CN101430351A - Circuit, system and method for accurately measuring inside stray capacitance of automatic test equipment - Google Patents
Circuit, system and method for accurately measuring inside stray capacitance of automatic test equipment Download PDFInfo
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- CN101430351A CN101430351A CN 200710188216 CN200710188216A CN101430351A CN 101430351 A CN101430351 A CN 101430351A CN 200710188216 CN200710188216 CN 200710188216 CN 200710188216 A CN200710188216 A CN 200710188216A CN 101430351 A CN101430351 A CN 101430351A
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Abstract
The invention relates to a circuit for accurately measuring internal stray capacitance of an automatic test device, a system and a method thereof. The method comprises a plurality of steps: firstly, a voltage drive unit charges and discharges an internal circuit for a plurality of times; the internal circuit discharges spontaneously to reduce the voltage value from V1 to V2; a discharge time interval is measured; the time interval is substituted to a discharge mathematical expression to obtain a first R-C discharge equation; the automatic test device is coupled with an auxiliary test module; the discharge step is repeated to obtain a second R-C discharge equation; and the first R-C discharge equation and the second R-C discharge equation are in simultaneousness to obtain a stray resistance and a stray capacitance. The circuit, the method and the system can help solve the disadvantages of operation inconvenience and measurement inaccuracy which exist in the existing method for measuring the internal stray capacitance of the automatic test device or estimating the stray capacitance, and can help rapidly, effectively and accurately obtain the stray capacitance which is stored in the automatic test device by a simple and cost-saving method, thus the circuit, the method and the system are very practical.
Description
Technical field
The present invention relates to a kind of circuit, System and method for that measures stray capacitance, particularly relate to circuit, the System and method for of the stray capacitance of a kind of energy accurately measuring ATE (automatic test equipment) inside.
Background technology
ATE (automatic test equipment) (automatic test equipment, be called for short ATE), be to be used for test wafer and integrated circuit (IC) wafer, measured every data result is and is used for judging the very bad of this wafer or integrated circuit quality, therefore, should have can be to the accuracy and the consistance of every measurement performance for testing apparatus itself.That is to say, can not be subjected to the influence of time and external environment and different by the result that ATE (automatic test equipment) tested out.Therefore, the distinct device of same model be identical data result in the test result of carrying out for same wafer or integrated circuit (IC) wafer.Thus, could confirm that the tested result of element under test has the assurance of correctness.
Generally speaking, the board that ATE (automatic test equipment) is made up of the electronic circuit of complexity, therefore ATE (automatic test equipment) can along with the time of using increase and within it portion produce various dead resistances, inductance and electric capacity, these dead resistances, inductance and electric capacity are so-called stray resistance, inductance and electric capacity.And these various stray resistances, inductance and electric capacity are when being present in this ATE (automatic test equipment), then can produce many bad influences in the result's that when test measured out correctness to this ATE (automatic test equipment), wherein the influence that is present in the ATE (automatic test equipment) to be caused with stray capacitance is a maximum.
See also shown in Figure 1, for using the test result synoptic diagram of different ATE (automatic test equipment), show that same element under test makes the test result that test is drawn with different ATE (automatic test equipment) to the same measurement project of this element under test to the same characteristic test of same element under test.Two curves are arranged among the figure, be respectively curve A (dotted line is represented) and curve B (solid line is represented), wherein curve A is tested the distribution plan of the milli electric current-time of an integrated circuit (IC) wafer X gained for ATE (automatic test equipment) A, and curve B is the distribution plan of same integrated circuit (IC) wafer X in the milli electric current-time of ATE (automatic test equipment) B test gained.By among Fig. 1 as can be known, curve A and curve B are not to be same curve, the same characteristic that is same integrated circuit (IC) wafer X is tested, but the test result that is drawn at ATE (automatic test equipment) A and ATE (automatic test equipment) B is inequality.Yet under normal situation, the same characteristic of same element under test do not tested should be able to different test results because of the difference of ATE (automatic test equipment), and promptly curve A among Fig. 1 and curve B should be overlapping curve.
