CN101477137B - 一种利用光栅检测技术进行加速度测量的装置和方法 - Google Patents
一种利用光栅检测技术进行加速度测量的装置和方法 Download PDFInfo
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CN102096133B (zh) * | 2010-12-27 | 2012-07-18 | 北京航空航天大学 | 可调纳米光栅及纳米光栅加速度计及其加工方法 |
CN110940830B (zh) * | 2019-12-12 | 2021-12-07 | 中北大学 | 一种基于二维光栅和四象限探测器的两轴加速度计结构 |
CN118011042A (zh) * | 2024-04-09 | 2024-05-10 | 安徽至博光电科技股份有限公司 | 一种加速度传感器及其测量方法 |
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