CN101461025B - Vaporizer - Google Patents

Abstract

A vaporizer unit, that heats solid feed material, especially material comprising cluster molecules for semiconductor manufacture, to a temperature that produces vapor to be ionized, has efficient construction and numerous effective safety features. The heater is located in a detachable top closure member, and serves to maintain a valve in the top closure member at temperature higher than the temperature to which the solid material is heated. The top section is a heat distributor to an interface with the bottom section, the side and bottom walls of the bottom distributing heat received from the interface to surfaces of the cavity exposed to the feed material. Locking, access-preventing and effective use of mechanical and electronic coding provide safety. Borane, decarborane, carbon clusters and other large molecules are vaporized for ion implantation. Such vaporizers cooperating with novel vapor delivery systems and with ion sources are shown.

Description

Vaporizer

The cross reference of related application

The application's case is entering China (PRC) country's stage of international application PCT/US2007/070900 number of on June 11st, 2007 application; International application is advocated the U.S. Provisional Patent Application case the 60/804th of application on June 12nd, 2006 PCT/US2007/070900 number; No. 555 priority and rights and interests; The priority that No. the 60/860th, 631, the U.S. Provisional Patent Application case of the 60/804th, No. 555 opinion of U.S. Provisional Patent Application case application on November 11st, 2006.

Technical field

The present invention relates to produce steam and send it in the steam receiving system in the high-vacuum chamber.The invention still further relates to ionizable steam is sent to the high-voltage ion source, said high-voltage ion source is provided at and is used for the ion beam that ion is implanted in the manufacturing of semiconductor device and material.The invention particularly relates to is used to vaporize forms the system and method for material of the molecular ion of a plurality of atoms contain related substances with ionization.

Background technology

In industry, usually need the high toxicity loose material of vapor form be sent to device or the backing material in the high vacuum system.Being necessary periodically provides service so that carry out the cleaning or the replacement of part to said device, and is necessary to recharge or replaces vapour source and carry out maintenance service.Recharge at every turn or serve and all need separate and mesh vacuum seal again, and need carry out again characterization test to guarantee fail safe.

Instance with particular importance that the said steam of many strict demands transmits is for handling the dopant material that is used to make semiconductor device.In this case, be necessary to produce vapor stream with precisely controlled flow by the high toxicity solid material that at room temperature has low-steam pressure.This needs careful heat solid producing distillation and to need handled steam, this be since exist in the flow process dissociate, the risk of improper condensation and the risk that when contacting, has steam reaction with other material.Also need be in order to guarantee the equipment of personal security property.Need be used for the improved system that said steam transmits.

Particularly, the steam that need be used for the improvement of ion beam implant system transmits, and wherein the steam in ion sourceization produces ion beam, and said ion beam is through acceleration, quality analysis and be transported to target substrate.For said ionizing system, especially need satisfy all requirements, prolong up duration (being the time between the required service) simultaneously.The advantageous manner of this measure is the assembly that the system that uses high response reagent is provided Original positionCleaning, but this can introduce other safety worries.

Also need safety and reliable steam transfer system, said system can use same equipment together with the many different source materials with different vapourizing temperatures.

In addition, need a kind of from available from the transmission of supplier's the feed-in material mode that is connected for steam receiving system of progress effectively and safely with the vaporizer that loads the feed-in material.Preferably implement this operation, to guarantee personnel's familiarity with standardized way.

In said situation, decaborane and 18 borine vapor streams and carborane vapor stream are offered ion source have all aforementioned needs with the situation of generation boron implant to be suitable for carrying out flow that ion beam implants.

Generally speaking, the said needs of same appearance when being provided for the macromolecular vapor stream of semiconductor manufacturing.Instance comprises the vapor stream of following molecule: the big molecule that is used for the n type doping of (for example) arsenic and phosphorus; The big molecule that is used for the carbon of common implantation process, the wherein diffusion of the carbon dopant that suppresses to be implanted, or absorb (intercepting and capturing) impurity, or the lattice of decrystallized substrate; Big molecule or other molecule of carbon that is used for the what is called " stress engineering " (for example,, or use crystal to nmos pass transistor and stretch) of crystal structure to PMOS transistor application crystal compression; With the big molecule that is used for other purpose (being included in heat budget and the minimizing of improper diffusion during the annealing steps that semiconductor makes).

These need be applicable to the embodiment that uses ion beam to implant, and under situation about being suitable for, also are applicable to boron and are used for ald or produce the layer of other type or the big molecule deposition of sedimental other material.For example, the technology that is used for this operation can be used: plasma immersion, it comprises PLAD (plasma doping), PPLAD (pulsed plasma doping) and PI ³(plasma immersion ion implantation); Ald (ALD); Or chemical vapor deposition (CVD).

In the manufacturing of computer chip, computer storage, flat-panel monitor, photovoltaic device and other products, needs of just having described the and existing aspect of describing of the present invention is applied in Semiconductor substrate, make high-density semiconductor device (comprising CMOS and nmos pass transistor and memory IC) with the shallow degree of depth importantly.

Other program in the industry (relate to the generation of steam or process gas and send it to steam or the gas consumption device) can benefit from the characteristic that this paper appears equally.

Summary of the invention

One side of the present invention is a kind of vaporizer unit; It has heater and warp is constructed to contain solid feed-in material and said solid feed-in material is heated to the temperature that Ionized steam is treated in generation; Said vaporizer unit is through constructing with vertical hanging and comprising the tank body with solid reception volume and can unload the top closing feature; Said top closing feature defines the installation surface of erecting bed place jar and allows steam to flow to the valve of erecting bed from jar; The heater of solid material of tank body of wherein being used for vaporizing is arranged in and can unloads the top closing feature, and maintains under the temperature of the heating-up temperature that is higher than solid material in order to the valve with said top closing feature.

Embodiment can have one or more characteristics in the following characteristic.

Valve comprises heat conduction aluminium and concerns with the conduction heat transfer with heater to be settled, and maintains under the temperature of the temperature that is higher than the solid material of being vaporized with the steam passage that will pass through valve.

Vaporizer has the single heating district, and it comprises one or more heating elements of being installed by the top closing feature.

Heater is included in the cartridge heater in the container in the closing feature of top.

But be used for installing the unloaded securing member and the combination of manual operation closing device of vaporizer at the erecting bed place; Said closing device has the make position that prevents that steam from flowing from vaporizer; Said closing device with prevent approaching apparatus associated; Said approaching device preventing staff the unloaded securing member near the vaporizer of being installed when said closing device is not in the close position that prevents uses preventing that when unloading vaporizer toxicity steam from flowing from vaporizer.

Can unload securing member comprise can with erecting bed fixing screw or the pattern of nut of related cooperation accessory engagement; And prevent that approaching device from comprising and the interdependent mobile approaching cover plate that prevents of the parts of closing device; Said cover plate is through constructing and being configured to make it possible near fixing screw or nut, so that only when closing device is in make position, dismantle vaporizer.

Spring-loaded pneumatic operable valve is installed on the vaporizer, flow from vaporizer to allow steam, and closing device is mechanical override, said mechanical override through structure not consider that existing of Pneumatic pressure is pushed to make position with pneumatic operable valve.

Vaporizer comprises normally closed pneumatic operated valve; Said normally closed pneumatic operated valve is used to respond the vaporizer control system and controls the vapor stream from vaporizer; And to pneumatic connection; Can with vaporizer be connected to erecting bed related compressed-air actuated path, said erecting bed has and is suitable for the sealing surfaces that cooperates with the corresponding sealing surfaces of vaporizer, depends on the mode that corresponding sealing surfaces is sealed with the compressed-air actuated abundant connection that is used to open pneumatic operated valve; Each sealing surfaces is opened around being used for vapor stream and being used for the port of compressed air, use preventing that pneumatic operated valve from can flow under the situation in the atmosphere at steam.

Vaporizer is through being configured to arrange in pairs or groups through structure to use with system that one group of different vaporizer that carry different solid feed-in materials uses together; Said vaporizer has the characteristic physical features of its inclusion of expression; Said physical features is suitable for coming identification by identification system, makes the vaporizer control system can be being suitable for operate under the condition of the inclusion of the vaporizer of identification.

Vaporizer carries one or more switch actuators with unique pattern of the special-purpose inclusion that depends on vaporizer and forms thing (switch actuator formation), but said formation thing is suitable for interacting with the identification system that comprises one group of actuation switch.

Vaporizer comprises one group of vaporizer, and this group vaporizer is exclusively used in the different solid feed-in materials with different vapourizing temperatures and the different qualities physical features that is used for identification respectively.

A vaporizer in said group is exclusively used in decaborane and another vaporizer is exclusively used in 18 borines.

A vaporizer in said group is exclusively used in borine, and another vaporizer in said group is exclusively used in carborane.

Vaporizer has temperature limit switch, said temperature limit switch through be set at be in more than the normal vapourizing temperature and vaporizer the safe temperature below the dangerous temperature of special-purpose solid material out of the ordinary.

A vaporizer in said group is exclusively used in decaborane and another vaporizer is exclusively used in 18 borines, and the setting of the temperature of said limit switch is respectively about 50C and 140C.

Another aspect of the invention is a kind of heating vaporizer unit; It can under reduced pressure be operated with vaporization feed-in material and to another device steam is provided; Said vaporizer unit comprises bottom zone, the reception of feed-in material, the vaporization cavity with sidewall and base wall (being defined by its inner surface); With define removable closure and be used for steam is sent to from said unit the top region of the steam passage of another device; Through constructing to mesh at the interface in steam packing (vapor-tight), wherein the top region of vaporizer jar unit and bottom zone all comprise heat-conducting metal when assembling for said top region and bottom zone, and resistance heater is arranged in top region; Said top region is through structure and be configured to the heat distributor with the interface of bottom zone; Said interface is heat conduction, and it is suitable for transmitting heat to bottom zone with vaporization feed-in material, and the sidewall of bottom zone and base wall are through constructing will be assigned to the surface of the cavity that is exposed to the feed-in material from the heat that the interface was received; With heating and evaporation of materials when the quantity of material reduces, said unit through structure to set up cardinal principle forward thermal gradient from the higher temperature at the vapourizing temperature of the base wall of the bottom zone steam (vapor) outlet path place in the top region.

Embodiment in this respect can have one or more characteristics in the following characteristic:

At least, the bottom zone of vaporizer jar is through constructing with the shipping container as the feed-in material.

Heater in the top region of vaporizer comprises one group of cartridge heater element settling through the opening of the metal master of the top region that closely cooperates, and said cartridge heater element comprises unique thermal source of the material of the bottom zone that is used for vaporizing in fact.

Have the vaporized feed-in material in the cavity that resides at bottom zone, said material comprises the solid material that at room temperature has low-steam pressure.

But the vapour material comprise have boron, the molecule of a plurality of atoms of carbon, phosphorus or arsenic.

Solid material is decaborane (B ₁₀H ₁₄), said unit is about 5C through structure with the base wall of keeping bottom zone and the temperature difference between the steam (vapor) outlet path in the top region.

Solid material is decaborane (B ₁₀H ₁₄), said unit is associated with control system, said control system through structure with the base wall in heated base district in decaborane vaporization scope operating limit up to about 40C.

Solid material is decaborane (B ₁₀H ₁₄), said unit is associated with the excess temperature limit switch of the setting with about 50C, and said excess temperature limit switch is through being configured to safety device, in case the superheated of the top region of stop element.

Solid material is 18 borine (B ₁₈H ₂₂), said unit is about 10C through structure with the base wall of keeping bottom zone and the temperature difference between the steam (vapor) outlet path in the top region.

Solid material is 18 borine (B ₁₈H ₂₂), said unit is associated with control system, said control system through structure with the base wall of heated base unit in 18 borine vaporization scopes operating limit up to about 120C.

Solid material is 18 borine (B ₁₈H ₂₂), said unit is associated with the excess temperature limit switch of the setting with about 140C, and said excess temperature limit switch is through being configured to safety device, in case the superheated of the top region of stop element.

Solid material is a carborane.

Material is C ₂B ₁₀H ₁₂

Material is C ₄B ₁₂H ₂₂

The interface of module units is defined by vacuum seal; And be positioned at sealed external (closely contact is respectively by the metal surface that top region and bottom zone defined of unit); Fill by air with the metal surface of meshing, the main heat transfer path on the surface to the bottom zone of delimiting material reception, vaporization cavity from top region is provided by the part that meshes the interface of defining the metal surface from atmosphere owing to the micro-opened gap of the pressure of the microscopic defect in the match surface.

Top region and bottom zone are defining smooth in fact match surface at the interface; Said match surface is suppressed together by a large amount of mounting screws; Said bottom zone comprises the general cylindrical container, and said general cylindrical container has the sidewall of uniform thickness in fact.

Thermal detector is positioned at the base wall place of unit and is suitable for being connected with it, is supplied to the electric power of the heater in the top region with control, so that can be with the temperature maintenance of the base wall of unit at selected set point.

The electric signal conductor self-detector extends to the top region of unit and the interface between the bottom zone; Said top region and bottom zone in position carry coupling electric connector part, automatically are engaged with each other when gathering together with the match surface in top region and bottom zone.

The lip-deep of heat conducting wall of the recessed bottom zone of conductor extends upward in the groove.

The control of the loop temperature controller of the thermal detector at the base wall place of response unit is supplied to the electric power of the heater in the top region, so that can be with the temperature maintenance of unit bottom at selected set point.

Steam passage in the heating top region has through being exposed to receive from the cavity of vaporizing the steam receiving unit of steam, and initial part extends upward substantially, and then the steam translator unit to the cardinal principle horizontal expansion is crooked.

Heater comprises substantially the cartridge heater element that partial parallel ground extends that extends upward with steam passage; At least one cartridge heater element is positioned at each side of the horizontal expansion translator unit of steam passage; And at least one cartridge heater element is positioned at the side with the top region in the opposite direction of the horizontal expansion translator unit of path, and there is the heat conduction relation in said heating element with the surface of defining steam passage.

