CN101354531A

CN101354531A - Laser transfer printing device

Info

Publication number: CN101354531A
Application number: CNA2008102154634A
Authority: CN
Inventors: 池泽利明
Original assignee: Omron Corp
Current assignee: Omron Corp
Priority date: 2007-07-25
Filing date: 2008-07-25
Publication date: 2009-01-28
Also published as: JP2009031417A; KR20090012105A; TW200937071A

Abstract

The invention relates to a laser transfer printing device, which can cause the movement of a transfer printing plate from one defect site to the other defect site to fall from a stated high position to a stated low position of transfer printing treatment correctly at high speed, and cause the transfer printing plate not to collide with a transfer printing object so as to carry out transfer printing work correctly. The laser transfer printing device comprises a first transfer printing head decline control unit for accumulating the decline distance and meanwhile causing the transfer printing head to decline at the stated high speed before the accumulated decline distance reaches the decline distance of a first object height, a second transfer printing head decline control unit or accumulating the decline distance and meanwhile causing the transfer printing head to decline at the stated low speed before the accumulated decline distance reaches the decline distance of a second object height acting on floating, and a laser transfer printing unit for transferring a transfer printing material film on the transferred surface of the transfer printing object through driving a laser source and irradiating the transfer printing plate by condensed light of laser beams under the conditions of keeping the upper position and the lower position of a fixture of the transfer printing plate and stopping compressed gas jetting.

Description

Laser transfer printing device

Technical field

The present invention relates to be applicable to the laser transfer printing device of the so-called laser repair device of conduct etc. of the circuit defect of repairing liquid crystal indicator for example or plasma display system.

Background technology

In the past, in the display device of LCD, plasma display etc.,, adopted the laser repair device that uses the laser CVD method for carrying out the defect repair of circuitous pattern.

This uses the laser repair device of laser CVD method, the chemical vapor deposition method that utilization produces by laser, specifically, be placed on substrate in the unstrpped gas with laser radiation, by promoting chemistry, the physical reactions of the unstrpped gas on coplanar laser illumination, the coverlay of the reparation position growth unstrpped gas on substrate.

But, in the laser repair device that uses existing like this laser CVD method, as repair materials, except that only using the material (W, Cr, Mo) that can aerify, also because utilize chemistry, the physical reactions of the unstrpped gas on the coplanar laser illumination, so pointed out to exist the slow-footed problem of repairing.

On the other hand, as the laser repair device that can solve such problem, the known laser repair device (for example with reference to patent documentation 1) that utilizes laser transfer method (LMT:Laser Metal Transfer).

Figure 30 represents to utilize the principle of the laser repair device of this laser transfer method.In the figure, a is a quartz glass plate, and b is the conductive metal film that becomes repair materials, and c is a substrate, and d is a circuitous pattern, and e is a laser instrument, and f is a laser beam, and g is the fault location on the circuitous pattern, and b ' is the metallic film of overflowing by laser beam irradiation.In addition, in this embodiment, the parts that quartz glass plate a and film b are made of one are equivalent to transfer plate.

In this laser transfer method, at first, shown in this figure (a), on the substrate c of the g of defectiveness place, on to object plane, having the quartz glass plate a of the film b of repair materials to separate the setting of slight distance L opposite, shown in this figure (b), the some shape that laser beam f is focused into regulation, shine via laser instrument e.So shown in this figure (c), the film portion b ' of illuminated laser beam f overflows, shown in this figure (d), on the defect part g on the circuitous pattern d.At this moment, be under the situation of 2～5 μ m getting the live width of repairing part, preferred distance L gets about 5～20 μ m.

[patent documentation 1] TOHKEMY 2000-31013 communique

In the laser repair device that uses existing like this laser transfer method, can select various metals such as Al, Ni, Ta, W, Ti, Au, Ag, Cu, Cr as repair materials, outside, because can only use the instantaneous reparation of laser radiation,, the useful extremely short time repairs such advantage so finishing for transfer plate.

But, in this laser repair device, becoming on the surface of the display of repairing object etc., for obtaining the transfer film of necessary live width significantly, the distance that need keep transfer printing object surface and transfer materials film all the time is micron order (for example 5～20 μ m).

As repairing object, when for example imagining picture dimension and be the such large-scale display device of tens of inch and even hundreds of inch, for repairing a plurality of fault locations that on circuitous pattern, disperse existence at short notice, not only need to make the positioning control in the surface level of laser beam irradiation optical axis from the fault location on the circuitous pattern to the fault location high-speed mobile, and the lower position (for example distance with transfer printing object surface be 5～20 μ ms) of high position (for example the distance with transfer printing object surface is about 10mm) that need be when mobile during to transfer printing makes the positioning control of the short transverse that transfer plate descends at a high speed.

Generally, for realizing the high-precision positioning control of such short transverse, the general electrical servo control technology that adopts precision, this technology is: by certain measuring appliance actual measurement with near the distance of object, simultaneously according to this measuring distance, carry out speed control for pulse motor or linear motor, and near destination object.

But, because the target for the reparation object of the transfer plate in this kind laser transfer printing device is micron order (for example 5～20 μ m) near distance, even so electrical servo technology by such precision, also be not easy not bump against, and can make transfer plate static in distance correctly near target near object.Particularly, on the surface of conduct near the reparation object (substrate of display device) of object, because just existed micron-sized concavo-convex originally, so in any position of repairing on the object, make transfer plate approaching to lower position as target from the high position, and not with repair that object bumps against and static, in fact all impossible in the servo control technique that utilizes servomotor, linear motor etc.

Summary of the invention

The present invention is conceived to so existing problem and proposes, its objective is provides a kind of laser transfer printing device, it is in this kind laser transfer printing device that with the laser repair device is representative, can be at a high speed and correctly make transfer plate be from fault location to the high position from regulation such as mobile of fault location to descending for the lower position of the regulation of transfer process (for example with transfer printing object be 5～20 μ m) near distance, and, make not and to bump against with the transfer printing object and static, and then can on the surface of transfer printing object, correctly carry out film transfer.

About in addition other purpose and action effect of the present invention, by the following record of reference instructions, the professional can easily understand.

Above-mentioned technical task solves by the laser transfer printing device with following structure.

That is, this laser transfer printing device, its will the tabular small pieces with laser-transmissible to object plane on cover the transfer plate that the transfer materials film forms, overlap being transferred on the face of transfer printing object via small gap, so that transfer materials film and transfer printing object to be transferred face relative, by upper face side illuminating laser beam, transfer materials film transfer being transferred face on to transfer printing object corresponding with irradiation position from transfer plate.

So, in this laser transfer printing device, have: the laser radiation optical system, it comprises from the laser beam of the lasing light emitter incident object lens that the target location on the face is shone vertically downward that are transferred to the transfer printing object; Transfer printing head, it has: a body; The transfer plate fixator, side keeps transfer plate below, side has in the face of the transfer printing window of the transfer plate of following side and then has the pressure gas ejection function of downward injection pressure gas in the above for it; Supporting device, it moves up and down with flat-hand position for a body and supports the transfer plate fixator freely; The fixator maintaining body, it makes moving up and down of transfer plate fixator stop, keeping simultaneously this position at upper-lower position arbitrarily, described transfer printing head structure is, under the face that is transferred from the transfer printing object descends approaching state to the predetermined distance body, by making transfer materials film and being transferred above the transfer printing object below transfer plate keep the needed minim gap of transfer printing between the face by spray the effect of come-up certainly that produces to the gas that is transferred face; Head positioning mechanism, it can make transfer printing head move up and down at least in vertical direction; The first dropping distance measuring unit, it measures the dropping distance (A) from the altitude datum of regulation to the face that is transferred of transfer printing object; The second dropping distance measuring unit, it is measured from the dropping distance (B) of the transfer materials film of altitude datum below transfer plate of regulation; Metrics calculation unit, it is from calculating the distance (A-B) that is transferred face and transfer materials film to the dropping distance that is transferred face (A) with to the dropping distance (B) of transfer materials film; The first transfer printing head decline control module, it is by the drive controlling head positioning mechanism, the accumulative total dropping distance, simultaneously this cumulative distance reach first object height (H1) dropping distance (A-B)-make transfer printing head decline at a high speed with regulation before the H1}; The second transfer printing head decline control module, it is by the drive controlling head positioning mechanism, the accumulative total dropping distance, this accumulative total calculate distance reach dropping distance from second object height (H2) that the come-up effect is worked (A-B)-H1-H2} before, carry out pressure gas for transfer printing head and spray, the low velocity with regulation descends transfer printing head simultaneously, after waiting for arrival second object height, stop pressure gas and spray, make the action of fixator maintaining body simultaneously, keep the upper-lower position of transfer plate fixator; The laser transfer unit, it makes the upper-lower position that keeps the transfer plate fixator and is making under the state that stops the pressure gas injection, by the driving laser source laser beam condensation and shine on the transfer plate, at the transfer printing transfer materials film on the face that is transferred of transfer printing object.

