CN101368579A - Fan filter screen unit and dust-free chamber - Google Patents
Fan filter screen unit and dust-free chamber Download PDFInfo
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- CN101368579A CN101368579A CNA2007101411576A CN200710141157A CN101368579A CN 101368579 A CN101368579 A CN 101368579A CN A2007101411576 A CNA2007101411576 A CN A2007101411576A CN 200710141157 A CN200710141157 A CN 200710141157A CN 101368579 A CN101368579 A CN 101368579A
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- filter screen
- screen unit
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- framework
- fan
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- 230000006698 induction Effects 0.000 claims abstract description 48
- 238000002347 injection Methods 0.000 claims abstract description 17
- 239000007924 injection Substances 0.000 claims abstract description 17
- 239000000428 dust Substances 0.000 claims description 67
- 238000004891 communication Methods 0.000 claims description 18
- 238000009792 diffusion process Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 abstract 2
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 239000007921 spray Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 230000001939 inductive effect Effects 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
Disclosed is a fan filter screen unit which comprises a machine shell, a shell and an induction airflow dispersion plate; the machine shell includes a wind inlet and a wind outlet. The fan is arranged in the machine shell and between the wind inlet and the wind outlet. The induction airflow dispersion plate is arranged under the machine shell and comprises a faceplate and a frame. The faceplate is arranged under the wind outlet; the faceplate is provided with vanes which are arranged in the radial form. The frame is arranged between the machine shell and the faceplate. The frame is arranged around the periphery of the faceplate and connected with the faceplate. The frame is provided with a plurality of injection induction holes.
Description
Technical field
The present invention relates to a kind of equipment of dust free room, and particularly relate to a kind of fan filter screen unit (fanfilter unit, structure FFU).
Background technique
Dust free room is meant an environment with low contamination levels, just with contaminant exclusion such as airborne micro dust particle, chemical volatility gas, microorganism in the space range, and conditions such as indoor temperature, humidity, cleanliness, room pressure, airspeed, air-flow distribution are controlled at the confined space of certain limit.Usually, dust free room is main zone of being responsible for production in the semiconductor factory, and the processing of all semiconductor elements is all carried out at this.Because pollution meetings such as airborne particles floating, dust just have great influence to quality, reliability and the yield rate of element,, must rely on many system equipments to cooperatively interact, just can keep the running of dust free room therefore in order to meet the requirements of benchmark.
At present, fan filter screen unit is used in all kinds of dust free rooms in a large number, as the capital equipment of dust free room secondary cycle and filtration system, also is simultaneously the terminal equipment that whole dust free room air-flow is handled.Generally speaking, fan filter screen unit is to be disposed on the ceiling board of dust free room, can continue to provide bottom blowing air current in the dust free room, to reach the effect of filtering return air.
At different manufacturing process and lustration class demand, dust free room can be divided into laminar flow formula (laminarflow) dust free room and turbulent type (turbulent flow) dust free room etc. at least.Laminar flow formula dust free room is a comprehensive configuration fan filter screen unit on ceiling board, by comprehensive force feed particle is taken away, to reach clean effect.But comprehensive configuration fan filter screen unit often incurs a considerable or great expense in dust free room, causes the increase of equipment cost and demand for energy.The turbulent type dust free room then is a fixed intervals place configuration fan filter screen unit on ceiling board, each fan filter screen unit is scattered in the dust free room, and reaches clean effect by the mode of diffusion dilution.Though the turbulent type dust free room can reduce the demand of fan filter screen unit significantly, yet, it is little and air circulation is low that fan filter screen unit is contained area, can make that air-flow has only Vertical direction, causes short circulation easily and the phenomenon that grit is detained takes place in the part area.
In general semiconductor factory, if condition standards not up to standard such as the cleanliness of dust free room or temperature can have a strong impact on manufacturing process equipment running and element yield rate.Yet the setting of dust free room but is very high with keeping required cost.Therefore, control of the layout design of equipment and air-flow etc. all has its significance in the dust free room.
