CN101542253B - 光学传感方法 - Google Patents

光学传感方法 Download PDF

Info

Publication number
CN101542253B
CN101542253B CN2007800440160A CN200780044016A CN101542253B CN 101542253 B CN101542253 B CN 101542253B CN 2007800440160 A CN2007800440160 A CN 2007800440160A CN 200780044016 A CN200780044016 A CN 200780044016A CN 101542253 B CN101542253 B CN 101542253B
Authority
CN
China
Prior art keywords
optical
microresonator
mode
scattering
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007800440160A
Other languages
English (en)
Chinese (zh)
Other versions
CN101542253A (zh
Inventor
易亚沙
巴里·J·科赫
特里·L·史密斯
郭春梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN101542253A publication Critical patent/CN101542253A/zh
Application granted granted Critical
Publication of CN101542253B publication Critical patent/CN101542253B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
    • G01N21/7746—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the waveguide coupled to a cavity resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
CN2007800440160A 2006-12-01 2007-11-08 光学传感方法 Expired - Fee Related CN101542253B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/565,955 US7512298B2 (en) 2006-12-01 2006-12-01 Optical sensing methods
US11/565,955 2006-12-01
PCT/US2007/084110 WO2008070399A2 (en) 2006-12-01 2007-11-08 Optical sensing methods

Publications (2)

Publication Number Publication Date
CN101542253A CN101542253A (zh) 2009-09-23
CN101542253B true CN101542253B (zh) 2012-11-21

Family

ID=39493636

Family Applications (3)

Application Number Title Priority Date Filing Date
CN2007800440160A Expired - Fee Related CN101542253B (zh) 2006-12-01 2007-11-08 光学传感方法
CN2007800445198A Expired - Fee Related CN101573605B (zh) 2006-12-01 2007-11-19 光学传感装置和方法
CN200780044106XA Expired - Fee Related CN101542270B (zh) 2006-12-01 2007-11-19 光学传感装置和方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN2007800445198A Expired - Fee Related CN101573605B (zh) 2006-12-01 2007-11-19 光学传感装置和方法
CN200780044106XA Expired - Fee Related CN101542270B (zh) 2006-12-01 2007-11-19 光学传感装置和方法

Country Status (5)

