CN101409963B - Apparatus and method for generating ultraviolet light by electron beam pump crystal material - Google Patents

Apparatus and method for generating ultraviolet light by electron beam pump crystal material Download PDF

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Publication number
CN101409963B
CN101409963B CN2007101756321A CN200710175632A CN101409963B CN 101409963 B CN101409963 B CN 101409963B CN 2007101756321 A CN2007101756321 A CN 2007101756321A CN 200710175632 A CN200710175632 A CN 200710175632A CN 101409963 B CN101409963 B CN 101409963B
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electron beam
crystalline material
ultraviolet light
metal electrode
electron gun
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CN2007101756321A
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CN101409963A (en
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吕惠宾
金奎娟
杨国桢
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Beijing Photoelectric Technology Co ltd
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Institute of Physics of CAS
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Abstract

The invention provides a device which generates ultraviolet radiation by electron beam direct pump crystal material, comprising crystal material; the device is characterized in that the device also comprises an electron gun and a vacuum system; the crystal material is bonded or encapsulated on the output window of the electron beam by a vacuum O-shaped ring; the vacuum system is directly connected on the electron gun; the crystal material is provided with a metal electrode; the crystal material 3 is grounded by the metal electrode, thus ensuring the electron beam to form a circuit. The methodgenerates the ultraviolet by wide-band gap crystal material with the electron beam direct pump wide-band gap of more than 3eV. According to the requirements, different crystal materials can be selected, thus gaining the ultraviolet of different wavelengths. Continuous or pulse electron beam is selected, thus gaining ultraviolet output continuously or output by pulse.

