CN101508191B - Anti-reflection film on polycarbonate/polymethylacrylate composite plate and preparation method thereof - Google Patents
Anti-reflection film on polycarbonate/polymethylacrylate composite plate and preparation method thereof Download PDFInfo
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- CN101508191B CN101508191B CN2009100683017A CN200910068301A CN101508191B CN 101508191 B CN101508191 B CN 101508191B CN 2009100683017 A CN2009100683017 A CN 2009100683017A CN 200910068301 A CN200910068301 A CN 200910068301A CN 101508191 B CN101508191 B CN 101508191B
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Abstract
The invention relates to an antireflecting film on polycarbonate/polymethyl methacrylate clad plate and a method for preparing the same. The antireflecting film consists of two layers which sequentially comprise beginning from a substrate material: the first layer is magnesium fluoride; and the second layer is aluminium sesquioxide. A MR58PC/PMMA clad plate is roasted in the state of vacuum dehumidification; the roasted MR58PC/PMMA clad plate is filled to an electron gun vacuum film plating machine; according to required condition, the surface of the substrate material is subjected to film plating; and through the treatment of the MR58PC/PMMA clad plate before film plating, reasonable gas flow rate and the use of a cryogenic low-temperature machine at temperature of less than 120 DEG C below zero, the degassing of the plate material and the influence of oxide of the surface of the material on a film layer are successfully solved. The antireflecting film obtains good antireflecting effect with single-side reflectivity of less than 1.5 percent and can be plated on single side and double sides so that images of a liquid crystal display, a camera and a vidicon are clearer; and the antireflecting film can also used on a lens protection screen of a digital camera and protection screens of liquid crystal displays of various portable information products.
Description
Technical field
The present invention relates to a kind of antireflective (AR) film and preparation method on Merlon/polymethyl methacrylate (hereinafter to be referred as MR58PC/PMMA) composite plate, it belongs to the technical field of vacuum coating.
Background technology
The AR Dereflection screen of flat-panel monitors such as the existing handset viewing window coated with antireflection rete that mostly comes up on glass or PMMA surface.Because glass exists frangible and broken back and human body is produced problems such as injury, so use the MR58PC/PMMA composite board with AR antireflective coating that very big advantage is arranged on handset viewing window and the cell phone cameras protection screen.Although the MR58PC/PMMA composite board exists the serious problem of venting; The preparation method of vacuum AR antireflective coating also exists all difficult points on this composite board; Therefore; How solving the influence that MR58PC/PMMA composite board material outgassing and organic matter pollute, seek a kind of simple and effective method at MR58PC/PMMA composite board above-prepared AR antireflective coating, is exactly industry research and improved direction.
Summary of the invention
The object of the present invention is to provide a kind of technology simple, processing cost is low, the MR58PC/PMMA composite board that coating quality is good
The objective of the invention is to realize like this:
Antireflective coating on the MR58PC/PMMA composite plate 3 of the present invention, wherein, antireflective coating is formed by two layers, from beginning by base material is successively: ground floor magnesium fluoride 1, second layer alundum (Al 2.
Antireflective coating on the MR58PC/PMMA composite plate, a layer thickness are the magnesium fluoride film of 80-120nm; Second layer thickness is the alundum (Al film of 35-45nm.
The preparation method of the antireflective coating on the MR58PC/PMMA composite plate of the present invention, step is following:
1) the MR58PC/PMMA composite board is carried out vacuum and remove wet condition baking down, vacuum is 1 * 10
-2Torr-1 * 10
-3Torr, temperature 60-70 degree, duration 1-3 hour continuously;
2) the MR58PC/PMMA composite board after will toasting is packed in the electron gun vacuum coating equipment; Carry out fine pumping; Operating temperature is bled for-120 ℃ to-165 ℃ deep cooling low temperature machine is auxiliary simultaneously, and moisture that remains in sheet surface and material outgassing are thoroughly removed;
3) be lower than 3 * 10 when vacuum
-5During torr, open in no cathode ion source, and material surface is carried out clean and surface active, and the time is between the 60s-120s;
4) open the heater heating, make the vacuum indoor temperature remain on 60-80 ℃;
5) close ion gun continued pumping high vacuum, when arrival is lower than 3 * 10
-5During torr, the magnesium fluoride crucible of opening earlier in the crucible electron gun is heated to evaporating temperature, and the magnesium fluoride that is evaporated is deposited on substrate surface, when the deposit thickness of magnesium fluoride reaches setting value; Electron gun is closed in alundum (Al crucible heating in the crucible electron gun when deposit thickness of alundum (Al reaches setting value, should open ion gun in the time of each layer deposition and assist;
6) at ion gun material is carried out using oxygen when surface active cleans, range of flow is: 15-30sccm; When plated film, carry out ion when auxiliary oxygen flow be 10-20sccm; Logical oxygen in the electron gun evaporation process, flow is 10-15sccm.
