CN101484787A - Strain gauge for a measurement variable sensor - Google Patents

Strain gauge for a measurement variable sensor Download PDF

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Publication number
CN101484787A
CN101484787A CNA2007800255333A CN200780025533A CN101484787A CN 101484787 A CN101484787 A CN 101484787A CN A2007800255333 A CNA2007800255333 A CN A2007800255333A CN 200780025533 A CN200780025533 A CN 200780025533A CN 101484787 A CN101484787 A CN 101484787A
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CN
China
Prior art keywords
measuring
foil gauge
grizzly bar
taeniae
measurement
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2007800255333A
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Chinese (zh)
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CN101484787B (en
Inventor
M·克罗伊策
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hottinger Bruel and Kjaer GmbH
Original Assignee
Hottinger Baldwin Messtechnik GmbH
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Publication of CN101484787A publication Critical patent/CN101484787A/en
Application granted granted Critical
Publication of CN101484787B publication Critical patent/CN101484787B/en
Expired - Fee Related legal-status Critical Current
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance

Abstract

The invention relates to a strain gauge for a measurement variable sensor, comprising a meandering measurement grid (1) that is arranged on a film-type carrier layer. Said measurement grid (1) comprises measurement grid struts (5) on whose end areas, return points (4) comprising a transversal strut (6) are arranged for connection to the adjacent measurement grid strut (5) which runs in parallel. Said invention is characterised in that each return point (4) consists of a narrow transversal strut (6) and two longitudinal struts (7) as an extension of the measurement grid struts (5). The narrow transversal strut (6) is arranged on the end point of the measurement grid struts (5) and on the initial point of the longitudinal strut (7). The longitudinal struts (7) are open towards the exterior.

