CN101383234B - Piezoelectric actuator - Google Patents
Piezoelectric actuator Download PDFInfo
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- CN101383234B CN101383234B CN 200810214877 CN200810214877A CN101383234B CN 101383234 B CN101383234 B CN 101383234B CN 200810214877 CN200810214877 CN 200810214877 CN 200810214877 A CN200810214877 A CN 200810214877A CN 101383234 B CN101383234 B CN 101383234B
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- piezoelectric element
- plunger
- printed circuit
- casing
- movable latch
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Abstract
The invention claims a piezoelectric actuator capable of easily assembling a long piezoelectric element, a moveable stop component, a plunger piston and a spring component in an internal space of a case. Internal of the case is provided with: a plunger piston, a spring component that applies force to the plunger piston always at a projecting direction, a long piezoelectric element that transforms a voltage signal into mechanical displacement, and a moveable stop component that interacts with the piezoelectric element to change positions, characterized in that the long piezoelectric element is arranged at external of the plunger piston along inner wall of the case, moreover, free end of the long piezoelectric element is blocked with the moveable stop component by any means of contact or insertion. In addition, the blocking or non-blocking control of the moveable stop component relative to the plunger piston is based on pitch function of the long piezoelectric element.
Description
Technical field
The present invention relates to piezoelectric actuator (press Electricity ア Network チ ユ エ-タ-), especially relate to the piezoelectric actuator that the clutch apparatus that can carry out the electrical control in the mechanical driving mechanism is used.
Background technology
In the patent documentation 1, no matter technical field, the electric-controlled type latch mechanism is all required exclusive right, its latch mechanism is characterised in that, " the inside that is arranged at the hollow plunger (hollow action bars) in the casing that can move back and forth; be equipped with the piezoelectric element of microscler shape at the length direction of hollow action bars; two-part hollow action bars sheet keeps and the base end part of the described microscler shape piezoelectric element of clamping by being divided into; so that the free end face of the piezoelectric element that extends with level from base end part is supported on the foot that accepts that the inside of the hollow action bars sheet of the snap-latch piece (snap-latch piece that is called claw) on the casing prolongs to axle; when applying voltage signal via lead-in wire to piezoelectric element; the free end change in displacement of piezoelectric element and push the foot that accepts of described snap-latch piece, thus, snap-latch piece is take the fulcrum of an end as fulcrum, and the skewed grooving that its engaging leading section idiomorphism is formed in the outside of hollow action bars sheet separates ".
(A) piezoelectric element with microscler shape is installed in the hollow action bars with the fixing state in an end;
(B) not shown, it is corresponding removable with the amount of moving horizontally of hollow action bars to go between;
(C) snap-latch piece that makes horizontal T word shape is accepted foot's mode relative with the free end of piezoelectric element with it and is prolonged to the inside of hollow action bars, and, and the skewed grooving card of accepting the outside of engaging leading section that foot intersects and hollow action bars sheet takes off.
But, in the electric-controlled type latch mechanism of patent documentation 1 record, because piezoelectric element is built in the hollow action bars sheet with the state of clamping, and the foot that makes the snap-latch piece that is called claw extends near the free end of piezoelectric element, therefore, exist necessary intricately to consist of the problem of hollow action bars sheet and so on.Also has the how such shortcoming of amount of parts.In addition, exist not shown lead-in wire to damage such shortcoming because the amount of moving horizontally of corresponding hollow action bars moves.Also exist the length of piezoelectric element by the problem of the length of hollow action bars restriction.
Patent documentation 1: Japanese Unexamined Patent Application Publication 2006-519465 communique
Summary of the invention
The desired purpose of the present invention is easily to assemble in the inner space of casing microscler shape piezoelectric element, movable latch for printed circuit, plunger and spring members.The second purpose is to go between movably and not to damage.The 3rd purpose is to make the length of the large microscler shape piezoelectric element (actuator) of displacement and plunger irrelevant and install.The 4th purpose is with simple structure movable latch for printed circuit and plunger to be blocked reliably to take off.Impacted directly or indirectly or vibrate from the outside even other purposes are casings, movable latch for printed circuit and piezoelectric element yet can not carry out displacement and become lockup state to the locking direction.
Piezoelectric actuator of the present invention, inside at casing is assembled with: plunger, when normal at the spring members of outstanding direction to this plunger application of force, voltage signal is converted to the microscler shape piezoelectric element of mechanical displacement, carry out the movable latch for printed circuit of change in location with this piezoelectric element interaction, it is characterized in that, described microscler shape piezoelectric element is equipped on the outside of described plunger in the mode along the inwall of described casing, in addition, the free end of the piezoelectric element of microscler shape engages with movable latch for printed circuit in arbitrary mode of the way of contact or inserted mode, in addition, the control of the engaging of the relatively described plunger of described movable latch for printed circuit or non-engaging is based on the control that the pitching effect of described microscler shape piezoelectric element is carried out.
Because piezoelectric element is positioned at the outside of plunger, and the free end of this piezoelectric element is engaged in the arbitrary mode with the movable latch for printed circuit way of contact or inserted mode, therefore, can easily assemble each parts, and, can make movable latch for printed circuit carry out swimmingly change in location.In addition, can be with the irrelevant ground of the length of piezoelectric element and plunger, set along the inwall of casing, therefore, can use longer piezoelectric element.
Second aspect present invention has substrate from alive drive division to piezoelectric element that execute owing to be provided with in casing, therefore lead-in wire is not mobile with plunger.Thereby, can not damage lead-in wire.
Third aspect present invention can be installed the piezoelectric element of the large microscler shape of displacement in casing.
Third aspect present invention can obtain the horizontal equilibrium of movable latch for printed circuit to greatest extent.Additional disclosure once, apply to casing from the outside and to impact or during vibration, power regardless of the rigid function of piezoelectric element, the capital loses horizontal equilibrium because of weight, consequently, exist piezoelectric actuator might become the such problem of lockup state, but the present invention can eliminate such problem points.
A fifth aspect of the present invention, movable latch for printed circuit carries out change in location swimmingly.