Allow the valve that steam flows from the unit to be present in the bending area of steam passage, there are the heat conduction relation in the surface of said valve and heater.

Said valve is the pneumatic bellows valve (bellows valve) of operating.

Be used for installing the unloaded securing member of said unit at the erecting bed place of another steam receiving system; But with the manual operation closing device; The closing device of said unit has the override bellows valve and prevents the make position that steam flows via steam passage; Said closing device with prevent approaching apparatus associated; Said approaching device preventing staff the unloaded securing member near the vaporizer of being installed when said closing device is not in the close position that prevents uses preventing that toxicity steam flows from said unit when unloading said unit.

Can unload securing member comprise can with erecting bed the pattern of fixing screw of related cooperation accessory engagement; And prevent that approaching device from comprising and the interdependent mobile approaching cover plate that prevents of the parts of closing device; Said cover plate is through constructing and being configured to make it possible near the fixing screw, so that only when closing device is in make position, dismantle said unit.

The translator unit of steam passage extends via outside laterally projecting thing, and said outside laterally projecting thing cooperates in the container in the pre-determined configurations of another steam receiving system through structure mutually.

Outside laterally projecting thing bearing the weight of unit, and is used as the supporter of unit through structure when protrusion meshes with container.

The end surface of outside laterally projecting thing is through constructing to come together to define sealing with the match surface of another steam receiving system.

To receive mounting screw, can screw to another device by said mounting screw through structure for the screw path, so that the match surface of end surface and another device offsets, seals and provide stability force thereby set up.

Another device is under the temperature different temperature that maintains with vaporizer unit, and wherein thermal insulation prevents between unit and another device, to carry out heat transmission via outside laterally projecting thing.

Thermal insulation comprises the insulating sleeve part around protrusion, and be placed in the end of protrusion with the wall of the steam reception path that defines the steam receiving system between the insulation end portion.

In order to implement to be electrically connected between unit and external control and the power circuit; Vaporizer unit carries the electric connector in the precalculated position; To mesh the matching connector in the precalculated position on another device, being dynamically connected certainly of connector realized through vaporizer unit moving on the direction of the container engagement that makes laterally projecting thing and another device in the precalculated position of the connector on the vaporizer unit.

Connector comprises Connection Element, and said Connection Element is used for compressed air is connected to the unit of the pneumatic operated valve that is used for actuating unit.

Outwards the protrusion of horizontal expansion has alignment surface, and said alignment surface is through the Matching Alignment surface of structure with the container of another device that slidably mates, thus the engagement of guidance unit and another device.

Vaporizer unit is used as transfer cask through structure on every side not exist under the heat-insulating situation, and during being used as vaporizer, is to be placed in the thermal insulation.

Another aspect of the invention is a kind of unit; Said unit is through being configured to heating release container or vaporizer to discharge or evaporation of materials; And gas that is discharged or steam are offered another device; Said unit defines the material receiving area that is suitable for by the resistive heater heats of unit; And define the gas or the steam passage that are used for gas or steam are sent to from the unit another device; Wherein the translator unit of steam passage extends via outside horizontal expansion protrusion; Said outside horizontal expansion protrusion cooperates in the container in the pre-determined configurations of gas or steam receiving system through structure mutually, and said laterally projecting thing is used as the supporter of unit through structure during with the container engagement with the weight of bearing the unit and when protrusion, and the end surface of protrusion is through constructing to come together to define sealing with the match surface of another device; And wherein in order to implement to be electrically connected between unit and external control and the power circuit; Said unit carries the electric connector in the precalculated position, and to mesh the matching connector in the precalculated position on another device, being dynamically connected certainly of connector realized through unit moving on the direction of the container engagement that makes laterally projecting thing and another device in the precalculated position of the connector on the said unit.

Embodiment in this respect of the present invention can have one or more characteristics in the following characteristic:

Said unit is through being configured to the transfer cask of material to be allocated or vaporization.

Outwards the horizontal expansion protrusion has alignment surface, and said alignment surface is through the Matching Alignment surface of structure with the container of another device that slidably mates, thus the engagement of guidance unit and another device.

Connector comprises Connection Element, and said Connection Element is used for compressed air is connected to the unit of the pneumatic operated valve that is used for actuating unit.

The pneumatic bellows valve of operating is settled along path.

Be provided for installing the unloaded securing member of said unit at another Unit Installation platform place; But with the manual operation closing device; The make position that the closing device of said unit has the override bellows valve and prevents to flow via path; Said closing device with prevent approaching apparatus associated; Said approaching device preventing staff the unloaded securing member near the unit installed when said closing device is not in the close position that prevents uses preventing that when unloading said unit poisonous gas or steam flow from said unit.

Can unload securing member comprise can with erecting bed the pattern of fixing screw of related cooperation accessory engagement; And prevent that approaching device from comprising and the interdependent mobile approaching cover plate that prevents of the parts of closing device; Said cover plate is through constructing and being configured to make it possible near the fixing screw, so that only when closing device is in make position, dismantle said unit.

To receive mounting screw, can screw to another device by said mounting screw through structure for the screw path, so that the match surface of end surface and another device offsets, seals and provide stability force thereby set up.

When another device under the temperature different temperature that maintains with the jar unit used, thermal insulation prevented between unit and another device, to carry out heat transmission.

(said vaporizer comprises that bottom zone, feed-in material with the sidewall that defined by inner surface and base wall receive, the vaporization cavity in the form of vaporizer; With define removable closure and be used for steam is sent to from the unit top region of the steam passage of another device), said top region and bottom zone when assembling through structure to mesh the outside horizontal expansion protrusion of giving prominence to from top region at the interface in steam packing.

Another aspect of the invention is a kind of vaporizer unit that is used for the solid material that uses through the steam receiving system that vacuumizes; Said unit has the bottom zone that defines solid reception boil-off volume; With the top region that defines closure; Said top unit and base unit comprise conductive metal; The heater that is used for vaporizer is positioned at the top separately and can unloads closed area, and it carries out the surface that heat conduction comes the in heated base district through the interface between leap top region and the bottom zone and via peripheral side wall that defines bottom zone and base wall.

Embodiment in this respect of the present invention can have one or more characteristics in the following characteristic:

Heater comprises the cartridge heater in the dimple that is installed in the metal top district.

Steam passage comprises axially extended inlet region and the valve in top region, and said cartridge heater comprises the elongated member that is parallel to inlet region and the other extension in the inlet region, and there is the heat conduction relation in said valve with it.

Another aspect of the present invention comprises a kind of system; Said system comprises the vaporizer with the combination of flow interface device; Said flow interface device defines and is used for the erecting bed that receives vaporizer removedly and be communicated with vaporizer, and interlock system has and prevents that toxicity steam accident flows to the structure in the atmosphere at the erecting bed place.

Embodiment in this respect of the present invention can have one or more characteristics in the following characteristic.

Vaporizer comprises the unloaded securing member that is used for installing at the erecting bed place vaporizer; But with the manual operation closing device; Said closing device has the make position that prevents that steam from flowing from vaporizer; Said closing device with prevent approaching apparatus associatedly, said approaching device preventing staff the unloaded securing member near the vaporizer of being installed when said closing device is not in the close position that prevents uses preventing that toxicity steam flows from vaporizer when unloading vaporizer.

Can unload securing member comprise can with erecting bed fixing screw or the pattern of nut of related cooperation accessory engagement; And prevent that approaching device from comprising and the interdependent mobile approaching cover plate that prevents of the parts of closing device; Said cover plate is through constructing and being configured to make it possible near fixing screw or nut, so that only when closing device is in make position, dismantle vaporizer.

Spring-loaded pneumatic operable valve is installed on the vaporizer, flow from vaporizer to allow steam, and closing device is mechanical override, said mechanical override through structure not consider that existing of Pneumatic pressure is pushed to make position with pneumatic operable valve.

Interface device is through constructing to use with a different set of vaporizer; Said vaporizer carries the different solid feed-in materials with different vapourizing temperatures; System comprises identification system; Said identification system is through the characteristic physical features of the vaporizer of the inclusion of the vaporizer that is configured to identification and representes to be installed, and makes under the condition of inclusion of vaporizer of vaporizer control system identification being suitable for and operate.

But identification system comprises the one group of actuation switch that when vaporizer is in the installation site, is exposed to vaporizer; Said switches set is suitable for and vaporizer cooperation, and said vaporizer carries one or more switch actuators with unique pattern of the inclusion that depends on vaporizer and forms thing.

Said system comprises an above vaporizer unit of one group, and said group vaporizer is exclusively used in and contains the different solid feed-in materials with different vapourizing temperatures respectively, and said vaporizer unit has the different qualities physical features that is used for identification.

Ion source is installed in the vacuum chamber, and the flow interface device is used for said ionogenic steam through structure with transmission.

Ion source is in the ion implanter system, with the ion that is provided for implanting.

Ion source offers ion the beamline that is used for implanting target substrate.

Another aspect of the present invention comprises in the aforementioned description vaporizer, vaporizer unit or the vaporizer system of any one, and it contains the solid feed-in material that can form the ionizable steam that comprises cluster molecule.

Another aspect of the present invention comprises in the aforementioned description vaporizer, vaporizer unit or the vaporizer system of any one, and its ion source with the steam that solid material produced that can the self-contained cluster molecule of ionization is combined.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind, and it contains and comprises C ₁₄H ₁₄, C ₁₆H ₁₀, C ₁₆H ₁₂, C ₁₆H ₂₀, C ₁₈H ₁₄Or C ₁₈H ₃₈Solid feed-in material.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind, and it contains the solid feed-in material that comprises the compound that is used for the doping of N type.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind, and it contains the solid feed-in material that comprises arsenic, phosphorus or antimony cluster compound.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind, and it contains solid feed-in material, and said solid feed-in material comprises can form A _nH _x ⁺Or A _nRH _x ⁺The arsenic of the ion of form or phosphorus compound, wherein n and x are integer, wherein n greater than 4 and x more than or equal to O, and A is As or P, and R is harmless to the ion implantation process for the molecule that do not contain phosphorus or arsenic and its.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind; It contains solid feed-in material, and said solid feed-in material comprises the phosphorus compound of the group that selects free phosphine (phosphane), organic phosphine and phosphide composition.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind, and it contains and comprises P ₇H ₇Solid feed-in material.

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind; It contains solid feed-in material; Said solid feed-in material comprises antimonial, and said antimonial comprises front three antimony (trimethylstibine).

Another aspect of the present invention comprises vaporizer, vaporizer unit or the vaporizer system of previous described any kind, and it contains and comprises S _b(CH ₃) C ₃Solid feed-in material.

Another aspect of the present invention comprises a kind of method of handling semiconductor device or material; It comprises, and vaporizer, vaporizer unit or the vaporizer system of any one produces cluster ion in the aforementioned description of use; With the said ion of use in processing, especially ion is implanted and the especially processing of ion beam implantation in order to comprise in said processing.

Illustrated the details of one or more embodiment of aforementioned characteristic at following accompanying drawing with in describing.Through describing with graphic and pass through claim, it is obvious that further feature of the present invention, target and advantage will become.

Description of drawings

Fig. 1 is that the steam that comprises external carburettor, the steam receiving system in high-vacuum chamber and the flow interface system between these assemblies transmits the schematic side elevation of configuration.

Figure 1A is the schematic side elevation that is applicable to the vaporizer in the system of Fig. 1.

Figure 1B is the end view of another vaporizer.Figure 1B also shows a part that receives support component (it can be the flow interface device of the flow interface device that is similar to Fig. 1) with the steam that receives and support vaporizer through locating.

Fig. 1 C shows the assembly of Figure 1B when working in coordination with the support vaporizer.

Fig. 1 D is the end view of embodiment of the vaporizer of Figure 1B and 1C, wherein show removable heat insulator chuck with phantom, and Fig. 1 E is the vertical cross-section via the vaporizer at vaporizer center.

Fig. 1 F is an end view, and Fig. 1 G vertical view of the bottom zone of vaporizer for this reason, and Fig. 1 H is the level cross-sectionn that the line 1H-1H in Fig. 1 E attendes the vaporizer of institute's intercepting.

Fig. 1 I is a diagram perspective drawing, wherein clip the heat transfer path in the part explanation vaporizer unit, and Fig. 1 J is the enlarged drawing of the part of Fig. 1 I.

Fig. 2 is the schematic face upwarding view of configuration with flow interface system of the flow interface system that is similar to Fig. 1, and said configuration is provided for supplying via common steam transfer path the erecting bed of two vaporizers of steam.

Fig. 3 has the flow interface system of the flow interface system that is similar to Fig. 2 and and the schematic, bottom view of the configuration of flow control and vaporizer heating system (optionally keeping from each the steam flow of wanting in two vaporizers through it) is arranged.

Fig. 4 is the schematic, bottom view of configuration with flow interface system of the flow interface system that is similar to Fig. 2, the mobile arresting stop of said configuration and responding property gas source and the common connection that prevents to flow.

Fig. 5 be flow interface system with the flow interface system that is similar to Fig. 1 (its be shown as with high-vacuum chamber in ion source become one) and have the schematic side elevation of the external reaction property clean air generator and the configuration of the mobile arresting stop that is communicated with altogether that prevents to flow.

Fig. 6 is the schematic face upwarding view of configuration with ion source system (it has the characteristic with Fig. 5 of the flow control of Fig. 3 and twin carburettor characteristics combination).

Fig. 6 A is the characteristic of implementing Fig. 6 and valve and the path illustrative diagram that comprises the purge gas configuration.

Fig. 7 is the view that is similar to Fig. 6, but shows two vaporizers of the type shown in the Figure 1B to 1E that is installed.Fig. 7 goes back the short-tube type valve that schematic presentation realizes once only selecting a steam passage.

