CN101509147B - Crystal growth furnace body cooling structure - Google Patents
Crystal growth furnace body cooling structure Download PDFInfo
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- CN101509147B CN101509147B CN2008100099562A CN200810009956A CN101509147B CN 101509147 B CN101509147 B CN 101509147B CN 2008100099562 A CN2008100099562 A CN 2008100099562A CN 200810009956 A CN200810009956 A CN 200810009956A CN 101509147 B CN101509147 B CN 101509147B
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- Prior art keywords
- water
- cooling structure
- drain pan
- crystal growth
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000001816 cooling Methods 0.000 title claims abstract description 52
- 239000013078 crystal Substances 0.000 title claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 90
- 239000007921 spray Substances 0.000 claims abstract description 19
- 238000005086 pumping Methods 0.000 claims description 22
- 239000000779 smoke Substances 0.000 claims description 6
- 239000000284 extract Substances 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 210000001364 upper extremity Anatomy 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 abstract 8
- 239000003595 mist Substances 0.000 abstract 1
- 239000003570 air Substances 0.000 description 17
- 230000014759 maintenance of location Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
Images
Abstract
The invention provides a cooling structure for a crystallizing furnace stack, wherein, an upper interlayer space is formed between the outer shell and the inner shell of the upper chamber of the furnace; a lower interlayer space is formed between the out bottom shell and the inner bottom shell of the furnace bottom cover; a plurality of water pipes are circumstantially arranged in the upper interlayer space and the lower interlayer space respectively, and a plurality of spray holes are opened on the water pipes to facilitate a pressure pump to be pressurized to pump external water; the water pipes and the spray holes are employed to spray water mist on the external surface of the inner shell and the inner bottom shell to cool down the furnace stack. If an air extractor is added, the discharge of hot air in the upper interlayer space and the lower interlayer space can be speeded up. In addition, emergent water pipes can be added in the upper interlayer space and the lower interlayer space to spray water columns for cooling the furnace stack in emergency, thus avoiding secondary disaster from occurring.
Description
Technical field
The present invention relates to a kind of cooling structure, refer to a kind of crystal growth furnace body cooling structure that is applicable to especially.
Background technology
See also Fig. 1, it is the synoptic diagram of existing long brilliant stove cooling structure.As shown in the figure, growing brilliant stove is respectively equipped with stove epicoele 91, reaches furnace bottom lid 92.Wherein, stove epicoele 91 includes body skin 911, reaches inner housing 912; Furnace bottom lid 92 is respectively equipped with outer drain pan 921, reaches interior drain pan 922.
In stove epicoele 91, its by body skin 911, and 912 of inner housings be formed with mezzanine space 910; In furnace bottom lid 92, it is by being formed with mezzanine space 920 between outer drain pan 921 and the interior drain pan 922.
As shown in Figure 1, pressurization pumping 94 is drawn pure water from retention basin 96, and by inhalent siphon 941 pure water is sinked to upper and lower mezzanine space 910,920, in order to the cooling heat that shaft produced.And by return water pipe 942 hot pure water is back to retention basin 96, again with frozen water machine 95, and cooling tower 951 pure water in the retention basin 96 are cooled off.In addition, also need pure water equipment 97 that water is given purifying.Therefore, brilliant its equipment of stove cooling structure of existing length and maintenance cost incur a considerable or great expense.
And, last mezzanine space 910, and down be full of a large amount of cooling pure water in the mezzanine space 920, because of life-time service or make the bad crack that produces on inner housing 912,922, pure water will constantly pour in the furnace inner space 90 under the condition of high temperature.And with the sharply reaction and disengage a large amount of hydrogen (H2), carbon monoxide (CO) and water vapor of wherein graphite equipment, the brilliant stove of whole length is blasted and worker's peace accident takes place.
Summary of the invention
The object of the invention provides a kind of crystal growth furnace body cooling structure, and it comprises a stove epicoele, reaches furnace bottom lid.Furnace bottom lid is to be covered on stove epicoele below and one common peripheral from lower to upper around forming a furnace inner space, and the furnace inner space content is provided with heating chamber, crucible, well heater ... etc. the long brilliant structure of many silicon wafers.
