CN101403693B - 一种在线测量mems薄膜应力梯度的方法 - Google Patents
一种在线测量mems薄膜应力梯度的方法 Download PDFInfo
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Γ(Mpa/μm) | 10 | 11 | 12 | 13 | 14 | 15 |
z<sub>0</sub>(μm) | 0.232 | 0.255 | 0.279 | 0.301 | 0.324 | 0.347 |
R(μm) | 21565 | 19575 | 17951 | 16577 | 15400 | 14408 |
Γ′(Mpa/μm) | 9.937 | 10.947 | 11.937 | 12.927 | 13.914 | 14.873 |
(Γ′-Γ)/Γ | -0.634% | -0.483% | -0.522% | -0.566% | -0.612% | -0.849% |
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Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101871825B (zh) * | 2009-04-22 | 2011-08-17 | 北京广微积电科技有限公司 | 薄膜应力测试结构、测试方法及制造方法 |
CN102141450B (zh) * | 2010-01-28 | 2012-10-17 | 中芯国际集成电路制造(上海)有限公司 | 一种薄膜应力分布的监测方法 |
CN104555895B (zh) * | 2013-10-23 | 2016-04-20 | 中芯国际集成电路制造(上海)有限公司 | 测试结构及其形成方法、测试方法 |
CN103822736B (zh) * | 2014-03-24 | 2016-01-27 | 重庆大学 | 一种确定周边夹紧的圆薄膜集中力下薄膜应力值的方法 |
CN104034583B (zh) * | 2014-06-03 | 2016-06-08 | 东南大学 | 薄膜材料泊松比测试结构及方法 |
CN104020036B (zh) * | 2014-06-19 | 2016-03-23 | 重庆大学 | 一种确定横向集中载荷下环形预应力薄膜最大挠度的方法 |
CN105628277B (zh) * | 2016-01-15 | 2018-07-03 | 东南大学 | 一种基于角度变化的mems微梁应力梯度的测试结构和测量方法 |
CN105547542B (zh) * | 2016-01-15 | 2018-02-13 | 东南大学 | 一种带有检测孔的mems微梁应力梯度的测试结构和测量方法 |
CN105547558B (zh) * | 2016-01-15 | 2018-04-24 | 东南大学 | 一种基于横卧t形梁的mems微梁应力梯度的各向异性测试结构和测量方法 |
CN105606283B (zh) * | 2016-01-15 | 2018-05-15 | 东南大学 | 一种基于多梁比对结构的mems微梁应力梯度的测试结构和测量方法 |
CN108096664B (zh) * | 2017-12-25 | 2024-01-26 | 浙江师范大学 | 一种新型可分离压电医疗输液泵 |
CN110987255B (zh) * | 2019-12-04 | 2021-09-03 | 西安工业大学 | 一种高精度薄膜应力在线测试方法及装置 |
CN112556906B (zh) * | 2020-10-29 | 2021-12-24 | 瑞声新能源发展(常州)有限公司科教城分公司 | 一种测量薄膜不同方向应力梯度的方法 |
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