Description of drawings
Fig. 1 is the diagrammatic illustration figure of the 1st embodiment; Fig. 1 (a) is the partial enlarged drawing of Fig. 1;
Fig. 2 is the 2-2 line summary cross sectional illustration figure of Fig. 1;
Fig. 3 is the 3-3 line summary cross sectional illustration figure of Fig. 1;
Fig. 4 is the stereogram of piezoelectric element;
Fig. 5 is in Fig. 4, with the upturned stereogram of piezoelectric element;
Fig. 6 is the diagrammatic illustration figure of relation of the first fastening plate of the expression support of casing and piezoelectric element;
Fig. 7 is based on the key diagram ("on" position) of the effect of Fig. 1;
Fig. 8 is the stereogram of movable latch for printed circuit;
Fig. 9 is the stereogram of plunger;
Figure 10 is the diagrammatic illustration figure of an example of the structure of expression piezoelectric element;
Figure 11 is the diagrammatic illustration figure of the 2nd embodiment; Figure 11 (a) is the partial enlarged drawing of Figure 11;
Figure 12 is the stereogram of movable latch for printed circuit;
Figure 13 is the stereogram of plunger;
Figure 14 is the diagrammatic illustration figure of casing;
Figure 15 is based on the key diagram ("on" position) of the effect of Figure 11.
Figure 16 is the diagrammatic illustration figure of the 3rd embodiment;
The diagrammatic illustration figure of (lockup state) when Figure 17 (a) is the non-energising of expression;
The diagrammatic illustration figure of (unlocking condition) when Figure 17 (b) is the expression energising;
Figure 18 is the key diagram with the 1st embodiment main difference point (piezoelectric element, fixture);
Figure 19 is the diagrammatic illustration figure of effect;
Figure 20 is the key diagram of critical piece (movable latch for printed circuit, guider);
Figure 21 is the key diagram of critical piece (movable latch for printed circuit, plunger);
Figure 22 is the key diagram of critical piece (plunger);
Figure 23 is the diagrammatic illustration figure of the 4th embodiment;
Figure 24 is the diagrammatic illustration figure (locking states) of expression internal structure;
Figure 25 is the diagrammatic illustration figure of the structure of expression casing;
Figure 26 is based on the summary cross sectional illustration figure of the 26-26 line of Figure 24;
Figure 27 is the diagrammatic illustration figure of critical piece (support unit);
Figure 28 is the key diagram of critical piece (movable latch for printed circuit);
Figure 29 is the stereogram of critical piece (plunger);
Figure 30 is the diagrammatic illustration figure of (lockup state) during from non-when energising (unlocking condition) to energising;
The key diagram of (unlocking condition) when Figure 31 is non-energising;
Figure 32 is the diagrammatic illustration figure of the 5th embodiment;
Figure 33 is the diagrammatic illustration figure of expression internal structure;
Figure 34 is based on the summary cross sectional illustration figure of the 34-34 line of Figure 33;
Figure 35 is the diagrammatic illustration figure of (lockup state) during from non-when energising (unlocking condition) to energising;
The diagrammatic illustration figure of (unlocking condition) when Figure 36 is non-energising;
Figure 37 is the diagrammatic illustration figure of the 6th embodiment;
Figure 38 is based on the local summary cross sectional illustration figure of the 38-38 line of Figure 37;
Figure 39 is the diagrammatic illustration figure of expression casing;
Figure 40 is the key diagram of critical piece (piezoelectric element, movable latch for printed circuit);
The diagrammatic illustration figure of (lockup state) when Figure 41 (a) is the non-energising of expression;
The diagrammatic illustration figure of (unlocking condition) when Figure 41 (b) is the expression energising;
Figure 42 is the diagrammatic illustration figure of (unlocking condition) during from non-when energising (lockup state) to energising;
Figure 43 is the diagrammatic illustration figure of the 7th embodiment;
Figure 44 is the diagrammatic illustration figure of expression casing;
Figure 45 is the key diagram with the 1st embodiment main difference point (piezoelectric element, movable latch for printed circuit, guider);
Figure 46 is the stereogram of critical piece (plunger);
Figure 47 is the key diagram of critical piece (movable latch for printed circuit is with pushing spring);
The stereogram of (initial condition) when Figure 48 is non-energising;
Figure 49 is the diagrammatic illustration figure of effect;
Figure 50 diagrammatic illustration figure of (unlocking condition) during from non-when energising (lockup state) to energising;
Figure 51 be the 7th embodiment piezoelectric element 21 also can for the 1st embodiment key diagram of the purport of the piezoelectric element of two block types similarly;
Figure 52 is the diagrammatic illustration figure of the 8th embodiment;
Figure 53 is other routine diagrammatic illustration figure of the structure of expression piezoelectric element.
Symbol description
The X piezoelectric actuator
Y drawer at movable side (or fixation side)
1 casing
2 antethecas
3 rear walls
4 openings
21 piezoelectric elements
The 21a base end part
The 21b free end
26 substrates (having drive division)
28 anchor legs
31 movable latch for printed circuit
34 are stuck section
35 connecting holes
41 plungers
42 spring members
44 leading sections
21A the first piezoelectric element
21B the second piezoelectric element
10,13 supports
Embodiment
(1) the 1st embodiment
At first, Fig. 1～Figure 10 is the 1st embodiment of piezoelectric actuator X of the present invention.This piezoelectric actuator X (for example: on parts door) is installed in fixation side or drawer at movable side.The basic comprising of piezoelectric actuator X is, inside at casing 1 is assembled with: plunger 41, when normal at the spring members 42 of outstanding direction to these plunger 41 application of forces, voltage signal is converted to the microscler shape piezoelectric element 21 of mechanical displacement, carry out the movable latch for printed circuit 31 of change in location with these piezoelectric element 21 interactions, described microscler shape piezoelectric element 21 is equipped on the outside of described plunger 41 in the mode along the inwall of described casing 1, in addition, the free end 21b of the piezoelectric element 21 of microscler shape engages with movable latch for printed circuit 31 with inserted mode, in addition, the engaging of the relatively described plunger 41 of described movable latch for printed circuit 31 or the control of non-engaging are based on the control (characteristic 1) that the pitching effect of described microscler shape piezoelectric element 21 is carried out.
Secondly, be provided with substrate 26 in the casing 1, this substrate 26 has executes alive drive circuit (drive division) to piezoelectric element 21, and is connected with anchor leg 28 (characteristic 2) at described drive division.
