CN101354517A

CN101354517A - XY stage and image-taking apparatus

Info

Publication number: CN101354517A
Application number: CNA2008101443088A
Authority: CN
Inventors: 小林英雄; 竹下幸孝; 大久保惠慈
Original assignee: Fujinon Corp
Current assignee: Fujinon Corp
Priority date: 2007-07-27
Filing date: 2008-07-25
Publication date: 2009-01-28
Also published as: JP2009053671A

Abstract

The present invention provides an XY stage and image-taking apparatus. The position of a first bonded body is adjusted in an X direction so that a first hall element approaches a position facing a boundary between N and S poles of a first magnet when an X stage is positioned in the middle of a movement stroke in the X direction. Further, the position of a second bonded body is adjusted in a Y direction so that a second hall element approaches a position facing a boundary between N and S poles of a second magnet when the Y stage is positioned in the middle of a movement stroke in the Y direction. The magnet is provided at a position where the sensitivity of the hall element is maximum.

Description

XY frame and filming apparatus

Technical field

The present invention relates to the XY frame and possess the filming apparatus of this XY frame, this XY frame possess matrix and with this matrix along being moved frame with respect to what matrix can relatively move in the XY plane of the orthogonality of center shaft of Z direction break-through.

Background technology

For the disorder of the photographic images that suppresses to produce, hand shake correction mechanism is housed in filming apparatus because of user's hand shake etc.As this hand shake correction mechanism, the such optics of lens or capturing element is moved in respect to the plane of light shaft positive cross freely, and these lens or capturing element are moved in shake according to hand, carry out the correction of hand shake thus.

Under the situation of the mode of the above-mentioned capturing element in moving above-mentioned optics, do not need as lens, to make light rearward to see through, therefore, as the normal X frame that possesses patent documentation 1 record and the XY frame of Y frame used of the mechanism of follow shot element movably freely.

In the described patent documentation 1, for can be, and be moved frame and move delicately, use the extraordinary voice coil motor of response as drive source with setting about shake with each frame of as far as possible little drive force.And, this characteristic document 1 is for can be synchronous with the action of this voice coil motor, and move delicately and be moved frame, two axis of guides are moved opposed the setting of mode of member respectively with encirclement, and by X frame, the Y frame of voice coil motor along these axis of guides drivings L word shape, thus, can move delicately and be moved frame.

In addition, a kind of technology that above-mentioned patent documentation 2 has been gone back motion, this technology is provided with Hall element in order can be correctly to move to and to shake corresponding position being moved member, and can rapidly the XY frame be driven into correct position according to the detection of the present position of this Hall element.As everyone knows, this Hall element is the element according to the size of magnetic force output electric signal, when this Hall element being installed on the opposed coil that sets of magnet in voice coil motor, concerns corresponding signal by the position of Hall element output and magnet and coil.

But, owing to only a Hall element is installed, can not obtain very accurate accuracy of detection (rectilinearity), so patent documentation 2 disposes Hall element respectively by the boundary end annex at the shift motion of coil, and output poor of getting two Hall elements, improve the accuracy of detection of position thus.Therefore when the technology of application characteristic document 2, the problem that the increase of production part number, cost uprise.

Patent documentation 1:(Japan) spy opens the 2006-215095 communique

Patent documentation 2:(Japan) spy opens the 2004-242325 communique

Summary of the invention

The present invention is in view of developing in view of described situation, and its purpose is, and the XY frame is provided and possesses the filming apparatus of this XY frame, be the position detecting mechanism that a Hall element also can access accurate accuracy of detection (rectilinearity) even this XY frame possesses.

Be used to realize described purpose XY frame of the present invention, it possesses: matrix and with this matrix along being moved frame with respect to what this matrix can relatively move in the XY plane of the orthogonality of center shaft of Z direction break-through, it is characterized in that, comprising:

The X frame, it surrounds half cycle with described central shaft, and be supported on sliding freely on the directions X on the described matrix, simultaneously with the described frame that is moved restricted on the directions X and on the Y direction, slide and support certainly, make this be moved frame by slip and move at directions X along directions X;

The Y frame, it surrounds half cycle with described central shaft, thus with described X frame jointly surround this central shaft full the week, on the Y direction, be supported on described matrix sliding freely, to be moved frame restricted and slide on directions X and support certainly on the Y direction with described simultaneously, makes this be moved frame by the slip along the Y direction and move along the Y direction;

X frame driving mechanism, it drives described X frame to directions X;

Y frame driving mechanism, it drives described Y frame to the Y direction;

Described X frame driving mechanism possesses:

First conjugant, it is become with first yoke piece by first magnet, and the N utmost point and the S utmost point are separately and in X-Z planar extension and opposed with described X frame on directions X for this first magnet, and this first yoke is fixed on the inside this first magnet, when described X frame is seen; With

First coil substrate, it is formed with first coil and is fixed with first Hall element, this first coil be fixed in described X frame, with the position on the described first magnet opposite, and accept the supply of electric current, and the power of this X frame takes place to drive along directions X by the interaction with described first magnet, this first Hall element detects the magnetic force of this first magnet