Fig. 7 A is a vertical view, and Fig. 7 B is the level cross-sectionn figure of embodiment of the fluid delivery system of Fig. 7.

Fig. 7 C is the perspective view of closed system, and the cover cap that said closed system is opened in its explanation is with near being installed in two vaporizers in the said system.

Fig. 8 is the perspective view of obturator through the system of Fig. 7 C of removing.

Fig. 9 and 10 is for being applicable to the rightabout perspective view of the vaporizer in the fluid delivery system.

Figure 11 A to Figure 11 F is the figure of diverse location of the trip bolt of a succession of explanation pneumatic operated valve and manual override and vaporizer.

Figure 12 is the perspective view of outside of the vaporizer of Fig. 1 D and 1E; And Figure 12 A is the part vertical side view on the axis direction of connection features; Figure 12 B is the detail drawing of the group of the electrical connector pin shown in Figure 12 A; Figure 12 C is the vertical side view of vaporizer that is orthogonal to Figure 12 and Figure 12 A of the intercepting of Figure 12 institute, and Figure 12 D is the vertical view of vaporizer, and Figure 12 E is the perspective view of the machine screw of the base section that is assembled into vaporizer in order to the top section that cover cap is assembled into vaporizer with top section.

Figure 13 is the vertical cross-section view of the vaporizer of Fig. 1 D, and it also shows the part (vaporizer is installed in here) of flow interface device.

Figure 13 A for the projecting part that in steam receiving system (such as the steam receiving system of Figure 13), comprises vaporizer through supporting the disassembled schematic of the part that thermal insulation connects; And Figure 13 B shows the part through assembling, and Figure 13 C and 13D are respectively the projecting part of institute's intercepting shown in Figure 13 A and the end-view of circumference insulating element.

Figure 14 and 14A are the quadrature diagram vertical sectional view of vaporizer that attendes Figure 12 of institute's intercepting at the line 14-14 of Figure 12 D and 14A-14A, and bar and the relation that vaporizer is fastened to the horizontal screw of flow interface device of allowing opened in its displaying.

Figure 15-15D is a series of perspective views, and the vaporizer of its explanation dismounting Fig. 1 D and 1E is so that can be sent to the step that recharges before the client.

Figure 16 uses o-C in the vaporizer ₂B ₁₀H ₁₂The curve chart of the beam current-quality of the ion of solid feed-in material.It is according to preceding text by (Horsky) teaching of Bielski suddenly that system quoted and according to Fig. 5 and Fig. 7-8 by electron bombardment ionization generation.

Embodiment

Referring to Fig. 1, the flow interface device 10 of interface system is connected with high-vacuum chamber 20, and comprises the extension 9 that is positioned at the outside part 8 of vacuum chamber and is projected into vacuum chamber.Part 8 provides erecting bed 12, and at said erecting bed 12 places, external carburettor 14 is installed in airtight interface I place removedly.

Vaporizer 14 has the specific canister type, and said jar type has the reinforced bottom zone that contains the feed-in material that remains to be vaporized and removable top component.Top component is associated with the vaporizer heater of showing in 19 place diagrams.Interface system comprises control circuit for heater 33, and said control circuit for heater 33 controls are supplied to the electric power P of vaporizer heater (it is by feed-in material production steam) ₁₄ Steam flow 16 from vaporizer via interface I, via contiguous stop valve 15, extend in the interface device 10 via part 8 and extension 9 since then.Extension 9 is sealed to the shell of vacuum chamber 20 at vacuum-packed sealing 21 places.

Between the steam receiving system 22 in extension 9 and the high-vacuum chamber, form separable connection of sealing.This tie point is called interface I I.

Through this configuration, make under the situation of the not sealing 21 of the junction of the shell of Interference Flow interface device 10 and high-vacuum chamber 20, might carry out removing rapidly and serving of external carburettor 14 and steam receiving system 22.Although the mobile disconnection of carrying out repetition for steam receiving system 22 is carried out service at interface I I place be connected again, interface I I does not cause potential spillage risk owing to its position to the staff.On any degree that possibly leak, leakage part is delimited in high-vacuum chamber 20, and is removed with related effluent treatment system 25 by its vacuum pump.

In the preferred embodiment of system,, in high-vacuum chamber, implement to connect through the installation and moving of steam receiving system at interface I I place.In the instance of Fig. 1,, unloaded connection 23 places of sealing come erecting device 22 till being sealed on the surface of vacuum chamber 20 through moving along path A up to steam receiving system 22.When moving through this steam receiving system being installed, steam receiving system 22 is through constructing to mesh and sealing at interface I I place and extension 9.For instance, through making close-fitting surface coupling, can make the steam receiving system through constructing to form labyrinth type vacuum seal effectively.Similarly, under the situation of Interference Flow interface device not 10 and the sealing 21 of the shell of vacuum chamber 20, with the mode of the sealing that destroys interface I I place, through steam receiving system 22 being configured to and can removing from vacuum chamber along the relative motion of path A.

Referring to Fig. 1, in a preferred embodiment, flow interface device 10 contains the vaporizer of the different materials that remains to be vaporized with acceptance through structure once more.Each vaporizer all carries temperature sensor, comes the temperature T of sensing vaporizer through said temperature sensor ₁₄, and with temperature T ₁₄Send to the vaporizer control circuit for heater 33 of interface system.Although said temperature sensor is shown as the head temperature of sensing cell, can instead be located with near the temperature the bottom of sensing advantageously, maybe can keep watch on this two positions.Each vaporizer is exclusively used in specific source materials, and carries identifier device 30.Flow interface device 10 has additional device for identifying 32.Device for identifying 32 is with control signal C ₁₄Offer vaporizer control circuit for heater 33, this is responded, control circuit 33 is set up the safe temperature scope that is used to heat feed-in material out of the ordinary, and it comprises the upper limit that electric power is applied to the heater of specific carburettor.As an example, in a preferred embodiment, flow interface device 10 is exclusively used in the vaporizer 14 that contains decaborane and 18 borines respectively ' with 14 through structure with reception ".Said vaporizer carries significantly different recognition device 30.When vaporizer is installed on interface device 10, device for identifying 32 identification vaporizers 14 ' or 14 ", and control signal C out of the ordinary is provided ₁₄' or C ₁₄".In suitable embodiment, for example, the identification signal C that is triggered by the decaborane vaporizer ₁₄' control circuit for heater 33 is set at is used to the suitable heated perimeter of decaborane of vaporizing, and prevent the heating of the vaporizer that about 35C is above, and the identification signal C that is triggered by 18 borine vaporizers ₁₄" control circuit for heater 33 is set at is used to the suitable heated perimeter of 18 borines of vaporizing, and prevent the heating of the vaporizer that 135C is above.Other vaporizer that is exclusively used in other material carries other cognizable identifier, so that other temperature or other proper handling condition are set in the Interface Control unit.

In a preferred embodiment, flow interface device 10 comprises the heat conduction main body, and it for example forms part by the aluminium block that has cut and forms.When valve was installed, heat-conducting block was used as the valve body of said valve effectively.Vacuum seal steam path through main body extends to interface I I from interface I.Main body and the heater thermo-contact of showing in 11 place diagrams, it is controlled by circuit 13.Circuit 13 has the temperature input T from vaporizer 14 ₁₄With from the temperature input T of the conductive body of flow interface device 10 ₁₀ Circuit 13 is suitable for control heater 11, thereby conductive body is maintained under the controlled temperature, for example, and above but the temperature below safe temperature of the temperature that maintains vaporizer 14 out of the ordinary, for example, the temperature below the dissociation temperature of the respective material of being vaporized.

The heater of system can have various forms, for example, and the torch formula or the band heater of convention, and configurable in one or more thermals treatment zone.For instance, can advantageously exist and be used for vaporizer is heated to T ₁The thermal treatment zone 1, be used for the thermal treatment zone 2 of warming interface main body 10 and be used for the thermal treatment zone 3 of steam receiving system 22.The thermal treatment zone comprises heating element out of the ordinary and temperature sensor, and in a configuration, in the steam receiving system, along the path to interface I I from vaporizer, the temperature of the said thermal treatment zone is from T ₁Be increased to T ₂, i.e. T ₁＜T ₂＜T ₃, wherein all these equitemperatures all are limited to the following temperature T of safety margins of material to be vaporized ₃

Referring to Figure 1A, in a preferred embodiment, vaporizer is a jar, and it comprises as the thermal insulation tank body 14A of bottom zone and can unload top component 14B.Main body 14A has the volume of 1 liter of open top and (for example), and it is used for the reinforced of solid feed-in material that fixing treats to distil gradually.Can unload top component 14B and valve V1 is arranged.Top and bottom part (and preferred and said valve) comprise the for example Heat Conduction Material of aluminium.Valve is positioned at the main body 14B of top section, in fact valve is maintained under the body temperature thus.

Advantageously, the top component of electric heating carburetor unit only.Through via unloading engaging and, the solid material in the tank body is heated to main degree between top region and the bottom zone via the sidewall of bottom zone and the heat transmission of base wall (it is heated by the conduction from heater).In this way, guarantee the temperature T of the steam passage of process top component ₁The temperature that surpasses the solid source material that is just distilling.

As before mentioned, heater is positioned over (and making the reinforced bottom that is positioned at the unit of treating evaporation of materials under transformation temperature) possibly not be to appear to be good practice for the those skilled in the art in the unloaded top closed area of vaporizer jar unit.Can unload the thermal resistance at the interface between top region and the bottom zone and have distance and the slow degree of responding of the heat transfer of the thermal mass of being associated, and be transferred to outside thermal losses and will be revealed as improperly.Yet, find can to obtain remarkable advantage, and the situation of in suitable embodiment, finding perhaps to appear to be inherent defect is for avoiding or inessential through this configuration.

Suitably the instance of embodiment is explained in each figure that at present will describe.

Described system guarantees that the steam that is produced by material meets with the path that increases temperature, moves and moves to flow interface device 10 from producing point via valve V1 simultaneously, and move via flow interface device 10.Similarly, the part of the steam receiving system 22 before steam utilization point can define another thermal treatment zone, and the said thermal treatment zone is suitable for incrementally remaining on the above temperature of temperature of flow interface device 10.

Referring to Figure 1B and 1C, show that external carburettor 14 ' warp structure acts on the transmission jar that solid feed-in material is transported to its site to be vaporized from the supplier with same usefulness.Vaporizer jar 14 ' comprise the heat conduction main body, said heat conduction main body is formed by top closed area 14A ' with the heater that is suitable for evaporation of materials and the reinforced bottom zone 14B ' that contains the material that remains to be vaporized.Transversary protrusion 34 is outwards outstanding as pole bracket from a side (in this embodiment from top region 14A ') of vaporizer.Protrusion 34 is accepted in the coupling support vessels 35 of parts 36 through locating and being configured to be engaged to fixed steam, thereby the unit is being locked onto in the appropriate location before to its location.Protrusion 34 comes inside to define steam drive access 37 through the vapor volume V of jar.Support component 36 defines coupling steam passage 38, utilizes a little so that steam is transmitted to.Form the match surface of protrusion and container by structural material, only make and to come the weight of vertical support jar and its inclusion with fastening means through the engagement of said match surface with enough rigidity.This makes the skilled worker be able to free carry out fastening unit and other activity of accomplishing in the steam seal.

Therefore, after the supplier transmits, said vaporizer jar 14 is installed in fixed position that (wherein aiming at protrusion and container) reach Fig. 1 C through vaporizer jar 14 is moved right (arrow A).Except the power of providing support, also upper surface and the lower surface by container 35a and 35b (reversing of its eccentric support jar of opposing) produces the arrow t and the indicated moment of reaction (reactive moment) of t '.After like this assembling, fastener applies power F and sentences and be used for operation jar is locked in the appropriate location.Between the end surface of protrusion 34 and fit adjacent surface, the elasticity o ring is provided, the sealing that prevents steam leakage to be provided and to keep vacuum.In the illustrated embodiment, in the circular groove of the end surface 34a of protrusion 34, o ring 39 is provided.Under contractive condition, o ring 39 is outstanding towards support component; When protrusion was installed in the container fully, compression o ring 39 was to form desired sealing between abutment surface.

Such as after a while referring to Figure 13 A-D description, in reaching the preferred embodiment that heat isolates, it is terminal and have between the support component of additional seal that insulator is inserted protrusion.

Guide features is associated with the protrusion container combination, to guarantee that the vaporizer jar vertically is installed.In the embodiment of Figure 1B and 1C, protrusion 34 has circular lateral cross with container 35, but forms axially extended flat string shape surface, the match surface engagement of said surface and container 35 along the top of protrusion 34.In addition, see Figure 13 A-D.

In advantageous embodiment, assembly has the additional system that during the installation and moving of vaporizer jar, meshes, for example, and electricity and compressed air connected system and mechanical coding system.The guide features of being implemented by the flat guiding surface of firm description provides the aligned in general of these systems equally.

In the embodiment of Figure 1B and 1C, vaporizer is through electric heating, and said vaporizer comprises pneumatic operated valve and has the position and Temperature Detector.This need be connected electric power, compressed air and signal and is applied to the unit so that can operate.The support component 36 that receives steam from jar also carries air, electric power and the holding wire that is necessary.During jar mounted movable (arrow A), support component 36 is installed in the appropriate location with connector and cooperates with the complementary with the vaporizer jar.This explains in Figure 1B with being installed in the additional multipurpose connector 44 on the jar that through the multipurpose connector 43 that is installed on the support component 36 said two connectors mesh with the mounted movable A through jar through aiming at.For example, can buy said connector (shown in Figure 12 and the 12A) from Munich, Germany FCT electronics GmbH (FCT Electronic GmbH of Munich).