So, by such laser transfer printing device, because adopt the transfer printing head of following formation, promptly under the face that is transferred from the transfer printing object descends approaching state to the predetermined distance body, by the gas that is transferred face is sprayed the effect of come-up certainly that produces, transfer materials film below transfer plate and being transferred above the transfer printing object keep the needed minim gap of transfer printing between the face, even so for example surpass preset distance at body dropping distance to second object height (H2), transfer plate will bump against with the transfer printing object, because constitute transfer plate move up and down be supported freely outside, work from the come-up effect, so even the transfer printing head body descends, because transfer plate rises, so can avoid the collision of transfer plate and transfer printing object automatically, prevent transfer plate in advance and bump against the danger that it is damaged etc. as the circuitous pattern of transfer printing object.Therefore, at the pre-irradiation of laser beam, can enough open loop control guide transfer plate to height with the needed minim gap of transfer printing.In addition, because after guiding finishes, utilize the effect of fixator maintaining body, keep the height of transfer plate, on the other hand, under the silent state that stops the pressure gas injection, carry out film transfer by laser radiation, so the disorder of the air-flow that can avoid little vibration of the transfer plate fixator that sprays by pressure gas, spray by pressure gas causes that the transfer film sheet departs from from original transfer printing precalculated position or the fuzzy so inappropriate situation of transfer printing line, can access distinct transfer printing result.

In preferred embodiment, in the laser radiation optical system, comprise focal point height control mechanism and electron camera, the former is used to adjust the height of laser focusing point, and the latter has the function of all the time body that is taken that is positioned at laser focusing point height being focused and exporting the state in focus that takes a decision as to whether according to video.

So, the first dropping distance measuring unit constitutes, via head positioning mechanism transfer printing head is dodged under the state of the position of readiness of stipulating, the irradiation optical axis that makes the laser radiation optical system is without any blocking, by control focal point height control mechanism, whether dropping distance is aimed at by the camera surveillance focus while adding up, the height of laser focusing point is descended, storing as dropping distance (A) when aiming at focus from the altitude datum stipulated to the face that is transferred of transfer printing object as the distance of addition result, in addition, the second dropping distance measuring unit constitutes, via head positioning mechanism transfer printing head is reset under the state of deployed position of regulation, continue to utilize the measurement of the first dropping distance measuring unit and utilize transfer plate to block the irradiation optical axis of laser radiation optical system, by control focal point height control mechanism, whether aim at by the camera surveillance focus while deducting climb, the height of laser focusing point is risen, storing as dropping distance (B) when aiming at focus from the altitude datum stipulated to the transfer materials film as the distance of subtracting each other the result.

By such structure, because LASER Illuminator System self works as distance measuring unit, so the advantage that does not need special-purpose in addition processing measuring unit is arranged.

According to the present invention, because adopted the transfer printing head of following structure, promptly, under the face that is transferred from the transfer printing object descends approaching state to the predetermined distance body, by spray the effect of come-up certainly that produces to the gas that is transferred face, make the transfer materials film and being transferred of transfer printing object upper surface of transfer plate lower surface keep the needed minim gap of transfer printing between the face, even so for example surpass preset distance to the body dropping distance of second object height (H2), transfer plate will bump against with the transfer printing object, transfer plate is supported and elevating movement freely because constitute, work from the come-up effect in addition, so even the transfer printing head body descends, but because transfer plate rises, so can automatically avoid the collision of transfer plate and transfer printing object, and prevent transfer plate in advance and bump against the danger that it is damaged etc. as the circuitous pattern of transfer printing object.In addition, after approaching finishing, utilize the effect of fixator maintaining body, keep the height of transfer plate, on the other hand, because under the silent state that stops the pressure gas injection, carry out film transfer by laser radiation, so the disorder of the air-flow that can avoid little vibration of the transfer plate fixator that sprays by pressure gas or spray by pressure gas causes that the transfer film sheet departs from from original transfer printing precalculated position, perhaps the fuzzy so inappropriate situation of transfer printing line can access distinct transfer printing result.

Description of drawings

Fig. 1 is the stereoscopic figure that uses wiring graph prosthetic device integral body of the present invention.

Fig. 2 is the stereoscopic figure of laser transfer unit.

Fig. 3 is the key diagram of an example of expression beam shaping mechanism.

Fig. 4 is the schematic configuration diagram of laser radiation optical system as central representation laser transfer unit.

Fig. 5 is the stereoscopic figure (one) of transfer printing head.

Fig. 6 is the exploded perspective view (one) of transfer printing head.

Fig. 7 (a), Fig. 7 (b) are the planimetric maps (one) of transfer printing head.

Fig. 8 is the stereoscopic figure (one) of the inverted status up and down of transfer printing head.

Fig. 9 is the stereoscopic figure (its two) of transfer printing head.

Figure 10 is the exploded perspective view (its two) of transfer printing head.

Figure 11 (a), Figure 11 (b) are the planimetric maps (its two) of transfer printing head.

Figure 12 is the stereoscopic figure (its two) of the inverted status up and down of transfer printing head.

Figure 13 (a), Figure 13 (b) are the key diagrams of fixator open state.

Figure 14 (a), Figure 14 (b) are the key diagrams of fixator hold mode.

Figure 15 is the block diagram that the structure of control part represented in summary.

Figure 16 is all general flow charts of processing of expression wiring graph prosthetic device.

Figure 17 is the process flow diagram that the measurement of expression distance (A) is handled.

Figure 18 is the process flow diagram that the measurement of expression distance (B) is handled.

Figure 19 is the process flow diagram that expression is handled to the high speed decline of first object height (H1).

Figure 20 is the process flow diagram that expression is handled to the low speed decline of first object height (H2).

Figure 21 is the process flow diagram that expression is handled to the laser focusing point location of transfer plate.

Figure 22 is the key diagram that first operation of handling is measured on the two sides.

Figure 23 is the key diagram that second operation of handling is measured on the two sides.

Figure 24 is the key diagram that the 3rd operation of handling is measured on the two sides.

Figure 25 is the key diagram that the 4th operation of handling is measured on the two sides.

Figure 26 is the key diagram that the 5th operation of handling is measured on the two sides.

Figure 27 (a), Figure 27 (b) are the key diagrams (one) of the short transverse positioning control of transfer plate.

Figure 28 (a), Figure 28 (b) are the key diagrams (its two) of the short transverse positioning control of transfer plate.

Figure 29 relates to the Action Specification figure of the short transverse positioning control of transfer plate of the present invention.

Figure 30 (a)～Figure 30 (d) is the key diagram as the laser transfer method of prerequisite of the present invention.