Summary of the invention
The invention provides a kind of fan filter screen unit, can produce jet-stream wind and diffusion effect, and increase air circulation.
The invention provides a kind of dust free room, can reduce retention areas, increase whole lustration class, and reduce the waste of the energy.
The present invention proposes a kind of fan filter screen unit, and it comprises casing, fan and induction type air-flow diffuser plate.Casing comprises intake grill and exhaust outlet.Fan arrangement is in casing inside, and is disposed between intake grill and the exhaust outlet.Induction type air-flow diffuser plate is disposed at the below of casing.Induction type air-flow diffuser plate comprises panel and framework.Panel configuration is in the below of exhaust outlet, and panel has the blade that a plurality of diffusions are radially arranged.And chassis configuration is between casing and panel.Frame loops is around in around the panel, and is connected in panel.Have a plurality of injections in the framework and induce the hole.
In an embodiment of the present invention, fan filter screen unit also comprises filter screen, is disposed at casing inside.Filter screen for example is disposed between fan and the induction type air-flow diffuser plate.
In an embodiment of the present invention, the angle between the bottom of above-mentioned framework and casing for example is between 10 ° to 75 °.
In an embodiment of the present invention, the angle between the bottom of said frame and casing for example is 60 °.
In an embodiment of the present invention, above-mentioned blade for example is oblique configuration.
In an embodiment of the present invention, the inner edge of above-mentioned blade for example is higher than the outer rim of blade.
In an embodiment of the present invention, the air communication of above-mentioned fan generation is crossed induction type air-flow diffuser plate and for example can be produced jet-stream wind.
In an embodiment of the present invention, the air communication of above-mentioned fan generation is crossed induction type air-flow diffuser plate and for example can be produced diffusion effect.
In an embodiment of the present invention, the air communication of above-mentioned fan generation is crossed induction type air-flow diffuser plate and for example can be induced secondary gas flow.
In an embodiment of the present invention, above-mentioned panel and framework for example are one-body molded.
A kind of dust free room comprises fan filter screen unit and induction type air-flow diffuser plate.Fan filter screen unit is disposed on the ceiling board with a kind of arranging method.Induction type air-flow diffuser plate is disposed at the ceiling board of fan filter screen unit below.Induction type air-flow diffuser plate comprises framework and panel.Frame fixation is the side under ceiling board, and framework has a plurality of injections and induce the hole, can make by injection and induce the air-flow in hole to produce jet-stream wind and diffusion effect.Panel then is connected in framework.
In an embodiment of the present invention, dust free room also comprises raised floor, the air communication mistake that fan filter screen unit is produced.
In an embodiment of the present invention, above-mentioned panel and framework for example are one-body molded.
In an embodiment of the present invention, above-mentioned panel for example is the blade with oblique configuration, and for example diffusion arrangement radially of blade.
In an embodiment of the present invention, above-mentioned framework and the connection angle between the ceiling board for example are between 10 ° to 75 °.
In an embodiment of the present invention, the connection angle between said frame and the ceiling board for example is 60 °.
In an embodiment of the present invention, above-mentioned arranging method for example is to make to have one between adjacent two fan filter screen units and be spaced.
In an embodiment of the present invention, above-mentioned arranging method for example is that trellis is arranged.
Fan filter screen unit of the present invention comprises induction type air-flow diffuser plate, owing to have in the framework of induction type air-flow diffuser plate to spray to induce between hole and adjacent two blades and also have the gap, when therefore the air-flow that produces when fan passes induction type air-flow diffuser plate, can produce jet-stream wind.That is to say that it is the air-flow of Vertical direction that induction type air-flow diffuser plate can allow originally,, make that laterally outlet jet flow wind speed obtains to improve, make air circulation to increase effectively by the change of flow outlet direction and area.
On the other hand, dust free room of the present invention is by the configuration of the ceiling board below fan filter screen unit induction type air-flow diffuser plate, the uprush that fan filter screen unit is produced passes through induction type air-flow diffuser plate, and enlarges the area that air-flow is contained, and reduces the retention areas in the dust free room.In addition, dust free room of the present invention can provide the flow field of class laminar flow, more effectively carries out removing of contaminant particles, replaces existing turbulent type dust free room, and can improve cleanliness comprehensively, reduces the problem of lustration class inequality in the dust free room.