In addition, as shown in Figure 4 and Figure 5, the piezoelectric element 21 of the microscler shape of this piezoelectric actuator X has the first piezoelectric element 21A and the second piezoelectric element 21B, be combined with an end of this first piezoelectric element and can be to the external expansion displacement from free end 21b side in described the second piezoelectric element 21B one end, the base end part of described the first piezoelectric element 21A is by the support in the casing or support unit supporting (characteristic 3).
Secondly, in Fig. 1～Figure 10, Y be drawer at movable side (or fixation side) parts (for example: doorframe); 1 is casing; 2 is antetheca; 3 is rear wall; 4 is opening; 5,6 is left and right sides sidewall; 7 is upper wall; 8 is lower wall (diapire); 9 is vertical next door; 9A is horizontal partition wall; 10,13 is support; 11 for setting the space; 12 is that assembling parts space, 15 is the left and right sides targeting part of the overshooting shape of central portion; 16 is the guide space of below; 17 is the accommodation space of top; 18 is the step-like left and right sides targeting part of bottom side; 19 is the left and right sides targeting part 15 of overshooting shape and the gap between the step-like left and right sides targeting part 18; 20 for being located at the support unit of lock case inside; 21 is the piezoelectric element of microscler shape; 21a is the base end part of piezoelectric element; 21b is the free end of piezoelectric element; 21c be equivalent to central portion in conjunction with the end; 26 for having the substrate of drive division; 28 are fixing lead-in wire; 31 is movable latch for printed circuit; 32 is the base end part (fulcrum) of movable latch for printed circuit; 33 is the arm (snap portions) of movable latch for printed circuit; 34 for the section that is stuck of movable latch for printed circuit; 35 is the connecting hole of movable latch for printed circuit; 41 is plunger; 41a is the rear end face of plunger; 42 when being normal at the spring members of outstanding direction to the plunger application of force; 43 for being formed at the containing section that the spring members on the plunger is used; 44 is the leading section of plunger; 45 for being formed at the top holding section (slot, cut out portion) of plunger; 46 is the direction protrusion that is formed at the side of plunger.
For example, as shown in Figure 2, the casing 1 of the 1st embodiment is take left and right sides sidewall 5,6 inwall central portion as benchmark, one side (downside on the accompanying drawing) has the guide space 16 of taking in plunger 41, in addition, opposite side (upside on the accompanying drawing) has the accommodation space 17 that is communicated with described guide space 16, is equipped with the movable latch for printed circuit 31 of arm shape in this accommodation space 17 along the holding section (for example slot) 45 of plunger.
In addition, for example, as shown in Figure 1, the top that sets space 11 being equipped with substrate 26 and anchor leg 28 is provided with the horizontal partition wall 9A with rear wall 3 quadratures.On this horizontal partition wall 9A and be provided with the support unit (for example support projection) 20 of plumbness between the inner face of upper arm 7.And, described support projection 20 be inserted with the piezoelectric element 21 that is equivalent to Rack central portion in conjunction with end 21c.
In addition, for example, as shown in Figure 6, internal face in leading section (holding section) 34 sides of casing 1, be provided with the support 10,13 of base end part 21a that a plurality of supportings consist of the first piezoelectric element 21A of piezoelectric elements 21, insert the first fastening plate 40 that is fixed with the base end part 21a that is arranged on the first piezoelectric element 21A in these supports 10,13.As shown in Figure 6, described support 10,13 by the shaft-like support 10 on the internal face top that is arranged at sidewall and, have predetermined distance and consist of for the step-like front and back pair of support parts 13 that is erected at the top front and back of this support 10 slightly.Thereby, play the effect of the base end part that supports regularly the first piezoelectric element 21A below the top and support 13 of horizontal supporting section 10.
But, for the structure of described the first fastening plate 40, symbol 40a be arranged at the first fastening plate 40 about outstanding end.In addition, for the structure of the second fastening plate 47 of the free end 21b that is arranged at the second piezoelectric element 21B, 47a is vertical holding section, and 48 is connecting hole.
At this, with reference to Fig. 4～Fig. 6 structure and the mounting structure of piezoelectric element 21 are described.The piezoelectric element 21 of present embodiment is dual structure body 21A, 21B.In addition, be fixed with separately respectively described the first fastening plate 40 and the second fastening plate 47 at each end 21a, 21b of dual structure body 21A, 21B.The reason that piezoelectric element 21 is designed to the dual structure body is in order to obtain larger displacement.In addition, the reason that for example at base end part 21a the first fastening plate 40 is set is its outstanding end 40a of freely clamping of support 10,13 for the position, the left and right sides that makes the inside that receives casing 1.In addition, the reason that for example at free end 21b the second fastening plate 47 with connecting hole 48 is set is to engage with described connecting hole 48 freely for the leading section (holding section) 34 that can make movable latch for printed circuit 31 inserts, and, consider the larger displacement of piezoelectric element 21, can make the snap-fit relationship of the leading section (holding section) 34 of movable latch for printed circuit 31 become reliable.
Fig. 4 is the stereogram of the occupation mode of piezoelectric element 21, and on the other hand, Fig. 5 is with piezoelectric element 21 upturned stereograms.Take Fig. 4 as benchmark, symbol 21A is the first piezoelectric element, and symbol 21B is the second piezoelectric element.An end (in conjunction with the end) 21c of the first piezoelectric element 21A and the second piezoelectric element 21B is integrated in conjunction with (joint).Relative therewith, the free end 21b of the first piezoelectric element 21A and the second piezoelectric element 21B overlaps separably.
Shown in Figure 1 such as non-when energising, with regard to the piezoelectric element 21 of described formation, the base end part 21a of its first piezoelectric element 21A is by being positioned at more a plurality of supports 10,13 supportings of side of vertical next door 9 of using than drive control part, on the other hand, the free end 21b of the second piezoelectric element 21B and described base end part 21a similarly arrive near the internal face of antetheca 2.Like this, with regard to the length of piezoelectric element 21, design with the accommodation space 17 that effectively utilizes to greatest extent casing 1 and the mode that obtains than big displacement quantity.Additional disclosure once, the piezoelectric element 21 of present embodiment has the first piezoelectric element 21A, end (in conjunction with the end) combination with one end (movable joint portion) 21c and this first piezoelectric element, and can be to the second piezoelectric element 21B of external expansion displacement from the free end 21b side that overlaps with base end part 21a, the base end part 21a of described the first piezoelectric element 21A with clamp position by the support 10 of casing side, 13 supportings, on the other hand, extend to the section that is stuck of free end 21b and the leading section of movable latch for printed circuit 31 of the second piezoelectric element sheet of described base end part 21a side or holding section 34 engages when normal from a described end 21c, therefore, has the advantage that can obtain than big displacement quantity.
