CN101412020B - Composite Broadband Actuator System and Its Actuator - Google Patents

Composite Broadband Actuator System and Its Actuator Download PDF

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CN101412020B
CN101412020B CN2008102362707A CN200810236270A CN101412020B CN 101412020 B CN101412020 B CN 101412020B CN 2008102362707 A CN2008102362707 A CN 2008102362707A CN 200810236270 A CN200810236270 A CN 200810236270A CN 101412020 B CN101412020 B CN 101412020B
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actuator
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frequency
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陈仁文
朱莉娅
刘强
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Nanjing University of Aeronautics and Astronautics
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Abstract

本发明涉及一种复合式宽频带作动器系统及其作动器,属于主动控制或新型作动器技术领域。该系统,其特征在于:电压输入信号(1)依次与信号输入电路(2)、分频器(3)相连,其中分频器(3)输出端分成两条支路;一条支路经过压电功率放大器(4)与压电作动器相连;另一条支路经过电磁功率放大器(5)与电磁作动器相连;上述压电作动器与电磁作动器输出信号叠加后与输出端(8)相连。该复合式宽频带作动器,包括电磁作动器,其特征在于:在电磁作动器的输出轴上还复合有压电作动器。本发明将两者复合,配以相应分频及驱动电路,充分利用两种作动器的优点,扩展其工作频带。

The invention relates to a composite broadband actuator system and its actuator, belonging to the technical field of active control or new actuators. The system is characterized in that: the voltage input signal (1) is sequentially connected with the signal input circuit (2) and the frequency divider (3), wherein the output terminal of the frequency divider (3) is divided into two branches; one branch passes through the voltage divider The electric power amplifier (4) is connected to the piezoelectric actuator; the other branch is connected to the electromagnetic actuator through the electromagnetic power amplifier (5); (8) connected. The composite broadband actuator includes an electromagnetic actuator, and is characterized in that a piezoelectric actuator is compounded on the output shaft of the electromagnetic actuator. The invention combines the two with corresponding frequency division and drive circuits, fully utilizes the advantages of the two actuators, and expands their working frequency bands.

Description

复合式宽频带作动器系统及其作动器 Compound Broadband Actuator System and Its Actuator

技术领域technical field

本发明涉及一种复合式宽频带作动器系统及其作动器,属于主动控制或新型作动器技术领域。 The invention relates to a composite broadband actuator system and its actuator, belonging to the technical field of active control or new actuators. the

背景技术Background technique

作为振动控制领域的重要分支之一,振动主动控制发展迅速,在精密仪器、航空航天、交通运输及机械等很多场合都取得了被动控制无法比拟的效果。作动器又称执行器,是主动控制系统中的关键部分。作动器的作用是按照确定的控制律对控制对象施加控制力,以按所需方式改变系统的响应。传统的作动器包括液体作动、气体作动、电气作动、电磁作动等,虽然具有较大的工作行程、较高的运动速度和承载能力,但体积和重量较大、分辨率不高、动态响应范围较窄。基于机敏材料的智能作动器,包括应用压电陶瓷、压电薄膜、形状记忆合金、磁致伸缩合金、电流变液体等制成的作动器。在这些智能材料作动器中,压电作动器具有频率响应范围宽、响应速度快、精度高、能耗小等优点,但通常只适用于高频段驱动且输出位移较小。随着对对象振动控制要求的提高,对作动器的要求也愈来愈高,传统和新型的作动器都存在着各自的缺点,无法满足进行宽频率控制的需求。考虑到结构振动的特点是,在低频段具有较大幅值,在高频段表现的幅值较小,要实现振动的主动控制,对作动器的要求也是这样。因此,本发明的基本思路就是,通过特殊的结构,将低频大位移电磁作动器和高频小位移压电作动器进行复合,获得从低频到高频范围都能响应的宽频带复合式作动器。 As one of the important branches in the field of vibration control, active vibration control has developed rapidly, and has achieved incomparable effects in many occasions such as precision instruments, aerospace, transportation, and machinery. Actuators, also known as actuators, are key parts of active control systems. The role of the actuator is to exert control force on the control object according to the determined control law, so as to change the response of the system in the desired way. Traditional actuators include liquid actuation, gas actuation, electrical actuation, electromagnetic actuation, etc. Although they have a large working stroke, high motion speed and carrying capacity, they have large volume and weight and low resolution. High, narrow dynamic response range. Intelligent actuators based on smart materials, including actuators made of piezoelectric ceramics, piezoelectric films, shape memory alloys, magnetostrictive alloys, and electrorheological fluids. Among these intelligent material actuators, piezoelectric actuators have the advantages of wide frequency response range, fast response speed, high precision, and low energy consumption, but they are usually only suitable for high-frequency driving and have small output displacements. As the requirements for vibration control of objects increase, the requirements for actuators are also getting higher and higher. Both traditional and new actuators have their own shortcomings and cannot meet the needs of wide-frequency control. Considering that the characteristic of structural vibration is that it has a large amplitude in the low frequency band and a small amplitude in the high frequency band, the same is required for the actuator in order to realize the active control of vibration. Therefore, the basic idea of the present invention is to combine the low-frequency large-displacement electromagnetic actuator and the high-frequency small-displacement piezoelectric actuator through a special structure to obtain a broadband composite type that can respond from low frequency to high frequency range. actuator. the