Yet curve A and curve B are not overlapping curve, must be have among ATE (automatic test equipment) A or the ATE (automatic test equipment) B one or both to be all test result inaccurate.Probe into its reason, can find it is, thereby cause different ATE (automatic test equipment) can draw different test results in the test of same element under test being carried out same characteristic because the inside of ATE (automatic test equipment) produces stray capacitance.After learning that causing that the inaccurate former because ATE (automatic test equipment) of test is inner produces stray capacitance, solve this problem, then must earlier the size of this stray capacitance be measured, after obtaining the numerical value of this stray capacitance, can be by the processing unit of ATE (automatic test equipment), calculate the real numerical value that test measured after the numerical value of this stray capacitance compensated again to element under test.Thus, as long as the stray capacitance that is produced in every ATE (automatic test equipment) is found out, then can make different ATE (automatic test equipment) that the test that same element under test carries out same characteristic is drawn identical test result.Therefore, as long as can draw the numerical value of the stray capacitance of ATE (automatic test equipment) effectively, can make ATE (automatic test equipment) have the ability of energy accurately measuring element under test characteristic.
Traditionally, the measuring method of the stray capacitance of ATE (automatic test equipment) has with net analysis instrument or electric impedance analyzer and comes method that this ATE (automatic test equipment) is measured.But, the measurement of carrying out stray capacitance in this way must be just can measure under the situation of outage of this ATE (automatic test equipment) or off-line, and records internal electronics that accurate capacitance must know the element under test that it is measured earlier with net analysis instrument or electric impedance analyzer.Therefore, actual in the internal electronics of ATE (automatic test equipment) is under the condition of unknown, normally incorrect with the numerical value of the measured stray capacitance of net analysis instrument or electric impedance analyzer, and it is not only consuming time but also inconvenient to use this kind mode to measure.Therefore the method that the stray capacitance of another kind of measurement ATE (automatic test equipment) just occurred, the method then comes this ATE (automatic test equipment) is discharged and recharged for the function that discharges and recharges that promptly has with ATE (automatic test equipment) itself, and record wherein discharges the spent time, so, the numerical value that can calculate the stray capacitance of this ATE (automatic test equipment) in the mathematical expression with the data substitution R-C discharge mode of gained.
But, want in the mathematical expression of this R-C discharge mode of substitution, must know the stray resistance in this ATE (automatic test equipment) earlier, and this stray resistance can't correctly be tried to achieve equally, therefore, generally can obtain in this resistance value substitution mathematical expression and calculate, obtain the numerical value of stray capacitance with this in the mode of estimating.Yet, because under the resistance value and coarse situation of institute's substitution, the numerical value of the stray capacitance that is obtained is out of true equally still.Therefore, need a kind of method that can conveniently measure the numerical value of the stray capacitance that also can accurately draw ATE (automatic test equipment) that proposes badly.
This shows that the method for above-mentioned existing ATE (automatic test equipment) and ATE (automatic test equipment) stray capacitance obviously still has inconvenience and defective, and demands urgently further being improved in product structure, method for measurement and use.In order to solve the problem of above-mentioned existence, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product and method do not have appropriate structure and method to address the above problem, and this obviously is the problem that the anxious desire of relevant dealer solves.Therefore how to found a kind of circuit, System and method for of new accurately measuring inside stray capacitance of automatic test equipment, real one of the current important research and development problem that belongs to, also becoming the current industry utmost point needs improved target.
Because the defective that the method for above-mentioned existing ATE (automatic test equipment) and measurement ATE (automatic test equipment) stray capacitance exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of circuit, System and method for of new accurately measuring inside stray capacitance of automatic test equipment, can improve general existing ATE (automatic test equipment) and the method that measures the ATE (automatic test equipment) stray capacitance, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to; overcome existing ATE (automatic test equipment) inside and have stray capacitance so cause the inaccurate defective of test result of gained; and provide a kind of system of accurately measuring inside stray capacitance of automatic test equipment; technical matters to be solved is it can be solved in the past existingly carry out the measurement of inside stray capacitance of automatic test equipment or estimate all multioperation inconvenience that the method for stray resistance exists and measure inaccurate shortcoming; can be very suitable for practicality not shutting down and can the stray capacitance of ATE (automatic test equipment) inside being measured accurately by system of the present invention.
Another object of the present invention is to, overcome the defective that existing ATE (automatic test equipment) exists, and provide a kind of circuit of accurately measuring inside stray capacitance of automatic test equipment, technical matters to be solved is to make it can utilize the circuit that provides of the present invention to draw accurately at this inside stray capacitance of automatic test equipment, is very suitable for practicality.
