CN101548278B - Manufacturable micropositioning system emplyoying non-linear actuator - Google Patents

Manufacturable micropositioning system emplyoying non-linear actuator Download PDF

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Publication number
CN101548278B
CN101548278B CN2007800375710A CN200780037571A CN101548278B CN 101548278 B CN101548278 B CN 101548278B CN 2007800375710 A CN2007800375710 A CN 2007800375710A CN 200780037571 A CN200780037571 A CN 200780037571A CN 101548278 B CN101548278 B CN 101548278B
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China
Prior art keywords
data
resolution
module
induction targets
lead screw
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CN2007800375710A
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Chinese (zh)
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CN101548278A (en
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L·韦斯特维克
W·格日瓦
K·雷施克
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Nanchang Virtual Reality Institute Co Ltd
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Flextronics International USA Inc
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Priority claimed from US11/514,811 external-priority patent/US7531773B2/en
Priority claimed from US11/888,939 external-priority patent/US7590505B2/en
Application filed by Flextronics International USA Inc filed Critical Flextronics International USA Inc
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Abstract

Embodiments of the present invention relate to systems and methods of position sensing that use a sensing target with a pattern of features thereupon, and to positioning modules and systems that position functional elements using such position sensing systems. A position sensing system includes an encoding module and a processing module. The encoding module has an active encoding region through which the sensing target is configured to move. Further, the encoding module is configured to generate a signal based on a portion of the sensing target within the active encoding region. The active encoding region has a dimension greater than the average critical dimension of the pattern of features. The processing module is configured to convert the signal generated into a position data based on an input range condition and an initial position condition.

Description

Use the miniature positioning system of making of non-linear actuator
Related application
According to the 35th article of the 119th (e) money of United States Patent (USP) code, the application number that present patent application requires on August 8th, 2006 to submit to is 60/836,616, title is the right of priority of the common unsettled U.S. Provisional Patent Application of " MINIATURIZEDZOOM MODULE WITH ROTATIONAL PIEZO ACTUATOR WITHANTI-LOCK FEATURE; EVEN FORCE DISTRIBUTION; SHOCKDAMAGE PREVENTION AND A NOVEL POSITION SENSINGMETHODS ", and it is incorporated herein by reference.
In addition, present patent application is that application number is 11/514,811, the applying date is that on September 1st, 2006, title are the part continuation application of the common unsettled U.S. Patent application of " AUTO-FOCUS AND ZOOM MODULE ", according to the 35th article of the 119th (e) money of United States Patent (USP) code, the application number that this patented claim requires on September 8th, 2005 to submit to is 60/715,533, exercise question is the right of priority of the common unsettled U.S. Provisional Patent Application of " 3X ZOOM MINI MODULE ", and these two applications are incorporated herein by reference.
Technical field
The present invention relates to the controlled location and the position probing of the function element (comprising optical element) in the small form factor parts.More particularly, the present invention relates to automatic focus and Zoom module.
Background technology
Recently, existing many development in the digital camera technology that relies on the micro element location.Such development is the further microminiaturized sizes to millimeter and time millimeter of ray machine parts.The size of the moving-member of camera reduces the device that allows modern digital cameras and optical technology to implement to become wider scope, and this constantly is designed to and is configured to more and more littler form factor.Although moving-member dwindles, they still must accurately be located to be used for optics and mechanically accurate task.In addition, being responsible for accurately, the parts of this base part of location also must become more and more littler.
The various strategies that are used for the small-sized location of optics and other function element are known.Yet, still do not have available solution to be used for accurate, small-sized location in the little form factor and the device that can make economically.
Summary of the invention
Embodiments of the invention relate to position sensing system and the location sensitive method that has the induction targets of pattern or repeated characteristic on it of using.In addition, embodiment also relates to the location of the function element of using this type of position sensing system.Especially, some embodiment relate to the location of optical element.
In some embodiments of the invention, position sensing system uses induction targets, and this induction targets has the characteristic pattern of band average cd.This position sensing system comprises coding module and processing module.This coding module has initiatively code area, and induction targets moves by this active code area configuration.In addition, this coding module is configured to produce signal based on the part of the induction targets in the active code area.The size that this active code area has is greater than the average cd of characteristic pattern.This processing module is configured to the initial position condition conversion of signals that generates be become position data based on the input range condition.
In certain embodiments of the present invention, miniature locating module comprises function group, driving shaft, actuator, induction targets and position sensing system.The function group is connected on the driving shaft.Actuator is configured to make the driving shaft translation with the locomotive function group.Preferably in drive shaft function group between moving period, induction targets is configured to the motion with the first resolution representation function group.Position sensing system is configured to have induction targets to carry out some steps.At first, with the motion of the first resolution measuring ability group as the original motion data; Then, the original motion data is processed into correction of movement data with second resolution; At last, the correction of movement data-switching is become to describe the position data of the first function group position.This second resolution is greater than first resolution.
Among other the embodiment, miniature locating module comprises function group, actuator, induction targets and position sensing system at some.The function group is connected on the lead screw, thereby the rotation of lead screw causes the function group along the axis translation that is parallel to this lead screw.Actuator is configured to make the lead screw rotation.Induction targets is configured to describe with first resolution rotation of lead screw.Position sensing system is configured to have induction targets so that detect the rotation of lead screw as original spin data with first resolution.Position sensing system is processed into the correction spin data with second resolution with original spin data, and wherein, this second resolution is greater than first resolution.Position sensing system high-ranking officers positive rotation data-switching becomes the position data of representation function group position.
Some embodiment relate to the method that detects the position that is connected to the function group on the induction targets, and this induction targets is configured to describe with first resolution motion of this function group.This method comprises the steps: to use the motion of induction targets with the first resolution measuring ability group; The original motion data of describing the motion that detects is encoded; The original motion data is processed into the correction of movement data with second resolution, and wherein, this second resolution is greater than first resolution; And the position data that the correction of movement data-switching is become the position of representation function group.
Description of drawings
Novel feature of the present invention is illustrated in claims.Yet for illustrative purposes, several embodiments of the present invention are illustrated in following figure.
