CN101556139A - Parallel-type three-dimensional micro-morphology tester - Google Patents
Parallel-type three-dimensional micro-morphology tester Download PDFInfo
- Publication number
- CN101556139A CN101556139A CNA2009100279856A CN200910027985A CN101556139A CN 101556139 A CN101556139 A CN 101556139A CN A2009100279856 A CNA2009100279856 A CN A2009100279856A CN 200910027985 A CN200910027985 A CN 200910027985A CN 101556139 A CN101556139 A CN 101556139A
- Authority
- CN
- China
- Prior art keywords
- parallel
- driving
- probe
- morphology
- tester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention discloses a parallel-type three-dimensional micro-morphology tester which comprises a microcomputer (10), an acquisition card (11), a driving power source (12), a sensor (13) and a parallel driving mechanism (14), wherein, the microcomputer (10) is connected with the acquisition card (11) via ports or slots; the acquisition card (11) is connected with the driving power source (12) and the sensor (13); and the driving power source (12) and the sensor (13) are connected to the parallel driving mechanism (14). The invention dispenses with neither complex driving devices, such as motors, nor complex driving links, such as pulleys and driving screws, and has the advantages of simple mechanism, no accumulated error, small size, light weight and high environmental suitability, therefore, the invention can meet the requirements for the on-site/on-line application of enterprises.
Description
Technical field
The present invention relates to the pattern tester, be specifically related to parallel-type three-dimensional micro-morphology tester.
Background technology
The microscopic appearance of piece surface is for the character of surface of part, and load-bearing capacity, lubricating property, sealing property, friction and wearing character as the surface have a significant impact.Surfaceness is an important indicator of reflection piece surface microcosmos geometric shape.Along with going deep into of research, two-dimentional roughness assessment parameter can not reflect the condition of piece surface all-sidedly and accurately.So the research to the three-dimensional roughness assessment parameters just becomes certainty, and become an important directions of current roughness area research.
Measurement means to surface microscopic topographic mainly contains optical means and contact pilotage scan method.Wherein the contact pilotage scan method is the most frequently used, the most reliable at present surface roughness measuring method, and is the national standard of various countries and the foundation that international standard is formulated always.The contact pilotage scan method is moved at measured surface with certain speed by contact pilotage based on the principle of inductive displacement sensing, because the nao-and micro relief on surface causes moving up and down of contact pilotage, thereby follows the tracks of the geometric configuration of describing out tested profile.
Domestic at present aspect surface microscopic topographic measurement and evaluation, put forth effort on the research of triple assessment system, enriched the roughness theory, realized the three-dimensional microcosmic measurement, successfully develop the tandem three-dimensional micro-morphology tester, use the condition that provides with engineering for the research triple assessment is theoretical.
The tandem three-dimensional micro-morphology tester at work, on two mutually orthogonal directions, gear train drive probe by the motor-driven complexity (comprises the jewel contact pilotage, optical probe, tunnelling probe and atomic force probe etc.) do scanning motion along one of them direction (as the x direction of principal axis), in this scanning direction process, probe is not done moving on the other direction (as the y direction of principal axis), a certain region surface for the continuous sweep workpiece, workpiece is positioned on the worktable, drive workpiece by the worktable servomechanism installation and move one to behind the set a distance along the y direction of principal axis, probe scans along the x direction of principal axis more next time, and so circulation is until been scanned.
The limitation of tandem three-dimensional micro-morphology tester mainly shows:
1 tester mechanism is numerous and jumbled, and transmission link is many, and it is big to insert error, and the trouble spot is many;
2 tester volumes are big, and weight is big, and use occasion and tested object are restricted, and can not satisfy the on-the-spot needs that detect;
3 tester cost height, O﹠M expense height.
Summary of the invention
The objective of the invention is to: propose parallel-type three-dimensional micro-morphology tester, this tester mechanism is simple, does not have cumulative errors, and volume is little, and is in light weight, and environmental suitability is strong, can satisfy the requirement of the on-the-spot online application of enterprise.
The present invention adopts following technical scheme: this tester comprises microcomputer, capture card, driving power, sensor and driving mechanism in parallel, microcomputer connects capture card by interface or slot, capture card connects driving power and sensor, and driving power and sensor are connected on the driving mechanism in parallel; Described driving mechanism in parallel is made up of pedestal, driving stem, banded flexible hinge, probe sway brace and probe, be installed in parallel two driving stems on the pedestal, the front end of two driving stems is installed banded flexible hinge, banded flexible hinge goes up installs the probe sway brace, the front end of probe sway brace is installed probe, sensor is installed on the probe sway brace, and two driving stems connect driving power.
In the parallel-type three-dimensional micro-morphology tester of the present invention, interface can be USB, RS232, EPP or IEEE1394, and slot can be PCI, ISA or EISA.
In the parallel-type three-dimensional micro-morphology tester of the present invention, two driving stems in parallel are made with piezoelectric ceramics, or make with other electrostriction material such as macromolecular material, or make with magnetostriction materials.