Then, shown in Figure 7 such as when energising, the second piezoelectric element 21B can be separated into outside extension bits shifting state from the free end side with respect to the first piezoelectric element 21A.The second fastening plate 47 of the free end 21b of the second piezoelectric element 21B can outwards be expanded displacement with holding section (slot, notch etc.) 45 scopes that engage of plunger 41 in the bight below the leading section of movable latch for printed circuit 31.
Then, Fig. 8 is the stereogram of an example of the movable latch for printed circuit 31 of expression.Movable latch for printed circuit 31 is by the base end part (fulcrum) 32 of spreader shape, the arm 33 from the central portion of this fulcrum wide cut that (front end) direction is extended with level to radius outside, the outstanding section that is stuck 34 formations of state that wrist is bent upwards with the leading section from this wide cut arm.And described spreader shape fulcrum 32 is formed on the left and right sides sidewall 5 of casing 1, unconnected bearing supporting of 6 inwall.In addition, the described section 34 that is stuck forms step-like (section is step-like) with hypomere part 34a and epimere part 34b, and the central portion of section part 34b is formed with and supplies the free end 21b of piezoelectric element 21 freely to insert the connecting hole 35 of engaging thereon.
Then, Fig. 9 is the stereogram of an example of expression plunger 41.When plunger 41 is normal by spring members 42 application of forces, so that its leading section is outstanding from the opening 4 of casing 1.In addition, the rear end face 41a of plunger 41 is designed to the H word shape.The formation of plunger 41 as mentioned above.
At last, Figure 10 is the diagrammatic illustration figure of an example of expression piezoelectric element 21.Piezoelectric element 21 is the rectangular plate bodys that comprise the sandwich construction of piezoelectrics, for example possesses median plate 22, is layered in a pair of rectangle piezoelectric board 24 on the two sides of this median plate 22 via conductivity adhesive linkage 23.
Then, described median plate 22 is reinforcements that surface element has conductivity, as its material, uses the steel that the SK steel carried out Quenching Treatment.In addition, described piezoelectric board 24 possesses unconnected piezoelectrics, the stacked pair of electrodes 25 on the two sides of these piezoelectrics.The piezoelectrics of piezoelectric board 24 just are not particularly limited such as use piezoelectric ceramic, macromolecule piezoelectrics, single crystals piezoelectrics etc. so long as have the material that can produce the piezoelectric effect of distortion by applying voltage.Therein, use has larger piezoelectric effect, good metatitanic acid, the lead zirconates class piezoelectric ceramic (PZT) of durability.In addition, electrode 25 is layered on except the outer edge of piezoelectrics whole, for example forms by printing and calcining silver paste.
Pair of electrodes 25 by being equipped on exterior side and be equipped on median plate 22 for example outside control part 27 apply driving (voltage) signal from the drive division (drive unit) of substrate 26 to described piezoelectric element 21.In the present embodiment, anchor leg 28 is electrically connected with described substrate 26, even plunger 41 moves, going between, self is also fully motionless.Substrate 26 alternately applies positive voltage and negative voltage via this lead-in wire 28 two electrodes 25 laterally.When applying positive voltage like this, the elongation of a side piezoelectrics, relative therewith, the opposing party's piezoelectrics shorten, and piezoelectric element 21 is to the curving of face side or rear side as a result.The function of this piezoelectric element 21 shows as " voltage signal is transformed to mechanical displacement " at this.
About the structure of piezoelectric element 21, as described later, there be " bimorph structure (Figure 10) " and " single piezoelectric chip structure (Figure 53) ", as the present invention, which kind of structure also can.
Next, other embodiments of the invention are described.When other embodiment of explanation, also the repetitive description thereof will be omitted for the additional same or same symbol of the part identical with the 1st embodiment.In addition, the basic structure of other embodiment (characteristic 1,2,3) is identical with the 1st embodiment.
(2) the 2nd embodiment
Figure 11～Figure 15 is each key diagram of the 2nd embodiment.Casing 1 structure of the piezoelectric actuator X of the 2nd embodiment and to be assembled into each parts of casing 1 inside also the same with embodiment 1.Namely, casing 1 is take left and right sides sidewall 5,6 inwall central portion as benchmark, one side has the guide space 16 of taking in plunger 41, in addition, opposite side has the accommodation space 17 that is communicated with described guide space, in this accommodation space, is equipped with the movable latch for printed circuit 31 of wide cut arm shape with level along holding section (for example slot) 45 of plunger 41, in addition, piezoelectric element 21 is similarly the structure of the outside that is positioned at plunger 41.
Additional disclosure, the piezoelectric actuator X of the 2nd embodiment is also the same with the 1st embodiment, is identical in the following areas." inner space of casing 1 is respectively charged into plunger 41 and movable latch for printed circuit 31; this movable latch for printed circuit 31 thereafter end side support by casing 1 axle; simultaneously; the free end 21b binding of the piezoelectric element 21 of leading section and microscler shape; and have the control of this microscler shape piezoelectric element by voltage signal being converted to mechanical displacement and the snap portions 33 of taking off can be blocked in the holding section 45 of described plunger; the inner space of described casing has inwall central portion take wall box as benchmark, one side has the guide space 16 of taking in described plunger, opposite side has the accommodation space 17 that is communicated with described guide space, in this accommodation space, advance and retreat moving direction along plunger is equipped with described movable latch for printed circuit, in addition, described microscler shape piezoelectric element is provided in described accommodation space 17 at least with horizontal supporting, and is provided between the internal face of the snap portions 33 of described movable latch for printed circuit 3 and described casing 1 ".
But, base end part (fulcrum) 32 of each spreader shape of the movable latch for printed circuit 31 of the 2nd embodiment supported by casing 1 axle, therefore, such as when impacting or during vibration because earthquake etc. applies from the outside to casing 1, power regardless of the rigid function of piezoelectric element 21, the capital loses horizontal equilibrium because of the weight of movable latch for printed circuit 31, consequently, have piezoelectric actuator X and might become the such problem of lockup state, so, in order to eliminate such problem points, difference is that movable latch for printed circuit 31 is bearing in the casing 1 (with reference to Figure 15) by axle with " so-called seesaw type ".Need to prove that this seesaw type also is an example of pitching type.