Fig. 1 be according to some embodiments of the invention automatic focus and the isometric view of Zoom module;
Fig. 2 be according to some embodiments of the invention automatic focus and the isometric view of Zoom module;
Fig. 3 is automatic focus and the inner body of the Zoom module isometric view that is in end stop position according to some embodiments of the invention;
Fig. 4 is automatic focus and the inner body of the Zoom module alternative isometric view that is in end stop position according to some embodiments of the invention;
Fig. 5 A is automatic focus and the isometric view that mediates of the inner body of Zoom module according to some embodiments of the invention;
Fig. 5 B is automatic focus and the vertical view that mediates of the contained spring element of Zoom module according to some embodiments of the invention;
Fig. 6 A is automatic focus and the alternative vertical view that mediates of the contained spring element of Zoom module according to some embodiments of the invention;
Fig. 6 B is automatic focus and the isometric view that mediates of the contained spring element of Zoom module according to some embodiments of the invention;
Fig. 7 A is automatic focus and the contained spring element of the Zoom module vertical view that is in remote location according to some embodiments of the invention;
Fig. 7 B is automatic focus and the contained spring element of the Zoom module isometric view that is in remote location according to some embodiments of the invention;
Fig. 8 A illustrates automatic focus that is in end stop position and Zoom module according to some embodiments of the invention;
Fig. 8 B illustrates automatic focus that mediates and Zoom module according to some embodiments of the invention;
Fig. 8 C illustrates automatic focus that is in remote location and Zoom module according to some embodiments of the invention;
Fig. 9 is the vertical view along the optical axial of automatic focus and Zoom module according to some embodiments of the invention;
Figure 10 A is the vertical view of actuator according to some embodiments of the invention;
Figure 10 B is the isometric view of actuator according to some embodiments of the invention;
Figure 10 C is the isometric view of actuator according to some embodiments of the invention;
Figure 11 A is the diagram of position transducer according to some embodiments of the invention;
Figure 11 B is the diagram of the beam propagation that takes place between detection period according to some embodiments of the invention;
Figure 11 C is the diagram of the beam propagation that takes place between detection period according to some embodiments of the invention;
Figure 12 A is the synoptic diagram that is used for the direct imaging scheme of location sensitive in the beam propagation diagram that the position took place between sensitive period according to some embodiments of the invention;
Figure 12 B is the synoptic diagram based on the imaging scheme of lens that is used for location sensitive according to some embodiments of the invention;
Figure 12 C is the synoptic diagram based on the imaging scheme of aperture that is used for location sensitive according to some embodiments of the invention;
Figure 13 A is the exploded isometric view of the assembly that is used for location sensitive according to some embodiments of the invention;
Figure 13 B is the exploded isometric view of the assembly that is used for location sensitive according to some embodiments of the invention;
Figure 14 A is the detail drawing of the location sensitive part of optical module according to some embodiments of the invention;
Figure 14 B is the detail drawing of the location sensitive part of optical module according to some embodiments of the invention;
Figure 15 is the detailed maps that meets the active area at the induction targets of some embodiments of the invention and the interface between the sensor;
Figure 16 is the signal that induction targets the produced diagram that meets some embodiments of the invention;
Figure 17 is the process flow diagram of the method for diagram detection position, this method embodiment more according to the invention.
Embodiment
In the following description, for purposes of illustration, many details and alternatives have been set forth.Yet, one of skill in the art will appreciate that the present invention can implement under the situation of not using these details.In other embodiments, with the form of sketch well-known construction and device is shown, so that it is unclear without unnecessary details description of the invention to be thickened.
Fig. 1 to Figure 10 C is particularly related to automatic focus and the Zoom module that uses positioning system according to the invention.These figure and appended discussion, and, relate to the embodiments of the invention of under the optics background, implementing at the relevant discussion of sensing part, position, but should be as restriction of the present invention.Four corner of the present invention is preferably understood best by reading claims.
Fig. 1 and Fig. 2 illustrate according to the automatic focus of some embodiments of the present invention and Zoom module 1000.This module 1000 is depicted as has removed external electromagnetic interference (EMI) guard shield.
As shown in the figure, module is based upon on the image sensor board 10.This module 1000 comprises the stiffening rib 1 on first side that places image sensor board 10 and places the main structure 20 on stiffening rib 1 opposite.Preferably, stiffening rib 1 and main structure 20 are coupled to each other and connect with image sensor board 10.
Main structure 20 comprises bottom targeting part 22.This bottom-boot part 22 comprises the feature that is configured to keep guide finger 601 and guide finger 602.Terminal guide plate 2 is arranged in the opposite of bottom-boot part 22.Hole 2a contacts respectively with hole 2b and keeps guide finger 601 and guide finger 602.Bottom-boot part 22 also comprises and is configured to allow radiation (for example visible light) via the lens arrangement (being discussed below) of the module void area (not shown) by the imageing sensor (being discussed below) of arrival image sensor board 10.In addition, bottom-boot part 22 comprises passage (pass-thru) 25, and this passage 25 is configured to allow the extension 11 of image sensor board therefrom to pass through.
Place between bottom-boot part 22 and the terminal guide plate 2 is main body 20 and other parts of module 1000.Main body 20 also comprises structure 24 and following structure 26.Following structure 26 and last structure 24 all comprise and are configured to the special feature that the service part with module 1000 closely cooperates or allows it to pass through.Thereby main body 20 provides structural framing and function support for the running of module 1000.
For example, following structure 26 comprises pivot wheel hub 32, and this pivot wheel hub 32 is configured to serve as the low fulcrum that changes preload lever assembly (being discussed below).In addition, following structure 26 comprises passage 27, and this channels configuration becomes to allow the scope that moves through expection of lever assembly.Similarly, last structure 24 comprises the passage that is configured to allow the connection between main PCB and sensor 901 that will discuss hereinafter.
The various parts of module 1000 are connected on the main body 20.In these parts some are fixed with respect to main body 20.Except guide finger 601 and guide finger 602, actuator housings 1020 and 1030 is connected on the main body 20 in non-moving position.Therefore, actuator housings 1020 and 1030 is in a fixed position with respect to guide finger 601 and guide finger 602.
Fig. 3 and Fig. 4 show the internal part of module 1000.(shown in Fig. 1 and Fig. 2) is not shown for main body 20.Shown in these figures, module 1000 comprises preceding optical device group 400, back optical device group 500 and imageing sensor 14.Preceding optical device group 400 and back optical device group 500 respectively typically comprise for example lens combination of one or more optical elements.Those skilled in the art will recognize that complexity and the simple lens assembly that is used for optical device group 400 and 500.
Prism 40 selectively is attached on main body 20 and the terminal guide plate 2 (shown in Figure 2).Module 1000 preferably also comprises shell and lid mechanism, and aforesaid electromagnetic interference (EMI) cover.Lid mechanism prevents that preferably light leak and contamination by dust from influencing the internal part of module, especially lens combination 400 and 500 and imageing sensor 14.In certain embodiments, single shell plays EMI cover and lid mechanism.Infrared ray (IR) filtrator and/or low-pass filter are attached on the image sensor board 10 alternatively.
Fig. 3 and Fig. 4 illustrate the further details of module 1000.As mentioned above, actuator housings 1020 and 1030 is connected on the main body 20.This connection, together with the connection between main body 20 and the terminal guide plate 2 and guide finger 601 and 602 parts are relative to each other located and fixing, and with respect to the location, target area 12 of imageing sensor 14 and fixing, thereby for automatic focusing and flexible module provide the chassis, this automatic focusing and flexible module can be amplified and the image of convergent-divergent for target area 12 provide to have.
Imageing sensor
As shown in the figure, imageing sensor 14 is flat substantially.Imageing sensor 14 can be the sensor of any kind known to the routine of this area, for example ccd image sensor.The plane of imageing sensor is preferably perpendicular to the axis of guide finger 601 and guide finger 701.Typically, module 1000 is configured to image is provided for imageing sensor 14 along the image vector that is parallel to these axis.
Guide finger
Fig. 3 and Fig. 4 illustrate the guide finger device that is used for automatic focus and Zoom module according to of the present invention.Some embodiment comprise a pair of guide finger, and other embodiment uses the guide finger of varying number.No matter their quantity how, guide finger 601 and 602 is typically installed to allow back cylinder 530 and preceding cylinder 430 to move with respect to imageing sensor 14 along the linear axis of module 1000.In module 1000, main guide finger 601 and 602 alignment of time guide finger make that their axis is parallel to each other substantially.In addition, lead screw assembly 200 and 300 also is arranged in so that their axis is parallel to each other substantially, and is parallel to guide finger 601 and 602.