发明内容Contents of the invention

电磁作动器工作在低频段时,其响应特性好、输出位移较大,由于自身的结构特点限制了其工作的上限频率,所以很难适应需要高频作动的场合,而压电作动器工作在高频段时,响应快、输出位移精度高,弥补了电磁作动器的不足。本发明利用两者的优点,将两者组合,提供一种复合式宽频带作动器系统及其作动器,扩展其工作频带。 When the electromagnetic actuator works in the low frequency band, it has good response characteristics and large output displacement. Due to its own structural characteristics that limit the upper limit frequency of its work, it is difficult to adapt to occasions that require high frequency actuation, while piezoelectric actuation When the actuator works in the high frequency band, it has fast response and high output displacement precision, which makes up for the deficiency of the electromagnetic actuator. The invention utilizes the advantages of the two, combines the two, provides a composite broadband actuator system and the actuator, and expands its working frequency band. the

一种宽频带复合式作动器系统,其特征在于:电压输出线路依次与信号输入电路、分频器相连,其中分频器输出端分成两条支路;一条支路经过压电功率放大器与压电作动器相连;另一条支路经过电磁功率放大器与电磁作动器相连;上述压电作动器与电磁作动器输出信号叠加后与输出端相连。 A broadband composite actuator system, characterized in that: the voltage output line is connected to the signal input circuit and the frequency divider in turn, wherein the output end of the frequency divider is divided into two branches; one branch passes through the piezoelectric power amplifier and the frequency divider. The piezoelectric actuator is connected; the other branch is connected with the electromagnetic actuator through the electromagnetic power amplifier; the piezoelectric actuator and the output signal of the electromagnetic actuator are superimposed and then connected to the output terminal. the

一种复合式宽频带作动器,包括电磁作动器,其特征在于:在电磁作动器的输出轴上还复合有压电作动器;与压电作动器相连的连杆作为该复合式作动器总的位移输出端。 A composite broadband actuator, including an electromagnetic actuator, is characterized in that: a piezoelectric actuator is compounded on the output shaft of the electromagnetic actuator; the connecting rod connected with the piezoelectric actuator serves as the The total displacement output of the compound actuator. the

