CN101548162B - 紧凑的反射折射分光计 - Google Patents

紧凑的反射折射分光计 Download PDF

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Publication number
CN101548162B
CN101548162B CN2007800325707A CN200780032570A CN101548162B CN 101548162 B CN101548162 B CN 101548162B CN 2007800325707 A CN2007800325707 A CN 2007800325707A CN 200780032570 A CN200780032570 A CN 200780032570A CN 101548162 B CN101548162 B CN 101548162B
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China
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optical
optical element
detector
characterization system
lens
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CN2007800325707A
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Chinese (zh)
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CN101548162A (zh
Inventor
R·博克斯泰尔
B·卢伊塞特
K·内森斯
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Interuniversitair Microelektronica Centrum vzw IMEC
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Interuniversitair Microelektronica Centrum vzw IMEC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0294—Multi-channel spectroscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CN2007800325707A 2006-07-20 2007-07-20 紧凑的反射折射分光计 Active CN101548162B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP06015122.2 2006-07-20
EP06015122A EP1882916A1 (en) 2006-07-20 2006-07-20 Compact catadioptric spectrometer
US83779906P 2006-08-11 2006-08-11
US60/837,799 2006-08-11
PCT/BE2007/000083 WO2008009074A2 (en) 2006-07-20 2007-07-20 Compact catadioptric spectrometer

Publications (2)

Publication Number Publication Date
CN101548162A CN101548162A (zh) 2009-09-30
CN101548162B true CN101548162B (zh) 2011-05-11

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Family Applications (1)

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CN2007800325707A Active CN101548162B (zh) 2006-07-20 2007-07-20 紧凑的反射折射分光计

Country Status (7)

Country Link
US (1) US7864317B2 (https=)
EP (2) EP1882916A1 (https=)
JP (1) JP2009544015A (https=)
CN (1) CN101548162B (https=)
AU (1) AU2007276718A1 (https=)
CA (1) CA2658187A1 (https=)
WO (1) WO2008009074A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728177B (zh) 2016-09-23 2021-05-21 日商大塚電子股份有限公司 分光測定裝置