Description

The foil gauge that is used for the measuring amount receiver
Technical field
The present invention relates to a kind of foil gauge that is used for the measuring amount receiver.
Background technology
Newly developed or further exploitation by material and disposal route thereof can obviously improve the performance that requires the aspect about the measuring spring that is used to make weighing unit and power receiver.Here main requirement is reproducible, the constant characteristic in time of deformable body and foil gauge attached thereto.At this, but the prerequisite that it is the good receiver of structure that use has minimum material from creep and reproducing characteristic.
Every kind of measuring spring material more or less has big positive from creep under mechanical load in the practice.Under this load, the elongation of measuring spring material passes to the foil gauge that adheres to, and this foil gauge is made up of the measurement grid zigzag, that metal forming constitutes that are arranged on the carrier layer.Foil gauge also has from creep, should have negative sign under load from creep.This characteristic of this characteristic of spring body and foil gauge is coordinated this moment so mutually, makes them just cancel out each other in the ideal case, avoids measuring error so as far as possible.For this reason, foil gauge from creep must with the coordinating mutually of measuring spring material from creep.Ideally the creep properties of foil gauge must have identical time changing curve and opposite in sign with the creep properties of measuring spring material.
A kind of foil gauge with especially little creep error is disclosed by EP 0 451 636 A1.This foil gauge comprises the carrier layer of a film like, has pasted zigzag measurement grid that are made of sheet resistance on this carrier layer.Here carrier thin film is made up of a plastic sheeting of determining, especially improve foil gauge by this plastic sheeting with temperature correlation from creep properties.But, not only depend on measurement grid, carrier and the employed material of coupling agent from creep properties, therefore, the geometric configuration of measuring grid based on indentation from creep has had disadvantageous from creep properties.
Because creep process is also by definite by the measurement grid end regions of gauge relatively narrowly, so creep process also is subjected to the influence of the structural change in this zone.Therefore known in practice, influence creep properties like this: the length of measuring the steering position on the grid end and the bar width of measurement grid be variable ratioization mutually.Therefore EP 0 451 636 A1 have zigzag measurement grid in practice, measurement grizzly bar that these measurement grid are arranged side by side with having massive parallel, that be made of sheet resistance.This sheet resistance also preferably has about 3 to 5 microns film thickness by cupronickel (Konstantan) or nickel-chrome (Karma) formation mostly.At this, whole measurement grid have 3 to 6 millimeters length and 30 to 50 microns bar width mostly, and the spacing between its discal patch is about as much as a bar width.Therefore, the steering position on the bar end has about 3 overall widths of measuring grill width.In order to compensate creep properties, the length of steering position is equivalent to 2 to 6 times of grill width usually.The effect of the whole measurement grid that are elongated and the spring-like of tensioning are seemingly.Therefore spring force especially produces shearing stress in carrier thin film and bond layer in the zone of steering position.Under this stress influence, the plastics relaxation of foil gauge and bonding agent, promptly reacting force weakens and measures grid and shrink.Therefore produce the negative creep of foil gauge, this creep should have identical size with the positive creep of measuring body as far as possible, so that synthetic measuring amount receiver total creep is zero.Need relatively short steering position in order to compensate creep yet particularly greatly just have at the measuring spring body under the situation of creep, this steering position must bear big shearing stress.This causes under common foil gauge manufacturing tolerance that particularly bigger creep properties disperses, because this dispersing is difficult to carry out the accurately creep compensation of repetition.
A kind of foil gauge is disclosed by DE 199 09 042 A1, because the creep properties of this foil gauge, by the particularly advantageously little positive creep of compensating measure spring body of special steering position configuration.Stipulate that for this reason steering position length is compared increase with the steering position width with grill width, make totally to reduce by of the influence of the pulling force of measuring the grizzly bar generation to steering position.But this is reducing common measurement grill width so that be only possible when obtaining identical grid structure on identical strain is unilateral in practice.Yet often be not always to be necessary to make the negative creep of foil gauge totally to reduce, but as long as under the situation of the positive creep of predetermined measuring spring body, make measuring error keep as far as possible little by the foil gauge negative creep that can accurately adjust.
Because steering position length and width are little with the ratio of measurement grill width, especially when the big positive measuring body creep of compensate for slower, this measuring error is difficult to reduce with high reproducibility.Thereby because when the bigger measuring body creep of compensation the carrier thin film of foil gauge bear on the steering position big shearing stress peak value and this can cause aspect the creep with time and temperature correlation than Vernonia parishii Hook and cause that in the foil gauge receiver measuring-signal changes.Because steering position also is the part of tested foil gauge resistance,, thereby cause measuring error in the steering position zone so the change that the relaxation that sheet resistance causes owing to big shear stress takes place causes the change of measuring resistance.
Summary of the invention
Therefore, task of the present invention is, improves the foil gauge of the described type of beginning, makes it possible to minimize with the measuring error relevant with creep of height reproducibility with the measuring amount receiver.