Symbol description

1 transfer printing head

2 head positioning mechanisms

4 lasing light emitters

5 focal point height detent mechanisms

6 focusing light sources

7 light beam convergence devices

11 transfer printing head bodies

The 11a installation portion

The 11b support

The 11c space

12 leaf springs

The 12a opening

The 12b punching

The 12c punching

12c ' large diameter hole portion

The 12d screw hole

The 12e screw hole

13 transfer plate fixators

13a transfer printing window

The 13b screw hole

14 transfer plates

The 14a spray-hole

The 15a connector

The 15b connector

The 15c connector

The 15d connector

The 15e connector

The 15f connector

The 16a flexible tubing

The 16b flexible tubing

17 fixator grasping devices (air hand)

The 17a arm

The 17b arm

17c cylinder portion

18 vacuum suction mechanisms

19 fixator maintaining bodies

21X direction drive division

22Y direction drive division

23Z direction drive division

31 object lens

32 spinners

33 rotary encoders

34 beam splitters

The 35LED luminaire

The 36a entrance port

37 lens barrels

38 electron cameras

39 beam shaping mechanisms

41 laser beam

The 51Z traversing guide

52 driving motors

53 roll different screw mechanism

61 mark light beams

100 wiring graph prosthetic devices

101 transfer plates

101a transfer materials sheet

102 transfer printing objects

102a is transferred face

103 transfer plate fixators

103a transfer printing window

103b pressure gas ingate

103c pressure gas outlet opening

Pressure gas path in the 103d fixator

104 transfer printing head bodies

104a transfer plate fixator is placed and is used the space

105 pressure gass

106 leaf springs

107 fixator grasping devices

The 107a arm

The 107b arm

107c cylinder portion

108 flexible tubings

110 repair object (transfer printing object)

112 pressure gas operation valves

120 platforms

130 cell location mechanisms

The 131X traversing guide

The 132Y traversing guide

140 laser transfer unit

140a unit mechanisms frame

First, second mask plate of 391a, 391b (directions X)

First, second slide block of 392a, 392b (directions X)

First, second rolls (directions X) 393a, 393b

394 voussoirs (directions X)

First, second mask plate of 395a, 395b (Y direction)

First, second slide block of 396a, 396b (Y direction)

First, second roller of 397a, 397b (Y direction)

398 voussoirs (Y direction)

The shared optical axis of C1

C2 laser radiation optical axis

C3 photography optical axis

The C21 emergent light axis

Embodiment

Describe in detail with reference to the accompanying drawings as the wiring graph prosthetic device that relates to an embodiment of laser transfer printing device of the present invention (also claiming " laser repair device ").

In Fig. 1, Fig. 2 and Fig. 3 respectively expression use all stereoscopic figure of wiring graph prosthetic device of the present invention, the stereoscopic figure of the laser transfer unit that in this wiring graph prosthetic device, comprises and be illustrated in the key diagram of an example of the beam shaping mechanism that comprises in this laser transfer unit.

As shown in Figure 1, wiring graph prosthetic device 100 comprises platform 120, cell location mechanism 130 and laser transfer unit 140.Platform 120 is used to put the reparation object of liquid crystal indicator or plasma display system etc. (transfer printing object) 110 for example and facing up as the circuitous pattern of repairing object; Cell location mechanism 130 can locate at the coordinate of the XY arbitrarily place in surface level above this platform 120; Laser transfer unit 140 is by these cell location mechanism 130 hanger bearings.

Cell location mechanism 130 have directions X guide rail parallel to each other 131,131 and with the Y traversing guide 132 of their quadratures, by the drive source of not shown pulse motor or linear motor etc., can locate the coordinate position of XY arbitrarily that laser transfer unit 140 moves in the surface level.

Laser transfer unit 140 constitutes and comprises following parts: unit mechanisms frame 140a, and it is by the overhung supporting of said units detent mechanism 130 at platform 120; Be installed in the head positioning mechanism 2 on the unit mechanisms frame 140a; Transfer printing head 1 by these head positioning mechanism 2 three-dimensional localization; Laser radiation optical system 3, it is installed on the unit mechanisms frame 140a and passes through 5 liftings of focal point height detent mechanism freely.By the way, among the figure the 51, the 52nd, constitute focal point height detent mechanism 5 about the Z traversing guide.

As Fig. 1 and shown in Figure 2, head positioning mechanism 2 comprises: Z direction (above-below direction) drive division 23 of Y direction (left and right directions) drive division 22 of directions X (fore-and-aft direction) drive division 21, supporting directions X drive division 21 and supporting Y direction drive division 22, transfer printing head 1 (details aftermentioned) is installed on the directions X drive division 21.So,, can move transfer printing head 1 and even navigate to the position arbitrarily of relative object lens 31 by these

drive divisions

21,22,23 of suitable drive controlling.

As Fig. 1 and shown in Figure 2, laser radiation optical system 3 comprises: laser radiation light path C2, its imports lens barrel 36 to laser beam 41 that the lasing light emitter 4 from the top arrives by beam shaping mechanism (not shown) from entrance port 36a, and the laser beam that imports guide beam separation vessel 34 vertically downward; Light path C3 use in photography, it separate with beam splitter 34 from the photography light of object lens 31 towards level via lens barrel 37 electron cameras 38 that lead; Common optical pathways C1, its is vertically downward being directed to object lens 31 with the laser beam that light path C2 arrives from beam splitter 34 via laser radiation, and the photography light that arrives from object lens 31 guide beam separation vessel 34 vertically upward.And, the 35th, the LED luminaire of the visual field of the electron camera 38 that is used to throw light on.

In other words, as shown in Figure 4, laser radiation optical system 3 constitute have vertical laser radiation with the photography of light path C2, level with light path C3 and coaxial reflection optical system as the shared vertical common optical pathways C1 of the part of these light paths.

From the laser beam that object lens 31 penetrate vertically downward,, on emitting light path C21, leave the position of predetermined distance and carry out optically focused generation focal point P by the optically focused effect of object lens 31.Film transfer by laser radiation is handled, and the laser focusing point P place that the predetermined distance on this emitting light path produces carries out.

On the other hand, electron camera 38 is always focused and is aimed at the object that is positioned at this laser focusing point.In addition, in electron camera 38, whether built-in be the function of the state of focusing to outside output according to the vision signal judgement.In addition, as the back will illustrate with reference to Fig. 4, the integral body of laser radiation optical system 3 can following in vertical direction mobile any distance by the focal point height detent mechanism 5 that is made of driving motor 52, round head screw mechanism 53 and Z traversing guide 51.

Therefore, if, judge output, can know then whether focal point is consistent with the laser radiation object Yi Bian monitor the focusing of electron camera 38 Yi Bian make all risings or the decline of laser radiation optical system 3.In addition, judge output, then, can know dropping distance from altitude datum to this laser radiation object according to to punctual dropping distance measured value if measurement, monitors the focus of electron camera 38 simultaneously from the dropping distance of certain altitude datum.As described later, in this embodiment,, realize the short transverse positioning control of transfer plate by utilizing the effect of above-mentioned laser radiation optical system 3 and focal point height detent mechanism 5.

And, in Fig. 2, the 32nd, on circumference, keep a plurality of object lens to rotate spinner at any angle at every turn, the 33rd, the rotary encoder that uses in the anglec of rotation control of spinner 32 can be selected object lens automatically by these.

Fig. 3 represents an example of beam shaping mechanism 39.As shown in the drawing, beam shaping mechanism 39 is configured in the front of the entrance port 36a of lens barrel 36 (with reference to Fig. 2), have the cross section of the laser beam of coming from lasing light emitter 4, by two mask plates parallel to each other that extend at directions X and two mask plates parallel to each other that extend in the Y direction, be shaped as the long limit with random length and the OBL function of minor face.

That is, as as can be known from Fig. 3, this beam shaping mechanism 39 have Y (about) two elongated OBL mask plates parallel to each other (the first mask plate 391a and the second mask plate 391b) of extending of direction and two the elongated OBL mask plates parallel to each other (the first mask plate 395a and the second mask plate 395b) that extend in X (front and back) direction.

To Y (about) the first mask plate 391a that extends of direction and the second mask plate 391b be respectively by the first slide block 392a and second slide block 392b supporting, these

slide blocks

392a, 392b towards on the direction near each other with spring energized and on X (front and back) direction, be supported sliding freely.

On these

slide blocks

392a, 392b, the opposite disposes the first roller 393a and the second roller 393b, and between these

rollers

393a, 393b, the supporting freely that moves up and down has the voussoir 394 of the guide surface of cross section V-arrangement.

Therefore, the dropping distance by adjusting this voussoir 394 (the insertion distance between roller), by the interval of any adjustment first mask plate 391a and the second mask plate 391b, the directions X width (fore-and-aft direction width) in cross section that can the setting laser bundle.