Regulate the position of the directions X of described first conjugant, so that when described X frame was positioned at the center of shift motion of directions X, described first Hall element arrived the opposed position, border with the described first magnets N utmost point and the S utmost point,

Described Y frame driving mechanism possesses:

Second conjugant, it is become with second yoke piece by second magnet, and the N utmost point and the S utmost point are separately and in Y-Z planar extension and opposed with described Y frame on the Y direction for this second magnet, and this second yoke is fixed on the inside this second magnet, when described Y frame is seen; With

Second coil substrate, it is formed with second coil and is fixed with second Hall element, this second coil be fixed in described Y frame, with the position on the described second magnet opposite, and accept the supply of electric current, and the power of this Y frame takes place to drive along the Y direction by the interaction with described second magnet, this second Hall element detects the magnetic force of this second magnet

Regulate the position of the Y direction of described second conjugant, so that when described Y frame was positioned at the center of shift motion of Y direction, described second Hall element arrived the opposed position, border with the described second magnets N utmost point and the S utmost point.

XY frame according to the invention described above, regulate the position of the directions X of described first conjugant, so that when the described X frame that is fixed with described first Hall element was positioned at the center of shift motion of directions X, first Hall element arrived the opposed position, border with the described first magnets N utmost point and the S utmost point; Regulate the position of the Y direction of described second conjugant, so that when the described Y frame that is fixed with described second Hall element was positioned at the center of shift motion of Y direction, second Hall element arrived the opposed position, border with the described second magnets N utmost point and the S utmost point.

That is, can obtain the position that the position of susceptibility simply and accurately disposes magnet at Hall element, therefore, even, also can access sufficient precision not as two Hall elements being disposed at shown at present the boundary end of shift motion.

At this, preferably, described matrix has: first guide, one side itself and described first conjugant, in joining of extending on the directions X and the guide when becoming this first conjugant to the directions X position adjustments; With second guide, one side itself and described second conjugant, in joining of extending on the directions X and the guide when becoming this second conjugant to Y direction position adjustments, in addition,

This XY frame also possesses the member of lid, this lid member covers described X frame, described Y frame and the described frame that is moved from the Z direction, further, and described first guide of described matrix between clamp described first conjugant, and cooperate with this first guide, work as the guide of this first conjugant when the directions X position adjustments, simultaneously, and described second guide of described matrix between clamp described second conjugant, and cooperate with this second guide, work as the guide of this second conjugant when the Y direction position adjustments.

So, because the operator is as long as move described conjugant along guide, so it is very simple to regulate operation.

In addition, described lid member preferably also has:

First back side guide, the back side itself and described first conjugant, when described X frame is seen joins, and is led in the back side of this first conjugant;

Second back side guide, the back side itself and described second conjugant, when described Y frame is seen joins, and is led in the back side of this second conjugant.

So the operator is easy to move described conjugant along guide, can avoid in the middle of the operator regulates simultaneously, this conjugant breaks away from the situation of guide.

In addition, preferably, described matrix and described first conjugant have first Fixed Division, this first Fixed Division will communicate with each other, and be used for the directions X position adjustments of this first conjugant, simultaneously, be used for this first conjugant fixing after position adjustments to described matrix

Described matrix and described second conjugant have second Fixed Division, and this second Fixed Division will communicate with each other, and are used for the Y direction position adjustments of this second conjugant, simultaneously, are used for this second conjugant fixing described matrix after position adjustments.

So, for example the core shift pin can be inserted the Fixed Division, and just can regulate simply as long as rotate the core shift pin.

In addition, preferably, has first flexible substrate, this first flexible substrate is fixed on described first coil substrate, and the transmission road of the detection signal that forms the stream of the electric current of supplying with to described first coil and obtain by described first Hall element, described first Hall element is loaded on this first flexible substrate, and this first flexible substrate is fixed in this first coil substrate, thus this first Hall element is fixed on this first coil substrate

Has second flexible substrate, this second flexible substrate is fixed on described second coil substrate, and the transmission road of the detection signal that forms the stream of the electric current of supplying with to described second coil and obtain by described second Hall element, described second Hall element is loaded on this second flexible substrate, this second flexible substrate is fixed in this second coil substrate, thus this second Hall element is fixed on this second coil substrate.

So, described first, described second Hall element is loaded on described first, described second the flexible substrate, when this first, second flexible substrate is individually fixed in described first, second coil substrate, can respectively first, second Hall element on first, second flexible substrate be fixed simultaneously.

In addition, first flexible substrate and described second flexible substrate are preferably an incorporate flexible substrate.

So, can reduce part count.

In addition, can be in the described mode that possesses capture lens on the frame that is moved, also can be described be moved possess on the frame be fixed in describedly be moved frame, the mode of the capturing element of the picture signal of the imaging of the body of accepting to be taken and this body that is taken of output performance.

In addition, realize the filming apparatus of described purpose, it is characterized in that possessing:

Described XY frame; The imaging capture lens of body that is taken on described capturing element; And drive division, it drives described XY frame with the shake of correction by the image of the picture signal performance of described capturing element output.