In addition, as under the situation of the vaporizer of Figure 1A, mechanical breakdown protection configuration is guaranteed and as one man the electric power of suitable degree is applied to vaporizer by the feed-in type of material that vaporizer carried.For this reason, support component 36 carries two sensitive switches 32 ' (switch is shown among Figure 1B).Jar have two correspondence positions, one or two position in said position, look jar coding indication and the fixed switch actuator of placing in a predefined manner of special-purpose specific feed-in material.Switch actuator 30 ' be showed among Figure 1B.The vaporizer jar to the guided-moving among the direction A of the assembling position of Fig. 1 C cause existing they's switch actuator 30 ' mesh and activate switch 32 out of the ordinary ', it is transferred to control system with existing feed-in type of material with signal; Thereby cause the control of the electric power of vaporizer, make with vapourizing temperature suitably be adjusted to vaporizer jar unit special-purpose selected feed-in material institute designed range.

Fig. 1 D-1H and Figure 12-12E and Figure 14 show the details of preferred embodiment of the vaporizer jar characteristic of firm description.This paper will describe these figure subsequently.Should give one's full attention at this: only the unloaded top region 14B of vaporizer jar " contains having heaters and drive access and inner valve; , and become one as the outstanding support protrusion 34 of pole bracket ' comprise rigidity aluminium from the vaporizer main body with the aluminium main body of the top section of jar; And by connector module 44 that jar carried ' be the multipurpose unit, it is provided for electric power A in a shell ₂, A ₃Connection of the signal of telecommunication (12 pins) and compressed air tube connector 50.Comprise directing pin 52, mobile to guarantee in the direction A of vaporizer jar to reach accurate aligning with cooperating module or support component after course alignment is provided at Figure 1B.

The vaporizer jar of Figure 1B and 1C fully is applicable to the system of the displaying of meaning property shown in Fig. 1., the similar graphic flow interface device that flow interface device and this paper of Fig. 1 describes is subsequently made amendment with the socket (female receptacle) that cooperation is provided for this reason, with receive support protrusion 34 '.

Existing plane graph referring to Fig. 2, the flow interface system has all characteristics (some characteristic is not showed) of the system of Fig. 1, and also defines a plurality of vaporizer erecting beds.Two erecting beds have been showed: platform 12A and 12B.

Indivedual flow process 16A and 16B partly extend via the length of the part 8 of interface device 10A from erecting bed 12A and 12B respectively.The X place merges at the junction point for path 16A and 16B.Common steam flow 16C extends to interface I I via the remainder of part 8A and via the extension 9 of interface device 10A, wherein steam is sent to device 22.Stop valve 15A in the device 10 and 15B are associated with indivedual flow process 16A and 16B.Indicated like connecting line 17, interlocked valve 15A and 15B.Implement this operation to guarantee the mode that before can opening each valve, must close another valve.This prevents to flow simultaneously according to path 16A and 16B.

Thereby flow interface device 10A is provided at closely connecing rapidly so that remove and serve two vaporizers under 21 the situation of being tightly connected of not disturbing interface device 10A and high-vacuum chamber 20; Flow interface device 10A allows a vaporizer is served or filled, and contains another vaporizer generation steam of identical sources material, and allows to use the vaporizer that two kinds of different materials are installed to selectivity.The heat of the remainder through vaporizer jar and system are provided at the interface I place is isolated, and the inertia unit can be cooled off, and makes that any reinforced of remaining material do not demoted in fact in the said unit.

Referring to Fig. 3, the flow interface system has all characteristics (some characteristic is not showed) of the system of Fig. 2.In addition, in co-route 16C, the flow interface device 10B of Fig. 3 also is included in volume control device or the choke valve 24 before the pressure monitor 26.These devices are connected with heater control device 28 with the flow of interface system.Control device 28 be used for vaporizer 14A out of the ordinary and be connected with P14B with heater power line P14A with T14B with the temperature sensing line T14A of 14B.The device for identifying 32A at erecting bed place and 32B and vaporizer 14A and the recognition device 30A on the 14B and the 30B that are exclusively used in specific source materials interact.Device for identifying is communicated to flow and heater control system 28 with the characteristic of vaporizer type, causes the latter to select the proper handling limit and suitable electric power is applied to vaporizer heater 19 out of the ordinary.

Volume control device 24 among the co-route C can comprise choke valve, such as the butterfly valve of the steam conductivity that changes path.Control system can be operated with the agreement described in patent application case WO 2005/060602 through structure; Said patent application case is disclosed on July 7th, 2005; " control is from flow (the Controlling theFlow of Vapors Sublimated from Solids) of the steam of solid distillation " by name, the full text of said application case is incorporated herein with way of reference.

Particularly, operate said choke valve with transmit the flow of being wanted look the steam that is just producing have wanted pressure and decided.It should be noted that under given carburettor temperature the quantity of steam that is produced (with therefore its pressure) is looked the feeding quantity of the feed-in material that remains in the appropriate location to vapourizing temperature to be heated and decided.For original reinforced the exhausting gradually of compensative material, the pressure that the control system sensing is transmitted and correspondingly increase the temperature of vaporization chamber.For vaporizer system, advantageously can tuner operation pressure and heating system with reach total system when being wanted usefulness, (and especially during starts) reached new temperature and do not had bigger delay during operation.

Single volume control device 24 (it is arranged in co-route 16C) can optionally be controlled the flow from two or more vaporizers at erecting bed out of the ordinary place.Through interlocking (comprise as the connection valve 15A described in Fig. 2 and the select location of 15B), anti-locking system heats simultaneously and transmits the steam from an above vaporizer.Selected vaporizer, device 10B and install 22 through structure to be heated to proper temperature, for example, T ₁＜T ₂＜T ₃, wherein all these equitemperatures all are limited to the temperature below the safety margins of the certain material in selected vaporizer.Therefore, guarantee in being applicable to the predetermined safe range of selecting the material in the vaporizer, to apply heating, and guarantee suitably control other condition relevant with said material.

Referring to Fig. 4, it shows a kind of system, and said system can have all characteristics (some characteristic is not showed) of the system of Fig. 2 or Fig. 3, and said system possesses reactive purge gas source 40, and it is communicated with path 42 in the part 8C of flow interface device 10C.The extension 9A of flow interface device is sealed on the wall of high-vacuum chamber 20A, and is projected in the chamber up to interface I I-A.Two independent flow processs that it is defined to steam receiving system 22A, be used for from the path 16C that flows of the steam of common steam path be used for the mobile parallel of reactive clean air but independent paths 42.Be formed at interface I I-A place removedly with corresponding path 22V and being tightly connected of 22G of steam receiving system 22A; Each can be formed by labyrinth sealing through being sent to the transmission ledge of the flow interface device in the vacuum chamber.Vacuum chamber 20A can contain the leakage from arbitrary sealing.

The interface device 10C of Fig. 4 comprises valve interlock 50, and said valve interlock 50 prevents that steam and reactive clean air from flowing to steam receiving system 22A simultaneously.In a preferred embodiment, this reaches through reversing slide valve, and said reversing slide valve guarantees before opening each path, to cut out fully another path.

Referring to Fig. 5, the adjusting of the generalized flowsheet of its exploded view 1, wherein the steam receiving system comprises high-voltage ion source 22B, and said high-voltage ion source has ionization chamber 90, and controlled vapor stream is introduced in the said ionization chamber 90 with ionization.Extract ion through the electrostatic attraction of extracting electrode and final energy assembly 94 via extracting hole 92 self-ionized chambers 90, to form ion beam 96.Said ion beam is directed into ion implanter terminal station (not shown) along beamline.The high-vacuum chamber of Fig. 5 comprises ion source vacuum casting 70, and it possesses high voltage insulator 62 (for example, the high voltage insulator of reinforced epoxy).Insulator 62 is isolated main vacuum casting parts 71 and high voltage terminal (ion source 22B and its steam feedthrough system being installed at this).High-voltage side at insulator 62 provides vacuum-packed installing ring 72.It is provided for receiving removedly the mounting flange 76 of ion source 22B and the end flange 74 that is sealed by mounting flange 76.Ion source extends axially in the vacuum chamber from mounting flange along axis A.As shown in Figure 5, the extension 9B of flow interface device 10D is sealed to installing ring 72 at the 21A place, and is projected in the high-vacuum chamber up to interface I I-B.This interface can receive removable ion source with the connection (for example, effectively forming the vacuum-packed surface that closely cooperates of labyrinth type) via effective formation sealing through the location.

The system of Fig. 5 can incorporate in each the ion implanter system shown in the open application case WO 2005/05994 expediently; Said open application case " prolongation equipment normally moves the method and apparatus that ion is implanted " (" Method andApparatus for Extending Equipment Uptime Ion Implantation ") by name; In this regard; The content of said application case is incorporated herein by reference, and it is incorporated degree into and just illustrates as this paper comprehensively.

Referring to Fig. 6, ion source and the steam transfer system that is similar to the system of Fig. 5 have all characteristics (some characteristic is not showed) of the system of Fig. 1-5. Solid vaporizer 14A and 14B to being used to produce ionizable steam define two erecting beds.System has so far described all interlocks and security feature and control system, and said control system is through constructing with the heating of controlling vaporizer and the flow that passes through interface device 10E.Ionizable gas source 100 with the pipeline 102 that is associated with interface system also is provided.Its some place in interlock 50 downstream is connected with gas passage 42A.Therefore, the downstream part of gas passage 42A alternatively be applicable to introduce be used to provide other dopant species at room temperature be the ionizable material of gas.When the mobile generation of ionizable steam or clean air, interlock (not shown) prevents ionizable source gas flow.

The flow performance of the sketch map indicator diagram 6 of Fig. 6 A is merged in the conductive block 120.The purge gas path of realizing purging said (for example, using argon) when heating said is also incorporated in the piece.This can remove the residue of toxicity or reactive steam before maintenance system or before the steam of introducing another material.As indicated among Fig. 6 A, this system is specific to be applicable to boron hydride steam B _x(for example, decaborane and 18 borines) offer the ion source 22B of ion implanter from the vaporizer bottle.

The system of schematic presentation identical with the system shown in Fig. 6 (except existing content) among Fig. 7 A with description.

A difference is to construct according to Figure 1B and 1C for the vaporizer jar, and its pole bracket protrusion by jar supports.In addition, form all connections of jar at the interface I place.This comprises the compressed air of the pneumatic operated valve in being used for the signal connector and being used to of signal that the electric power of vaporizer heating installation power supply connects, is used to send other parameter of temperature and vaporizer state controlled jar.

Be with another difference of Fig. 6, be similar to Fig. 6 A, in Fig. 7, interlocked valve V3 and V4 are provided to the steam passage of two vaporizers.In Fig. 7, realize interlocking by valve element V3 and V4 (it is the part that is similar to the spool valve of employed spool valve 50 among Fig. 6).Characteristic by shown in Fig. 7 A, 7B and Figure 13 is implemented the stream processing system together with the purge gas characteristic.

Fig. 7 A-7C has showed the embodiment of all characteristics of the so far described flow interface device of combination.The flow interface device that is the heat conduction main body form that comprises valve piece 130 is installed in the installation of ion source 22B and removes the path A below.Valve piece 130 defines the vaporizer 132 that is used for the heating tank form and two erecting beds of 134, and said erecting bed hangs on the flow interface device through the installation features of incorporating in its top region.Valve piece 130 has the indivedual flow passages from these erecting beds, and said flow passage is merged into the co-channel that is directed in the high-vacuum chamber.

In the valve piece 130 and cartridge heater and valve arranged, its safety of carrying out about before respectively scheming described heater and valve heats and controlled function with stream.Shell 140 transmits assembly around this, and has and can open so that approaching cover cap (comprising vaporizer cover cap 142).Support said shell by the pin that comprises high voltage insulator.Therefore, whole system is suitable for maintaining under the ionogenic high voltage potential.

Referring to Fig. 9-11D, vaporizer unit 132 has heater through showing, and through structure with contain solid feed-in material (such as, decaborane or 18 borines) and said material be heated to produce the temperature of treating Ionized steam.As under the situation of the unit of Figure 1A, vaporizer unit comprises and has solid and receive the tank body 132A of volume (about a liter usually) and can unload top closing feature 132B.Its through structure with at suitable erecting bed place from the top closing feature 132B vertical hanging.For this reason, top closing feature 132B defines vertical installation surface 133, to mate with the corresponding surface of erecting bed.Top component 132B also and the valve 137 that allows steam to flow to erecting bed from jar arranged.Top component 132B is formed by Heat Conduction Material (for example, aluminium).

The heater of this vaporizer preferably comprises the cartridge heater element 136 that formed container among the top component 132B is closed in an assembly.Important ground, finding to be arranged in this heater that can unload top component provides enough heat to come suitably to make the solid vaporization.Through the position of heater, heater maintains under the temperature of the heating-up temperature that is higher than solid material in order to the valve with the top closing feature.Advantageously, therefore the main body of valve 137 comprises heat conduction aluminium, and concerns arrangement via the aluminium top component with the conduction heat transfer with heater, maintaining under the heter temperature in fact through the steam passage of valve.

In a preferred embodiment, only there is a controlled heat district that is used for vaporizer.

Also will describe currently preferred embodiments (the vaporizer jar shown in Fig. 1 D-1E) in detail at present referring to Figure 12-12E, 13 and 14.

Referring to each figure, the main body of vaporizer jar comprises two aluminium flake: bottom zone 14A " with top region 14B ".Suitably the cover cap 14C of plastic cement " covers the top of assembly.

Base section 14A " defines the boil-off volume V that is used to solid material to be vaporized.Top section 14B " have be used to receive three vertically extending heater caskets 13 ' dimple 136.Said lock and top aluminum portions 14B " closely cooperate, and make top section can carry out hot distribution function, with heating far-end solid feed-in material.This mainly through via remove the interface transfer heat to the bottom aluminum portions wall (it follows heat solid feed-in material) take place.Less important mode with through the direct radiation solid material from the top is replenished this heating.