According to the present invention, a kind of foil gauge that is used for the measuring amount receiver is proposed, it have on the carrier layer that is placed in diaphragm type, by measuring constitute, the zigzag measurement grid of grizzly bar, on the end regions of these measurement grid, be mounted with some steering positions, described steering position has and is used for and the horizontal stripe that is connected of measurement grizzly bar that is arranged in the next door abreast, wherein, each steering position is made up of a thin horizontal stripe and two taeniaes as the extension of described measurement grizzly bar, wherein, horizontal stripe is arranged on the terminal point of measuring grizzly bar and on the starting point of taeniae.
Advantageously, taeniae constructs backward unlimitedly and has 80 microns to 400 microns length of measurement grizzly bar length as the extension that extends in parallel of measuring grizzly bar.
Advantageously, taeniae has and compares identical or width smaller with the width of measuring grizzly bar.
Advantageously, taeniae has an anchor face as widening portion on its end regions, and the width of this anchor face is bigger than the width of measuring grizzly bar.
Advantageously, this anchor face rectangular area or construct foursquare and have 50% the length that maximum is equivalent to the total length of taeniae.
Advantageously, the anchor mask have directly, the circle and/or oblique inlet end or endpiece.
Advantage of the present invention is, reaches the uncoupling of the electric related and machinery association of creep properties by the configuration of the steering position that is made of taeniae and horizontal stripe, can significantly improve the measuring accuracy of measuring amount receiver thus.This preferably realizes thus, does not influence measuring-signal by the negative creep mechanical adjustment that taeniae carried out that grid are prolonged that is:, because that its electric current flows through is thin, the horizontal stripe that do not have shearing stress to a great extent carries out.
The advantage that the present invention also has is, for the appropriate necessary anchor face of relaxation can irrespectively be constructed with the resistance situation, shearing stress peak energy in the feasible particularly steering position zone enough so reduces, so that also can advantageously influence the creep properties relevant with temperature and time simultaneously.Can accurately be adjusted into the necessary foil gauge creep of counterbalance spring body creep by the utmost point by taeniae length here.Additionally also can advantageously influence shearing stress value and change curve in the vertical thereof, make and totally almost can adjust foil gauge creep properties arbitrarily thus by the geometrical construction of anchor face.By the moulding of taeniae, even controlled creep properties also advantageously has only little dispersing under common manufacture deviation.
Stipulate that in particular configuration of the present invention additionally, the width of taeniae is also constructed narrowlyer than measuring grizzly bar.This has such advantage: thus can balance measured grid, particularly measured the caused deviation relevant with creep of grizzly bar by etching.
Description of drawings
Explain the present invention in detail by an embodiment illustrated in the accompanying drawings.Shown in the accompanying drawing:
Fig. 1 has foil gauge and the shearing stress characteristic curve of subordinate and the partial view of variable elongation characteristic curve of the anchor face of rectangle on steering position,
Fig. 2 has two partial views of measuring the foil gauge of the steering position that grizzly bars and is made up of two same wide taeniaes,
Fig. 3 has two partial views of measuring the foil gauge of the steering position that grizzly bars and is made up of two narrow taeniaes,
Fig. 4 has two partial views of measuring the foil gauge of the steering position that grizzly bars and is made up of the wide anchor face of two narrow taeniaes and two cavettos.
Embodiment
A shearing stress change curve τ who has steering position and subordinate has been shown among Fig. 1 iAnd variable elongation curve ε iThe indentation of thin film strain-gauge measure the part of grid, wherein, steering position 4 is formed at horizontal stripe 6 and two taeniaes 7 with rectangle anchor face 8 of measuring on grizzly bar 5 ends by one.
The shown part of this foil gauge thin film strain-gauge of described type is from the outset set out, and this foil gauge preferably comprises a unshowned plastic carrier film, is laid with zigzag measurement grid 1 that are made of resistance material on this carrier thin film.Such foil gauge has 3 to 6 millimeters length usually and attached on the measuring spring body, is a measuring amount receiver.This foil gauge shown in the part preferably has the resistance in 120 Europe or 350 Europe and comprises some measures grizzly bar 5, and these are measured grizzly bar width when the bar length C for example is 4 millimeters and are about 30 to 50 microns.
Steering position 4 comprises a narrow horizontal stripe 6, and this horizontal stripe is electrically connected the both ends of two measurement grizzly bars 5 adjacent, that extend in parallel mutually.At this, narrow horizontal stripe 6 with measure grizzly bar 5 and compare and have identical or width smaller.In the axially-extending section of measuring grizzly bar 5, steering position 4 comprises two taeniaes 7 in the zone of outwards pointing to respect to horizontal stripe 6, and these taeniaes also preferably extend in parallel to each other.Taeniae 7 and then measure grizzly bar 5 with predetermined length b with measure that grizzly bar 5 identical width constitute and at the widening portion that on section length a, comprises a rectangle on their end section.This widening portion is the rectangle anchor face 8 of taeniae 7.Section b for example has about 130 microns length and section a has about 100 microns length there, and wherein, the anchor face of widening 8 preferably has about 100 microns width.Owing to this foil gauge is connected on the predetermined feed voltage in order to record measuring amount, therefore take place to flow from the electric current of the measurement grizzly bar 5 of unshowned tie point through connecting successively, on the end of measuring grizzly bar 5, only flow through meticulous horizontal stripe 6.At this, the taeniae 7 with big anchor face 8 of Chang Kaiing only is used to adjust desirable negative creep or appropriate relaxation backward, does not have the measuring-signal electric current to flow through these taeniaes 7.