本发明的一种宽频带复合式作动器系统包括信号输入电路、分频器、压电功率放大器、电磁功率放大器、复合式运动部件。其中复合式运动部件包括压电作动器和可动线圈两部分。信号输入电路将宽频的电压信号输送到分频器的输入端,分频器将信号分为高频信号和低频信号,并分别接入压电功率放大器和电磁功率放大器,压电功率放大器为压电作动器提供激励信号,电磁功率放大器为可动线圈提供激励信号。复合式作动器的输出位移表现为压电作动器与可动线圈各自输出位移的叠加。当输入信号频率较低时,复合式作动器的输出以可动线圈输出的大位移为主,此时压电作动器的输出位移几乎可以忽略;当输入信号为高频信号时,复合式作动器的输出以压电作动器的输出为主。以上的一种宽频带复合式作动器可以满足振动主动控制对作动器在低频段和高频段的不同作动要求,使整个作动系统能实现有效控制。 A broadband composite actuator system of the present invention includes a signal input circuit, a frequency divider, a piezoelectric power amplifier, an electromagnetic power amplifier, and composite moving parts. The composite moving parts include piezoelectric actuators and movable coils. The signal input circuit transmits the broadband voltage signal to the input terminal of the frequency divider. The electric actuator provides the excitation signal, and the electromagnetic power amplifier provides the excitation signal for the movable coil. The output displacement of the composite actuator is the superposition of the respective output displacements of the piezoelectric actuator and the movable coil. When the frequency of the input signal is low, the output of the composite actuator is dominated by the large displacement output by the movable coil, and the output displacement of the piezoelectric actuator is almost negligible; when the input signal is a high-frequency signal, the composite actuator The output of the piezoelectric actuator is mainly the output of the piezoelectric actuator. The above broadband composite actuator can meet the different actuation requirements of the active vibration control for the actuator in the low frequency band and the high frequency band, so that the entire actuation system can be effectively controlled. the

一般的随机振动信号都是宽频信号,在低频段的振动幅度较大,在高频段的振动幅度较小。分频器的作用就是为了将输入信号分成两个或多个频段,对于不同频段分别采用适合的作动器,从而最大限度地发挥各作动器的优势。分频器是通过滤波原理实现的,输入信号经低通滤波器后得到低频信号,经高通滤波器后得到高频信号。 General random vibration signals are broadband signals, the vibration amplitude in the low frequency band is larger, and the vibration amplitude in the high frequency band is smaller. The function of the frequency divider is to divide the input signal into two or more frequency bands, and use suitable actuators for different frequency bands, so as to maximize the advantages of each actuator. The frequency divider is realized by the principle of filtering. The input signal is passed through a low-pass filter to obtain a low-frequency signal, and after passing through a high-pass filter, a high-frequency signal is obtained. the

功率放大的作用是将输入的小信号进行电流或(和)电压的放大,使其有足够的能量来推动后面的作动元件。在较高的电压输入范围内,压电材料的输出位 移与输入电压成线性关系,所以需要将分频后得到的高频信号进行适当的电压放大。可动线圈的作动力和电流呈线性关系,所以需要将分频后得到的低频信号进行适当的电流放大,以便满足可动线圈的作动要求。 The function of power amplification is to amplify the input small signal to current or (and) voltage, so that it has enough energy to push the actuating element behind. In the higher voltage input range, the output displacement of the piezoelectric material has a linear relationship with the input voltage, so it is necessary to properly amplify the high-frequency signal obtained after frequency division. The actuating force and current of the movable coil have a linear relationship, so it is necessary to properly amplify the current of the low-frequency signal obtained after frequency division in order to meet the actuating requirements of the movable coil. the

压电作动器作为本发明中作动器的核心部件之一,其作动力的产生主要是利用了压电材料的逆压电效应。逆压电效应是指在压电元件的极化方向上通以电压,由于电场的作用,造成压电元件内部正负电荷中心产生相对位移,导致压电元件的变形。即将压电材料制成作动元件,通过施加外部电场将电能转化成机械能,输出位移,形成作动力。选择压电材料的依据是其性能参数,对用于本发明的压电作动器,可选用具有较大压电应变常数的压电材料。 The piezoelectric actuator is one of the core components of the actuator in the present invention, and its driving force is mainly generated by using the inverse piezoelectric effect of the piezoelectric material. The inverse piezoelectric effect means that a voltage is applied in the polarization direction of the piezoelectric element. Due to the action of the electric field, the positive and negative charge centers inside the piezoelectric element are relatively displaced, resulting in deformation of the piezoelectric element. That is to say, the piezoelectric material is made into the actuating element, and the electrical energy is converted into mechanical energy by applying an external electric field, and the displacement is output to form the actuating force. The basis for selecting the piezoelectric material is its performance parameters. For the piezoelectric actuator used in the present invention, the piezoelectric material with a larger piezoelectric strain constant can be selected. the