Another object of the present invention is to, overcome the defective of the method existence of existing measurement ATE (automatic test equipment) stray capacitance, and provide a kind of method of accurately measuring inside stray capacitance of automatic test equipment, technical matters to be solved is to make it can solve the measurement of in the past carrying out inside stray capacitance of automatic test equipment or estimate the existing all multioperation inconvenience of method of stray resistance and measure inaccurate shortcoming, thereby is suitable for practicality more.
The object of the invention to solve the technical problems realizes by the following technical solutions.The system of a kind of accurately measuring inside stray capacitance of automatic test equipment that proposes according to the present invention, it comprises: an ATE (automatic test equipment), in order to stray capacitance to be measured to be provided; And a subtest module, can with the stray capacitance of this ATE (automatic test equipment) coupling in the hope of this ATE (automatic test equipment) inside.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The system of aforesaid accurately measuring inside stray capacitance of automatic test equipment, wherein said ATE (automatic test equipment) more comprises an internal circuit.
The system of aforesaid accurately measuring inside stray capacitance of automatic test equipment, wherein said internal circuit more comprises a voltage drive unit, this voltage drive unit can determine the amplitude size and the number of cycles of voltage, and can carry out periodicity at this internal circuit and discharge and recharge.
The system of aforesaid accurately measuring inside stray capacitance of automatic test equipment, wherein said ATE (automatic test equipment) more comprise a signal (signal is a signal, and this paper all is called signal) passage, are that a signal is exported into end points.
The system of aforesaid accurately measuring inside stray capacitance of automatic test equipment, wherein said subtest module more comprises one and discharges and recharges element.
The system of aforesaid accurately measuring inside stray capacitance of automatic test equipment wherein saidly discharges and recharges that element is included as an electric capacity and this electric capacity is a known constant.
The object of the invention to solve the technical problems also realizes by the following technical solutions.The circuit of a kind of accurately measuring ATE (automatic test equipment) stray capacitance that proposes according to the present invention, it comprises: a voltage drive unit, in order to produce a plurality of periodic high low-voltages; And one discharge and recharge element, in order to this voltage drive unit coupling; By this, can set up the stray capacitance of equation in the hope of this ATE (automatic test equipment).
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The circuit of aforesaid accurately measuring inside stray capacitance of automatic test equipment, wherein said equation are R-C discharge equation.
The object of the invention to solve the technical problems also realizes in addition by the following technical solutions.The method of a kind of accurately measuring inside stray capacitance of automatic test equipment that proposes according to the present invention, it may further comprise the steps: (a). and itself carry out several by an ATE (automatic test equipment) and discharge and recharge; (b). this ATE (automatic test equipment) is discharged and recorded a discharge time simultaneously at interval; (c). should interval substitution discharge discharge time mathematical expression then can get one the one R-C discharge equation; (d). with this ATE (automatic test equipment) and subtest module coupling; (e). repeating step (a)～(c) obtains one the 2nd R-C discharge equation with this; And (f). by the stray capacitance of this first, second R-C discharge equation in the hope of this ATE (automatic test equipment).
The object of the invention to solve the technical problems also realizes in addition by the following technical solutions.The method of a kind of accurately measuring inside stray capacitance of automatic test equipment that proposes according to the present invention, it comprises the steps: to provide an ATE (automatic test equipment), be to have an internal circuit and a voltage drive unit, wherein this voltage drive unit can carry out discharging and recharging so that the electrical homogeneity of this internal circuit for several times to this internal circuit; This ATE (automatic test equipment) is carried out discharge step, and this discharge step comprises: (a). and by this voltage drive unit this internal circuit is carried out several and discharge and recharge; (b). magnitude of voltage is decremented to V2 by V1; (c). try to achieve discharge time at interval; And (d). time interval substitution is discharged mathematical expression to obtain one the one R-C discharge equation; One subtest module is provided, is and this ATE (automatic test equipment) coupling; Repeat this discharge step (a)～(d), to obtain one the 2nd R-C discharge equation; And by the stray capacitance of this first, second R-C equation in the hope of this ATE (automatic test equipment).
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, major technique of the present invention thes contents are as follows:
In order to achieve the above object, the invention provides a kind of system of accurately measuring inside stray capacitance of automatic test equipment, it comprises: an automatic measuring equipment, in order to stray capacitance to be measured to be provided; And a subtest module, can with the stray capacitance of this ATE (automatic test equipment) coupling in the hope of ATE (automatic test equipment) inside.