So Figure 12 represents an example of the movable latch for printed circuit 31 of seesaw type.It is identical that movable latch for printed circuit 31 its leading sections of seesaw type shown in Figure 12 have for the section that is stuck 34 aspects of the overshooting shape of the free end insertion engaging of the piezoelectric element 21 of microscler shape and the counterpart of the 1st embodiment, but, different separately in the following areas: as (a) to be tabular position as the base end part 32 of axial region with as the wide cut arm 33 between the leading section that is stuck section 34; (b) other being formed with at described tabular position 33 is equivalent to the cut out portion 51 partly of finding time; (c) in addition, take as the base end part 32 of axial region as benchmark, be connected with in rearward end and be formed with the counterweight part 52 that balance is used.
The mode of the movable latch for printed circuit 31 of the seesaw type of the 2nd embodiment be take as the base end part 32 of axial region as benchmark, arm (snap portions) 33 is tabular position, therefore, as shown in figure 13, (d) mode of the holding section 45 of plunger 41 has also been carried out some design alterations.That is, be the slot of concavity with respect to the holding section 45 of the plunger 41 of the 1st embodiment, the cut out portion of the holding section 45 of the 2nd embodiment for forming with level cutting ormal weight from rear end face 41a forward end 44 above the side of plunger 41.In addition, (e) some design alterations have also been carried out in position of the bearing of the inner space of casing 1, movable latch for printed circuit 31 usefulness of seesaw type etc.Namely, the inner space of casing 1 is and the roughly the same formation of the 1st embodiment, in addition, consider the length of the counterweight part 52 of the movable latch for printed circuit 31 of seesaw type, the bearing 53 of movable latch for printed circuit 31 usefulness of seesaw type is arranged on than position slightly on the front, vertical next door 9.In addition, (f) the outstanding installation portion 54 with installing hole that is formed with of the upper underarm 7 of the casing 1 of the 2nd embodiment, each leading section of 8 and rear wall.
(3) the 3rd embodiment
Figure 16～Figure 22 is each key diagram of the 3rd embodiment.The movable latch for printed circuit 31 of the piezoelectric actuator X of the 3rd embodiment is characterised in that, its guider 61,62 that is arranged at the inside of casing 1 is directed to level or plumbness and takes off with overshooting shape holding section 45 cards of plunger 41.And described guider 61,62nd leaves many leads of predetermined distance, and one of these leads 62 are fixed the base end part 21a of the 1st piezoelectric element 21A.
Then, Figure 16 is the key diagram of overlooking a part of cutting case lid 1b.In Figure 16～Figure 19, casing 1 is by case body 1a, consist of with the case lid 1b of this case body zoarium.For example, take Figure 16 as benchmark, rear wall 3 is positioned at the top.Thereby with the accompanying drawing rotation, then rear wall 3 is positioned at the below.At this, for convenience of description, symbol 7 is set as diapire (with reference to Figure 17).On this diapire 7, be formed with the recess 8A of regulation shape to rear wall 3 directions and right side wall 6 directions from the opening 4 of antetheca 2.Additional disclosure, the cross section of diapire 7 forms step-like, is made of high inwall bottom surface 7a and low inwall bottom surface 7b.
Then, support unit (support) 63 is fixed on the described high inwall bottom surface 7a via fixture (fixedly harness) 64, and section is formed with the pilot hole 65 that plunger is used in the central.In addition, leave predetermined distance along left and right directions near the antetheca on the high inwall bottom surface 7a 2 and be provided with internal thread.
Possessing the piezoelectric element 21 of the substrate 26 of anchor leg 28, microscler shape, the movable latch for printed circuit 31 with latch functions, the plunger 41 that slides in the recess 8A of casing 1 is loaded in the casing 1.In addition, base end part (bottom) has externally threaded many (2) guiders (for example lead) 61,62 and screws togather with installing hole 66, the installing hole 67 of diapire 7 respectively.Described substrate 26 for example is fixed on the inner face of rear wall 3, and in addition, substrate 26 and piezoelectric element 21 are electrically connected via anchor leg 28.
The piezoelectric element 21 of microscler shape is adapted to level along high inwall bottom surface 7a.As shown in figure 19, the base end part 21a of piezoelectric element 21 is by guider 62 supporting of column, and on the other hand, near the engaging protrusion 34A of the movable latch for printed circuit 31 that the free end 21b that is bent to form the L word shape is with being equipped on antetheca 2 engages.
With reference to Figure 18 the structure of movable latch for printed circuit 31 is described.The locking that movable latch for printed circuit 31 is used for the plunger that forms the finger tip shape, solution locking plate are to be connected (for example plug-in type engaging) with the mode of piezoelectric element 21 quadratures with the free end 21b of this piezoelectric element 21.Then, be formed with the first pilot hole 32A chimeric with the first lead 62 with plunger flange 30 at an end a who is connected with piezoelectric element 21, on the other hand, end the other end b that section card takes off at the pin with plunger 41, be formed with the second pilot hole 33A chimeric with the second lead 61.
In addition, the following 31a that blocks the bottom surface 7 of casing 1 is the step surface corresponding with the step shape of described bottom surface 7.In addition, be connected the side 31b of side at the moment of 31a quadrature and be provided with holding section (engaging protrusion) 34A that is connected with the section that is stuck (connecting hole) 48 of the free end 21b that is formed at piezoelectric element 21.Thereby when the engaging protrusion 34A of movable latch for printed circuit 31 was inserted the connecting hole 48 of piezoelectric element 21,32 of movable latch for printed circuit were connected integratedly with piezoelectric element 21, thereby, this movable latch for printed circuit 31 can with piezoelectric element 21 interactions.In addition, the central portion of this movable latch for printed circuit 31 31c above movable latch for printed circuit 31 becomes the inclined plane (cut surface) of sloping shape to the other end.
