Summary of the invention
The purpose of this invention is to provide a kind of manufacturing method of color filters, by being used to improve the hydrophilic etchant etching glass substrate of glass substrate, improve the water wettability of glass substrate when forming pit, overcome the high defective of colored filter manufacturing cost in the prior art.
For achieving the above object, the invention provides a kind of colored filter, comprise glass substrate, color resin and black matrix, glass substrate is provided with several pits; Black matrix is positioned on the glass substrate, and black matrix and pit are not overlapping; Be equipped with color resin in the pit.
Wherein, color resin is: red resin, green resin or blue resins.
Wherein, the volume of pit is identical.
For achieving the above object, the present invention also provides a kind of manufacturing method of color filters, comprising: form black matrix at glass baseplate surface; Be used to improve the hydrophilic etchant etching glass substrate of glass substrate, do not have the zone of covering to be formed for the pit of ccontaining color resin at black matrix; In pit, splash into color resin respectively; The sclerosis color resin forms colored filter.
Wherein forming black matrix at glass baseplate surface is specially: the black matrix material of deposition on glass substrate; On the glass substrate that deposits black matrix material, be coated with photoresist by coating process; Under the coverage of mask plate, by the exposure technology exposed photoresist; Remove the photoresist that is exposed by developing process; By the black matrix material of etch process etching, and form black matrix; Technology is removed residual photoresist by removing photoresist.
Wherein, splashing into color resin respectively in pit is specially: splash into red resin, green resin or blue resins respectively in pit; The sclerosis color resin is specially: sclerosis red resin, green resin or blue resins form colored filter.
Wherein, be used to improve the glass baseplate surface that the black matrix of the hydrophilic etchant etching of glass substrate does not have covering, the pit that does not have the zone of covering to be formed for ccontaining color resin at black matrix is specially: with hydrogen fluoride etch agent etching glass substrate, do not have the zone of covering to be formed for the pit of ccontaining color resin at black matrix.
For achieving the above object, the present invention also provides a kind of manufacturing method of color filters, comprising: be used to improve the hydrophilic etchant etching glass substrate of glass substrate, be formed for the pit of ccontaining color resin; Form black matrix in the zone that does not form pit, and the same mask plate that uses when adopt forming described pit forms described black matrix; In pit, splash into color resin respectively; The sclerosis color resin forms colored filter.
Wherein, forming black matrix is specially: the black matrix material of deposition on glass substrate; On the glass substrate that deposits black matrix material, be coated with photoresist by coating process; Under the coverage of mask plate, by the exposure technology exposed photoresist; Remove the photoresist that is exposed by developing process; By the black matrix material of etch process etching, and form black matrix; Technology is removed residual photoresist by removing photoresist.
Wherein, be used to improve the hydrophilic etchant etching glass substrate of glass substrate, the pit that is formed for ccontaining color resin is specially: with hydrogen fluoride etch agent etching glass substrate, be formed for the pit of ccontaining color resin.
Colored filter of the present invention, the method for the pit by being provided for ccontaining color resin on glass substrate has realized colored filter.
Method for manufacturing colored filtering substrate of the present invention, on the glass substrate that is formed with black matrix, be used to improve the hydrophilic etchant etching glass substrate of glass substrate, to improve the glass substrate water wettability, overcome prior art and formed pit afterwards by the extra hydrophilic defective of treatment step raising glass substrate.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Embodiment
The embodiment of colored filter of the present invention
Fig. 1 is the base plan synoptic diagram of colored filter embodiment of the present invention, and Fig. 2 is the A-A schematic cross-section of Fig. 1 of the present invention.As depicted in figs. 1 and 2, colored filter of the present invention comprises: color resin, black matrix 2 and glass substrate 1, and wherein glass substrate 1 is provided with several pits that is used for ccontaining color resin 3; Also be provided with black matrix 2 on glass substrate 1, black matrix 2 is covered with glass substrate 1 surface that does not have pit 3, and the pit 3 of promptly black matrix 2 and glass substrate 1 is not overlapping, and is used to block the unusual liquid crystal molecule of arrangement; In pit 3, be equipped with color resin.
