CN101486169A - Grinding pad - Google Patents
Grinding pad Download PDFInfo
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- CN101486169A CN101486169A CNA2008100039326A CN200810003932A CN101486169A CN 101486169 A CN101486169 A CN 101486169A CN A2008100039326 A CNA2008100039326 A CN A2008100039326A CN 200810003932 A CN200810003932 A CN 200810003932A CN 101486169 A CN101486169 A CN 101486169A
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- grinding pad
- agent
- additive
- rheological behavior
- characteristic changing
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Abstract
The invention discloses a grinding pad, which has components comprising a polymer substrate material, an additive and a rheological property modifying agent, wherein the rheological property modifying agent can make the additive spread in the polymer substrate material uniformly.
Description
Technical field
The invention relates to a kind of grinding pad, and particularly relevant for a kind of grinding pad with preferable uniformity.
Background technology
Along with the element precision raising of scientific and technological industry, in order to ensure the reliability of element, when making integrated circuit component or other elements, providing extremely, smooth crystal column surface or substrate surface is crucial.
Grind processing procedure and often used by industry in planarization, for example (chemicalmechanical polishing CMP) is the normal technology of the comprehensive planarization of use now to chemical mechanical milling method.Employed grinding pad in grinding processing procedure, its main base material is generally macromolecular material.The manufacture process of grinding pad be to be mixed by some constituents processes, and the generation polymerisation forms.In the process of mixing, these constituents can be uniformly dispersed each other usually.But after mixing stops, when constituent is stored or in the forming process of making grinding pad, some constituent has the phenomenon of gathering, and can't keep the homogeneously dispersed state of mixed process.The grinding pad that after polymerisation, forms, its uniformity thereby influenced.
Therefore, need a kind of grinding pad uniformly for the demand of industry.
Summary of the invention
The invention provides a kind of grinding pad, its constituent makes grinding pad have the preferable uniformity.
The present invention proposes a kind of grinding pad, the constituent of this grinding pad comprises that polymer base material, additive and rheological behavior change agent (rheology altering agent), wherein additive is to be selected from the group that low-density additive, high density additive and combination thereof are formed, and is selected from the group that hydrogen bond bond, association, spatial orientation and combination thereof are formed and have a structure between the rheological behavior change agent.
The present invention proposes a kind of grinding pad in addition, the constituent of this grinding pad comprises that polymer base material, additive and rheological behavior change agent, wherein additive is to be selected from the group that low-density additive, high density additive and combination thereof are formed, and rheological behavior changes agent and makes this constituent have high viscosity applying to be higher than to have low viscosity under the transition shear rate state and be lower than under this transition shear rate state.
The present invention proposes a kind of grinding pad in addition, this grinding pad comprises that polymer base material, additive and rheological behavior change agent, wherein rheological behavior change agent constitutes a network structure in polymer base material, and the additive that is distributed in the polymer base material is to be selected from the group that low-density additive, high density additive and combination thereof are formed.
Grinding pad of the present invention, its constituent can maintain homodisperse state, and then the uniformity of grinding pad is improved, and obtains the better grinding effect.
For above-mentioned feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Figure 1A to Fig. 1 C is respectively the generalized section according to the grinding pad of one embodiment of the invention.
Fig. 2 illustrate changes the viscosity change curve under different shear rate after the agent into adding rheological behavior in the grinding pad constituent of the present invention.
The specific embodiment
A kind of grinding pad proposed by the invention, it has can make the constituent with different densities additive reduce because density variation and the chance of layering, and additive can be dispersed in the polymer base material.This grinding pad comprises that polymer base material, additive and rheological behavior change agent.Wherein, the percentage by weight of additive in the grinding pad constituent is between 0.1% to 30%, and the percentage by weight of rheological behavior change agent in the grinding pad constituent is between 0.5% to 30%.In one embodiment, the percentage by weight of additive in grinding pad is between 1% to 20%, and the percentage by weight of rheological behavior change agent in grinding pad is between 2% to 20%.