The stove epicoele includes a body skin, reaches an inner housing, and body skin is round barrel shape, and inner housing also is round barrel shape, and body skin and cover cover in the inner housing outside, and are formed with mezzanine space between body skin and inner housing.
In addition, furnace bottom lid include an outer drain pan, and one in drain pan, it is bowl-shape that outer drain pan is circle, and interior drain pan also to be circle bowl-shape, in outer drain pan and cover cover in outside the drain pan, and between outer drain pan and interior drain pan, be formed with mezzanine space.
Wherein, at least one inhalent siphon, and at least one water inlet pipe, respectively around being arranged in this upper and lower mezzanine space, at least one inhalent siphon, and the pipe face of at least one water inlet pipe on offer a plurality of spray holes.
One pressurization pumping, be communicated at least one inhalent siphon respectively, reach at least one water inlet pipe, by the pressurization pumping extract an external water source via at least one inhalent siphon, and a plurality of spray holes of at least one water inlet pipe with the water smoke shape be sprayed on inner housing and in the outside surface of drain pan, in order to cooling cooling shaft.
Therefore, can reach cooling performance, and then improve existing a large amount of cooling pure water, the anti-shortcoming that causes great public security accident used with above-mentioned water smoke shape spray pattern.
And the periphery below of body skin offers hole pattern as inlet mouth, and the top of body skin offers an air outlet.So that can make freezing air enter, warm air is discharged by vertical air outlet by inlet mouth.
Again, the stove epicoele can be provided with a vacuum fan, and this vacuum fan can be mounted on the place, air outlet of body skin.The warm air that this vacuum fan can be forced to extract out in the mezzanine space is extremely outside, more quickens the speed of cooling of body of heater.The neighboring of body skin also can be provided with a plurality of oblique lower plates, it is located at the upper limb of a plurality of inlet mouths respectively, in order to cover wind and rain, and the air flow line of double as guiding cool ambient air inflow, make its up spontaneous current locate to the air outlet, cause heat accumulation to be difficult for leaving so can in last mezzanine space, not produce turbulent flow.
And the neighboring of body skin also can all be made of hole pattern, even do not need extraction fan, because the stove epicoele directly is exposed to the exterior space, also can reach radiating effect.
In addition, the stove epicoele, and furnace bottom lid also can include at least one return water pipe, at least one return line.One end of return water pipe is located in below, the other end of mezzanine space and is guided to outside retention basin; One end of return line is located in down below, the other end of mezzanine space and is guided to outside retention basin, is can be with the not water yield of evaporation recovery fully, for utilizing once more.
Moreover, the stove epicoele, and furnace bottom lid also can include at least one urgent water pipe, it around being arranged in the upper and lower mezzanine space, offers a plurality of spout holes on the pipe face of urgent water pipe respectively.
Can include a control valve as above-mentioned pressurization pumping, be linked between at least one urgent water pipe and the pressurization pumping, import a control signal C when urgent and open the external water source that the pressurization pumping is extracted sprays drain pan in inner housing reaches with a large amount of water columns via several spout holes of urgent water pipe outside surface by the control of control valve, in order to urgent cooling cooling shaft, avoid further disaster to take place.
In addition, the present invention does not need to cool off with a large amount of cooling pure water, removes the frozen water machine of can saving, and cooling tower, and relevant device such as pure water equipment, and maintenance cost, more can save expending of a large amount of electric energy.
Description of drawings
Fig. 1 is the synoptic diagram of existing long brilliant stove cooling structure;
Fig. 2 is the sectional view of the long brilliant stove cooling structure of a preferred embodiment of the present invention;
Fig. 3 is the synoptic diagram of the long brilliant stove cooling structure of a preferred embodiment of the present invention;
Fig. 4 is the vertical view of the long brilliant stove cooling structure of a preferred embodiment of the present invention;
Fig. 5 is the upward view of the long brilliant stove cooling structure of a preferred embodiment of the present invention;
Fig. 6 is the sectional view of the long brilliant stove cooling structure of another preferred embodiment of the present invention.