可动线圈通以电流时,受到洛伦茨力的作用,产生位移。洛伦茨力的大小与线圈的匝数、直径、磁场强度以及电流大小有关,磁场由永磁材料产生,并经软磁体形成闭合磁路。本发明通过控制电流实现对可动线圈的位移控制。 When a current is applied to the movable coil, it is subjected to the Lorentz force, resulting in a displacement. The magnitude of the Lorentz force is related to the number of turns, diameter, magnetic field strength and current of the coil. The magnetic field is generated by a permanent magnetic material and forms a closed magnetic circuit through a soft magnet. The invention realizes the displacement control of the movable coil by controlling the current. the

线圈支架与压电作动器是一个整体结构。由于可动线圈本身具有较大质量,它和片状弹簧构成了一个低通的位移响应结构,当压电部分产生高频振动时,底部的线圈几乎处于静止状态,所以压电作动器的输出位移全部体现在连杆的输出端。为防止线圈支架沿轴向往复运动时与作动器的磁性材料产生摩擦或碰撞,采用片状弹簧提供恢复力。结合压电作动和电磁作动各自优势组合而成的宽频带复合式作动器可以实现对被控对象准确、快速的控制,尤其适用于对工作频带要求较宽和定位精度较高的工作场合。 The coil support and the piezoelectric actuator are an integral structure. Since the movable coil itself has a large mass, it forms a low-pass displacement response structure with the leaf spring. When the piezoelectric part generates high-frequency vibration, the coil at the bottom is almost in a static state, so the piezoelectric actuator The output displacement is all reflected in the output end of the connecting rod. In order to prevent the coil support from rubbing or colliding with the magnetic material of the actuator when reciprocating in the axial direction, a leaf spring is used to provide the restoring force. Combining the respective advantages of piezoelectric actuation and electromagnetic actuation, the wide-band composite actuator can realize accurate and rapid control of the controlled object, especially suitable for work that requires a wide operating frequency band and high positioning accuracy occasion. the

附图说明Description of drawings

图1是宽频带复合式作动器系统原理图。 Figure 1 is a schematic diagram of the broadband compound actuator system. the

图2是宽频带复合式作动器结构图。 Figure 2 is a structural diagram of a broadband compound actuator. the

附图中的标号说明:A.复合式作动器,1.电压输入信号,2.信号输入电路,3.分频器,4.压电功率放大器,5.电磁功率放大器,6.压电作动器,7.可动线圈,8.输出位移,9.底座,10.线圈绕组,11.线圈支架,12.片状弹簧,13.连杆,14.压电筒,15.永磁体,16.软磁体。 Explanation of symbols in the accompanying drawings: A. Composite actuator, 1. Voltage input signal, 2. Signal input circuit, 3. Frequency divider, 4. Piezoelectric power amplifier, 5. Electromagnetic power amplifier, 6. Piezoelectric Actuator, 7. Movable coil, 8. Output displacement, 9. Base, 10. Coil winding, 11. Coil support, 12. Leaf spring, 13. Connecting rod, 14. Piezoelectric tube, 15. Permanent magnet, 16. Soft magnets. the

具体实施方式Detailed ways

下面结合附图对本发明作进一步详细描述: Below in conjunction with accompanying drawing, the present invention is described in further detail:

图1为宽频带复合式作动器系统原理图,本发明的宽频带复合式作动器系统,包括电压输入信号1、信号输入电路2、分频器3、压电功率放大器4、电磁功率放大器5、复合式作动器A。其中电压输入信号1、信号输入电路2、分频器3、压电功率放大器4及电磁功率放大器5位于复合式作动器A的外围,外部输入的宽频随机电压信号,经过信号输入电路2接到分频器3的输入端,分频器3将该信号分别通过低通滤波器和高通滤波器,分为低频段和高频段两部分。分频器3产生的低频段输出信号接电磁作动功率放大器5的输入端,高频段输出信号接压电功率放大器4的输入端。复合式作动器A包括压电作动器6和可动线圈7,压电功率放大器4将高频电压信号放大后传输到压电作动器6的输入端,电磁功率放大器5将低频电压信号放大为大电流信号后传输到可动线圈7的输入端。 Fig. 1 is a schematic diagram of a broadband composite actuator system. The broadband composite actuator system of the present invention includes a voltage input signal 1, a signal input circuit 2, a frequency divider 3, a piezoelectric power amplifier 4, and an electromagnetic power Amplifier 5, composite actuator A. Among them, the voltage input signal 1, the signal input circuit 2, the frequency divider 3, the piezoelectric power amplifier 4 and the electromagnetic power amplifier 5 are located on the periphery of the composite actuator A, and the broadband random voltage signal input from the outside is connected to the signal through the signal input circuit 2. To the input terminal of the frequency divider 3, the frequency divider 3 passes the signal through a low-pass filter and a high-pass filter respectively, and divides the signal into two parts, the low frequency band and the high frequency band. The low-frequency output signal generated by the frequency divider 3 is connected to the input end of the electromagnetic actuation power amplifier 5 , and the high-frequency output signal is connected to the input end of the piezoelectric power amplifier 4 . The composite actuator A includes a piezoelectric actuator 6 and a movable coil 7. The piezoelectric power amplifier 4 amplifies the high-frequency voltage signal and transmits it to the input terminal of the piezoelectric actuator 6. The electromagnetic power amplifier 5 converts the low-frequency voltage signal to the input terminal of the piezoelectric actuator 6. After the signal is amplified into a large current signal, it is transmitted to the input end of the movable coil 7 . the

图2为宽频带复合式作动器结构图,底座9固定整个复合式作动器装置,永磁体15固定在作动器的轴线上,线圈支架11位于永磁体15与软磁体16之间,线圈绕组10固定在线圈支架11上,压电筒14与线圈支架11固定在一起,片状弹簧12固定在压电筒14与外壳之间,与压电筒14相连的连杆13为复合式作动器的输出端。 Figure 2 is a structural diagram of a broadband composite actuator, the base 9 fixes the entire composite actuator device, the permanent magnet 15 is fixed on the axis of the actuator, and the coil support 11 is located between the permanent magnet 15 and the soft magnet 16, The coil winding 10 is fixed on the coil support 11, the piezoelectric cylinder 14 and the coil support 11 are fixed together, the leaf spring 12 is fixed between the piezoelectric cylinder 14 and the casing, and the connecting rod 13 connected with the piezoelectric cylinder 14 is a composite actuator output terminal. the

本发明的宽频带复合式作动系统结合了电磁作动和压电作动的优点,使复合式作动器的输出特性在低频和高频范围内都较好。对于单独的可动线圈,低频段输出行程大,但高频相应性能不好;对于单独的压电作动器,在低频段输出位移较小,但在高频段对信号的跟随能力较强,所以首先将输入信号通过分频器进行适当的分频,以分别输送到相应的执行器去作动,力求使可动线圈和压电作动分别在低频、高频范围内表现出良好的动态响应性能。 The broadband composite actuation system of the invention combines the advantages of electromagnetic actuation and piezoelectric actuation, so that the output characteristics of the composite actuator are good in both low frequency and high frequency ranges. For a single movable coil, the output stroke is large in the low-frequency range, but the high-frequency response performance is not good; for a single piezoelectric actuator, the output displacement is small in the low-frequency range, but the ability to follow the signal is strong in the high-frequency range. Therefore, first of all, the input signal is properly divided by the frequency divider, so as to be respectively sent to the corresponding actuators for actuation, and strive to make the movable coil and piezoelectric actuation show good dynamics in the low frequency and high frequency ranges respectively. Responsive performance. the