In addition, in order to achieve the above object, the present invention provides a kind of method of accurately measuring inside stray capacitance of automatic test equipment in addition, and it comprises following step: at first, by a voltage drive unit one internal circuit is carried out several and discharge and recharge; Then, make this internal circuit self-discharge, magnitude of voltage is decremented to V2 by V1; Then, record discharge time at interval; Come again, with time interval substitution Tp=k ln (RC) discharge mathematical expression, to obtain one the one R-C discharge equation; Then, an ATE (automatic test equipment) and a subtest module are coupled; Then, repeat above-mentioned discharge step to obtain one the 2nd R-C discharge equation; And this first, second R-C discharge equation of simultaneous is in the hope of stray resistance and electric capacity.So, then can be rapid, effective and correct try to achieve the stray capacitance that is deposited in the ATE (automatic test equipment) in simple and easy cost-effective again mode.
By technique scheme, the circuit of accurately measuring inside stray capacitance of automatic test equipment of the present invention, System and method for have following advantage and beneficial effect at least:
1, the system of accurately measuring ATE (automatic test equipment) stray capacitance of the present invention can measure the stray capacitance of ATE (automatic test equipment) inside under situation about need not shut down accurately.
2, the circuit of accurately measuring ATE (automatic test equipment) stray capacitance of the present invention can measure the stray capacitance of this ATE (automatic test equipment) inside accurately.
3, the method for accurately measuring ATE (automatic test equipment) stray capacitance of the present invention can solve the measurement of in the past carrying out inside stray capacitance of automatic test equipment or estimates all multioperation inconvenience that the method for stray resistance exists and measure inaccurate shortcoming.
In sum, the circuit of accurately measuring inside stray capacitance of automatic test equipment of the present invention, System and method for, can effectively solve the measurement of in the past carrying out inside stray capacitance of automatic test equipment or estimate all multioperation inconvenience that the method for stray resistance exists and measure inaccurate shortcoming, can be rapid, effective and correct try to achieve the stray capacitance that is deposited in the ATE (automatic test equipment) in simple and easy cost-effective again mode, be very suitable for practicality.The present invention has above-mentioned plurality of advantages and practical value, no matter it all has bigger improvement on product structure, method for measurement or function, obvious improvement is arranged technically, and produced handy and practical effect, and more existing ATE (automatic test equipment) has the outstanding effect of enhancement with the method that measures the ATE (automatic test equipment) stray capacitance, thereby being suitable for practicality more, really is a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of instructions, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is for using the test result synoptic diagram of different ATE (automatic test equipment) to the same characteristic test of same element under test.
Fig. 2 is the synoptic diagram of the ATE (automatic test equipment) system among the present invention.
Fig. 3 is the equivalent circuit diagram of the ATE (automatic test equipment) system among the present invention.
Fig. 4 is the drive pattern synoptic diagram of the voltage drive unit among the present invention.
Fig. 5 is the process flow diagram of the method for accurately measuring inside stray capacitance of automatic test equipment of the present invention.
20: ATE (automatic test equipment) 21: internal circuit
22: subtest module 201: signalling channel
210: voltage drive unit 220: electric capacity
31: voltage source 32: switch
33: resistance 34: electric capacity
320: contact 321: contact
41: original state 42: the high voltage point
43: low voltage point 44: the time interval
501: internal capacitive circuit carries out several and discharges and recharges
502: make internal circuit self-discharge, magnitude of voltage is decremented to V2 by V1
503: record discharge time at interval
504: with time interval substitution R-C discharge mathematical expression, with the R-C discharge equation of winning
505: with ATE (automatic test equipment) and the coupling of subtest module
506: repeating step 501～504, to get the 2nd R-C discharge equation
507: simultaneous two equations are tried to achieve stray resistance and electric capacity
Embodiment
Reach technological means and the effect thereof that predetermined goal of the invention is taked in order further to set forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, circuit, its embodiment of System and method for, structure, method, step, feature and the effect thereof of the accurately measuring inside stray capacitance of automatic test equipment that foundation the present invention is proposed, describe in detail as after.