[primary clustering nomenclature]
Stove epicoele 1,91 furnace inner space 10,90 body skiies 11,911,20
Inlet mouth 111,116 air outlets 112,117 vacuum fans 113
Mezzanine space on oblique lower plate 114 inner housings 12,912
13，910，17
Inhalent siphon 14,941 spray holes 141,241 urgent water pipes 15,25
Spout hole 151,251 return water pipes 16,942 one ends 161,261
The other end 162,262 furnace bottoms lid 2,92 outer drain pans 21,921
22,922 times mezzanine spaces of interior drain pan, 23,920 water inlet pipes 24
Hole pattern 115 pure water equipments 97
Embodiment
See also Fig. 2, it is the sectional view of the long brilliant stove cooling structure of a preferred embodiment of the present invention.As shown in the figure, the invention relates to a kind of crystal growth furnace body cooling structure, comprise a stove epicoele 1 (upperbody), reach furnace bottom lid 2 (lower body), furnace bottom lid 2 is to be covered on stove epicoele 1 below and one common peripheral from lower to upper around forming a furnace inner space 10, and furnace inner space 10 contents are provided with heating chamber, crucible, well heater ... etc. the long brilliant structure of many silicon wafers.
Wherein, stove epicoele 1 includes a body skin 11, reaches an inner housing 12.Body skin 11 is round barrel shape, and inner housing 12 also is round barrel shape.Body skin 11 and cover cover in inner housing 12 outsides, and are formed with mezzanine space 13 between body skin 11 and inner housing 12.
And furnace bottom lid 2 includes an outer drain pan 21, reaches drain pan 22 in.It is bowl-shape that outer drain pan 21 is circle, and it is bowl-shape that interior drain pan 22 also is circle.Drain pan 22 outsides in outer drain pan 21 and cover cover in, and between outer drain pan 21 and interior drain pan 22, be formed with mezzanine space 23.
See also Fig. 3, Fig. 4, reach Fig. 5, Fig. 3 is the synoptic diagram of the long brilliant stove cooling structure of a preferred embodiment of the present invention; Fig. 4 is the vertical view of the long brilliant stove cooling structure of a preferred embodiment of the present invention; Fig. 5 is the upward view of the long brilliant stove cooling structure of a preferred embodiment of the present invention.
As Fig. 3, Fig. 4, and shown in Figure 5, many inhalent siphons 14 around being arranged in the mezzanine space 13, and offer many spray holes 141 on the pipe face of inhalent siphon 14; Many water inlet pipes 24, around being arranged at down in the mezzanine space 23, and on the pipe face of water inlet pipe 24, offer many spray holes 241, be to be example in this example with three inhalent siphons 14, three water inlet pipes 24, certainly inhalent siphon 14, and the quantity of water inlet pipe 24 be with drain pan 12 in evenly water coolant being sprayed to, and inner housing 22 be principle.
As shown in Figure 3, a pressurization pumping 3 is located at stove epicoele 1, reaches furnace bottom lid 2 outsides and is communicated to inhalent siphon 14, reaches water inlet pipe 24.Extract an external water source by pressurization pumping 3, retention basin for example, via inhalent siphon 14, and a plurality of spray holes 141,241 of water inlet pipe 24 be sprayed on the water smoke shape in drain pan 12, and the outside surface of inner housing 22 with cooling cooling shaft.
Therefore, can reach cooling performance, and then improve existing a large amount of cooling pure water, the anti-shortcoming that causes great public security accident used with above-mentioned water smoke shape spray pattern.
As shown in Figure 3, note that the periphery below of body skin 11 offers hole pattern 115 as inlet mouth 111, the top of body skin 11 offers an air outlet 112, so that can make freezing air enter by inlet mouth 111, and, warm air is discharged by vertical air outlet 112.