So, when the hand shake takes place, for example pass through the described voice coil motor of the drive division of XY frame, response drives described XY frame goodly, and correctly revises the hand shake.

According to the present invention, be the XY frame that a Hall element also can access high sensitive position detecting mechanism even realized having, and the filming apparatus that possesses this XY frame.

Description of drawings

Fig. 1 is the figure of outward appearance that expression possesses the filming apparatus 1 of XY frame of the present invention;

Fig. 2 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Fig. 3 is the enlarged drawing of the flexible substrate of Fig. 2;

Fig. 4 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Fig. 5 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Fig. 6 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Fig. 7 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Fig. 8 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Fig. 9 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Figure 10 is the figure of formation of the XY110 of expression an embodiment of the present invention;

Figure 11 is arrangement and conjugant YM1, YM2 and Hall element h1, h2 and opposed yoke Y12, the Y22 of expression magnet MAG1, MAG2 and appends the figure of the position relation of yoke Y13, Y28;

The figure of the output of the Hall element when Figure 12 is the explanation adjusting.

Description of drawings

1 filming apparatus

100 lens mirror bodies

110 XY frames

111 matrixes

112 CCD framves

113A X frame

The 1130A first substrate fixed part

1131A first coil substrate

113B Y frame

The 1130B second substrate fixed part

1131B second coil substrate

114 lid members

YM1 first conjugant

MG1 first magnet

Y11 first yoke

YM2 second conjugant

MG2 second magnet

Y21 second yoke

Y12 the 3rd yoke

Y22 the 4th yoke

The Y13 first secondary yoke

The Y23 second secondary yoke

G1 first axis of guide

G2 first bolster

G3 second axis of guide

G4 the 4th axis of guide

G5 second bolster

G6 the 3rd axis of guide

H1 h2 Hall element

Embodiment

Below, with reference to accompanying drawing embodiments of the present invention are described.

Fig. 1 is the figure of outward appearance that expression possesses the filming apparatus 1 of XY frame of the present invention.

The filming apparatus 1 of Fig. 1 has XY frame of the present invention.In the present embodiment illustration keep the example of capturing element by this XY frame, the hand shake when taking drives this XY frame and makes the capturing element action, revises the hand shake thus.

The XY frame that keeps capturing element near the Fixed Division of lens mirror body 100 and camera body 190, is equipped with in the filming apparatus of Fig. 1.Fig. 2～Figure 10 is the figure of formation of the XY frame 110 of expression an embodiment of the present invention.In addition, Fig. 2～Fig. 4 has represented X-axis and Y-axis for the directions X of clear and definite XY frame 110, Y direction, also has the Z axle.The direction of three axles of Fig. 2 and Fig. 4 is identical, and Fig. 3 represents the figure that sees from different directions for the formation that is more readily understood flexible substrate FPC, the direction difference of three axles.Use these axle expression directions in the explanation afterwards.

Fig. 2 represents the exploded view of XY frame 110, and the enlarged drawing of the flexible substrate FPC in Fig. 3 presentation graphs 2, Fig. 4 are illustrated in the lens mirror body 100 of this XY frame 110 of packing on the basis of exploded view of Fig. 2.In addition, Fig. 4 illustrates zoom motor ZM and focus motor FM, also has the parts when these motor unit are installed to lens mirror body 100 and is used for main FPC118 that the control part in the filming apparatus 1 with Fig. 1 is connected, and prevents dust lane 117 etc.In addition, therefore the capturing element use CCD solid-state image pickup element 112A as present embodiment in the explanation afterwards, is recited as CCD112A with capturing element.

The figure of the state after Fig. 5 represents to make the XY frame 110 of having covered member 114 assembling transparent and that see along the Z direction from lid member 114 sides and be assembled with this XY frame 110 lens mirror body 100.Fig. 6～Figure 10 represents respectively: the sectional view of the sectional view of the section after blocking along the line shown in the symbol P among Fig. 5, the section after blocking along the line shown in the symbol Q among Fig. 5, right part of flg, the Y sectional view of the section after blocking along the line shown in the symbol R of Fig. 5 and the ground plan of Fig. 5.

At first, with reference to Fig. 2 each member that constitutes XY frame 110 is described.

As shown in Figure 2, XY frame 110 is except that matrix 111, also have a plurality of members, on this matrix 111, be incorporated with CCD support 112 in this majority member and each member of X frame 113A, Y frame 113B etc., become the XY frame, when the XY frame 110 after the assembling packs lens mirror body 100 into shown in Figure 4, just become Fig. 5～formation shown in Figure 10.

At first, with reference to Fig. 2 the formation of XY frame 110 is described.

