CN101519207A - Powder burning furnace - Google Patents
Powder burning furnace Download PDFInfo
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- CN101519207A CN101519207A CN200910116474A CN200910116474A CN101519207A CN 101519207 A CN101519207 A CN 101519207A CN 200910116474 A CN200910116474 A CN 200910116474A CN 200910116474 A CN200910116474 A CN 200910116474A CN 101519207 A CN101519207 A CN 101519207A
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Abstract
The invention relates to a powder burning furnace which comprises a burner (1) and a spheroidizing furnace and is characterized in that the center of the burner (1) is provided with a gas orifice (101) and three layers of annular gas injection passages (102, 103 and 104). Inorganic powder and oxygen are injected from the gas orifice (101) after being mixed and mixedly burnt in a burning chamber together with natural gas and oxygen which are injected from the annular gas injection passages (102, 103 and 104). The invention has the advantages that the outer layer of annular protective oxygen can effectively protect powdery granules from sticking a fire wall and ensure oxygen rich burning, and spherical silica micro powder with excellent performances such as high dielectric property and filing ratio, low expansion and stress, high liquidity, and the like can be used, thereby the powder burning furnace can be applied to basal plates and packaged materials of large-scale and super large-scale integrated circuits.
Description
Technical field
The invention belongs to a kind of powder combustion unit, be mainly used in the non-metallic minerals powder, particularly ball-shaped silicon micro powder particulate preparation.
Background technology
The fast development of electronics and information industry, having driven the unicircuit market scale constantly enlarges, silicon powder also demonstrates vast potential for future development as the packing material of the epoxy plastic cement of unicircuit encapsulation usefulness thereupon, but the specification of quality to silicon powder is also more and more higher,, high purity ultra-fine, the low-activity constituent content, also especially the spheroidization requirement has been proposed its particle shape except requiring.Ball-shaped silicon micro powder is as the filler of epoxy molding plastic, and comparing with the dihedral silicon powder to significantly improve filling ratio and flowability, and ball-shaped silicon micro powder replaces the dihedral silicon powder and becomes a reality.Ball-shaped silicon micro powder has a variety of manufacture method, fires method etc. as silicon-dioxide high-temperature melting method, sol-gel method, Pure Silicon Metal.
The silicon-dioxide high-temperature melting method is to be raw material in order to the dihedral silicon powder, utilize burner with Sweet natural gas or liquefied petroleum gas (LPG) and pure oxygen mixed firing in balling furnace, the high temperature that produces more than 2000 ℃ melts the dihedral quartz particles fully, the nodularization under capillary effect of the quartz particles of molten state, and then, promptly obtain the ball-shaped silicon micro powder product through cooling fast.Burner is the equipment of most critical in whole technological process; there are variety of issue in burner and whole combustion unit through regular meeting in the actual production; can not make quartz particles all enter sticking wall after flame scope, the quartz particles fusion as feeding mode; the flow direction of combustion gas and combustion-supporting gas and jet mode in addition, several factors such as material dispersed degree all can influence quality product.
When Japanese patent laid-open 9-89224 makes ball-shaped silicon micro powder, the silicon powder uniform particles is disperseed, bond between the particle, reduce the nodularization rate.And size-grade distribution is narrow, and flowability is relatively poor when being used for the stopping composition of Resins, epoxy.
The balling furnace that Japanese patent laid-open 10-85577 proposes, mend into freezing air along the nodularization furnace wall with circular hole, prevent that the stove inwall from adhering to the effect of melted powder though have, cause the interior temperature of balling furnace low excessively, reduce the nodularization rate of silicon powder if the air capacity that enters is crossed conference.
Summary of the invention
Purpose of the present invention is exactly a kind of powder burning furnace that provides for the defective that overcomes the prior art existence.
To achieve these goals, the invention provides following technical scheme:
A kind of powder burning furnace, it comprises in burner and the balling furnace, the bottom of balling furnace connects cyclonic separator, bag filter and induced draft fan successively, it is characterized in that: the center of burner is provided with an interior epoxy center gas orifice, and the shellring shape jet channel that is provided with around the burner center.
Furnace wall in the balling furnace is provided with one group of cooling air inlet, and cooling air inlet enters in the balling furnace along the body of heater tangential direction.The quantity of cooling air inlet can be provided with one deck or two-layer according to the volume of balling furnace, every layer cooling air inlet 3-6.
In the technique scheme:
1, the interior epoxy center gas orifice of burner, as middle feed, oxygen disperses the main channel of feeding, mainly plays combustion-supporting effect, powder delivery of oxygen, in order to carry powder to the burner effect;
2, the shellring shape jet channel that is provided with around the burner center provides Sweet natural gas, combustion-supporting oxygen and protection oxygen respectively.Outer ring protection oxygen, the parcel powder is not outwards dispersed, and reduces the sticking wall of powder.The flow of Sweet natural gas and oxygen all can be regulated, and can improve the shape of flame by the ratio of regulating inside and outside oxygen.
3, cooling air inlet, air enters in the balling furnace along the body of heater tangential direction, and the air admission amount can be controlled by valve, forms one deck air circulation at flame and nodularization furnace wall, and isolated flame and powder contact with the furnace wall, prevent that silicon powder from boning on the furnace wall.