Relevant aforementioned and other technology contents, characteristics and effect of the present invention can be known to present in the following detailed description that cooperates with reference to graphic preferred embodiment.By the explanation of embodiment, when can being to reach technological means that predetermined purpose takes and effect to get one more deeply and concrete understanding to the present invention, yet appended graphic only provide with reference to the usefulness of explanation, be not to be used for the present invention is limited.
See also shown in Figure 2ly, be the synoptic diagram of the ATE (automatic test equipment) system among the present invention, wherein comprise an ATE (automatic test equipment) 20 and a subtest module 22.
Above-mentioned ATE (automatic test equipment) 20, its inside includes an internal circuit 21 and a signalling channel 201, wherein this signalling channel 201 is connected with this internal circuit 21, and as the signal between this ATE (automatic test equipment) 20 and the element under test export into end points, that is to say, this ATE (automatic test equipment) 20 can be by this signalling channel 201 outputs one signal to element under test, and the signal that this element under test returned can be passed this ATE (automatic test equipment) 20 back by this signalling channel 201 equally.More particularly, this ATE (automatic test equipment) 20 can be sent to test signal a wherein pin position of element under test by this signalling channel 201, this element under test then can read in this test signal by this pin position, and carry out test to this element under test, after the test, this element under test then can return a signal and be spread out of by this pin position, passes this signal back this ATE (automatic test equipment) 20 by this signalling channel 201 equally.
The internal circuit 21 of this ATE (automatic test equipment) 20 more comprises a voltage drive unit 210, and this voltage drive unit 210 is one can be in order to this internal circuit 21 is carried out the voltage driven element that voltage discharges and recharges.
This ATE (automatic test equipment) 20 has more a processing unit (figure does not show), is included as a computer program (program is a formula, and this paper all is called program) arithmetic element, and the user can decide the selection of the test pattern of this ATE (automatic test equipment) 20 by this processing unit.
Therefore, the voltage that can make 210 pairs of these internal circuits 21 of this voltage drive unit carry out different mode by this processing unit discharges and recharges, and this different mode includes pattern one and 2 two kinds of patterns at least.Wherein, pattern one discharges and recharges in a setting-up time this internal circuit 21 being carried out periodicity, it act as the electrical homogenization of the stray capacitance that is deposited at ATE (automatic test equipment) internal circuit 21, is the electrical unification with all stray capacitances in this ATE (automatic test equipment) 20; Second pattern is discharge, and this pattern is behind the charge and discharge process of pattern one, and voltage when the peak, is made it self-discharge, and records the time interval of discharge, so then can be with should time interval substitution discharge mathematical expression, to obtain a R-C equation.
Above-mentioned subtest module 22 is to be a kind of auxiliary module of the stray capacitance that is used to measure this ATE (automatic test equipment) 20, and this subtest module 22 more comprises one and discharges and recharges element, for example electric capacity.When ATE (automatic test equipment) 20 in the measurement of carrying out stray capacitance, in the time of need carrying out auxiliary movement, then this end points that discharges and recharges element in this subtest module 22 is connected with an end points of this signalling channel 201, wherein this discharges and recharges element and can be an electric capacity 220, and the capacitance of this electric capacity 220 is a known constant, so, then can be by this subtest module 22 auxiliary to record the stray capacitance of this ATE (automatic test equipment) 20, detailed measurement step will describe follow-up.Yet, when ATE (automatic test equipment) 20 does not need this subtest module 22 auxiliary, only need this signalling channel 201 is got final product with the disconnection that is connected of this subtest module 22.
Seeing also shown in Figure 3ly, for the equivalent circuit diagram of the ATE (automatic test equipment) system among the present invention, is the equivalent circuit diagram of the system shown in Fig. 2, in Fig. 3 with Fig. 2 in same element use identical numbering.Voltage source 31 in the internal circuit 21 of ATE (automatic test equipment) is the equivalence element of voltage drive unit 210,33 of resistance can be considered the equivalent stray resistance that is stored in this ATE (automatic test equipment), and electric capacity 34 then can be considered the equivalent stray capacitance that is stored in this ATE (automatic test equipment).In addition, can be provided with a switch 32 on the route that the electric current that sends of this voltage source 31 is passed through certainly, 32 on this switch is for to control the equivalence element that 210 pairs of these internal circuits 21 of this voltage drive unit carry out different mode with computer program.When switch 32 is linked to contact 320, then, particularly this electric capacity 34 is charged for the action of charging of 32 pairs of these internal circuits of this voltage source; Otherwise, when this switch 32 is linked to another contact 321, then form the equivalent electrical circuit of R-C series connection, at this moment, 320 of electric capacity that filled electricity can self-discharge.