It is CCD support 112 that the central authorities of Fig. 2 represent to be moved frame.Be the formation of the flexible substrate 115 shown in below solder is connected with on the CCD112A in this CCD support 112, this flexible substrate 115 is fixed on the CCD support 112 by being pushed to the CCD112A side by CCD sheet 116.In addition, have the cave of bonding usefulness on the above-mentioned flexible substrate 115, bonding agent flows in this cave, and sandwiches flexible substrate 115, like this CCD sheet 116 is adhesively fixed in CCD112A.In addition, be provided with deflection division 115A at the flexible substrate 115 that extracts from CCD112A, this deflection division 115A is provided with otch SL.Therefore, behind this flexible substrate 115 of packing into, be absorbed in the stress that is applied to the directions X on the flexible substrate 115 when CCD112A slides, be absorbed in the stress that is applied to the Y direction on the flexible substrate 115 when CCD112A slides by otch SL by this deflection division 115A.

That is, in the present embodiment,, make and all slide CCD112A, the CCD support 112 that keeps this CCD112A, the flexible substrate 115 that is being connected with the CCD112A solder and CCD sheet 116 according to X frame 113A and Y frame 113B slip separately.

On the other hand, the central table of Fig. 2 is shown with X frame 113A and the Y frame 113B that is used to make its CCD support that is moved frame 112 grades to move to directions X and Y direction respectively.With regard to the X frame 113A of Fig. 2, central shaft is surrounded half cycle, be supported on the matrix 111 in the mode of sliding freely at directions X, simultaneously with CCD support 112 supporting in mode restricted on the directions X and that on the Y direction, slide freely, by slip CCD support 112 is moved along directions X along directions X.With regard to the Y frame 113B of Fig. 2, central shaft is surrounded half cycle, to be supported on the matrix 111 in the mode of sliding freely on the Y direction, simultaneously CCD support 112 is supported in mode restricted on the Y direction and that slide freely on directions X, by slip, CCD support 112 is moved along the Y direction along the Y direction.Relevant these frames 113A, the 113B state behind the matrix 111 of packing into is described in detail during in the back with reference to Fig. 5.In addition, when these X frame 113A and Y frame 113B are slided, the voice coil motor that uses existing embodiment also to put down in writing.

As everyone knows, this voice coil motor is become by magnet, coil, yoke piece.In the present embodiment, on X frame 113A and Y frame 113A, have the first substrate fixed part 1130A, the second substrate fixed part 1130B respectively, and on these substrate fixed

parts

1130A, 1130B, fix the first coil substrate 1131A and the second coil substrate 1131B of promising voice coil motor rotor respectively, and, magnet MG1, MG2 by will being used to drive these

coil substrates

1131A, 1131B and yoke Y11～Y13, Y21～Y23 and frame 113A and the frame 113B matrix 111 of packing into separately is assembled into voice coil motor thus.That is, present embodiment constitutes X frame driving mechanism and Y frame driving mechanism by voice coil motor.

The left side of Fig. 2, the outside of outside wall portions that is illustrated respectively in matrix 111 is to constitute magnet MG1, MG2 and three kinds of yoke Y11～Y13, Y21～Y23 of above-mentioned X frame driving mechanism, above-mentioned Y frame driving mechanism respectively with X frame 113A and the Y frame 113B corresponding mode of coil substrate 1131A, 1131B separately.In addition, corresponding with the first coil substrate 1131A that is located at X frame 113A and Y frame 113B respectively and the second coil substrate 1131B, be respectively equipped with three kinds of yoke Y11～Y13, Y21～Y23, therefore, later on the yoke with the symbol Y11 of X frame drive mechanism side is recited as first yoke, the yoke of the symbol Y21 of Y frame driving side is recited as second yoke, the yoke of the symbol Y12 of X frame drive mechanism side is recited as the 3rd yoke (owing to set with first magnet is opposed, so also be called opposed yoke later on sometimes), the yoke of the symbol Y22 of Y frame drive mechanism side is recited as the 4th yoke (owing to set with second magnet is opposed, so also be called opposed yoke later on sometimes), the yoke of the symbol Y13 of X frame drive mechanism side is recited as the first secondary yoke, the yoke of the symbol Y23 of Y frame drive mechanism side is recited as the second secondary yoke.In addition, the first yoke Y11 is adhesively fixed in the first magnet MG1, and the second yoke Y21 is adhesively fixed in the second magnet MG2, therefore, comprises these and is recited as the first conjugant YM1, the second conjugant YM2 sometimes.

Promptly, in the present embodiment, X frame driving mechanism possesses: the first conjugant YM1, and it is by constituting in the X-Z planar extension and with opposed first magnet MG1 of X frame 113A and the first yoke Y11 in the inboard when X frame 113A sees that is fixed in this first magnet MG1; The first coil substrate 1131A, it is formed with first coil, this first coil stationary is accepted the supply of electric current in X frame 113A and the position first magnet MG1 opposite, by with the interaction of the first magnet MG1, the power of this X frame 113A takes place to drive to X side.Y frame driving mechanism possesses: the second conjugant YM2, and it is by constituting in the Y-Z planar extension and with opposed second magnet MG2 of Y frame and the second yoke Y21 in the inboard when Y frame 113B sees that is fixed in this second magnet MG2; The second coil substrate 1131B, it is formed with second coil, and this second coil stationary is accepted the supply of electric current in Y frame 113B and the position second magnet MG2 opposite, by with the interaction of the second magnet MG2, the power of this Y frame 113B takes place to drive to the Y direction.

