CN101548444B - 光学微谐振器 - Google Patents

光学微谐振器 Download PDF

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Publication number
CN101548444B
CN101548444B CN2007800445145A CN200780044514A CN101548444B CN 101548444 B CN101548444 B CN 101548444B CN 2007800445145 A CN2007800445145 A CN 2007800445145A CN 200780044514 A CN200780044514 A CN 200780044514A CN 101548444 B CN101548444 B CN 101548444B
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China
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core
optical
microresonator
resonator
guided
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Expired - Fee Related
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CN2007800445145A
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Chinese (zh)
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CN101548444A (zh
Inventor
巴里·J·科赫
特里·L·史密斯
易亚沙
郭春梅
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G01N21/7746Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the waveguide coupled to a cavity resonator
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1223Basic optical elements, e.g. light-guiding paths high refractive index type, i.e. high-contrast waveguides

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Integrated Circuits (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN2007800445145A 2006-12-01 2007-11-19 光学微谐振器 Expired - Fee Related CN101548444B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/565,935 US7702202B2 (en) 2006-12-01 2006-12-01 Optical microresonator
US11/565,935 2006-12-01
PCT/US2007/085095 WO2008070436A1 (en) 2006-12-01 2007-11-19 Optical microresonator

Publications (2)

Publication Number Publication Date
CN101548444A CN101548444A (zh) 2009-09-30
CN101548444B true CN101548444B (zh) 2011-07-27

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CN2007800445145A Expired - Fee Related CN101548444B (zh) 2006-12-01 2007-11-19 光学微谐振器

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US (2) US7702202B2 (enExample)
EP (1) EP2097954A1 (enExample)
JP (1) JP2010511898A (enExample)
CN (1) CN101548444B (enExample)
WO (1) WO2008070436A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7702202B2 (en) * 2006-12-01 2010-04-20 3M Innovative Properties Company Optical microresonator
US7903240B2 (en) 2006-12-01 2011-03-08 3M Innovative Properties Company Optical sensing device
US7778499B2 (en) * 2007-05-21 2010-08-17 National Research Council Of Canada Silicon photonic wire waveguide biosensor
US7835066B2 (en) * 2008-12-22 2010-11-16 Northrop Grumman Systems Corporation Systems and methods for generating electromagnetic radiation
WO2010078057A2 (en) 2008-12-30 2010-07-08 3M Innovative Properties Company Optical microresonator system
US8515227B2 (en) * 2009-03-13 2013-08-20 Ofs Fitel, Llc Microbubble optical resonator
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
GB2487169B (en) * 2009-10-12 2015-02-18 Ibm Electromagnetic wave isolator and integrated optics device
CN102042969B (zh) * 2009-10-15 2012-05-23 北京理工大学 基于沸石分子筛镀膜微谐振器的光纤传感器及其制备方法
CN101975763A (zh) * 2010-08-24 2011-02-16 中北大学 一体化探头式微球腔传感器
WO2012037432A1 (en) * 2010-09-17 2012-03-22 Ofs Fitel, Llc High q-factor conical optical microresonator and utilization in the location characterization of optical fibers
CN102013620B (zh) * 2010-11-11 2012-07-04 厦门大学 带输出波导的圆形微腔激光器
WO2012171557A1 (en) * 2011-06-15 2012-12-20 Universidad Pública de Navarra Integration platform incorporating optical waveguide structures
WO2016134547A1 (zh) * 2015-02-28 2016-09-01 华为技术有限公司 一种光波导终结装置、光通信设备及终结光波的方法
US10024656B2 (en) 2015-04-29 2018-07-17 Honeywell International Inc. System and methods for highly integrated optical readout MEMS sensors
US9803979B2 (en) * 2015-06-26 2017-10-31 Honeywell International Inc. Systems and methods for a time-based optical pickoff for MEMS sensors
EP3113303B1 (en) * 2015-07-01 2019-10-16 Institut Mines-Telecom Light-emitting device having iii-v semiconductor gain section coupled to whistle-geometry tunable filter
US10114173B2 (en) 2017-03-14 2018-10-30 Huawei Technologies Co., Ltd. Optical device
US11835393B2 (en) 2018-02-19 2023-12-05 Washington University Microprobe
JP7455529B2 (ja) 2019-08-01 2024-03-26 キヤノンメディカルシステムズ株式会社 検体測定装置及び検体測定装置の制御方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6583399B1 (en) * 1999-11-22 2003-06-24 California Institute Of Technology Optical resonator microsphere sensor with altering Q-factor
US6661950B1 (en) * 2001-01-10 2003-12-09 Nomadics, Inc. Microresonator-based tuned optical filter
CN1867844A (zh) * 2003-10-14 2006-11-22 3M创新有限公司 混合球体波导谐振器
CN1867824A (zh) * 2003-10-14 2006-11-22 3M创新有限公司 作为传感器的多孔微球共振器

