CN101493312A - Micro imaging high precision three-dimensional detection device and method - Google Patents
Micro imaging high precision three-dimensional detection device and method Download PDFInfo
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- CN101493312A CN101493312A CNA2009100471672A CN200910047167A CN101493312A CN 101493312 A CN101493312 A CN 101493312A CN A2009100471672 A CNA2009100471672 A CN A2009100471672A CN 200910047167 A CN200910047167 A CN 200910047167A CN 101493312 A CN101493312 A CN 101493312A
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Abstract
The invention relates to a micro-imaging high-accuracy three-dimensional detecting device and a method thereof. Two frames of different micro-images are adopted and image data are integrated according to visual characteristics of people to obtain wide dynamic range micro-images; detail characteristics of observed scenes are added to meet the requirement for micro precision finishing products detection in a specific detection environment, improve definition and precision of a detecting system and provide a more advanced detecting method for fine processing of laser beam, detection of integrated circuits and biomedicine and the like.
Description
Technical field
The present invention relates to a kind of high Precision Detection field, particularly a kind of micro imaging high precision three-dimensional detection device and method.
Background technology
Along with the high speed development of science and technology, the precision of retrofit improves constantly the continuous variation with processing object, and the detection of geometric sense has been proposed more and more higher requirement.In the detection of laser retrofit, adopt common microscope to add CCD at present usually widely and connect computer system as observing and the two-dimensional detection system.Because under present ccd image sensor manufacturing technology condition, the dynamic range of imageing sensor is by its signal saturation level and noise level decision.It has reflected the working range of device under the different light degree.Its numerical value can represent that its unit symbol is generally dB, is generally 60-80dB with the signal peak voltage of output terminal and the ratio of root-mean-square noise voltage, and human eye is when object observing, the minimal illumination that can see target clearly is 1lx, at the noon in summer, when object illumination reaches 3 * 10
5During lx, human eye still can be seen target clearly.Hence one can see that, and by the automatic adjusting of eye pupil, the dynamic range that human eye is differentiated object is roughly 110dB, with the less higher image of image recording sensor dynamic range of dynamic range, always has losing of image information.Same difficulty is also run in demonstration to the image of high dynamic range, generally need carry out showing after the log-transformation.Existing image-processing system and method can be handled a two field picture, realize the processing such as enhancing, correction and conversion of image, but it is limited in one's ability, and the information of just having lost during to record is very difficult or can not be restored in follow-up processing procedure at all.
There is the problem of following several respects in the microscope of existing market as detection system.The one, detection system by micro-image that CCD obtained illumination condition absorbed certain, dynamic range is narrower, especially illumination is crossed bright or dark excessively, all can influence the micro-imaging quality, therefore can't write down with the detection of expression scene in the image information of clear zone and dark space, increase its minutia, be difficult to satisfying fine Precision Machining product detection under the particular detection environment; The 2nd, can't realize that the three-dimensional of object to be detected detects, use inconvenience, the measuring ability of impersonalityization and operation interface.
In order to obtain the clear micro-image of workpiece processing, realization is carried out objective analysis, science judge to processing effect and is accurately measured, and is badly in need of improving the dynamic range of micro-image before observation, detection, to obtain the abundant information of scene.In addition, realize the measurement of the Z axis information of tested object, the range of application that improves detection system is also had great importance.
Summary of the invention
The present invention be directed to the problem that information easily runs off in the present high Precision Detection, a kind of micro imaging high precision three-dimensional detection device and method have been proposed, adopt the different micro-image of two frames, carrying out view data according to human vision property merges, can get the micro-image of wide dynamic range, increase the minutia of observing scene, satisfy fine Precision Machining product detection requirement under the particular detection environment.
Technical scheme of the present invention is: a kind of micro imaging high precision three-dimensional detection device, comprise micro imaging system, article carrying platform, microscope light source, motor, computer system, also comprise the gradient attenuator, grating chi and ccd image sensor, it under the micro imaging system article carrying platform, measured device is placed on the article carrying platform, article carrying platform and below microscope light source between the gradient attenuator is arranged, article carrying platform is by motor-driven, the grating chi is installed in the focus adjusting mechanism of micro imaging system, the grating chi is connected with computer system, Z axial translation information is sent into computer system, computer system is connected with Electric Machine Control, ccd image sensor is connected with micro imaging system, and is connected with computer system by image collection card.