As shown in Figure 3, stove epicoele 1 includes a vacuum fan 113, and this vacuum fan 113 is mounted on 112 places, air outlet of body skin 11.Force to extract out the warm air gone up in the mezzanine space 13 to outside if can add this vacuum fan 113, can more quicken the speed of cooling of body of heater.In addition, the neighboring of body skin 11 also can all be made of hole pattern 115, even do not need extraction fan 113, because stove epicoele 1 directly is exposed to the exterior space, also can reach radiating effect.
Please consult Fig. 3, Fig. 4, and Fig. 5 simultaneously, wherein, stove epicoele 1 includes a urgent water pipe 15, around being arranged in the mezzanine space 13, and promptly offers a plurality of spout holes 151 on the pipe face of water pipe 15; Furnace bottom lid 2 more includes two urgent water pipes 25, around being arranged at down in the mezzanine space 23, and promptly offers a plurality of spout holes 251 on the pipe face of water pipe 25.
In addition, above-mentioned pressurization pumping 3 also includes a control valve 31, this control valve 31 is linked to urgent water pipe 15 respectively, 25 and pressurization pumping 3 between, it is imported a control signal C and opens with the control of order control valve 31 when urgent, and makes external water source that pressurization pumping 3 extracts via urgent water pipe 15, a plurality of spout holes 151 of 25,251 spray in interior drain pan 12, and the outside surface of inner housing 22 with a large amount of water columns, in order to urgent cooling cooling shaft, avoid further disaster to take place.
And stove epicoele 1 is provided with a return water pipe 16, and an end 161 of this return water pipe 16 is located in below, the other end 162 of mezzanine space 13 and is guided to the outside; Furnace bottom lid 2 also is provided with a return line 26, and an end 261 of this return line 26 is located in below, the other end 262 of this time mezzanine space 23 and is guided to outside retention basin, is can be with the not water yield of evaporation recovery fully, for utilizing once more.
In addition, the present invention does not need to cool off with a large amount of cooling pure water, removes the frozen water machine of can saving, and cooling tower, and relevant device such as pure water equipment, and maintenance cost, more can save expending of a large amount of electric energy.
See also Fig. 6, it is the sectional view of the long brilliant stove cooling structure of another preferred embodiment of the present invention.In this example, its structure is roughly the same with a last embodiment, the neighboring that only is body skin 20 that only do not exist together also is provided with a plurality of oblique lower plates 114, these a plurality of oblique lower plates 114 are located at the upper limb of several inlet mouths 116 respectively, in order to cover wind and rain, and the air flow line that flows into of double as guiding cool ambient air, make its up spontaneous current cause heat accumulation to be difficult for leaving to 117 places, air outlet so can in last mezzanine space 17, not produce turbulent flow.
The foregoing description is only given an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (9)
1. crystal growth furnace body cooling structure comprises a stove epicoele, and furnace bottom lid, and this furnace bottom lid is to be covered on this stove epicoele below and one common peripheral around forming a furnace inner space;
Wherein, this stove epicoele includes a body skin, reaches an inner housing, and this body skin is round barrel shape, and this inner housing also is round barrel shape, and this body skin and cover cover in this inner housing outside, and are formed with mezzanine space between this body skin and this inner housing;
It is characterized in that:
At least one inhalent siphon around being arranged on this in mezzanine space, offers a plurality of spray holes on the pipe face of this at least one inhalent siphon; And
One pressurization pumping is communicated to this at least one inhalent siphon, extracts an external water source by this pressurization pumping and sprays away with the water smoke shape via these a plurality of spray holes of this at least one inhalent siphon.
2. crystal growth furnace body cooling structure according to claim 1 is characterized in that the periphery of this body skin is provided with a plurality of hole patterns as inlet mouth, and the top of this body skin offers an air outlet.
3. as crystal growth furnace body cooling structure as described in the claim 2, it is characterized in that this stove epicoele also includes a vacuum fan, this vacuum fan is mounted on this place, air outlet of this body skin.