The equivalence element of this subtest module 22 then is equivalent to an electric capacity 220, and end points 35 then can be considered the equivalence element of this signalling channel 201, and as the end points that is connected with this subtest module 22, more a signal is exported into end points.
Seeing also shown in Figure 4ly, be the drive pattern synoptic diagram of the voltage drive unit among the present invention, is that the voltage drive unit of one embodiment of the invention carries out the synoptic diagram that voltage discharges and recharges to the ATE (automatic test equipment) internal circuit.Original state 41 is carried out several periodicity and is discharged and recharged for ATE (automatic test equipment) drives 210 pairs of internal circuits of this voltage drive unit 21 in time T i, wherein this time T i can control by the program of the processing unit of ATE (automatic test equipment), and the number in the size of the amplitude A i of voltage and cycle can be set by this program too.Through after periodically discharging and recharging for several times, it is identical that the stray capacitance polarity that can will be deposited at internal circuit 21 is restructured as polarity, so, can help the numerical value of correct calculation stray capacitance at this internal circuit 21.Then, through after repeatedly discharging and recharging, charging, to make stray capacitance charging in the ATE (automatic test equipment) make its voltage be high voltage point 42 again.Then, discharge, the action of this discharge is this internal circuit self-discharge but not manual operation, as shown in Figure 3 as can be known, this ATE (automatic test equipment) can equivalence be a R-C series circuit, so measured this discharge result promptly can meet the discharge mathematical expression Tp=kln (RC) of R-C series circuit.In the present embodiment, carry out this discharge step and be that will to find out voltage be that the high voltage point 42 of V1 is decremented to low voltage point 43 institute's elapsed time at interval 44 therebetween that magnitude of voltage is V2 gradually by magnitude of voltage.
See also shown in Figure 5ly, be the process flow diagram of the method for accurately measuring inside stray capacitance of automatic test equipment of the present invention.Then, for feature of the present invention and spirit more clearly being expressed, below will be with the step of the method for the measurement ATE (automatic test equipment) stray capacitance of the present invention described in Fig. 5, and cooperate an embodiment, describe in detail one by one in conjunction with consulting Fig. 2, Fig. 3 and Fig. 4.
At first, step 501 discharges and recharges for internal circuit 21 is carried out several.In the present embodiment, being the switch 32 in this ATE (automatic test equipment) internal circuit 21 is to utilize program in the processing unit of ATE (automatic test equipment) 20 to switch, this switch 32 is connected with contact 320, and this program more the amplitude size and the number of cycles in time interval Ti of the voltage that given of this voltage drive unit 210 of may command.After treating this switch 32 and this contact 320 being connected, the pattern one that discharges and recharges for this voltage drive unit 210 then, and make this voltage source 31 at the time interval Ti that sets to write in reply for several times the action that discharges and recharges of internal circuit 21, even this voltage drive unit 210 makes the voltage of internal circuit 21 periodically to change in amplitude A i intercropping at time interval Ti.This step is in order to make the electrical homogenization of the stray capacitance in the internal circuit 21.
Step 502 is for making internal circuit 21 self-discharges, and voltage is decremented to V2 by V1.In the present embodiment, after this internal circuit 21 passes through plural time discharging and recharging, the stray capacitance that makes its internal circuit 21 of charging once more then is the state of charging, at this, this switch 32 is connected with contact 321, be the pattern two that this voltage drive unit 210 discharges and recharges, make this internal circuit 21 self-discharges.As shown in Figure 4, the voltage of this internal circuit 21 is discharged to the magnitude of voltage V2 of low voltage point 43 naturally by the magnitude of voltage V1 of high voltage point 42.
Then, step 503 is for recording discharge time at interval.It is very first time point that the measurement in the time interval can make high voltage put 42 pairing time points, and low voltage point 43 pairing time points are second time point, deduct the numerical value of very first time point by the numerical value of second time point, can obtain the time interval 44 of builtin voltage nature sparking voltage value by V1 to V2.