It is an accurate small-sized optical grating measuring system that described grating chi is selected SM12 for use, by the accurate linear ball bearing of a cover, and back-moving spring, glass raster, the LED illumination system is formed.
A kind of micro imaging high precision three-dimensional detection method, micro imaging high precision three-dimensional detection device, detection method comprises the steps:
1) micro imaging system at first is positioned first Z axial plane, and obtains micro-image the most clearly by automatic focusing;
2) if need carry out the Z axle measures, then navigate to second Z axial plane, and obtain micro-image the most clearly, and the grating chi reads its Z axis information in the micro imaging system focus adjusting mechanism by being installed in, and show by automatic focusing by focusing; Forward (3) to if need carry out the plane detection, otherwise, log off.
3) position by the gradient attenuator between computer regulated microscope light source and the article carrying platform, the illumination of control scene, and obtain the different exposure Same Scene of two frames image with digital ccd image sensor on the micro imaging system by the computer control dress;
4) to the different exposures of two frames carry out storage backup after, it is carried out behind the gaussian filtering Laplce edge enhancement process again, realize filtering noise, strengthen the edge of image feature;
5) adopt the Feature Points Matching method to realize the registration of Same Scene two frame micro-images;
6) according to the visual identity family curve of human eye with the different image gray f of registration two frames
1(x, y) and f
2(x, gray scale y) is divided into three intervals, and determines the weights k of each interval pixel when view data merges
1And k
2
7) according to the different view data f that expose of two frames
1(x, y) and f
2(x, y), substitution formula f (x, y)=k
1f
1(x, y)+k
2f
2(x y) carries out view data and merges, obtain new dynamic range expansion image f (x, y);
8) and at image f (x y) realizes the plane detection.
Described Feature Points Matching method can realize with Gauss's multiresolution taper hierarchy chart or Laplce's multiresolution taper hierarchy chart.Described gray scale is divided into the processing in three intervals, in low gray level and high grade grey level zone, grey level interval is stretched, being convenient to human eye differentiates, in medium low gray level region, grey level interval is suitably compressed grey level interval, and will remain number of greyscale levels and distribute to low gray level and high grade grey level zone.
Beneficial effect of the present invention is: micro imaging high precision three-dimensional detection device of the present invention and method, adopt the sequence of intensity image method to strengthen the dynamic range of micro-image, and realize in conventional apparatus and method on the based measurement of X, Y-axis, adopt grating chi and image focusing technology to realize the measurement of Z axle.Improve the sharpness and the precision of detection system, for laser beam retrofit, integrated circuit and biomedical detection etc. provide higher levels of detection means.
Description of drawings
Fig. 1 is wide dynamic micro-imaging pick-up unit synoptic diagram in micro imaging high precision three-dimensional detection device of the present invention and the method;
Fig. 2 for human eye in micro imaging high precision three-dimensional detection device of the present invention and the method to the other sensitivity characteristic figure of different grey-scale;
Fig. 3 is multiresolution taper hierarchy chart in micro imaging high precision three-dimensional detection device of the present invention and the method;
Fig. 4 is wide dynamic micro-image product process figure in micro imaging high precision three-dimensional detection device of the present invention and the method.
Embodiment
At first, by computer system control optical gradient attenuator to primary importance, again by digital CCD images acquired in calculator memory, control the optical gradient attenuator then to the second place, gather different gray scales one two field picture of Same Scene again in calculator memory by digital CCD, the Same Scene image of the different gray-scale intensities of this two frame has comprised wide dynamic range, will be by the synthetic vertical frame dimension dynamic range output of follow-up processing.
