CN101408405A - Optical type aspherical measuring system and platform thereof - Google Patents
Optical type aspherical measuring system and platform thereof Download PDFInfo
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- CN101408405A CN101408405A CNA2007101520713A CN200710152071A CN101408405A CN 101408405 A CN101408405 A CN 101408405A CN A2007101520713 A CNA2007101520713 A CN A2007101520713A CN 200710152071 A CN200710152071 A CN 200710152071A CN 101408405 A CN101408405 A CN 101408405A
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Abstract
The invention relates to an optical aspheric-surface measuring system, comprising a measuring bracket, an interference optical system and an optical aspheric-surface measuring platform. The optical aspheric-surface measuring platform comprises a deflection rotation mechanism and a radius regulating mechanism. The deflection rotation mechanism is used for providing the deflection movement for measurement so as to lead the interference optical system to scan the whole curved surface of an object to be measured; and the radius regulating mechanism is used for regulating the position of the sphere core of the object to be measured so as to lead the position of the sphere core to be coincident with the center of the deflection rotation mechanism.
Description
Technical field
The present invention relates to a kind of measuring system, and in particular, relate to a kind of optical type aspherical measuring system.
Background technology
In the measurement of aspherical lens or die, routine techniques is to come the pattern and the roughness of surface measurements in the mode of contact, the scratch that wherein This is what people generally disapprove of is the most produced when the person is the probe contact measurement.The scratch of die must be repaired with processing machine again again; And if eyeglass has scratch, must scrap just can't use, so be mostly that on way the gimmick that is aided with QC again estimates qualification rate, can't accomplish the full inspection of product in the mode of examination at random.This all is the loss of time and the increase of potential risk for eyeglass or die manufacturer.
Problem for contact type measurement produces can be overcome with the light interference technique.Interference of light technology is used in the plane surveying at large because it is quick, fineness is high and be advantage such as non-destructive detection.But, measuring the high pattern of surface tilt degree as sphere or aspheric surface, then can can't measure because of the restriction of receiving the optic angle degree.This is to use interference of light technology one of required major issue that overcomes on sphere or aspheric surface.
Be applied in measurement on sphere or the aspheric surface about interference of light technology, United States Patent (USP) 2006/0290942 discloses with the measuring sonde that can do beat and move left and right and reaches the measurement purpose, and wherein determinand is placed on one and can only does on the rotation platform that the axon symmetry is rotated.Such design is quite easy for the determinand of measuring depression, but measure the determinand of protrusion, because the increasing of oscillating stroke and swinging center position be on the measuring head body, whole will become complexity and be difficult to design carry out, and relatively can be high on the cost.
Commercially available clinometer rule (goniometer) is used as the usefulness of beat mechanism usually, but its deflection angle and direction have fixed constraints, and now various on the market aspherical lens is along with camera lens is done shorter and shorter, the curved surface slope is increasing, allows such beat mechanism based on clinometer rule can't satisfy the measurement needs.
Summary of the invention
The embodiment of optical type aspherical measuring table of the present invention comprises beat rotating mechanism and radius adjusting mechanism.Described beat rotating mechanism provides the motion of the beat when measuring, and can allow the fixation measuring probe measurement to the curved surface scope between the beat diameter two ends.Described radius adjusting mechanism is used to adjust between the center of the sphere center position of determinand and described beat rotating mechanism and coincides, and described radius adjusting mechanism is fixed on the described beat rotating mechanism.
The embodiment of optical type aspherical measuring system of the present invention comprises measurement bracket, optical interference circuit system and optical type aspherical measuring table.Described optical interference circuit system comprises measuring sonde, in order to the curved surface scope between the beat diameter two ends of measuring described beat rotating mechanism.Described measurement bracket is in order to fixing described optical type aspherical measuring table and described optical interference circuit system, and is used to adjust the relative distance of described measuring sonde and determinand.
Description of drawings
Fig. 1 shows the specific embodiment of optical type aspherical measuring table of the present invention;
Fig. 2 shows the specific embodiment of optical type aspherical measuring system of the present invention; And
Fig. 3 shows the specific embodiment of the optical interference circuit system of optical type aspherical measuring system of the present invention.
Embodiment
Fig. 1 shows the specific embodiment of optical type aspherical measuring table of the present invention.Sphere or aspheric surface determinand 101 are placed on the element lens mount 102, and with its surface topography of fixation measuring probe measurement.102 of described element lens mounts are fixed on the described radius adjusting mechanism 103.If, so just can overcome the problem that to measure because curved surface causes the restriction of receipts optic angle degree owing to, under the condition of static probe, must allow determinand can do the beat motion with the curved surface of the commercial measurement determinand of the interference of light.Here so-called beat is meant the spinning movement that determinand is done, and its maximum magnitude can reach positive and negative 90 degree., different determinands has different radius-of-curvature, and perhaps its external form might be to protrude or depression etc., and these situations all can allow the center of circle of determinand not on the beat axle center.If determinand is eccentric state, along with the rotation of determinand, surface measurements can depart from original measuring position and produce the burnt situation of losing.Radius adjusting mechanism 103 be exactly be used for adjusting up and down determinand the center of circle on the axle center of beat, still can allow the curved surface of beat keep within limits when making the determinand of measuring different curve, take place to avoid losing burnt situation.Radius adjusting mechanism among Fig. 1 is the adjustable translation stage of Z-direction, if measure the aspheric surface of protruding, then described translation stage needs toward the top offset adjustment; If measure recessed aspheric surface, then will be toward the bottom offset adjustment.The time of proofreading and correct home position to be spent in order to reduce the determinand of measuring different curvature radius simultaneously, rule 104 can be on radius adjusting mechanism 103, installed additional.
Described radius adjusting mechanism 103 is fixed on the beat rotating mechanism 105, and described beat rotating mechanism 105 makes described radius adjusting mechanism 103 beats, and then drives the beat motion of determinand.Beat rotating mechanism 105 is rotatable mechanism or accurate rotation platforms (Rotation stage) that motor drives, and it can make object to be measured produce and measure required beat motion, and this makes sphere or aspheric arbitrary part to measure.Owing to be the cause of motor driven rotary, so can allow pop one's head in curved surface scope within inswept positive and negative 90 degree of fixation measuring.Described motor can use edge-on rotation motor, can do 360 degree rotations, does not so just have the restriction of the anglec of rotation; And, can measure the profile of whole circle without the dismounting determinand with do again under the situation of correction.Need do the correction except the deviation of aforementioned Z-direction before measuring, determinand also needs to be proofreaied and correct to the deviation on the optical axis position of measuring sonde.Beat rotating mechanism 105 can be fixed in the position correction mechanism 107 with connecting structure (for example L type card extender 106).So just can be with accurate device (as accurate translation stage of X or the accurate translation stage of XY etc.) with on the optical axis of the determinand center of circle in alignment with measuring sonde.
Fig. 2 shows the specific embodiment of optical type aspherical measuring system of the present invention.Optical type aspherical measuring system comprises optical interference circuit system 201, optical type aspherical measuring table 202 and measurement bracket 204, and wherein said optical interference circuit system 201 comprises measuring sonde 203.Described light path system 201 is erected on the described measurement bracket 204, the action that the line slide rail of The built-in can be focused to determinand in Z-direction.
Fig. 3 shows the specific embodiment of the optical interference circuit system of optical type aspherical measuring system of the present invention.The framework of described optical interference circuit system 201 is to serve as that the basis is developed and formed with the Linnik light path.Described optical interference circuit system 201 comprises spectroscope 301, CCD 302, He-Ne Lasers 303, the long dim light mirror of all-wave (Neutral Density Filter) 304,50X object lens 305, pin hole (Pin Hole) 306, first condenser 307, aperture (Stop) 308, second condenser 309, two 10X object lens 310 and with reference to curved surface 311.Described optical interference circuit system 201 produces interference fringe on CCD, measure the surface topography of described determinand whereby.The step of operating described measuring system is as follows: determinand is placed on the element lens mount 102 on the optical type aspherical measuring table 202, and described determinand is fixed; Optical axis with optical interference circuit system 201 is as the criterion, and adjusts position correction mechanism 107, makes the center of determinand by photograph that optical axis covers; Adjust radius adjusting mechanism 103, the sphere center position of described determinand and the center of described beat rotating mechanism 105 are coincided; Utilize the adjusting mechanism in the described measurement bracket 204, the focus of adjusting described optical interference circuit system 201 and produces interference fringe on described determinand, and then obtains the topographic data of described determinand central area; Adjust described beat rotating mechanism 105 with along rotation counterclockwise, allow optical interference circuit system 201 obtain the topographic data of described determinand fringe region; And the computing that coincides of the image by computer software, obtain all data on described determinand surface.
Technology contents of the present invention and technical characterstic disclose as above, yet the those skilled in the art still may be based on teaching of the present invention and announcement and done all replacement and modifications that does not deviate from spirit of the present invention.Therefore, protection scope of the present invention should be not limited to those disclosed embodiments, and should comprise various do not deviate from replacement of the present invention and modifications, and is contained by appended claims.
Claims (18)
1. optical type aspherical measuring table is characterized in that comprising:
The beat rotating mechanism is used to provide the motion of the beat when measuring, so that fixation measuring probe energy measurement is to the curved surface scope between the beat diameter two ends; And
The radius adjusting mechanism is fixed on the described beat rotating mechanism, is used to adjust the sphere center position of determinand and the center of described beat rotating mechanism coincides.
2. optical type aspherical measuring table according to claim 1 is characterized in that further comprising the element lens mount, and described element lens mount is fixed on the described radius adjusting mechanism.
3. optical type aspherical measuring table according to claim 1, it is characterized in that further comprising the position correction mechanism and the connecting structure of one dimension or two dimension, the wherein said connecting structure described position correction mechanism that is used for locking makes determinand can do horizontal adjustment.
4. optical type aspherical measuring table according to claim 3 is characterized in that wherein said connecting structure comprises L type card extender.