Typically, guide finger 601 and 602 is connected on the main body 20 and terminal guide plate 2 of above summary description.Preferably, guide finger is connected on the opposite side of image vector of imageing sensor 14.Yet those skilled in the art should recognize that other configuration is possible.Lead screw device 200 with 300 typically along the edge placement of imageing sensor 14 and parallel with its optical axis.
In certain embodiments, the range of movement that offers back cylinder 530 and be parallel to guide finger 601 and 602 approximately is 7 millimeters.In certain embodiments, offer before cylinder 430 and the range of movement that is parallel to guide finger 601 and 602 approximately be 2 millimeters.Yet because this range of movement, the guide finger 601 and 602 of some embodiment usually influences the form factor of module 1000.Therefore, some embodiment also comprise and are used to revise and/or the device of the form factor of hiding module 1000.
Component prism
Some embodiment also comprises component prism, for example 40 of Fig. 2.This feature allows automatic focus and Zoom module along a plurality of directed placements and/or installation.For example, can usually be restricted for the size that specific implementations is used, make module preferably in the vertical plane of shell, vertically place along the inceptive direction of image vector.Cylinder and back cylinder were realized in the device with little width and/or degree of depth form factor along the range of movement of aforesaid guide finger before this orientation allowed.For example, in the mobile phone embodiment, the user wants with display as view finder camera to be aimed at desired images herein, and for the availability purpose, image vector is advantageously in perpendicular to display.Yet, usually be the thinnest size of mobile phone perpendicular to the plant bulk of display.
With reference to figure 2 and 3, the component prism 40 of some embodiment is installed near the preceding cylinder 430.Prism 40 makes the light from image change direction with the angle with respect to preceding cylinder 430.As mentioned above, preceding cylinder 430 typically accommodates front lens group.Front lens group comprises one or more preceding optical elements.Therefore, prism 100 allows module 1000 along different directed placement the in the device, and this module is typically with respect to the angled maintenance of object viewed and/or that take pictures.Although preferably use prism, apparently, other optical element (for example mirror) can be used to the light from object is redirected to imageing sensor 14.
Lens combination
Shown in Fig. 3, Fig. 4 and Fig. 5 A, back optical device group 500 and preceding optical device group 400 have preferred construction.Back optical device group 500 also comprises back cylinder 530, back guideway 510 and back gathering sill 520.Back cylinder 530 typically holds one or more lens or other optical element.As shown in the figure, back cylinder 530 holds rear lens 540.Back cylinder 530 is preferably the right cylinder substantially with central axis.Rear lens 540 is configured to the central axis guiding light along back cylinder 530.Back guideway 510 is for being connected to elongated, the right cylinder substantially on the cylinder 530 of back, make back cylinder 530 central axis and after the axis of guideway 510 parallel substantially.The groove parts of back gathering sill 520 for being configured to engage with right cylinder.
Cylinder 430, leading before preceding optical device group 400 also comprises to axle sleeve 410 and preceding gathering sill 420.Preceding cylinder typically holds front lens group 440.Preceding cylinder 430 is the right cylinders substantially with central axis.Front lens group 440 can be configured to the central axis guiding light along preceding cylinder 430.Leading before axle sleeve 410 (Fig. 6 B) is to be connected to elongated, the right cylinder substantially on the cylinder 430, the central axis and the leading parallel axes of cylinder 430 before making to axle sleeve 410.The groove parts of preceding gathering sill 420 for being configured to engage with right cylinder.
Lens-guide finger interface
With reference now to Fig. 6 B,, preceding optical device group 400 comprises leading to axle sleeve 410, and this is leading to connect with main guide finger 601 to axle sleeve 410.As shown in the figure, leadingly come down to extend with respect to preceding cylinder 430 to axle sleeve 410.In addition, leading before axle sleeve 410 is connected to rigidly on the cylinder 430.Optical device group 400 was wound the axis rotation perpendicular to main guide finger 601 axis before this structure prevented, but allowed the axis rotation around main guide finger 601.Back optical device group 500 comprises back guideway 510, and this back guideway 510 also connects with main guide finger 601.As shown in the figure, back guideway 510 comes down to extend with respect to back cylinder 530.In addition, back guideway 510 preferably is connected on the cylinder 530 of back rigidly.This structure prevents that the axis that back optical device group 500 is wound perpendicular to main guide finger 601 from rotating, but allows the axis rotation around guide finger.
With reference now to Fig. 4,, preceding optical device group 400 also comprises preceding gathering sill 420, and this gathering sill 420 is configured to connect with time guide finger 602.Optical device group 400 was around the axis rotation of main guide finger 601 before connection between gathering sill 420 and the inferior guide finger 602 prevented.Optical device group 400 was along the axis translation that is parallel to two guide fingers substantially before connection between preceding optical device group 400 and the guide finger 601,602 allowed.
Back optical device group 500 also comprises back gathering sill 520, and this back gathering sill is configured to connect with time guide finger 602.Connection between gathering sill 520 and the inferior guide finger 602 prevents the axis rotation of back optical device group 500 around main guide finger 601.Connection between back optical device group 500 and the guide finger 601,602 allows back optical device group 500 along the axis translation that is parallel to two guide fingers substantially.
Actuator module
Preferably, employed in an embodiment of the present invention actuator is an oscillation actuator.Most preferably, these oscillation actuators drive the thread spindle rotation that places in it for vibrating with standing wave pattern, thereby make the type of driver of thread spindle rotation.Embodiments of the invention comprise that some preferred standing wave pattern is to drive oscillation actuator.Yet, can consider various standing wave patterns.
The present invention has considered various actuator structures.These structures comprise the 6th, 940, No. 209 disclosed oscillation actuators of United States Patent (USP) as the 5th, 966, No. 248 United States Patent (USP)s of distribution on October 12nd, 1999 and distribution on September 6th, 2005.These structures also comprise the actuator shown in Figure 10 A to Figure 10 C.Actuator 700 ' comprises by a plurality of piezo strips 701,702 and 704 elastic bodys that surround.The unshowned four-tape be with 701 staggered relatively.These bands are arranged in around the elastic body symmetrically, and this elastic body has a plurality of hickey parts that place in it.The hickey component configuration becomes and the screw thread of lead screw 360 ' closely cooperates.At run duration, piezo strip drives oscillating motion in elastic body.Such actuator typically needs to operate preload.Preferably, this preload is applied on the lead screw by the disclosed technology in this document other places.
For by using preferred oscillation actuator to drive thread spindle effectively, some embodiments of the present invention comprise special actuator housings, and this actuator housings only is designed to actuator limits to necessary degree, and provide vibration protection for actuator.In addition, actuator housings allows the close positioning of actuator with respect to guide finger and optical device group.Typically, each actuator among the embodiment combines with actuator housings and forms actuator module.
Some embodiments of the present invention comprise actuator module, for example Figure 10 A to Figure 10 C illustrated those.As shown in the figure, the exemplary actuators module comprise actuator 700 ', actuator housings 1030 ' and flexible coupling 710.
Flexible coupling 710 with actuator 700 ' a part constrain in the position fixing with respect to actuator housings 1030 ' substantially.This allows actuator to drive lead screw with respect to actuator housings 1030 ' translation.For example, contact mat 710 prevents actuator 700 ' rotate with respect to shell.
Yet, by only limit actuator 700 ' a part, embodiment allows the vibration of actuator 700 ' relatively freely, to pass motion to lead screw (for example 360 ').In addition and since flexible coupling 710 preferably with actuator 700 ' constrain in actuator 700 ' the node place of preferred standing wave pattern, so constraint has reduced the influence of actuator efficiency.Preferably, with the fixed position node of various standing wave patterns of hanking, thereby allow under various conditions actuator effectively to be operated.