Family Cites Families (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543449A (en) 1977-06-10 1979-01-11 Nippon Telegr & Teleph Corp <Ntt> Semioptical band blooking filter
US4775214A (en) 1983-12-21 1988-10-04 Rosemount Inc. Wavelength coded resonant optical sensor
US4695121A (en) * 1985-01-28 1987-09-22 Polaroid Corporation Integrated optic resonant structres and fabrication method
US5537432A (en) 1993-01-07 1996-07-16 Sdl, Inc. Wavelength-stabilized, high power semiconductor laser
US5398256A (en) 1993-05-10 1995-03-14 The United States Of America As Represented By The United States Department Of Energy Interferometric ring lasers and optical devices
US5420880A (en) 1993-10-12 1995-05-30 Wisconsin Alumni Research Foundation Low threshold vertical cavity surface emitting laser
US5748663A (en) 1994-06-08 1998-05-05 Qsource, Inc. Retangular discharge gas laser
US5744902A (en) * 1995-05-16 1998-04-28 The United States Of America As Represented By The Secretary Of The Army Chemical and biological sensor based on microresonators
US5926496A (en) 1995-05-25 1999-07-20 Northwestern University Semiconductor micro-resonator device
US6009115A (en) 1995-05-25 1999-12-28 Northwestern University Semiconductor micro-resonator device
US5910963A (en) 1997-04-08 1999-06-08 Carl Zeiss Jena Gmbh Laser resonator design with improved signal-to-noise level (S/N) at the output of a single-mode fiber-coupled multi-wavelength laser providing illumination for a laser scanning microscope
DE29707358U1 (de) 1997-04-23 1998-08-27 Ferco International Ferrures et Serrures de Bâtiment S.A., Reding Beschlag mit Tragarm oder Ausstellarm zur Lagerung eines Drehflügels oder Dreh-Kippflügels
WO2000029886A1 (en) 1998-11-13 2000-05-25 California Institute Of Technology Resonator fiber bidirectional coupler
US6608716B1 (en) 1999-05-17 2003-08-19 New Mexico State University Technology Transfer Corporation Optical enhancement with nanoparticles and microcavities
US6711200B1 (en) 1999-09-07 2004-03-23 California Institute Of Technology Tuneable photonic crystal lasers and a method of fabricating the same
US7266271B2 (en) * 1999-10-06 2007-09-04 Nomadics, Inc. System, probe and methods for colorimetric testing
EP1221051A4 (en) 1999-10-14 2003-03-05 Univ Utah Res Found RESONANT OPTICAL CAVITIES FOR HIGH SENSITIVITY AND HIGH EFFICIENCY BIODETECTORS AND METHODS USING THE SAME
AU2001239794A1 (en) * 2000-02-17 2001-08-27 Cquint Communications Corporation Resonant optical filters
WO2001067565A1 (en) * 2000-03-09 2001-09-13 California Institute Of Technology Micro-cavity laser
WO2001071401A1 (en) 2000-03-22 2001-09-27 California Institute Of Technology Non-spherical whispering-gallery-mode microactivity
US6507684B2 (en) 2000-06-28 2003-01-14 The Charles Stark Draper Laboratory, Inc. Optical microcavity resonator system
US6490039B2 (en) 2000-08-08 2002-12-03 California Institute Of Technology Optical sensing based on whispering-gallery-mode microcavity
JP2004510182A (ja) 2000-09-22 2004-04-02 マサチューセッツ インスティテュート オブ テクノロジー 導波路形マイクロ共振子の共振特性を変える方法