5. optical type aspherical measuring table according to claim 3 is characterized in that wherein said position correction mechanism comprises the accurate translation stage of XY.
6. optical type aspherical measuring table according to claim 1 is characterized in that wherein said radius adjusting mechanism comprises the accurate translation stage of single shaft.
7. optical type aspherical measuring table according to claim 1 is characterized in that the side of wherein said radius adjusting mechanism further comprises rule, in order to reduce the eccentric correction time.
8. optical type aspherical measuring table according to claim 1 is characterized in that wherein said beat rotating mechanism comprises the motor of rotatable 360 degree, and described motor comprises edge-on rotation motor.
9. optical type aspherical measuring system is characterized in that comprising:
The optical type aspherical measuring table has the beat rotating mechanism, and wherein said optical type aspherical measuring table can be adjusted the sphere center position of determinand and the center of described beat rotating mechanism coincides;
The optical interference circuit system comprises measuring sonde, in order to the curved surface scope between the beat diameter two ends of measuring described beat rotating mechanism; And
Measurement bracket in order to fixing described optical type aspherical measuring table and described optical interference circuit system, and is used to adjust the relative distance of described measuring sonde and determinand.
10. optical type aspherical measuring system according to claim 9, it is characterized in that wherein said optical type aspherical measuring table comprises the radius adjusting mechanism that is fixed on the described beat rotating mechanism in addition, described radius adjusting mechanism is used to adjust the center of the sphere center position of determinand to described beat rotating mechanism.
11. optical type aspherical measuring system according to claim 10 is characterized in that wherein said optical type aspherical measuring table further comprises the element lens mount, described element lens mount is fixed on the described radius adjusting mechanism.
12. optical type aspherical measuring system according to claim 9, it is characterized in that wherein said optical type aspherical measuring table further comprises the position correction mechanism and the connecting structure of one dimension or two dimension, the wherein said connecting structure described position correction mechanism that is used for locking makes the sphere center position of described determinand be adjustable on the optical axis of described optical interference circuit system.
13. optical type aspherical measuring system according to claim 12 is characterized in that wherein said connecting structure comprises L type card extender.
14. optical type aspherical measuring system according to claim 12 is characterized in that wherein said position correction mechanism comprises the accurate translation stage of XY.
15. optical type aspherical measuring system according to claim 10 is characterized in that wherein said radius adjusting mechanism comprises the accurate translation stage of single shaft.
16. optical type aspherical measuring system according to claim 10 is characterized in that the side of wherein said radius adjusting mechanism further comprises rule, in order to reduce the eccentric correction time.
17. optical type aspherical measuring system according to claim 10 is characterized in that the used motor of wherein said beat rotating mechanism comprises edge-on rotation motor, and rotatable 360 degree of described motor.
18. optical type aspherical measuring system according to claim 9 is characterized in that the framework of wherein said optical interference circuit system comprises the interference of light framework that is developed based on the Linnik light path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101520713A CN101408405B (en) | 2007-10-09 | 2007-10-09 | Optical type aspherical measuring system and platform thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101520713A CN101408405B (en) | 2007-10-09 | 2007-10-09 | Optical type aspherical measuring system and platform thereof |
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| CN101408405A true CN101408405A (en) | 2009-04-15 |
| CN101408405B CN101408405B (en) | 2011-01-26 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104165599A (en) * | 2014-08-20 | 2014-11-26 | 南京理工大学 | Aspheric surface non-contact type measuring system and method for deflection workpieces |
| CN110514127A (en) * | 2019-10-08 | 2019-11-29 | 大连理工大学 | A kind of beam direction automatic calibration method based on section check |
| CN111272113A (en) * | 2020-04-10 | 2020-06-12 | 中国建筑科学研究院有限公司 | Concrete faying face roughness measurement instrument |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1168951C (en) * | 2002-09-18 | 2004-09-29 | 清华大学 | Apex cuvature radius measuring method and device for aspherics |
| EP1519144A1 (en) * | 2003-09-29 | 2005-03-30 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO | Free-form optical surface measuring apparatus and method |
| CN1280604C (en) * | 2003-10-08 | 2006-10-18 | 南京师范大学 | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
| CN100419378C (en) * | 2005-06-23 | 2008-09-17 | 麦克奥迪实业集团有限公司 | Apparatus and method for testing aspherical surface shape error of optical lens |
-
2007
- 2007-10-09 CN CN2007101520713A patent/CN101408405B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104165599A (en) * | 2014-08-20 | 2014-11-26 | 南京理工大学 | Aspheric surface non-contact type measuring system and method for deflection workpieces |
| CN110514127A (en) * | 2019-10-08 | 2019-11-29 | 大连理工大学 | A kind of beam direction automatic calibration method based on section check |
| CN110514127B (en) * | 2019-10-08 | 2020-06-16 | 大连理工大学 | Automatic light beam direction calibration method based on section line method |
| CN111272113A (en) * | 2020-04-10 | 2020-06-12 | 中国建筑科学研究院有限公司 | Concrete faying face roughness measurement instrument |
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| CN101408405B (en) | 2011-01-26 |
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