Some are disorderly and unsystematic, the noise of stochastic distribution is a Gaussian noise because the sequence of video images of microscopic system picked-up often exists, and in order to choose the unique point of the different gray level images of each frame exactly, then must carry out pre-service to image.The Laplacian edge detection operator is the second-order differential operator that two-dimensional function is carried out computing, is the linear combination of partial derivative computing.It can produce a precipitous zero crossing in edge.Laplacian detect operator can strengthen enclose the zone at unique point place, the while can be weakened the little zone of grey scale change, these zones surround the edge usually.The Laplacian conversion also has rotational invariance in addition, and for the edge, what different directions can both be equal is enhanced, and does not influence so can not be transfused to the possible rotation of image through the image after the Laplacian conversion.Therefore can select the Laplacian edge detection operator to carry out image carries out pre-service, helps Feature Extraction.It should be noted that the Laplacian operator is not only very sensitive also very responsive to noise simultaneously to the pixel grey scale graded, some are disorderly and unsystematic, the noise of stochastic distribution is a Gaussian noise because the video image that microscopic system is absorbed often exists, in order to choose the unique point of a two field picture exactly, the present invention adopts the device and method that Gauss's smoothing filter and Laplce's sharpening wave filter are combined, smoothly fall earlier noise, after carry out rim detection, it is better to have obtained effect.
Secondly, because micro-imaging equipment is in imaging process, situations such as shake or deflection can appear inevitably, cause producing between the Same Scene image little translation or rotation, cause synthetic wide dynamic range image blurring unclear, therefore should carry out image registration earlier before image co-registration, the registration of Same Scene image sequence is the key that guarantees the high-dynamics image quality.The basic thought of registration be an optional width of cloth from two two field pictures of the different exposures of Same Scene (for the result more accurate, we select first two field picture) as with reference to image or benchmark image, and a two field picture compares thereafter, obtain the translation and the rotating vector of it and former frame image, thereby determine the corresponding relation of Same Scene two two field picture pixels.
The present invention proposes a kind of algorithm that utilizes unique point to carry out images match.In order to improve the matching operation speed of unique point, the present invention proposes to utilize the multiresolution matching technique.Single frames multi-resolution framework, bottom are highest resolution (being original image).Layer is high more, and image resolution ratio is low more.Just can obtain the image of corresponding low resolution with different low-pass filters or double sampling.The thought of multiresolution coupling is from the lowest resolution level, one by one, carries out estimation at each layer, determines the displacement rough estimate by lower-resolution stages.Like this, under the high-resolution level, mate as estimated initial with last lower-resolution stages displacement vector, can make displacement vector estimate to obtain meticulous adjustment, one comparatively ideal initial value is not only arranged, can also realize reaching bigger hunting zone with less search window.Available Gauss's multiresolution taper hierarchy chart or Laplce's multiresolution taper hierarchy chart are realized the coupling of unique point, and its schematic diagram is shown in Fig. 3 multiresolution taper hierarchy chart.
The present invention adopts the motion model of following two dimension, determines the translational movement of token image interframe and around the rotation amount of optical axis.This transformation model can be defined as follows:
Here, (X
i, Y
i) and (X
j, Y
j) be at different time shutter t
iAnd t
jThe time, the coordinate of the same visual field two two field picture pixels of absorbing, wherein (X
i, Y
i) be reference picture, (Δ X, Δ Y)
tBe the translation vector of being surveyed under the reference frame image coordinate system, Θ is the anglec of rotation of two two field pictures.By substitution N the coupling unique point get final product a system of linear equations.Each can obtain two equations to unique point, and therefore, nonlinear system has 2N equation, 3 unknown quantitys, that is: Θ, Δ X and Δ Y.By separating the linear equations group, can obtain rotation and the kinematic parameter of translation: θ and Δ x, Δ y between two two field pictures.Utilize the registration of the kinematic parameter realization image of gained at last.
Same Scene photograph image with the different exposures of two frames behind the registration is fused into a panel height dynamic image at last.We know that for 8 gray level image, its gray-scale value scope is 0～255 grade.According to the resolution characteristic of human eye to gray scale, as Fig. 2 human eye to the other sensitivity characteristic figure of different grey-scale as can be known, under the very high or very low situation of gradation of image, human eye is poor to the gray scale resolving power, and at the zone line of gradation of image, the resolving power of people's eyes is more intense.As can be seen from Figure 2, near 0 grade of gray scale, human eye is insensitive to grey scale change, when only gray scale differential reaches 8 grey levels, just can tell (can feel the difference in brightness of 0 grade of gray scale and 8 grades of gray scales, then be considered as with a kind of brightness with 7 grades of gray scales) for 0 grade; Near 128 grades of gray scales, when the grey scale change of image had two grey levels, eye was with regard to distinguishable its difference; And near 255 grades of gray scales, the distinguishable variation difference that goes out 3 gray levels of eye.According to this visual characteristic of human eye, utilize the device and method of Flame Image Process that it is handled.In low gray level and high grade grey level zone, grey level interval (be defined as a gray level and be adjacent two gray levels apart from half of sum) is stretched, human eye is better differentiated.In medium low gray level region, the image excessive to grey level interval can suitably compress grey level interval, and remaining number of greyscale levels is distributed to low gray level and high grade grey level zone.