Equally, the first mask plate 395a and the second mask plate 395b that extend to X (front and back) direction are supported by the first slide block 396a and the second slide block 396b respectively, these

slide blocks

396a, 396b on direction near each other with spring energized, towards Y (about) be supported sliding freely on the direction.

On these

slide blocks

396a, 396b, the opposite disposes the first roller 397a and the second roller 397b, and between these

rollers

397a, 397b, the supporting freely that moves up and down has the voussoir 398 of the guide surface of cross section V-arrangement.

Therefore, the dropping distance by adjusting this voussoir 398 (the insertion distance between roller), by the interval of any adjustment first mask plate 395a and the second mask plate 395b, the Y direction width (left and right directions width) in cross section that can the setting laser bundle.

Return Fig. 2, on the light path of laser beam 41, front in above-mentioned beam shaping mechanism 39 is provided with the mark that is used to converge the laser beam 41 that arrives from lasing light emitter 4 and arrives with light source 6 from the focusing light beam convergence device 7 (for example half-reflecting half mirror, polarized light beam splitter etc.) with light beam 61.

Then, via this light beam convergence device 7, sending into beam shaping mechanism 39 with the mark of light source 6 with light beam 61 from focusing, via the cross section of beam shaping mechanism 39 suitable shaping marks, can on the surface of laser radiation object, show the suitable high light image of clearly contrast of mark thus with focusing usefulness with light beam 61.

Fig. 4 represents a synoptic diagram, and it is that the above-mentioned concrete mechanism of central representation is the laser transfer unit 140 of center explanation with laser radiation optical system 3.As shown in the drawing, this laser radiation optical system 3 has the vertical irradiation light path C2 that connects lasing light emitter 4 and beam splitter 34; The photography light path C3 that connects the level of beam splitter 34 and electron camera 38; Be connected beam splitter 34 and object lens 31 and shared vertical common optical pathways C1 in laser radiation and video camera photography.

Then, the vertical irradiation that connects lasing light emitter 4 and beam splitter 34 with light path C2 in, be provided with and be used to converge the mark that arrives with light source 6 from focusing with the light beam convergence device 7 of light beam 61 and laser beam 41 be used for laser beam 41 or the mark beam shaping 39 of the cross section shaping of light beam.

When lasing light emitter 4 is driven when sending laser beam, from object lens 31 outgoing laser beam vertically downward.At this moment, because the optically focused effect of object lens 31 on the emergent light axis C21 of object lens 31, at the position of the predetermined distance that leaves object lens 31 laser beam condensation, produces focal point P.For implementing laser transfer effectively, as illustrating with reference to Figure 30 in front, must make the height of the transfer materials film (b) of this focal point P below transfer plate correctly consistent as ultimate principle of the present invention.

On the other hand, in electron camera 38, carry out Design for optical system like this, make on the light receiving surface of built-in photographic element (not shown), only when being existed in the position of focal point P, just form the light image of distinct quilt photography body, become the state of so-called focusing by the photography body.In addition, in electron camera 38, be provided with state (for example vividness, brightness or the like) according to the light image on the light receiving surface of built-in photographic element (not shown), automatically judgement whether be focusing state, with the function of this result of determination to outside output.About the automatic determination processing of such focusing, since known in various documents, so it is open in detail to omit the automatic determination processing of concrete focusing.

So more than the integral body of Shuo Ming laser radiation optical system 3 can move up and down by focal point height detent mechanism 5.As previously mentioned, in this embodiment, focal point height detent mechanism 5 constitutes: by the rotary driving force of accepting motor 52, the ball screw framework 53 that laser radiation optical system 3 is moved up and down along Z traversing guide 51,52 (with reference to Fig. 1).Therefore, by this focal point height detent mechanism 5 of drive controlling, can adjust the height of focal point P arbitrarily.

Then, Fig. 5, Fig. 6, Fig. 7 and Fig. 8 represent the stereoscopic figure (one), its exploded perspective view (one), its planimetric map (one) of transfer printing head and the stereoscopic figure (one) of inverted status up and down respectively.

From Fig. 5 and Fig. 6 as can be known, transfer printing head 1 constitutes transfer printing head body 11 as main body.This transfer printing head body 11 has for the installation portion 11a that installs for directions X drive division 21 (with reference to Fig. 2) with for supporting the support 11b of transfer plate fixator (details aftermentioned) 13.

As shown in Figure 6, form the space 11c of inner periphery shape with circular in the central authorities of support 11b, accommodate the transfer plate fixator 13 of the outer circumferential shape with circular littler than interior all diameters of space 11c in the 11c of this space, supporting transfer printing head matrix 11 is moving up and down in the allowed band of regulation.Use leaf spring 12 supporting transfer plate fixators 13 in this embodiment, and transfer plate fixator 13 can be moved up and down in the allowed band of regulation in the 11c of space.

Leaf spring 12 has roughly square shape.Be formed for receiving the opening 12a from the laser beam of object lens 31 ejaculations in the central, the periphery at opening 12a forms punching 12b, 12c and screw hole 12d, 12e simultaneously.In these punchings, the punching 12b of whole one-tenth arcuation is the hole that is used to give local elasticity, the punching 12c that has the arcuation of roughly conglobate large diameter hole 12c ' in central authorities, giving outside the purpose of local elasticity, as described later, the part of large diameter hole 12c ' also utilizes electron camera 38 to observe the top view window effect of the transfer printing object 110 of the below that is positioned at transfer printing head 1 as being used to.

That is, under the installment state that Fig. 5 represents, as shown in Figure 6, the large diameter hole part 12c ' of the arcuation punching 12c of leaf spring 12, side is carried out the position adjustment in its lower section, with and the inner peripheral surface of the space 11c of the outer peripheral face recess 13d of transfer printing head fixator 13 and transfer printing head body 11 between the clearance portion coupling.Therefore, under the installment state that Fig. 5 represents, can be above the reparation object (transfer printing object) 110 below large diameter hole part 12c ' perspective is positioned at it (being transferred face), thus, large diameter hole part 12c ' constitutes as the viewport that is used for electron camera 38.

In addition, the diameter of this viewport (large diameter hole part 12c '), because with compare the fully big of setting by its diameter of laser beam, so incessantly merely as viewport, if with it with the suitable driving laser source (once irradiating (one shot), wobble drive or the like) of laser emitting optical axis C21, then not only in laser transfer is handled, and can supply with the lasser cutting that is used to remove in a part of repairing the circuitous pattern that produces on the object surface.

The combination of leaf spring 12 and transfer plate fixator 13 is carried out via the screw hole 12e of leaf spring 12 sides and the screw hole 13b of transfer plate fixator 13 sides.In addition, the combination of leaf spring 12 and support 11b is undertaken by the screw hole 12d of leaf spring 12 sides and the screw hole 11d of support 11b side.Thus, transfer plate fixator 13 constitutes, in the 11c of space restriction to horizontal direction move and also for the moving of above-below direction, it is constant to keep flat-hand position, only allows in the elastic range of leaf spring 12.

As shown in Figure 6, have the transfer printing window 13a that is used to accept the laser beam that penetrates from object lens 31 at the central portion of transfer plate fixator 13, from this transfer printing window 13a below the circle that keeps of side transfer plate 14 (with reference to Fig. 8 and Fig. 9) above expose.As the front illustrates with reference to Figure 30, so-called transfer plate 13 be have the tabular small pieces of laser-transmissible (being the small pieces of quartz glass plate in this embodiment) to object plane (below being in this embodiment) on, cover the parts of transfer materials (being the conductive metal of the reparation of suitable circuitous pattern such as chromium in this embodiment) film.