Fig. 1 E (vertical cross-section), Fig. 1 F (end view) and Fig. 1 G (vertical view) have showed the aluminium bottom zone 14A of the reinforced vaporization cavity V that is resided that defines material ".Fig. 1 H has showed the upwards horizontal flat installation surface S of guiding.Said horizontal flat installation surface S through sizing with contain having heaters and define the corresponding installation surface engagement of aluminium top region of the steam drive access of removable closure and unit.Said figure shows the main radial dimension r on the heat-conducting metal surface that o ring groove G and the o ring among the installation surface S of bottom zone is outside ₁And the minor dimension on the surface of o ring inside.These surfaces upwards are exposed to receive the metal surface of the same size of top region.For instance, as passing through the radial dimension r that o ring is outside ₁With radial thickness r along the cross section of the round metal cylindricality wall of the height of vaporization cavity V _tCompare show (Fig. 1 F), in the area of heat transfer at installation interface place in fact greater than the level cross-sectionn area of heat transfer of the wall of delimiting vaporization cavity V.Thickness increases up to the intilted wall section of making progress of installation surface 14t provides two heat between the cross section to transmit transition, makes that said generally unit has relatively low thermal mass, and the heat that has substantial dimensional is simultaneously transmitted the interface.The top region of vaporizer jar unit and the interface between the bottom zone are owing to some complicated cooperation provides effective heat transfer path.It is attributable to the thermal resistance of the microscopic defect in the matching surface than the large tracts of land skew; Complexed metal surface (is horizontal planar surface at this) is closely promoted together with contacting of metal to compressed metal simultaneously, to reduce micro-open space and improvement thermo-contact.At this, apply compression stress (seeing Figure 15 B) through one group of removable mounting screw.This is replenished; G is outside because the major metal surface is positioned at the o ring sealing; So the gap at the micro-blemish place of matching surface is filled with the air from atmosphere, thereby the fluid heat transmission medium in the micro-gap of the heat transference efficiency that promotes the interface is provided.

The reinforced heat transfer path of far-end of the solid feed-in material in the vaporization cavity V from the interface has been showed in diagram in Fig. 1 I.Indicated like arrow, cross over the heat that flows at the interface and on all sides of unit, advance downwards.Every bit place under the unit, heat also inwardly flows to the surface (seeing Fig. 1 J) of delimiting the vaporization cavity.Hot-fluid move inward that speed depends on the feed-in material reinforced to absorption rate from the heat in said zone.At the reinforced each point place that directly contacts cavity wall of solid that quantity reduces, inwardly the speed of hot-fluid increases (by dark, inward-pointing arrow indication) greatly.The heat of the bottom of arrival sidewall is via the thickness t of base wall _bInside Radial Flow, wherein heat gain is moved upwards up to the surface of the bottom of delimiting the vaporization cavity with the speed based on the heat absorption that realizes through the contact solid material.Therefore, the cool region of unit in this preferred embodiment, is located the RTD transducer that is used to control the heater of installing at the top (as shown in) near said central area reliably in the central area of base wall.

The reinforced major part vaporization of feed-in material betides in the zone that said material is direct and wall meshes or near the said zone.The poor of the relatively poor thermo-contact between the powder of solid feed-in material and (in some instance) solid matter self hinders the excellent heat transfer via bulk material.The supplemental heat transmission is through taking place from the transfer of radiant heat of the heating upper surface of unit and the convection effect through heating steam.

Through making up these characteristics, find that along with reinforced consumption the heater that is arranged in the top region of vaporizer jar can produce the effective vaporization reinforced to the lower region far-end.Find that said structure has enough low thermal mass, the feasible acceptable quick balance that can occur to design temperature.When the operator adjusted parameter with the operation of initial or tuning total system, this allowed the sufficiently rapid change of suitable operation and temperature setting.

Particularly; Find that said unit is applicable to choke valve (butterfly valve) the steam flow control device 24 based on pressure; Wherein along with the reinforced consumption of feed-in material, must increase gradually vapourizing temperature with the pressure of keeping the choke valve upper reaches (referring to Fig. 3,6 and 7 and associated description).

In addition and very importantlyly; Referring to Fig. 1 H, can vapor condensation and unfavorable sedimental accumulation have been prevented from the bottom to the positive temperature gradient at top through what this heat was transmitted unit that configuration obtains at steam valve V1 (being arranged in the transition position to bottom horizontal flow sheet) and steam drive access 37 (entry 37A and horizontal transmission path 37B make progress) from vertical.These characteristics are positioned at the position (further describing like this paper) near heater on strategy, wherein temperature is higher than the reinforced temperature of material in the bottom of far-end vaporization cavity V reliably.

Top section 14B " comprises that also integrating pole bracket supports protrusion 34 ' and define the steam (vapor) outlet path.Get on very well more in detail, define rising path 37A by the vertical tubular cover plate that ends at horizontal valve seat place.Horizontal steam passage 37B then from valve extend through pole bracket protrusion 34 '.Top section 14B " holds the part that pneumatic bellows valve (V1 among Fig. 6 A or V2) and this paper will combine " opening permission " mechanism that Figure 14 and 14A further describe." carry central screw, said central screw makes " opening permission " mechanism between " locking " and " opening permission " position, move when rotating to cover cap 14C.Come fastening cover cap 14C " (referring to Figure 15 and 15A) by other special trip bolt.

If some feed-in material is dealt with improperly, will have danger.Possibly attempt to dismantle the misgivings of vaporizer jar unit from deconditioned personnel; Use has the special trip bolt (Figure 12 F and sequence chart 15-15D) of 5 side heads with on top section 14B " is fastened to base section 14A ", and on top cap 14E " is fastened to top section 14B ".Locate to implement this operation the supplier of feed-in material, the right top region that said supplier takes extra precaution to guarantee to use to have the coding of the specific feed-in material of just supplying in Tc limit switch and the bottom zone to indicate equally.

The following following further feature of the preferred embodiment of key-drawing 1D-1H in more detail:

1. The heater casket

Form the top closed area 14B of vaporizer jar unit " in the resistance heater casket 136A of heater have about 10cm highly and the cylinder form of 0.8cm diameter.Each heater casket prolongs the closed main body 14B in aluminium top in fact " entire depth.Cutting well 136 in the aluminium main body is opened at the top with insertion has close-fitting heater casket, and opens slightly to realize the air ventilation during inserting in the bottom.Shown in Fig. 1 E and 1H, outward radial location, the position heater casket of the o ring G of self sealss top region 14A " with bottom zone 14B ".Therefore, the base section of heater casket is located immediately at be exposed to substantially in to fill the radius r of the microscopic defect in the matching surface with air ₁The part top of main hot interface portion.Fig. 1 H and 1K showed this aluminium main body and cartridge heater and main body and with relation via the steam passage of Subject Extension.The parallel axes of the vertical air inlet district 37A of the axis of heater and steam passage.Horizontal steam transmits the between the two extension of district 37B in said heater casket, and the 3rd heater casket is positioned at the relative side (seeing Fig. 1 H) in position that transmits the district with the steam of path simultaneously.Thus, on the shorter heat transfer path of the aluminium main body of passing through top region, come the heating steam path through direct conduction from heater.

For example, can buy the cartridge heater of suitable type from German T ü rk & Hillinger.Can in valve piece flow interface device 10, use similar cartridge heater.

2. Thermal detector

For example, being arranged in the suitable RTD (resistance-type thermal detector) of other position of bottom and the system of vaporizer jar unit can be available from Switzerland temperature control system company (Thermocontrol).Come at the interface the connector C of the signal conductive wire L of transducer since then at the bottom zone 14A of vaporizer jar unit " a side direction on extend to and top region 14B " _RTDTotal mounting screw hole of the top region of unit is aimed at the mounting screw hole of bottom zone receiving mounting screw, thereby with the matching connector lateral alignment of this connector and top region.The matching connector C that the connector that is used in detector circuit moves down into bottom zone that moves down with the alignment of top district of bottom zone engagement _RTDOn.The elastic compliance that is provided in the connector makes it possible in the end fixed, top district and bottom zone completion electrical connection before.Said biddability then makes top region can move down another increment, simultaneously through closely tightening to bottom zone.

3. The groove of the conductive wire of detector

Shown in Fig. 1 E and Figure 12, the horizontal path groove that is used for conductor L is recessed to the thickness of sidewall in fact.This makes it possible to (for example) and during the processing as the unit that transmits jar, protects electric conductor.Although more recessed, because groove is narrow, so groove is not incorporated into cavity wall with remarkable cold spot.Say that the heat transmission in the bottom zone is mainly downward from top region, hot-fluid distributes around the cylindrical wall of constant thickness in fact equably with explaining.In order to heat the narrow with respect to the cavity surface of groove location, laterally heat transfer path is extended from the bilateral from the groove of the neighbouring part of full depth wall.Because shorter,, and the relative less resistance that essential heat is transmitted is provided so these heat transfer path that narrow gradually provide minimum heat needs.Therefore, find the essence lateral balance of occurrence temperature, and the temperature of the cavity surface in the grooved area is consistent with the remainder of wall in fact.In addition, groove is in fact to the positive temperature gradient did not influence of vertical direction.

4. The excess temperature switch

Excess temperature switch 165 in the power circuit of the heater shown in Figure 12 B " has the thermocouple type of knowing, and is positioned at the top region of unit.The function of excess temperature switch is the sensing local temperature, and protection vaporizer jar avoids superheated (in case making the heater energising through the heating system fault of regulating).Excess temperature switch direct sensing top region 14B " temperature, and presetting under the temperature electric power that interrupts offering heater, the said temperature that presets is to select according to the specific feed-in material of filling said unit.When correction causes superheated deviation, can reset switch through in general manner promoting button.

5. Operating temperature

In an example, can the top through regulating temperature range of the RTD temperature sensor of being controlled by the far-end thermal control units be set at about B ₁₀H ₁₄40C and about B ₁₈H ₂₂120C, and, can the excess temperature limit switch in the top of vaporizer jar unit be set at about B for an instance ₁₀H ₁₄The 50C of vaporizer jar and about B ₁₈H ₂₂The 140C of vaporizer jar.Use similar temperature to set with other feed-in material, particular value is looked the vaporization character of selected materials and is decided.According to the thermal design of unit, in the operating period of vaporizer jar, the bottom of vaporizer jar to the top positive thermal gradient for B ₁₀H ₁₄Can be about 5C (for example, it can hang down and reach 3C) and for B ₁₈H ₂₂Can be about 10C.

6. Temperature isolation with the steam receiving system

(in some instance) during operation will be maintained under the high temperature of ratio vapourization device by the steam receiving system of vaporizer jar institute feed-in.Block and prevent the thermophoresis to the vaporizer jar through introducing essence heat from the steam receiving system.

Heat is blocked and is prevented that heat from getting into and disturbing the thermal control system (if or the cold steam receiving system of operation ratio vapourization device, prevent that so heat from getting into and disturb the steam receiving system from vaporizer) of vaporizer jar unit from the steam receiving system.In addition, because the existence that this heat is blocked, the vaporizer jar unit of being installed can be operated although continue under the temperature of steam receiving system after switching to another vaporizer unit through deenergizing and its external heat insulation cooling relatively apace after removing.Therefore, although the steam receiving system is in the continuation heated condition, the skilled worker can handle through the vaporizer jar unit that deenergizes to remove and to replace at once.Perhaps, can cooling unit be stayed the appropriate position, and the essence heat drop level of reinforced any remainder of feed-in material does not take place.

In a preferred embodiment, the heat that provides at the interface that directly transmits the container of protrusion and steam receiving system at the steam of vaporizer jar is blocked.In graphic preferred embodiment, block district and circumference heat by tip forward heat and block to distinguish and form this heat and block.An embodiment who in Fig. 1 D, has showed this characteristic.

7. Dielectric features

Tip forward heat is blocked

The tip forward heat of the preferred embodiment shown in Fig. 1 D is blocked and is positioned at the end that horizontal steam transmits protrusion.In this embodiment, tip forward heat is blocked and is had heat insulator packing ring TB _eForm.Insulating washer is to be placed in the end surface of protrusion and to receive between the relative interior abutment surface at interior extremity place of support vessels of protrusion.Said packing ring is sealed to these surfaces in its side out of the ordinary through o ring out of the ordinary.In the current decision design of Figure 13 A and 13B, packing ring TB _eThe part that keeps the container assembly of steam receiving system.Through being screwed to the mounting screw of the vaporizer jar in the steam receiving system, end surface and insulating washer are promoted together.Packing ring has rigid material and realizes that the vaporizer jar is connected with the stable of steam receiving system.In a preferred embodiment, packing ring has the axial width of about 4mm, and comprises the PEEK resin.

Steam transmits the circumference heat of protrusion and blocks and support

Transmit at the steam of vaporizer jar unit and form this heat around the cylindrical peripheral of protrusion and block TB _cCoupling cylindrical parts through the wear-resisting rigid resin of rigidity thermal insulation provides this heat to block TB _c, in one embodiment, said heat is blocked TB _cComprise the molded of epoxylite (Araldite) NU resin.In the embodiment shown in Figure 13 B, with circumference heat insulator TB _cAnchor to the steam receiving system, and it is constructed so that it receives and support protrusion slidably, and receive and support whole vaporizer jar unit thus.The vertical orientations that provides guiding surface to guarantee the vaporizer jar, the grappling of container simultaneously prevents its angular displacement.Preferably, accomplish guiding through the slidably guiding surface that matees on the said matable assembly.In the specific embodiment shown in Figure 13 A-D, guiding surface G _sSmooth formation thing for the outside and cylindrical heat insulator of protrusion inner (guiding surface slides into wherein).Transmit protrusion and the guiding surface (when the latter gathers) that cooperates container through steam, will be used for being electrically connected the coupling composite connector of being installed on the vaporizer jar that is connected with compressed air and the steam receiving system and be directed to initial the contact.