Moreover, to compare with existing laminar flow formula dust free room, dust free room of the present invention can produce more air circulation by the less fan filter screen unit of configuration.Therefore, the present invention can reduce building of dust free room effectively and is set to this and energy-output ratio.
For above-mentioned feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and in conjunction with the accompanying drawings, be described in detail below.
Description of drawings
Fig. 1 is the generalized section according to a kind of fan filter screen unit of the embodiment of the invention.
Fig. 2 looks schematic representation according to the end of a kind of fan filter screen unit of the embodiment of the invention.
Fig. 3 is the generalized section according to a kind of dust free room of another embodiment of the present invention.
Fig. 4 is the schematic side view according to a kind of induction type air-flow diffuser plate of another embodiment of the present invention.
Description of reference numerals
100,302: fan filter screen unit
102: casing
102a: intake grill
102b: exhaust outlet
104: fan
106: filter screen
108,304: induction type air-flow diffuser plate
110,304a: framework
110a: coupling shaft
112,304b: panel
114: spray and induce the hole
116: blade
300: dust free room
306: raised floor
308: ceiling board
310: aircondition
θ: angle
Embodiment
Fig. 1 is the generalized section according to a kind of fan filter screen unit of the embodiment of the invention.Fig. 2 looks schematic representation according to the end of a kind of fan filter screen unit of the embodiment of the invention.
Please refer to Fig. 1, fan filter screen unit 100 comprises casing 102, fan 104, filter screen 106 and induction type air-flow diffuser plate 108.Casing 102 for example is the hollow cube that rectangle constitutes, and is perforation between the top and bottom of casing 102.Casing 102 has intake grill 102a and exhaust outlet 102b, and intake grill 102a and exhaust outlet 102b for example are arranged coaxial.Intake grill 102a for example is disposed at the top of casing 102.Exhaust outlet 102b for example is disposed at the bottom of casing 102.
Fan 104 is disposed at casing 102 inside, and between intake grill 102a and exhaust outlet 102b.The axle center of fan 104 for example is connected to motor (not illustrating), produces air-flow so that fan 104 rotates.Fan 104 for example is connected with intake grill 102a, air can be sucked from intake grill 102a, is discharged by exhaust outlet 102b again.
Induction type air-flow diffuser plate 108 is disposed at the below of casing 102, and the size of induction type air-flow diffuser plate 108 for example equates with the size of casing 102.That is to say that induction type air-flow diffuser plate 108 is positioned at the below of exhaust outlet 102b, the air-flow that makes fan 104 produce can pass through induction type air-flow diffuser plate 108 after exhaust outlet 102b discharges, and causes air-flow can change its direction.
Please be simultaneously with reference to Fig. 1 and Fig. 2, induction type air-flow diffuser plate 108 comprises panel 112 and framework 110.Panel 112 for example is disposed at the below of exhaust outlet 102b.As shown in Figure 2, in the present embodiment, panel 112 for example is the rectangle plate body.Panel 112 has a plurality of blades 116, and blade 116 spreads arrangement radially.Blade 116 for example is oblique configuration, makes the inner edge of same blade 116 for example be higher than its outer rim.Therefore, can have the gap between adjacent two blades 116, the air communication that fan 104 is produced is crossed panel 112.
On the other hand, please continue with reference to Fig. 1 and Fig. 2, framework 110 is disposed between casing 102 and the panel 112.For example have angle theta between the bottom of framework 110 and casing 102, they are for example between 10 ° to 75 °.In the present embodiment, the angle theta between framework 110 and casing 102 bottoms is 60 °.Framework 110 be surrounded on panel 112 around, and be connected in panel 112.Framework 110 comprises coupling shaft 110a, and framework 110 for example is connected to the frame of panel 112 by a plurality of coupling shaft 110a.That is to say in framework 110, only have coupling shaft 110a to contact with panel 112.In addition, framework 110 for example is to be connected with integrated form with panel 112.