The Image Fusion that the present invention adopts is to get gray-scale value f from the same position point of the image of the different exposures of two width of cloth
1(x, y) and f
2(x, and the image f after y) blending algorithm of employing linear weighted function obtains merging (x, y), that is:
f(x，y)＝k
1f
1(x，y)+k
2f
2(x，y)
K in following formula
1And k
2Be respectively the weights of the point of two two field picture correspondences.Learn that from human eye resolution characteristic Fig. 3 the relatively more responsive zone of human eye is the zone between 32～192 gray scales to gray scale.In this zone, human eye can be told the grey scale change of 2 gray levels at least, is near 60 in gray scale, even can both discover the variation of a gray level and to obtain.So the present invention chooses two boundary value: T
1=32 and T
2=192, the gray average of the images of the different exposures of two frames is divided into three zones, adopt the different device and method of weights to synthesize.Its weights k
1And k
2Definite algorithm as follows:
if{[f
1(x，y)+f
2(x，y)]/2＜T
1}
{k
1＝0.5{[f
1(x，y)+f
2(x，y)]/2}/T，k
1＝1-k
2}；
else if{[f
1(x，y)+f
2(x，y)]/2＞T
2}
{k
2＝0.5{256-[f
1(x，y)+f
2(x，y)]/2}/(256-T
2)，k
1＝1-k
2}；
else {k
1＝k
2＝0.5}；
Adopt above algorithm, utilize the image f of the different exposures of two frames
1(x, y) and f
2(x, y), (x, y), wherein (x y) has wideer dynamic range to image f to the image f after we just can obtain merging.
As shown in figs. 1 and 4, pick-up unit is mainly by micro imaging system 9, article carrying platform 7, gradient attenuator 6, microscope light source 5, motor 4, grating chi 3, computer system 2 and ccd image sensor 1 are formed, micro imaging system 9 belows are article carrying platform 7, measured device 8 is placed on the article carrying platform 7, article carrying platform 7 and below microscope light source 5 between gradient attenuator 6 is arranged, grating chi 3 is installed in the focus adjusting mechanism of micro imaging system 9, focusing campaign by system, detect the displacement of its Z axle by the grating chi, thereby realize the geometric sense displacement information of two Z axial planes of object to be detected, grating chi 3 is sent Z axial translation information into computer system, computer system is by the position of control motor regulating gradient attenuator 6, ccd image sensor 1 is connected with micro imaging system 9, and by image collection card signal is sent into computer system 2.
Image collection card: praise in the perseverance from the OK_C30B of image technique company limited card in Beijing, it is based on pci bus, the colored capture card that can gather black white image again be can gather, Flame Image Process, industrial monitoring and research and development and engineering applications such as multimedia compression, processing are applicable to.Be OK series two generation product, adopted 10 high-precision video a/ds, comb filtering, technology such as anti-aliasing filter.The performance of OK_C30A card is better than and compatible its substitutes card
Computer system 2: Lenovo Qitian M4880 (P4631 512s80VN (XP)) processor type: Pentium 4 631 nominal dominant frequency (MHz): 3000 allocate memory capacity (MB): 512M hard-disk capacity: 80GB type of display: display sizes: 17 inches
Grating chi 3:SM12 is accurate small-sized optical grating measuring system, and the precision measurement .SM12 grating chi that is applicable to little range is converted to pulse signal with the change in displacement of straight line.The corresponding distance that moves of the quantity of pulse signal, pulsed frequency has then been reacted movement velocity.The SM12 body part is by the accurate linear ball bearing of a cover, back-moving spring, glass raster, LED illumination system composition.The SM12 output signal is the rectangle square wave.A, B phase two-phase differs 90 ° two-way waveform, can indicate displacement and direction.The Z phase waveform is the zero pulse signal, generally is positioned at the centre position of measuring length.Output signal can be linear differential or TTL square wave as required.Measure length 12.5mm resolution 0.1 μ m accuracy ± 1 μ m/12mm, maximum measuring speed 0.5ms
-1The withstand voltage 0.4-0.8N of spring, operating voltage 5Vss ± 5%, electric current (output of LD linear differential) is 130mA to the maximum, the maximum 50mA of electric current (TTL output), degree of protection IP40, working temperature 0-50 ℃, the insulation impedance minimum is 20MW, output signal (output of LD linear differential) RS422 is 20mA, the maximum 0.5V at＜10mA of output signal (TTL output) L.The minimum 3.5V at＞2.5mA of H.