It is fuel that burner adopts Sweet natural gas, comburant oxygen, combustion gas and oxygen and powder material come out to furnace injection from the burner combustion mouth, mixed firing burning in the combustion chamber, under any circumstance all to keep oxygen-enriched combusting, prevent that the Sweet natural gas incomplete combustion from generating carbon and then polluted product.Enter the Sweet natural gas of burner, the silicon powder raw material is ejected by the centre of burner, falls from the central vertical of balling furnace, by the flame fusing and be cooled to spheroidal particle again.Distribute from the temperature field of flame, the flame kernel portion temperature is the highest, can more effective fusion after raw material enters behind the flame kernel position from burner, improve the nodularization rate of product, in addition powder from flame kernel by can reduce be bonded on the furnace wall may.
Advantage of the present invention is: simple in structure; regulation and control flexibly; can regulate the heat that burning produces by gas flow and the oxygen flow regulated; outer ring protection oxygen can be protected the not sticking wall of powder granule effectively; enter the temperature that an amount of freezing air can effectively reduce product in the balling furnace bottom, so that collect.The present invention can be widely used in the calcining of inorganic superfine powder body, if be used for preparing ball-shaped silicon micro powder, available obtain have high-performance ball-shaped silicon micro powders such as high dielectric, high fill-ratio, low bulk, low-stress, high workability, can be applied on a large scale as indispensable raw material, in the substrate and encapsulating compound of super large-scale integration.
Description of drawings
Fig. 1 is a front view of the present invention;
Fig. 2 is the amplification view of the burner among Fig. 1;
Fig. 3 is the A-A sectional view of Fig. 2;
Fig. 4 is the B-B sectional view of Fig. 1.
Embodiment
As shown in Figure 1, a kind of powder burning furnace provided by the invention, it comprises in burner 1 and the balling furnace 2,2 bottoms connect cyclonic separator 4, bag filter 5, induced draft fan 6 successively in the balling furnace.
As Fig. 2, shown in Figure 3, the center of burner 1 is provided with an interior epoxy center gas orifice 101, and the shellring shape jet channel 102,103,104 that is provided with around the burner center.
As Fig. 1, shown in Figure 4,2 furnace wall is provided with one group of two-layer cooling air inlet 3 altogether in the balling furnace, and every layer of four cooling air inlet 3 enter in the balling furnace along the body of heater tangential direction.
Burner 1 places the top of the balling furnace 2 of column structure, and burner 1 center is provided with an interior epoxy center gas orifice 101 and is delivery of oxygen and powder raw material passage; Shellring shape jet channel 102,103,104 is respectively Sweet natural gas, protection oxygen and combustion-supporting oxygen passage.
As shown in Figure 1, the Sweet natural gas that shellring shape jet channel 102,103,104 ejects from burner, oxygen mixed firing in the combustion chamber, produce thermal-flame 201, silicon powder and oxygen mix fall along thermal-flame 201 central vertical from interior epoxy center gas orifice 101, in thermal-flame, melt, under capillary effect, condense into spheroidal particle 202 after leaving flame.As shown in Figure 4, the air that enters from the nodularization furnace wall forms the not sticking furnace wall of circulation 203 protection quartz particles.The spherical quartz particle enters cyclonic separator along transport pipe under induced draft fan generation suction function, and qualified product are separated from cyclonic separator, and segmentation enters the belt dust-precipitator, can collect in the dust-precipitator bottom.
Claims (2)
1, a kind of powder burning furnace, it comprises in burner (1) and the balling furnace (2), it is characterized in that: the center of burner (1) is provided with an interior epoxy center gas orifice (101), and the shellring shape jet channel (102,103,104) that is provided with around the burner center.
2, a kind of powder burning furnace according to claim 1 is characterized in that: the furnace wall of (2) is provided with one group of cooling air inlet (3) in the balling furnace, and cooling air inlet (3) enters in the balling furnace along the body of heater tangential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910116474A CN101519207A (en) | 2009-03-31 | 2009-03-31 | Powder burning furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910116474A CN101519207A (en) | 2009-03-31 | 2009-03-31 | Powder burning furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101519207A true CN101519207A (en) | 2009-09-02 |
Family
ID=41080032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910116474A Pending CN101519207A (en) | 2009-03-31 | 2009-03-31 | Powder burning furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101519207A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111936421A (en) * | 2019-03-12 | 2020-11-13 | 浙江三时纪新材科技有限公司 | Preparation method of spherical silica powder filler, spherical silica powder filler obtained by preparation method and application of spherical silica powder filler |
| CN114307839A (en) * | 2021-12-17 | 2022-04-12 | 中节能(达州)新材料有限公司 | Spherical silicon micro powder balling equipment and balling process thereof |
-
2009
- 2009-03-31 CN CN200910116474A patent/CN101519207A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111936421A (en) * | 2019-03-12 | 2020-11-13 | 浙江三时纪新材科技有限公司 | Preparation method of spherical silica powder filler, spherical silica powder filler obtained by preparation method and application of spherical silica powder filler |
| CN111936421B (en) * | 2019-03-12 | 2022-11-11 | 浙江三时纪新材科技有限公司 | Preparation method of spherical silica powder filler, spherical silica powder filler obtained by preparation method and application of spherical silica powder filler |
| CN114307839A (en) * | 2021-12-17 | 2022-04-12 | 中节能(达州)新材料有限公司 | Spherical silicon micro powder balling equipment and balling process thereof |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090902 |