In the parallel-type three-dimensional micro-morphology tester of the present invention, banded flexible hinge is made with beryllium bronze band, or by making with other material of beryllium bronze band similar characteristic.
In the parallel-type three-dimensional micro-morphology tester of the present invention, the front end of two driving stems is installed banded flexible hinge by compressing tablet.
In the parallel-type three-dimensional micro-morphology tester of the present invention, banded flexible hinge goes up by compressing tablet installs the probe sway brace.
In the course of work, microcomputer sends and the corresponding data of scanning position to capture card in proper order through interface or slot under programmed control, capture card converts thereof into simulating signal, the output of control two-way driving power, make the length of driving stem of driving mechanism in parallel under the effect of driving power, make respective change, driving probe by banded flexible hinge and probe sway brace scans on the test specimen surface, record the height at each point place, test specimen surface by the sensor that is installed on the probe sway brace, send into capture card and quantize, calculate the surface microscopic topographic parameter and shown and record by microcomputer after interface or slot send microcomputer.
The present invention has the following advantages: 1, banded flexible hinge is that elastic deformation by material realizes motion small, equivalence, have compact conformation, volume little, do not have machinery friction, gapless characteristics; 2, two driving stems in parallel are made up of piezoelectric ceramics, piezoelectric ceramics is a kind of electrostriction material, its length changes with alive size, the length of two driving stems in parallel is by the independent respectively control of two-way driving power, under the cooperation of banded flexible hinge, can drive probe and move, as x direction of principal axis and y direction of principal axis along both direction by the probe sway brace; 3, tester does not have complicated drive units such as motor, does not have complicated transmission link such as pulley, screw mandrel yet, and mechanism is simple, does not have cumulative errors; 4, the tester volume is little, and is in light weight, and environmental suitability is strong, can satisfy the requirement of the on-the-spot online application of enterprise.
Description of drawings
Fig. 1 is a framed structure synoptic diagram of the present invention.
Fig. 2 is the driving mechanism structure synoptic diagram in parallel of Fig. 1.
Among the figure: 1. pedestal, 2. driving stem, 3. No. two driving stems, 4. compressing tablet, 5. compressing tablet, 6. compressing tablet, 7. banded flexible hinge, 8. probe sway brace, 9. probe, 10 microcomputers, 11 capture cards, 12 driving powers, 13 sensors, 14 driving mechanisms in parallel.
Embodiment
As shown in Figure 1, this tester comprises microcomputer 10, capture card 11, driving power 12, sensor 13 and driving mechanism in parallel 14, microcomputer 10 connects capture card 11 by interface or slot, capture card 11 connects driving power 12 and sensor 13, and driving power 12 and sensor 13 are connected on the driving mechanism 14 in parallel; Described driving mechanism in parallel is made up of pedestal 1, driving stem 2, No. two driving stems 3, banded flexible hinge 7, probe sway brace 8 and probes 9, be installed in parallel a driving stem 2 and No. two driving stems 3 on the pedestal 1, the front end of a driving stem 2 and No. two driving stems 3 is installed banded flexible hinge 7, on the banded flexible hinge 7 probe sway brace 8 is installed, the front end of probe sway brace 8 is installed probe 9, sensor 13 is installed on the probe sway brace 8, and No. one driving stem 2 is connected driving power 12 with No. two driving stems 3.
In the parallel-type three-dimensional micro-morphology tester of the present invention, interface can be USB, RS232, EPP or IEEE1394, and slot can be PCI, ISA or EISA.
In the parallel-type three-dimensional micro-morphology tester of the present invention, two driving stems in parallel are that a driving stem 2 and No. two driving stem 3 usefulness piezoelectric ceramics are made, or make with other electrostriction material such as macromolecular material, or make with magnetostriction materials.
In the parallel-type three-dimensional micro-morphology tester of the present invention, banded flexible hinge 7 usefulness beryllium bronze bands are made, or by making with other material of beryllium bronze band similar characteristic.
In the parallel-type three-dimensional micro-morphology tester of the present invention, two driving stems i.e. front end of a driving stem 2 and No. two driving stems 3 are installed banded flexible hinge 7 by compressing tablet 4 and compressing tablet 5 respectively.
In the parallel-type three-dimensional micro-morphology tester of the present invention, by compressing tablet 6 probe sway brace 8 is installed on the banded flexible hinge 7.
During measurement, microcomputer sends and the corresponding data of scanning position to capture card through interface or slot under programmed control, capture card converts thereof into simulating signal, the output of control two-way driving power, make a driving stem of driving mechanism in parallel, the length of No. two driving stems is made respective change under the effect of driving power, drive probe by banded flexible hinge and probe sway brace and make single pass from first assigned address along X-direction on the test specimen surface, record the height z at surperficial each point place by the sensor that is installed on the probe sway brace, send into capture card and quantize after interface or slot send microcomputer; Probe is after finishing the scanning sample first time, probe arrives the next assigned address on test specimen surface automatically under programmed control, this position and last scanning starting position differ one and give set a distance on Y direction, from then on the scanning second time is carried out along X-direction in the position, by that analogy, up to finishing n scanning; Automatically preserve this x that scans each sampled point, y, z numerical value behind each end of scan, can obtain the three-dimensional data on scanning area surface in view of the above.