With reference to Figure 16, Figure 21 and Figure 22 plunger 41 and force application spring 42 are described.Plunger 41 is made of tabular leading section (pin ends section) 44 and sliding axle 44a, the installation portion 43 that this tabular leading section (pin ends section) 44 has convex in rearward end, the leading section of this sliding axle 44a and described installation portion 43 screw togather and run through the pilot hole 65 of the level of aforesaid support unit 63, at a sidewall of described leading section (pin end section) 44, be provided with the pin that the other end b card with movable latch for printed circuit 31 takes off and end by card holding section (engaging protrusion) 45.In addition, be equipped with the locking of the face of the accepting butt of support unit 63 with parts 46 in the rearward end of sliding axle 44a.In addition, spring members 42 is wrapped in upper and application of force when normal to this plunger from the outstanding mode of the opening 4 of casing 1 with the leading section 44 of the triangle of plunger of sliding axle 44a.
With reference to Figure 17 effect is described.Situation when Figure 17 (a) is non-energising.Do not executing on the piezoelectric element 21 in the alive situation, piezoelectric element 21 is parastate with respect to diapire 7 or case body 1b.In this embodiment, piezoelectric element 21 is states that face contacts with the high inwall bottom surface 7a of diapire 7, and therefore, the following 31a of movable latch for printed circuit 31 is by diapire 7 supportings.Additional disclosure, movable latch for printed circuit 31 is sitting on the diapire 7.Thereby the pin that the other end b of the finger tip shape of movable latch for printed circuit 31 enters plunger 41 only is stuck the rear side of section 45, thereby plunger 41 can not retreat (to the latch functions of plunger 41).Therefore, in this embodiment, the situation during non-energising is lock-out state.
Under this non-power status, because when 26 pairs of piezoelectric elements 21 of substrate apply voltage (be given drive signal), 21 of piezoelectric elements are converted to mechanical displacement with voltage signal, and therefore, the displacement of its free end 21b side becomes upward bending.That is, the free end 21b by piezoelectric element 21 is controlled with piezoelectric element 21 interactional movable latch for printed circuit 31, and, shown in Figure 17 (b), float from diapire 7 in the time of by two leads 61,62 guiding.Consequently, finger tip shape the other end b of plunger 41 pin of leaving plunger 41 only is stuck section 45 (unlocking condition).Thereby the elastic force of plunger 41 antagonistic spring parts 42 can retreat in casing 1.In addition, the occasion of non-power status is opposite situation.Like this, piezoelectric element 21 makes movable latch for printed circuit 31 lifting moving by its free end 21b, and plunger 41 is controlled to be unlocking condition or lock-out state.
(4) the 4th embodiment
Figure 23～Figure 31 is each key diagram of the 4th embodiment.The movable latch for printed circuit 31 of the piezoelectric actuator X of the 4th embodiment slides the inner face along continuous straight runs of the rear wall (diapire) 3 of casing 1 and takes off with plunger 41 cards.When for example switching on, movable latch for printed circuit 31 enters the below of the sliding axle 44a of plunger 41, to stop retreating of plunger 41.
Among Figure 23～Figure 31,1 is casing, and this casing 1 is made of case body 1a and case lid 1b.2,3 is upper and lower wall, is formed with the opening 4 of plunger 41 usefulness in an end (left part) of upper wall 2.Be provided with a plurality of guiders for pilot spool 41 in casing 1 inside.
At this, for convenience of description, 7A is set as with rear wall (diapire) 3 has regulation space and relative the first guide wall, 8A is set as the second horizontally-guided wall that is arranged on the central portion of casing 1 in the mode relative with the opening 4 of antetheca 2 and described the first inwall 7.At the central portion of these horizontally-guided walls 7A, 8A, be formed with respectively unconnected through hole (pilot hole) that can lead to the sliding axle 42a of plunger 41.
On the other hand, 9,10 for to prolong first, second vertically-guided wall of the leading section (pin ends section) 44 that desired amount guides described plunger 41 with the mode of antetheca 2 quadratures towards diapire 3 from the internal face of this antetheca 2.
In addition, be provided with the support unit 13A of the base end part 21a of the piezoelectric element 21 that supports microscler shape in the inside of casing 1.Among this embodiment, described piezoelectric element 21 sets along the internal face of right side wall 6 and is plumbness, and therefore, as shown in figure 24, described piezoelectric element 21 is fixed on the bottom of right side wall 6 or the right side internal face of diapire 3.Support unit 13A for example upwards forms the コ word shape, and the base end part 21a plug card of piezoelectric element 21 is combined among the vertical channel 13a of this support unit 13A.
For example, as shown in figure 24, the piezoelectric element 21 of the microscler shape that in the casing 1, be assembled with respectively one side 26 with booster circuit (drive circuit), is electrically connected via anchor leg 28 with this substrate 26, have the movable latch for printed circuit 31 of latch functions, by a plurality of guiders guiding along the vertical direction mobile plunger 41 of advance and retreat, the spring members 42 of application of force when normal to this plunger from the outstanding mode of the opening 4 of casing 1 with leading section (pin ends part) 44 of this plunger 41
The piezoelectric element 21 of microscler shape sets along the inner face of a sidewall 6 of casing 1, its base end part 21a is supported by support unit 13A, the holding section 35A plug-in type of the movable latch for printed circuit 31 that slides with the overlapping and relative free end 21b of described base end part 21a and internal face along continuous straight runs at diapire 3 on the other hand, engages (with reference to Figure 24, Figure 27).
The structure of movable locking cap assembly 31 is described with reference to Figure 28.Movable latch for printed circuit 31 form have rectangular bottom surface, top block-shaped (for example cuboid).Movable latch for printed circuit 31 is assembled in the regulation space between diapire 3 and the first guide wall 7, when being controlled by piezoelectric element 21 in the to the left and right direction slip of internal face of described diapire 3.Additional disclosure, movable latch for printed circuit 31 is connected with the free end 21b of piezoelectric element 21, and, with the piezoelectric element 21 interactional lower surfaces that enter into simultaneously the sliding axle 44a of plunger 41, in addition, for the slip that makes movable latch for printed circuit 31 is carried out well, the bottom surface, above be provided with spherical slip kick 36.