Polymer base material for example is polyester (polyester), polyethers (polyether), Polyurethane (polyurethane), Merlon (polycarbonate), polyacrylate (polyacrylate), polybutadiene (polybutadiene) or polymeric substrate that all the other are synthesized via suitable thermosetting resin (thermosetting resin) or thermoplastic resin (thermoplastic resin) etc.
Additive is to be selected from the group that low-density additive, high density additive and combination thereof are formed.The density (about 0.8～2.3g/cm of density with respect to general polymer base material
3), the density contrast of additive and polymer base material can be greater than 20% of polymer base material density, and for example density contrast reaches more than 50%.
The density of low-density additive approximately between 0.001 to 1.0g/cm
3Between.The low-density additive for example is microsphere (microsphere), do not have reactant gas or a blowing agent.Wherein, microsphere for example is Advancell
(Sekisui Chemical Company) or Expancel
Fine hollow ball (hallowmicro-balloon) such as (Akzo Nobel); Or core has the microcapsule (liquid core micro-capsulate) of liquid, as Hydrocapsule
(Analytical Research Systems, INC).The reactant gas of not having for example is carbon dioxide, dry air, nitrogen or argon gas.Blowing agent comprises inorganic foaming agent and organic foaming agent.Inorganic foaming agent for example is a water, and organic foaming agent for example is propane, butane, pentane, carrene, hydrogenation CFCs (as HCFC-22, HCFC-141b etc.) or hydrogenation fluorine carbide (as HFC-134a, HFC-365mfc, HFC-227ea, HFC-245fa etc.).
The density of high density additive approximately between 1.2 to 8.0g/cm
3Between.The high density additive for example is an abrasive grains; it can be alumina particle, gas phase processing procedure (fumed) or colloid (colloidal) silicon oxide particle, cerium oxide particle, ceramic particle, diamond grains or other suitable abrasive grains, has abrasive grains with formation and makes an addition to fixedly abrasive grains grinding pad (fixed abrasive polishing pad) in the polymer base material.
Have a structure between the rheological behavior change agent and be selected from the group that hydrogen bond bond, association, spatial orientation and combination thereof are formed, rheological behavior change agent can form network structure in polymer base material evenly distribute additive.In addition, rheological behavior changes agent and has the constituent that makes grinding pad and have full-bodied characteristic applying to be higher than to have low viscosity under the transition shear rate state and be lower than under this transition shear rate state.
In detail, above-mentioned rheological behavior changes predecessor (precursor) fluid of agent and polymer base material by the reciprocation between structure, can make fluid have pseudoplastic behavior (pseudoplasticity), thixotropy (thixotropy), or can help to improve fluid viscosity under static state, rheological behavior changes agent thereby can adjust the rheological behavior and the viscosity of fluid.Rheological behavior changes agent also can be called thickener (thickner), antisettling agent (anti-settling agent), rheology control agent (rheology modifier), rheologic additive (rheologicaladditive) or thixotropic agent (thixotropic agent) sometimes.Rheological behavior in grinding pad of the present invention and the constituent thereof changes agent can be divided into inorganic rheological behavior change agent and organic rheology characteristic changing agent two classes.
To illustrate respectively that below above-mentioned inorganic rheological behavior changes agent and the agent of organic rheology characteristic changing.The following description is to be used for the present invention is described in detail in detail so that this has the knack of this operator can implement according to this, but is not in order to limit scope of the present invention.
Inorganic rheological behavior changes agent
The constituent that inorganic rheological behavior changes agent comprises that the surface has the oxide of hydroxy M-OH.And the quantity of the hydroxy M-OH that inorganic rheological behavior change agent per surface area has is between 0.5M-OH/nm
2To 2M-OH/nm
2Between.The oxide that above-mentioned surface has hydroxy M-OH for example is with molecular formula M
xO
yRepresented compound, wherein M is selected from the group that silicon, aluminium, titanium, zirconium, cerium, magnesium, calcium and combination thereof are formed.With silica is example, the part silicon atom can have hydroxy and (OH) form silanol base (Si-OH), can form the hydrogen bond bond between the silanol base, produce network structure, the minimizing additive takes place to suspend or Shen falls and reach, and additive can evenly be distributed in grinding pad and constituent thereof.