The embodiment of colored filter of the present invention, the method of the pit by on glass substrate, being provided for ccontaining color resin, realized colored filter, if use the black matrix of thickness same as the prior art in the present embodiment, then can compare existing colored filter and be equipped with more color resin, help improving the colourity of color resin, and then improve the quality of colored filter; If use the color resin of volume same as the prior art in the present embodiment, then can corresponding minimizing deceive the thickness of matrix, and then help reducing the thickness of liquid crystal indicator.
In the present embodiment colored filter, color resin can be red resin, green resin or blue resins, further can also use the color resin of other color according to the concrete needs of Show Color.
In the present embodiment colored filter, the degree of depth h of each pit equates, width d equates that the volume of each pit is identical like this, thereby at the color resin of the ccontaining same amount of each pit.In actual production, can change the amount that pit depth h and width d adjust the color resin that is contained in pit according to concrete needs.
First embodiment of method for manufacturing colored filtering substrate of the present invention
Fig. 3 is the first embodiment process flow diagram of method for manufacturing colored filtering substrate of the present invention, and these method concrete steps are as follows:
Step 101, at clean glass baseplate surface, be formed for blocking the black matrix of arranging unusual liquid crystal molecule, make black matrix can prevent that these liquid crystal molecules from directly reflecting the light of backlight;
Step 102, be used to improve the described black matrix of the hydrophilic etchant etching of glass substrate and do not have the glass baseplate surface that covers, be formed for the pit of ccontaining color resin, wherein be used to improve hydrophilic etchant of glass substrate and black matrix and do not react;
Step 103, after glass baseplate surface forms pit, in described pit, splash into color resin respectively;
Step 104, sclerosis have splashed into the color resin in the described pit, form colored filter.
First embodiment of method for manufacturing colored filtering substrate of the present invention, on the glass substrate that is formed with black matrix, be used to improve the hydrophilic etchant etching glass substrate of glass substrate, to improve the glass substrate water wettability, having overcome prior art forms after the pit, improve the hydrophilic defective of glass substrate by extra treatment step, and the present embodiment method for manufacturing colored filtering substrate if form the black matrix of thickness same as the prior art, then can increase the capacity of color resin relatively; If in pit, be equipped with the color resin of volume same as the prior art, then can reduce the thickness of black matrix relatively, thereby help reducing the thickness of liquid crystal indicator.
In first embodiment of method for manufacturing colored filtering substrate of the present invention, form the step of black matrix, as shown in Figure 4, for forming the process flow diagram of black matrix among first embodiment of method for manufacturing colored filtering substrate of the present invention, the method that forms black matrix specifically comprises as follows:
Step 1011, on clean glass substrate the black uniformly matrix material of deposit thickness;
Step 1012, on the glass substrate that deposits black matrix material, be coated with photoresist equably by coating process;
Step 1013, under coverage with mask plate of setting pattern, by the exposure technology described photoresist that exposes, make that the photoresist corresponding with described setting pattern is not exposed, remaining photoresist is exposed;
Step 1014, remove the photoresist that is exposed by developing process, make that the black matrix material corresponding with described setting pattern covered by described photoresist, remaining black matrix material is exposed;
Step 1015, the described black matrix material of exposing by the etch process etching, and the formation black matrix identical with described setting pattern;
Step 1016, remove residual photoresist by the technology of removing photoresist, promptly remove the photoresist that is not exposed, make the black matrix identical with the setting pattern is arranged expose, the technology of wherein removing photoresist can be stripping technology or cineration technics etc.
The foregoing description has formed the black matrix with setting pattern by simple process steps.
In the above-described embodiments, the black matrix material of deposition on the glass substrate can for: on glass substrate, deposit chromium.