With reference to Figure 23, Figure 29 plunger 41 and spring members 42 are described.Plunger 41 is by first, second horizontally-guided wall 7A, the sliding axle 44a of 8A guiding and consist of with leading section (pin ends section) 44 that the upper end of this sliding axle 44a is connected with is provided with the flange part (block) 46 that is blocked by the second horizontally-guided wall 8A at the central portion of described sliding axle 44a.And spring members 42 is wrapped on the sliding axle 44a, and when normal from the outstanding mode of the opening 4 of casing 1 with the leading section 44 of plunger to this plunger application of force.Consist of like this, also can obtain effect and the effect identical with the 1st embodiment.
(5) the 5th embodiment
Figure 32～Figure 36 is each key diagram of explanation the 5th embodiment.The piezoelectric actuator X of the 5th embodiment is the variation of the 4th embodiment.Thereby for the convenience on illustrating, its part identical with the 4th embodiment is added same or same symbol, and also the repetitive description thereof will be omitted.
Among the piezoelectric actuator X of the 5th embodiment, the shape towards, movable latch for printed circuit 31A of microscler shape piezoelectric element 21, the structure philosophy of support unit 13A are different.So the main difference point of itself and the 1st embodiment is as follows:
(A) microscler shape piezoelectric element 21 is oriented longitudinal direction.
(B) shape, the structure of support unit 13A and movable latch for printed circuit 31, the support unit 13 of foregoing the 4th embodiment of movable latch for printed circuit 31A are identical.
(C) it is outstanding that additional disclosure, plunger 41A idiomorphism are formed in the opening 4A of bottom of right side wall 6 of casing 1A.And, the plunger 41A of this embodiment as shown in figure 33, the face wall 41a of the side at the moment of plunger 41A forms the plate shape of arrow logo, until the back face wall 41b of opposite side forms the shape that cross section is rectangle (with reference to Figure 34).In addition, in the suitable location of the described back face wall 41b of plunger 41A, the pin that is formed with overshooting shape only is stuck section 45.
(D) thereby, the elastic force of the spring members 42A of the plunger 41A of this embodiment opposing between the left side wall 5 of end thereafter and lock case 1A and by the internal face of diapire 3 and the first horizontally-guided wall 7A restriction, but the while along continuous straight runs retreats movement.
(E) when energising, movable latch for printed circuit 31A, only is stuck section 45 with the pin of plunger 41A simultaneously and engages, to stop retreating of this plunger 41A from the wide cut sidewall of case body 1a to case lid 1b Slideslip at the internal face of diapire 3.Such structure also can obtain effect and the effect identical with the 1st embodiment.
(6) the 6th embodiment
Figure 37～Figure 42 is each key diagram of explanation the 6th embodiment.(the structure that Figure 16～Figure 22) is identical that the 6th embodiment is the 3rd.Thereby the explanation of the 3rd embodiment is directly quoted in the aspect different with the 1st embodiment.
In addition, the aspect that the piezoelectric actuator X of the 6th embodiment is different from the 1st embodiment (or the 3rd embodiment) is that as shown in figure 40, microscler shape piezoelectric element 21 (is " block type ".The piezoelectric element of the microscler shape of the 1st embodiment has the first piezoelectric element 21A and the second piezoelectric element 21B, be combined with an end of this first piezoelectric element in the end of this piezoelectric element 21B, simultaneously, can be from the displacement of free end 21b side direction external expansion, the base end part of described the first piezoelectric element 21A is by the support in the casing or support unit supporting (two block types).But as invention, piezoelectric element 21 also can be in the 6th embodiment " block type " or the 1st embodiment " two block types " any.
(7) the 7th embodiment
Figure 43～Figure 51 is each key diagram of explanation the 7th embodiment.(Figure 16～Figure 22) structure is identical with the 3rd embodiment basically for the 7th embodiment.Thereby the explanation of the 3rd embodiment is directly quoted in the aspect different with the 1st embodiment.
In addition, and the difference of the 1st embodiment (or the 3rd embodiment) as follows: (a) shape of the free end 21b of microscler shape piezoelectric element 21; (b) shape of active gage 31A; (c) syndeton of described free end 21b and described active gage 31A; (d) active gage 31A is guided into the device of level; (e) the pushing spring 51 with restraint of labour sheet 31A is provided in described free end 21b side regularly; (f) syndeton of the free end of the piezoelectric element of microscler shape and movable latch for printed circuit is the way of contact.
At first, the free end 21b of microscler shape piezoelectric element 21 is crooked and form.In addition, do not form connecting hole at free end 21b yet.Additional disclosure, microscler shape piezoelectric element 21 are from base end part 21a until free end 21b is the plate body of linearity.
Secondly, as shown in figure 45, active gage 31A is clava, and the end face at its both ends is quadrangle.Secondly, bar-shaped active gage 31A is loaded above the free end 21b of microscler shape piezoelectric element 21.Additional disclosure, the following of the top and bar-shaped active gage 31A of free end 21b is contact condition.Secondly, the guider 18A that active gage 31A uses is not many leads, but is arranged on pair of right and left vertically-guided groove in the lock case 1A in the mode at the both ends that can guide active gage 31A.In addition, as shown in figure 47, pushing spring 51 is the leaf spring of コ word shape for the end face of the through hole that has fixture and use or otch.And the 51b of restriction section that pushes the top upside of bar-shaped active gage 31A is set as longer than the base portion 51a that is fixed on diapire 7.The fixture 52 that pushing spring 51 screws togather via installing hole (internal thread) 9A with diapire 7 is fixed on the place ahead of described free end 21b.
According to aforesaid structure, such as Figure 49 and shown in Figure 50, during energising, the elastic force of bar-shaped active gage 31A opposing pushing spring 51 and rising with level by the gathering sill 18A guiding of casing 1A the time, when becoming non-power status, utilize the elastic force of pushing spring 51 to return reliably initial position (clamped position).In addition, even for the piezoelectric element 21 of the 7th embodiment, shown in Figure 51, its also can be (with the 1st embodiment similarly) piezoelectric element of " two block types ".In addition, 51 are the pushing spring, and 51a is the base portion of pushing spring 51, and 51b is the restriction section of pushing spring 51, and 52 is fixture.
(8) the 8th embodiment
For the purpose of more prudent, Figure 52 is put down in writing as the 8th embodiment.The 8th embodiment is and the 4th embodiment (structure that Figure 23～Figure 31) is identical.Thereby, the explanation that the difference of itself and the 1st embodiment is directly quoted the 44th embodiment.
