CN101424846B - 薄膜晶体管液晶显示器阵列基板、液晶显示面板及其制造方法 - Google Patents
薄膜晶体管液晶显示器阵列基板、液晶显示面板及其制造方法 Download PDFInfo
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- CN101424846B CN101424846B CN2007101764648A CN200710176464A CN101424846B CN 101424846 B CN101424846 B CN 101424846B CN 2007101764648 A CN2007101764648 A CN 2007101764648A CN 200710176464 A CN200710176464 A CN 200710176464A CN 101424846 B CN101424846 B CN 101424846B
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- 229920002120 photoresistant polymer Polymers 0.000 claims description 20
- 238000009413 insulation Methods 0.000 claims description 17
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- 238000001259 photo etching Methods 0.000 claims description 14
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- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- 229910001080 W alloy Inorganic materials 0.000 claims description 6
- 230000000750 progressive effect Effects 0.000 claims description 6
- 238000004062 sedimentation Methods 0.000 claims description 5
- 238000011165 process development Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 24
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 12
- 239000011733 molybdenum Substances 0.000 description 12
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- 229910001182 Mo alloy Inorganic materials 0.000 description 10
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
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- 238000005229 chemical vapour deposition Methods 0.000 description 2
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
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Abstract
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Claims (17)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2007101764648A CN101424846B (zh) | 2007-10-29 | 2007-10-29 | 薄膜晶体管液晶显示器阵列基板、液晶显示面板及其制造方法 |
Applications Claiming Priority (1)
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CN2007101764648A CN101424846B (zh) | 2007-10-29 | 2007-10-29 | 薄膜晶体管液晶显示器阵列基板、液晶显示面板及其制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN101424846A CN101424846A (zh) | 2009-05-06 |
CN101424846B true CN101424846B (zh) | 2010-08-25 |
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CN2007101764648A Expired - Fee Related CN101424846B (zh) | 2007-10-29 | 2007-10-29 | 薄膜晶体管液晶显示器阵列基板、液晶显示面板及其制造方法 |
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Country | Link |
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CN (1) | CN101424846B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102749778B (zh) | 2012-07-03 | 2014-12-10 | 京东方科技集团股份有限公司 | 一种阵列基板和液晶显示装置 |
CN102998845B (zh) * | 2012-12-11 | 2015-07-15 | 京东方科技集团股份有限公司 | 一种液晶显示屏及显示装置 |
CN103323975B (zh) * | 2013-06-08 | 2015-09-23 | 北京京东方光电科技有限公司 | 一种阵列基板、液晶显示面板及显示装置 |
CN104597660A (zh) * | 2015-02-10 | 2015-05-06 | 京东方科技集团股份有限公司 | 一种薄膜晶体管玻璃基板和显示器 |
CN107221501B (zh) * | 2017-05-26 | 2020-03-10 | 京东方科技集团股份有限公司 | 垂直型薄膜晶体管及其制备方法 |
CN109254463A (zh) * | 2018-11-13 | 2019-01-22 | 惠科股份有限公司 | 液晶显示器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1269042A (zh) * | 1998-03-12 | 2000-10-04 | 精工爱普生株式会社 | 有源矩阵发射装置及其制造方法 |
CN1287768A (zh) * | 1998-09-02 | 2001-03-14 | 精工爱普生株式会社 | 光源及显示装置 |
CN1346232A (zh) * | 2000-08-24 | 2002-04-24 | 三星Sdi株式会社 | 制造有机电致发光显示器的方法 |
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2007
- 2007-10-29 CN CN2007101764648A patent/CN101424846B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1269042A (zh) * | 1998-03-12 | 2000-10-04 | 精工爱普生株式会社 | 有源矩阵发射装置及其制造方法 |
CN1287768A (zh) * | 1998-09-02 | 2001-03-14 | 精工爱普生株式会社 | 光源及显示装置 |
CN1346232A (zh) * | 2000-08-24 | 2002-04-24 | 三星Sdi株式会社 | 制造有机电致发光显示器的方法 |
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CN101424846A (zh) | 2009-05-06 |
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Effective date of registration: 20201201 Address after: 215200 No. 1700, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu, Zhongshan North Road Patentee after: K-TRONICS (SUZHOU) TECHNOLOGY Co.,Ltd. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Address before: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee before: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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