CN101561295B - Preparation method for fabry-perot sensor based on corroded high doping optical fiber - Google Patents
Preparation method for fabry-perot sensor based on corroded high doping optical fiber Download PDFInfo
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- CN101561295B CN101561295B CN2009100592041A CN200910059204A CN101561295B CN 101561295 B CN101561295 B CN 101561295B CN 2009100592041 A CN2009100592041 A CN 2009100592041A CN 200910059204 A CN200910059204 A CN 200910059204A CN 101561295 B CN101561295 B CN 101561295B
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Abstract
The invention discloses a preparation method for a fabry-perot sensor based on a corroded high doping optical fiber. The preparation method comprises the following steps: soaking the end face of the high doping optical fiber into a corrosive liquor for corrosion so as to form micropores on the end face; and welding the micropores of two corroded optical fiber oppositely, or welding the micropores of one corroded optical fiber with the end face of a monomode optical fiber to form the optical fabry-perot sensor. A mixed liquor of hydrofluoric acid and strong inorganic acid is taken as the corrosive liquor; the used optical fiber is a fiber core high doping optical fiber; the high doping concentration further increases the corrosion rate difference between a cladding and the fiber core; the strong inorganic acid in the corrosive liquor reduces the concentration of the hydrofluoric acid, reduces the corrosion rate of the corrosive liquor on the cladding, reduces the corrosion of the cladding while simultaneously improving the corrosion depth of the fiber core, and consequently greatly improves the mechanical properties of the welded fabry-perot sensor.
Description
Technical field
The present invention relates to a kind of Fibre Optical Sensor, be specifically related to a kind of preparation method for fabry-perot sensor based on corroded high doping optical fiber.
Background technology
Optical fiber F-P sensor is widely used in strain, pressure, temperature, the isoparametric sensing of refractive index at numerous areas such as industry, military affairs, is divided into Intrinsical and extrinsic type F-P sensor.It is that reflecting surface constitutes enamel amber chamber that extrinsic type optical fiber F-P sensor (EFPI) is meant with fiber end face and air interface, has the sensing characteristics to a certain physics or chemical parameters sensitivity.Traditional EFPI sensor is mainly by one section hollow optic fibre of welding between two section single-mould fibers or hollow kapillary or hollow photon crystal optical fiber or directly utilize hollow bushing two section single-mould fibers to be aimed at and fixing.The EFPI sensor cost of Xing Chenging is low, easy to make like this, but the long very difficult accurately control in chamber is unfavorable for making microsensor.
Application number is 200710078516.8, publication number is that Chinese invention patent " mini optical fibre F-P sensor and method for making that femto-second laser pulse is made " and the application number of CN 101055197A is 200710088067.5, publication number is that the Chinese invention patent " optical fiber F-P sensor and preparation method thereof " of CN 101034007A discloses respectively and utilizes femtosecond laser and excimer laser to process little enamel amber chamber on optical fiber, constitute optical fiber F-P sensor, be used for the detection of strain, temperature, pressure and other parameters.This class sensor performance is good, repeatability high, be suitable for mid-to high-end product, but system of processing cost height is not suitable for penetration and promotion, and process needs mask plate accurately to aim at optical fiber, and degree of regulation requires very high, is difficult to making low-costly and in high volume.
Y.Zhu and A.Wang have reported with hydrofluorite (HF) and ammonium fluoride (NH
4F) as corrosive liquid, by corrosion multimode optical fiber and fusing mode repeatedly, made the fibre optic compression sensor of many enamels amber cavity configuration, see IEEE Photon.Technol.Lett. for details, 17 (2): 447-449 (2005).The step of this sensor production is more, the structure more complicated.People such as C.J.Tuck have reported that hydrofluorite (HF) solution with 48% is as corrosive liquid, direct corrosion general single mode fiber end face, the fiber end face that forms micropore with a section single-mould fiber welding, constitute the optical fiber F-P chamber, see Meas.Sci.Technol. for details, 17:2206-2212 (2006).Because HF is to SiO
2Covering has stronger corrosion, and it is lower that while general single mode fiber fibre core is mixed germanium concentration, cause the corrosion speed difference of covering and fibre core less, so corrosion depth is little.And covering corrosion back fibre diameter is very little, causes the F-P sensor physical strength of welding difficulty and making relatively poor.