Step 504 is with time interval substitution R-C discharge mathematical expression, with the R-C discharge equation of winning.Can make in the resulting time interval 44 of step 503 and be very first time interval, should the very first time at interval in the substitution R-C discharge mathematical expression, the mathematical expression of R-C circuit self-discharge is represented with Tp=kln (RC), wherein Tp is the time interval, k is a constant, ln is the natural logarithm function, and R is the stray resistance of internal circuit 21, and C is the stray capacitance of internal circuit 21.Therefore, should the very first time at interval in the substitution R-C discharge mathematical expression, then can obtain R-C discharge equation, Tp1=kln (RC).
Step 505 is with ATE (automatic test equipment) 20 and 22 couplings of subtest module.In the present embodiment, as shown in Figure 2, then be with 220 couplings of the electric capacity in the signalling channel in this ATE (automatic test equipment) 20 201 and this subtest module 22.When this ATE (automatic test equipment) and the coupling of subtest module, equivalent electrical circuit as shown in Figure 3 then, this internal circuit 21 is connected with contact 35 with subtest module 22, and the stray capacitance 34 in the internal circuit then can be in parallel with the electric capacity 220 in this subtest module 22.
Then, step 506 is a repeating step 501～504, to get the 2nd R-C discharge equation.Wherein, the electric capacity 220 in this subtest module 22 is for a known electric capacity 220, represents with Cknow.Because after having added an electric capacity, when internal circuit 21 self-discharges, by high voltage point 42 to 44 of time intervals of low voltage point 43 can be elongated, then be second time interval then in this measured time interval.Therefore, the 2nd R-C discharge equation with second time interval substitution R-C discharge equation gained then can be expressed as Tp2=kln[R (C+C
Know)], wherein Tp2 is the second measured time interval, and k represents constant, and ln is the natural logarithm function, and R is the stray resistance of internal circuit, C is the stray capacitance of internal circuit, C
KnowBe the known capacitance in the subtest module 220.
Step 507 is tried to achieve stray resistance and electric capacity for simultaneous two equations.Obtain two R-C equations altogether in step 504 and step 506, be respectively a R-C equation and the 2nd R-C equation, wherein the stray resistance R of internal circuit and stray capacitance C are unknown number, and two equations and two unknown numbers then can simultaneous two equations and obtained separating of this unknown number accurately.Therefore, by assistance by this subtest module, then the stray capacitance of the internal circuit of ATE (automatic test equipment) can be obtained accurately, again the stray capacitance of obtaining be utilized the processing unit computing compensation of this ATE (automatic test equipment) then can make the test result of this ATE (automatic test equipment) for precisely believable.
More preferably; subtest module provided by the present invention; can be connected with the signalling channel of this ATE (automatic test equipment) freely according to user's needs or cut off; can not have influence on the normal function of this ATE (automatic test equipment) fully, and when the stray capacitance of the internal circuit of measuring this ATE (automatic test equipment), not need this ATE (automatic test equipment) is shut down and can be recorded.Therefore, utilize system and method provided by the present invention, can rapid, the correct and simple and easy cost-effective again inside stray capacitance that is deposited at ATE (automatic test equipment) that measures.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the method that can utilize above-mentioned announcement and technology contents are made a little change or be modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (10)
1, a kind of system of accurately measuring inside stray capacitance of automatic test equipment is characterized in that it comprises:
One ATE (automatic test equipment) is in order to provide stray capacitance to be measured; And
One subtest module can be coupled in the hope of the stray capacitance of this ATE (automatic test equipment) inside with this ATE (automatic test equipment).
2, the system of accurately measuring inside stray capacitance of automatic test equipment according to claim 1 is characterized in that wherein said ATE (automatic test equipment) more comprises an internal circuit.
3, the system of accurately measuring inside stray capacitance of automatic test equipment according to claim 2, it is characterized in that wherein said internal circuit more comprises a voltage drive unit, this voltage drive unit can determine the amplitude size and the number of cycles of voltage, and can carry out periodicity at this internal circuit and discharge and recharge.
4, the system of accurately measuring inside stray capacitance of automatic test equipment according to claim 1 is characterized in that wherein said ATE (automatic test equipment) more comprises a signalling channel, is that a signal is exported into end points.
5, the system of accurately measuring inside stray capacitance of automatic test equipment according to claim 1 is characterized in that wherein said subtest module more comprises one and discharges and recharges element.