Description

A kind of apparatus and method that produce ultraviolet light with electron beam pump crystal material
Technical field
The present invention relates to a kind of apparatus and method that produce ultraviolet light, particularly a kind of apparatus and method of utilizing the electron beam direct pump crystal material to produce ultraviolet light.
Background technology
Ultraviolet light has important in a lot of fields such as environmental protection, medical science, scientific research, space exploration and military affairs and uses widely, so people manage to obtain ultraviolet source through different techniques and method.As: the ultraviolet-ray diode (list of references 1: the sharp Electro-optical Technology, INC. (US) 62 Martin Road, Concord, Massachusetts 017 of Shenzhen's brightness product description that utilizes germanium, silicon materials preparation; List of references 2: the big wound in Shenzhen Electronics Co., Ltd. product description); (list of references 3: Shanghai reaches pure Environmental Protection Technology Co., Ltd product description to utilize xenon etc. to be prepared into ultraviolet lamp tube; List of references 4: PHILIPS Co.'s product description); Even utilize gases such as ArF, Krf, XeCl, XeF to develop ultraviolet laser device (list of references 5: German Lambda Physik Company products specification).Utilize the apparatus and method of the above-mentioned generation ultraviolet light of introducing, it is too little that the ultraviolet source that is produced has plenty of power, and it is limited to have plenty of wave-length coverage, especially will obtain the different wave length ultraviolet light, and for example the ultraviolet light of deep ultraviolet is not easy more.In a word, existing ultraviolet source also can not satisfy needs of people and requirement far away.
Summary of the invention
The objective of the invention is to; Overcome the shortcoming and defect of the apparatus and method of above-mentioned existing generation ultraviolet light; For satisfying the requirement of needs of people and aspects such as industry, scientific research; Thereby provide a kind of, produce the apparatus and method of different wave length ultraviolet light through with electron beam pump-coupling crystalline material.This method is utilized the crystalline material of the different energy gaps of electron beam direct pumping, obtains the ultraviolet light of different wave length output; Utilize continuous electron beam or pulsed electron beam pumping, obtain the continuous output or the pulse output of different wave length ultraviolet light.
The objective of the invention is to realize like this:
The present invention provides a kind of device that produces ultraviolet radiation with electron beam pump-coupling crystalline material; Comprise: crystalline material (3); Wherein: also comprise electron gun (1) and vacuum system (2); Described crystalline material (3) bonding or with vacuum " O " circle press seal on the electron beam output window of electron gun (1), described vacuum system (2) directly is connected on the electron gun (1), described crystalline material is provided with a metal electrode on (3); Utilize metal electrode crystalline material (3) ground connection, make electron beam can form a loop; Said crystalline material (3) is SrTiO 3, BaTiO 3, LiAlO 2, LSAT, Al 2O 3, ZnO, LaAlO 3, MgO, YSZ, NdGaO 3, NdCaAlO 4, SrLaAlO 4, GGG, KTaO 3, GdScO 2, DyScO 3, MgF, TeO 2, LaF or LiNbO 3
In above-mentioned technical scheme; Also comprise electron gun 1 and vacuum system 2; Crystalline material 3 bonding or with vacuum " O " circle press seal on the window of electron beam outgoing, described vacuum system 2 is directly installed on the electron gun 1, on the described crystalline material 3 metal electrode is set; Utilize metal electrode crystalline material 3 ground connection, ensure that electron beam can form a loop (with reference to figure 2).
In above-mentioned technical scheme, described metal electrode is for processing the metal electrode of a point, a line or a face on described crystalline material 3, and this metal electrode is metallic conduction materials such as gold, silver, platinum, indium, tin, aluminium, copper.
In above-mentioned technical scheme, described electron gun 1 is continuous for output, or pulsed electron beam.
In above-mentioned technical scheme, described crystalline material 3 is square, triangle, cylindrical or polygon.In order to obtain preferably ultraviolet light emission and to prevent diffusing of the ultraviolet light that produces, carry out optical polish to the exit facet of crystalline material 3 ultraviolet lights, remaining face can polish, and also can not polish.
Application provided by the invention is above-described to produce the method for the device of ultraviolet radiation with electron beam pump-coupling crystalline material, may further comprise the steps:
1). be tightly connected electron gun (1) and vacuum system (2); Or be installed in electron gun (1) on the vacuum chamber (4), be tightly connected with vacuum system (2);
2). the preparation metal electrode: earlier go up metal electrode of welding at crystalline material (3), bonding or enclose press seal on the output window of electron beam described crystalline material (3) then with vacuum " O "; Or, utilize metal electrode crystalline material (3) ground connection for to be placed on vacuum chamber (4) lining to crystalline material (3), ensure that electron beam can form a loop;
3). the vacuum degree of vacuum chamber is evacuated to more than the 10-2Pa, to ensure the normal transmission of electron gun electron beam;
4). start electron gun 1, with electron beam pump-coupling crystalline material 3.If select energy gap to do crystalline material 3 greater than the crystalline material of 3eV, when a branch of electron beam energy greater than 3eV incide crystalline material 3 time, just can excite the electronics in the crystalline material 3, the electronics that is excited is through being with transition generation ultraviolet light;