Claims (6)
1. parallel-type three-dimensional micro-morphology tester, this tester comprises microcomputer (10), capture card (11), driving power (12), sensor (13) and driving mechanism in parallel (14), microcomputer (10) connects capture card (11) by interface or slot, capture card (11) connects driving power (12) and sensor (13), and driving power (12) and sensor (13) are connected on the driving mechanism in parallel (14); Described driving mechanism in parallel is made up of pedestal (1), a driving stem (2), No. two driving stems (3), banded flexible hinge (7), probe sway brace (8) and probe (9), be installed in parallel a driving stem (2), No. two driving stems (3) on the pedestal (1), the front end of two driving stems (2,3) is installed banded flexible hinge (7), banded flexible hinge (7) goes up installs probe sway brace (8), the front end of probe sway brace (8) is installed probe (9), sensor (13) is installed on the probe sway brace (8), and No. one, No. two driving stems (2,3) connect driving power (12).
2. parallel-type three-dimensional micro-morphology tester according to claim 1, interface are USB, RS232, EPP or IEEE1394, and slot is PCI, ISA or EISA.
3. parallel-type three-dimensional micro-morphology tester according to claim 1, two driving stems in parallel (2,3) are made with piezoelectric ceramics, or are that macromolecular material is made with other electrostriction material.
4. parallel-type three-dimensional micro-morphology tester according to claim 1, banded flexible hinge (7) is made with beryllium bronze band, or makes with magnetostriction materials, or by making with other material of beryllium bronze band similar characteristic.
5. parallel-type three-dimensional micro-morphology tester according to claim 1, the front end of No. one, No. two driving stems (2,3) is installed banded flexible hinge (7) by compressing tablet (4,5).
6. parallel-type three-dimensional micro-morphology tester according to claim 1, banded flexible hinge (7) goes up by compressing tablet (6) probe sway brace (8) is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100279856A CN101556139A (en) | 2009-05-15 | 2009-05-15 | Parallel-type three-dimensional micro-morphology tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100279856A CN101556139A (en) | 2009-05-15 | 2009-05-15 | Parallel-type three-dimensional micro-morphology tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101556139A true CN101556139A (en) | 2009-10-14 |
Family
ID=41174342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100279856A Pending CN101556139A (en) | 2009-05-15 | 2009-05-15 | Parallel-type three-dimensional micro-morphology tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101556139A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781047A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Probe-type measurement system and its measurement method |
-
2009
- 2009-05-15 CN CNA2009100279856A patent/CN101556139A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781047A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Probe-type measurement system and its measurement method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103212540B (en) | Multi-parameter on-site is measured and separation system automatically | |
| CN103148822B (en) | Multiple spot measuring thickness device and using method thereof | |
| CN203053405U (en) | Rapid gear single error field measuring device based on double-face engagement | |
| CN201221938Y (en) | Non-contact intelligent off-line testing instrument of large-scale cylinder workpiece | |
| CN202869440U (en) | Five-shaft system solid of revolution measuring instrument | |
| CN105698670B (en) | A kind of method for fast measuring of the machine tool guideway mounting plane depth of parallelism | |
| CN105547161B (en) | A kind of high-precision flexible measuring device and method for linear measure longimetry | |
| CN105842095A (en) | Computer controlled metal material indentation load-displacement data measurement system | |
| CN201449249U (en) | Parallel-type three-dimensional microtopography tester | |
| CN203163692U (en) | Multi-parameter on-site automatic measuring and sorting system | |
| CN102121816A (en) | Horizontal roundness and cylindricity automatic-measuring device | |
| CN206656700U (en) | The two-in-one detection machine of height diameter | |
| CN102658503B (en) | Modal testing method of numerical control machine tool feed system based on built-in sensors | |
| CN102809359A (en) | Claw pole boss height measuring device | |
| CN105157583B (en) | A kind of axle journal length measuring system | |
| CN2935138Y (en) | Concrete test piece crack detecting device | |
| CN101852580B (en) | Workpiece length correcting device | |
| CN102865816A (en) | Non-contact automatic detection device for absolute grating ruler overall measuring accuracy | |
| CN204405509U (en) | Digital output bit moves sensor-type high-frequency reciprocating tester | |
| CN101556139A (en) | Parallel-type three-dimensional micro-morphology tester | |
| CN1137370C (en) | Image-type automatic calibrating instrument for micrometer gauge or dial gauge | |
| CN110986792B (en) | High-precision detection device and detection method for one-dimensional ball or cone nest array | |
| CN202092622U (en) | Height measuring device of claw pole boss | |
| CN106989671A (en) | A kind of train wheel optical measuring device | |
| CN1986928B (en) | Residual vibration measurer for opened cam |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20091014 |