In addition, in another embodiment, inorganic rheological behavior changes agent and also comprises phyllosilicate, and example can be magnesium silicate (MgSiO
3).Magnesium silicate is added fluid and make it fill a part dispersion, (OH) form hydrogen bond connects the hydroxy that can have via its surface, produce network structure, the minimizing additive takes place to suspend or Shen falls and reach, and additive can evenly be distributed in grinding pad and constituent thereof.
The agent of organic rheology characteristic changing
The agent of organic rheology characteristic changing mainly can be divided into emulsifying agent, swelling type emulsion, polyurethanes thickener and hydrophobically modified polyethers four classes.
Emulsifying agent comprises cationic emulsifier, anionic emulsifier and nonionic emulsifier, wherein is preferably the use nonionic emulsifier.Nonionic emulsifier is the group that fatty acid ester, ethylene glycol, polyethylene glycol, propane diols, glycerine, polyglycereol, sorbierite, pentaerythrite, glyceride, sucrose, fatty amine and the fatty acid amide, polyglyceryl ether and the glycol polypropylene ether that are selected from ethanol is formed.Above-mentioned polyglyceryl ether can be the polyglyceryl ether (polyglycerol ethers of fatty acid esters) of fatty acid ester, and it for example is glyceride (glycerides) or sorbitol ester (sorbitol esters).
The swelling type emulsion for example is a hydrophobically-modified alkali swelling type emulsion (HASE).Hydrophobically-modified alkali swelling type emulsion (HASE) is the thickener that belongs to a kind of synthetic class of associating, and it has alkaline Peng Run effect.That is hydrophobically-modified alkali swelling type emulsion (HASE) is under the condition of alkalescence, and its strand can trail, and forms network structure, so it has the effect of thickening.
The polyurethanes thickener for example is a hydrophobically modified ethyoxyl polyurethane rheology modifier (HEUR).Hydrophobically modified ethyoxyl polyurethane rheology modifier (HEUR) is a kind of thickener of the synthetic class of associating, and its outward appearance is to be smoke-like and to disperse easily, can be used in solvent-free system usually.Hydrophobically modified ethyoxyl polyurethane rheology modifier (HEUR) is a kind of low-molecular weight polymer based on polyethylene glycol, and it contains the polyethylene glycol glycerol ester units via the different length of carbamic acid connection usually, and its end is a hydrophobic group.Therefore, the hydrophobically modified ethyoxyl polyurethane rheology modifier (HEUR) of nonionic must can not form network structure in fluid under alkaline environment, and can recover hydrophobic connection.
The hydrophobically modified polyethers has similar characteristic to above-mentioned hydrophobically-modified alkali swelling type emulsion (HASE) and hydrophobically modified ethyoxyl polyurethane rheology modifier (HEUR).The hydrophobic group of hydrophobically modified polyethers can stop desorb, and has association, thereby can also form network structure and reach thickening effect.
In addition, the agent of organic rheology characteristic changing also can be long-chain shape and the compound with polar functional base, and wherein this compounds is to be selected from the group that amides compound, aminated compounds, carbonyl diamide compounds, amido formate compounds and combination thereof are formed.Wherein, the mean molecule quantity of this compounds between 5000 to 500000, for example is between 50000 to 200000 approximately.For instance, the compound that contains the polar functional base can use BYK
Series of products (BYK-Chemie) change agent, for example BYK as rheological behavior
-410 for having urea/amido formate composition, with BYK
-410 add in the fluid and can form network structure by the spatial orientation effect, and the minimizing additive takes place to suspend or Shen falls and reach, and additive can evenly be distributed in grinding pad and constituent thereof.
Then, explanation is applied to form the method for grinding pad with the constituent of above-mentioned grinding pad.The method of the following stated only is the characteristic that can produce when forming grinding pad for the constituent that describes grinding pad of the present invention in detail, so that those who familiarize themselves with the technology can implement according to this, but is not in order to limit scope of the present invention.Figure 1A to Fig. 1 C is respectively the generalized section according to the grinding pad of one embodiment of the invention.Fig. 2 illustrate changes the viscosity change curve under different shear rate after the agent into adding rheological behavior in the grinding pad constituent of the present invention.