This first yoke Y11 be width at directions X than the wideer member of the first magnet MG1.X frame driving mechanism possesses the first secondary yoke Y13, this first secondary yoke Y13 be fixed in the first yoke Y11 the inside when the first magnet MG1 sees, with the opposed position of this first magnet MG1, and its width is narrower than this first yoke Y11 at directions X.The second yoke Y21 be width at directions X than the wideer member of the second magnet MG2.Y frame driving mechanism possesses the second secondary yoke Y23, this second secondary yoke Y23 be fixed in the second yoke Y21 the inside when the second magnet MG2 sees, with the opposed position of this second magnet MG2, and its width is narrower than this second yoke Y21 at directions X.

Though do not illustrate, in the expression respectively of Fig. 2 the outside wall portions of matrix 111 at X frame driving mechanism and Y frame driving mechanism position is arranged, according to being respectively equipped with the recess that holds above-mentioned magnet MG1, MG2 and three kinds of yoke Y11～Y13, Y21～Y23～Y13 with X frame 113A and the corresponding mode of Y frame 113B.In these recesses, set opposed yoke Y12, Y22 at first respectively, and terminated in the internal face of recess by spiral shell.Then, the first conjugant YM1 that is made of magnet MG1, MG2 and the first yoke Y11, Y22 and the second conjugant YM2 spiral shell respectively terminate in the outside wall surface of matrix 111, and, compare with first, second yoke the length of directions X, Y direction shorter first, second secondary yoke Y13, Y23 be fixed in respectively these conjugants first, second yoke Y12, Y22 the inside of seeing from the magnet side with the opposed position of this magnet.In above-mentioned first, the above-mentioned second conjugant YM1, YM2 and the slit that between opposed yoke Y13, Y23, forms with the opposed position of face of these conjugants, coil substrate 1131A, the 1131B of substrate fixed part 1130A, 1130B that is fixed in X frame 113A, Y frame 113B to be to be set around the mode of going into matrix 111 outer walls, in the matrix 111 of thus X frame 113A and Y frame 113B being packed into.

Therefore, when

coil substrate

1131A, 1131B switch on,, just make

coil substrate

1131A, 1131B slide along magnet MG1, MG2 parallel (directions X, Y direction) by Fu Laiming (Fleming) lefft-hand rule.Consequently, according to moving of coil substrate 1131A, the 1131B of the substrate fixed part 1130A, the 1130B that are fixed in each

frame

113A, 113B, being moved frame is that CCD support 112 and the CCD112A that remains in CCD support 112 just move.

Like this, X frame 113A, Y frame 113B and CCD support 112 are packed in the matrix 111, move rapidly according to the coil electricity on coil substrate 1131A, the 1131B so that can make it.

At this, be the simple explanation of carrying out of matrix 111 of how packing into to inserting axis of guide G1, G3, G4, G6 and bolster G2, G5 logical or that be fixed in X frame 113A and Y frame 113B.

At first, with reference to Fig. 2 how two axis of guide G1, G3 and bolster G2 who extends is equipped on the simple explanation of carrying out that the matrix rear flank is loaded into matrix 111 on directions X.

At first, possess two bearings (aftermentioned) on X frame 113A, first axis of guide G1 that is fixedly attached to the matrix 111 that directions X extends inserts logical these two bearings, and the two ends of this first axis of guide G1 embed the bearing that matrix 111 possesses and are fixedly attached to matrix 111.In addition, outstanding to directions X, and be fixedly attached to X frame 113A to the end of the first bolster G2 that is supported on matrix 111 sliding freely of directions X.With regard to first axis of guide G1, its two ends embed the bearing of the U groove shape of matrix 111 respectively, and, push by the press section (aftermentioned) of tegmentum member, be fixedly attached to matrix 111.

In addition, the two ends of second axis of guide G3 that extends at directions X are fixedly attached to Y frame 113B, link sliding freely at directions X with this second axis of guide G3 by two bearings (aftermentioned) of being located at CCD support 112, thereby CCD support 112 and Y frame 113B are linked.As mentioned above, this second axis of guide G3 play with to be moved frame be CCD support 112 the Y direction limit and auxiliary its only in the effect of moving of directions X.

On the other hand, the 3rd axis of guide G6 of upwardly extending three axles in Y side, X frame 113A is fixed at its two ends, links sliding freely on the Y direction by another bearing (aftermentioned) and the 3rd axis of guide G6 that is located at CCD support 112, thereby CCD support 112 and X frame 113A are linked.Upwardly extending the 3rd axis of guide G6 is owing to be fixedly attached to X frame 113A in this Y side, thus play directions X restriction CCD support 112 and auxiliary its only in the effect of moving of Y direction.

In addition, the 4th axis of guide G4 inserts two bearings that logical Y frame 113B possesses, and the bearing of the U groove shape of matrix 111 is inserted at its two ends, pushes by the press section (aftermentioned) of tegmentum member 114, is fixedly attached to matrix 111 thus.In addition, the second bolster G5 is fixed in Y frame 113B.