Summary of the invention
Problem to be solved by this invention is: how a kind of preparation method for fabry-perot sensor based on corroded high doping optical fiber is provided, and this method can overcome existing defective in the prior art, and cost is low, suitability for mass industrialized production.
Technical matters proposed by the invention is to solve like this: a kind of preparation method for fabry-perot sensor based on corroded high doping optical fiber is provided, it is characterized in that, comprise following steps:
1. the high doping optical fiber end face being invaded corrosive liquid corrodes, at its end face the core segment corrosion is formed micropore, described corrosive liquid is the mixed liquor of hydrofluorite and strong inorganic acid, the fiber core of described high doping optical fiber mixes, doping comprises rare earth element, germanium and boron, doping content is higher than the germanium concentration of mixing of general single mode fiber, and covering is pure quartz;
2. will wash remaining corrosive liquid through the high doping optical fiber that 1. step obtains, and place dustfree environment to dry then or dry up with hair-dryer;
3. pass through the micropore that obtains high doping optical fiber after 2. steps are handled with two and carry out welding relatively or a micropore and a single-mode fiber end face that passes through the high doping optical fiber that obtains after 2. step is handled is carried out welding, form optical fiber F-P sensor.
According to the preparation method for fabry-perot sensor based on corroded high doping optical fiber provided by the present invention, it is characterized in that described strong inorganic acid can generate solable matter with the dopant reaction of fiber core, concentration comprises hydrochloric acid, nitric acid and sulfuric acid etc. greater than 1%.
According to the preparation method for fabry-perot sensor based on corroded high doping optical fiber provided by the present invention, it is characterized in that described hydrofluoric acid concentration is greater than 1%.
According to the preparation method for fabry-perot sensor based on corroded high doping optical fiber provided by the present invention, it is characterized in that the volume ratio of described strong inorganic acid and hydrofluorite was greater than 1: 20.
The invention has the beneficial effects as follows: should have advantages such as cost is low, suitable making in enormous quantities based on the preparation method for fabry-perot sensor of corroded high doping optical fiber.By adding the dopant reaction in strong inorganic acid and the fiber core, the corrosion rate that strengthens covering and fibre core is poor, thereby increases the degree of depth of fiber end face corrosion micropore, obtains required optical fiber F-P sensor by one section optical fiber of welding then.Used optical fiber is the fibre core high doping optical fiber, and it is poor that high-dopant concentration further strengthens the corrosion rate of covering and fibre core.Strong inorganic acid in the corrosive liquid reduces hydrofluoric acid concentration, has reduced the corrosion rate of corrosive liquid to covering, when increasing the fibre core corrosion depth, reduces the etching extent of covering, and the F-P sensor mechanical property after the welding is greatly improved.
Description of drawings
Fig. 1 is the structural representation of the preceding high doping optical fiber end face of corrosion;
Fig. 2 is the structural representation of the high doping optical fiber end face after corroding;
Fig. 3 for corrosion after the structural representation of the optical fiber F-P sensor that forms of welding again;
Fig. 4 has provided the strain and the temperature characterisitic of the optical fiber F-P sensor of embodiment making.
Wherein, 1, covering, 2, fibre core, 3, micropore.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described:
Should be based on the preparation method for fabry-perot sensor of corroded high doping optical fiber, comprise following steps: the high doping optical fiber end face is invaded corrosive liquid corrode, at its end face the core segment corrosion is formed micropore, corrosive liquid is the mixed liquor of hydrofluorite and strong inorganic acid, the fiber core 2 of high doping optical fiber mixes, doping comprises rare earth element, germanium and boron, doping content is higher than the germanium concentration of mixing of general single mode fiber, covering 1 is pure quartz, high doping optical fiber is washed remaining corrosive liquid, place dustfree environment to dry then or dry up with hair-dryer, the micropore 3 that two processing is obtained high doping optical fiber carries out welding relatively, perhaps micropore 3 and the single-mode fiber end face with a high doping optical fiber that obtains after treatment carries out welding, forms optical fiber F-P sensor.
Wherein strong inorganic acid can generate solable matter with the dopant reaction of fiber core, and concentration comprises hydrochloric acid, nitric acid and sulfuric acid etc. greater than 1%.Hydrofluoric acid concentration is greater than 1%.