In addition, the piezoelectric actuator X of the 8th embodiment is that the piezoelectric element 21 of microscler shape is " block type " with the different aspect of the 1st embodiment (or the 4th embodiment).Additional disclosure, piezoelectric element 21 also can be " block type " of the 8th embodiment or " two block types " of the 1st embodiment.
Embodiment
The microscler shape piezoelectric element 21 of various embodiments of the present invention is respectively bimorph structure (Figure 10), but also can be single piezoelectric chip structure (Figure 53).At this, describe each term of bimorph and single piezoelectric chip is subsidiary, the former bimorph is the wafer that sticks respectively voltage ceramic on the two sides of the surface of central substrate and rear side, that is to say, uses the general name of the piezoelectric actuator of two voltage ceramics formations.On the other hand, the single piezoelectric chip of the latter is the wafer that pastes the structure of lastblock voltage ceramic in a side of a metallic plate basically.
Thereby in the scope of the purpose that does not break away from invention, piezoelectric element 21 of the present invention can reach at " bimorph " in any one of " single piezoelectric chip " and use.
In addition, the purposes of piezoelectric actuator X of the present invention, X1 is not limited to the clutch mechanism of automatically controlled usefulness, also can be used for equipment or the latch mechanisms such as door, window, sliding door, partition board.Piezoelectric actuator is being used in the situation of the equipment such as door, window, sliding door, partition board, can be installed in mobile along the vertical direction shutter and reaches on the door that movably draws window, horizontal direction rotation.In addition, in the present embodiment, be provided with at least drive division on the substrate 15, but much less, also can control part 7 be set simultaneously with drive division.
In addition, the purposes of piezoelectric actuator X of the present invention is not limited to the clutch mechanism of automatically controlled usefulness, also can be used for building pin locking mechanism or the latch mechanism that apparatus is used.Piezoelectric actuator X is being used for building in the situation of apparatus, can be installed in mobile along the vertical direction rolling screen door and reaches on the door that movably draws window, horizontal direction rotation.In addition, in the present embodiment, be provided with at least drive division on the substrate 26, but much less, also can be provided with together control part 7 with drive division.
Utilizability on the industry
The present invention mainly is used in the industry of building apparatus or lock.
Claims (5)
1. piezoelectric actuator, inside at casing is assembled with: plunger, when normal at the spring members of outstanding direction to this plunger application of force, voltage signal is converted to the microscler shape piezoelectric element of mechanical displacement, carry out the movable latch for printed circuit of change in location with this piezoelectric element interaction, it is characterized in that, described microscler shape piezoelectric element is equipped on the outside of described plunger in the mode along the inwall of described casing, in addition, the free end of the piezoelectric element of microscler shape engages with movable latch for printed circuit in arbitrary mode of the way of contact or inserted mode, in addition, the control of the engaging of the relatively described plunger of described movable latch for printed circuit or non-engaging is based on the control that the pitching effect of described microscler shape piezoelectric element is carried out.
2. piezoelectric actuator as claimed in claim 1 is characterized in that, the substrate that is provided with in the casing, this substrate have executes alive drive division to piezoelectric element, and anchor leg is connected with described drive division.
3. piezoelectric actuator as claimed in claim 1 is characterized in that, the piezoelectric element of microscler shape has: the first piezoelectric element; The second piezoelectric element, be combined with an end of this first piezoelectric element and can outwards expand displacement from the free end side in the one end, and the base end part of described the first piezoelectric element is by the support in the casing or support unit supporting.
4. piezoelectric actuator as claimed in claim 1 is characterized in that, movable latch for printed circuit is supported on the casing with the seesaw type axle.
5. piezoelectric actuator as claimed in claim 1 is characterized in that, movable latch for printed circuit carries out change in location under level or plumbness.
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP227266/07 | 2007-09-03 | ||
| JP2007227266 | 2007-09-03 | ||
| JP120972/08 | 2008-05-07 | ||
| JP2008120972A JP5148356B2 (en) | 2007-05-09 | 2008-05-07 | Piezoelectric actuator |
| JP2008144756A JP2009296695A (en) | 2008-06-02 | 2008-06-02 | Piezoelectric actuator |
| JP144756/08 | 2008-06-02 | ||
| JP151108/08 | 2008-06-09 | ||
| JP2008151108A JP2009296862A (en) | 2008-06-09 | 2008-06-09 | Piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101383234A CN101383234A (en) | 2009-03-11 |
| CN101383234B true CN101383234B (en) | 2013-04-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810214877 Expired - Fee Related CN101383234B (en) | 2007-09-03 | 2008-09-03 | Piezoelectric actuator |
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| Country | Link |
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| CN (1) | CN101383234B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107420607A (en) * | 2016-05-12 | 2017-12-01 | 玛珂系统分析和开发有限公司 | Piezoelectricity adjusting means |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010119857A1 (en) * | 2009-04-17 | 2010-10-21 | アルプス電気株式会社 | Actuator element and input device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5574241A (en) * | 1993-12-24 | 1996-11-12 | Yamaha Corporation | Keyboard apparatus with common stopper for key and hammer |
| CN1754238A (en) * | 2003-02-28 | 2006-03-29 | Pbt(Ip)有限公司 | Electrically controllable latch mechanism |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4991047B2 (en) * | 2000-12-26 | 2012-08-01 | 京セラ株式会社 | Actuator |
| JP2006288165A (en) * | 2005-04-05 | 2006-10-19 | Yaskawa Electric Corp | Inchworm actuator and method for computing its position |
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2008
- 2008-09-03 CN CN 200810214877 patent/CN101383234B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5574241A (en) * | 1993-12-24 | 1996-11-12 | Yamaha Corporation | Keyboard apparatus with common stopper for key and hammer |
| CN1754238A (en) * | 2003-02-28 | 2006-03-29 | Pbt(Ip)有限公司 | Electrically controllable latch mechanism |
Non-Patent Citations (2)
| Title |
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| JP特开2002-198580A 2002.07.12 |
| JP特开2006-288165A 2006.10.19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107420607A (en) * | 2016-05-12 | 2017-12-01 | 玛珂系统分析和开发有限公司 | Piezoelectricity adjusting means |
| CN107420607B (en) * | 2016-05-12 | 2019-05-07 | 玛珂系统分析和开发有限公司 | Piezoelectricity regulating device |
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| CN101383234A (en) | 2009-03-11 |
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