As the back will describe in detail with reference to Fig. 8, at the back side of transfer plate fixator 13, arrange a plurality of pressure gas spray-

hole

13c, 13c... circlewise, and surround circular transfer plate 14.Constitute by repair the not pressure gas of active gases such as object (transfer printing object) 110 ejection nitrogen from these pressure gas spray-

holes

13c, 13c... from following direction, it is constant to make transfer plate 14 keep flat-hand position, and the relative together surface of object (transfer printing object) 110 of repairing with transfer plate fixator 13 is from floating small come-up distance.Certainly, the number of this small come-up distance pressure gas spray-hole that can on transfer plate 14, be provided with by suitable design or configuration, the injection flow of pressure gas, weight of the impedance that moves up and down, transfer plate fixator and transfer plate in the fixator supporting device or the like realization.

In this embodiment, transfer plate 14 usefulness adhesive securement are below transfer plate fixator 13, but, form not shown attraction pipeline via inside at transfer plate fixator 13, connection is from the flexible tubing of outside source of suction and the attraction hole below the transfer plate fixator, utilize this attraction hole also can transfer plate 14 absorption remain on transfer plate fixator 13 below.In addition, as the mechanism that is used for transfer plate 14 is remained on the following side of transfer plate fixator 13, can suitably adopt the known mechanism that satisfies such maintenance function.

In addition, be used to limit transfer plate fixator 13 and be in the 11c of space to the moving of horizontal direction, move, keep flat-hand position mechanism constant, that only in the bound scope of regulation, allow for direction up and down simultaneously, certainly be not limited to the leaf spring supporting structure, can adopt and realize the same known various mechanisms of purpose.

As other example beyond the leaf spring supporting structure, between the outer peripheral face of the inner peripheral surface of the space 11c that can enumerate and the transfer plate fixator 13 of in the 11c of space, accommodating at the transfer printing head body 11 of accommodating transfer plate fixator 13, be provided with the ball bearing mechanism that keeps flat-hand position and allow transfer plate fixator 13 to slide up and down simultaneously, resin Bearning mechanism, fluid bearing mechanism (pneumatic bearing), compression spring or the like, and utilize moving up and down of these bearings via suitable bound stop mechanism restriction.

Two places on the outer peripheral face of transfer plate fixator 13, pressure gas ingate (not shown) is set, below transfer plate fixator 13, as shown in Figure 8, the a plurality of pressure gas spray-hole of

alignment arrangements

13c, 13c... surround circular transfer plate 14 and make circlewise.Between these ingates and outlet opening, form circular internal path.In addition, the connector 15e, the 15f that on the outer peripheral face of transfer plate fixator 13, exist, the pressure gas that is fixed on transfer plate fixator 13 sides enters the mouth.

On the inner peripheral surface of the space 11c that is provided with on the support 11b, fix two

connector

15c, 15d, on the outer peripheral face of support 11b, fix two connector 15a, 15b.Here, connector 15a and connector 15c are communicated with, and connector 15b and connector 15d are communicated with.Connector 15e utilizes flexible tubing 16a to be connected with connector 15c, and connector 15f is connected via flexible tubing 16b equally with connector 15d.Because on connector 15a and connector 15b, form the plug that pipe is connected usefulness respectively, thus at this by the flexible tubing of insertion from not shown compressed gas source, can be from the internal feed pressure gas of support 11b to transfer plate fixator 13.

When from

connector

15a, 15b supply pressure gas, this pressure gas that is supplied to is after by the path in the transfer plate fixator 13, spray-

hole

13c, 13c... below transfer plate fixator 13 sprays downwards towards transfer printing object 110, thus, transfer plate 14 and transfer plate fixator 13 float certainly with respect to the transfer printing object together.At this moment, the pressure of injected pressure gas be set to make below transfer plate and the transfer printing object between produce minim gap.

In addition, for transfer plate 14 and transfer plate fixator 13 are floated certainly with respect to transfer printing object 110 together, also the pressure gas spray-hole can be set below transfer plate 14 not below transfer plate fixator 13, the pressure gas spray-hole (not shown) below transfer plate 14 sprays downwards.

That is, in this occasion, below transfer plate 14, a plurality of pressure gas spray-holes of annular arrangement, these pressure gas spray-holes are communicated with connector 15e, 15f.Therefore, identical with the example of Fig. 8, by supplying with pressure gas from

connector

15a, 15b, the pressure gas spray-hole below transfer plate sprays pressure gas, can make transfer plate fixator 13 and transfer plate 14 come-ups.In addition, below transfer plate fixator 13 or transfer plate 14 below the break-make control of the pressure gas that sprays of pressure gas spray-hole, by suitably carrying out at the pressure gas injection control valve 74 (with reference to Figure 15) that in the way of the pressure gas pipe arrangement of transfer printing head 1, is provided with.

And then, as Fig. 6 and shown in Figure 7, on the sidepiece in the 11c of the space of transfer printing head body 11, fixing holder handle sturcture (common name " air hand ") 17, its conduct is used for moving up and down of transfer plate fixator 13 stopped, and the fixator maintaining body 19 that keeps in its position.This fixator handle sturcture 17 has and makes the 17c of cylinder portion that plunger haunts from axial two ends symmetry and at one end fix above-mentioned plunger respectively, and the pair of right and left arm 17a, the 17b that extend in parallel along the both sides of transfer plate fixator 13.So constitute, under the not shown pressure gas pipe arrangement of state send into pressure gas (control pressurized air) by to(for) the 17c of cylinder portion, can selectively take following state: by the indication of stipulating from the outside, two plungers insert, clip from its both sides by a pair of

arm

17a, 17b the fixator hold mode of transfer plate fixator 13; Two

plunger

17a, 17b are outstanding, pair of right and left

arm

17a, 17b move the fixator open state of decontroling transfer plate fixator 13 to breaking away from direction mutually.

Figure 13 and Figure 14 represent the key diagram of fixator open state and the key diagram of fixator hold mode respectively.In two figure, the 1st, transfer printing head, the 101st, transfer plate, 101a are the transfer materials sheets, the 102nd, the transfer printing object, 102a is transferred face, and the 103rd, transfer plate fixator, 103a are the transfer printing windows, 103b is the pressure gas ingate, 103c is the pressure gas outlet opening, and 103d is a pressure gas path in the fixator, the 104th, and the transfer printing head body, 104a is that the transfer plate fixator is accommodated and used the space, the 105th, air, the 106th, leaf spring, the 107th, fixator grasping device (air hand), 107a, b are arms, 107c is a cylinder portion, the 108th, and flexible tubing, the 112nd, pressure gas operation valve.During the fixator open state represented in Figure 13, arm 107a, the b of fixator grasping device 107 do not contact transfer plate fixator 103 and static, and transfer plate fixator 103 can move up and down in the allowed band of leaf spring 106.To this, during the fixator hold mode represented in Figure 14, transfer plate fixator 103 is clipped fixing from two ends by arm 107a, b with fixator grasping device 107, and transfer plate fixator 103 can not move up and down under this kind situation.

Other examples of fixator maintaining body 19 are represented in Fig. 9～Figure 12.In this embodiment, as fixator maintaining body 19, adopt vacuum suction mechanism 18.This vacuum suction mechanism 18 is made of suction tube 18a outstanding in the 11c of the space of transfer printing head body 11 and the sucker 18 that forms at the front end b of this suction tube 18a.This suction tube 18a is connected with not shown vacuum source via connector 15g, by suitably being controlled at the switching of the valve in its way, constituting and can selectively take following two states: absorption transfer plate fixator 13 makes and stops the fixator hold mode that it moved up and down, kept this state; Do not adsorb transfer plate fixator 13 and allow its fixator open state that moves up and down.

The following describes the structure of the control part of the action that is used to control this wiring graph prosthetic device.Figure 15 represents that summary represents the block diagram of the structure of control part.

As shown in the drawing, this control part is that main body constitutes with the microcomputer.Those skilled in the art know, and microcomputer 7 comprises system: all microprocessor (MPU) of pipe unit, storage are used to realize the RAM of the ROM, the workspace when being used to the microprocessor executive system routine is provided of the system program of various control function etc. and the external support circuit of other various necessity.