7) if needed, can be after accomplishing above-mentioned plated film, substrate frame can be overturn under vacuum state automatically, repeats above-mentioned 3)-6) coating process, accomplish two-sided plating antireflective film.
The present invention through plated film before to the processing of MR58PC/PMMA sheet material and rational gas flow and the use that is lower than-120 ℃ of deep cooling low temperature machines, successfully solved of the influence of the oxide of sheet material venting and material surface to rete.The preparation method at MR58PC/PMMA composite board AR antireflective coating who carries out an invention not only can use on handset viewing window, can also on the LCD protection screen of digital camera lens protection screen and all kinds of portable information products, use; Its beneficial effect is; Through technology provided by the invention the MR58PC/PMMA composite board is carried out AR antireflective plated film; Can obtain the single face reflectivity in the good anti-reflective effect below 1.5%, both can single face the plating antireflective film, also can two-sided plating antireflective film; Make the image of LCD more clear, especially in the outdoor location better effects if.
Description of drawings
Fig. 1: the single face antireflective coating sketch map of the present invention on the MR58PC/PMMA composite plate.
Fig. 2: the two-sided antireflective coating sketch map of the present invention on the MR58PC/PMMA composite plate.
The specific embodiment
Below in conjunction with instance the present invention is further explained:
The MR58PC/PMMA composite board is carried out vacuum dehumidifying baking, vacuum 10
-2Torr, condition is 70 degree 2 hours.On the substrate frame with sheet material load facility regulation after the baking, tear the diaphragm on surface off, and carry out electrostatic precipitation.Next workpiece is packed in the vacuum chamber, carry out fine pumping earlier, will can the moisture above the sheet material thoroughly be removed like this except that being lower than-120 ℃ of degree deep cooling low temperature machines and opening of steam when bleeding.Open the heater heating simultaneously, make the vacuum indoor temperature remain on 70 ℃ of degree.When vacuum arrives 5 * 10
-5During torr, open in no cathode ion source, and material surface is carried out clean and surface active, and oxygen flow is 10sccm, and time set is 30s.Close ion gun continued pumping high vacuum then, when arriving 2 * 10
-5During torr, open the magnesium fluoride (MgF in the electron gun heating crucible
2), deposit the magnesium fluoride film that a layer thickness is 80nm at substrate surface; The second layer is alundum (Al (Al
2O
3) film, should open ion gun when thickness is each layer of 35nm deposition and assist, ion gun aerating oxygen 8sccm, electron gun aerating oxygen 5sccm.With the vacuum chamber venting, take out product after plated film finishes, after being determined at MR58PC/PMMA composite board coating single side, its transmitance can reach (the single face reflectivity is less than 1.5%) more than 93%.The result shows: the prebake conditions before the plated film, reasonably gas flow and the use that is lower than-120 ℃ of degree deep cooling low temperature machines are very effective to the antireflective coating process of MR58PC/PMMA composite.