As shown in the figure, actuator housings 1030 ' comprise admit lead screw 360 ' opening 1034 and 1036.In addition, shell comprises and is configured to allow and is electrically connected the opening 1032 and 1038 that enters main PCB plate (not shown).In addition, actuator housings 1030 ' be used for specially prevent to actuator 700 ' vibration hazard.Actuator housings 1030 ' be preferably five chambers that form parallelepipedon therein.This parallelepipedon that is called the actuator reserve area on volume than actuator 700 ' big.In addition, this actuator reserve area along each size than actuator 700 ' corresponding size all big.In addition, when actuator 700 ' when constraining in the actuator reserve area by flexible coupling 710, preferably actuator 700 ' parallelepipedon surperficial parallel of surface and a part that does not comprise actuator housings.In addition, actuator 700 ' end preferably approximately equidistant with opening 1034 and 1036 separately.Thereby, actuator 700 ' be suspended in the reserve area, it and actuator housings 1030 ' each adjacently situated surfaces between have buffer distance.
In addition, the size of the reserve area of parallelepipedon actuator and actuator 700 ' match each other, and with the type matching of the flexible coupling 710 that is used for keeping actuator.Preferably, the buffer distance between the inside surface of the shell 1030 ' of actuator 700 ' and adjacent openings 1034 and 1036 is selected by flexible coupling 710 with respect to the maximum displacement of permitting before losing efficacy.Thereby the vibration that receives is for example dropped in mechanical vibration by mobile phone during, actuator 700 ' will be run into the inside surface of shell 1030 ' in that flexible coupling 710 is extended to before the inefficacy.In addition, prevent the similar stretching, extension of edge by the connection between lead screw 360 ' and the actuator 700 ' perpendicular to the axis of lead screw 360 '.
Actuator housings 1030 and 1020 allows actuator 700 and 500 with respect to main guide finger 601 close positioning.As shown in Figure 9, this close positioning obtains allowing, and reason is that the openend of actuator housings 1020 and 1030 allows actuator 500 and 700 to place the surface of actuator module.Thereby actuator 500 and 700 places the place near main guide finger 601, thereby is guideway 410 and 510 leaving gaps.
When actuator 200 and 300 each self-driven optical module 400 and 500, by minimizing torque influence to improve the precision of close positioning. Optical module 400 and 500 barycenter are between guide finger 601 and 602.Lead screw contact surface 480 also leaves the center a little.Thereby, drive optical module 400 and 500 by contact surface 480 and 570 and tend to introduce moment of torsion.Comprise the guide finger offset torque influence of main guide finger 601.Yet, module is configured, make actuator 500,700 and contact surface almost align, thereby reduce the torque amount that acts on the guide finger with guide finger 601.
The lead screw assembly
With reference now to Figure 10 A to Figure 10 C,, exemplary lead screw device 300 ' is depicted as with actuator housings 1030 ' and connects.Lead screw device 300 ' is built into lead screw 360 ' on every side.This assembly comprises cam 320 ' and benchmark lid 340.Lead screw 360 ' comprises threaded portion 5, first terminal and second end.First end and the benchmark lid 340 of lead screw 360 ' integrally constitute.
Lead screw-optical device group interface
With reference now to Fig. 8 A,, preceding optical device group 400 and back optical device group 500 connect interface 480 and 570 by lead screw separately and are connected on the lead screw.Dominate and all connect with main guide finger 601 to axle sleeve 410 and 510.
In preferred disposition, its corresponding lead screw contact surface that moves through of lead screw transmits power.Because each contact surface all is the rigid attachment parts of optical device group, thereby the translation of contact surface causes its corresponding optical devices group translation.Yet simply being rigidly connected between contact surface and the lead screw can be finished this function.Illustrated arrangement provides extra benefit by the non-translation motion isolation that makes optical device group and lead screw.Preferably, the benchmark lid that is connected to first end of lead screw contacts with contact surface, and for example the benchmark referring to Figure 10 C covers 340.
Small area of contact between benchmark lid and the contact surface is used to make minimise friction, allows contact surface to move on the axis direction that is orthogonal to the lead screw axis with respect to benchmark lid and lead screw.This configuration makes most of mechanical vibration or the disturbance and the isolation of optical device group of lead screw.In addition, isolate and mean the one-movement-freedom-degree that only needs to control lead screw, to obtain to be used for the required precision in location of optical device group.Though the non-translation motion of lead screw does not exist in a preferred embodiment, when existing, these features allow embodiments of the invention to handle such swing.
In order to keep the connection between contact surface and the lead screw, some embodiments of the present invention rely on the required pre-compressed spring of accurate operation that others are actuator.
Pre-compressed spring
Except that top mentioned feature, employed actuator typically uses the low precompression that changes in the embodiments of the invention.This precompressed is provided by the spring with low force constant.In little displacement embodiment, this method is worked finely usually.
Some embodiments of the present invention rely on spring force, and this spring force acts on the optical device group and thinks that the lead screw that is used for the driving group provides precompressed.Thereby to a certain extent, the spring force type of required gear train is determined in the required displacement of optical device group.
For example, in some embodiments of the invention, preceding optical device group 400 is used for focusing and zoom operations and only need moves 1 millimeter or 2 millimeters.Because the preferred movement scope of preceding optical device group 400 less than 2 millimeters, is selected low force constant spring and connected it directly to apply spring force on the optical device group for spring, this causes relatively low variation precompressed.
Shown in Fig. 8 B, first end of the contiguous lead screw 260 of the front end lead screw of contact surface 480.For the surface being connected with lead screw and providing precompressed, pre-compressed spring to make the surface press lead screw.Because the small movements that relates in focusing on directly provides spring force to allow in this case.Thereby front end pre-compressed spring 180 and is configured to directly power is applied on the optical device group 400 before precompressed interface unit 470 (Fig. 6 B) is connected on the optical device group 400.
In another example, back optical device group 500 is used for zoom operations, and needs to move several millimeters or more.Because the preferred movement scope of preceding optical device group 500 greater than 4 millimeters, is selected low force constant spring and connected it directly to apply spring force on the optical device group for spring, this causes high precompressed to change.
Shown in Fig. 6 A and 6B, rear lead screw contact surface 570 contiguous lead screws 360.Make the surface connect with lead screw and precompressed is provided, thereby pre-compressed spring make the surface press lead screw.Yet in this case, it is undesirable that precompressed directly is provided.
Thereby pre-compressed spring 110 is configured on the opposite end of precompressed lever 100.This convergent-divergent precompressed lever 100 comprises pivoting hole 140, and this pivoting hole 140 is configured to combine closely with the pivot protrusion 32 of main body 20.In addition, precompressed lever 100 comprises that pre-compressed spring hook 130 and precompression transmit point 120.
Pivoting hole 140 is crooked to pre-compressed spring hook 130, makes motion at the hook end of precompressed lever 100 transmit a some end in power and is exaggerated.By same mechanism, the big conversion of motion that the power of convergent-divergent lever 100 transmits point 120 ends is the less relatively motion of carbine 130 ends.This precompression that has just reduced on the relatively large displacement of Zoom lens system changes.Preferably, select the position of pivoting hole 140 to transmit terminal the moving of carbine end of arriving with minimizing power, the coefficient that reduces in this example is five.Other embodiment uses different coefficients.