On this microcomputer 7, as reference Fig. 1～Fig. 4 has illustrated each following parts are connected, these parts are: but the head positioning mechanism 2 of three-dimensional localization transfer printing head, the lasing light emitter 4 of the laser beam that the generation transfer printing is used, be used to carry out the focal point height detent mechanism 5 of the vertical direction location of laser radiation optical system 3, be used for when the photography by electron camera 38, focusing automatically the focusing judged with light source 6, make electron camera 38 with the focusing of laser beam irradiation point, be used for shaping laser beam 41 or mark beam shaping mechanism 39 with the beam cross section of light beam 61, be used for receive repairing the communication control unit 71 of the suitable coordinate data in position etc. from the outside, by being used to carry out the numerical key of various input-output operations or the operating portion 72 that function key constitutes, the display part 73 of various guiding demonstrations when being used for display operation portion 72 and carrying out input operation etc., at the pressure gas injection control valve 74 that in the way of the pressure gas pipe arrangement of transfer printing head 1, is provided with, be used for carrying out the cell location mechanism 130 of positioning control of the surface level of laser transfer unit 100, fixator maintaining body 19 with the upper-lower position that is used to keep transfer plate fixator 13.

Then, Figure 16 represents to constitute all general flow charts of processing of the microcomputer 7 of wiring graph prosthetic device.In the figure, when handling beginning, at first in step 101, by communication control unit 21, illustrated epigyny device etc. never, the XY coordinate of the initial point in the receiving element detent mechanism 130.By carrying out known reset processing, keep coordinate alone in cell location mechanism 130 sides.To this, because alone coordinate is also arranged,, adjust for this and handle so need to integrate these coordinate systems in the epigyny device side, be used to XY coordinate information from the initial point of epigyny device.

In step 102, repair the XY coordinate of position from receptions such as epigyny devices equally.This XY coordinate determines the coordinate system of epigyny device side as prerequisite, still, because the treatment for correcting of previous coordinate system finishes, so be the coordinate transform of the reparation position XY that has received the XY coordinate of revised coordinate system.

Then in step 103, locating laser transfer printing unit 140 is come by directly over the reparation position of revised XY coordinate appointment object lens 31.This positioning action is undertaken by cell location mechanism 130.

Like this, if located laser transfer unit 140 object lens 31 are come repair the position directly over, then proceed to measure and handle as second two sides should measuring first of repairing object, should measure transfer plate.

Measure in the processing on this two sides, at first, in step 104, measuring basis height (Href) and the distance (A) of repairing object (transfer printing object) 110.The details that the measurement of distance (A) is handled represents that in the process flow diagram of Figure 17 the summary that the measurement of the distance (A) during the two sides measurement is handled is in addition handled is represented in the key diagram of Figure 22～Figure 24.

When in Figure 17, beginning to handle, at first,, as shown in figure 22, carry out that transfer printing head 1 is for example moved horizontally the processing of distance L a to dodging the position as shown by arrows from transfer position in step 201.The mobile processing of this transfer printing head 1 is undertaken by drive controlling head positioning mechanism 2 by microcomputer 7.

Then in step 202～204, as using among Figure 23 shown in the arrow, for each object lens 31, the a series of like this processing of the processing (step 204) of output is judged in the focusing that repeats the processing (step 203) that makes illuminating optical system 3 decline unit distances (step 202), this unit distance of addition and read in video camera, simultaneously judge output, whether repeat determination processing (step 205) having focused according to the focusing of video camera.During the step more than repeating, when judgement has been focused (YES in the step 205), as shown in figure 24, carry out the processing (step 206) that addition result is stored as the distance (A) of altitude datum (Href) and reparation object 110.

Like this, handle in (step 104) in the measurement of the distance (A) suitable with the first dropping distance measuring unit of the present invention, shown in the specification figure of the process flow diagram of Figure 17 and Figure 22～Figure 24, make via head positioning mechanism 2 transfer printing head 1 dodge the regulation position of readiness (with reference to Figure 23), the irradiation optical axis that makes laser radiation optical system 3 without any the situation of blocking under, by control focal point height control mechanism 3, addition dropping distance (step 203), monitor (the step 204 of whether focusing by electron camera 38 simultaneously, 205), make the height decline (step 202) of laser focusing point P, the distance of the addition result as focusing state (with reference to Figure 24) time, store (step 206) to the dropping distance (A) of the face that is transferred of transfer printing object 110 as altitude datum (Href) from regulation, and a series of like this processing of execution.

Then, return Figure 16, handle, carry out the measurement of the distance (B) of altitude datum (Href) and transfer plate and handle (step 105) as second measurement.The details that the measurement of distance (B) is handled represents that in the process flow diagram of Figure 18 in addition, the two sides is measured the summary of the measurement processing of the distance (B) in handling and represented in the key diagram of Figure 25 and Figure 26.

When in Figure 18, beginning to handle,, making transfer printing head 1 move the processing (step 301) of (recovery) to transfer position from dodging the position as using among Figure 24 shown in the arrow, carrying out at first in step 301.In this processing, also undertaken by drive controlling head positioning mechanism 2 by microcomputer 7.Then in step 302～305, as using among Figure 25 shown in the arrow, for each object lens 31, repeat and make illuminating optical system 3 rising unit distances (step 302), this a series of processing of processing (step 304) that deducts the processing (step 303) of this unit distance and read in the focus judgement output of video camera, judge output according to the focus of electron camera 38 simultaneously, repeat the determination processing (step 305) of whether focusing, as shown in figure 26, repeating above-mentioned operating period, when the judgement of having focused, carry out subtracting each other the result as altitude datum (Href) with repair the distance (B) of object 110 and the processing (step 306) of storing.

Like this, handle in (step 105) in the measurement of the distance (B) suitable with the second dropping distance measuring unit of the present invention, then pass through the measurement of the first dropping distance measuring unit, transfer printing head 1 is reset under the deployed position (with reference to Figure 25) of assigned position by head positioning mechanism 2, so that block by transfer plate 14 under the state of emergent light axis C21 of laser radiation optical system, by control focal point height control mechanism 5, deduct climb (step 303), and monitor (the step 304 of whether focusing by electron camera 38,305), make the height rising (step 302) of laser focusing point P simultaneously, the distance of subtracting each other the result as when focusing is stored (step 306) as the altitude datum (Href) from regulation to the dropping distance (B) of transfer materials film, carry out so a series of processing.

Return Figure 16, if in above-mentioned process, measure respectively from the altitude datum (Href) of regulation to the dropping distance (A) of the face that is transferred of transfer printing object 110 and dropping distance (B), then then begin the short transverse localization process of transfer plate 14 from the altitude datum (Href) stipulated to the transfer materials film.

In the short transverse localization process of transfer plate 14, at first, according to dropping distance from altitude datum (Href) (A) and the dropping distance (B) measured, shown in Figure 27 (a), carry out the processing (step 106) of calculating transfer plate 14 and the distance (X) of repairing object 110 by following formula (1).

X＝A-B ...(1)

Like this, if the distance (X) of having calculated transfer plate and having repaired object, then then as Figure 27 (b) shown in, carry out to make 11 declines (step 107) of transfer printing head body at a high speed and with the amount that the lower surface of transfer plate 14 arrives the dropping distance (X-H1) of first object height (H1).

The details that expression is handled to the high speed decline of first object height (H1) among Figure 19.In the figure, when beginning to handle, at first,, set decline target range (X-H1), carry out simultaneously and dropping distance is reset to 0 processing in step 401.Thereafter, judging that dropping distance arrival target range (X-H1) is preceding, repeat to make transfer printing head body decline unit distance (step 402) at a high speed, add unit distance (step 403) on dropping distance, the each execution judges whether dropping distance arrives the processing (step 404) of target range (X-H1).When judging that dropping distance arrives target range (X-H1) (step 404 is YES), shown in Figure 27 (b), make to stop to descend (step 405) around here.

Like this, in the high speed to first object height (H1) that is equivalent to the first transfer printing head decline control module descends processing (step 107), as shown in figure 19, by drive controlling head positioning mechanism 2, accumulative total dropping distance (step 403), simultaneously this cumulative distance reach first object height (H1) dropping distance (A-B)-H1} before, carry out the processing (step 402) that transfer printing head 1 is descended with regulation.