The MR58PC/PMMA composite board is carried out vacuum dehumidifying baking, and condition is a vacuum 8 * 10
-3Torr, 60 ℃ of degree of temperature 1 hour.On the substrate frame with sheet material load facility regulation after the baking, tear the diaphragm on surface off, and carry out electrostatic precipitation.Next workpiece is packed in the vacuum chamber, carry out fine pumping earlier, will can the moisture above the sheet material thoroughly be removed like this except that being lower than-135 ℃ of degree deep cooling low temperature machines and opening of steam when bleeding.Open the heater heating simultaneously, make the vacuum indoor temperature remain on 60 degree.When vacuum arrives 5 * 10
-5During torr, open in no cathode ion source, and material surface is carried out clean and surface active, and oxygen flow is 15sccm, and time set is 60s.Close ion gun continued pumping high vacuum then, when arriving 2 * 10
-5During torr, open the magnesium fluoride (MgF in the electron gun heating crucible
2), deposit the magnesium fluoride film that a layer thickness is 110nm at substrate surface; The second layer is alundum (Al (Al
2O
3) film, should open ion gun when thickness is each layer of 38nm deposition and assist, ion gun aerating oxygen 14sccm, electron gun aerating oxygen 8sccm.With the vacuum chamber venting, take out product after plated film finishes, after being determined at MR58PC/PMMA composite board coating single side, its transmitance can reach (the single face reflectivity is less than 1.5%) more than 93%.。The result shows: the prebake conditions before the plated film, reasonably gas flow and the use that is lower than-135 ℃ of degree deep cooling low temperature machines are very effective to the antireflective coating process of MR58PC/PMMA composite.
The MR58PC/PMMA composite board is carried out vacuum dehumidifying baking, and condition is a vacuum 1 * 10
-3Torr, 65 degree 1.5 hours.On the substrate frame with sheet material load facility regulation after the baking, tear the diaphragm on surface off, and carry out electrostatic precipitation.Next workpiece is packed in the vacuum chamber, carry out fine pumping earlier, will can the moisture above the sheet material thoroughly be removed like this except that being lower than-130 ℃ of degree deep cooling low temperature machines and opening of steam when bleeding.Open the heater heating simultaneously, make the vacuum indoor temperature remain on 70 ℃ of degree.When vacuum arrives 1.5 * 10
-5During torr, open in no cathode ion source, and material surface is carried out clean and surface active, and oxygen flow is 30sccm, and time set is 120s.Close ion gun continued pumping high vacuum then, when arriving 2 * 10
-5During torr, open the magnesium fluoride (MgF in the electron gun heating crucible
2), deposit the magnesium fluoride film that a layer thickness is 100nm at substrate surface; The second layer is alundum (Al (Al
2O
3) film, thickness is 42nm, should open ion gun in the time of each layer deposition and assist, ion gun aerating oxygen 15sccm, electron gun aerating oxygen 10sccm.After having plated one side, auto-reverse to other one side under vacuum state, same parameter repeats above-mentioned coating process.With the vacuum chamber venting, take out product after plated film finishes, after being determined at MR58PC/PMMA composite board double-sided coating, its transmitance can reach (the single face reflectivity is less than 1.5%) more than 95%.。The result shows: the prebake conditions before the plated film, reasonably gas flow and the use that is lower than-130 ℃ of degree deep cooling low temperature machines are very effective to the antireflective coating process of MR58PC/PMMA composite.
Instance 4
The MR58PC/PMMA composite board is carried out vacuum dehumidifying baking, and condition is a vacuum 6 * 10
-3Torr spends 2 hours for 65 ℃.On the substrate frame with sheet material load facility regulation after the baking, tear the diaphragm on surface off, and carry out electrostatic precipitation.Next workpiece is packed in the vacuum chamber, carry out fine pumping earlier, will can the moisture above the sheet material thoroughly be removed like this except that being lower than-165 ℃ of degree deep cooling low temperature machines and opening of steam when bleeding.Open the heater heating simultaneously, make the vacuum indoor temperature remain on 75 ℃ of degree.When vacuum arrives 5 * 10
-5During torr, open in no cathode ion source, and material surface is carried out clean and surface active, and oxygen flow is 25sccm, and time set is 120s.Close ion gun continued pumping high vacuum then, when arriving 3 * 10
-5During torr, open the magnesium fluoride (MgF in the electron gun heating crucible
2), deposit the magnesium fluoride film that a layer thickness is 90nm at substrate surface; The second layer is alundum (Al (Al
2O
3) film, thickness is 45nm; Should open ion gun in the time of each layer deposition and assist, ion gun aerating oxygen 18sccm, electron gun aerating oxygen 13sccm.After having plated one side, auto-reverse to other one side under vacuum state, same parameter repeats above-mentioned coating process.With the vacuum chamber venting, take out product after plated film finishes, after being determined at MR58PC/PMMA composite board double-sided coating, its transmitance can reach (the single face reflectivity is less than 1.5%) more than 95%.The result shows: the prebake conditions before the plated film, reasonably gas flow and the use that is lower than-120 ℃ of degree deep cooling low temperature machines are very effective to the antireflective coating process of MR58PC/PMMA composite.