本发明选用可动线圈,因为电磁作动相较气动、液动等同样用于输出大行程的驱动方式而言,电源的获取更加简单易行、作动器可控性好。可动线圈是通过电磁感应定律实现能量转换的,经过电磁作动功率放大器的输出电流信号接入线圈,使其在磁场中受到力的作用产生运动。线圈位置、长宽比等参数的设计的要求是,在提供工作需要的磁势前提下尽量减小线圈的尺寸和重量,以减少线圈发热和自身重量对作动器性能的影响。构成导磁回路的磁性材料应该具有较高的磁饱和密度、磁导率、低磁滞损耗等特点以满足电磁作动的要求。片状弹簧12的主要目的是防止可动线圈在持续的往复运动过程中,线圈支架与导磁材料(永磁体及软磁体)之间发生碰撞,同时也可对压电筒起到一定的支撑和稳固作用,并与可动线圈一同组成弹簧-质量低通位移响应系统,隔离压电筒在高频振动时引起的可动线圈位移。The present invention selects the movable coil, because the electromagnetic actuation is more simple and easy to obtain the power supply, and the controllability of the actuator is better than that of the pneumatic, hydraulic and other driving methods that are also used for outputting large strokes. The movable coil realizes energy conversion through the law of electromagnetic induction, and the output current signal of the electromagnetically actuated power amplifier is connected to the coil to make it move under the action of force in the magnetic field. The design requirements of coil position, aspect ratio and other parameters are to minimize the size and weight of the coil under the premise of providing the magnetic potential required for the work, so as to reduce the influence of coil heating and its own weight on the performance of the actuator. The magnetic material constituting the magnetic circuit should have high magnetic saturation density, magnetic permeability, low hysteresis loss and other characteristics to meet the requirements of electromagnetic actuation. The main purpose of the leaf spring 12 is to prevent the movable coil from colliding with the magnetically permeable material (permanent magnet and soft magnet) during the continuous reciprocating motion, and it can also provide certain support and protection for the piezoelectric tube. It has a stable effect and forms a spring-mass low-pass displacement response system together with the movable coil to isolate the displacement of the movable coil caused by the high-frequency vibration of the piezoelectric tube.

本发明所述的压电作动器,可采用空心圆柱形压电作动器和压电堆等形式。压电作动器主要是利用压电材料的逆压电效应。空心圆柱形压电作动器由薄壁金属圆柱管及在其上粘贴的空心圆柱形压电材料构成,其金属圆柱管的外圆表面与空心压电材料的内圆表面成较小的间隙配合,并用胶将它们粘在一起。相较其他智能材料,压电材料空心圆柱形作动器更适合在本发明中作为压电作动器。经过压电功率放大器输出的电压信号产生电场,使压电陶瓷内部正负电荷中心发生相对移动,产生机械变形,且该变形与输入电压有良好的线性关系。尽管压电材料的压电应变关系是多维的,有几个压电常数,选用哪个压电常数应根据压电作动器具体的工作方式决定,如果采用压电空心圆柱形结构,则利用d31产生位移,如果采用压电堆式的结构,则仅利用d33产生位移。具体实现时应尽量选择较大的压电应变常数以产生较大的位移和作动力。压电筒在高频段表现出的位移精度可以使复合式作动器对于高频段的振动信号具有良好的控制效果。The piezoelectric actuator described in the present invention can be in the form of a hollow cylindrical piezoelectric actuator or a piezoelectric stack. Piezoelectric actuators mainly use the inverse piezoelectric effect of piezoelectric materials. The hollow cylindrical piezoelectric actuator is composed of a thin-walled metal cylindrical tube and a hollow cylindrical piezoelectric material pasted on it, and the outer surface of the metal cylindrical tube forms a small gap with the inner surface of the hollow piezoelectric material. Fit, and glue them together. Compared with other smart materials, the piezoelectric material hollow cylindrical actuator is more suitable as the piezoelectric actuator in the present invention. The voltage signal output by the piezoelectric power amplifier generates an electric field, which causes the relative movement of the positive and negative charge centers inside the piezoelectric ceramic, resulting in mechanical deformation, and the deformation has a good linear relationship with the input voltage. Although the piezoelectric strain relationship of the piezoelectric material is multi-dimensional, there are several piezoelectric constants, which piezoelectric constant should be selected according to the specific working mode of the piezoelectric actuator. If the piezoelectric hollow cylindrical structure is used, d 31 produces displacement, if a piezoelectric stack structure is used, only d 33 is used to produce displacement. In the specific implementation, a larger piezoelectric strain constant should be selected as much as possible to generate a larger displacement and action force. The displacement accuracy exhibited by the piezoelectric cylinder in the high-frequency band can make the compound actuator have a good control effect on the vibration signal in the high-frequency band.

