CN101446682B - 基于soi的连续薄膜式微变形镜的制备方法 - Google Patents
基于soi的连续薄膜式微变形镜的制备方法 Download PDFInfo
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JP5295388B2 (ja) * | 2009-12-25 | 2013-09-18 | アルプス電気株式会社 | フォースセンサ及びその製造方法 |
CN102275867B (zh) * | 2011-07-12 | 2014-08-06 | 上海先进半导体制造股份有限公司 | 带有部分密封壳体的半导体器件及其制造方法 |
CN102701142B (zh) * | 2012-05-28 | 2015-04-22 | 中国科学院上海微系统与信息技术研究所 | 圆片集成微透镜光学系统制作方法及该器件结构 |
CN105699429A (zh) * | 2016-01-08 | 2016-06-22 | 平高集团有限公司 | 一种微米级半导体传感器及其制备方法 |
KR20220120705A (ko) * | 2020-01-17 | 2022-08-30 | 선전 하이퍼나노 옵틱스 테크놀로지 컴퍼니 리미티드 | 조절 가능 적외선 광학 필터 소자 |
CN114895454B (zh) * | 2022-04-29 | 2023-09-22 | 四川大学 | 一种基于mems工艺的薄膜压电微变形镜及其制作方法 |
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Owner name: JIANGSU TIEMAO GLASS CO., LTD. Free format text: FORMER OWNER: NORTHWESTERN POLYTECHNICAL UNIVERSITY Effective date: 20140827 Owner name: NORTHWESTERN POLYTECHNICAL UNIVERSITY Effective date: 20140827 |
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Effective date of registration: 20140827 Address after: 226600 No. 128 Changjiang West Road, Haian Town, Haian County, Nantong, Jiangsu Patentee after: Jiangsu Tiemao Glass Co.,Ltd. Patentee after: Northwestern Polytechnical University Address before: 710072 Xi'an friendship West Road, Shaanxi, No. 127 Patentee before: Northwestern Polytechnical University |