CN101452868A - Wafer auxiliary lighting detection device and wafer detection method - Google Patents
Wafer auxiliary lighting detection device and wafer detection method Download PDFInfo
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- CN101452868A CN101452868A CNA2007100943481A CN200710094348A CN101452868A CN 101452868 A CN101452868 A CN 101452868A CN A2007100943481 A CNA2007100943481 A CN A2007100943481A CN 200710094348 A CN200710094348 A CN 200710094348A CN 101452868 A CN101452868 A CN 101452868A
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- auxiliary lighting
- light source
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Abstract
The invention discloses an auxiliary lighting and detecting device for a wafer. The device comprises a bracket and a lighting source device connected with the bracket, wherein the lighting source device is a lighting source capable of producing a low-illumination light ring. The invention also discloses a wafer detection method which uses the low-illumination light ring to irradiate the wafer to be detected so as to detect surface defect of the wafer. The device uses the light source device capable for producing the low-illumination light ring to irradiate the surface of the wafer and carry out defect detection on the surface of the wafer, can conveniently detect the disadvantages of watermark, fine scratch and the like of the surface of the wafer and has simple operation.
Description
Technical field
The present invention relates to the checkout gear in a kind of semiconductor device manufacturing process, especially make a kind of wafer auxiliary lighting detection device; The invention still further relates to a kind of wafer detection method.
Background technology
Existing wafer auxiliary lighting detection device generally adopts light-emitting diode, Halogen lamp LED to wait and throws light on, and this checkout gear can form a hot spot after irradiation, can check out some open defects of crystal column surface.In order to improve the detection effect, all can adopt the reflector of texture (generally being latticed) in the illuminating light source device in the existing wafer auxiliary lighting detection device, to strengthen the illumination of lighting source.But, because crystal column surface is very level and smooth, can there be very strong reflection, can't check out as watermark bad defective such as trickle scuffing.And the position of lighting source is generally also fixed, and is not easy to move, and operation makes needs mobile wafer to detect positions different on the wafer, very inconvenient during use.
Summary of the invention
Technical problem to be solved by this invention provides a kind of wafer auxiliary lighting detection device, and the wafer detection method that adopts this device to realize, can detect defectives such as the watermark of crystal column surface, trickle scuffing, and easy to operate simple.
For solving the problems of the technologies described above, the technical scheme of wafer auxiliary lighting detection device of the present invention is, comprises the illuminating light source device that support is connected with described support, and described illuminating light source device is for producing the lighting source of the low-light (level) ring of light.
Further improvement as wafer auxiliary lighting detection device of the present invention is that the beam condensing unit of described illuminating light source device is the beam condensing unit of no texture reflector, to produce the ring of light.
Another kind of further improvement the as wafer auxiliary lighting detection device of the present invention is, described support comprises guide rail, base and connecting rod, described base is installed on the described guide rail, can move along described guide rail, described connecting rod is connected with described base by first link that can universal rotation, and described connecting rod is connected with described illuminating light source device by second link that can universal rotation.
The technical scheme of wafer detection method of the present invention is to shine wafer to be detected with the low-light (level) ring of light, to detect the blemish of wafer.
The present invention is shone crystal column surface by adopting the light supply apparatus that can produce the low-light (level) ring of light, carries out the defects detection of crystal column surface, can detect defectives such as the watermark of crystal column surface, trickle scuffing easily, and simple to operate.
Description of drawings
The present invention is further detailed explanation below in conjunction with drawings and Examples:
Accompanying drawing is the structural representation of wafer auxiliary lighting detection device of the present invention.
Wherein, Reference numeral is, 1. support; 2. illuminating light source device; 3. the wafer and the ring of light; 4. power supply; 5. guide rail; 6. base; 7. connecting rod; 8. first link; 9. second link.
Embodiment
The invention provides a kind of wafer auxiliary lighting detection device, as shown in drawings, comprise the illuminating light source device 2 that support 1 is connected with described support 1, described illuminating light source device 2 is for producing the lighting source of the low-light (level) ring of light.
The beam condensing unit of described illuminating light source device 2 is the beam condensing unit of no texture reflector, to produce the ring of light 3.
The power supply 4 of powering for described illuminating light source device is the voltage variable power supply, thereby can regulate the illumination of illuminating light source device 2.