Like this, to be used to make each

frame

113A, 113B and be moved frame is slide freely axis of guide G1, G4 and bolster G2, the G5 matrix 111 of packing into of CCD support 112, to limit axis of guide G3, the G6 that a direction of CCD support 112 moves simultaneously and be fixedly attached to Y frame 113B and X frame 113A respectively, just each

frame

113A, 113B and CCD support will be respectively charged into matrix 111.State after relevant packing into is described in detail when reference Fig. 5.

In addition, must be used to make the distribution of the coil electricity on the coil substrate on coil substrate 1131A, the 1131B that each frame possesses, therefore, Fig. 2 illustrates the flexible substrate FPC that is used for this purpose.As shown in Figure 3, this flexible substrate FPC has the first fixed part FPC1 that is fixed in the first coil substrate 1131A, and form the stream of the electric current of supplying with to first coil, also have the second fixed part FPC2 that is fixed in the second coil substrate 1131B, and form the stream of the electric current of supplying with to second coil.Present embodiment can connect two

coil substrate

1131A, 1131B by a flexible substrate FPC, but also can be respectively two.

On a flexible substrate FPC shown in Figure 3, be provided with: the first deflection division FPC3, it is to the deflection of Z direction, and the face under the deflection situation is opposed on directions X each other; The second deflection division FPC4, it is to the deflection of Z direction, and opposed on the Y direction each other at the face under the deflection situation.In addition, owing on this flexible substrate FPC, be mounted with the first Hall element h1, the second Hall element h2, so also form transmission by these Hall element h1, the transmission path of the resulting detection signal of h2, this first Hall element h1, the second Hall element h2 detect the directions X of X frame, Y frame, the position of Y direction by the magnetic force that the part that is fixed in first,

second coil substrate

1131A, 1131B is detected first, second magnet MG1, MG2.

When directions X moves, absorb the stress that is applied on the flexible substrate FPC at X frame 113A, when the Y direction moves, absorb the stress that is applied to the Y direction on the flexible substrate FPC by the above-mentioned second deflection division FPC4 in the Y frame by the above-mentioned first deflection division FPC3.

If the distribution of this flexible substrate FPC finishes, the member 114 that just closes the lid at last, so that it covers X frame 113A, Y113B, CCD support 112 from the Z direction, thereby assembling finishes.

At this, on matrix 111, pack into each

frame

113A, 113B and be assembled into XY frame 110, in addition, the state that relevant this XY frame 110 is packed into behind the lens mirror body 100 describes with reference to Fig. 5.

As mentioned above, Fig. 5 represents to make that to cover member 114 transparent, from the upper right side of Fig. 2, Fig. 4 to, the i.e. XY frame of seeing along the Z direction 110 figure of the state behind the lens mirror body 100 that packs into.

As illustrated in fig. 2, first～the 4th the axis of guide and first, second bolster G1～G6 are encased in matrix 111 with each

frame

113A, 113B, and each rack support is in matrix 111, therefore at first the structure of the axle sleeve that comprises the axis of guide and bolster described.

As shown in Figure 5, on X frame 113A and Y frame 113B, possess two bearing A1, A2, A3, the A4 that inserts logical first axis of guide G1, the 4th axis of guide G4 separately respectively.

In addition, on matrix shown in Figure 5 111, possess: two first support BE1, BE2 of U groove shape, the two ends of this first axis of guide of its fixed bearing G1 and towards above-mentioned lid member 114 openings; Two second support BE3, BE4 of U groove shape, the two ends of above-mentioned the 4th axis of guide G4 of its fixed bearing and towards above-mentioned lid member 114 openings; The 3rd support BE5 of U groove shape, it supports the above-mentioned first bolster G2 and sliding freely towards above-mentioned lid member 114 openings on directions X; The 4th support BE6 of U groove shape, it supports the above-mentioned second bolster G5 and sliding freely towards above-mentioned lid member 114 openings on the Y direction.Because the above-mentioned first support BE1, BE2 are identical with the structure of the second support BE3, BE4, so Fig. 5 represents the enlarged drawing of structure of the support BE4 of the side among the second support BE3, the BE4, because the 3rd above-mentioned support BE5 is identical with the structure of the 4th support BE6, so Fig. 5 also represents the enlarged drawing of the structure of the 3rd support BE5.In addition, Fig. 5 also represents enlarged drawing, and the enlarged drawing of the structure of another bearing B3 that is supported on first axis of guide G1 of expression CCD support 112 of structure of two bearing B1, the B2 being supported on second axis of guide G3 of CCD support 112.

Promptly, in two bearing A1, the A2 of X frame 113A, insert logical first axis of guide G1, the two ends of this first axis of guide G1 are embedded the first support BE1, BE2, first axis of guide G1 and X frame 113A are supported on matrix 111, the 4th axis of guide G4 inserts axis and holds A3, A4 on Y frame 113B, and the two ends of the 4th axis of guide G4 embed the second support BE3, BE4, and the 4th axis of guide G4 and Y frame 113B are supported on matrix 111.