Further, in first embodiment of method for manufacturing colored filtering substrate of the present invention, in pit, splash into respectively color resin can for: in described pit, splash into red resin, green resin or blue resins respectively; Correspondingly, the sclerosis color resin can be harden described red resin, green resin or blue resins, and forms colored filter.
Further, in first embodiment of method for manufacturing colored filtering substrate of the present invention, be used to improve the glass baseplate surface that the described black matrix of the hydrophilic etchant etching of glass substrate does not have covering, be formed for ccontaining color resin pit can for: with hydrogen fluoride (HF) etchant etching glass substrate, be formed for the pit of ccontaining color resin.
Second embodiment of method for manufacturing colored filtering substrate of the present invention
Fig. 5 is the second embodiment process flow diagram of method for manufacturing colored filtering substrate of the present invention, and these method concrete steps are as follows:
Step 201, at glass baseplate surface, be used to improve the hydrophilic etchant of glass substrate, be formed for the pit of ccontaining color resin;
Step 202, at glass baseplate surface, the zone that does not form pit forms black matrix, makes described black matrix between described pit, and blocks and arrange unusual liquid crystal molecule;
Step 203, in described pit, splash into color resin respectively;
Step 204, the described color resin that hardens form colored filter.
Second embodiment of method for manufacturing colored filtering substrate of the present invention by being used to improve the method that the hydrophilic etchant of glass substrate forms pit earlier, having overcome prior art and has improved the hydrophilic defective of glass substrate by extra treatment step.
In second embodiment of method for manufacturing colored filtering substrate of the present invention, being used to improve the hydrophilic etchant of glass substrate is hydrogen fluoride.
In second embodiment of method for manufacturing colored filtering substrate of the present invention, the method for formation pit is the process flow diagram that forms pit among second embodiment of method for manufacturing colored filtering substrate of the present invention as shown in Figure 6, and this method specifically comprises as follows:
Step 2011, at clean glass baseplate surface, be coated with photoresist equably;
Step 2012, under coverage with mask plate of setting pattern, by exposure technology, the described photoresist that exposes makes that the photoresist corresponding with described setting pattern is not exposed, remaining photoresist is exposed;
Step 2013, remove the photoresist that is exposed by developing process, make that the glass baseplate surface corresponding with described setting pattern covered by described photoresist, remaining glass baseplate surface is exposed;
Step 2014, the described glass baseplate surface that exposes by the etch process etching, and formation and the corresponding pit of described setting pattern;
Step 2015, remove residual photoresist by the technology of removing photoresist, the technology of wherein removing photoresist can be stripping technology, perhaps can be cineration technics.
In second embodiment of method for manufacturing colored filtering substrate of the present invention, it is similar to the method that forms black matrix in first embodiment of method for manufacturing colored filtering substrate of the present invention to form the method for black matrix, in the specific implementation process, can be when forming pit the identical mask plate of used mask plate form the step of black matrix, perhaps can be when forming pit the corresponding mask plate of used mask plate form the step of black matrix, the non-transmission area of the mask plate that the transmission area of the mask plate that uses when promptly forming pit is corresponding to be used when forming black matrix, the corresponding transmission area that forms the mask plate that uses when deceiving matrix of the non-transmission area of the mask plate that uses when forming pit.When if the identical mask plate of used mask plate forms and deceives matrix during with the formation pit, the photoresist of the photoresist that is removed in the developing process for not being exposed.Be specially: the black matrix material of deposition on glass substrate, as materials such as chromium; On the glass substrate that deposits black matrix material, be coated with photoresist by coating process; Under the coverage of mask plate, by the exposure technology described photoresist that exposes; Remove the photoresist that is exposed by developing process; By the described black matrix material of etch process etching, and form black matrix; Technology is removed residual photoresist by removing photoresist.
It should be noted that at last: above embodiment only in order to technical scheme of the present invention to be described, is not intended to limit; Although with reference to previous embodiment the present invention is had been described in detail, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of various embodiments of the present invention technical scheme.