Wherein said crystalline material (3) is SrTiO 3, BaTiO 3, LiAlO 2, LSAT, Al 2O 3, ZnO, LaAlO 3, MgO, YSZ, NdGaO 3, NdCaAlO 4, SrLaAlO 4, GGG, KTaO 3, GdScO 2, DyScO 3, MgF, TeO 2, LaF or LiNbO 3
In above-mentioned technical scheme, described electron beam can be continuous, also can be pulse.Select the electron beam of continuous or pulse for use, just can obtain continuously or the ultraviolet light of pulse.
In above-mentioned technical scheme, described electron beam can be from the positive incident of crystalline material 3, also can be from the side incident of crystalline material 3.When electron beam incident arrived crystalline material 3, each face of crystalline material 3 all can send ultraviolet light.Therefore can be as required be processed into square, triangle, cylindrical or polygon to crystalline material 3.
The invention has the advantages that:
The invention provides the apparatus and method of the generation different wave length ultraviolet light that a kind of other method is difficult to realize; Apparatus and method with electron beam pumping broad stopband crystalline material generation ultraviolet radiation provided by the present invention utilize electron beam direct pumping energy gap to produce ultraviolet light greater than the broad stopband crystalline material of 3eV.Can select crystals with different material 3 as required, obtain the ultraviolet light of different wave length.Select for use continuously or the electron beam of pulse, can be exported continuously or the ultraviolet light of pulse output.These apparatus and method are not only simple, and can obtain the ultraviolet light of the continuous output or the pulse output of the different wave length that other method is difficult to obtain.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is carried out detailed explanation:
Fig. 1 produces the apparatus and method sketch map 1 of ultraviolet radiation with electron beam pump crystal material.
Fig. 2 produces the apparatus and method sketch map 2 of ultraviolet radiation with electron beam pump crystal material.
Drawing is described as follows:
1---electron gun; 2---vacuum system;
3---crystalline material; 4---vacuum chamber.
Embodiment
Embodiment 1:
With reference to figure 1, make a device with the wide crystalline material generation of electron beam pumping ultraviolet radiation of the present invention, and combine this device explanation how to use the method that this device is used the wide crystalline material generation of electron beam pumping ultraviolet light.
The electron gun that utilizes 25KV to export continuously that electron gun 1 among Fig. 1 selects for use Shenyang section of Chinese Academy of Sciences appearance development center to produce; Electron gun 1 sealing is installed on the vacuum chamber 4 of diameter 500mm; Molecular pump with 8 liters/minute mechanical pumps and 500 liters is formed vacuum system 2, this vacuum system 2 and vacuum chamber 4 sealing UNICOMs; The crystalline material of selecting for use 3 is the MgO monocrystalline crystalline material of the thick 1mm of the long X of the wide X10mm of 5mm, and two faces of the long 10mm of wherein wide 5mmX are optical polish, and uses the indium welding lead on the limit of MgO; Avoided the absorption of atmosphere, be placed on crystalline material 3 in the vacuum chamber 4, with the lead ground connection on the MgO (with reference to figure 1) DUV.
Use above-mentioned device, the electron beam pumping MgO crystalline material of output produces the method for ultraviolet radiation, may further comprise the steps:
1). be installed in electron gun 1 on the vacuum chamber 4, utilize vacuum system 2 to be evacuated to 10 to the vacuum degree of vacuum chamber -2More than the Pa, to ensure the normal transmission of electron gun to electron beam;
2). preparation metal electrode: for fear of the absorption of atmosphere to DUV; On a limit of crystalline material 3, weld an indium electrode earlier; Be placed on 4 li of vacuum chambers to MgO crystalline material 3 then, utilize indium electrode handle crystalline material 3 ground connection, ensure that electron beam can form a loop;
3). ensureing the normal transmission of electron gun, after the vacuum degree of vacuum chamber is found time to reach 10-2Pa to electron beam;
4). start electron gun 1, the electron beam energy that 25KV voltage produces is 25KeV, and the energy of its electron beam is far longer than the energy gap 8eV of MgO material, therefore can excite the electronics among the MgO and produces ultraviolet light.Incide electron beam direct on the MgO crystalline material 3, produce the continuous ultraviolet light of wavelength≤160nm with electron beam pumping MgO crystal.
Measurement result is following:
Measure the power of output ultraviolet light with energy meter,, record its ultraviolet light in the back of MgO and be output as 25mW when electron beam during from the long MgO front incident of the wide 10mm of 5mm.
Measure the power of output ultraviolet light with energy meter,, record its ultraviolet light at the long face of the wide 10mm of the 5mm of MgO and be output as 18mW when electron beam during from the long MgO side incident of the wide 10mm of 5mm.
Embodiment 2
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select the LaAlO of wide 10mm length of 5mm and thickness 1mm for use 3Replace MgO to do crystalline material 3, all the other are with embodiment 1, and the method for pumping is also with embodiment 1.Use electron beam pumping LaAlO 3Crystal produces the ultraviolet light of wavelength≤250nm.
Measure the power of exporting ultraviolet light with energy meter, as the LaAlO of electron beam from the wide 10mm length of 5mm 3During front incident, at LaAlO 3The back record its ultraviolet light and be output as 23mW.
Measure the power of exporting ultraviolet light with energy meter, as the LaAlO of electron beam from the wide 10mm length of 5mm 3During side incident, at LaAlO 3The long face of the wide 10mm of 5mm record its ultraviolet light and be output as 15mW.