Claims (5)

1.一种复合式宽频带作动器系统,其特征在于:外部电压输入信号(1)依次与信号输入电路(2)、分频器(3)相连,其中分频器(3)输出端分成两条支路;一条支路经过压电功率放大器(4)与压电作动器相连;另一条支路经过电磁功率放大器(5)与电磁作动器相连;上述压电作动器与电磁作动器输出信号叠加后与输出端(8)相连。1. A composite broadband actuator system, characterized in that: the external voltage input signal (1) is connected to the signal input circuit (2) and the frequency divider (3) in turn, wherein the frequency divider (3) output terminal Divided into two branches; one branch is connected with the piezoelectric actuator through the piezoelectric power amplifier (4); the other branch is connected with the electromagnetic actuator through the electromagnetic power amplifier (5); the above-mentioned piezoelectric actuator is connected with the The output signals of the electromagnetic actuator are superimposed and connected to the output terminal (8). 2.一种复合式宽频带作动器,包括电磁作动器,其特征在于:在电磁作动器的输出轴上还复合有压电作动器;与压电作动器相连的连杆(13)作为该复合式作动器总的位移输出端。2. A compound broadband actuator, comprising an electromagnetic actuator, is characterized in that: a piezoelectric actuator is also compounded on the output shaft of the electromagnetic actuator; the connecting rod connected to the piezoelectric actuator (13) As the total displacement output end of the composite actuator. 3.根据权利要求2所述的复合式宽频带作动器,其特征在于:在压电作动器与复合式宽频带作动器的外壳之间还安装有起支撑及恢复作用的片状弹簧(12)。3. The composite broadband actuator according to claim 2, characterized in that: between the piezoelectric actuator and the shell of the composite broadband actuator, a sheet-shaped spring (12). 4.根据权利要求2所述的复合式宽频带作动器,其特征在于:所述的压电作动器为空心圆柱形压电作动器或压电叠堆。4. The composite broadband actuator according to claim 2, characterized in that: the piezoelectric actuator is a hollow cylindrical piezoelectric actuator or a piezoelectric stack. 5.根据权利要求2所述的复合式宽频带作动器,其特征在于:所述的电磁作动器由底座(9)、安装于底座(9)上的永磁体(15)、与永磁体(15)相对布置的软磁体(16),安装于永磁体(15)和软磁体(16)之间的线圈绕组(10),其中线圈绕组(10)采用线圈支架(11)支撑。5. The composite broadband actuator according to claim 2, characterized in that: the electromagnetic actuator consists of a base (9), a permanent magnet (15) installed on the base (9), and a permanent The magnet (15) is arranged opposite to the soft magnet (16), and the coil winding (10) is installed between the permanent magnet (15) and the soft magnet (16), wherein the coil winding (10) is supported by a coil bracket (11).
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