Carbine 130 connects with pre-compressed spring 110, and power transmission point 120 connects with a face of back lead screw contact surface 570.The also contiguous lead screw 360 of contact surface 570.For the surface being connected with lead screw and providing precompressed, pre-compressed spring that the surface is pressed on the lead screw.Provide spring force to mean the stretching, extension that converts pre-compressed spring 100 indirectly to of moving of back optical device group 500 from back pre-compressed spring 110 indirectly by lever 100.The concrete ratio that the group mobile phase stretches for spring depends on lever pivots transmits point and carbine with respect to power location.As described above, preferred ratio is 1 to 5.
Under any situation that indirect or direct pre-compressed spring power is used, the opposite end of pre-compressed spring preferably is connected on the main body 20.
Induction targets
Some embodiments of the present invention are included as the induction targets that the location provides feedback.In certain embodiments, induction targets places on the lead screw.In certain embodiments, induction targets places on the optical device group.Linear and rolling target all can be used among the present invention.
Lead screw device according to some embodiments of the invention comprises induction targets.Some lead screw assemblies (for example assembly 300 ' of Figure 10 A to 10C) do not comprise induction targets.Yet, the example shown in Fig. 8 C, lead screw assembly 200 comprises the induction targets 290 of contiguous cam 220 location.In illustrated embodiment, target 290 is a rolling target.In the point-device location of needs, preferably use rolling target.
Typically, the induction targets that is suitable for being connected on the lead screw comprises the parts that are connected with the aligning parts of lead screw.In certain embodiments, induction targets and lead screw is threaded.Location sensitive target 290 is configured to engage with position transducer 902.
In certain embodiments, induction targets is included as the part of optical device group.For example, in Fig. 8 A to Fig. 8 C, induction targets 590 is configured to the part of back optical device group 500.Here, target 590 is configured to the integral part as optical device group 500.Yet in certain embodiments, induction targets is modular, or only connects with the optical device group.
In addition, induction targets 590 is linear response targets.The linear response target is acceptable in the position application of relative low accuracy.In addition, linear goal is preferred in the application that target moves in relatively large scope.Here, linear goal uses in back optical device group 500, because should group be used as the convergent-divergent purpose.
In Fig. 8 A, module is in end stop position.In certain embodiments, alignment sensor 901 with 902 endways stopping period separate with 290 with induction targets 590 respectively.In this position, also as shown in Figure 3 and Figure 4, the device that the lead screw position is discussed by this paper other places is aligned on the hard block of machinery.Thereby because the lead screw position among these embodiment is relevant with the position of optical device group, the aligning of lead screw also defines the position of optical device group.
In Fig. 8 B and 8C, module mediates respectively and remote location.Preferably, induction targets 590 and 290 engages with position transducer 901 and 902 in centre position and remote location respectively.Preferably, position transducer and induction targets engage during whole convergent-divergent location.
The hard block door bolt of machinery
Preferably, embodiments of the invention comprise the parts that are configured to allow through the hard block of machinery the location of optical device group.
With reference now to Fig. 3 and Fig. 4,, these embodiment comprise hard block door bolt spring 310 and hard block door bolt spring 410.Hard block door bolt spring 310 is installed in the main body 20 on the spring projection 21.As shown in Figure 3 and Figure 4, hard block door bolt spring 310 comprises the main body and the drive spring 312 of rigidity substantially.This rigid bodies comprises lens combination interface surface 314, pivoting hole 318 and fastens 316 with a bolt or latch.Each lens combination interface surface 314 and door bolt 316 arrange that on the separating arm, separating arm is positioned at the position of about 90 degree around pivoting hole 318, and stretches out therefrom.Door bolt 316 arm is in fact than the brachium on group interface surface 314.Drive spring 312 aligns with the arm of door bolt 316 when static.
Pivoting hole 318 closely cooperates with spring projection 21 and is configured to and pivots around projection 21.Group interface surface 314 is configured to closely cooperate with the spring drive 580 of rear lens group 500.When static, door bolt 316 and actuator housings 1030 not on a line, Fig. 5 A for example.When spring drive 580 impelled group interface surface 314 towards imageing sensor, hard block door bolt spring 310 is 318 pivot about in the hole, and make drive spring 312 bendings.When pivoting, door bolt 316 moves into the appropriate location to contact with the cam part 322 of cam 320.This provides mechanical hard block for lead screw 360.
Hard block door bolt spring 210 is being installed on the spring projection 1028 on the actuator housings 1020, shown in Fig. 5 B.Hard block door bolt spring 210 comprises the main body and the drive spring 212 of rigidity substantially.Rigid bodies comprises lens combination connection interface 214, pivoting hole 218 and fastens 216 with a bolt or latch, for example Fig. 4.Each lens combination interface surface 214 and door bolt 216 are arranged on the separating arm, and separating arm is positioned at the position of about 90 degree around pivoting hole 218, and stretch out from pivoting hole.Door bolt 216 arm is in fact than the brachium on group interface surface 214.Drive spring 212 aligns with the arm of door bolt 216 when static.
Pivoting hole 218 closely cooperates with spring projection 1028 and is configured to and pivots around projection 1028.Group interface surface 214 is configured to closely cooperate with the spring drive 480 of front lens group 400.When static, door bolt 216 and actuator housings 1020 not on a line, Fig. 5 A for example.When spring drive 480 was pushed group interface surface 214 to imageing sensor, hard block door bolt spring 210 pivoted around projection 1028, thereby makes drive spring 312 bendings.When pivoting, door bolt 316 moves into the appropriate location to contact with the cam part 222 of cam 220.This provides mechanical hard block for lead screw 260, for example shown in Fig. 8 A.
Location sensitive
Embodiments of the invention comprise position sensible element, and this position sensible element is configured to feedback is offered actuator control system.These elements allow module by using non-linear actuation motor accurately positioning function group, for example optical device group.
The preferred embodiments of the present invention are used the consistent induction targets that moves with the functions of modules group, and are configured to detect and the sensor of the data that the description induction targets of encoding is moved.For example, some embodiment use the reflection code of the mobile induction targets that comprises different reflection coefficients zone.The exemplary position induction system comprises the position transducer 1030 and the location sensitive target 250,350 of the module 1000 among Fig. 1.
Reflection code
In exemplary reflection code system, sensor comprises element that sends radiation and the element that detects radiation.For example, target comprises blanking bar and bright band.Blanking bar tends to absorb than bright band the radiation of sending of vast scale more.Be with radiation reflected by sensor.When target moves with respect to sensor, with the absorption and the change of reflection of sensor induction targets in line.The sensor this variation of encoding.Many encryption algorithms are consistent with the present invention with processing.For example, sensor can detect the each conversion between blanking bar and the bright band simply.
Systemic resolution
The resolution of reflection code system is determined by Several Factors.The light beam scope of the distance between transmitter/detector and the target, the radiation of use and intrinsic target resolution all work in the resolution of determining system.These three factors dependently work, and they influence each other on the contrary, and each factor must be harmonized with respect to other factors.
Intrinsic target resolution comes down to the function of part dimension.The critical dimension of target component (being parallel to the size that sensor moves) is more little, and intrinsic target resolution is big more.For example, the target 250 of Fig. 1 uses stripeds to as feature.Detection system is configured to make band to move through the visual angle of sensor along their narrow dimension.Thereby the right critical dimension of striped is its width along narrow dimension in schematic structure.