Except defining heat blocks, cylindrical insulating element also offers steam with rigid support and transmits protrusion, and offers vaporizer jar unit thus.Such as before about Figure 1B and 1C description, this installation is provided for stablizing the reaction torque and the support force of the eccentric weight of vaporizer jar unit.

In another embodiment, integrate tip forward insulated part and circumferential section molded.

8. main electric connector

Referring to Figure 12 A and 12B, using composite connector to connect all must function, for example electric power, the signal of telecommunication and compressed air.As before mentioned, can buy said connector from Munich, Germany FCT electronics GmbH (FCT Electrical GmbH ofMunich).

9. the connector pin is assigned

Referring to Figure 12 B, the appointment of connector pin is following:

To sell A2 and be connected to high voltage with A3 and be connected, alternating current is offered three heater caskets being connected in parallel to define heater.

Pin 3,4,5 is connected to the RTD temperature sensor of unit bottom, so that the dc signal from transducer (two high voltages lead-in wire that is connected to the RTD transducer of repeatedly showing) to be provided.

Pin 7,8 is that the signal that is connected to the sensitive switch of the top region that is arranged in vaporizer jar unit connects, and it is used to detect the position that prevents approaching bar of manual closing device.Sensitive switch reads opens the position, top (extraction) that allows mechanism, representes that said mechanism is outside the route of the opereating specification of the pneumatic operated valve that is used to control steam flow.Therefore, the closure of switch is indicated pneumatic operated valve proper handling freely.

The open and close position of pin 10,11 and 12 indication pneumatic operated valve V1, pin 10 is a common terminal, and sells 11 and 12 and assign the open and close position respectively.Pin 1 and 2 is for can be used for other sensing function spare part of (such as, the feed-in type of material in the electrical representation unit).

10. compressed air connects

The sub-connector part that will be used for being electrically connected together with compressed air connector tube 51 (it carries the o ring that is used to seal) incorporate into the composite connector 44 shown in Figure 12 '.Directing pin 52 also is provided, and it is used to guide the last engagement of the matching connector on composite connector and the steam receiving system.

11. automatic coupler engagement

Like previous description,, transmit the guiding surface G of protrusion when steam owing to install with coordination mode _sWhen getting into the coupling container on its steam receiving system, through said guiding surface G _sThe directing pin 52 of composite connector and the coarse alignment of its container are provided.The action of the wedge shape directing pin 52 through connector self provides more accurately aiming at of all functions pin (electric power, the signal of telecommunication, compressed air) and the hole that receives said function pin.Between two connectors, provide axial elasticity to be obedient to; When blocking packing ring and abutment surface propelling steam transmission protrusion with the heat in the container that is butted on the steam receiving system at the tension mounting screw mutually; At first make said connector can implement to connect, and the further increment that allows steam to transmit protrusion move.

12. As transmitting jar

The vaporizer jar has the structure of reinforcing, and wherein all functions part is being protected during transmitting jar.Protectiveness plastic cover (not shown) is sticked in the laterally projecting thing, to protect its surface.In currently preferred embodiment, be provided for the thermal insulation that vaporizer is operated with removable chuck form, and when the said unit of transportation transmitted the feed-in material, said thermal insulation was not followed said unit.

13. Safety system

Vaporizer unit comprises safety system, and said safety system is through constructing to prevent that toxicity steam accident is discharged into the atmosphere when installing or remove.Top component 132B comprises hand gear and is used for installing at the erecting bed place the unloaded securing member of vaporizer unit.Hand gear has the make position (as preventing outwards to flow as valve through the override valve or with himself) that is used for closed vaporizer unit.Said hand gear with prevent apparatus associated, said device preventing staff the unloaded securing member near the vaporizer installed when said hand-operated valve is not in its make position that prevents.Therefore, guarantee closed vaporizer jar before detachable apparatus, thereby prevent that toxicity steam from leaking from vaporizer.

Referring to Figure 10 and 11A-11F; In preferred version; Vaporizer comprises through structure with the pneumatic operation valve 137 by the control of operating system far-end; With screw thread manual override (closing device) 139, and can unload securing member, the said securing member that unloads comprises a pair of hold-down screw 141 that vaporizer is installed at the erecting bed place that is used for the piece at the interface.Override 139 has the downward make position that prevents that steam from flowing from vaporizer.Closing device is associated with preventing approaching mechanism 143; The said approaching mechanism 143 that prevents prevents staff's unloaded trip bolt 141 near the vaporizer of being installed when said closing device is not in this make position, uses preventing that toxicity steam flows from said vaporizer when unloading said vaporizer.In a preferred form; Prevent that approaching device from comprising and interdependent mobile the preventing near cover plate of the parts of closing device; Said cover plate is through constructing and being configured to make it possible near fixing screw (or nut); So that only dismounting vaporizer when said closing device is in make position is seen Figure 11 B, 11D and 11F.

In the illustrated form; Vaporizer has spring-loaded pneumatic operable valve 137; It is through installing to allow steam to flow from vaporizer; And said closing device is mechanical override, and said mechanical override is through constructing not consider that existing of Pneumatic pressure is pushed to make position with said pneumatic operable valve.In a preferred embodiment, said valve is spring-loaded normally closed pneumatic operated valve, and to pneumatic connection, can said valve be connected to be used for the compressed-air actuated path that is associated with erecting bed.Referring to Figure 1A and 9; The corresponding sealing surfaces of the sealing surfaces of interface device and vaporizer has sealing, and said sealing depends on that with the compressed-air actuated abundant connection that is used to open pneumatic operated valve mode that corresponding sealing surfaces is sealed together is around being used for vapor stream and the port that is used for compressed air.This prevents that said pneumatic operated valve from can flow under the condition in the atmosphere at steam and opens.

Vaporizer is used for and uses together to be exclusively used in the interface system that the different vaporizers that carry different solid feed-in materials use with one group through structure through adjusting.Said vaporizer possesses the characteristic physical features of its special-purpose inclusion of expression, and said physical features is suitable for coming identification by the identification system of interface device, makes the vaporizer control system can be being suitable for operate under the condition of the inclusion of identification vaporizer.In a preferred form, vaporizer carries one or more sensitive switch actuators with unique pattern of the special-purpose inclusion that depends on vaporizer and forms thing, and said formation thing is suitable for and comprises one group of identification system that can activate sensitive switch and interact.Therefore, said vaporizer comprises one group of vaporizer with other vaporizer, and said group of vaporizer is exclusively used in the different solid feed-in materials with different vapourizing temperatures and the different qualities physical features that is used for identification respectively.For instance, a vaporizer in said group is exclusively used in decaborane and another vaporizer is exclusively used in 18 borines.

In a preferred form, vaporizer has temperature limit switch, said temperature limit switch through be set at be in more than the normal vapourizing temperature and vaporizer the safe temperature below the dangerous temperature of special-purpose solid material out of the ordinary.

Described system be applicable to by (such as) decaborane (B ₁₀H ₁₄) and 18 borine (B ₁₈H ₂₂) big molecule boron hydride (B _Xx) come the safe manufacturing ion beam.Known these materials comprise chemical hazard property.For instance:

Boron hydride (B ₁₀H ₁₄, B ₁₈H ₂₂If) be exposed to NF ₃In, will produce the shock-sensitive compound so.Said sensitive compound possibly explode, thereby causes the badly damaged and potential human loss of equipment.

B ₁₀H ₁₄To under rising to the situation that has oxygen when being higher than 60 ℃ temperature, light.

B ₁₈H ₂₂To under rising to the situation that has oxygen when being higher than 180 ℃ temperature, light.

B ₁₀H ₁₄And B ₁₈H ₂₂It at room temperature is solid and very big to human toxicity.Said material is easily via skin absorbs.Should prevent exposure to skin.

Exist some kinds to seem possible condition, through said condition, the improper operation of vaporizer or remove and replace and can cause with NF ₃Be pressurized in the boron hydride vaporizer.This condition can cause the blast of boron hydride material.

Equipment described above with B _XxMaterial has when using together and prevents or make the dangerous minimized characteristic to personnel and equipment.

Such as description, the system of Fig. 7 has two gas transfer sources, from the gas of reactive purge gas source and boron hydride from the steam transfer system.Mechanical connection is with NF ₃/ F and B _XxBe sent to ionogenic isolating valve V7 and V8 (for example, realizing), make never to allow this two gas stream interconnections through the spool valve unit.

Such as displaying, the boron hydride transfer system has two vaporizer bottles (jar).These bottles allow to transmit B ₁₀H ₁₄Or B ₁₈H ₂₂And need not near high-voltage region.Select the type of bottle according to the semiconductor technology prescription by operator.Following characteristic has been eliminated and has been transmitted and safeguarded the danger that (bottle replacement) is associated with steam.

The vaporizer bottle has one or two series connection, redundancy, one or integrated excess temperature cut-out switch SW 1 and SW2.These switches can be non-ly to be reseted type or launches the type of manually reseting.For being exclusively used in B ₁₀H ₁₄Bottle, the switch set point of one or more switches is 50 ℃, and for B ₁₈H ₂₂, set point is 140 ℃.This safety cut-off will prevent B _XxIf reach through improper operation and introduce the temperature that oxygen just possibly blasted.The temperature controller of vaporizer departs from about 20% margin of safety and heats said vaporizer through being configured to setting from the vaporizer limit switch.In an example, the top allowable temperature in opereating specification is 40C for decaborane, and is 120C for 18 borines.

The steam transfer system of Fig. 6 A has the purging ability that is similar to the technology that is used for the poisonous gas case.Valve V1 on the bottle or V2 are through constructing to be operated at far-end.Can be at the closed said valve of far-end to isolate the vaporizer bottle.Interlocking vaporizer selector valve V3 and V4 (for example the form with the spool valve unit realizes) isolate steam transfer path and bottle.Between bottle isolating valve and vaporizer selector valve, form gas cavity.This gas cavity will contain B _XxSteam.Before bottle removes, through suitable activated valve V5 or V6, come the said cavity of cycle purge with argon, to eliminate the B of any trace via common pipeline 16C _XxSteam.

The vaporizer bottle of having described has many characteristics: the bottle isolating valve has far-end pneumatic operation device and manual station, sees Figure 13-13F.Manual station has two positions: open permission and closed.The pneumatic operation device must be through pressurization opening, and after discharging Pneumatic pressure, promptly come closed through the spring return.Cross over the bottle interface at erecting bed place, forced air is piped to this actuator.Must bottle suitably be fixed in the interface, valve be opened to allow the actuation air pressurization.The hand-operated valve operator interlocked to is used for bottle is anchored on the fastener at erecting bed place, make can the hand-operated valve operator be reset be positioned at open allow the position before, must bottle be fastened to (that is cover plate and loose trip bolt conflict) on the interface fully.Like this design vaporizer bottle, therefore only when the closed bottle of manual locking isolating valve, said bottle just is removable.These characteristics guarantee that the inclusion of bottle never can be exposed in the environment.

14. The feed-in material

A. use

Generally speaking, any material of the flow in the 1sccm scope all is a candidate material providing at least under the temperature between about 20C and the 150C, and it is used for vaporizer unit and uses with the steam transfer system according to above-mentioned principles of construction.

The embodiment of vaporizer and steam transfer system that has proved specific description is for decaborane and 18 borine vapor streams and carborane vapor stream are offered ion source coming boron implant (it reaches decrystallized degree) effective for especially being suitable for carrying out flow that ion beam implants.

Said principle more generally is applicable to the macromolecular vapor stream of the many descriptions in the extensive application that is provided at the semiconductor manufacturing.Instance comprises the vapor stream of following molecule: the big molecule that is used for the n type doping of (for example) arsenic and phosphorus; The big molecule that is used for the carbon of common implantation process, the wherein diffusion of the carbon dopant that suppresses to be implanted, or absorb (intercepting and capturing) impurity, or the lattice of decrystallized substrate; Big molecule or other molecule of carbon that is used for the what is called " stress engineering " (for example,, or use crystal to nmos pass transistor and stretch) of crystal structure to PMOS transistor application crystal compression; With the big molecule that is used for other purpose (being included in heat budget and the minimizing of improper diffusion during the annealing steps that semiconductor makes).The said principle of proof is applicable to borine, carbon bunch, carborane, front three antimony (that is Sb (CH3) C3), arsenic and phosphate material and other material in the laboratory.

Said principle is applicable to the embodiment in the ion beam implant system; And be applicable to boron and be used for ald or produce the layer of other type or the system of the big molecule deposition of sedimental other material; For example; Through plasma immersion, its (for example) comprises PLAD (plasma doping), PPLAD (pulsed plasma doping) and PI ³(plasma immersion ion implantation), ald (ALD) or chemical vapor deposition (CVD).

B. the feed-in material (general introduction) that is used for cluster ion source

Be applicable to that effective implantation contains the molecular ion such as a plurality of atoms of the electrical dopant material of element B, P, As, Sb and In (being arranged in the either side of the IV family element of periodic table C, Si, Ge and Sn); And be equally applicable to effectively implant the molecular ion that contains such as a plurality of atoms of the element of C, Si or Ge, said element is applicable to and revises Semiconductor substrate (for example) is decrystallized to carry out, diffuse dopants control, stress engineering or defective are absorbed.Said molecular ion has the integrated circuit of 60nm and littler critical dimension applicable to manufacturing.Hereinafter, said ion will be called jointly " bunch " ion.

