CN101562148B - Method for carbon nano tube to achieve vertical interconnection of upper and lower layers of conductive material - Google Patents
Method for carbon nano tube to achieve vertical interconnection of upper and lower layers of conductive material Download PDFInfo
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- CN101562148B CN101562148B CN2009100829004A CN200910082900A CN101562148B CN 101562148 B CN101562148 B CN 101562148B CN 2009100829004 A CN2009100829004 A CN 2009100829004A CN 200910082900 A CN200910082900 A CN 200910082900A CN 101562148 B CN101562148 B CN 101562148B
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CN2009100829004A CN101562148B (en) | 2009-04-24 | 2009-04-24 | Method for carbon nano tube to achieve vertical interconnection of upper and lower layers of conductive material |
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CN2009100829004A CN101562148B (en) | 2009-04-24 | 2009-04-24 | Method for carbon nano tube to achieve vertical interconnection of upper and lower layers of conductive material |
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CN101562148A CN101562148A (en) | 2009-10-21 |
CN101562148B true CN101562148B (en) | 2011-08-24 |
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CN2009100829004A Expired - Fee Related CN101562148B (en) | 2009-04-24 | 2009-04-24 | Method for carbon nano tube to achieve vertical interconnection of upper and lower layers of conductive material |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2956243B1 (en) * | 2010-02-11 | 2013-10-25 | Commissariat Energie Atomique | INTERCONNECTION STRUCTURE BASED ON REDIRECTED CARBON NANOTUBES |
CN106981720B (en) * | 2017-01-12 | 2020-07-17 | 西南电子技术研究所(中国电子科技集团公司第十研究所) | Integrated TR subassembly of millimeter wave tile formula phased array antenna |
JP6866227B2 (en) * | 2017-05-12 | 2021-04-28 | 日立造船株式会社 | Carbon Nanotube Complex and Its Manufacturing Method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1856871A (en) * | 2003-08-25 | 2006-11-01 | 纳米传导公司 | System and method using self-assembled nano structures in the design and fabrication of an integrated circuit micro-cooler |
CN101094901A (en) * | 2004-11-04 | 2007-12-26 | 皇家飞利浦电子股份有限公司 | Nanotube-based directionally-conductive adhesive |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1856871A (en) * | 2003-08-25 | 2006-11-01 | 纳米传导公司 | System and method using self-assembled nano structures in the design and fabrication of an integrated circuit micro-cooler |
CN101094901A (en) * | 2004-11-04 | 2007-12-26 | 皇家飞利浦电子股份有限公司 | Nanotube-based directionally-conductive adhesive |
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CN101562148A (en) | 2009-10-21 |
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Effective date of registration: 20120801 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Peking University Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 100871 Haidian District the Summer Palace Road,, No. 5, Peking University Patentee before: Peking University |
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Granted publication date: 20110824 Termination date: 20200424 |