4. as crystal growth furnace body cooling structure as described in the claim 2, it is characterized in that the neighboring of this body skin more includes a plurality of oblique lower plates, these a plurality of oblique lower plates are located at the upper limb of these many inlet mouths respectively.
5. crystal growth furnace body cooling structure according to claim 1 is characterized in that this stove epicoele also includes at least one return water pipe, and an end of this at least one return water pipe is located in below, the other end of mezzanine space on this and is guided to the outside.
6. crystal growth furnace body cooling structure according to claim 1 is characterized in that this stove epicoele also includes at least one urgent water pipe, around being arranged on this in mezzanine space, offers a plurality of spout holes on the pipe face of this at least one urgent water pipe;
Wherein, this pressurization pumping more includes a control valve, be linked between this at least one urgent water pipe and this pressurization pumping, the control by this control valve is opened this external water source of making this pressurization pumping extraction and is sprayed in this inner housing with a large amount of water columns via these a plurality of spout holes of this at least one urgent water pipe.
7. crystal growth furnace body cooling structure comprises a stove epicoele, and furnace bottom lid, and this furnace bottom lid is to be covered on this stove epicoele below and one common peripheral around forming a furnace inner space;
Wherein, this furnace bottom lid include an outer drain pan, and one in drain pan, it is bowl-shape that this outer drain pan is circle, it is bowl-shape that drain pan also is circle in this, this outer drain pan and cover cover in outside this interior drain pan, and outside this drain pan and be somebody's turn to do in be formed with mezzanine space between the drain pan;
It is characterized in that:
At least one water inlet pipe around being arranged in this time mezzanine space, offers a plurality of spray holes on the pipe face of this at least one water inlet pipe; And
One pressurization pumping is communicated to this at least one water inlet pipe, extracts an external water source by this pressurization pumping and is sprayed in this time mezzanine space with the water smoke shape via these a plurality of spray holes of this at least one water inlet pipe.
8. as crystal growth furnace body cooling structure as described in the claim 7, it is characterized in that this furnace bottom lid also includes at least one return line, an end of this at least one return line is located in below, the other end of this time mezzanine space and is guided to the outside.
9. as crystal growth furnace body cooling structure as described in the claim 7, it is characterized in that this furnace bottom lid also includes at least one urgent water pipe, around being arranged in this time mezzanine space, offers a plurality of spout holes on the pipe face of this at least one urgent water pipe;
Wherein, this pressurization pumping also includes a control valve, be linked between this at least one urgent water pipe and this pressurization pumping, the control by this control valve is opened this external water source of making this pressurization pumping extraction and is sprayed drain pan in this via these a plurality of spout holes of this at least one urgent water pipe with a large amount of water columns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100099562A CN101509147B (en) | 2008-02-15 | 2008-02-15 | Crystal growth furnace body cooling structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100099562A CN101509147B (en) | 2008-02-15 | 2008-02-15 | Crystal growth furnace body cooling structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101509147A CN101509147A (en) | 2009-08-19 |
| CN101509147B true CN101509147B (en) | 2011-02-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100099562A Expired - Fee Related CN101509147B (en) | 2008-02-15 | 2008-02-15 | Crystal growth furnace body cooling structure |
Country Status (1)
| Country | Link |
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| CN (1) | CN101509147B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102071470B (en) * | 2009-11-20 | 2012-08-22 | 昆山中辰矽晶有限公司 | Crystal growth furnace and central air-conditioning water returning and temperature control system |
| CN103741218B (en) * | 2013-12-10 | 2016-03-30 | 福建鑫晶精密刚玉科技有限公司 | A kind of control device regulated for crystal growing furnace cooling water inflow |
| CN106344412A (en) * | 2016-09-29 | 2017-01-25 | 韩奕贝 | Intelligent traditional Chinese medicine stove |
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2008
- 2008-02-15 CN CN2008100099562A patent/CN101509147B/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN101509147A (en) | 2009-08-19 |
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Granted publication date: 20110209 Termination date: 20190215 |