Holding above-mentionedly, for example is specific range and disposing at interval between the adjacent coupling shaft 110a, makes to have hole between the adjacent two coupling shaft 110a, induces hole 114 and constitute to spray.Therefore, have a plurality of injections in the framework 110 and induce hole 114, the air communication mistake that fan 104 is produced.It for example is that the hole is induced in microscler injection that hole 114 is induced in injection.In the present embodiment, be that to induce the hole with the microscler injection of configuration in framework 110 be that example describes and sprays the configuration scenario induce hole 114, but not in order to restriction the present invention.Certainly, spray and induce the configuration in hole 114 can be any form, visual its demand of those skilled in the art is adjusted.
What specify is, when fan 104 rotates via the motor traction, air can be sucked and the generation air-flow from intake grill 102a, after by filter screen 106 airborne contaminant filter being come out, make air communication cross induction type air-flow diffuser plate 108 via exhaust outlet 102b again, discharge fan filter screen unit 100.Have angle theta owing to have in the framework 110 to spray between the bottom of inducing hole 114 and framework 110 and casing 102, cross injection in the framework 110 when inducing hole 114, can change the direction of air-flow and improve the transverse jet wind speed of air-flow when air communication.That is to say,, can produce jet-stream wind, and can further induce the generation of secondary gas flow by changing the direction and the area of flow outlet.Simultaneously, when the air communication that produces when fan 104 was crossed in the panel 112 gap between adjacent two blades 116, the blade 116 by oblique configuration can make the air-flow generation diffusion effect of passing through.Therefore, induction type air-flow diffuser plate 108 can disperse the vertical velocity of air-flow effectively, and the area that the air-flow diffusion is contained is improved.
Fig. 3 is the generalized section according to a kind of dust free room of another embodiment of the present invention.Fig. 4 is the schematic side view according to a kind of induction type air-flow diffuser plate of another embodiment of the present invention.
Please refer to Fig. 3, comprise ceiling board 308, raised floor 306, fan filter screen unit 302 and induction type air-flow diffuser plate 304 in the dust free room 300.The below, roof of dust free room 300 for example disposes light steelframe (not illustrating) to constitute the aggregate of ceiling board 308.And raised floor 306 for example is disposed at the position apart from the suitable height in dust free room 300 ground.Raised floor 306 for example has vent (not illustrating), and air-flow is passed.In addition, below raised floor 306, for example dispose aircondition 310.By aircondition 310 suctions, can make air-flow circulation constantly in dust free room 300.
302 of fan filter screen units are disposed on the ceiling board 308 of dust free room 300.For example have between adjacent two fan filter screen units 302 at interval, rather than on ceiling board 308, lay fan filter screen unit 302 comprehensively.In the present embodiment, fan filter screen unit 302 for example is to be disposed on the ceiling board 308 of dust free room 300 in the mode that trellis is arranged.Fig. 3 is that example describes with two groups of fan filter screen units 302 only, yet, those of ordinary skill in the art, visual its demand is adjusted the configuration mode of fan filter screen unit 302.
Please be simultaneously with reference to Fig. 3 and Fig. 4,304 of induction type air-flow diffuser plates are disposed at ceiling board 308 belows of fan filter screen unit 302 belows.Induction type air-flow diffuser plate 304 for example comprises framework 304a and panel 304b.Framework 304a is surrounded on around the panel 304b and is connected in panel 304b.Framework 304a for example has a plurality of coupling shafts (not illustrating) with between connecting frame 304a and the panel 304b.And for example have the interval between adjacent two coupling shafts to form the hole of hollow, induce hole 312 and in framework 304a, constitute to spray.Framework 304a and panel 304b for example are one-body molded.
Hold above-mentionedly, framework 304a for example is connected with ceiling board 308.That is to say that induction type air-flow diffuser plate 304 for example is ceiling board 308 belows of induction type air-flow diffuser plate 304 being fixed in dust free room 300 by framework 304a.Shown in the M partial enlarged drawing of Fig. 4, the connection angle between framework 304a and the ceiling board 308
For example be between 10 ° to 75 °.In the present embodiment, the connection angle between framework 304a and the ceiling board 308
It is 60 °.