The Chemical composition that of unicharged cluster ion has following general formula:

M _mD _nR _xH _y ⁺ (1)，

Wherein M is the atom that is applicable to the material upgrading of substrate, such as C, Si or Ge; D is the foreign atom that is used for electric charge carrier is implanted substrate, such as B, P, As, Sb or In (from the III or the IV family of periodic table); R is free radical, dentate or molecule; And H is a hydrogen atom.Usually, R or H are rendered as the part that produces or form the required complete chemical constitution of stabilizing ion simply, and are not specific needs for implantation process.Generally speaking, H is significantly unharmful for implantation process.R is significantly unharmful for implantation process yet.For instance, with not needing R to contain metallic atom such as Fe, or such as the atom of Br.In above equality, m, n, x and y all are the integer more than or equal to zero, and wherein the summation of m and n is more than or equal to two, i.e. m+n >=2.In ion was implanted, special concern had the cluster ion (being the cluster ion of m+n >=4) of high M and/or D atom multiplicity, and this is because low-yield, the improvement efficient that high dose is implanted of said cluster ion.

The cluster ion of instance for deriving in abutting connection with phenyl ring certainly that can be used for the cluster ion of material upgrading is such as C ₇H _y ⁺, C ₁₄H _y ⁺, C ₁₆H _y ⁺And C ₁₈H _y ⁺The instance of the cluster ion that can be used for mixing is:

Boron hydride ion: B ₁₈H _y ⁺, B ₁₀H _y ⁺

Carborane ion: C ₂B ₁₀H _y ⁺And C ₄B ₁₈H _y ⁺

Phosphoreted hydrogen ion: P ₇H _y ⁺, P ₅(SiH ₃) ₅ ⁺, P ₇(SiCH ₃) ₃ ⁺

Hydride of arsenic ion: As ₅(SiH ₃) ₅ ⁺, As ₇(SiCH ₃) ₃ ⁺

The those skilled in the art can understand the possibility of use cluster ion the listed cluster ion in above instance; Said cluster ion comprises: contain the Si and the ion of Ge, the different isotopic ions with it of dopant atom with different amounts and the ion with different isomerization structure that are useful on the material upgrading.In addition, the double charge cluster ion generally forms with significantly less yield, and in said situation, said cluster ion also is not suitable for high dose, low-energy implantation.

For instance, at United States Patent (USP) the 6th, 452, No. 338 with No. the 6th, 686,595, United States Patent (USP) in described about bunch implantation of decaborane and the method for cluster ion source by Bielski people such as (Horsky) suddenly, said patent is incorporated herein with way of reference.In people's such as Bielski suddenly patent application co-pending the 10/251st, No. 491 (through being disclosed as patent application U.S.2004/0002202A1 number), disclosed B ₁₈H _x ⁺Be used to make the purposes of PMOS device, said application case is incorporated herein with way of reference.

C. big carborane molecule

Explained in the document that these contain the character of boron material and its ion, referring to for example Vasyukova, N.I. is [by IzvestiyaAkademii Nauk SSSR; Seriya Khimicheskaya translation, A.N.Neseyanov Institute ofHeteroorganic Compounds, the Soviet Union academy of sciences (Academy of Sciences of the USSR); Moscow (Moscow); The 6th phase, 1337-1340 page or leaf, in June, 1985; Original text is presented on March 13rd, 1984, PlenumPublishing company].

Successfully vaporize and ionization cluster molecule o-C ₂B ₁₀H ₁₂, referring to Figure 16.Under about 42C, can obtain good vapor stream.C ₄B ₁₈H ₂₂It also is suitable material.

D. the big molecule of carbon

Generally speaking, implant than free carbon in the useful situation at all, any have a C _nH _yThe hydrocarbon of the chemical formula of form (wherein n>=4 and y>=0) all will increase effective carbon dose rate in silicon, and the decrystallized of intensity of variation is provided.Fluoranthene (Fluoranthene) C ₁₆H ₁₀Under the temperature of 100C, vaporize, it preferably is suitable in electron impact ion source, using.Its vapourizing temperature is similar to B ₁₈H ₂₂Vapourizing temperature.0.5mA beam current the equivalent of the carbon of 8mA can be implanted on the wafer with extremely low-yield (making an appointment with each carbon atom 1keV).Simple realization is greater than the ion beam current of 1mA.Other carbon clustered materials also is what be suitable for.For instance, can the following hydrocarbon of potential use:

2,6 diisopropyl naphthalene (C ₁₆H ₂₀);

N-vaccenic acid (C ₁₈H ₃₈);

P-terphenyl (C ₁₈H ₁₄);

Bibenzyl (C ₁₄H ₁₄);

1-phenylnaphthalene (C ₁₆H ₁₂).

E. be used for the big molecule that the N type mixes

As, P and Sb are N type dopant, i.e. " donor ".

For Sb, front three antimony (trimethylstibine) is good big molecule candidate feed-in material, for example Sb (CH ₃) C ₃

For As and P, said ion has A _nH _x ⁺Or A _nRH _x ⁺Form, wherein n and x are integer, wherein n greater than 4 and x more than or equal to 0, and A is As or P, and R is not for containing the molecule of phosphorus or arsenic, it is harmless to implantation process.

The chemical property of phosphorus-containing compound

Compound phosphine, organic phosphine and phosphide are regarded as the potential source that is used for group's bunch phosphorus molecule and is used for the follow-up ion of N type doping.Instance comprises (1) phosphine, for example phosphine in heptan (Heptaphosphane) P ₇H ₃And encircle penta phosphine (Cyclopentaphosphane) P ₅H ₅, (2) organic phosphine, for example tetra-tert six phosphines (Tetra-tertbutylhexaphosphane) tBu ₄P ₆, pentamethyl seven phosphines (Pentamethylheptaphosphane) Me ₅P ₇, (3) phosphide for example gathers phosphide: Ba ₃P ₁₄, Sr ₃P ₁₄, or single phosphide: Li ₃P ₇, Na ₃P ₇, K ₃P ₇, Rb ₃P ₇, Cs ₃P ₇

Cyclic phosphines is revealed as the most effectively source of the dopant group bunch that helps ionization and follow-up implantation, wherein heptan phosphine P ₇H ₃Be revealed as maximum potential with the simple group bunch source that is provided for the ion beam implantation.

At P _n H _x And P _n RH _x Substitute P with As in the compound

The phosphorus containg substances that theorizes directly substitutes phosphorus atoms with permission with arsenic with the support synthetic technology, thereby forms the material of similar arsenic, and this is because the similarity of outside shell electron configuration and the similar chemical reactivity of being showed with gang's element.The molecule forecasting software also indicates arsenic to substitute the similarity of phosphorus.As ₇H ₃Institute's predictive molecule structure almost with P ₇H ₃Identical, wherein difference is limited to the individual atom radius of phosphorus and arsenic.P ₇H ₃And As ₇H ₃Route of synthesis be similar and interchangeable.In addition, because Si and H are harmless to formed device on the Silicon Wafer, so compd A s ₇(SiH ₃) ₃And As ₅(SiH ₃) ₅Very attractive, and through being predicted as stable compound.

In addition, can allow to be independent of mode that residue molecular structure R selective removal contains the part of phosphorus or arsenic allocates and is A _nRH _xThe material of form.This characteristic can be in order to increase the degree of safe transport, because therefore the less volatilization of misfit thing feed-in material more is not subject to the emission influence than pure component.Surplus material can be stayed in the transport box, and in the normal circulation operation " reinforced again ".In addition, the R molecular moiety can be removed, abandon or recirculation before the material that contains the target dopant, so that the margin of safety of increase to be provided during carrying.The route of synthesis of developing many organo-metallic compounds is by abundant record and known in this technology.

Relevant other contains As and contains P-compound

Except (P/As) ₆In hexatomic ring outside, also obtained five-membered ring, wherein R=Me, Et, Pr, Ph, CF ₃, SiH ₃, GeH ₃, and four-membered ring appears, wherein R=CF ₃, Ph (Green's Wood (N.N.Greenwood); E Enxiao (A.Earnshaw), element chemistry (Chemistry of the Elements), the Bart fertile now with extra large Niemann Co., Ltd (Butterworth and Heinemann Ltd); 1984, the 637-697 page or leaf).Therefore, so institute is known in the technology, and the hydride of carbonyl and silicon can directly exchange.In addition, also discerned phosphatization silicon: Si ₁₂P ₅This material is regarded as the ultra shallow joint formation that the utmost point is applicable to halogen and S/D extension, and is applicable to that also the polycrystalline grid mix.Si ₁₂P ₅Quality be about 491amu.Therefore, can carry out extremely shallow implantation by this compound.In addition, pre-amorphous because Si was used for routinely before conduction N type drain extension is implanted, so Si ₁₂P ₅Implant will carry out decrystallized from body.Maybe be with the harmful end-of-range defects that does not exist implantation thus to be produced, this is because silicon will have identical with the P atom approximately range, this will damage and keep extremely shallow.Because said defective is easy to be diffused into the surface when burying in oblivion, so but the utmost point effectively with said annealing of defects.

F. the group of vaporizer and discharge container unit

As it is before indicated; In a preferred form; A unit of described one group of vaporizer (or through constructing to be used as transfer cask and to be used as a unit that adds heat vapourizer or discharge one group of vaporizer of container) is exclusively used in a kind of feed-in material and writes code about said feed-in material, and another unit is exclusively used in another feed-in material and writes code about said another feed-in material.Such as vaporizer or discharge container code read institute's checking automatically, set control system, safety cut-off and other parameter that is used for steam transmission heater according to the feed-in material of selecting.In a kind of situation, said material is decaborane, 18 borines and one or more selected carboranes.In another kind of situation, from above basis on hand the material discerned of task select the feed-in material.Each unit all can be incorporated temperature limit switch into, and said temperature limit switch is in more than the normal vapourizing temperature and the safe temperature below the dangerous temperature of the respective material in the unit through being set at.

In important condition; The unit of one group of vaporizer is exclusively used in the feed-in material out of the ordinary that a succession of ion of carrying out is in order implanted; And wafer is not removed the equipment (especially for batch instrument) of said ion implanter for having remarkable economic benefits from ion implanter.For this reason, advantageously use the flow interface device of the said figure with two vaporizer platforms, or be configured with the flow interface device of two above vaporizer platforms similarly.Said vaporizer group or releasing unit can be installed in vaporizer platform out of the ordinary place, and the order of implanting can carry out through selected cell in order, between each is implanted, carry out clean cycle through the reactive cleaning outfit of having described simultaneously.In a kind of situation, a unit of one group of vaporizer can contain the big molecule of the boracic that is useful on the boron implant, and another unit of said vaporizer group can contain the diffusion of promising inhibition boron and the big molecule of carbon containing that will implant altogether.In another kind of situation, can be through using the flow interface device of said figure, implant the material more than three kinds or three kinds in corresponding (preferably through write code) vaporizer in order, and do not disturb the wafer on the rotation bin.Through after the use to the second vaporizer platform etc., implementing this operation from the first vaporizer platform with the 3rd vaporizer replacement (for example) first vaporizer in conversion.

Many embodiment of aspect of the present invention have been described.Yet, should understand and can under the situation that does not break away from spirit of the present invention and category, implement various modifications.Therefore, other embodiment is also in the category of following claim.

Claims (67)

1. vaporizer unit; It has heater and warp is constructed to contain solid feed-in material and said solid feed-in material is heated to the temperature that Ionized steam is treated in generation; Said vaporizer unit comprises: have solid and receive the tank body of volume and can unload the top closing feature; Said top closing feature is defined in said jar the installation surface at erecting bed place and allows steam to flow to the valve of said erecting bed from said jar

Improvement place is: wherein said jar through structure with from the said top closing feature vertical hanging that unloads; And the said heater of the solid material of the said tank body that wherein is used for vaporizing is arranged in the said top closing feature that unloads, and maintains than under the high temperature of the steam temperature of the said solid feed-in material in the said tank body in order to the said valve with said top closing feature.

2. vaporizer unit according to claim 1; Wherein said valve comprises heat conduction aluminium; And be arranged to and become the conduction heat transfer relation with said heater, will maintain through the steam passage of said valve than under the high temperature of the steam temperature of the said solid material that just is being vaporized.

3. vaporizer unit according to claim 1, it has the single heating district that comprises one or more heating elements of being installed by said top closing feature.

4. vaporizer unit according to claim 2, wherein said heater are included in the cartridge heater in the container in the closing feature of said top.

5. vaporizer unit according to claim 1; But it comprises the unloaded securing member and manual operation closing device that is used for installing at the erecting bed place said vaporizer; Said closing device has the make position that prevents that steam from flowing from said vaporizer; Said closing device with prevent approaching apparatus associated; The said approaching device preventing staff said securing member that unloads near mounted vaporizer when said closing device is not in the close position that prevents uses preventing that toxicity steam flows from said vaporizer when unloading said vaporizer.

6. vaporizer unit according to claim 5; The wherein said securing member that unloads comprises the fixing screw or the nut layout that can cooperate the accessory engagement with being associated of said erecting bed; And saidly prevent that approaching device from comprising with the parts of said closing device move with relying on mutually and prevent approaching cover plate; Said cover plate is through structure and be configured to make it possible near said fixing screw or nut, only is used for dismantling said vaporizer during in make position when said closing device.

7. vaporizer unit according to claim 6; Further comprise spring-loaded pneumatic operable valve; It is installed on the said vaporizer; Allowing steam to flow from said vaporizer, and said closing device is mechanical override, said mechanical override through structure not consider that existing of Pneumatic pressure is pushed to make position with said pneumatic operable valve.

8. vaporizer unit according to claim 1; Wherein said vaporizer comprises and is used for controlling the normally closed pneumatic operated valve from the vapor stream of said vaporizer in response to the vaporizer control system; And to pneumatic connection; Can be connected to the compressed-air actuated path that is associated with erecting bed; Said erecting bed has and is suitable for the sealing surfaces that cooperates with the corresponding sealing surfaces of said vaporizer; Each sealing surfaces is by this way around being used for said vapor stream and the port that is used for said compressed air: what be used to open said pneumatic operated valve compressed-air actuated fully the connection depends on that said corresponding sealing surfaces is sealed together, and uses to prevent that said pneumatic operated valve from can flow under the condition in the atmosphere at steam and open.