In the present embodiment, from the face side of Fig. 5 member 114 that closes the lid, therefore on lid member 114, have at last: two first press section 114A, its push above-mentioned first axis of guide G1, be supported on the each several part of above-mentioned two first support BE1, BE2 respectively; Two second press section 114A, its push above-mentioned the 4th axis of guide G1, be supported on the each several part of above-mentioned two second support BE3, BE4 respectively; First patch, its stop up above-mentioned the 3rd support BE5, towards the opening of this lid member 114 and with the common first support holes 114B that forms the above-mentioned first bolster G2 break-through of the 3rd support BE5; Second patch, its stop up above-mentioned the 4th support BE6, towards the opening of this lid member 114, and with the common second support holes 114B that forms the above-mentioned second bolster G5 break-through of the 4th support BE6, therefore by being located at the bearing of this lid member 114 and above-mentioned matrix 111, can support X frame 113A, Y frame 113B aptly.

In addition, also possess on the member 114 at lid be fixed in this lid member 114, as the spring member SP1 that CCD support 112 is worked to the force application component of the Z direction application of force.Shown in the enlarged drawing of Fig. 5, two bearing B1, B2 CCD support 112, that be supported on above-mentioned second axis of guide G3 are respectively equipped with the reach through hole that has the rectangle of angle and above-mentioned second axis of guide break-through on Z direction and Y direction.So, the point at two positions by two limits in four limits of rectangle is pushed circular guide rod G2, is supported to such an extent that absorb rocking and alleviating friction force of Y direction.

In addition, be provided with spring SP 2, this spring SP 2 is as being used to make CCD support 112 to work with respect to the force application component of X frame to the directions X bias, and by this spring SP 2, CCD support 112 is to the directions X bias.So, the X frame becomes constantly to side's direction by the state of the application of force, so the rocking of its directions X when being absorbed in the CCD support 112 that is moved frame and moving.

Like this,, support CCD support 112 well, with rocking in the slip that suppresses CCD support 112 by connecting the bearing of spring SP 1 and X frame 113A and Y frame 113B and matrix 111, X frame 113A and Y frame 113B and CCD support.

In addition, though be illustrated in Fig. 2, the formation for after more clearly assembling about X frame driving mechanism and Y frame driving mechanism, refers again to Fig. 5 this formation is described.

As implied above, on X frame driving mechanism shown in Figure 5, possess: the first conjugant YM1, it is by constituting in the X-Z planar extension and with the opposed first magnet MG1 of X frame 113A and the first yoke Y11 that is fixed in the inboard when X frame 113A sees of this first magnet MG1; The first coil substrate 1131A, its be formed be fixed in X frame 113A, with the position on the above-mentioned first magnet MG1 opposite, and accept the supply of electric current and by first coil of the power of this X frame 113A taking place to drive to directions X with the interaction of the first magnet MG1.In addition, Y frame driving mechanism possesses: the second conjugant YM2, and it is by constituting in the Y-Z planar extension and with the opposed second magnet MG2 of Y frame and the second yoke Y21 that is fixed in the inboard when above-mentioned Y frame 113B sees of this second magnet MG2; The second coil substrate 1131B, it is formed with and is fixed in position Y frame 113B, the second magnet MG2 opposite, and accepts the supply of electric current and by with the interaction of the second magnet MG2 second coil of the power of this Y frame 113B taking place to drive to the Y direction.

The first yoke Y11 is width wideer member of the ratio first magnet MG1 on directions X.X frame driving mechanism possesses the first secondary yoke Y13, this first secondary yoke Y13 be fixed in the inside first yoke Y11, when the first magnet MG1 sees, with the opposed position of this first magnet MG1, width is narrower than this first yoke Y11 on directions X.The second yoke Y21 is width wideer member of the ratio second magnet MG2 on directions X.Y frame driving mechanism possesses the second secondary yoke Y23, this second secondary yoke Y23 be fixed in the inside second yoke Y21, when the second magnet MG2 sees, with the opposed position of this second magnet MG2, width is narrower than this second yoke Y21 on directions X.

Like this, be fixed in the first coil substrate 1131A and the second coil substrate 1131B of the first substrate fixed part 1130A and the second substrate fixed part 1130B, be provided in aptly the first magnet MG1 and and the opposed second yoke Y12 of this first magnet MG1, the second magnet MG2 and and opposed the 4th yoke Y22 of this second magnet MG2 between, voice coil motor and each frame of being used to drive each frame are loaded into matrix.

Present embodiment in the mode of clamping magnet MG1, MG2 with the first yoke Y11 and the 3rd yoke Y12, the second yoke Y21 with the 4th yoke Y22 is opposed sets, on this basis, to increase by the first secondary yoke Y13, the second secondary yoke Y23 in the side of the first yoke Y11, the second yoke Y21 with the opposed mode of magnet MG1, thus, the leakage of the magnetic flux in the time of can be with drive coil is suppressed to irreducible minimum, thereby can apply magnetic force efficiently with respect to coil substrate 1130A.

Like this, with the axis of guide and bolster, also have X driving mechanism, the Y driving mechanism matrix of packing into, thereby be assembled into the XY frame.