Country Link
US (1) US7512298B2 (https=)
EP (1) EP2087329A2 (https=)
JP (1) JP2010511870A (https=)
CN (3) CN101542253B (https=)
WO (1) WO2008070399A2 (https=)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2736184T3 (es) 2005-08-19 2019-12-26 Amylin Pharmaceuticals Llc Exendina para el tratamiento de la diabetes y la reducción del peso corporal
US7702202B2 (en) * 2006-12-01 2010-04-20 3M Innovative Properties Company Optical microresonator
US7903240B2 (en) * 2006-12-01 2011-03-08 3M Innovative Properties Company Optical sensing device
EP2034287A1 (en) * 2007-09-10 2009-03-11 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Optical sensor for measuring a force distribution
US10365224B2 (en) * 2007-12-06 2019-07-30 Genalyte, Inc. Label-free optical sensors
DE102008050767A1 (de) * 2008-10-09 2010-04-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optischer Sensor
US9846126B2 (en) 2008-10-27 2017-12-19 Genalyte, Inc. Biosensors based on optical probing and sensing
US20120012739A1 (en) 2008-12-30 2012-01-19 Koch Barry J Optical microresonator system
US8231833B2 (en) * 2009-03-24 2012-07-31 Lockheed Martin Corporation Direct optical interrogation of agents in micro-fluidic channels utilizing whispering gallery resonator approach
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US11754488B2 (en) * 2009-12-11 2023-09-12 Washington University Opto-mechanical system and method having chaos induced stochastic resonance and opto-mechanically mediated chaos transfer
US8320718B2 (en) 2010-06-07 2012-11-27 General Electric Company Optical sensors and methods of making the same
EP3266881B1 (en) * 2010-11-05 2019-12-25 Genalyte, Inc. Optical analyte detection systems and methods of use
CN102073102B (zh) * 2010-12-08 2012-08-08 中国科学院半导体研究所 槽波导微环谐振型单纤三向器
CN102564960A (zh) * 2010-12-09 2012-07-11 苏州生物医学工程技术研究所 一种光波导谐振腔型传感设备
SG182131A1 (en) 2010-12-28 2012-07-30 Agency Science Tech & Res An optical sensing system and a method of determining a change in an effective refractive index of a resonator of an optical sensing system
WO2013063410A1 (en) 2011-10-28 2013-05-02 Hoya Corporation Usa Optical waveguide splitter on a waveguide substrate for attenuating a light source
US9062960B2 (en) 2012-02-07 2015-06-23 Medlumics S.L. Flexible waveguides for optical coherence tomography
CN102636841B (zh) * 2012-04-27 2014-11-12 浙江大学 一种微环辅助的环镜结构
WO2014143637A1 (en) 2013-03-15 2014-09-18 The Board Of Trustees Of The University Of Illinois Methods and compositions for enhancing immunoassays
WO2014190331A2 (en) * 2013-05-23 2014-11-27 Cornell University Nanophotonic raman spectroscopy biosensors
CN103411925B (zh) * 2013-07-12 2015-07-15 电子科技大学 拱形环结构的级联式马赫曾德尔干涉型光学生化传感器
CN104007141B (zh) * 2014-05-13 2016-05-25 太原理工大学 一种零折射率超材料平板波导耦合回音壁模的传感器
CN105745853B (zh) 2014-10-29 2018-08-21 华为技术有限公司 一种光分插复用器及光网络信号的传输方法
NO342831B1 (en) * 2015-04-23 2018-08-13 Roxar Flow Measurement As System for measuring characteristics of a fluid flow
US10024656B2 (en) 2015-04-29 2018-07-17 Honeywell International Inc. System and methods for highly integrated optical readout MEMS sensors
US9803979B2 (en) * 2015-06-26 2017-10-31 Honeywell International Inc. Systems and methods for a time-based optical pickoff for MEMS sensors
FR3054664B1 (fr) 2016-07-27 2018-09-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif optique a micro-resonateur en anneau segmente pour un capteur biologique ou chimique
KR102697425B1 (ko) * 2017-02-02 2024-08-21 삼성전자주식회사 분광기 및 그 분광기가 적용된 성분 측정 장치
WO2020113343A1 (en) * 2018-12-06 2020-06-11 Lumerical Inc. System and method for creating a single port interface for simulating bidirectional signals in circuits using available circuit simulation standards
JP7214496B2 (ja) * 2019-02-14 2023-01-30 古河電気工業株式会社 波長可変レーザ素子およびリング共振器フィルタの検査方法
CN109787072B (zh) * 2019-02-22 2020-06-30 南京信息工程大学 基于掺杂回音壁球的多载波光信号发生装置和方法
JP7455529B2 (ja) 2019-08-01 2024-03-26 キヤノンメディカルシステムズ株式会社 検体測定装置及び検体測定装置の制御方法
CN110673266B (zh) * 2019-09-19 2020-09-15 中国科学院半导体研究所 基于高阶微环谐振器的窄带光滤波器
CN110764191A (zh) * 2019-11-01 2020-02-07 灵芯光电(天津)有限公司 一种基于微环的矩形光滤波器及其设计方法
US11914264B2 (en) * 2020-10-07 2024-02-27 Openlight Photonics, Inc. Hybrid photonic ring modulators
CN112683400B (zh) * 2020-11-27 2021-11-19 浙江大学 一种基于欧拉微环谐振腔的高分辨率光谱仪
CN112921307B (zh) * 2021-01-20 2021-12-31 华中科技大学 一种用于提升mocvd喷淋均匀性的光学检测装置
CN115752727A (zh) * 2022-11-15 2023-03-07 西湖大学 一种集成的基于可调谐微盘谐振腔的光谱仪及其检测方法
US12320682B2 (en) 2023-06-23 2025-06-03 Washington University High-Q whispering gallery mode (WGM) resonators encapsulated in polydimethylsilozane (PDMS) for highly sensitive displacement detection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1494662A (zh) * 2000-09-22 2004-05-05 ��������ͨ���о�Ժ 改变波导微谐振器谐振的方法
CN1867824A (zh) * 2003-10-14 2006-11-22 3M创新有限公司 作为传感器的多孔微球共振器