Embodiment 3:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select diameter 3mm for use, the MgO cylindrical rod of long 15mm replaces square MgO to do crystalline material 3, and two end faces of MgO carry out optical polish.Electron beam is from the surface feeding sputtering of MgO, with the output of energy meter from another end surface measurement ultraviolet light.Its ultraviolet light is output as 32mW.All the other are with embodiment 1, and the method for pumping is also with embodiment 1.
Embodiment 4:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select the Al of wide 10mm length of 5mm and thickness 5mm for use 2O 3Replace MgO to do crystalline material 3.Al 2O 3Six faces all carry out optical polish, all the other are with embodiment 1.Use electron beam pumping Al 2O 3Crystal produces ultraviolet light.
Embodiment 5:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select for use the LSAT crystal to replace MgO to do crystalline material 3, all the other are with embodiment 1.Produce ultraviolet light with electron beam pumping LSAT crystal.
Embodiment 6:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select for use the YSZ crystal to replace MgO to do crystalline material 3, all the other are with embodiment 1.Produce ultraviolet light with electron beam pumping YSZ crystal.
Embodiment 7:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select SrLaAlO for use 4Crystal replaces MgO to do crystalline material 3, and all the other are with embodiment 1.Use electron beam pumping SrLaAlO 4Crystal produces ultraviolet light.
Embodiment 8:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select for use the MgF crystal to replace MgO to do crystalline material 3, all the other are with embodiment 1.Produce ultraviolet light with electron beam pumping MgF crystal.
Embodiment 9:
Press embodiment 1 and make the device that the wide crystalline material of a usefulness electron beam pumping produces ultraviolet radiation, just select for use the LaF crystal to replace MgO to do crystalline material 3, all the other are with embodiment 1.Produce ultraviolet light with electron beam pumping LaF crystal.
Embodiment 10:
With reference to figure 2; Make a device that produces ultraviolet radiation with the wide crystalline material of electron beam pumping of the present invention; The 25KV electron gun that electron gun 1 among the figure selects for use Shenyang section of Chinese Academy of Sciences appearance development center to produce; Directly be connected electron gun 1 with vacuum system 2, form vacuum system 2, select the square SrTiO of length of side 10mm for use with the molecular pump of 2 liters/minute mechanical pumps and 100 liters 3Do crystalline material 3, square SrTiO 3Six faces all carry out optical polish, with epoxy resin SrTiO 3Crystalline material 3 seals are on the output window of electron beam.At SrTiO 3Around the limit with the method for vacuum coating, the golden film that vapor deposition 1mm is wide, and on golden film welding lead ground connection.
Use electron beam pumping SrTiO 3Crystalline material produces the method for ultraviolet radiation, may further comprise the steps:
1). SrTiO 3Crystalline material 3 bonding or with vacuum " O " circle press seal on the electron beam output window of electron gun.
2). preparation metal electrode: on crystalline material 3, weld the gold electrode of a circle earlier, utilize gold electrode, ensure that electron beam can form a loop crystalline material 3 ground connection;
3). utilize vacuum system 2 to be evacuated to 10 to the vacuum degree of vacuum chamber -2More than the Pa, to ensure the normal transmission of electron gun to electron beam;
4). start electron gun 1, the electron beam energy that 25KV voltage produces is 25KeV, and the energy of its electron beam is far longer than SrTiO 3Therefore the energy gap 3.2eV of material can excite SrTiO 3In electronics and produce ultraviolet light.Incide SrTiO to electron beam direct 3On the crystalline material 3, use electron beam pumping SrTiO 3Crystal produces the ultraviolet light of wavelength≤390nm.
Embodiment 11:
Pressing embodiment 10 makes and pumping BaTiO 3The crystalline material process is just selected BaTiO for use with embodiment 10 3Crystal replaces SrTiO 3, use electron beam pumping BaTiO 3Crystal produces the ultraviolet light of wavelength≤390nm.
Embodiment 12:
Press embodiment 10 and make, replace SrTiO with ZnO crystal 3, produce ultraviolet light with the electron beam pumping ZnO crystal.
Embodiment 13:
Press embodiment 10 and make, use NdGaO 3Crystal replaces SrTiO 3, use electron beam pumping NdGaO 3Crystal produces ultraviolet light.
Embodiment 14:
Press embodiment 10 and make, use NdCaAlO 4Crystal replaces SrTiO 3, use electron beam pumping NdCaAlO 4Crystal produces ultraviolet light.
Embodiment 15:
Press embodiment 10 and make, replace SrTiO with the GGG crystal 3, produce ultraviolet light with electron beam pumping GGG crystal.
Embodiment 16:
Press embodiment 10 and make, use KTaO 3Crystal replaces SrTiO 3, use electron beam pumping KTaO 3Crystal produces ultraviolet light.
Embodiment 17:
Press embodiment 10 and make, use GdScO 2Crystal replaces SrTiO 3, use electron beam pumping GdScO 2Crystal produces ultraviolet light.
Embodiment 18:
Press embodiment 10 and make, use DyScO 3Crystal replaces SrTiO 3, use electron beam pumping DyScO 3Crystal produces ultraviolet light.
Embodiment 19:
Press embodiment 10 and make, use TeO 2Crystal replaces SrTiO 3, use electron beam pumping TeO 2Crystal produces ultraviolet light.
Embodiment 20:
Press embodiment 10 and make, use LiNbO 3Crystal replaces SrTiO 3, use electron beam pumping LiNbO 3Crystal produces ultraviolet light.
Embodiment 21:
Press embodiment 1 and make, use the electron gun of the pulsed electron beam of output 800KV to replace the 25KV electron gun of Shenyang section of Chinese Academy of Sciences appearance development center production to make electron gun 1.Produce the pulsed ultraviolet light of wavelength≤160nm with pulsed electron beam pumping MgO crystal.

