CN101515065B - Electrostatic driving MEMS deformable mirror based on lever amplification principle - Google Patents
Electrostatic driving MEMS deformable mirror based on lever amplification principle Download PDFInfo
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- CN101515065B CN101515065B CN2009100781946A CN200910078194A CN101515065B CN 101515065 B CN101515065 B CN 101515065B CN 2009100781946 A CN2009100781946 A CN 2009100781946A CN 200910078194 A CN200910078194 A CN 200910078194A CN 101515065 B CN101515065 B CN 101515065B
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- lever amplification
- electrostatic
- anchor point
- lever
- supporting construction
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Abstract
The invention discloses an MEMS deformable mirror based on lever amplification principle, comprising at least two lever amplification electrostatic drivers, at least two articulated beams, at least one supporting structure and a mirror surface; the lever amplification electrostatic drivers are connected with the supporting structure via the articulated beam, the supporting structure is connected with the mirror surface via a connector, and the lever amplification electrostatic drivers are composed of an anchor point, a cantilever beam, an upper pole plate and a lower pole plate, the long arm thereof is connected with the articulated beam, the short arm thereof acts on the upper pole plate, and the anchor point and the lower pole plate are fixed on the same plane. The electrostatic driving MEMS deformable mirror based on lever amplification in the invention not only has the advantages of common MEMS apparatuses, which has small volume and light weight, has no hysteresis effect, and can realize array and mass production, but also reduces the influence of electrostatic drawing-in phenomenon by lever amplification, improves stroke and can be widely used in the field of adaptive optics.
Description
Technical field
The present invention relates to the Micro-Opto-Electro-Mechanical Systems technical field, particularly a kind of MEMS distorting lens that is applicable to ADAPTIVE OPTICS SYSTEMS based on lever amplification principle.
Background technology
In the adaptive optics field, the MEMS distorting lens of static driven has that volume is little, low in energy consumption, and response speed is fast, can produce in batches, with the compatible advantage such as good of integrated circuit, thereby enjoys favor in ADAPTIVE OPTICS SYSTEMS.Existing electrostatic drive MEMS distorting lens generally all is an electrostatic attraction type, last bottom crown adds voltage, make top crown by a downward displacement, make minute surface by a displacement by support column, electrostatic attraction MEMS distorting lens is generally all around this principle worked.Yet the shortcoming of this electrostatic attraction MEMS distorting lens is: upward bottom crown is subjected to static and draws in the restriction of effect (pull-in effect), the displacement that makes top crown to move down is 1/3rd of polar plate spacing up and down to the maximum, in order to satisfy bigger stroke, polar plate spacing is done very greatly up and down, in process, have some difficulties, and this type of drive required voltage is bigger.
Summary of the invention
The technical problem to be solved in the present invention is: at the deficiencies in the prior art, designed a kind of electrostatic drive MEMS distorting lens based on lever amplification principle, it can amplify by the relatively less stroke of lever construction with electrostatic actuator, thereby reduced the restriction that static is drawn in effect, improved the stroke of distorting lens.
The technical solution adopted for the present invention to solve the technical problems is: a kind of MEMS distorting lens based on lever amplification principle is characterized in that: comprise at least two lever amplification electrostatic drivers, at least two tie-beams, a supporting construction and a minute surface; Lever amplification electrostatic drivers is connected with supporting construction by tie-beam, and supporting construction links to each other with minute surface by connector.
Described at least two lever amplification electrostatic drivers become rotation to be distributed in around the supporting construction symmetrically.
Described lever amplification electrostatic drivers is by anchor point, and semi-girder is long-armed, and top crown and bottom crown are formed; It is long-armed to link to each other with tie-beam, and its galianconism is as top crown, and anchor point and bottom crown are fixing at grade.
Described lever amplification electrostatic drivers adopts approximate " worker " font structure, end at two arms of each " worker " font one end is respectively an anchor point, play fixation, be that each electrostatic actuator is fixed by two anchor points, cause the top crown of electrostatic actuator and anchor point to be an one-piece construction; And the bottom crown of electrostatic actuator is separated.
The geometric center conllinear of described minute surface, connector, supporting construction, at least two tie-beams, at least two lever amplification electrostatic drivers.
The anchor point of described electrostatic actuator, top crown, bottom crown, driver long-armed, and supporting construction, the material of tie-beam is semiconductor material,
Described minute surface is a double-layer structure, and the upper strata is oxidation resistant metal of high reflectance or alloy, and lower floor is a semiconductor material.
The advantage that the present invention is compared with prior art had: static driven structure of the present invention links to each other with tie-beam by the lever structure for amplifying, tie-beam links to each other with minute surface with connector by supporting construction, make that the displacement on the electrostatic actuator vertical direction can be extended by the lever amplification, make the minute surface displacement increase, the stroke of distorting lens increases, and reduces the influence that static is drawn in phenomenon; And the present invention is based on the electrostatic drive MEMS distorting lens that lever amplifies and also have the advantage of general MEMS device, but little, in light weight, the no lag-effect of volume, can produce in batches and array etc.
