CN101470074A - Mems光谱气敏传感器 - Google Patents
Mems光谱气敏传感器 Download PDFInfo
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- CN101470074A CN101470074A CN 200710303888 CN200710303888A CN101470074A CN 101470074 A CN101470074 A CN 101470074A CN 200710303888 CN200710303888 CN 200710303888 CN 200710303888 A CN200710303888 A CN 200710303888A CN 101470074 A CN101470074 A CN 101470074A
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CN 200710303888 CN101470074B (zh) | 2007-12-26 | 2007-12-26 | Mems光谱气敏传感器 |
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CN 200710303888 CN101470074B (zh) | 2007-12-26 | 2007-12-26 | Mems光谱气敏传感器 |
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CN101470074A true CN101470074A (zh) | 2009-07-01 |
CN101470074B CN101470074B (zh) | 2010-08-18 |
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CN 200710303888 Expired - Fee Related CN101470074B (zh) | 2007-12-26 | 2007-12-26 | Mems光谱气敏传感器 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102213673A (zh) * | 2010-04-09 | 2011-10-12 | 中国科学院微电子研究所 | 一种mems红外发射式气敏传感器 |
WO2011130933A1 (zh) * | 2010-04-23 | 2011-10-27 | 浙江大学 | 一种长期连续监测液体浓度的光学检测方法及其装置 |
CN102235969A (zh) * | 2010-04-21 | 2011-11-09 | 中国科学院微电子研究所 | 多通道滤波阵列mems光谱式气敏传感器 |
CN103776818A (zh) * | 2013-12-26 | 2014-05-07 | 四川大学 | 基于辉光放电的等离子体发生装置及构成的光谱检测系统 |
CN104655576A (zh) * | 2015-02-09 | 2015-05-27 | 上海安允科技有限公司 | 基于后向散射回光的自由状态气体参数远程测量方法 |
CN106153548A (zh) * | 2015-03-27 | 2016-11-23 | 英飞凌科技股份有限公司 | 气体传感器 |
CN108088955A (zh) * | 2017-11-30 | 2018-05-29 | 苏州慧闻纳米科技有限公司 | 一种抗干扰气体传感器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1684285A (zh) * | 2004-04-16 | 2005-10-19 | 中国科学院电子学研究所 | 微结构气敏传感器阵列芯片及其制备方法 |
CN100507477C (zh) * | 2007-03-23 | 2009-07-01 | 江苏英特神斯科技有限公司 | 一种基于微电子机械系统技术的微型光谱仪 |
-
2007
- 2007-12-26 CN CN 200710303888 patent/CN101470074B/zh not_active Expired - Fee Related
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102213673A (zh) * | 2010-04-09 | 2011-10-12 | 中国科学院微电子研究所 | 一种mems红外发射式气敏传感器 |
CN102213673B (zh) * | 2010-04-09 | 2013-03-20 | 中国科学院微电子研究所 | 一种mems红外发射式气敏传感器 |
CN102235969A (zh) * | 2010-04-21 | 2011-11-09 | 中国科学院微电子研究所 | 多通道滤波阵列mems光谱式气敏传感器 |
WO2011130933A1 (zh) * | 2010-04-23 | 2011-10-27 | 浙江大学 | 一种长期连续监测液体浓度的光学检测方法及其装置 |
CN103776818B (zh) * | 2013-12-26 | 2016-06-08 | 四川大学 | 基于辉光放电的等离子体发生装置及构成的光谱检测系统 |
CN103776818A (zh) * | 2013-12-26 | 2014-05-07 | 四川大学 | 基于辉光放电的等离子体发生装置及构成的光谱检测系统 |
CN104655576A (zh) * | 2015-02-09 | 2015-05-27 | 上海安允科技有限公司 | 基于后向散射回光的自由状态气体参数远程测量方法 |
CN104655576B (zh) * | 2015-02-09 | 2017-06-13 | 上海安允科技有限公司 | 基于后向散射回光的自由状态气体参数远程测量方法 |
CN106153548A (zh) * | 2015-03-27 | 2016-11-23 | 英飞凌科技股份有限公司 | 气体传感器 |
US10365208B2 (en) | 2015-03-27 | 2019-07-30 | Infineon Technologies Ag | Gas sensor |
CN106153548B (zh) * | 2015-03-27 | 2020-01-10 | 英飞凌科技股份有限公司 | 气体传感器 |
US10753858B2 (en) | 2015-03-27 | 2020-08-25 | Infineon Technologies Ag | Wafer arrangement |
CN108088955A (zh) * | 2017-11-30 | 2018-05-29 | 苏州慧闻纳米科技有限公司 | 一种抗干扰气体传感器 |
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Publication number | Publication date |
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CN101470074B (zh) | 2010-08-18 |
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