Claims (7)

1. device that produces ultraviolet radiation with electron beam pump-coupling crystalline material; Comprise: crystalline material (3); It is characterized in that: also comprise electron gun (1) and vacuum system (2); Described crystalline material (3) bonding or with vacuum " O " circle press seal on the electron beam output window of electron gun (1), described vacuum system (2) directly is connected on the electron gun (1), described crystalline material is provided with a metal electrode on (3); Utilize metal electrode crystalline material (3) ground connection, make electron beam can form a loop; Said crystalline material (3) is SrTiO 3, BaTiO 3, LiAlO 2, LSAT, Al 2O 3, ZnO, LaAlO 3, MgO, YSZ, NdGaO 3, NdCaAlO 4, SrLaAlO 4, GGG, KTaO 3, GdScO 2, DyScO 3, MgF, TeO 2, LaF or LiNbO 3
2. by the described device that produces ultraviolet radiation with electron beam pump-coupling crystalline material of claim 1; It is characterized in that: described metal electrode is processed the metal electrode of a point, a line or a face for gold, silver, platinum, indium, tin, aluminium or copper material.
3. by the described device with electron beam pump-coupling crystalline material generation ultraviolet radiation of claim 1, it is characterized in that: described electron gun (1) is to export continuous electron beam, or pulsed electron beam.
4. by the described device with electron beam pump-coupling crystalline material generation ultraviolet radiation of claim 1, it is characterized in that: described crystalline material (3) is square, triangle, cylindrical or polygon; Also comprise and carry out optical polish to the face of this crystalline material (3) outgoing ultraviolet light, remaining mirror polish or do not polish.
5. an application rights requires 1 describedly to produce the method for the device of ultraviolet radiation with electron beam pump-coupling crystalline material, may further comprise the steps:
1). be tightly connected electron gun (1) and vacuum system (2); Or be installed in electron gun (1) on the vacuum chamber (4), be tightly connected with vacuum system (2);
2). the preparation metal electrode: earlier go up metal electrode of welding at crystalline material (3), bonding or enclose press seal on the output window of electron beam described crystalline material (3) then with vacuum " O "; Or, utilize metal electrode crystalline material (3) ground connection for to be placed on vacuum chamber (4) lining to crystalline material (3), ensure that electron beam can form a loop;
3). the vacuum degree of vacuum chamber is evacuated to 10 -2More than the Pa, to ensure the normal transmission of electron gun to electron beam;
4). start electron gun (1), incide crystalline material (3) to electron beam direct, the electronics in the crystalline material (3) just is excited, and the electronics that is excited produces ultraviolet light through being with transition;
Wherein said crystalline material (3) is SrTiO 3, BaTiO 3, LiAlO 2, LSAT, Al 2O 3, ZnO, LaAlO 3, MgO, YSZ, NdGaO 3, NdCaAlO 4, SrLaAlO 4, GGG, KTaO 3, GdScO 2, DyScO 3, MgF, TeO 2, LaF or LiNbO 3
6. by the described method of claim 5, it is characterized in that described electron beam is continuous, or pulse.
7. by the described method of claim 5, it is characterized in that described electron beam is from the positive incident of crystalline material (3), or the side incident of crystalline material (3).
CN2007101756321A 2007-10-09 2007-10-09 Apparatus and method for generating ultraviolet light by electron beam pump crystal material Expired - Fee Related CN101409963B (en)

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JP5580866B2 (en) 2012-10-23 2014-08-27 浜松ホトニクス株式会社 Ultraviolet light generation target, electron beam excited ultraviolet light source, and method for producing ultraviolet light generation target
CN102983494A (en) * 2012-10-31 2013-03-20 上海显恒光电科技股份有限公司 Reflection type electron beam pumping ultraviolet (UV) laser tube
CN102983496A (en) * 2012-11-08 2013-03-20 上海显恒光电科技股份有限公司 Luminescent tube of transmission type electron beam pumping
CN102983495A (en) * 2012-11-08 2013-03-20 上海显恒光电科技股份有限公司 Luminotron of electron beam pumping
CN103208737B (en) * 2012-12-20 2016-01-20 上海显恒光电科技股份有限公司 A kind of manufacture method and obtained ultraviolet light of ultraviolet light screen are shielded and apply
CN103148939B (en) * 2013-02-28 2015-06-17 北京振兴计量测试研究所 Ultraviolet spectrum measurement method and system for inhibiting second order spectrum

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JP平10-233193A 1998.09.02

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