Description of drawings
Fig. 1 is based on the schematic perspective view of the MEMS distorting lens of lever amplification principle;
Fig. 2 be not during making alive based on the structural drawing of the MEMS distorting lens of lever amplification principle;
Fig. 3 is based on the malformation figure of the MEMS distorting lens (not comprising minute surface) of lever amplification principle when applying voltage;
The structure of the single lever actuator of Fig. 4 comprises anchor point, last bottom crown, and semi-girder, long-armed.
Among the figure: 1 is tie-beam, and 2 is supporting construction, and 3 is connector, and 4 is anchor point, and 5 are electrostatic actuator top crown (being galianconism), and 6 is the bottom crown of electrostatic actuator, and 7 is long-armed, and 8 is minute surface, and 9 is semi-girder.
Specific embodiment
Introduce the present invention in detail below in conjunction with the drawings and the specific embodiments.But following embodiment only limits to explain the present invention, and protection scope of the present invention should comprise the full content of claim, and promptly can realize the full content of claim of the present invention by following examples those skilled in the art.
Present embodiment is of a size of the MEMS static driven distorting lens based on lever construction of 450 μ m * 450 μ m with minute surface, is example with four lever amplification electrostatic drivers, in conjunction with the accompanying drawings the present invention is described specifically.
Fig. 1 is the schematic perspective view based on the MEMS distorting lens of lever amplification principle; Present embodiment be positioned at the central authorities of total based on the supporting construction in the electrostatic drive MEMS distorting lens of lever amplification principle 2, all around symmetry be connected with 4 electrostatic actuators based on lever amplification principle, correspondence has 4 tie-beams 1; Each electrostatic actuator is by anchor point 4, and semi-girder 9 is long-armed 7, and top crown 5 and bottom crown 6 are formed, as shown in Figure 4; The top crown of 4 electrostatic actuators (being galianconism) 5 is respectively by semi-girder 9, long-armed 7 link to each other with supporting construction 2 with tie-beam 1, and the geometric center conllinear of minute surface, supporting construction, four tie-beams (regarding an integral body as), four drivers (regarding an integral body as); The bottom crown 6 of 4 electrostatic actuators and anchor point 4 are positioned at (substrate is omitted in the drawings) in the substrate, and the bottom crown 6 of driver is separated from one another with anchor point 4; Described 4 electrostatic actuators adopt approximate " worker " font structure, end at two arms of each " worker " font one end has an anchor point 4 respectively, play fixation, each driver is fixed by two anchor points, causes the top crown 5 of 4 electrostatic actuators to be an one-piece construction with anchor point 4; And the bottom crown 6 of 4 electrostatic actuators is separated; When adding voltage between top crown 5 and the bottom crown 6, because the electrostatic attraction effect, top crown has a downward displacement.The size of getting the top crown 5 of 4 electrostatic actuators here is respectively 200 μ m * 30 μ m, the size of 4 bottom crowns 6 is respectively 190 μ m * 20 μ m, the size of semi-girder 9 is 170 μ m * 2 μ m, long-armed size is 180 μ m * 20 μ m, the tie-beam width is 3 μ m, the anchor point 4 of described electrostatic actuator, top crown 5, bottom crown 6, long-armed 7 of driver, top crown 5, supporting construction 10, the material of connector 3 is semiconductor material, and minute surface 8 is double-layer structures, the upper strata is oxidation resistant metal of high reflectance or alloy, and lower floor is a semiconductor material.
Fig. 2 be not during making alive based on the structural drawing of the MEMS distorting lens of lever amplification principle.When top crown 5 and bottom crown 6 did not connect driving voltage, whole lever and minute surface were in initial equilibrium conditions, the gap maximum between top crown 5 and the bottom crown 6, and minute surface does not have generation motion vertically.When incident ray incides minute surface with unspecified angle, can directly be reflected, do not change light path.
Fig. 3 is based on the malformation figure of the MEMS distorting lens (not comprising minute surface) of lever amplification principle when applying voltage.When top crown 5 connects noble potential, bottom crown 6 connects electronegative potential, can produce voltage field and electrostatic attraction like this between top crown 5 and bottom crown 6.Because electrostatic attraction effect, all top crowns 5 can occur bending and deformation by trend bottom crown 6, long-armed 7 and galianconism 5 can be around semi-girder 9 rotations, according to leverage, the less displacement of galianconism end is enlarged into the bigger displacement of long arm end by lever, long-armed 7 can move up, by tie-beam 1, supporting construction 2, connector 3 drives minute surface to top offset, up to the elastic restoring force equal and opposite in direction of electrostatic attraction and top crown 5, top crown 5 (being galianconism) reaches new equilibrium state; As shown in Figure 3; The displacement of this moment minute surface and substrate will increase, and for same the incident ray during for same not making alive, when light was reflected, the situation during with making alive was not compared, and light path can shorten, thereby plays the effect of distorting lens.