In Fig. 1, above the partial view of foil gauge of the present invention, show this foil gauge simultaneously at the average ε of extension MiUnder the constant situation about its relative length X iShearing stress change curve τ iWith extension change curve ε iFrom shearing stress change curve 2 as can be seen, when foil gauge was subjected to load, shearing stress was almost nil on whole length C in measuring grizzly bar 5.Only can see little shearing stress 11 in the zone of the thin horizontal stripe 6 that the measuring-signal electric current flows through, its effect to the measuring-signal electric current can be ignored.Just forming shearing stress in the zone at taeniae 7 in carrier outside the measurement grizzly bar 5 of conducting electric current and the horizontal stripe 6, this shearing stress reaches peak value 12 and 14 at the top and the end of anchor face 8.Can find out from shearing stress change curve 2, in anchor face 8, maximum shear stress occur.But these positions are away from the measure portion that is flow through by electric current of measuring grid, so that the shearing stress peak that for example the excessive relaxation in these zones causes owing to carrier and bond layer changes discernable hardly to the influence of measuring-signal.Therefore, measure the steering position little several magnitude of the influences ratio of the relaxation in the grizzly bar 5 according to 4 pairs of steering positions of the present invention, because they are by taeniae 7 uncoupling consumingly of steering position 4 according to prior art noted earlier.In order to reduce shearing stress peak 12,14, anchor face 8 can be constructed inlet end or endpiece slightly pointed or circle.This circle and the inlet end 9 of pointed contraction and the anchor face 8 of endpiece 10 of having can be seen from Fig. 4.
The simplest structure that is used for adjusting the foil gauge negative creep shown in Figure 2 according to the present invention.At this, be connected the steering position of measuring on the grizzly bar 54 and form by taeniae 7 a narrow horizontal stripe 6 and two prolongations, that have length b.These taeniaes 7 have and measure the suitable width of grizzly bar 5 width.Desired negative creep here can be by taeniae 7 the length b of correspondence determine.In according to this embodiment of the invention, special anchor face is not set in taeniae 7 inside.Little positive measuring body creep is here by 7 compensation of long taeniae, and big measuring body creep is by 7 compensation of relatively shorter taeniae.For the foil gauge of 5 mm lengths commonly used, the length b of taeniae 7 is about 100 to 250 microns.Here, length b is only determined by the bar width of measuring grizzly bar 5, but is at first determined by the positive measuring body creep that will compensate.Corresponding length dimension b both can try to achieve by experience, perhaps also can calculate by the predetermined value of corresponding strain parameter.
Figure 3 illustrates a kind of steering position structure, this structure is by the special tectonic ancillary relief corrosion deviation of horizontal stripe 7.Change because for example ± 2 measure the pulling force effect of 5 pairs of steering positions 4 of grizzly bar during μ m in the corrosion deviation, the negative creep characteristic of foil gauge is not to change indistinctively yet thus yet.If for example bar 5,7,6 is because corrosion deviation and same degree ground broadens, then the negative creep of standard foil gauge also can increase, because the ratio of the shearing stress in the tension in the metal gate of foil gauge and the carrier thin film can help the tension ground change in the metal gate.This is compensation like this in according to the foil gauge of Fig. 3, that is: what cause in thinner taeniae 7 owing to corrode deviation widens than mean relatively large widening in measuring grizzly bar.But it is the same with the excessive increase effect of steering position 4 that taeniae 7 relatively large widened, and this is tending towards causing the foil gauge negative creep to reduce.Two kinds of influences are cancelled out each other under the appropriate situation of determining size, even making that the positive creep of spring body has in the foil gauge gap under the situation of bigger corrosion deviation also can be by compensation accurately to zero.Length b and width at this taeniae 7 are determined size with suitable manner, and wherein, bigger length b means less negative foil gauge creep, and bigger width means little corrosion deviation compensation.A favorable structure of foil gauge has the measurement grizzly bar 5 of 30 microns width and 3 mm length c, taeniae 7 about 20 microns wide and about 200 microns long (b) wherein so that shearing stress τ advantageously with horizontal stripe 6 uncouplings and compensation corrosion deviation well.Here, the taeniae thickness that remains unchanged helps medium to bigger foil gauge negative creep value, with such taeniae thickness also can equilibrium phase to medium extremely bigger spring body creep.
Steering position structure shown in Figure 4, this structure is preferred for relatively little spring body creep.The end of taeniae 7 forms an anchor face 8 by widening for this reason, and by this anchor face, the tension of measuring grizzly bar 5 is distributed on the bigger face, thus shearing stress totally diminish and therefore the negative creep of foil gauge also diminish.Here, bigger anchor 8 total areas produce less foil gauge negative creep.By anchor face 8 fronts compare the taeniae width that reduces equally with measuring grill width, reach compensation simultaneously to the corrosion deviation.
In Fig. 4, cut sth. askew with one and the inlet end 9 of circular structure is illustrated on the end of taeniae 7 and widens into anchor face 8 with the endpiece 10 of a cavetto.Thus, reduction is compared with the rectangular configuration according to Fig. 1 in the shearing stress peak 12,14 that particularly has its peak value in entrance area and exit region.Taeniae 7 this widened into the width that anchor face 8 preferably carries out and has 80 to 130 microns mostly on about 100 microns length a, wherein, remaining taeniae 7 also has about 80 to 150 microns length b.In order to reduce shearing stress τ, inlet end 9 also can overall tilt ground or the extension of taper ground.For the shearing stress τ in the end regions of the anchor face 8 that reduces taeniae 7, thus endpiece 10 also can be obliquely pointedly or taper ground stop.

