CN101470092A - LB film gas transducer for anhydrous hydrazine detection - Google Patents
LB film gas transducer for anhydrous hydrazine detection Download PDFInfo
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- CN101470092A CN101470092A CNA2007103046420A CN200710304642A CN101470092A CN 101470092 A CN101470092 A CN 101470092A CN A2007103046420 A CNA2007103046420 A CN A2007103046420A CN 200710304642 A CN200710304642 A CN 200710304642A CN 101470092 A CN101470092 A CN 101470092A
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- microelectrode
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- membrane
- power supply
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Abstract
The invention relates to a LB membrane gas sensor for detecting anhydrous hydrazine, belonging to manufacture field, which comprises a sensitive membrane, a substrate, a microelectrode, a power supply and a current meter. The preparation method comprises: etching the AI microelectrode on a glass substrate via mask method; using single molecule layer membrane transfer method to cover the sensitive membrane on the AI microelectrode and contacting the glass substrate; and serially connecting the power supply, the current meter and the microelectrode. The sensitive membrane adopts disulfide hybrid cyclopentadiene complex LB membrane; the substrate adopts smooth glass or quartz glass; the microelectrode is made from AI of 250 to 350nm thickness, 50um width and minimum contact resistance; the output of the power supply is 0 to 200V; the sensitivity of the current meter is 10<-10>A. The invention has the advantages that the LB membrane gas sensor has high detection sensitivity, the detection limit on hydrazine concentration reaches 0.05ppm as 50ppb, the hydrazine gas sensor has small volume and low weight, the sensitive membrane has the characteristics of high selectivity and sensitivity to compensate the weak output signal defect of planar fork microelectrode sensors.
Description
Affiliated technical field
The present invention relates to a kind of LB film gas transducer, particularly relate to a kind of LB film gas transducer that detects anhydrous hydrazine, belong to the manufacturing field.
Background technology
Though the detection method of hydrazine gas has several different methods, its characteristics are arranged respectively.From the angle that reality is used, the sensitivity that requires to detect wants high.Generally should be better than 1ppm.By the requirement standard of current American industrial hygiene and health association, should reach 0.05ppm to the detectability of hydrazine concentration is 50ppb.Next is that the volume of detecting device is little, in light weight.In addition, consider that from spaceborne and other spacecraft application point of view the energy consumption of detecting device is also as much as possible little.For ground detection, two of back want much loose.But the total guiding theory of the design of this paper is still considered with above-mentioned three aspects.
If main consider that the gas sensor of field effect tubular type is a kind of good selection with small-sized turning to, its feature is the integrated level height, and output signal is strong, need not the processing and amplifying of secondary singal basically.Shortcoming is that sensitive thin film is eager to excel to the selectivity of gas, and stability is high, with the poor compatibility of device technology.As adopt the LB film, be difficult to reach the requirement of use at present.Different with field effect tubular type structure, plane microelectrode formula and surface acoustic wave formula LB film gas transducer are subjected to paying attention to widely in recent years, the interdigital microelectrode formula in plane thin film gas sensor particularly, because manufacture craft is simple relatively, successful use reduces than large tracts of land because the factors such as defective of sensitive thin film Local Structure, particularly use strong, the highly sensitive characteristics of its sensitive thin film selectivity, compensated the more weak shortcoming of the interdigital microelectrode sensor output signal in plane.
Therefore, consider, can select using planar microelectrode formula mode of operation from the manufacturing process technology aspect.In order to improve detection sensitivity, to reduce working temperature, can select the LB film as gas-sensitive film.Consider from angle of practical application, the stability of LB film is vital, because for most of LB membrane materials, it between the molecule combination of physisorption, therefore the degeneration that environmental activity causes is comparatively serious, selects that LB membrane material and relevant disposal route thereof are one of the problems that at first will consider preferably to environmental stability.
After adopting the mode of operation of plane microelectrode mode as sensor, the processing of secondary singal also will think better of.Owing to select for use the LB film as sensitive thin film, the conductivity of LB film is very little generally speaking, the output of sensor secondary electric signal is very faint, can be according to the signal amplification treatment method of conventional high input impedance, be converted to voltage by input current, carry out signal again and amplify, be output as the readable signal of 0～2000mV.If require to provide corresponding probe gas concentration, by demarcating, adopt 8086 single-chip microcomputers, provide the gas concentration value of 0.1～1000ppm.
Summary of the invention
Purpose of the present invention proposes to detect with the LB film gas transducer method of anhydrous hydrazine.
The LB film gas transducer comprises several sections such as sensitive thin film, substrate, microelectrode, power supply, reometer..
1, sensitive thin film:
The sensitive thin film of LB film gas transducer adopts dithiole complex compound (BDN) LB film.
2, substrate:
The substrate of LB film gas transducer adopts the bright and clean degree glass or the quartz glass on surface.
3, microelectrode:
The microelectrode of LB film gas transducer adopts the conductivity height, the stability of environment is high, manufacture craft is simple, about thickness 300nm, 50 microns microelectrode width, ohmic contact resistance (voltage/current) minimum metal Al.
4, power supply: be output as 0～200V
5, reometer: sensitivity is 10
-10A
On substrate of glass 3, etch microelectrode A1 electrode 1 by masking method, utilize the method for unimolecular layer transfer membrane that sensitive thin film 2 is covered on the microelectrode A1 electrode 1, also contact simultaneously with substrate of glass.Power supply, 1 one-tenth series relationship of reometer and microelectrode.