Antireflective coating and preparation method on Merlon/polymethyl methacrylate composite plate that the present invention proposes; Be described through on-the-spot preferred embodiment; Person skilled obviously can be in not breaking away from content of the present invention, spirit and scope to structure as herein described with the preparation method changes or suitably change and combination, realize the present invention's technology.Special needs to be pointed out is, the replacement that all are similar and change apparent to those skilled in the artly, they are regarded as and are included in spirit of the present invention, scope and the content.
Claims (3)
1. the antireflective coating on Merlon polymethyl methacrylate composite plate is characterized in that, antireflective coating is formed by two layers, from beginning by base material is successively: magnesium fluoride/alundum (Al; One layer thickness is the MgF of 80-120nm
2Film; Second layer thickness is the alundum (Al film of 35-45nm.
2. the antireflective coating preparation method on Merlon polymethyl methacrylate composite board of claim 1 is characterized in that step is following:
1) Merlon polymethyl methacrylate composite board is carried out vacuum and remove wet condition baking down, vacuum is 1 * 10
-2Torr-1 * 10
-3Torr, temperature 60-70 ℃, duration 1-3 hour continuously;
2) the Merlon polymethyl methacrylate composite board after will toasting is packed in the electron gun vacuum coating equipment; Carry out fine pumping earlier; Operating temperature is bled for-120 ℃ to-165 ℃ deep cooling low temperature machine is auxiliary simultaneously, and moisture that remains in sheet surface and material outgassing are thoroughly removed;
3) be lower than 3 * 10 when vacuum
-5During torr, open in no cathode ion source, and material surface is carried out clean and surface active, and the time is between the 60s-120s;
4) open the heater heating, make the vacuum indoor temperature remain on 60-80 ℃;
5) close ion gun continued pumping high vacuum, when arrival is lower than 3 * 10
-5During torr; The magnesium fluoride crucible of opening earlier in the crucible electron gun is heated to evaporating temperature; The magnesium fluoride that is evaporated is deposited on substrate surface, when the deposit thickness of magnesium fluoride reaches setting value, and the alundum (Al crucible heating in the crucible electron gun; Close electron gun when the deposit thickness of alundum (Al reaches setting value, should open ion gun in the time of each layer deposition and assist;
6) at ion gun material is carried out using oxygen when surface active cleans, range of flow is: 15-30sccm; When plated film, carry out ion when auxiliary oxygen flow be 10-20sccm; Logical oxygen in the electron gun evaporation process, flow is 10-15sccm.
3. method as claimed in claim 2 is characterized in that at completing steps 6) behind the plated film, substrate frame is upset automatically under vacuum state, repeating step 3)-6) and coating process, accomplish two-sided plating antireflective film.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100683017A CN101508191B (en) | 2009-03-30 | 2009-03-30 | Anti-reflection film on polycarbonate/polymethylacrylate composite plate and preparation method thereof |
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|---|---|---|---|
| CN2009100683017A CN101508191B (en) | 2009-03-30 | 2009-03-30 | Anti-reflection film on polycarbonate/polymethylacrylate composite plate and preparation method thereof |
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| CN101508191A CN101508191A (en) | 2009-08-19 |
| CN101508191B true CN101508191B (en) | 2012-06-27 |
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Families Citing this family (5)
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|---|---|---|---|---|
| CN102560363A (en) * | 2012-03-08 | 2012-07-11 | 天津美泰真空技术有限公司 | Method for manufacturing anti-reflecting film for reflecting achromatic light in visible light area |
| CN104536064B (en) * | 2015-01-08 | 2016-05-18 | 中国科学院国家天文台南京天文光学技术研究所 | The produced with combination method of optics ultra-wideband antireflective film |
| CN108415107B (en) * | 2018-03-07 | 2020-07-14 | 上海道助电子科技有限公司 | Process for manufacturing surface antireflection film of plate containing polymethyl methacrylate |
| CN114335392B (en) * | 2021-12-31 | 2023-06-16 | 西南科技大学 | Preparation process of anti-reflection film for OLED flexible display |
| CN115595537A (en) * | 2022-10-18 | 2023-01-13 | 江苏久禾光电有限公司（Cn） | Lens coating process capable of improving real-shot stray light |
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