Return Figure 16, when finishing after (step 107) handled in the high speed decline of first object height (H1), then, as shown in figure 28, carry out with low speed and with the lower surface of transfer plate 14 and arrive the processing (step 108) that the dropping distance (X-H1-H2) of second object height (H2) descends transfer printing head body 11.

Figure 20 represents the details that the low speed of second object height (H2) descends and handles.In the figure, when handling beginning, at first carrying out setting decline target range in step 501 is the processing of (X-H1-H2).Then, removing fixator maintaining body 19 makes transfer plate fixator 13 movable up and down, pressure gas injection control valve 74 is switched to open mode from closed condition, the beginning pressure gas sprays back (step 502), it is preceding to arrive target range (X-H1-H2) at the judgement dropping distance, repeats with low speed to make transfer printing head body 11 decline unit distances (step 503), add unit distance (step 504) on dropping distance, judge at every turn whether dropping distance arrives the processing (step 505) of target range (X-H1-H2).Around here, when judging that dropping distance arrives target range (X-H1-H2) (step 505 is YES), shown in Figure 28 (b), make and stop to descend (step 506), restore fixator maintaining body 19 stationary transfer board bindings 13, pressure gas injection control valve 74 is switched to closed condition from open mode, spray (step 507) and stop pressure gas.

Here, the value of second object height (H2) is set at the height (for example leaving about the upper surface 100 μ m that repair object (transfer printing object) 110) that the effect of come-up certainly of the transfer plate that sprays by pressure gas is worked.Therefore, shown in Figure 28 (b), reach specified altitude Hx (after the moment of H2＜Hx＜H1) at the lower surface height of transfer plate 14, though transfer printing head body 11 descends, but because transfer plate 14 and transfer plate fixator 13 float together, so shown in Figure 28 (b),, guarantee the needed minim gap of laser transfer repairing between object (transfer printing object) 110 and the transfer plate 14.

As mentioned above, the picture surface as the liquid crystal indicator of repairing object 110 or plasm display device exist micron-sized concavo-convex outside, about distance (A), (B) that in the processing of Figure 17 and Figure 18, measures with optical mode by electron camera 38, for the reason of measuring principle, wish to avoid the error of micron and even tens of microns.But, elevating movement in the bound scope of regulation is supported freely because transfer plate 14 and transfer plate fixator 13 are together for transfer printing head body 11, and transfer plate 14 and transfer plate fixator 13 spray from come-up by pressure gas together, if so set the error that the elevating movement allowed band of transfer plate fixator 13 allows to absorb imagination, then suppose with object height (H1), (H2) Dui Ying target dropping distance (X-H1), (X-H1-H2) there is bigger error in, therefore, target dropping distance (X-H1-H2) by open loop control is excessive, even the surface collision of object 110 is wanted and repaired to transfer plate 14, spray the effect of come-up certainly that produces by pressure gas, shown in Figure 28 (b), transfer printing head body 11 continues to descend, on the other hand, transfer plate 14 come-up, the surface that transfer plate 14 can not take place thus and repair object 110 bump against and the problem of the circuitous pattern of damaging surface.

In addition, after target range (X-H1-H2) reaches, by being maintained fixed transfer plate fixator 13 with fixator maintaining body 19, stopping the pressure gas injection, keep the height of transfer plate, on the other hand, can be at the film transfer that stops to carry out under the silent state that pressure gas sprays by laser radiation.Therefore, can not be subjected to enter the influence that the pressure gas between transfer plate and the transfer printing object blows out (for example transfer materials depart from from the target transfer position etc.) and successfully carry out the transfer printing operation by blowing out of pressure gas by the transfer materials sheet that laser radiation is overflowed, can prevent for the transfer printing Effect on Performance, can carry out correct transfer printing for the target location.In addition, because also eliminated the vibration of the transfer plate fixator of the injection of passing through pressure gas, so transfer plate fixator 13 is stable, the precision when improving the transfer printing operation.In addition, by keeping transfer plate fixator 13 stable, even the reparation position of repairing object also can stably dispose transfer plate in the end with maintaining body 19.

Return Figure 16,, carry out the processing of height that the height of laser focusing point P is positioned at the lower surface transfer materials film of transfer plate 14 in step 109.Figure 21 represents the details to the laser focusing point location processing of transfer plate 14.

In the figure, when beginning to handle, for each object lens, the processing (step 603) whether processings (step 602), judgement have focused of reading in of output is judged in the focusing that repeats and make laser radiation optical system 3 decline unit distances (step 601), carries out video camera.When judging (step 603 is YES) when focusing, make the decline of laser radiation optical system 3 stop (step 604) therebetween.

Thereafter, return Figure 16 once more, beam shaping is handled and the once irradiating of lasing light emitter is handled by carrying out, and carries out the transfer process (step 110) of transfer materials film towards repairing object 110.At this moment, the cross section of laser beam, be shaped as the live width of circuitous pattern and the elongated oblong-shaped of regulation line length,, have the thickness of regulation and elongated OBL transfer materials film on transfer plate 14 in the covering of reparation position by it is shone with formation conduct reparation object.

At this moment, under the situation with the thickness deficiency of a laser radiation transfer materials film, the height of keeping transfer plate 14 is constant, make transfer printing head 1 integral level move a spacing, repeat the processing of laser radiation once more with necessary number of times, thus, repairing the transfer film that the position forms necessary thickness.Because when making transfer printing head 1 all move horizontally 1 spacing, also act on from the come-up effect, transfer plate 14 and the distance of repairing object 110 are kept necessary gap, so when moving horizontally, do not worry that transfer plate 14 and the surface of repairing object 110 are bumped against and with its damage.

And then, because in transfer printing head 1, spray the function of come-up certainly that produces as above-mentioned having enrolled by pressure gas, so for example as shown in figure 29, have under the situation of big fluctuating on the surface of repairing object 110, the processing of Figure 16～Figure 21 by carrying out above explanation, at any position of repairing on the object 110, can both and repair the gap of keeping laser transfer necessity between the object 110 at transfer plate 14.

When gathering above processing (Figure 16～when Figure 21) describing, when carrying out repair by the wiring graph prosthetic device, at first, make cell location mechanism 130 action, the object lens 31 that in laser transfer unit 140, comprise be positioned at the reparation position directly over (step 101～103).In this location, and use according to the open loop positioning control of the XY coordinate of the optical axis of the XY coordinate of repairing the position and object lens 31 and measure the position at the reparation position that the video by Flame Image Process electron camera 38 obtains and the positioning control of the servo loop that the distance of the reference point in the electron camera visual field is carried out simultaneously.

If the optical axis of object lens 31 be positioned at repair the position directly over, then then make head positioning mechanism 2 actions, make transfer printing head 1 dodge dodge (step 201) behind the position of not blocking this optical axis from the transfer position of the optical axis that blocks object lens 31, make laser radiation optical system 3 all descend (step 202), the focus that monitors electron camera 38 is simultaneously judged output (step 204,205), from the dropping distance in moment of having focused, measure the distance (A) (step 203,206) of altitude datum (Href) above the reparation object from regulation.

Then, make head positioning mechanism 2 actions once more, make transfer printing head 1 never block the dodging of optical axis (step 301) after the transfer position that the position resets into the optical axis that blocks object lens 31 of object lens 31, with same just now, make laser radiation optical system 3 all rise (step 302), the focus that monitors electron camera 38 is simultaneously judged output (step 304,305), from the climb in the moment of focusing, measure distance (B) (step 303,306) from the altitude datum (Href) of regulation to reparation object upper surface.

Then, according to distance (A) and distance (B), distance (X) { (A)-(the B) } back (step 106) of calculating transfer plate and repairing object, as first object height (step 401), make the height (H1: about about 5mm) from reparation object surface to transfer plate 14 transfer printing head body 11 drop to its dropping distance (X-H1) (step 402) with open loop control.

If made transfer printing head body 11 dropping distance (X-H1) (step 404 is YES, 405) that descended with open loop control, then follow height (H2: about about 100 μ m) as second object height (step 501) from reparation object surface to transfer plate 14, spray pressure gas (step 502) on one side, with open loop control make transfer printing head body 11 declines (step 503,506) dropping distance (X-H1-H2) (step 504,505) to it on one side.