9. vaporizer unit according to claim 1; It is through constructing to use together with one group of different vaporizer that carry different solid feed-in materials; Each vaporizer has the characteristic physical features of its inclusion of expression; Said physical features is suitable for coming identification by identification system, makes flow and heater control system under the condition of the inclusion that is suitable for said vaporizer through identification, to operate.

10. vaporizer unit according to claim 9; Wherein at least one said vaporizer carries one or more switch actuators with the unique pattern that depends on the inclusion that said vaporizer is exclusively used in and forms thing; But said formation thing is suitable for interacting with the identification system that comprises one group of actuation switch, but said one group of actuation switch is connected with flow and heater control system.

11. vaporizer unit according to claim 9, it comprises a plurality of vaporizers, and at least one vaporizer comprises one group of vaporizer that is exclusively used in the different solid feed-in materials with different vapourizing temperatures and the different qualities physical features that is used for identification.

12. another vaporizer that vaporizer unit according to claim 11, a vaporizer in wherein said one group of vaporizer are exclusively used in decaborane and the said one group of vaporizer is exclusively used in 18 borines.

13. vaporizer unit according to claim 11, a vaporizer in wherein said group is exclusively used in borine, and another vaporizer in said group is exclusively used in carborane.

14. vaporizer unit according to claim 1, it has temperature limit switch, said temperature limit switch be set to be in normal vapourizing temperature above and at the phase solid materials with the safe temperature below the dangerous temperature that is vaporized.

15. vaporizer unit according to claim 14 further comprises one group of vaporizer, a vaporizer in wherein said group is exclusively used in decaborane and another vaporizer is exclusively used in 18 borines, and the temperature of said limit switch is set and is respectively 50C and 140C.

16. vaporizer unit according to claim 1, it contains the solid feed-in material that can form ionizable steam and comprise cluster molecule.

17. vaporizer unit according to claim 16, itself and the ion source combination of the steam that can ionization produces from said solid material.

18. vaporizer unit according to claim 1, it contains the solid feed-in material that comprises following one or more hydrocarbons: C ₁₄H ₁₄, C ₁₆H ₁₀, C ₁₆H ₁₂, C ₁₆H ₂₀, C ₁₈H ₁₄Or C ₁₈H ₁₈

19. comprising, vaporizer unit according to claim 1, wherein said solid feed-in material be used for the compound that the N type mixes.

20. vaporizer unit according to claim 1, wherein said solid feed-in material comprises arsenic, phosphorus or antimony cluster compound.

21. vaporizer unit according to claim 1, wherein said solid feed-in material comprises can form A _nH _x ⁺Or A _nRH _x ⁺The arsenic of the ion of form or phosphorus compound, wherein n and x are integer, wherein n greater than 4 and x more than or equal to 0, and A is As or P, and R is that molecule and its of not phosphorous or arsenic is harmless to the ion implantation process.

22. vaporizer unit according to claim 1, wherein said solid feed-in material comprise the phosphorus compound of the group that selects free phosphine, organic phosphine and phosphide composition.

23. vaporizer unit according to claim 1, wherein said solid feed-in material comprises P7H7.

24. vaporizer unit according to claim 1, wherein said solid feed-in material comprises antimonial, and said antimonial comprises front three antimony.

25. vaporizer unit according to claim 1, wherein said solid feed-in material comprises S _b(CH ₃) C ₃

26. a method of handling semiconductor device or semi-conducting material, it comprises use vaporizer unit according to claim 16 and produces cluster ion, and in said processing, uses said ion.

27. comprising ion, method according to claim 26, wherein said processing method implant.

28. comprising ion beam, method according to claim 26, wherein said processing method implant.

29. heating vaporizer unit; It can under reduced pressure be operated with vaporization feed-in material and with steam and offer another device; Said vaporizer unit comprises that bottom zone, feed-in material with the sidewall that defined by inner surface and base wall receive, the vaporization cavity; With define the top region that can unload the top closing feature and be used for steam is sent to from said unit the steam passage of said another device, said top region and said bottom zone through be configured to when assembling in airtight engagement at the interface, wherein

The top region and the bottom zone of said vaporizer jar unit all comprise heat-conducting metal,

Resistance heater is arranged in the said top closing feature that unloads,

Said top region is through structure and be configured to the heat distributor with the interface of said bottom zone,

Said interface is heat conduction, and it is suitable for transmitting heat to said bottom zone, thereby vaporizes said feed-in material,

And the sidewall of said bottom zone and base wall, heat and the said material of vaporizing when reducing with the quantity at said material will be assigned to the surface of the said cavity that is exposed to said feed-in material from the heat that said interface receives through structure,

Said unit through structure to set up positive thermal gradient from the high temperature of the steam temperature of the said feed-in material of ratio at the vapourizing temperature at the said base wall place of the said bottom zone steam (vapor) outlet path place in the said top region.

30. vaporizer unit according to claim 29, wherein said at least bottom zone is through constructing with the shipping container as said feed-in material.

31. vaporizer unit according to claim 29, wherein

The said said heater that unloads in the closing feature of top comprises one group of cartridge heater element in the opening in the metal master that is placed in said top region through closely cooperating,

Said cartridge heater element comprises unique thermal source of the material of the said bottom zone that is used for vaporizing.

32. wherein there is the vaporized feed-in material in the cavity that resides at said bottom zone in vaporizer unit according to claim 29, said material comprises the solid material that at room temperature has low-steam pressure.

33. vaporizer unit according to claim 32, but wherein said vapour material comprise have a plurality of boron, the molecule of carbon, phosphorus or arsenic atom.

34. vaporizer unit according to claim 33, wherein said solid material are decaborane (B ₁₀H ₁₄), said unit through structure between the base wall of said bottom zone and the steam (vapor) outlet path in the said top region, to keep the temperature difference of 5C.

35. vaporizer unit according to claim 33, wherein said solid material are decaborane (B ₁₀H ₁₄), said unit is associated with control system, and said control system is through constructing in decaborane vaporization scope, to heat the operating limit of the base wall of said bottom zone up to 40C.

36. vaporizer unit according to claim 33, wherein said solid material are decaborane (B ₁₀H ₁₄), said unit is associated with the excess temperature limit switch of the setting with 50C, and said excess temperature limit switch is configured to the superheated of safety device with the top region that prevents said unit.

37. vaporizer unit according to claim 33, wherein said solid material are 18 borine (B ₁₈H ₂₂), said unit through structure between the base wall of said bottom zone and the steam (vapor) outlet path in the said top region, to keep the temperature difference of 10C.

38. vaporizer unit according to claim 33, wherein said solid material are 18 borine (B ₁₈H ₂₂), said unit is associated with control system, and said control system is through constructing in 18 borine vaporization scopes, to heat the operating limit of the base wall of said base unit up to 120C.

39. vaporizer unit according to claim 33, wherein said solid material are 18 borine (B ₁₈H ₂₂), said unit is associated with the excess temperature limit switch of the setting with 140C, and said excess temperature limit switch is configured to the superheated of safety device with the top region that prevents said unit.

40. vaporizer unit according to claim 33, wherein said material are carborane.

41. according to the described vaporizer unit of claim 40, wherein said material is C ₂B ₁₀H ₁₂

42. according to the described vaporizer unit of claim 40, wherein said material is C ₄B ₁₂H ₂₂

43. vaporizer unit according to claim 29; Wherein the interface of institute's module units is defined by vacuum seal; And through close contact respectively by the metal surface that top region and bottom zone defined of said unit at said sealed external; Because of being filled by the air from atmosphere in the minute opening gap due to the tiny flaw in the said match surface, the part that the metal surface by being meshed at said interface is defined provides the main heat transfer path on the surface to the said bottom zone of delimiting said material reception, vaporization cavity from said top region.

44. according to the described vaporizer unit of claim 43; Wherein said top region and said bottom zone define said smooth in fact match surface at the interface; Said match surface is suppressed together by a large amount of mounting screws; Said bottom zone comprises the general cylindrical container, and said general cylindrical container has the sidewall of uniform thickness.

45. vaporizer unit according to claim 29; It comprises thermal detector; Said thermal detector is positioned at the base wall place of said unit and is suitable for being connected with it; Controlling to the electric power of the said heater in the said top region, so that can be with the temperature maintenance of the base wall of said unit at selected set point.

46. according to the described vaporizer unit of claim 45; It comprises electric signal conductor; Said electric signal conductor extends to the top region of said unit and the interface between the bottom zone from said detector; Said top region and said bottom zone have carried coupling electric connector part in position, be combined in a time-out with the match surface in said top region and said bottom zone and automatically be engaged with each other.

47. according to the described vaporizer unit of claim 46, extending upward in the groove in the surface of the heat conducting wall of the recessed said bottom zone of wherein said conductor.

48. according to the described vaporizer unit of claim 45; It is associated with the loop temperature controller; Said loop temperature controller is in response to the said thermal detector at the base wall place of said unit; Controlling to the electric power of the said heater in the said top region, so that can be with the temperature maintenance of the bottom of said unit at selected set point.

49. vaporizer unit according to claim 29; Steam passage in the wherein said heating top region has through being exposed to receive from said vaporization cavity the steam receiving unit of steam; Initial part extends upward substantially, and then the steam translator unit to horizontal extension is crooked.

50. according to the described vaporizer unit of claim 49; Wherein said heater comprises the cartridge heater element that partial parallel ground extends that extends upward with said steam passage; At least one cartridge heater element is positioned on each side of horizontal expansion translator unit of said steam passage; And at least one cartridge heater element is positioned on the side in the opposite direction of said top region and horizontal expansion translator unit said path, and said heating element is the heat conduction relation with the surface of defining said steam passage.

51. according to the described vaporizer unit of claim 49, wherein allow the valve that steam flows from said unit to reside in the bending area of said steam passage, the surface of said valve and said heater are the heat conduction relations.

52. according to the described vaporizer unit of claim 51, wherein said valve is the pneumatic bellows valve of operating.

53. according to the described vaporizer unit of claim 52; It comprises the unloaded securing member that is used for installing at the erecting bed place of another steam receiving system said unit; But with the manual operation closing device; The closing device of said unit has the make position that prevents that steam from flowing from said vaporizer; Said closing device with prevent approaching apparatus associatedly, the said approaching device preventing staff said securing member that unloads near mounted vaporizer when said closing device is not in the close position that prevents uses preventing that toxicity steam flows from said unit when unloading said unit.

54. according to the described vaporizer unit of claim 53; Wherein said unload securing member comprise can with said erecting bed the fixing screw layout of related cooperation accessory engagement; And saidly prevent that approaching device from comprising with the parts of said closing device move with relying on mutually and prevent near cover plate; Said cover plate is through structure and be configured to make it possible near said fixing screw, only is used for dismantling said unit during in make position when said closing device.

55. vaporizer unit according to claim 29, the translator unit of wherein said steam passage extend through outside laterally projecting thing, said outside laterally projecting thing is in the container of structure with the pre-determined configurations that is engaged in another steam receiving system mutually.

56. according to the described vaporizer unit of claim 55, wherein said outside laterally projecting thing bearing the weight of said unit, and is used as the supporter of said unit through structure when said protrusion meshes with said container.

57. according to the described vaporizer unit of claim 55, the end surface of wherein said laterally projecting thing outwards is through constructing to come together to define sealing with the match surface of said another steam receiving system.

58. according to the described vaporizer unit of claim 57; It has through structure to receive the screw path of mounting screw; Said mounting screw can be screwed in said another device; So that said end surface is pushed against on the match surface of said another device, seal and provide stability force thereby set up.

59. according to the described vaporizer unit of claim 55; It is used for using with another device; Said another device maintains under the temperature different temperature with said vaporizer unit, and wherein thermal insulation blocks between said unit and said another device the heat transmission via said outside laterally projecting thing.

60. according to the described vaporizer unit of claim 59; Wherein said thermal insulation comprises the insulating sleeve part around said protrusion, and be placed in the end of said protrusion with the wall of the steam reception path that defines said steam receiving system between the insulation end portion.

61. according to the described vaporizer unit of claim 55; Wherein in order to implement to be electrically connected between said unit and external control and the power circuit; Said vaporizer unit has carried electric connector in the precalculated position; To mesh the matching connector in the precalculated position on said another device, the precalculated position of the connector on the said vaporizer unit is moved on the direction of the container engagement that makes said laterally projecting thing and said another device through said vaporizer unit and is realized being dynamically connected certainly of said connector.

62. according to the described vaporizer unit of claim 61, wherein said connector comprises Connection Element, said Connection Element is used for compressed air is connected to said unit to be used to activate the pneumatic operated valve of said unit.

63. according to the described vaporizer unit of claim 61; Wherein said outside horizontal expansion protrusion has alignment surface; Said alignment surface meshes thereby guide said unit and said another to install through the Matching Alignment surface of structure with the container of said another device that slidably mates.

64. vaporizer unit according to claim 29, it is not used as transfer cask to have on every side under heat-insulating situation through structure, and is being placed in the thermal insulation as during the vaporizer.

65. one kind is used for using vaporizer unit with the solid material that uses through the steam receiving system that vacuumizes; Said unit has the bottom zone that defines solid reception boil-off volume; With define the unloaded top region that can unload the top closing feature; Said top unit and said base unit comprise conductive metal; The heater that is used for said vaporizer is positioned at said top separately and can unloads closed area, to be used for the surface through crossing over the interface between said top region and the said bottom zone and heating the at of said bottom zone via the heat conduction of peripheral side wall that defines said bottom zone and base wall.

66. according to the described vaporizer unit of claim 65, wherein said heater comprises the cartridge heater in the dimple that is installed in the said metal top district.

67. according to the described vaporizer unit of claim 66; Wherein steam passage comprises axially extended inlet region and the valve in said top region; Said cartridge heater comprises and is parallel to said inlet region and the elongated member of the one side extension along said inlet region, and said valve becomes the heat conduction relation with said elongated member.

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