At first, precursor fluid, additive and the rheological behavior of mixing polymer base material change agent, and its stirring are formed the fluid mixture of grinding pad constituent.Wherein, the precursor fluid of polymer base material is selected from ester class (ester), ethers (ether), amine ester class (urethane), carbonates (carbonate), esters of acrylic acid (acrylate), butadiene type (butadiene) or thermosetting resin or thermoplastic resin that all the other are suitable.Additive is to be selected from the group that low-density additive, high density additive and combination thereof are formed.Rheological behavior changes agent and then is selected from foregoing inorganic rheological behavior change agent or the agent of organic rheology characteristic changing.In one embodiment, have a structure between the rheological behavior change agent and be selected from the group that hydrogen bond bond, association, spatial orientation and combination thereof are formed.
In addition, as shown in Figure 2, rheological behavior changes agent to be had the fluid mixture of making and has a low-viscosity applying to be higher than under a transition shear rate 210 states, and be lower than under these transition shear rate 210 states and have a full-bodied characteristic, for example the viscosity of fluid mixture when being lower than this transition shear rate 210 is more than 2 times of viscosity that are higher than this transition shear rate 210, or even more than 5 times.After being higher than 210 stirrings of transition shear rate, additive and rheological behavior change agent and can evenly distribute at fluid mixture.After stopping to stir, rheological behavior changes network structure that agent forms, or makes the characteristic of the viscosity raising of fluid mixture, can reduce the low-density additive and be suspended in the upper strata, and minimizing high density additive falls to lower floor.Therefore, when constituent is stored or making the forming process of grinding pad, additive still can keep even distribution in fluid mixture.In one embodiment, this transition shear rate is between 5 to 20rpm, and fluid mixture is being lower than this transition shear rate (for example for 2rpm) or the viscosity when static for being higher than more than 10 times of viscosity of this transition shear rate (for example being 100rpm).What specify is, the interval range of transition shear rate can have different interval ranges with the consumption or the bucket groove size difference of constituent, but the industrial circle shear rate that mixing plant provided commonly used can reach more than the 1000rpm usually, therefore can surpass this transition shear rate easily.Above-mentioned rheological behavior changes the characteristic that rheological behavior that agent causes changes, be as an illustration with the relation of viscosity and shear rate, but be not in order to limit scope of the present invention, those who familiarize themselves with the technology ought know that this characteristic also is convertible into the relation of shearing force and shear rate, or the relation of the application time of viscosity and fixed shear speed is expressed.
Hold above-mentioned, if the fluid mixture of grinding pad constituent is to be in stored condition, as long as apply the stirring that is higher than the transition shear rate in the process of making grinding pad, can reduce the viscosity of fluid mixture, is grinding pad so that make fluid mixture via the polymerisation curing molding, for example is in die for molding.Because additive is isolated by the network structure that rheological behavior change agent constitutes to each other, so additive can be uniformly distributed in the polymer base material of grinding pad.Rheological behavior changes network structure that agent constitutes except reducing additive and suspend because of density variation produces or Shen falls, more can reducing and assemble the chance that forms agglomerate (agglomeration) between additive each other.In other words, compared to the additive of identical addition, do not change the formed grinding pad of agent but there is rheological behavior, the density of zones of different has less density variation in the grinding pad of the present invention, and has less additive agglomerate in grinding pad of the present invention.
The constituent of above-mentioned grinding pad can belong to one-pack-type (single-liquid type) reaction system, or belongs to one of them mixture in dual liquid type (dual-liquid type) or mulit liquid type (multi-liquid type) reaction system.In addition, above-mentioned constituent also can comprise that catalyst or refining prolong agent compositions such as (chain extender), when known by knowing those skilled in the art, so repeat no more in this.Still can comprise that as for the follow-up details of finishing grinding pad it is a grinding layer that its surfacing is changed into, can be chosen in addition on the abradant surface of grinding layer and form groove or picture on surface, reach in the abradant surface back side and form the fixed bed that can be fixed on the grinding table, also can select in grinding layer and fixed bed, to form in addition a softer supporting layer supervisor in addition.
