CN101447530B - 一种用于刻蚀二氧化硅掩膜的浆料的清洗工艺 - Google Patents
一种用于刻蚀二氧化硅掩膜的浆料的清洗工艺 Download PDFInfo
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- CN101447530B CN101447530B CN2008102074894A CN200810207489A CN101447530B CN 101447530 B CN101447530 B CN 101447530B CN 2008102074894 A CN2008102074894 A CN 2008102074894A CN 200810207489 A CN200810207489 A CN 200810207489A CN 101447530 B CN101447530 B CN 101447530B
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- pure water
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- silicon dioxide
- dioxide mask
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Cleaning Or Drying Semiconductors (AREA)
- Photovoltaic Devices (AREA)
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Priority Applications (1)
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CN2008102074894A CN101447530B (zh) | 2008-12-22 | 2008-12-22 | 一种用于刻蚀二氧化硅掩膜的浆料的清洗工艺 |
Applications Claiming Priority (1)
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CN2008102074894A CN101447530B (zh) | 2008-12-22 | 2008-12-22 | 一种用于刻蚀二氧化硅掩膜的浆料的清洗工艺 |
Publications (2)
Publication Number | Publication Date |
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CN101447530A CN101447530A (zh) | 2009-06-03 |
CN101447530B true CN101447530B (zh) | 2010-06-09 |
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CN2008102074894A Active CN101447530B (zh) | 2008-12-22 | 2008-12-22 | 一种用于刻蚀二氧化硅掩膜的浆料的清洗工艺 |
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CN (1) | CN101447530B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101950770B (zh) * | 2010-07-22 | 2013-04-24 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅太阳能电池选择性发射极结构的制备方法 |
CN102527676B (zh) * | 2011-12-14 | 2013-11-06 | 青岛吉阳新能源有限公司 | 一种用于抗腐蚀掩膜浆料的清洗工艺方法 |
CN102664148B (zh) * | 2012-05-17 | 2014-06-25 | 中国电子科技集团公司第二十四研究所 | 湿法腐蚀NiCrSi膜的方法 |
CN103611700A (zh) * | 2013-11-19 | 2014-03-05 | 奥特斯维能源(太仓)有限公司 | 一种针对开膜腐蚀性浆料的清洗工艺 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5968280A (en) * | 1997-11-12 | 1999-10-19 | International Business Machines Corporation | Method for cleaning a surface |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US5968280A (en) * | 1997-11-12 | 1999-10-19 | International Business Machines Corporation | Method for cleaning a surface |
Non-Patent Citations (2)
Title |
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JP昭57-178327A 1982.11.02 |
JP特开2003-283111A 2003.10.03 |
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CN101447530A (zh) | 2009-06-03 |
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Owner name: SHANGHAI JA SOLAR TECHNOLOGY CO., LTD. JA SOLAR CO |
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Effective date of registration: 20100706 Address after: 200436, No. three, 36 Road, Zhabei District, Shanghai Co-patentee after: Shanghai JA Solar PV Technology Co., Ltd. Patentee after: JA Solar Holdings Co., Ltd. Co-patentee after: JA Solar Co., Ltd. Address before: 200436, No. three, 36 Road, Zhabei District, Shanghai Patentee before: JA Solar Holdings Co., Ltd. |