When hydrazine gas acts on sensitive membrane 2, cause sensitive thin film 2 changes in resistance.Under certain voltage that power supply 4 provides, changes in resistance causes the variation of loop current intensity, and signal is obtained by the strength of current of built-up circuit, and the variable quantity of electric current is subjected to the modulation of gaseous species and gas flow.
Sensitive membrane is exposed in the detection atmosphere, and voltage is 0～1000V, and sensitive membrane changes in resistance scope is a resistance 10
6～10
12Ω, electric current be changed to 10
-13～10
-9A had both shown to survey in the atmosphere and had contained hydrazine gas.
Beneficial effect of the present invention is: the sensitivity of detection wants high, and should reach 0.05ppm to the detectability of hydrazine concentration is 50ppb.Hydrazine gas sensor volume is little, in light weight, particularly uses strong, the highly sensitive characteristics of its sensitive thin film selectivity, has compensated the more weak shortcoming of the interdigital microelectrode sensor output signal in plane.
Description of drawings
Fig. 1-LB film gas transducer synoptic diagram
Among the figure: 1-substrate, 2-sensitive thin film, 3-microelectrode, 4-power supply, 5-reometer.
Embodiment
The present invention will be further described below in conjunction with drawings and Examples.
As shown in Figure 1, technical scheme of the present invention mainly is made up of substrate 1, sensitive thin film 2, microelectrode 3, power supply 4, reometer 5.
When hydrazine gas acts on sensitive membrane 2, cause sensitive thin film 2 changes in resistance.Under the 100V voltage that power supply 4 provides, measure electric current by 10 by reometer
-9A increases to 10
-8A, this is that explanation detects hydrazine gas.
Claims (5)
1, a kind of dithia cyclopentadiene complex LB film that is used for anhydrous hydrazine detection comprises sensitive thin film, substrate, microelectrode, power supply, reometer; It is characterized in that annexation is: on substrate of glass 3, etch microelectrode Al electrode 1 by masking method, utilize the method for unimolecular layer transfer membrane that sensitive thin film 2 is covered on the microelectrode Al electrode 1, simultaneously also contact power supply, 1 one-tenth series relationship of reometer and microelectrode with substrate of glass.
2, a kind of dithia cyclopentadiene complex LB film that is used for anhydrous hydrazine detection according to claim 1 is characterized in that: sensitive thin film adopts dithiole complex compound (BDN) LB film.
3, a kind of dithia cyclopentadiene complex LB film that is used for anhydrous hydrazine detection according to claim 1 is characterized in that: substrate adopts the bright and clean degree glass or the quartz glass on surface.
4, a kind of dithia cyclopentadiene complex LB film that is used for anhydrous hydrazine detection according to claim 1 is characterized in that: microelectrode adopts thickness 250-350nm, 50 microns microelectrode width, ohmic contact resistance minimum metal Al.
5, a kind of dithia cyclopentadiene complex LB film that is used for anhydrous hydrazine detection according to claim 1 is characterized in that: power supply: be output as 0～200V; Reometer: sensitivity is 10
-10A.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103046420A CN101470092A (en) | 2007-12-28 | 2007-12-28 | LB film gas transducer for anhydrous hydrazine detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007103046420A CN101470092A (en) | 2007-12-28 | 2007-12-28 | LB film gas transducer for anhydrous hydrazine detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101470092A true CN101470092A (en) | 2009-07-01 |
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ID=40827759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007103046420A Pending CN101470092A (en) | 2007-12-28 | 2007-12-28 | LB film gas transducer for anhydrous hydrazine detection |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968393A (en) * | 2010-08-31 | 2011-02-09 | 北京航天凯恩化工科技有限公司 | Monitoring device for detecting leakage of hydrazine gas and using method thereof |
| CN103900945A (en) * | 2014-03-24 | 2014-07-02 | 江苏苏净集团有限公司 | Micro particulate matter 2.5 (PM2.5) detection sensor |
| CN104181212A (en) * | 2014-04-15 | 2014-12-03 | 西北大学 | Electrochemical sensor for detecting hydrazine hydrate, and its application |
| CN112730537A (en) * | 2020-12-22 | 2021-04-30 | 杭州未名信科科技有限公司 | Capacitance type hydrogen sensor and preparation method thereof |
-
2007
- 2007-12-28 CN CNA2007103046420A patent/CN101470092A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968393A (en) * | 2010-08-31 | 2011-02-09 | 北京航天凯恩化工科技有限公司 | Monitoring device for detecting leakage of hydrazine gas and using method thereof |
| CN101968393B (en) * | 2010-08-31 | 2012-05-23 | 北京航天凯恩化工科技有限公司 | Monitoring device for detecting leakage of hydrazine gas and using method thereof |
| CN103900945A (en) * | 2014-03-24 | 2014-07-02 | 江苏苏净集团有限公司 | Micro particulate matter 2.5 (PM2.5) detection sensor |
| CN104181212A (en) * | 2014-04-15 | 2014-12-03 | 西北大学 | Electrochemical sensor for detecting hydrazine hydrate, and its application |
| CN104181212B (en) * | 2014-04-15 | 2016-09-14 | 西北大学 | A kind of electrochemical sensor for hydrazine hydrate detection and application thereof |
| CN112730537A (en) * | 2020-12-22 | 2021-04-30 | 杭州未名信科科技有限公司 | Capacitance type hydrogen sensor and preparation method thereof |
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Application publication date: 20090701 |