Last grinding pad such as Figure 1A to Fig. 1 C that is finished.For instance, shown in Figure 1A, in the constituent of grinding pad 110, can in polymer base material 100a, form network structure because rheological behavior changes agent 102a, so low-density additive 104 (as fine hollow ball) can be dispersed in the grinding pad of being finished at last 110.Shown in Figure 1B, when the constituent of grinding pad 120 is to use high density additive 106 (as cerium oxide abrasive particles), change the network structure that agent 102b forms by rheological behavior in polymer base material 100b, high density additive 106 is dispersed in the grinding pad of being finished at last 120.Similarly, shown in Fig. 1 C, when comprising low-density additive 104c and high density additive 106c in the constituent of grinding pad 130 simultaneously, rheological behavior changes agent 102c can form network structure in polymer base material 100c, low-density additive 104c and high density additive 106c are dispersed in the grinding pad of being finished at last 130.
On the other hand, Ginding process proposed by the invention is suitable in order to grind a substrate.At first, provide by the formed grinding pad of above-mentioned grinding pad constituent.Then, substrate is applied a pressure so that it is pressed on the grinding pad.Then, provide a relative motion,, reach the effect of planarization to remove the part surface of substrate to substrate and grinding pad.
Because grinding pad has the constituent that is evenly distributed, therefore use Ginding process of the present invention can obtain the better grinding effect.In addition, Ginding process of the present invention is also optionally supplied in process of lapping and is ground slurry or solution, makes this Ginding process become the cmp processing procedure.
In sum, grinding pad of the present invention can make its constituent maintain homodisperse state, and then the uniformity of grinding pad is improved.And the grinding pad that uses this kind to have even distribution constituent carries out Ginding process, can help to obtain the better grinding effect.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; have in the technical field under any and know the knowledgeable usually; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is when with being as the criterion that claim was defined.
Claims (48)
1. a grinding pad has a constituent, comprising:
One polymer base material;
One additive, this additive are to be selected from the group that a low-density additive, a high density additive and combination thereof are formed; And
One rheology characteristic changing agent has a structure between this rheological behavior change agent and is selected from the group that hydrogen bond bond, association, spatial orientation and combination thereof are formed.
2. grinding pad as claimed in claim 1 is characterized in that the density contrast of this additive and this polymer base material is greater than 20% of this polymer base material density.
3. grinding pad as claimed in claim 1 is characterized in that, this low-density additive comprises microsphere, do not have reactant gas or a blowing agent.
4. grinding pad as claimed in claim 1 is characterized in that, this high density additive comprises abrasive grains.
5. grinding pad as claimed in claim 1 is characterized in that, this rheological behavior changes agent to be had and make this constituent have a full-bodied characteristic applying to be higher than to have a low-viscosity under the transition shear rate state and be lower than under this transition shear rate state.
6. grinding pad as claimed in claim 1 is characterized in that, this rheological behavior changes agent and comprises that inorganic rheological behavior changes agent.
7. grinding pad as claimed in claim 6 is characterized in that, this inorganic rheological behavior changes agent and comprises that the surface has the oxide M of hydroxy M-OH
xO
y, this oxide M
xO
yIn M be selected from the group that silicon, aluminium, titanium, zirconium, cerium, magnesium, calcium and combination thereof are formed.
8. grinding pad as claimed in claim 7 is characterized in that, the quantity of the hydroxy M-OH that this inorganic rheological behavior change agent per surface area has is between 0.5M-OH/nm
2To 2M-OH/nm
2Between.
9. grinding pad as claimed in claim 6 is characterized in that, this inorganic rheological behavior changes agent and comprises phyllosilicate.
10. grinding pad as claimed in claim 1 is characterized in that, this rheological behavior changes agent and comprises that organic rheological behavior changes agent.
11. grinding pad as claimed in claim 10 is characterized in that, this organic rheology characteristic changing agent comprises emulsifying agent.