Please continue M partial enlarged drawing, have a plurality of injections among the framework 304a and induce hole 312, can make the air communication mistake with reference to Fig. 4.Induce hole 312 to have the different openings direction owing to spray, can change by injection and induce the airflow direction in hole 312 and the transverse jet wind speed of raising air-flow.In addition, panel 304b for example is the blade (not illustrating) with oblique configuration, and blade for example diffusion radially arrange, make gap between adjacent two blades also can allow the air communication mistake, and make the air-flow generation diffusion effect of passing through.
As shown in Figure 3, in the dust free room 300 of normal operation, the clean gas flow that is given off by fan filter screen unit 302 can pass through induction type air-flow diffuser plate 304.Induce hole 312 by the injection among the framework 304a, the uprush that fan filter screen unit 302 is produced passes through the change of flow outlet direction and area, improves the transverse jet wind speed of air-flow.In addition, air communication is crossed induction type air-flow diffuser plate 304 can enlarge the area that air-flow is contained, and can induce secondary gas flow, to reduce the retention areas in the dust free room 300.
Afterwards, the downstream part of the air-flow that provides at fan filter screen unit 302, the raised floor 306 of dust free room 300 just utilizes the vent of raised floor 306 can be so that blow to the return air district under the air-flow, and forms air-flow that one constantly blows down in dust free room 300.After air-flow is passed down through raised floor 306 according to the direction of arrow,, make air-flow can upwards be back to the ceiling board top of dust free room 300 again along the direction of arrow by aircondition 310 suctions.Then, sucked by fan filter screen unit 302 and, be disposed to once again within the dust free room 300 again after the contaminant filter.So, the air in the dust free room 300 can make that the pollutant of carrying under one's arms in the air in the dust free room 300 can be fewer and feweri with impurity, and reach under certain qualification numerical value through circulating repeatedly and filtering peace and quietly.
In sum, fan filter screen unit of the present invention is because of comprising induction type air-flow diffuser plate, induce the gap between the blade of hole and oblique configuration by the injection in the framework, the air communication that fan is produced changes airflow direction and speed after crossing induction type air-flow diffuser plate.Cross injection in the framework when inducing the hole when air communication, can improve the transverse jet wind speed of air-flow, just have the generation of jet-stream wind, the one-step inducing secondary gas flow of going forward side by side.In addition, the gap between the blade of oblique configuration can make the air-flow generation diffusion effect of passing through.Therefore, induction type air-flow diffuser plate can disperse the vertical velocity of air-flow effectively, produces more air circulation, and the area that the air-flow diffusion is contained is improved.
Moreover, dust free room of the present invention disposes induction type air-flow diffuser plate below ceiling board, make the uprush that fan filter screen unit flows out by induction type air-flow diffuser plate air-flow to be contained enlarged areas, reduce the retention areas in the dust free room, improve comprehensive cleanliness.In addition, dust free room of the present invention provides the flow field of the class laminar flow with preferable effective clean area, that is can dilute and remove impurity, grit with more effective stream condition, can obviously reduce the short circuit of air-flow takes place, reduce energy-output ratio, and improve the uneven problem of dust free room lustration class.
On the other hand, dust free room of the present invention utilizes less fan filter screen unit, can produce more air circulation, therefore can improve the energy consumption issues of dust free room effectively.In addition, because the air circulation of dust free room and the increase that air-flow is contained area can make the temperature control in the dust free room more even with cleanliness, and then can improve the quality of machine run and the yield rate of product.
Though the present invention discloses as above with preferred embodiment; yet it is not in order to limit the present invention; those of ordinary skill under any in the technical field; without departing from the spirit and scope of the present invention; when can doing a little change and modification, thus protection scope of the present invention with claims the person of being defined be as the criterion.