Detection method: micro imaging system 9 at first is positioned first Z axial plane, and obtains micro-image the most clearly by automatic focusing; Measure if need carry out the Z axle, then navigate to second Z axial plane, and obtain micro-image the most clearly, and read its Z axis information, and show by grating chi 3 by automatic focusing by focusing; Detect if need carry out the plane,, control the illumination of scene, and obtain the different exposure Same Scene of two frames image by computing machine 2 control figure ccd image sensors 1 then by the position of computing machine 2 regulating gradient attenuators 6; To the different exposures of two frames carry out storage backup after, it is carried out behind the gaussian filtering Laplce edge enhancement process again, realize filtering noise, strengthen the edge of image feature; Adopt the Feature Points Matching method to realize the registration of Same Scene two frame micro-images; According to the visual identity family curve of human eye with the different image gray f of registration two frames
1(x, y) and f
2(x, y) gray scale is divided into three intervals, in low gray level and high grade grey level zone, grey level interval is stretched, be convenient to human eye and differentiate,, grey level interval is suitably compressed grey level interval in medium low gray level region, and will remain number of greyscale levels and distribute to low gray level and high grade grey level zone, and determine the weights k of each interval pixel when view data merges
1And k
2View data f according to the different exposures of two frames
1(x, y) and f
2(x, y), substitution formula f (x, y)=k
1f
1(x, y)+k
2f
2(x y) carries out view data and merges, obtain new dynamic range expansion image f (x, y); And in image f (x, y) detection of realization plane.
Claims (5)
1, a kind of micro imaging high precision three-dimensional detection device, comprise micro imaging system, article carrying platform, microscope light source, motor, computer system, it is characterized in that, also comprise the gradient attenuator, grating chi and ccd image sensor, it under the micro imaging system article carrying platform, measured device is placed on the article carrying platform, article carrying platform and below microscope light source between the gradient attenuator is arranged, article carrying platform is by motor-driven, the grating chi is installed in the focus adjusting mechanism of micro imaging system, the grating chi is connected with computer system, Z axial translation information is sent into computer system, computer system is connected with Electric Machine Control, and ccd image sensor is connected with micro imaging system, and is connected with computer system by image collection card.
According to the described micro imaging high precision three-dimensional detection device of claim 1, it is characterized in that 2, it is an accurate small-sized optical grating measuring system that described grating chi is selected SM12 for use, by the accurate linear ball bearing of a cover, back-moving spring, glass raster, the LED illumination system is formed.
3, a kind of micro imaging high precision three-dimensional detection method, micro imaging high precision three-dimensional detection device, detection method comprises the steps:
1) micro imaging system at first is positioned first Z axial plane, and obtains micro-image the most clearly by automatic focusing;
2) if need carry out the Z axle measures, then navigate to second Z axial plane, and obtain micro-image the most clearly, and the grating chi reads its Z axis information in the micro imaging system focus adjusting mechanism by being installed in, and show by automatic focusing by focusing; Forward (3) to if need carry out the plane detection, otherwise, log off.
