CN101441978A - 刷片机刷头的控制装置及方法 - Google Patents
刷片机刷头的控制装置及方法 Download PDFInfo
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- CN101441978A CN101441978A CNA2007100942440A CN200710094244A CN101441978A CN 101441978 A CN101441978 A CN 101441978A CN A2007100942440 A CNA2007100942440 A CN A2007100942440A CN 200710094244 A CN200710094244 A CN 200710094244A CN 101441978 A CN101441978 A CN 101441978A
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Application Number | Priority Date | Filing Date | Title |
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CN200710094244A CN100576436C (zh) | 2007-11-19 | 2007-11-19 | 刷片机刷头的控制装置及方法 |
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CN200710094244A CN100576436C (zh) | 2007-11-19 | 2007-11-19 | 刷片机刷头的控制装置及方法 |
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CN101441978A true CN101441978A (zh) | 2009-05-27 |
CN100576436C CN100576436C (zh) | 2009-12-30 |
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CN200710094244A Active CN100576436C (zh) | 2007-11-19 | 2007-11-19 | 刷片机刷头的控制装置及方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101758037B (zh) * | 2009-12-30 | 2011-12-21 | 宁波大榭开发区综研化学有限公司 | 胶带涂胶层去除装置及应用有该装置的测厚仪 |
CN103286084A (zh) * | 2013-06-20 | 2013-09-11 | 三星高新电机(天津)有限公司 | 一种自动清扫装置 |
CN104576495A (zh) * | 2015-01-08 | 2015-04-29 | 北京七星华创电子股份有限公司 | 一种晶片夹持装置 |
WO2016045072A1 (en) * | 2014-09-26 | 2016-03-31 | Acm Research (Shanghai) Inc. | Apparatus and method for cleaning semiconductor wafer |
-
2007
- 2007-11-19 CN CN200710094244A patent/CN100576436C/zh active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101758037B (zh) * | 2009-12-30 | 2011-12-21 | 宁波大榭开发区综研化学有限公司 | 胶带涂胶层去除装置及应用有该装置的测厚仪 |
CN103286084A (zh) * | 2013-06-20 | 2013-09-11 | 三星高新电机(天津)有限公司 | 一种自动清扫装置 |
WO2016045072A1 (en) * | 2014-09-26 | 2016-03-31 | Acm Research (Shanghai) Inc. | Apparatus and method for cleaning semiconductor wafer |
CN106714987A (zh) * | 2014-09-26 | 2017-05-24 | 盛美半导体设备(上海)有限公司 | 清洗半导体硅片的装置和方法 |
US10141205B2 (en) | 2014-09-26 | 2018-11-27 | Acm Research (Shanghai) Inc. | Apparatus and method for cleaning semiconductor wafer |
CN106714987B (zh) * | 2014-09-26 | 2019-04-02 | 盛美半导体设备(上海)有限公司 | 清洗半导体硅片的装置和方法 |
CN104576495A (zh) * | 2015-01-08 | 2015-04-29 | 北京七星华创电子股份有限公司 | 一种晶片夹持装置 |
CN104576495B (zh) * | 2015-01-08 | 2017-07-25 | 北京七星华创电子股份有限公司 | 一种晶片夹持装置 |
Also Published As
Publication number | Publication date |
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CN100576436C (zh) | 2009-12-30 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131216 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20131216 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |