CN101391890A - Middle-low temperature sintering middle-dielectric constant microwave medium ceramics and preparation method thereof - Google Patents

Middle-low temperature sintering middle-dielectric constant microwave medium ceramics and preparation method thereof Download PDF

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CN101391890A
CN101391890A CNA2008102185083A CN200810218508A CN101391890A CN 101391890 A CN101391890 A CN 101391890A CN A2008102185083 A CNA2008102185083 A CN A2008102185083A CN 200810218508 A CN200810218508 A CN 200810218508A CN 101391890 A CN101391890 A CN 101391890A
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吴松平
倪晶
丁晓鸿
骆建辉
焦丽
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South China University of Technology SCUT
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Abstract

The invention discloses medium dielectric constant microwave medium ceramics sintered by medium-low temperature, and a preparation method thereof. When in preparation, ZnO and Nb2O5 are mixed and added with grinding aid for ball milling; after being dried, the mixture is presintered at the temperature of 900 to 1000 DEG C for 2 to 8 hours; then the presintered powder lot is dried after being ball-milled with TiO2, a sintering auxiliary agent, and the grinding aid; afterwards, an adhesion agent is added, granulation and pressing molding are carried out, and sintering is carried out for 2 to 8 hours within the range of 900 to 1000 DEG C, thus obtaining the microwave medium ceramics. The microwave medium ceramic material provided by the invention has good microwave dielectric property: the dielectric constant is 35 to 50, Q multiplied by f equals to 10000 to 30000GHz, temperature coefficient of resonance frequency is small and adjustable and insulating resistivity is high, therefore, the material can be used for preparing resonators, filters, phase shifters and the like, and can also be used as the dielectric material of multilayer chip ceramic capacitors, thus having important industrial application value.

Description

Medium dielectric constant microwave medium microwave-medium ceramics of low temperature sintering and preparation method thereof
Technical field
The invention belongs to microwave dielectric material and make the field, particularly a kind of medium dielectric constant microwave medium microwave-medium ceramics that is applicable to the low temperature sintering for preparing resonator and electrical condenser and preparation method thereof.
Background technology
Microwave-medium ceramics is a new trend of in the world dielectric substance being studied in recent years, and this mainly is the growth requirement that adapts to the microwave mobile communication.20 th century later, the information processing technology combine with the electronic information digitizing technique communication system have been pushed to a unprecedented new height.The ultimate aim of communication is to accomplish the information transmission and the exchange of full-time sky, thereby makes the height mobility of communication machine become the inexorable trend of development.Current, mobile communication is promoted to the whole people, is the expansion capacity, just must improve carrier frequency.For this reason, the new focus that exploitation a series ofly is suitable for having high-performance in the microwave range, the electronic material of high reliability performance characteristics and components and parts rise to the stupalith field.
In recent years, the trend of device miniaturization makes people more and more pay close attention to high-end medium dielectric constant microwave medium microwave-medium ceramics input.Though existing at present 0.42 (La 1/2Na 1/2) TiO 3-0.58Ca (Fe 1/2Nb 1/2) O 3, Pb 0.45Ca 0.6[(Mg 1/3Nb 2/3) 0.99Sn 0.01] O 3At 42~80, the temperature coefficient of resonance frequency high-end medium dielectric constant microwave medium microwave-medium ceramics between ± 10ppm/ ℃, but there are shortcomings such as Q * f value generally lower (being lower than 10000GHz), composition complexity Deng specific inductivity.In addition, also have Ba 2Ti 9O 20And Ba 1.85Sm 4.1Ti 9O 26With the gluing pottery that is connected into two-layer composite of low-loss and insulating, high Q * f value and near-zero resonance frequency temperature coefficient have been obtained having, specific inductivity can be at 42~80 continually varying seriation medium dielectric constant microwave medium microwave-medium ceramics.But, Ba 2Ti 9O 20Synthetic difficulty, to burn temperature higher, need adopt during with such material preparation laminated device costliness and resistance high Ag 70Pd 30Or Ag 35Pd 65Electrode materials, cost height, high-frequency loss are big.
ZnNb 2O 6(Q * f=83700GHz) causes people's interest, but has specific inductivity (ε less than normal because high quality factor r=25), the undesirable (τ of temperature coefficient of resonance frequency f=-56ppm/ ℃) shortcoming.Comparatively speaking, TiO 2High relatively specific inductivity and positive temperature coefficient are arranged, its ε r=100, τ f=400ppm/ ℃.Therefore, ZnO-Nb 2O 5-TiO 2Series ceramic material is expected to obtain a kind of microwave-medium ceramics of medium dielectric constant microwave medium, be expected on the basis that guarantees its high dielectric property, its sintering temperature is reduced to below 1000 ℃ by the mode of adding an amount of sintering aid again, it be applicable to make high-quality multiplayer microwave device.Use ZnNb 2O 6With TiO 2Compound, if do not add sintering aid, sintering temperature is then higher, reach 1200 ℃ and just can burn till, and is unfavorable for industrialization.(" low-temperature sintering ZnNb such as Zhang Qilong 2O 6/ TiO 2The preparation of composite ceramics and the research of dielectric properties ", Materials Science and Engineering journal 2003,21 (5): 694~696) studied ZnO:Nb 2O 5: TiO 2=1:1:x system is with the binary oxide V that has than eutectoid point (630 ℃) 2O 5-CuO finds that as sintering aid when x=1.92, the microwave material dielectric properties that obtain at 930 ℃ of sintering are: ε r=37.71, τ f=-2ppm/ ℃, but its Q * the f value is on the low side (Q * f=10370GHz), and V 2O 5Expensive and severe toxicity is arranged, do not meet environmental requirement.Subsequently, Wang Huan equality (" SnO 2Doping ZnO-Nb 2O 5-TiO 2Microwave-medium ceramics ", electronic component and material, 2004,23 (7): 4~6) introduce, when the mol ratio of material component is ZnO: Nb 2O 5: TiO 2: SnO 2During=1:1:1.92:0.08, the dielectric properties of the microwave material that obtains at 1150 ℃ of sintering are: ε r=50.3, Q * f=14892GHz, but τ f(τ bigger than normal f=25.12ppm/ ℃), and sintering temperature is higher.
Summary of the invention
The objective of the invention is in order to satisfy the requirement of mobile communication, provide that a kind of sintering temperature that can overcome the prior art shortcoming is lower, the medium dielectric constant microwave medium microwave dielectric ceramic materials of production environmental protection and preparation method thereof microwave device miniaturization, radio frequencyization.
The present invention is with ZnO-Nb 2O 5-TiO 2Series ceramic material is an object, adopts one or more oxide compounds as sintering aid, the collaborative sintering temperature that reduces pottery, the microwave dielectric property of comprehensive regulation material.
To achieve these goals, the medium dielectric constant microwave medium microwave dielectric ceramic materials and the preparation method of a kind of low temperature sintering that the present invention proposes comprise following content:
A kind of preparation method of medium dielectric constant microwave medium microwave-medium ceramics of low temperature sintering may further comprise the steps:
(1) takes by weighing ZnO, Nb in proportion 2O 5, mix 0.1~1.0% the grinding aid that the raw material gross weight is added in the back, with deionized water and zirconium ball ball milling 3~6 hours on planetary ball mill; The oven dry back was 900~1000 ℃ of following pre-burnings 2~8 hours;
(2) with powder and TiO after step (1) pre-burning 2, sintering aid weighing in proportion again, mix 0.1~1.0% the grinding aid that the raw material gross weight is added in the back, with deionized water and zirconium ball ball milling 3~6 hours on planetary ball mill, oven dry again;
(3) but in the powder that makes, add binding agent to granulation, compression moulding, sintering 2~8 hours in 900~1000 ℃ scope obtains microwave-medium ceramics again;
In mole percent level, this ceramic raw material is made up of following component: ZnO 22~33%, Nb 2O 520~30%, TiO 240~55%; By weight percentage, sintering aid is 0.1~8% of a raw material gross weight; Described sintering aid is CuO, B 2O 3, 3ZnOB 2O 3, ZnOB 2O 3, 2ZnO3B 2O 3, Cu (BO 2) 2In one or more.
The source of described ZnO is the ZnO compound or can thermolysis is the compound of zinc oxide.
The thermolysis of described energy is that the compound of zinc oxide is preferably zinc acetate or zinc subcarbonate.
Described grinding aid is to comprise in sodium alkyl benzene sulfonate, sodium alkyl sulfate, trolamine, ethanol, the isopropylcarbinol one or more.
Described binding agent is preferably polyvinyl alcohol for binding agent commonly used, and its concentration is 0.1~0.2g/ml.
A kind of medium dielectric constant microwave medium microwave dielectric ceramic materials by the method for preparing low temperature sintering, its specific inductivity is 35~50, Q * f=10000~30000GHz, temperature coefficient of resonance frequency τ f=0 ± 30ppm/ ℃, insulation resistivity ρ is 2.0 * 10 11Ω cm~5.0 * 10 13Ω cm.
With respect to prior art, the present invention has following characteristics:
1. low temperature sintering: according to the difference of forming proportioning, sintering temperature is between 900~1000 ℃, and sintering atmosphere is air or inert atmosphere, and the prior art sintering temperature is more than 1150 ℃.
2. has good microwave dielectric property: the microwave-medium ceramics ε of the present invention's preparation rAdjustable between=35~50, and Q * f=10000~30000GHz (resonant frequency f=4~6GHz), τ f=0 ± 30ppm/ ℃; Insulation resistivity ρ is 2.0 * 10 11Ω cm~5.0 * 10 13Ω cm.As seen the microwave-medium ceramics Q * f of the present invention's preparation is generally higher, and prior art is about 10000GHz, and is not high enough.
3. this material compliance with environmental protection requirements has no side effect, environmentally safe, and raw materials cost is low, and marketable value is arranged.
Embodiment
The present invention is further illustrated below in conjunction with embodiment, but it is pointed out that embodiment does not limit protection scope of the present invention.
Embodiment 1:
Take by weighing 6.5g ZnO, 21.3gNb 2O 5, the trolamine of interpolation 0.0834g after mixing (0.3wt.% is with respect to the starting material gross weight, down together), ball milling 4 hours 950 ℃ of following pre-burnings 2 hours, synthesizes ZnNb after the oven dry 2O 6
Take by weighing the ZnNb after the 27.8g pre-burning more respectively 2O 6, 11.2gTiO 2, 0.78g CuO, mix the back and add 0.1193g trolamine (0.3wt.%), ball milling 4 hours, the oven dry back is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration, 1000 ℃ of following sintering 4 hours, obtains microwave-medium ceramics at last.
Embodiment 2:
Take by weighing 6.5g ZnO, 21.3gNb 2O 5, mixing the trolamine (0.3wt.%) that 0.0834g is added in the back, ball milling 4 hours is dried the back 950 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 27.8g pre-burning more respectively 2O 6, 11.2gTiO 2, 1.17g CuO, mix the trolamine (0.3wt.%) that 0.1205g is added in the back, ball milling 4 hours, the oven dry back is polyvinyl alcohol (PVA) the solution granulating and forming of 0.1g/ml with 1ml concentration, 1000 ℃ of following sintering 4 hours, obtains microwave-medium ceramics at last.
Embodiment 3:
Take by weighing 8.2g ZnO, 26.6g Nb 2O 5, mixing Sodium dodecylbenzene sulfonate (0.1wt.%) and 0.5ml dehydrated alcohol that 0.0348g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 34.7g pre-burning more respectively 2O 6, 12.0g TiO 2, 1.6345gCu (BO 2) 2Mix Sodium dodecylbenzene sulfonate (0.1wt.%) and 0.5ml dehydrated alcohol that 0.0483g is added in the back, ball milling 4 hours, the oven dry back is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration, 950 ℃ of following sintering 8 hours, obtain microwave-medium ceramics at last.
Embodiment 4:
Take by weighing 8.0g ZnCO 32Zn (OH) 2H 2O, 18.6g Nb 2O 5, mixing sodium lauryl sulphate (0.8wt.%) and 3ml isopropylcarbinol that 0.2128g is added in the back, ball milling 4 hours is dried the back 900 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 24.3g pre-burning more respectively 2O 6, 10.6gTiO 2, 0.698g CuO, 0.349g B 2O 3, mixing the back and add 0.2876g sodium lauryl sulphate (0.8wt.%) and 3ml isopropylcarbinol, ball milling 4 hours is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration after the oven dry, 975 ℃ of following sintering 4 hours, obtains microwave-medium ceramics at last.
Embodiment 5:
Take by weighing 8.0g ZnCO 32Zn (OH) 2H 2O, 18.6g Nb 2O 5, mixing sodium lauryl sulphate (0.2wt.%) and 1ml dehydrated alcohol that 0.0532g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 24.3g pre-burning more respectively 2O 6, 9.8gTiO 2, 0.682g CuO, 0.682g B 2O 3, mixing sodium lauryl sulphate (0.2wt.%) and 1ml dehydrated alcohol that 0.0709g is added in the back, ball milling 4 hours is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration after the oven dry, 975 ℃ of following sintering 4 hours, obtains microwave-medium ceramics at last.
Embodiment 6:
Take by weighing 8.2g ZnO, 26.6g Nb 2O 5, mixing Sodium dodecylbenzene sulfonate (0.2wt.%) and 1ml dehydrated alcohol that 0.0696g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 34.7g pre-burning more respectively 2O 6, 14g TiO 2, 0.974g CuO, 0.877g 2ZnO3B 2O 3Mix Sodium dodecylbenzene sulfonate (0.2wt.%) and 1ml dehydrated alcohol that 0.1011g is added in the back, ball milling 4 hours, the oven dry back is 10% polyvinyl alcohol solution granulating and forming with the 1ml weight percent concentration, 975 ℃ of following sintering 4 hours, obtain microwave-medium ceramics.
Embodiment 7:
Take by weighing 8.2g ZnO, 26.6g Nb 2O 5, mixing Sodium dodecylbenzene sulfonate (0.2wt.%) and 1ml dehydrated alcohol that 0.0696g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 34.7g pre-burning more respectively 2O 6, 14g TiO 2, 0.974g CuO, 2.63g2ZnO3B 2O 3Add Sodium dodecylbenzene sulfonate (0.2wt.%) and the 1ml dehydrated alcohol of 0.1046g after the mixing respectively, ball milling 4 hours, the oven dry back is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration, 975 ℃ of following sintering 4 hours, obtain microwave-medium ceramics respectively.
Embodiment 8:
Take by weighing 8.2g ZnO, 26.6g Nb 2O 5, mixing Sodium dodecylbenzene sulfonate (0.2wt.%) and 1ml dehydrated alcohol that 0.0696g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 34.7g pre-burning more respectively 2O 6, 14g TiO 2, 0.974g CuO, 2.63g 2ZnO3B 2O 3, mixing Sodium dodecylbenzene sulfonate (0.2wt.%) and 1ml dehydrated alcohol that 0.1046g is added in the back, ball milling 4 hours is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration after the oven dry, 950 ℃ of following sintering 4 hours, obtains microwave-medium ceramics.
Embodiment 9:
Take by weighing 8.2g ZnO, 26.6g Nb 2O 5, mixing Sodium dodecylbenzene sulfonate (0.2wt.%) and 1ml dehydrated alcohol that 0.0696g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb 2O 6
Take by weighing the ZnNb after the 34.7g pre-burning more respectively 2O 6, 14g TiO 2, 0.974g CuO, 1.461g 3ZnOB 2O 3Add Sodium dodecylbenzene sulfonate (0.2wt.%) and the 1ml dehydrated alcohol of 0.1023g after the mixing respectively, ball milling 4 hours, the oven dry back is the polyvinyl alcohol solution granulating and forming of 0.2g/ml with 1ml concentration, 950 ℃ of following sintering 6 hours, obtain microwave-medium ceramics respectively.
Embodiment 10:
Take by weighing 8.0g ZnCO 32Zn (OH) 2H 2O, 18.6g Nb 2O 5, mixing sodium lauryl sulphate (0.2wt.%) and 1ml dehydrated alcohol that 0.0532g is added in the back, ball milling 4 hours is dried the back 1000 ℃ of following pre-burnings 2 hours, synthetic ZnNb2O6;
Take by weighing the ZnNb after the 24.3g pre-burning more respectively 2O 6, 9.8gTiO 2, 0.682g CuO, 0.682g B 2O 3, mixing sodium lauryl sulphate (0.2wt.%) and 1ml dehydrated alcohol that 0.0709g is added in the back, ball milling 4 hours is the polyvinyl alcohol solution granulating and forming of 0.1g/ml with 1ml concentration after the oven dry, 925 ℃ of following sintering 6 hours, obtains microwave-medium ceramics at last.
Performance test:
The sample surfaces of the foregoing description preparation with diamond polishing after, (vector network analyzer of 300kHz~8.5GHz) is according to the microwave dielectric property of Hakki-Coleman parallel plate resonator method test material to adopt AglientE5071B.Concrete test procedure is as follows: network analyzer is arranged on transmission mode, and the cylindrical sample that two ends are parallel places between metal sheet, determines TE0 11Resonance peak is carefully adjusted the shape at peak, reads loaded Q and resonant frequency, measures the diameter and the height of sample then, utilizes RESONATE software can calculate the specific inductivity and the nonloaded Q of microwave-medium ceramics.Temperature coefficient of resonance frequency τ f=(f 80-f 25)/(f 25* 55) ppm/ ℃ (f wherein 80And f 25Be respectively the resonance mid-frequency under 80 ℃ and 25 ℃).Under 500V, record the insulation resistance of material, calculate insulation resistivity.The concrete electrical property of sample sees table 1 for details.
The test result of table 1 embodiment of the invention
Embodiment Sintering aid content (wt.%) Diameter D (mm) Height h (mm) Sintering temperature (℃) Q×f (GHz) ε r τ f (ppm/℃) ρ (Ω·cm)
1 2.0%CuO 11.67 6.84 1000 13739 42.79 -3.98 >6.0×10 11
2 3.0%CuO 11.52 6.74 1000 10773 43.98 -1.49 >2.0×10 11
3 3.5%Cu(BO 2) 2 11.70 6.30 950 12868 41.12 -8.85 >1.0×10 12
4 2.0%CuO+ 1.0%B 2O 3 11.68 6.58 975 15071 48.85 +19.77 >3.4×10 11
5 2.0%CuO+ 2.0%B 2O 3 11.70 5.98 975 17009 40.37 -11.67 >1.5×10 12
6 2.0%CuO+1.8% 2ZnO·3B 2O 3 11.59 6.84 975 11003 41.01 -15.68 >1.7×10 13
7 2.0%CuO+5.4% 2ZnO·3B 2O 3 11.52 6.03 975 12324 38.06 -12.82 >3.0×10 13
8 2.0%CuO+5.4% 2ZnO·3B 2O 3 11.53 5.18 950 18717 37.55 -16.25 >3.0×10 13
9 2.0%CuO+3.0% 3ZnO·B 2O 3 11.56 5.78 950 21438 38.25 -14.65 >5.0×10 13
10 2.0%CuO+ 2.0%B 2O 3 11.66 6.48 925 14319 41.03 +2.72 >1.0×10 12
As known from Table 1, all samples all can be at middle low temperature (Ts≤1000 ℃) sintering down; The DIELECTRIC CONSTANT of sample rGreater than 37, and, change little along with the change of sintering aid content; Q * f value is 10000~22000GHz.By the data of sample 1~3 as can be known, when a kind of sintering aid CuO of independent interpolation, τ fNear zero, but sintering temperature is higher, and insulation resistivity is relatively low; Add Cu (BO 2) 2Can significantly reduce sintering temperature and improve insulation resistivity, but Q * the f value is on the low side.From the result of sample 4,5 and 10, compound interpolation CuO and B 2O 3Can effectively reduce sintering temperature, Q * f value higher relatively (greater than 14000GHz), temperature coefficient of resonance frequency τ fJust becoming by negative with the increase of titanium dioxide amount (as embodiment 4) or the decline (as embodiment 10) of sintering temperature, having near zero temperature coefficient of resonance frequency at 925 ℃ of agglomerating samples 10.From sample 6~9, compound interpolation CuO and 2ZnO3B 2O 3Or 3ZnOB 2O 3The time, the insulation resistivity of sample significantly improves (1~2 order of magnitude), and the variation of sample temperature coefficient of resonance frequency is little; With the decline of sintering temperature, Q * f value increases; Additive ZnO-B 2O 3Composition little to the influence of the dielectric properties of sample.Kind by regulating principal phase component, additive and add-on, sintering temperature, we can obtain medium dielectric constant microwave medium (ε r〉=37), high Q * f value, nearly zero temperature coefficient of resonance frequency and the high microwave ceramic material of insulation resistivity.
The replacement that all are similar and change apparent to those skilled in the artly, they are regarded as being included in the protection domain of the present invention.

Claims (7)

1, a kind of preparation method of medium dielectric constant microwave medium microwave-medium ceramics of low temperature sintering is characterized in that may further comprise the steps:
(1) takes by weighing ZnO, Nb in proportion 2O 5, mix 0.1~1.0% the grinding aid that the raw material gross weight is added in the back, with deionized water and zirconium ball ball milling 3~6 hours on planetary ball mill; The oven dry back was 900~1000 ℃ of following pre-burnings 2~8 hours;
(2) with powder and TiO after step (1) pre-burning 2, sintering aid weighing in proportion again, mix 0.1~1.0% the grinding aid that the raw material gross weight is added in the back, with deionized water and zirconium ball ball milling 3~6 hours on planetary ball mill, oven dry again;
(3) but in the powder that makes, add binding agent to granulation, compression moulding, sintering 2~8 hours in 900~1000 ℃ scope obtains microwave-medium ceramics again; Described binding agent is a polyvinyl alcohol, and in mole percent level, this ceramic raw material is made up of following component: ZnO 22~33%, Nb 2O 520~30%, TiO 240~55%; Sintering aid is 0.1~8% of a raw material gross weight; Described sintering aid is CuO, B 2O 3, 3ZnOB 2O 3, ZnOB 2O 3, 2ZnO3B 2O 3, Cu (BO 2) 2In one or more.
2, the method for claim 1 is characterized in that: the source of described ZnO is the ZnO compound or can thermolysis is the compound of zinc oxide.
3, method as claimed in claim 2 is characterized in that: the thermolysis of described energy is that the compound of zinc oxide is zinc acetate or zinc subcarbonate.
4, the method for claim 1 is characterized in that: described grinding aid is one or more in sodium alkyl benzene sulfonate, sodium alkyl sulfate, trolamine, alkylolamide, alcohol, butanols, the isooctyl alcohol.
5, the method for claim 1 is characterized in that: described binding agent is a polyvinyl alcohol, and its concentration is 0.1~0.2g/ml.
6, a kind of medium dielectric constant microwave medium microwave dielectric ceramic materials of low temperature sintering is characterized in that it is by the described method preparation of claim 1.
7, microwave dielectric material as claimed in claim 6 is characterized in that: described microwave dielectric material specific inductivity is 35~50, Q * f=10000~30000GHz, temperature coefficient of resonance frequency τ f=0 ± 30ppm/ ℃, insulation resistivity ρ is 2.0 * 10 11Ω cm~5.0 * 10 13Ω cm.
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CN104418336A (en) * 2013-08-26 2015-03-18 胡勇波 Synthetic wollastonite, protein porcelain containing the same and manufacturing method thereof
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CN107271799A (en) * 2017-06-02 2017-10-20 中国地质大学(武汉) A kind of preparation method of the small solid electrode of extreme difference drift
CN107721421A (en) * 2017-10-30 2018-02-23 电子科技大学 A kind of Zn Nb Ti systems LTCC materials and preparation method thereof
CN107721421B (en) * 2017-10-30 2020-09-25 电子科技大学 Zn-Nb-Ti LTCC material and preparation method thereof
CN108455986B (en) * 2018-03-14 2020-10-23 电子科技大学 Composite microwave dielectric ceramic material and preparation method thereof
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CN112010650A (en) * 2020-09-08 2020-12-01 中物院成都科学技术发展中心 Low-temperature sintered high-quality factor microwave dielectric ceramic and preparation method thereof
CN112979297A (en) * 2021-03-02 2021-06-18 山东国瓷功能材料股份有限公司 Low-dielectric-constant microwave dielectric ceramic material and ceramic component
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CN113087526A (en) * 2021-04-12 2021-07-09 中国振华集团云科电子有限公司 Preparation method of ultrathin large-size LTCC ceramic substrate

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