Described support comprises guide rail 5, base 6 and connecting rod 7, described base 6 is installed on the described guide rail 5, can move along described guide rail 5, described connecting rod 7 is connected with described base 6 by first link 8 that can universal rotation, and described connecting rod 7 is connected with described illuminating light source device 2 by second link 9 that can universal rotation.
Described second link 9 can also make the rotational of described lighting source parts around described lighting source parts.
Described connecting rod is made up of two sections connecting rods, and described two sections connecting rods are hinged by the end.
Among the present invention, by the connection between each parts of support, wafer auxiliary lighting detection device of the present invention can carry out various motions according to the mode shown in arrow in the accompanying drawing, thereby has made things convenient for the control to the lighting source direction of illumination.
The present invention also provides a kind of wafer detection method of realizing as above-mentioned wafer auxiliary lighting detection device that utilizes, and shines wafer to be detected with the low-light (level) ring of light, to detect the blemish of wafer.
Current, it is believed that the improvement to the detection effect of crystal column surface defective is to realize by strengthening illumination intensity of light source, therefore in the prior art, people try every possible means to strengthen illumination intensity of light source, for example light source adopts light-emitting diode or Halogen lamp LED, and adopt the reflector that texture (generally being latticed) arranged, form a very bright hot spot at crystal column surface.But,, in fact all can't check out as watermark the bad defective of some of trickle scuffing etc. in any case strengthen illumination intensity of light source.And the present invention comes crystal column surface is detected by the ring of light that adopts low-light (level), can detect the watermark of crystal column surface very easily, the bad defective of some of trickle scuffing etc., detecting effect promotes greatly, and wafer auxiliary lighting detection device of the present invention is by the variation of support, greatly facilitate user's use, improved operating efficiency.
Claims (7)
1. a wafer auxiliary lighting detection device comprises support and the illuminating light source device that described support is connected, and it is characterized in that, described illuminating light source device is for producing the lighting source of the low-light (level) ring of light.
2. wafer auxiliary lighting detection device according to claim 1 is characterized in that, the beam condensing unit of described illuminating light source device is the beam condensing unit of no texture reflector, to produce the ring of light.
3. wafer auxiliary lighting detection device according to claim 1 is characterized in that, the power supply of powering for described illuminating light source device is the voltage variable power supply.
4. wafer auxiliary lighting detection device according to claim 1, it is characterized in that, described support comprises guide rail, base and connecting rod, described base is installed on the described guide rail, can move along described guide rail, described connecting rod is connected with described base by first link that can universal rotation, and described connecting rod is connected with described illuminating light source device by second link that can universal rotation.
5. wafer auxiliary lighting detection device according to claim 4 is characterized in that, described second link can also make the rotational of described lighting source parts around described lighting source parts.
6. wafer auxiliary lighting detection device according to claim 4 is characterized in that, described connecting rod is made up of two sections connecting rods, and described two sections connecting rods are hinged by the end.
7. any wafer detection method that described wafer auxiliary lighting detection device is realized of utilization such as claim 1 to 6 is characterized in that, shines wafer to be detected with the low-light (level) ring of light, with the blemish of detection wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100943481A CN101452868A (en) | 2007-11-30 | 2007-11-30 | Wafer auxiliary lighting detection device and wafer detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100943481A CN101452868A (en) | 2007-11-30 | 2007-11-30 | Wafer auxiliary lighting detection device and wafer detection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101452868A true CN101452868A (en) | 2009-06-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100943481A Pending CN101452868A (en) | 2007-11-30 | 2007-11-30 | Wafer auxiliary lighting detection device and wafer detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101452868A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107178744A (en) * | 2017-07-12 | 2017-09-19 | 湖州明日照明科技有限公司 | A kind of adjustable small-size multifunction illuminator of light source position |
| CN112743395A (en) * | 2019-10-31 | 2021-05-04 | 昆山市孚特莱电子设备有限公司 | Method for repairing surface of exposure glass finished product |
-
2007
- 2007-11-30 CN CNA2007100943481A patent/CN101452868A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107178744A (en) * | 2017-07-12 | 2017-09-19 | 湖州明日照明科技有限公司 | A kind of adjustable small-size multifunction illuminator of light source position |
| CN112743395A (en) * | 2019-10-31 | 2021-05-04 | 昆山市孚特莱电子设备有限公司 | Method for repairing surface of exposure glass finished product |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090610 |