Claims (6)

1. the foil gauge that is used for the measuring amount receiver, have on the carrier layer that is placed in diaphragm type, constitute by measurement grizzly bar (5), zigzag measurement grid (1), on the end regions of these measurement grid, be mounted with some steering positions (4), described steering position has and is used for and the horizontal stripe (6) that is connected of measurement grizzly bar (5) that is arranged in the next door abreast, it is characterized in that, each steering position (4) is made up of a thin horizontal stripe (6) and two taeniaes (7) as the extension of described measurement grizzly bar (5), wherein, horizontal stripe (6) is arranged on the terminal point of measuring grizzly bar (5) and on the starting point of taeniae (7).
2. foil gauge as claimed in claim 1 is characterized in that, taeniae (7) constructs backward unlimitedly and have 80 microns to 400 microns length (b) of measurement grizzly bar length (c) as the extension that extends in parallel of measuring grizzly bar (5).
3. foil gauge as claimed in claim 1 or 2 is characterized in that, taeniae (7) has to be compared identical or width smaller with the width of measuring grizzly bar (5).
4. as one of above-mentioned claim described foil gauge, it is characterized in that taeniae (7) has an anchor face (8) as widening portion on its end regions, the width of this anchor face is bigger than the width of measuring grizzly bar (5).
5. foil gauge as claimed in claim 4 is characterized in that, this anchor face (8) rectangular area or construct foursquare and have total length (b, 50% the length (a) a+b) that maximum is equivalent to taeniae (7).
6. as claim 4 or 5 described foil gauges, it is characterized in that anchor face (8) has directly, circle and/or oblique inlet end (9) or endpiece (10).
CN2007800255333A 2006-05-05 2007-05-04 Strain gauge for a measurement variable sensor Expired - Fee Related CN101484787B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006021423.4 2006-05-05
DE102006021423.4A DE102006021423B4 (en) 2006-05-05 2006-05-05 Strain gauges for measuring sensor
PCT/EP2007/003932 WO2007128504A1 (en) 2006-05-05 2007-05-04 Strain gauge for a measurement variable sensor

Publications (2)

Publication Number Publication Date
CN101484787A true CN101484787A (en) 2009-07-15
CN101484787B CN101484787B (en) 2011-03-30

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DE (1) DE102006021423B4 (en)
WO (1) WO2007128504A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104279947A (en) * 2013-07-05 2015-01-14 西门子公司 Panel with Strain Gauges for Measuring Deformation Information

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008055774B4 (en) 2008-11-04 2013-07-25 Bundesrepublik Deutschland, vertr.d.d. Bundesministerium für Wirtschaft und Technologie, d.vertr.d.d. Präsidenten der Physikalisch-Technischen Bundesanstalt Apparatus for measuring a temperature of a component and apparatus for measuring a strain of a component

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GB728606A (en) * 1952-08-28 1955-04-20 Technograph Printed Circuits L Electric resistance devices
US2992400A (en) * 1957-11-29 1961-07-11 Baldwin Lima Hamilton Corp Foil filament strain gage
DE3504276C1 (en) * 1985-02-08 1986-07-24 T. Nikolaus 7530 Pforzheim Württemberger Transducer
DE4011314A1 (en) * 1990-04-07 1991-10-10 Hottinger Messtechnik Baldwin ELASTIC MEASURING STRIP AND MEASURING SENSOR WITH THIS ELASTIC MEASURING STRIP
FR2667150A1 (en) * 1990-09-24 1992-03-27 Dal Dan Felice Strain gauge with multiple outputs
DE19909042A1 (en) * 1999-03-02 2000-09-07 Hbm Waegetechnik Gmbh Strain gauges for transducers
JP3443111B2 (en) * 2001-06-29 2003-09-02 ミネベア株式会社 Foil strain gauge
US20040159162A1 (en) * 2003-02-19 2004-08-19 Vishay Intertechnology Strain gage

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104279947A (en) * 2013-07-05 2015-01-14 西门子公司 Panel with Strain Gauges for Measuring Deformation Information
US9541486B2 (en) 2013-07-05 2017-01-10 Siemens Aktiengesellschaft Panel with strain gauges for measuring deformation information
CN104279947B (en) * 2013-07-05 2018-01-05 西门子公司 Plate with the strain measurement piece for measuring deformation information

Also Published As

Publication number Publication date
WO2007128504A1 (en) 2007-11-15
CN101484787B (en) 2011-03-30
DE102006021423B4 (en) 2016-06-02
DE102006021423A1 (en) 2007-11-08

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