AU2002225765A1 (en) 2000-11-28 2002-06-11 Rosemount, Inc. Arrangement for measuring physical parameters with an optical sensor
US6515749B2 (en) 2001-01-10 2003-02-04 The United States Of America As Represented By The Secretary Of Commerce Sensitive and selective chemical sensor with nanostructured surfaces
US20030063426A1 (en) 2001-08-29 2003-04-03 D-Wave Systems, Inc. Microsphere optical device
US6778316B2 (en) * 2001-10-24 2004-08-17 William Marsh Rice University Nanoparticle-based all-optical sensors
US20040023396A1 (en) 2001-11-14 2004-02-05 Boyd Robert W. Ring or disk resonator photonic biosensor and its use
GR1004178B (el) 2001-11-29 2003-03-05 "����������" Ολοκληρωμενος οπτοηλεκτρονικος βιοαισθητηρας πυριτιου για ανιχνευση βιομοριων επισημασμενων με χρωμοφορες ομαδες ή νανοσωματιδια
US6947632B2 (en) 2002-01-03 2005-09-20 Fischer Sylvain G Method of implementing the kerr effect in an integrated ring resonator (the kerr integrated optical ring filter) to achieve all-optical wavelength switching, as well as all-optical tunable filtering, add-and -drop multiplexing, space switching and optical intensity modulation
US6876796B2 (en) 2002-01-30 2005-04-05 Photon-X, Llc Nanocomposite microresonators
US7245801B2 (en) 2002-03-21 2007-07-17 University Of Rochester Apparatus with a series of resonator structures situated near an optical waveguide for manipulating optical pulses
US6680962B2 (en) 2002-04-29 2004-01-20 Bin Liu Narrow linewidth, low frequency chirping and broad wavelength tunable ring resonator coupled lasers
JP2003337236A (ja) * 2002-05-17 2003-11-28 Nec Corp 光リング共振器、光導波路デバイスならびに光リング共振器の製造方法
US6891998B2 (en) * 2002-09-27 2005-05-10 Intel Corporation Methods and apparatus for passive depolarization
WO2004038370A2 (en) 2002-10-22 2004-05-06 Polytechnic University Enhancing the sensitivity of a microsphere sensor
US7095010B2 (en) * 2002-12-04 2006-08-22 California Institute Of Technology Silicon on insulator resonator sensors and modulators and method of operating the same
US7092591B2 (en) * 2003-02-03 2006-08-15 California Institute Of Technology Tunable optical filters having electro-optic whispering-gallery-mode resonators
ATE441954T1 (de) 2003-02-12 2009-09-15 California Inst Of Techn Ringresonator mit radialem bragg-reflektor
US7085452B1 (en) 2003-03-21 2006-08-01 I Fos, Inc. Optical devices having WGM cavity coupled to side-polished port
WO2005008296A2 (en) 2003-07-03 2005-01-27 Oewaves, Inc. Optical coupling for whispering-gallery-mode resonators via waveguide gratings
US7062118B2 (en) 2003-07-18 2006-06-13 3M Innovative Properties Company Microring resonator and method for manufacturing
WO2005019798A2 (en) 2003-08-13 2005-03-03 The Regents Of The University Of Michigan Biochemical sensors with micro-resonators
WO2005060052A2 (en) 2003-12-18 2005-06-30 Yeda Research And Development Company Ltd. Resonator cavity configuration and method
US20050141809A1 (en) * 2003-12-31 2005-06-30 Gardner Donald S. Microring and microdisk resonators for lasers fabricated on silicon wafers