Yet position sensing system is not simply by using high intrinsic target resolution to guarantee high resolving power.The transmitter of appropriate combination low beam range of radiation and strictness-need the target tolerance to reach the ultimate resolution that given component sizes allows.Light beam scope and tolerance specification are complementary: the appropriateness increase of the decline of light beam scope and tolerance can be kept given resolution, and vice versa.
For given part dimension, maximum radiation laser beam scope is arranged, be higher than this greatest irradiation light beam scope, feature can not be differentiated through reflection code.Figure 11 B illustrates the largest beam scope that is used for a series of light sources (the white square of left-hand side), and these a series of light sources are to a series of absorption bands and the zone of reflections (right-hand side) emission light.Details shown in Figure 11 C illustrates 20 microns wide light sources with the target pairing with similar size characteristic.In this example, the maximum allowance scope is 10 microns; Other system allows other scope.
Under the diffusion conditions of regulation, maximum allowance scope and desirable resolution determine the maximum spacing between the radiation source and target.This spacing (being spacing d among Figure 11 C) is proportional with expectation resolution, and inversely proportional with the tangent of the angle of representing the radiation diffusion.For example, suppose the typical LED spread angle of 30 degree, in order to obtain 10 microns resolution, spacing d should be less than 56.7 microns.Thereby, for obtaining intrinsic target resolution, should use the appropriate combination of light beam range of radiation and spacing.
Intrinsic target resolution
Some embodiments of the present invention use the position sensing system of light beam scope with optimization and tolerance to move under intrinsic target resolution.In reflection code, can use several different methods, strategy and device to reach this target.
Figure 12 A illustrates the direct imaging method, wherein, radiation transmitter (white rectangle), for example LED produces the radiation that is fed to target without extra process.Detect by detecting device (hatched rectangle) from a part of radiation of target reflection.In such method, transmitter must produce have enough low light beam scope radiation with the resolution target feature.
Tolerance
A method that obtains intrinsic target resolution is closely at interval transmitter/detector and scanning target.Yet strict tolerance has improved manufacturing objective and the necessary precision of device generally.For example, the xsect circularity of cylindrical target is along with the minimizing of spacing becomes more important.Owing to these and other reason, embodiments of the invention preferably separate transmitter/detector and scanning target with obtainable distance in the typical tolerances of making in batches.
Active area-transmitter/detector correction
The some combinations of feature and method can be used to reduce the gap and require tolerance or reduce radiation to spread caused problem.In reflection code, the part of induction targets is by radiation excitation, and detecting device receives the signal from induction targets.The feature of the signal indication induction targets active area that is received.Preferably, active area is sized to and is positioned to mate the critical feature size of induction targets.For example, Figure 15 illustrates the active area of induction targets.
The size of active area and position are determined by the feature of transmitter and detecting device.In some cases, radiation is conditioned the part with the restriction induction targets that radiation was encouraged.In some cases, the visual field of detecting device is tailored.
Some technology relate to irradiation treatment to be measured, and it allows to use more high-resolution target on the spacing that can make, and the radiation of diversity may obtain the resolution height to this resolution than using more.Figure 12 B illustrates a kind of system, and in this system, lens are used for calibrating the radiation of self-detector.Calibration radiation allows target-transducer spacing to increase with respect to direct imaging, and keeps differentiating the ability of setting feature sizes simultaneously.Maximum spacing and distinguishable feature sizes are determined by the radiation diffusion after calibrating.
Some technology relate to element, and this arrangements of components becomes a part that the visual field of sensor is constrained to its intrinsic visual field.Figure 12 C illustrates a kind of system, and in this system, aperture is used for preventing that " diffusion " from adjacent domain prevents to detect transformation.In this case, reflected radiation must be by near the center pit the target surface before arriving detecting device.This system needs more high-intensity transmitter, because less relatively by the available radiation of aperture.
Though some embodiment of the present invention has used active area to cut out strategy really, for example radiation is regulated, and realizes that extra means or feature that these strategies are required have increased cost and the complicacy of making module.Preferably, embodiments of the invention use other devices to obtain required resolution.
Exceed intrinsic target resolution
On some threshold value, originally must need radiation to regulate or the compression spacing although use high intrinsic target resolution to obtain high systemic resolution.Summarize as top, these elements increased the complicacy of module and make in required precision.Therefore, for the resolution that exceeds these threshold values, embodiments of the invention preferably use lower intrinsic target resolution, are used in combination at least a strategy of the numerous strategies that are used for obtaining the systemic resolution higher than intrinsic target resolution.
Active area-target correction
Relate to adjusting with reference to the method that above limits active area and revise the visual field from the radiation of transmitter, detecting device or the use external device (ED) of selecting to have suitable visual field.Yet, alternative approach relate to the configuration induction targets with limit its any once by the part that radiation was encouraged, thereby and tailored activity area.
For example, the viewgraph of cross-section of Figure 11 A illustrates a kind of configuration, and in this configuration, the camber line pairing of feature sizes and cylindrical induction targets is with the visual field of limitation detector.The zone of the visual field subtend target 3350 of transmitter/detector 3030, this zone comprises the maximal value of two conversions.
Preferably, induction targets becomes to make single feature to dominate the visual field with detector configurations.For example, as shown in figure 15, the size of active area is arranged to and is mated with right width.Typically, the clarification of objective size is selected based on the visual field.Yet required resolution also can be the factor of determining characteristic dimension.
Data processing
Preferably, embodiments of the invention are handled data from sensor to obtain the resolution higher than intrinsic target resolution.In different embodiments of the invention, used multiple treatment technology, method and element, comprised conversion of signals and interpolation based on threshold value.
Preferably, embodiments of the invention are encoded into voltage with the part of the induction targets in the active area.When coding, this voltage changes according to the feature of the part of the induction targets in the active area.
In order to produce level and smooth variable signal, embodiments of the invention are preferably with the size of active area and the critical dimension coupling of induction targets feature.Figure 15 illustrates the preference relation between active area and the induction targets characteristic dimension.Active area is enough big along the direction of critical dimension, thus it will can not run into continuously have identical bright/zone of dark feature.In illustrated embodiment, along this active area of critical dimension greater than the width of a feature but less than the twice of this width.Such configuration prevents to occur " putting down " point in fact in the simulating signal that is produced.
As time goes by, when induction targets moved through active area, system formed signal, and the surveyed area part of active area has been passed through in this signal representative.As shown in Figure 16, induction targets part 1 and variable signal part 2 are mutually related along time axis t.Signal in the part 2 preset time point intensity by the characteristics determined in the active area at that time, for example ratio of bright band and blanking bar.As shown in the figure, the minimum value of the signal in the part 2 is in time corresponding to the central axis of blanking bar.Similarly, the maximal value of the signal in the part 2 is in time corresponding to the central axis of bright band.
In certain embodiments, signal is the continuous programming code of voltage, in other embodiments, and the series of discrete sample of signal under characteristic frequency, being got.In either case, when induction targets moved through the visual field of inductor, signal preferably included a plurality of samples of each feature that relates to induction targets.
Cataloged procedure produces the variable signal that moves of expression induction targets.The minimum value of signal and maximal value are represented the motion of induction targets under its intrinsic target resolution.Preferably, this variable signal is an aanalogvoltage.In certain embodiments, interpolation is used for the more high-resolution data of structure between the maximal value of variable signal and minimum value.Preferably, interpolation error only takes place at the given period of intrinsic target resolution, and resets with the minimum value or the maximal value of signal.This error limitation that interpolation is introduced is on the fixing in fact number percent of intrinsic resolution.