12. grinding pad as claimed in claim 11 is characterized in that, the group of this emulsifying agent by selecting cationic emulsifier, anionic emulsifier and nonionic emulsifier to be formed.
13. grinding pad as claimed in claim 10, it is characterized in that this organic rheology characteristic changing agent is the group that the fatty acid ester, ethylene glycol, polyethylene glycol, propane diols, glycerine, polyglycereol, sorbierite, pentaerythrite, glyceride, sucrose, fatty amine, fatty acid amide, polyglyceryl ether, glycol polypropylene ether and the combination thereof that are selected from ethanol formed.
14. grinding pad as claimed in claim 10, it is characterized in that, this organic rheology characteristic changing agent comprises that the long-chain shape has the compound of polar functional base, and this compound is to be selected from the group that amides compound, aminated compounds, carbonyl diamide compounds, amido formate compounds and combination thereof are formed.
15. grinding pad as claimed in claim 14 is characterized in that, the mean molecule quantity of this compound is between 5000 to 500000.。
16. grinding pad as claimed in claim 10 is characterized in that, this organic rheology characteristic changing agent comprises the swelling type emulsion.
17. grinding pad as claimed in claim 16 is characterized in that, this organic rheology characteristic changing agent comprises hydrophobically-modified alkali swelling type emulsion.
18. grinding pad as claimed in claim 10 is characterized in that, this organic rheology characteristic changing agent comprises the polyurethanes compound.
19. grinding pad as claimed in claim 18 is characterized in that, this organic rheology characteristic changing agent comprises hydrophobically modified ethyoxyl urethanes.
20. grinding pad as claimed in claim 10 is characterized in that, this rheological behavior changes agent and comprises the hydrophobically modified polyether compound.
21. grinding pad as claimed in claim 1 is characterized in that, the percentage by weight of this additive in this constituent is between 0.1% to 30%, and the percentage by weight of this rheological behavior change agent in this constituent is between 0.5% to 30%.
22. a grinding pad has a constituent, comprising:
One polymer base material;
One additive, this additive are to be selected from the group that a low-density additive, a high density additive and combination thereof are formed; And
One rheology characteristic changing agent, this rheological behavior change agent makes this constituent have a high viscosity applying to be higher than to have a low viscosity under the transition shear rate state and be lower than under this transition shear rate state.
23. grinding pad as claimed in claim 22 is characterized in that, the density contrast of this additive and this polymer base material is greater than 20% of this polymer base material density.
24. grinding pad as claimed in claim 22 is characterized in that, this low-density additive comprises microsphere, do not have reactant gas or a blowing agent.
25. grinding pad as claimed in claim 22 is characterized in that, this high density additive comprises abrasive grains.
26. grinding pad as claimed in claim 22 is characterized in that, this high viscosity is more than 2 times of this low-viscosity.
27. grinding pad as claimed in claim 22 is characterized in that, has a structure between this rheological behavior change agent and is selected from the group that hydrogen bond bond, association, spatial orientation and combination thereof are formed.
28. grinding pad as claimed in claim 22 is characterized in that, this rheological behavior changes agent and comprises that inorganic rheological behavior changes agent.
29. grinding pad as claimed in claim 28 is characterized in that, this inorganic rheological behavior changes agent and comprises that the surface has the oxide M of hydroxy M-OH
xO
y, this oxide M
xO
yIn M be selected from the group that silicon, aluminium, titanium, zirconium, cerium, magnesium, calcium and combination thereof are formed.
30. grinding pad as claimed in claim 29 is characterized in that, the quantity of the hydroxy M-OH that this inorganic rheological behavior change agent per surface area has is between 0.5M-OH/nm
2To 2M-OH/nm
2Between.
31. grinding pad as claimed in claim 28 is characterized in that, this inorganic rheological behavior changes agent and comprises phyllosilicate.
32. grinding pad as claimed in claim 22 is characterized in that, this rheological behavior changes agent and comprises that organic rheological behavior changes agent.
33. grinding pad as claimed in claim 32 is characterized in that, this organic rheology characteristic changing agent comprises emulsifying agent.