US7244926B2 (en) 2004-02-26 2007-07-17 Nomadics, Inc. Microresonator-based high-performance high-pressure sensor and system
US7177492B2 (en) * 2004-03-11 2007-02-13 Nomadics, Inc. System, probe and methods for colorimetric testing
CN101027546B (zh) 2004-05-26 2013-09-25 杰纳罗生物系统有限责任公司 利用微球中回音廊模式的生物传感器
US7271379B2 (en) 2004-05-27 2007-09-18 3M Innovative Properties Company Dielectric microcavity fluorosensors excited with a broadband light source
US7260279B2 (en) 2004-06-09 2007-08-21 Oewaves, Inc. Integrated opto-electronic oscillators
US7257279B2 (en) 2004-09-20 2007-08-14 3M Innovative Properties Company Systems and methods for biosensing and microresonator sensors for same
US7324199B2 (en) * 2004-09-20 2008-01-29 Nomadics, Inc. System and deconvolution process for an optical filtering device based on WGM resonance
GB0505646D0 (en) 2005-03-18 2005-04-27 Oxborrow Mark Solid-state maser oscillator of high frequency stability and low phase noise
US7228016B2 (en) * 2005-05-11 2007-06-05 Hewlett-Packard Development Company, L.P. Evanescent nanosensor using an optical resonator
US8015065B2 (en) * 2005-10-28 2011-09-06 Yahoo! Inc. Systems and methods for assigning monetary values to search terms
US7389025B2 (en) * 2006-03-29 2008-06-17 3M Innovative Properties Company Coupling light into microresonators
US7702202B2 (en) * 2006-12-01 2010-04-20 3M Innovative Properties Company Optical microresonator
US7933022B2 (en) * 2006-12-01 2011-04-26 3M Innovative Properties Company Integrated optical disk resonator
US7486855B2 (en) * 2006-12-27 2009-02-03 3M Innovative Properties Company Optical microresonator
US7903906B2 (en) * 2006-12-01 2011-03-08 3M Innovative Properties Company Optical sensing devices and methods
US7512298B2 (en) * 2006-12-01 2009-03-31 3M Innovative Properties Company Optical sensing methods
US7665891B1 (en) * 2007-09-20 2010-02-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Differential temperature sensor system and method
WO2009064635A1 (en) * 2007-11-15 2009-05-22 3M Innovative Properties Company Optical microresonator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6583399B1 (en) * 1999-11-22 2003-06-24 California Institute Of Technology Optical resonator microsphere sensor with altering Q-factor
US6661950B1 (en) * 2001-01-10 2003-12-09 Nomadics, Inc. Microresonator-based tuned optical filter
CN1867844A (zh) * 2003-10-14 2006-11-22 3M创新有限公司 混合球体波导谐振器
CN1867824A (zh) * 2003-10-14 2006-11-22 3M创新有限公司 作为传感器的多孔微球共振器

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
王跃林等.利用微机械技术的谐振器及集成光学传感器研究.仪器仪表学报16 1.1995,16(1),331-335.
王跃林等.利用微机械技术的谐振器及集成光学传感器研究.仪器仪表学报16 1.1995,16(1),331-335. *

Also Published As

Publication number Publication date
US20080131049A1 (en) 2008-06-05
EP2097954A1 (en) 2009-09-09
WO2008070436A1 (en) 2008-06-12
JP2010511898A (ja) 2010-04-15
CN101548444A (zh) 2009-09-30
US20100158439A1 (en) 2010-06-24
US7702202B2 (en) 2010-04-20

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