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS543449A (en) 1977-06-10 1979-01-11 Nippon Telegr & Teleph Corp <Ntt> Semioptical band blooking filter
US4775214A (en) * 1983-12-21 1988-10-04 Rosemount Inc. Wavelength coded resonant optical sensor
US5537432A (en) 1993-01-07 1996-07-16 Sdl, Inc. Wavelength-stabilized, high power semiconductor laser
US5398256A (en) 1993-05-10 1995-03-14 The United States Of America As Represented By The United States Department Of Energy Interferometric ring lasers and optical devices
US5420880A (en) * 1993-10-12 1995-05-30 Wisconsin Alumni Research Foundation Low threshold vertical cavity surface emitting laser
US5748663A (en) 1994-06-08 1998-05-05 Qsource, Inc. Retangular discharge gas laser
US5926496A (en) 1995-05-25 1999-07-20 Northwestern University Semiconductor micro-resonator device
US6009115A (en) 1995-05-25 1999-12-28 Northwestern University Semiconductor micro-resonator device
US5910963A (en) 1997-04-08 1999-06-08 Carl Zeiss Jena Gmbh Laser resonator design with improved signal-to-noise level (S/N) at the output of a single-mode fiber-coupled multi-wavelength laser providing illumination for a laser scanning microscope
DE29707358U1 (de) * 1997-04-23 1998-08-27 Ferco International Ferrures et Serrures de Bâtiment S.A., Reding Beschlag mit Tragarm oder Ausstellarm zur Lagerung eines Drehflügels oder Dreh-Kippflügels
AU1477900A (en) * 1998-11-13 2000-06-05 California Institute Of Technology Resonator fiber bidirectional coupler
US6608716B1 (en) * 1999-05-17 2003-08-19 New Mexico State University Technology Transfer Corporation Optical enhancement with nanoparticles and microcavities
CA2374401A1 (en) * 1999-05-21 2000-11-30 Seng-Tiong Ho Oval resonator device
US6711200B1 (en) * 1999-09-07 2004-03-23 California Institute Of Technology Tuneable photonic crystal lasers and a method of fabricating the same
EP1221051A4 (en) 1999-10-14 2003-03-05 Univ Utah Res Found RESONANT OPTICAL CAVITIES FOR HIGH SENSITIVITY AND HIGH EFFICIENCY BIODETECTORS AND METHODS USING THE SAME
US6583399B1 (en) * 1999-11-22 2003-06-24 California Institute Of Technology Optical resonator microsphere sensor with altering Q-factor
EP1266253A4 (en) 2000-03-22 2005-08-03 California Inst Of Techn MICROACTIVITY OF A NON-SPHERICAL RESONATOR IN ECHO MODE
US6507684B2 (en) * 2000-06-28 2003-01-14 The Charles Stark Draper Laboratory, Inc. Optical microcavity resonator system
AU2001281192A1 (en) * 2000-08-08 2002-02-18 California Institute Of Technology Optical sensing based on whispering-gallery-mode microcavity
DE60137447D1 (de) * 2000-11-28 2009-03-05 Rosemount Inc Einrichtung zur messung physikalischer grössen mit einem optischen sensor
US6515749B2 (en) * 2001-01-10 2003-02-04 The United States Of America As Represented By The Secretary Of Commerce Sensitive and selective chemical sensor with nanostructured surfaces
US6661950B1 (en) * 2001-01-10 2003-12-09 Nomadics, Inc. Microresonator-based tuned optical filter
US20030063426A1 (en) * 2001-08-29 2003-04-03 D-Wave Systems, Inc. Microsphere optical device
US6778316B2 (en) * 2001-10-24 2004-08-17 William Marsh Rice University Nanoparticle-based all-optical sensors
US20040023396A1 (en) * 2001-11-14 2004-02-05 Boyd Robert W. Ring or disk resonator photonic biosensor and its use
GR1004178B (el) * 2001-11-29 2003-03-05 "����������" Ολοκληρωμενος οπτοηλεκτρονικος βιοαισθητηρας πυριτιου για ανιχνευση βιομοριων επισημασμενων με χρωμοφορες ομαδες ή νανοσωματιδια
US6947632B2 (en) * 2002-01-03 2005-09-20 Fischer Sylvain G Method of implementing the kerr effect in an integrated ring resonator (the kerr integrated optical ring filter) to achieve all-optical wavelength switching, as well as all-optical tunable filtering, add-and -drop multiplexing, space switching and optical intensity modulation
WO2003065414A2 (en) * 2002-01-30 2003-08-07 Photon-X, Inc. Microresonators made of nanoparticles with halogenated polymer coating embedded in halogenated polymer host matrix
US7245801B2 (en) * 2002-03-21 2007-07-17 University Of Rochester Apparatus with a series of resonator structures situated near an optical waveguide for manipulating optical pulses
US6680962B2 (en) 2002-04-29 2004-01-20 Bin Liu Narrow linewidth, low frequency chirping and broad wavelength tunable ring resonator coupled lasers
US20040137478A1 (en) * 2002-10-22 2004-07-15 Stephen Arnold Enhancing the sensitivity of a microsphere sensor
EP1627244B1 (en) * 2003-02-12 2009-09-02 California Institute Of Technology Radial bragg ring resonator
US7085452B1 (en) 2003-03-21 2006-08-01 I Fos, Inc. Optical devices having WGM cavity coupled to side-polished port
WO2005008296A2 (en) * 2003-07-03 2005-01-27 Oewaves, Inc. Optical coupling for whispering-gallery-mode resonators via waveguide gratings
US7062118B2 (en) * 2003-07-18 2006-06-13 3M Innovative Properties Company Microring resonator and method for manufacturing
WO2005019798A2 (en) * 2003-08-13 2005-03-03 The Regents Of The University Of Michigan Biochemical sensors with micro-resonators
US7444045B2 (en) * 2003-10-14 2008-10-28 3M Innovative Properties Company Hybrid sphere-waveguide resonators
EP2259392B1 (en) * 2003-12-18 2013-07-17 Yeda Research And Development Co., Ltd. Laser resonator cavity configuration
US20050141809A1 (en) * 2003-12-31 2005-06-30 Gardner Donald S. Microring and microdisk resonators for lasers fabricated on silicon wafers
US7244926B2 (en) * 2004-02-26 2007-07-17 Nomadics, Inc. Microresonator-based high-performance high-pressure sensor and system
EP1756548B1 (en) 2004-05-26 2015-06-24 Genera Biosystems Limited Biosensor using whispering gallery modes in microspheres
US7271379B2 (en) * 2004-05-27 2007-09-18 3M Innovative Properties Company Dielectric microcavity fluorosensors excited with a broadband light source
US7260279B2 (en) 2004-06-09 2007-08-21 Oewaves, Inc. Integrated opto-electronic oscillators
US7257279B2 (en) * 2004-09-20 2007-08-14 3M Innovative Properties Company Systems and methods for biosensing and microresonator sensors for same
GB0505646D0 (en) * 2005-03-18 2005-04-27 Oxborrow Mark Solid-state maser oscillator of high frequency stability and low phase noise