Below be specific embodiments of the invention:
Based on the optical fiber F-P sensor method for making schematic flow sheet of corroded high doping optical fiber such as Fig. 1～shown in Figure 3.At first, the hydrochloric acid solution of the hydrofluoric acid solution of 40% mass ratio and 35% mass ratio was made into the corrosive liquid of cumulative volume 60mL in 3: 1 by volume.High doping optical fiber adopts the erbium-doped single-mode fiber of Nufern company, and model is EDFC-980-HP.The cutting of Er-doped fiber end face is smooth, shown on Fig. 1, put into corrosive liquid and carry out corrosion processing.After 25 minutes, the Er-doped fiber of corrosion taken out put into deionized water and soaked about 20 minutes, wash remaining corrosive liquid, then it is positioned over that dustfree environment dries or it is stand-by to dry up the back with hair-dryer.Fiber end face fiber core part branch is corroded into a micropore, and the fiber end face three-D profile of actual corrosion is shown in Fig. 2 left side.Optical fiber and general single mode fiber after the corrosion are carried out welding, obtain optical fiber F-P sensor, as shown in Figure 3.In the manufacturing process, hydrochloric acid also other strong inorganic acids such as available nitric acid replaces, the also available boron-doping of Er-doped fiber, mix ytterbium, mix doped fiber such as germanium and replace, as long as guarantee that doping content is higher, and the strong inorganic acid in the corrosive liquid gets final product with fibre core dopant reaction generation solable matter.Also can there be the doped fiber of micropore to carry out welding the corrosion of two butt faces, forms the longer F-P sensor in chamber.In order to make etching time unlikely long, the concentration of strong inorganic acid and hydrofluorite should be greater than 1%, and both volume ratios should be greater than 1: 20.
This sensor can be used for strain sensing, and temperature-insensitive.Fig. 4 has provided the strain and the temperature characterisitic of the optical fiber F-P sensor of embodiment making.Strain sensitivity is 3.1pm/ μ ε, and temperature control is 0.6pm/ ℃, illustrates that this sensor has the temperature-insensitive characteristic, therefore is with a wide range of applications.
Claims (5)
1. the preparation method for fabry-perot sensor based on corroded high doping optical fiber is characterized in that, comprises following steps:
1. the high doping optical fiber end face being immersed corrosive liquid corrodes, at its end face the core segment corrosion is formed micropore, described corrosive liquid is the mixed liquor of hydrofluorite and strong inorganic acid, the fiber core of described high doping optical fiber mixes, doping comprises rare earth element, germanium and boron, doping content is higher than the germanium concentration of mixing of general single mode fiber, and covering is pure quartz;
2. will wash remaining corrosive liquid through the high doping optical fiber that 1. step obtains, and place dustfree environment to dry then or dry up with hair-dryer;
3. pass through the micropore that obtains high doping optical fiber after 2. steps are handled with two and carry out welding relatively or a micropore and a single-mode fiber end face that passes through the high doping optical fiber that obtains after 2. step is handled is carried out welding, form optical fiber F-P sensor.
2. the preparation method for fabry-perot sensor based on corroded high doping optical fiber according to claim 1 is characterized in that, described strong inorganic acid concentration is greater than 1%, and strong inorganic acid can be with the dopant reaction of fiber core, the generation solable matter.
3. the preparation method for fabry-perot sensor based on corroded high doping optical fiber according to claim 2, described strong inorganic acid comprises hydrochloric acid, nitric acid and sulfuric acid.
4. the preparation method for fabry-perot sensor based on corroded high doping optical fiber according to claim 1 is characterized in that described hydrofluoric acid concentration is greater than 1%.
5. the preparation method for fabry-perot sensor based on corroded high doping optical fiber according to claim 1 is characterized in that the volume ratio of strong inorganic acid and hydrofluorite was greater than 1: 20.
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Cited By (2)
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| CN108020248A (en) * | 2017-11-28 | 2018-05-11 | 北京信息科技大学 | The method that large mode field fibre-optical F-P sensor is prepared based on chemical corrosion method |
| CN108168585A (en) * | 2017-12-22 | 2018-06-15 | 北京信息科技大学 | The method that fibre optical sensor is prepared based on chemical attack and welding electric discharge |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020248A (en) * | 2017-11-28 | 2018-05-11 | 北京信息科技大学 | The method that large mode field fibre-optical F-P sensor is prepared based on chemical corrosion method |
| CN108168585A (en) * | 2017-12-22 | 2018-06-15 | 北京信息科技大学 | The method that fibre optical sensor is prepared based on chemical attack and welding electric discharge |
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