At this moment, second object height (H2) is set in the height zone (for example about 100 μ m) that the effect of come-up certainly of spraying generation by pressure gas begins to move because be, so drop in the way of second object height (H2) at transfer printing head 11, transfer plate fixator 13 floats certainly for transfer printing head body 11.Therefore, promptly be used in the open loop control near first and second object height some errors are arranged, perhaps, also can in the process that transfer printing head 1 descends, avoid transfer plate 14 and reparation object to bump against and the danger of damaging surface etc. reliably for the reason surface elevation change of repairing the object side.After reaching object height, by using fixator maintaining body 19 to be maintained fixed transfer plate fixator 13, using the pressure gas operation valve to stop pressure gas spraying, can maintain optimized scope to the distance of transfer plate 14 and reparation object, in addition, under the silent state that stops the pressure gas injection, do not carry out to the influence of compressed gas ejection the transfer printing operation.

Thereafter, by driving laser source 4 (step 110), during the once irradiating laser beam, the film of the transfer materials corresponding with point of irradiation (for example wire) is transferred to repairs the object position, if necessary, keep then that this is constant near distance, make transfer printing head 1 move prescribed distance, repeatedly repeat above once irradiating to horizontal direction.

So, repairing the object position, the film of lamination multilayer transfer material obtains necessary laminated thickness.In the moving of this horizontal direction because carry out the injection of the pressure gas of nitrogen etc., so carry out the cooling effect and the gap maintenance effect of transfer position simultaneously, can prevent in advance transfer plate careless with repair object and bump against situation its damage.

Like this, according to transfer printing head 1 of the present invention, because by spraying pressure gas, can make between transfer plate 14 and the transfer printing object 110 and have distance, and face one another and keep slight distance, so for electrical control by Z direction drive division 23, not only carry out transfer plate with to a certain degree near the control roughly of transfer printing object, and because the come-up effect of facing of injection afterwards by gas work, can make transfer plate safely near the transfer printing object, even so exist under the situation in a plurality of defectives place as on the display device of repairing object etc., also can order move to these positions at a high speed, repeat to make the processing of transfer printing head 1 decline at a high speed, have the advantage that can shorten the quiescent interval of this kind operation significantly.

In addition, when making the transfer plate fixator become equilibrium state by pressure gas, by keeping the transfer plate fixator with maintaining body, after being stopped, pressure gas carries out transfer process, the transfer materials sheet of overflowing by laser during transfer printing is the influence of compressed gas ejection not, in addition, also can suppress because the vibration of the transfer plate fixator that the ejection of pressure gas causes.Therefore, the transfer materials sheet of overflowing by laser can not depart from from the target location, can correctly carry out the transfer printing operation.

In addition, in above-mentioned example, after the low speed switching of the injection beginning of pressure gas timing, still also can constitute and when low speed decline begins preceding high speed decline, carry out the pressure gas injection as the transfer printing head body.

According to the present invention, in this kind laser transfer printing device take laser repair device as representative, can make turns to Printing forme at a high speed and correctly waits from the high position of stipulating to advancing for moving from the rejected region to the rejected region The lower position of the regulation of row transfer process descends, and does not bump against with the transfer printing object and static. In addition, By when the transfer printing operation with the fixing fixator and stop Compressed Gas of maintaining body, thereby have not by compression The impact that blows out of gas, the advantage that can correctly carry out the transfer printing operation.

Claims

1. laser transfer printing device, its will the tabular small pieces with laser-transmissible to object plane on cover the transfer plate that the transfer materials film forms, overlap being transferred on the face of transfer printing object via small gap, so that transfer materials film and transfer printing object to be transferred face relative, by upper face side illuminating laser beam from transfer plate, the transfer materials film transfer corresponding with irradiation position to being transferred on the face of transfer printing object, be is characterized in that, comprising:

Laser radiation optical system, this laser radiation comprise with optical system and being used for from the laser beam of the lasing light emitter incident object lens that the target location on the face is shone vertically downward that are transferred to the transfer printing object;

Transfer printing head, this transfer printing head has: a body; Transfer plate fixator, this transfer plate fixator below side keep transfer plate and also in the above side have in the face of the transfer printing window of the transfer plate of following side and then have the pressure gas ejection function of downward injection pressure gas; Supporting device, this supporting device move up and down with flat-hand position for a body and support the transfer plate fixator freely; The fixator maintaining body, this fixator maintaining body stops to move up and down of transfer plate fixator and keeps this position at upper-lower position arbitrarily, the structure of described transfer printing head is, the face that is transferred from the transfer printing object descends also approaching state to the predetermined distance body under, by owing to spray the effect of come-up certainly that produces, make transfer materials film and being transferred above the transfer printing object below transfer plate keep the needed minim gap of transfer printing between the face to the gas that is transferred face;

Head positioning mechanism, this head positioning mechanism can make transfer printing head move up and down at least in vertical direction;

The first dropping distance measuring unit, this first dropping distance measuring unit are measured the dropping distance (A) from the altitude datum of regulation to the face that is transferred of transfer printing object;

The second dropping distance measuring unit, this second dropping distance measuring unit are measured the dropping distance (B) from the altitude datum of regulation to the transfer materials film of transfer plate lower surface;

Metrics calculation unit, this metrics calculation unit is from calculating the distance (A-B) that is transferred face and transfer materials film to the dropping distance that is transferred face (A) with to the dropping distance (B) of transfer materials film;

The first transfer printing head decline control module, this first transfer printing head decline control module is by the drive controlling head positioning mechanism, the accumulative total dropping distance, simultaneously this cumulative distance reach first object height (H1) dropping distance (A-B)-make transfer printing head decline at a high speed with regulation before the H1};

The second transfer printing head decline control module, this second transfer printing head decline control module is by the drive controlling head positioning mechanism, the accumulative total dropping distance, this cumulative distance reach dropping distance from second object height (H2) that the come-up effect is worked (A-B)-H1-H2} before, carrying out pressure gas for transfer printing head sprays, low velocity with regulation descends transfer printing head simultaneously, after waiting for arrival second object height, stopping pressure gas spraying, make the action of fixator maintaining body simultaneously, and keep the upper-lower position of transfer plate fixator; With

The laser transfer unit, this laser transfer unit is at the upper-lower position that keeps the transfer plate fixator and stop under the state that pressure gas sprays, by the driving laser source laser beam condensation irradiation and on transfer plate, at the transfer printing transfer materials film on the face that is transferred of transfer printing object

Thus, pre-irradiation in laser beam, the effect of come-up certainly that produces is sprayed in utilization by pressure gas, arrive height with open loop control guiding transfer plate, and after guiding finishes, utilize the effect of fixator maintaining body with the needed minim gap of transfer printing, keep the height of transfer plate, on the other hand, under the silent state that stops the pressure gas injection, carry out film transfer by laser radiation.

2. laser transfer printing device according to claim 1 is characterized in that,

In the laser radiation optical system, comprising:

Focal point height control mechanism, it adjusts the height of laser focusing point;

Electron camera, its have all the time be positioned at laser focusing point height by the focusing of photography body and also according to video output judge it whether is the function of the state of having focused,

The first dropping distance measuring unit constitutes,

Via head positioning mechanism transfer printing head is dodged under the state of the position of readiness of stipulating, the irradiation optical axis that makes the laser radiation optical system is without any blocking, by control focal point height control mechanism, whether dropping distance is aimed at by the camera surveillance focus while adding up, the height of laser focusing point is descended, storing as dropping distance (A) when aiming at focus from the altitude datum stipulated to the face that is transferred of transfer printing object as the distance of addition result

The second dropping distance measuring unit constitutes,

Via head positioning mechanism transfer printing head is reset under the state of deployed position of regulation, continue to utilize the measurement that the first dropping distance measuring unit carries out and utilize transfer plate to block the irradiation optical axis of laser radiation optical system, by control focal point height control mechanism, whether aim at by the camera surveillance focus while deducting climb, the height of laser focusing point is risen, storing as dropping distance (B) when aiming at focus from the altitude datum stipulated to the transfer materials film as the distance of subtracting each other the result.