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1494662A (zh) * 2000-09-22 2004-05-05 ��������ͨ���о�Ժ 改变波导微谐振器谐振的方法
CN1867824A (zh) * 2003-10-14 2006-11-22 3M创新有限公司 作为传感器的多孔微球共振器

Also Published As

Publication number Publication date
JP2010511870A (ja) 2010-04-15
US7512298B2 (en) 2009-03-31
WO2008070399A3 (en) 2008-08-28
CN101542253A (zh) 2009-09-23
CN101542270B (zh) 2011-03-09
WO2008070399A2 (en) 2008-06-12
EP2087329A2 (en) 2009-08-12
CN101542270A (zh) 2009-09-23
US20080129997A1 (en) 2008-06-05
CN101573605A (zh) 2009-11-04
CN101573605B (zh) 2012-02-29

Similar Documents

Publication Publication Date Title
CN101542253B (zh) 光学传感方法
CN101548163B (zh) 光学传感装置
US7933022B2 (en) Integrated optical disk resonator
US7903906B2 (en) Optical sensing devices and methods
CN101416362B (zh) 将光耦合进微谐振器
US20120012739A1 (en) Optical microresonator system
US20020172457A1 (en) Coated optical microcavity resonator chemical sensor
WO2007117985A2 (en) Method of coupling light into microresonators
KR101179368B1 (ko) 유전성 미세공동 센서
CN101910898A (zh) 光学微谐振器
WO2009145731A1 (en) Optical resonator and optical sensing system comprising the same
Baets et al. Spectroscopy-on-chip applications of silicon photonics
White et al. Demonstration of a liquid core optical ring resonator sensor coupled with an ARROW waveguide array
Blair et al. Biosensing with optical microcavities

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121121

Termination date: 20181108

CF01 Termination of patent right due to non-payment of annual fee