As known from the above, MEMS distorting lens based on lever amplification principle of the present invention, its driver produces the vertical direction displacement by static driven, by lever displacement is amplified, then by tie-beam and supporting construction with minute surface jack-up, thereby realize the function of distorting lens; This distorting lens reduces the influence that static is drawn in by the lever amplification, has improved stroke.
Claims (5)
1. the MEMS distorting lens based on lever amplification principle is characterized in that: comprise two lever amplification electrostatic drivers, two tie-beams (1), a supporting construction (2) and a minute surface (8) at least at least; Lever amplification electrostatic drivers is connected with supporting construction (2) by tie-beam (1), and supporting construction (2) links to each other with minute surface (8) by connector (3);
Described lever amplification electrostatic drivers is by anchor point (4), semi-girder (9), long-armed (7), top crown (5) and bottom crown (6) are formed; Its long-armed (7) link to each other with tie-beam (1), and its galianconism is as top crown (5), and anchor point (4) and bottom crown (6) are fixing at grade; Described lever amplification electrostatic drivers adopts approximate " worker " font structure, end at two arms of each " worker " font one end is respectively an anchor point (4), play fixation, be that each electrostatic actuator is fixed by two anchor points, anchor point (4) links to each other by semi-girder (9) and top crown (5); Cause the top crown (5) of electrostatic actuator to be an one-piece construction with anchor point (4); And the bottom crown of electrostatic actuator (6) is separated with anchor point (4); Top crown when applying voltage (5) and long-armed (7) can be around semi-girder (9) rotations.
2. a kind of MEMS distorting lens based on lever amplification principle according to claim 1 is characterized in that: described at least two lever amplification electrostatic drivers become rotation to be distributed in supporting construction (2) symmetrically all around.
3. a kind of MEMS distorting lens based on lever amplification principle according to claim 1 is characterized in that: the geometric center conllinear of described minute surface (8), connector (3), supporting construction (2), at least two tie-beams (1), at least two lever amplification electrostatic drivers.
4. according to claim 1 or 3 each described a kind of MEMS distorting lenss based on lever amplification principle, it is characterized in that: the anchor point of described electrostatic actuator (4), top crown (5), bottom crown (6), long-armed (7) of driver, and supporting construction (2), the material of tie-beam (1) is semiconductor material.
5. a kind of MEMS distorting lens according to claim 1 based on lever amplification principle, it is characterized in that: described minute surface (8) is a double-layer structure, and the upper strata is oxidation resistant metal of high reflectance or alloy, and lower floor is a semiconductor material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100781946A CN101515065B (en) | 2009-02-26 | 2009-02-26 | Electrostatic driving MEMS deformable mirror based on lever amplification principle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100781946A CN101515065B (en) | 2009-02-26 | 2009-02-26 | Electrostatic driving MEMS deformable mirror based on lever amplification principle |
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| Publication Number | Publication Date |
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| CN101515065A CN101515065A (en) | 2009-08-26 |
| CN101515065B true CN101515065B (en) | 2011-05-04 |
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| CN2009100781946A Expired - Fee Related CN101515065B (en) | 2009-02-26 | 2009-02-26 | Electrostatic driving MEMS deformable mirror based on lever amplification principle |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013209829B4 (en) | 2013-05-27 | 2016-04-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optical structure with webs disposed thereon and method of making the same |
| CN110346930B (en) * | 2019-08-21 | 2020-08-04 | 中国科学院地质与地球物理研究所 | MEMS micro-mirror and MEMS optical switch |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1221889A (en) * | 1997-12-31 | 1999-07-07 | 三星电子株式会社 | Deformable mirror device |
| CN101236300A (en) * | 2008-03-03 | 2008-08-06 | 中国科学院光电技术研究所 | Electrostatic repulsion force driven MEMS distorting lens |
| CN101256283A (en) * | 2008-04-07 | 2008-09-03 | 中国科学院光电技术研究所 | Electrostatic drive MEMS distorting lens based on SOI wafer |
-
2009
- 2009-02-26 CN CN2009100781946A patent/CN101515065B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1221889A (en) * | 1997-12-31 | 1999-07-07 | 三星电子株式会社 | Deformable mirror device |
| CN101236300A (en) * | 2008-03-03 | 2008-08-06 | 中国科学院光电技术研究所 | Electrostatic repulsion force driven MEMS distorting lens |
| CN101256283A (en) * | 2008-04-07 | 2008-09-03 | 中国科学院光电技术研究所 | Electrostatic drive MEMS distorting lens based on SOI wafer |
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| CN101515065A (en) | 2009-08-26 |
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