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5205238B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5512961B2 (ja) * 2008-05-15 2014-06-04 浜松ホトニクス株式会社 分光モジュール及びその製造方法
JP5205242B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器の製造方法
JP5205243B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP2009300417A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュールの製造方法及び分光モジュール
JP2009300418A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP5205240B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュールの製造方法及び分光モジュール
JP5205241B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP2009300422A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP5205239B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP5415060B2 (ja) * 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
FI20095065A0 (fi) * 2009-01-26 2009-01-26 Wallac Oy Yhdistetty linssi ja heijastin sekä sitä käyttävä optinen laite
JP5672709B2 (ja) 2010-02-04 2015-02-18 セイコーエプソン株式会社 生体情報検出器、生体情報測定装置および生体情報検出器における反射部の設計方法
US20130206448A1 (en) 2010-07-19 2013-08-15 Dsm Ip Assets B.V. Flame retardant insulated electrical wire
JP5765081B2 (ja) * 2011-06-22 2015-08-19 ソニー株式会社 撮像素子、電子機器、製造方法、および検査装置
WO2013102661A1 (en) * 2012-01-04 2013-07-11 Carsten Thirstrup Spectroscopic sensor for bio-sensing
CN104160252B (zh) * 2012-03-14 2016-03-16 福斯分析有限公司 色散光谱仪
CN103398778B (zh) * 2013-08-19 2015-07-29 深圳先进技术研究院 微型光谱仪及其制备装配方法
JP6325268B2 (ja) * 2014-02-05 2018-05-16 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
EP2913663A1 (en) * 2014-02-28 2015-09-02 IMEC vzw Optical spectrometer with matched étendue
CN104296871B (zh) * 2014-10-22 2016-03-02 清华大学深圳研究生院 一种双入射狭缝光谱仪的设计方法以及双入射狭缝光谱仪
CN104716899B (zh) * 2015-03-17 2017-08-15 河海大学常州校区 多棱镜折射式聚光跟踪一体化太阳电池组件
US10514296B2 (en) 2015-07-29 2019-12-24 Samsung Electronics Co., Ltd. Spectrometer including metasurface
US11268854B2 (en) 2015-07-29 2022-03-08 Samsung Electronics Co., Ltd. Spectrometer including metasurface
US11867556B2 (en) 2015-07-29 2024-01-09 Samsung Electronics Co., Ltd. Spectrometer including metasurface
CN106525235A (zh) * 2016-09-30 2017-03-22 西北工业大学 芯片式光谱成像系统
CZ2016661A3 (cs) * 2016-10-21 2018-02-14 Fyzikální Ústav Av Čr, V. V. I. Kompaktní systém pro charakterizaci spektra a profilu intenzity svazku krátkovlnného záření
EP3372966B1 (en) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy
CA3056657A1 (en) * 2017-03-21 2018-09-27 Magic Leap, Inc. Method and system for tracking eye movement in conjunction with a light scanning projector
US11207870B2 (en) * 2017-07-24 2021-12-28 Oak Analytics Inc Refractive-index matching optical window
US11092486B2 (en) 2017-12-08 2021-08-17 California Institute Of Technology Compact folded metasurface spectrometer
DE102018100622B4 (de) * 2018-01-12 2019-10-10 Ernst-Abbe-Hochschule Jena Simultanspektrometer mit einem planen reflektiven Beugungsgitter
WO2020222949A1 (en) 2019-04-30 2020-11-05 California Institute Of Technology Folded metasurface hyperspectral imager
US11639873B2 (en) * 2020-04-15 2023-05-02 Viavi Solutions Inc. High resolution multi-pass optical spectrum analyzer
CN115077727B (zh) * 2021-03-15 2024-04-26 四川大学 一种在线检测透明元件前后表面面形的方法
CN113485020B (zh) * 2021-05-31 2023-06-20 上海悠睿光学有限公司 基于透射光栅的分光器
KR102730648B1 (ko) * 2022-02-24 2024-11-15 한국과학기술원 초박형 마이크로 분광기 및 이의 제조방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6862092B1 (en) * 1999-01-08 2005-03-01 Ibsen Photonics A/S Spectrometer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3528947A1 (de) * 1985-08-13 1987-02-26 Zeiss Carl Fa Reflexionsbeugungsgitter mit hohem wirkungsgrad
US4852079A (en) * 1987-11-23 1989-07-25 Allied-Signal Inc. Optical spectral analyzer
US5026160A (en) * 1989-10-04 1991-06-25 The United States Of America As Represented By The Secretary Of The Navy Monolithic optical programmable spectrograph (MOPS)
JPH0431720A (ja) * 1990-05-28 1992-02-03 Res Dev Corp Of Japan ２次元物体の分光装置
AU5436696A (en) * 1995-07-05 1997-02-05 Lockheed Martin Energy Systems, Inc. Monolithic spectrometer and method for fabricating same
KR0155521B1 (ko) * 1995-12-20 1998-11-16 양승택 광통신용 패킷 어드레스 검출기
US6303934B1 (en) * 1997-04-10 2001-10-16 James T. Daly Monolithic infrared spectrometer apparatus and methods
EP0942267B1 (de) * 1998-03-11 2006-08-30 Gretag-Macbeth AG Spektrometer
AU2001276875A1 (en) * 2000-07-11 2002-01-21 Ibsen Photonics Monitoring apparatus for optical transmission systems
JP2002131129A (ja) * 2000-10-20 2002-05-09 Nec Corp エバート型分光器
US6785002B2 (en) * 2001-03-16 2004-08-31 Optical Coating Laboratory, Inc. Variable filter-based optical spectrometer
JP2003066271A (ja) * 2001-08-22 2003-03-05 Nippon Telegr & Teleph Corp <Ntt> 光波長分波素子
US7016037B2 (en) * 2003-10-06 2006-03-21 The Regents Of The University Of California Imaging spectrometer utilizing immersed gratings with accessible entrance slit
US7239386B2 (en) * 2004-08-17 2007-07-03 The Regents Of The University Of California Compact imaging spectrometer utilizing immersed gratings
US7330258B2 (en) * 2005-05-27 2008-02-12 Innovative Technical Solutions, Inc. Spectrometer designs
US7697137B2 (en) * 2006-04-28 2010-04-13 Corning Incorporated Monolithic Offner spectrometer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6862092B1 (en) * 1999-01-08 2005-03-01 Ibsen Photonics A/S Spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728177B (zh) 2016-09-23 2021-05-21 日商大塚電子股份有限公司 分光測定裝置

Also Published As

Publication number Publication date
EP2047220A2 (en) 2009-04-15
CN101548162A (zh) 2009-09-30
AU2007276718A1 (en) 2008-01-24
EP1882916A1 (en) 2008-01-30
WO2008009074A3 (en) 2008-03-06
CA2658187A1 (en) 2008-01-24
JP2009544015A (ja) 2009-12-10
US20090310135A1 (en) 2009-12-17
US7864317B2 (en) 2011-01-04
WO2008009074A2 (en) 2008-01-24

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