Claims (18)
1. fan filter screen unit comprises:
Casing, this casing comprises intake grill and exhaust outlet;
Fan is disposed at this casing inside, and is disposed between this intake grill and this exhaust outlet; And induction type air-flow diffuser plate, be disposed at the below of this casing, comprising:
Panel is disposed at the below of this exhaust outlet, and this panel has a plurality of blades, and described blade spreads arrangement radially; And
Framework is disposed between this casing and this panel, and this frame loops is around this panel and connect this panel, has a plurality of injections in this framework and induces the hole.
2. fan filter screen unit as claimed in claim 1 also comprises filter screen, is disposed at this casing inside, and is disposed between this fan and this induction type air-flow diffuser plate.
3. fan filter screen unit as claimed in claim 2, wherein the angle between the bottom of this framework and this casing is between 10 ° to 75 °.
4. fan filter screen unit as claimed in claim 3, wherein the angle between the bottom of this framework and this casing is 60 °.
5. fan filter screen unit as claimed in claim 1, wherein said blade are oblique configuration.
6. fan filter screen unit as claimed in claim 5, the inner edge of wherein said blade is higher than outer rim.
7. fan filter screen unit as claimed in claim 1, wherein the air communication of this fan generation is crossed this induction type air-flow diffuser plate and can be produced jet-stream wind.
8. fan filter screen unit as claimed in claim 1, wherein the air communication of this fan generation is crossed this induction type air-flow diffuser plate and can be produced diffusion effect.
9. fan filter screen unit as claimed in claim 1, wherein the air communication of this fan generation is crossed this induction type air-flow diffuser plate and can be induced secondary gas flow.
10. fan filter screen unit as claimed in claim 1, wherein this panel and this framework are formed in one.
11. a dust free room comprises:
Fan filter screen unit is disposed on the ceiling board with arranging method; And
Induction type air-flow diffuser plate is disposed at this ceiling board of this fan filter screen unit below, comprising:
Framework, this frame fixation is in this ceiling board below, and this framework has a plurality of injections and induces the hole, can make by described injection to induce the air-flow in hole to produce jet-stream wind and diffusion effect; And panel, be connected in this framework.
12. dust free room as claimed in claim 11 wherein also comprises raised floor, the air communication mistake that this raised floor can make this fan filter screen unit produce.
13. fan filter screen unit as claimed in claim 11, wherein this panel and this framework are formed in one.
14. dust free room as claimed in claim 11, wherein this panel has a plurality of blades of oblique configuration, and described blade spreads arrangement radially.
15. dust free room as claimed in claim 11, wherein the connection angle between this framework and this ceiling board is between 10 ° to 75 °.
16. dust free room as claimed in claim 15, wherein the connection angle between this framework and this ceiling board is 60 °.
17. dust free room as claimed in claim 11, wherein this arranging method comprises making to have one between adjacent two these fan filter screen units and be spaced.
18. dust free room as claimed in claim 17, wherein this arranging method comprises the trellis arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101411576A CN101368579A (en) | 2007-08-13 | 2007-08-13 | Fan filter screen unit and dust-free chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101411576A CN101368579A (en) | 2007-08-13 | 2007-08-13 | Fan filter screen unit and dust-free chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101368579A true CN101368579A (en) | 2009-02-18 |
Family
ID=40412543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101411576A Pending CN101368579A (en) | 2007-08-13 | 2007-08-13 | Fan filter screen unit and dust-free chamber |
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| Country | Link |
|---|---|
| CN (1) | CN101368579A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102828999A (en) * | 2012-09-19 | 2012-12-19 | 亚翔系统集成科技（苏州）股份有限公司 | Fan filter unit |
-
2007
- 2007-08-13 CN CNA2007101411576A patent/CN101368579A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102828999A (en) * | 2012-09-19 | 2012-12-19 | 亚翔系统集成科技（苏州）股份有限公司 | Fan filter unit |
| CN102828999B (en) * | 2012-09-19 | 2015-09-23 | 亚翔系统集成科技（苏州）股份有限公司 | Blower fan filtering unit |
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Open date: 20090218 |