Disposal system receives the variable signal from sensor, and produces the correction of movement data with the resolution that is higher than intrinsic target resolution.For example, in certain embodiments, analog voltage signal is supplied to analog-to-digital conversion device (ADC).The simulating signal that is produced with sampling rate (causing a plurality of samples of every feature) comprises enough information, produces to support digital signal to carry out ADC with the resolution that is higher than intrinsic target resolution.In certain embodiments, use the ADC processing of a plurality of threshold values to be used for simulating signal is encoded into high-resolution digital signal.
The correction of movement data are converted into the position data that expression is connected to the position of the function group on the induction targets then.For example, in certain embodiments, be provided to controller from the numerical data of ADC, in controller, digital signal is analyzed and be converted into position data.
Illustrate a method according to the present present invention among Figure 17.This method attempts to detect the position of the function group that is connected on the induction targets, and this induction targets is configured to the motion with the first resolution representation function group.It comprises step 5010, thereby this step is used the motion of induction targets measuring ability group under first resolution.This method also comprises step 5020, and this step is encoded to the original motion data of representing detected motion.In another step 5030, this method comprises the original motion data is processed into the correction of movement data with second resolution that wherein, this second resolution is greater than first resolution.In addition, the method comprising the steps of 5040, and this step becomes the correction of movement data-switching position data of the position of presentation function group.
Preferably, embodiment comprises the additional calibration of treatment circuit.In a preferred embodiment, initial calibration is finished during starting shooting automatically.For example, in the system based on ADC, the automatic calibration during starting shooting is the required input range of specified data preferably.Use the embodiment of calibration automatically not needing initial calibration in manufacturing or during storing the fixed calibration parameter between their whole operating period.In addition, calibration preferably defines the initial position of each function group.In certain embodiments, these initial positions are determined by other places hard block discussed in detail.In certain embodiments, the position is determined by the information that is embedded in the induction targets.In certain embodiments, the position is positioned by the disappearance of the interaction between sensor and the induction targets.
Particularly, with reference to figure 14A, when back cylinder 530, induction targets 590 and guideway 510 when guide finger 601 moves, induction targets 590 is separated at last with sensor 901.The signal change that reads of sensor 901 in this, the position of permission system location induction targets 590, back cylinder 530 or rear lens (not shown).In addition, between same moving period, the lens combination interface surface 314 of the hard block door bolt of spring drive 580 contacts spring 310 arrives the hard block of machinery at last, and this also can be used as benchmark as described above.
With reference now to Figure 14 B,, similar procedure can be used for the front lens position transducer.Preceding induction targets 290 and sensor 902 separate during preceding lead screw 260 moves at last.The signal change that reads of sensor 902 in this, before the permission system location position of induction targets 290 or front lens (not shown).In addition, between same moving period, the lens combination interface surface 216 of the hard block door bolt of the cam feature 222 contacts spring 210 of cam 220 arrives the hard block of machinery at last, and this also can be used as benchmark as described above.
Yet some embodiment also comprise the signal that becomes noise when continuous calibration has with processing between detection period.Various configurations produces has slight in time instable signal.For example in Figure 16, part 3 illustrates the signal of " shake " with average amplitude.Multiple design and manufacturing decision-making can cause this type of signal, and for example cylindrical induction targets is installed on off-center ground.In certain embodiments, the calibration constants relevant with instability is used for balance and dynamically correct and handle output.For example, at back average amplitude during time or frequency period.
In certain embodiments, non-volatile memory device is included in control or the treatment circuit, and is used to provide additional manufacturing data and calibration data.Preferably, this additional data is used for regulating parts change and manufacturing tolerance.
Adopt some embodiment of interpolation to use additional hardware and/or firmware (for example being used for regularly and the clock of analyzing).If actuator is extremely nonlinear, interpolation can be introduced positioning error.Preferably, embodiments of the invention use the ADC technology.
Structure
Embodiments of the invention comprise the position sensing system that uses various sensor and induction targets structure.Some embodiment comprise cylindrical induction targets, be configured to the confining surface that rotates with lead screw or other rotary drive mechanism.Because the function group connects with the lead screw with known pitch, lead screw rotation and the be moved into ratio of function group along the lead screw axis.In addition, some embodiment comprise the linear response target, and this induction targets is connected on the function group and is configured to and moves with the function group.The detection system of discussing in the example is illustrated as and has cylindrical induction targets below.Yet described method, strategy and equipment are also considered to use with linear goal in some embodiments of the invention.
For example, the system that uses the rotary inductive target has been shown in Figure 11 A.Shown in viewgraph of cross-section, position sensing system comprises and being positioned to from the cylindrical target 3350 of transmitter/detector 3030 apart from d.The zone of the visual field subtend target 3350 of transmitter/detector 3030, this target 3350 comprises two maximal values in the conversion.In certain embodiments, transmitter/detector is a reflective optical system.
In another example shown in Figure 13 B, transmitter/detector 4030 comprises sensor 4034 and transmitter 4032.This transmitter/detector also comprises mask structure 4030 ', this mask structure 4030 ' comprise emitter window 4032 ' and two sensor windows 4034 ' and 4034 ".In certain embodiments, transmitter is LED.
The blanking bar of induction targets 4350 absorbs the radiation that transmitter sent, and the bright band of the induction targets reflection radiation that transmitter sent.When band moves with respect to sensor window, the conversion that sensor absorbs and reflects.Preferably, sensor 4034 detecting sensor window 4034 ' and the 4034 " conversion among both respectively.In certain embodiments, transmitter/detector 4030 is reflective optical systems.
In another example shown in Figure 13 A, used the dual-detector module.Transmitter/detector 3030 comprises first sensor 3034A, the second sensor 3034B and transmitter 3032.Mask structure 3030 ' comprise emitter window 3032 ' and four sensor window 3034A ', 3034A ", 3034B ' and 3034B ".In certain embodiments, transmitter/detector 3030 is reflective optical systems.In certain embodiments, transmitter is LED.
Blanking bar from the sensed substantially target 3350 of radiation of transmitter 3032 absorbs, and the reflection of the bright band of sensed substantially target 3350.When band moved with respect to sensor window, sensor 3034A and 3034B detected the conversion that absorbs and reflect.The first sensor 3034A and the second sensor 3034B both detect conversion.
In certain embodiments, detecting device is in the given conversion of encoding of different time points.In addition, in certain embodiments, detecting device comprises with the form of two data apparatus for encoding is carried out in conversion that wherein, two data differ constant, for example a phase place.In certain embodiments, Figure 13 A for example, the sensor of two separation conversion of out-phase each other of encoding.In other embodiments, the conversion of two differences on the single-sensor observation space, for example two windows 3034 among Figure 13 B ' and 3034 ".Preferably, in these embodiments, control system allows it to detect direction and the amount of movement that moves in conjunction with the out-phase data.
In the cylindrical induction targets in above-mentioned structure, each characteristic optimization ground covers 60 degree of girth.Thereby in one embodiment, the cylindrical target with 12mm girth comprises the 2mm striped band of reflection/absorption pattern that 6 conclusions of the business are replaced.In addition, preferably use the treatment step summarized as mentioned so that resolution is increased on the resolution that is provided inherently by such target.
Position sensing system provides position data for lens combination in its whole service scope.In some embodiments of the invention, position sensing system is followed the tracks of the relative position of optics set of devices within 70 microns in whole 10mm scope.