3) position by the gradient attenuator between computer regulated microscope light source and the article carrying platform, the illumination of control scene, and obtain the different exposure Same Scene of two frames image with digital ccd image sensor on the micro imaging system by the computer control dress;
4) to the different exposures of two frames carry out storage backup after, it is carried out behind the gaussian filtering Laplce edge enhancement process again, realize filtering noise, strengthen the edge of image feature;
5) adopt the Feature Points Matching method to realize the registration of Same Scene two frame micro-images;
6) according to the visual identity family curve of human eye with the different image gray f of registration two frames
1(x, y) and f
2(x, gray scale y) is divided into three intervals, and determines the weights k of each interval pixel when view data merges
1And k
2
7) according to the different view data f that expose of two frames
1(x, y) and f
2(x, y), substitution formula f (x, y)=k
1f
1(x, y)+k
2f
2(x y) carries out view data and merges, obtain new dynamic range expansion image f (x, y);
8) and at image f (x y) realizes the plane detection.
According to the described micro imaging high precision three-dimensional detection method of claim 3, it is characterized in that 4, described Feature Points Matching method can realize with Gauss's multiresolution taper hierarchy chart or Laplce's multiresolution taper hierarchy chart.
5, according to claim 3, it is characterized in that, described gray scale is divided into the processing in three intervals, in low gray level and high grade grey level zone, grey level interval is stretched, be convenient to human eye and differentiate, in medium low gray level region, grey level interval is suitably compressed grey level interval, and will remain number of greyscale levels and distribute to low gray level and high grade grey level zone.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102422124A (en) * | 2010-05-31 | 2012-04-18 | 松下电器产业株式会社 | Imaging device, imaging means and program |
| CN103105382A (en) * | 2011-11-11 | 2013-05-15 | 徕卡显微系统复合显微镜有限公司 | Microscopic device and method for three-dimensional localization of punctiform objects in a sample |
| CN103246074A (en) * | 2013-05-22 | 2013-08-14 | 天津中天证照印刷有限公司 | Synthesis method for dynamic three-dimensional pictures |
| CN105791636A (en) * | 2016-04-07 | 2016-07-20 | 潍坊科技学院 | Video processing system |
| CN106679581A (en) * | 2016-12-26 | 2017-05-17 | 清华大学 | Object deformation measurement method in high-temperature environment |
| CN107894215A (en) * | 2017-12-26 | 2018-04-10 | 东南大学 | HDR optical grating projection method for three-dimensional measurement based on fully automatic exposure |
| CN108868213A (en) * | 2018-08-20 | 2018-11-23 | 浙江大丰文体设施维保有限公司 | Stage disk maintains analysis institution immediately |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102422124A (en) * | 2010-05-31 | 2012-04-18 | 松下电器产业株式会社 | Imaging device, imaging means and program |
| CN103105382A (en) * | 2011-11-11 | 2013-05-15 | 徕卡显微系统复合显微镜有限公司 | Microscopic device and method for three-dimensional localization of punctiform objects in a sample |
| CN103105382B (en) * | 2011-11-11 | 2017-06-06 | 徕卡显微系统复合显微镜有限公司 | Microscope equipment and method for carrying out three-dimensional localization to the point target in sample |
| CN103246074A (en) * | 2013-05-22 | 2013-08-14 | 天津中天证照印刷有限公司 | Synthesis method for dynamic three-dimensional pictures |
| CN103246074B (en) * | 2013-05-22 | 2015-04-01 | 天津中天证照印刷有限公司 | Synthesis method for dynamic three-dimensional pictures |
| CN105791636A (en) * | 2016-04-07 | 2016-07-20 | 潍坊科技学院 | Video processing system |
| CN106679581A (en) * | 2016-12-26 | 2017-05-17 | 清华大学 | Object deformation measurement method in high-temperature environment |
| CN106679581B (en) * | 2016-12-26 | 2019-01-08 | 清华大学 | Object deformation measurement method under a kind of hot environment |
| CN107894215A (en) * | 2017-12-26 | 2018-04-10 | 东南大学 | HDR optical grating projection method for three-dimensional measurement based on fully automatic exposure |
| CN108868213A (en) * | 2018-08-20 | 2018-11-23 | 浙江大丰文体设施维保有限公司 | Stage disk maintains analysis institution immediately |
| CN109217367A (en) * | 2018-09-30 | 2019-01-15 | 国家电网有限公司 | Wind-power electricity generation prediction technique, device and equipment |
| CN111174723A (en) * | 2018-11-13 | 2020-05-19 | 深圳市圭华智能科技有限公司 | Precision machining detection device and detection method |
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