6, the system of accurately measuring inside stray capacitance of automatic test equipment according to claim 5 is characterized in that wherein saidly discharging and recharging that element is included as an electric capacity and this electric capacity is a known constant.
7, a kind of circuit of accurately measuring inside stray capacitance of automatic test equipment is characterized in that it comprises:
One voltage drive unit is in order to produce a plurality of periodic high low-voltages; And
One discharges and recharges element, in order to be coupled with this voltage drive unit;
By this, can set up the stray capacitance of equation in the hope of this ATE (automatic test equipment).
8, the circuit of accurately measuring inside stray capacitance of automatic test equipment according to claim 7 is characterized in that wherein said equation is a R-C discharge equation.
9, a kind of method of accurately measuring inside stray capacitance of automatic test equipment is characterized in that it may further comprise the steps:
(a). carry out several by an ATE (automatic test equipment) itself and discharge and recharge;
(b). this ATE (automatic test equipment) is discharged, and record a discharge time simultaneously at interval;
(c). should interval substitution discharge discharge time mathematical expression then can get one the one R-C discharge equation;
(d). with this ATE (automatic test equipment) and subtest module coupling;
(e). repeating step (a)～(c) obtains one the 2nd R-C discharge equation with this; And
(f). by this first, second R-C discharge equation, in the hope of the stray capacitance of this ATE (automatic test equipment).
10, a kind of method of accurately measuring inside stray capacitance of automatic test equipment is characterized in that it may further comprise the steps:
One ATE (automatic test equipment) is provided, and it has an internal circuit and a voltage drive unit, and wherein this voltage drive unit can carry out several to this internal circuit and discharges and recharges, so that the electrical homogeneity of this internal circuit;
This ATE (automatic test equipment) is carried out discharge step, and this discharge step comprises:
(a). by this voltage drive unit this internal circuit is carried out several and discharge and recharge;
(b). magnitude of voltage is decremented to V2 by V1;
(c). try to achieve discharge time at interval; And
(d). with time interval substitution discharge mathematical expression, to obtain one the one R-C discharge equation;
One subtest module is provided, is and this ATE (automatic test equipment) coupling;
Repeat this discharge step (a)～(d), to obtain one the 2nd R-C discharge equation; And
By the stray capacitance of this first, second R-C equation in the hope of this ATE (automatic test equipment).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710188216 CN101430351A (en) | 2007-11-09 | 2007-11-09 | Circuit, system and method for accurately measuring inside stray capacitance of automatic test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710188216 CN101430351A (en) | 2007-11-09 | 2007-11-09 | Circuit, system and method for accurately measuring inside stray capacitance of automatic test equipment |
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| Publication Number | Publication Date |
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| CN101430351A true CN101430351A (en) | 2009-05-13 |
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| CN 200710188216 Pending CN101430351A (en) | 2007-11-09 | 2007-11-09 | Circuit, system and method for accurately measuring inside stray capacitance of automatic test equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308777A (en) * | 2013-05-29 | 2013-09-18 | 漳州师范学院 | Measurement method of capacitor and inductor |
| CN109062159A (en) * | 2018-08-09 | 2018-12-21 | 中电九天智能科技有限公司 | TV set production line no worker monitor system |
| CN111487514A (en) * | 2020-04-20 | 2020-08-04 | 全球能源互联网研究院有限公司 | Method and system for extracting stray capacitance of IGBT dynamic parameter test circuit |
-
2007
- 2007-11-09 CN CN 200710188216 patent/CN101430351A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308777A (en) * | 2013-05-29 | 2013-09-18 | 漳州师范学院 | Measurement method of capacitor and inductor |
| CN103308777B (en) * | 2013-05-29 | 2016-02-03 | 漳州师范学院 | The measuring method of electric capacity and inductance |
| CN109062159A (en) * | 2018-08-09 | 2018-12-21 | 中电九天智能科技有限公司 | TV set production line no worker monitor system |
| CN111487514A (en) * | 2020-04-20 | 2020-08-04 | 全球能源互联网研究院有限公司 | Method and system for extracting stray capacitance of IGBT dynamic parameter test circuit |
| CN111487514B (en) * | 2020-04-20 | 2022-07-22 | 全球能源互联网研究院有限公司 | Method and system for extracting stray capacitance of IGBT dynamic parameter test circuit |
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Application publication date: 20090513 |