Operation
Preferred systems use location sensing data is controlled actuator.In certain embodiments, data are used for predicting the motion in each cycle of actuator.In certain embodiments, data are used for predicting moving of the time per unit of actuator when using and start shooting.In certain embodiments, data are used to increase precision in real time with calibration cycle.Preferably, employed particular implementation determines according to employed particular actuators.
Some embodiments of the present invention in convergent-divergent and automatic focusing operation the use location data to locate and to follow the tracks of the optics set of devices exactly.Preferably, during zoom operations, a plurality of lens combination are moved and follow the tracks of.Actuator control circuit preferably correct interpretation position data is followed the tracks of and is moved to finish.In certain embodiments, control circuit uses the tracking decryption that is stored in the table.In certain embodiments, control circuit uses the tracking decryption that saves as mathematical function.Sometimes, these data are limited in the calibration cycle.Preferably, this calibration cycle takes place during manufacture.
In addition, the actuator control circuit is preferably finished zoom operations in specific time frame.Preferably, in the embodiment that relates to video optics, the mode that zoom operations is recorded with interference video is not finished.In certain embodiments, zoom ranges and frame frequency are with deciding optimum stepsize.For example, whole zoom ranges obtains step-length divided by the frame number in the desirable seek time.Thereby each step can take place in frame.Preferably, when zoom operations took place, the step was synchronous with frame frequency.In addition, a plurality of groups of motions during zoom operations preferably replace mutually.Thereby, to organize when mobile when each, remaining group is static.Driver and instant electricity needs have alternately been reduced.
In addition, during automatic focusing operation, typically move single group.Preferably, group moves through focusing range with little increment.Preferably, use accurate position transducer and actuator control circuit to allow carrying out the s location to be lower than under 20 microns the increment.In addition, although multiple circuit and hardware can be used for realizing the automatic focusing algorithm, permission group preferred embodiment turns back to the position that pinpointed focus is shown reliably.
As mentioned above, the optical element of some embodiment is divided into two groups, and one group is contained in the preceding cylinder, and another group is contained in the cylinder of back.Typically, by using mechanism as described above, can obtain the accurate motion of these optical device groups in the finite space.
The automatic focusing of some embodiment and the form factor of Zoom module are about 9x14x30mm under the situation of no prism, or are about 9x14x22mm comprising under the situation of prism.
Embodiments of the invention allow easily using non-linear motor to carry out the microscale location in the manufacturing installation.These embodiment comprise multiple strategy, obtaining the systemic resolution on the induction targets intrinsic resolution, handling the instability of exercise data, and provide repeatably with reference to solution for initial and lasting calibration program.
The device of various batch manufacturings needs strong, the accurate localization of function element.These devices comprise medical treatment device, optical devices and micro-mechanical device.By the present invention, the device of this batch manufacturing formerly needs the linear motor place can use non-linear motor.
Though the present invention is described with reference to many details, those skilled in the art will appreciate that under the situation that does not break away from spirit of the present invention the present invention can other concrete form embody.Therefore, it will be understood by those skilled in the art that the present invention can't help the illustrative details of preamble and limits, but be defined by the following claims.

Claims (19)

1. position sensing system that is configured to use induction targets, this induction targets has pattern characteristics, and this pattern characteristics has the average cd about this induction targets, and this position sensing system comprises:
A) coding module, it has initiatively code area, and induction targets is configured to move by this active code area; Described coding module is configured to produce the signal of representing the information on the part that is stored in this induction targets in this active code area, and wherein, described active code area has the size greater than this average cd; And
B) processing module, it is configured to by the analysis that comprises the input range condition and the data of initial position condition is become position data with the conversion of signals that generates.
2. position sensing system as claimed in claim 1 is characterized in that described position sensing system also comprises control module, and this control module is configured to coordinate the operation of described coding module and described processing module.
3. position sensing system as claimed in claim 2 is characterized in that, described input range condition and initial position condition are determined by described control module.
4. position sensing system as claimed in claim 1 is characterized in that, described coding module uses analog to digital converter when producing described signal.
5. position sensing system as claimed in claim 4 is characterized in that, described analog to digital converter relies on threshold value when producing described signal.
6. position sensing system as claimed in claim 5 is characterized in that, described threshold value uses position data in the past to determine.
7. miniature locating module comprises:
A) function group, it is connected on the driving shaft;
B) actuator, it makes the driving shaft translation to move described function group;
C) induction targets, it is configured to describe with first resolution motion of described function group; And
D) position sensing system, it is configured to have described induction targets, so that with the motion of first resolution detection as the described function group of the original motion data; And this original motion data is processed into the correction of movement data with second resolution, wherein this second resolution is greater than first resolution; And the position data that this correction of movement data-switching is become to describe the position of described function group.
8. miniature locating module as claimed in claim 7, it is characterized in that, described position sensing system comprises the coding module that is configured to produce original spin data, the processing module that is configured to produce location data correction, and the control module that is configured to coordinate the operation of described coding module and described processing module.
9. miniature locating module as claimed in claim 8 is characterized in that, input range condition and initial position condition are determined by described control module.
10. want 8 described miniature locating modules as right, it is characterized in that, described coding module uses analog to digital converter when producing described original spin data.
11. want 10 described miniature locating modules, it is characterized in that described analog to digital converter relies on threshold value when producing described original spin data as right.
12. want 11 described position sensing systems, it is characterized in that described threshold value uses position data in the past to determine as right.
13. a miniature locating module comprises:
A) function group, it is connected on the lead screw, makes the translation of this lead screw cause this function group along the axis translation that is parallel to this lead screw;
B) actuator, it is used for the described lead screw of translation;
C) induction targets, it is configured to describe with first resolution rotation of described lead screw; And
D) position sensing system, it is configured to have induction targets so that with the rotation of first resolution detection as the described lead screw of original spin data; And this original spin data is processed into the correction spin data with second resolution, wherein this second resolution is greater than first resolution; And will proofread and correct the position data that spin data converts the position of describing this function group to.
14. miniature locating module as claimed in claim 13, it is characterized in that, described position sensing system comprises the coding module that is configured to produce original spin data, the processing module that is configured to produce location data correction, and the control module that is configured to coordinate the operation of described coding module and described processing module.
15. miniature locating module as claimed in claim 14 is characterized in that, input range condition and initial position condition are determined by described control module.
16. want 14 described miniature locating modules, it is characterized in that described coding module uses analog to digital converter when producing described original spin data as right.
17. want 16 described miniature locating modules, it is characterized in that described analog to digital converter relies on threshold value when producing described original spin data as right.
18. want 17 described position sensing systems, it is characterized in that described threshold value uses position data in the past to determine as right.
19. a detection is connected to the method for the position of the function group on the induction targets, this induction targets is configured to describe with first resolution motion of this function group, and this method comprises:
A) use this induction targets under first resolution, to detect the motion of this function group;
B) the original motion data that will describe the motion that is detected is encoded;
C) this original motion data is processed into the correction of movement data with second resolution, wherein, this second resolution is greater than first resolution; And
D) described correction of movement data-switching is become to describe the position data of the position of this function group.
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US83661606P 2006-08-08 2006-08-08
US60/836,616 2006-08-08
US11/514,811 US7531773B2 (en) 2005-09-08 2006-09-01 Auto-focus and zoom module having a lead screw with its rotation results in translation of an optics group
US11/514,811 2006-09-01
US11/888,939 2007-08-03
US11/888,939 US7590505B2 (en) 2005-09-08 2007-08-03 Manufacturable micropositioning system employing sensor target
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