc holding apparatus as claimed in claim 5 is characterized in that,
Described rotary drive mechanism possesses: drive source, with described in the side ring one be supported in described base and the belt pulley that can rotate, and the rotation of described drive source be passed to the belt of described belt pulley.
7. as each described disc holding apparatus of claim 1 to 6, it is characterized in that,
Described a plurality of controlling with movable pawl respectively by first spring to the described radially foreign side application of force,
Described movable pawl driving mechanism possesses:
A plurality of handles, it is supported on the described outer ring and also can rotates according to being connected to described a plurality of mode of controlling with each outer end of movable pawl with an end respectively;
Second spring, it is set at the other end of described a plurality of handles and is arranged between the steady pin on the described outer ring, utilize an end of described a plurality of handles, with active force, to described a plurality of controlling with movable pawl respectively to described interior side's application of force radially greater than the active force of described first spring;
Connect mechanism, it links side ring in described and described outer ring, and limits the relative rotation angle of described interior side ring and described outer ring; And
Relatively rotation produces mechanism, and it makes, and side ring is relative with described outer ring in described rotates.
8. disc holding apparatus as claimed in claim 7 is characterized in that,
Described connect mechanism between the primary importance and the second place, limit described in side ring and the counterrotating angle of described outer ring, described primary importance be each end of described a plurality of handles push described a plurality of control will respectively control with movable pawl with movable pawl remain on the described position of controlling the position, the described second place is to remove described each end described a plurality of controlling with pushing of movable pawl remained on the described position of controlling the releasing position with described a plurality of controlling with movable pawl.
9. disc holding apparatus as claimed in claim 8 is characterized in that,
Described connect mechanism possesses:
Handle, it is supported in described interior side ring and can rotates;
Rotation transmission member, it is set on the described outer ring, fastens with this handle, and described outer ring is passed to described handle with respect to rotating and reverse of side ring in described; And
The 3rd spring, its be set at the leading section of described handle and be arranged on described between the steady pin on the side ring, be that the application of force can be carried out rotationally in the center with the dead point between the described primary importance and the described second place to described handle.
10. disc holding apparatus as claimed in claim 7 is characterized in that,
Possesses the cancel system of controlling, the described cancel system of controlling is connected to the peripheral part of described plectane and under the state that described plectane is controlled at described each handle part, described a plurality of control rotate a circle with movable pawl side ring and outer ring in described during, fasten with described a plurality of handles successively one by one, remove each handle to described a plurality of controlling, make successively one by one to be positioned at and describedly control the described a plurality of of position and control with movable pawl to the described releasing position displacement of controlling with the pushing of movable pawl.
11. disc holding apparatus as claimed in claim 7 is characterized in that,
Described relative rotation produces mechanism and constitutes, possess: be configured in second drive source on every side of described outer ring and the friction belt that utilizes this drive source drives power to be rotated, by described friction belt is contacted with the periphery of described outer ring, make described outer ring carry out rotating with respect to side ring in described.
12. disc holding apparatus as claimed in claim 7 is characterized in that,
Described relative rotation produces mechanism and constitutes, possess: be configured in described outer ring around second drive source, the ring gear that is driven the gear that is rotated and is fixed on the periphery of described outer ring by this drive source, by described gear is meshed with described ring gear, make described outer ring carry out rotating with respect to side ring in described.
13. disc holding apparatus as claimed in claim 7, it is characterized in that, possess the wafer mounting table, described wafer mounting table can and be carried out lifting at the bearing position at the back side of supporting the described plectane of carrying from the outside between the retreating position of this bearing position decline.
14. a defect/foreign material detecting apparatus is characterized in that possessing:
The described disc holding apparatus of claim 7;
Be configured in a plurality of video cameras of the position that can take the surface and the back side of described plectane; And
Test section, it is according to the image information of described shot by camera, detects on the surface of described plectane and the adhering to of defective on the back side and foreign matter.
15. defect/foreign material detecting apparatus as claimed in claim 14 is characterized in that, possesses:
The rim detection mechanism that the peripheral part of described plectane is taken; And
Test section, its according to the image information of the upper limb of the peripheral part of the captured described plectane of described rim detection mechanism and upper side by face side possessed and by rear side possessed the lower edge of the peripheral part of the captured described plectane of described rim detection mechanism and the image information of lower side, detect the defective of peripheral part and the adhering to of foreign matter of described plectane.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006336988 | 2006-12-14 | ||
| JP336988/2006 | 2006-12-14 | ||
| PCT/JP2007/074027 WO2008072694A1 (en) | 2006-12-14 | 2007-12-13 | Disc holding apparatus and defect/foreign material detecting apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101563769A true CN101563769A (en) | 2009-10-21 |
| CN101563769B CN101563769B (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2007800458963A Active CN101563769B (en) | 2006-12-14 | 2007-12-13 | Disc holding apparatus and defect/foreign material detecting apparatus |
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|---|---|
| US (1) | US8348255B2 (en) |
| EP (1) | EP2095412B1 (en) |
| JP (1) | JP5175743B2 (en) |
| KR (1) | KR101361382B1 (en) |
| CN (1) | CN101563769B (en) |
| TW (1) | TWI407518B (en) |
| WO (1) | WO2008072694A1 (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI407518B (en) | 2013-09-01 |
| JPWO2008072694A1 (en) | 2010-04-02 |
| CN101563769B (en) | 2012-07-18 |
| JP5175743B2 (en) | 2013-04-03 |
| EP2095412B1 (en) | 2016-06-29 |
| KR20090098874A (en) | 2009-09-17 |
| WO2008072694A1 (en) | 2008-06-19 |
| EP2095412A1 (en) | 2009-09-02 |
| US8348255B2 (en) | 2013-01-08 |
| US20100025908A1 (en) | 2010-02-04 |
| KR101361382B1 (en) | 2014-02-10 |
| EP2095412A4 (en) | 2011-09-14 |
| TW200845266A (en) | 2008-11-16 |
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