34. grinding pad as claimed in claim 33 is characterized in that, the group of this emulsifying agent by selecting cationic emulsifier, anionic emulsifier and nonionic emulsifier to be formed.
35. grinding pad as claimed in claim 32, it is characterized in that this organic rheology characteristic changing agent is the group that the fatty acid ester, ethylene glycol, polyethylene glycol, propane diols, glycerine, polyglycereol, sorbierite, pentaerythrite, glyceride, sucrose, fatty amine, fatty acid amide, polyglyceryl ether, glycol polypropylene ether and the combination thereof that are selected from ethanol formed.
36. grinding pad as claimed in claim 32, it is characterized in that, this organic rheology characteristic changing agent comprises that the long-chain shape has the compound of polar functional base, and this compound is to be selected from the group that amides compound, aminated compounds, carbonyl diamide compounds, amido formate compounds and combination thereof are formed.
37. grinding pad as claimed in claim 36 is characterized in that, the mean molecule quantity of this compound is between 5000 to 500000.。
38. grinding pad as claimed in claim 32 is characterized in that, this organic rheology characteristic changing agent comprises the swelling type emulsion.
39. grinding pad as claimed in claim 38 is characterized in that, this organic rheology characteristic changing agent comprises hydrophobically-modified alkali swelling type emulsion.
40. grinding pad as claimed in claim 32 is characterized in that, this organic rheology characteristic changing agent comprises the polyurethanes compound.
41. grinding pad as claimed in claim 40 is characterized in that, this organic rheology characteristic changing agent comprises hydrophobically modified ethyoxyl urethanes.
42. grinding pad as claimed in claim 32 is characterized in that, this rheological behavior changes agent and comprises the hydrophobically modified polyether compound.
43. grinding pad as claimed in claim 22 is characterized in that, the percentage by weight of this additive in this constituent is between 0.1% to 30%, and the percentage by weight of this rheological behavior change agent in this constituent is between 0.5% to 30%.
44. a grinding pad comprises:
One polymer base material;
One rheology characteristic changing agent, this rheological behavior change agent and constitute a network structure in this polymer base materials; And
One additive is distributed in this polymer base material, and this additive is to be selected from the group that a low-density additive, a high density additive and combination thereof are formed.
45. grinding pad as claimed in claim 44 is characterized in that, has a structure between this rheological behavior change agent and is selected from the group that hydrogen bond bond, association, spatial orientation and combination thereof are formed.
46. grinding pad as claimed in claim 44 is characterized in that, this additive is isolated by this network structure.
47. grinding pad as claimed in claim 44 is characterized in that, the density of zones of different in this grinding pad compared to the additive of identical addition, does not change the formed grinding pad of agent but there is rheological behavior, has less density variation.
48. grinding pad as claimed in claim 44 is characterized in that, this grinding pad is compared to the additive of identical addition, changes the formed grinding pad of agent but there is rheological behavior, has less additive agglomerate in wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100039326A CN101486169A (en) | 2008-01-18 | 2008-01-18 | Grinding pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100039326A CN101486169A (en) | 2008-01-18 | 2008-01-18 | Grinding pad |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101486169A true CN101486169A (en) | 2009-07-22 |
Family
ID=40889309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008100039326A Pending CN101486169A (en) | 2008-01-18 | 2008-01-18 | Grinding pad |
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| Country | Link |
|---|---|
| CN (1) | CN101486169A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108098536A (en) * | 2018-01-31 | 2018-06-01 | 湖南科技大学 | A kind of efficient ultraprecise shear thickening-chemical cooperated burnishing device |
-
2008
- 2008-01-18 CN CNA2008100039326A patent/CN101486169A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108098536A (en) * | 2018-01-31 | 2018-06-01 | 湖南科技大学 | A kind of efficient ultraprecise shear thickening-chemical cooperated burnishing device |
| CN108098536B (en) * | 2018-01-31 | 2023-12-08 | 湖南科技大学 | Efficient ultra-precise shear thickening-chemical collaborative polishing device |
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Application publication date: 20090722 |