At this,, the formation of the XY frame 110 behind the lens mirror body 100 of packing into is carried out simple declaration with reference to the figure of Fig. 6～Figure 10.

Fig. 6 is the sectional view of the section after expression is blocked along the line shown in the symbol P among Fig. 5; Fig. 7 is the X sectional view of the section after expression is blocked along the line shown in the symbol Q among Fig. 5; Fig. 8 is the right part of flg of Fig. 5; Fig. 9 is the Y sectional view of the section after expression is blocked along the line shown in the symbol R among Fig. 5; Figure 10 is the ground plan of Fig. 5.

With reference to the figure of Fig. 6～Figure 10, the position relation of each member of constituting XY frame 110 is carried out simple declaration.

As Fig. 6, shown in Figure 9, the XY frame 110 of packing at the rear of lens mirror body 100, last, by being located at the spring SP 1 on the lid member 114 that covers, with CCD sheet 116 and CCD support 100 to the lens mirror body 100 side application of forces, the lens mirror body thereby each member that will constitute XY frame 110 is packed into.

As shown in Figure 6, on CCD support 110, CCD110A is housed, and on this CCD112A, is connected with flexible substrate 115.When under the state that is stripping out this flexible substrate 115 with it when pull out the outside, may have when CCD110A is mobile with CCD support 110, flexible substrate 115 distortion and cause damage, therefore, clamp flexible substrate 115 by CCD sheet 116, and the spring SP 1 by lid member 114 is pushed this CCD sheet 116 to CCD support 112 sides, thereby the posture of proofreading and correct flexible substrate.

In addition, as illustrated at Fig. 2, on flexible substrate 115, be provided with the deflection division 115A of コ word shape on the directions X, the deflection division of this コ word shape is loaded in the space that is made of lid member 114 and matrix 111 dexterously, as mentioned above, be provided with the part of this deflection division, on the Y direction, be provided with otch, therefore when CCD support 110 slides, even apply the stress of directions X, Y direction on flexible substrate 115, these stress also can obtain relaxing by this deflection division 115A and otch SL (with reference to Fig. 2).In addition, do not need for guaranteeing that the distribution space specially increases the size of matrix side, thereby can realize the miniaturization of XY frame.

In addition, Fig. 7 represents as by shown in Fig. 2 explanation, opposed yoke (the 4th yoke) Y22 is by the inwall of screw retention in the recess of matrix 111 outer walls, and the second conjugant YM2 that is bonded with the magnet MG2 and the second yoke Y21 thereafter is fixed in the state after the outside wall surface of matrix 111.

On Y frame 113B, has the second substrate fixed part 1130B, this second substrate fixed part 1130B is around the outer exterior wall of going into matrix 111 and in Z direction and the expansion of Y direction, and be fixed in the first coil substrate 1131A, the size of its Z direction is shorter than the size of the Z direction of matrix 111.

In addition, on Y frame driving mechanism, have the 4th yoke Y22, the 4th yoke Y22 be disposed between the outer wall of matrix 111 and the second coil substrate 1131B, avoid the position that interferes with the second substrate fixed part 1130B on the Z direction.

Coil substrate 1131B is to insert the gap between this magnet MG2 and above-mentioned opposed yoke (the 4th yoke) Y22 around the mode of the outer wall of going into matrix 111.In addition, the second yoke Y21 is adhered to the inside of magnet MAG2, forms the matrix of packing into after the conjugant YM2.

Though do not illustrate, the structure of X frame 113A side is also the same with Fig. 7.

When the Y frame 113B of the coil substrate 1131B that is linked to Fig. 7 with coil substrate 1131B towards towards paper from table inwards or from the lining when table is mobile, Y frame 113B slides to the Y direction simultaneously.

Like this, in the present embodiment, the voice coil motor that constitutes the voice coil motor of X frame driving mechanism and constitute Y frame driving mechanism is installed in the very narrow space to high-density, and compares at present, by XY frame that small-sized driving mechanism is packed into, realize the miniaturization of XY frame thus.

At this, in the present embodiment, in order to detect the position that coil substrate is each

frame

1131A, 1131B accurately by Hall element h1, the h2 that is equipped on flexible substrate FPC, the formation of (obtaining rectilinearity) can be simply regulated in employing to the output of Hall element h1, h2, so its structure is described.

The right hand view of Fig. 8 presentation graphs 5.Possess the Y frame driving mechanism that drives Y frame 113B on the right side of Fig. 5, therefore, what Fig. 8 represented the first yoke Y21 that this Y frame driving mechanism possesses and was pasted on its inside appends yoke Y23.As implied above, this first yoke Y21 is adhesively fixed in the magnet MG2 of inside.Because X frame drive mechanism side also is identical formation, so only structure one side of the Y frame drive mechanism side of Fig. 8 is described.

This Fig. 8 represents the narrow space that the second deflection division FPC4 of flexible substrate FPC is packed into aptly to be formed by matrix 111 and lens mirror body 100.

Y frame driving mechanism as implied above, that the coil substrate that is used for being energized by this flexible substrate FPC moves in magnetic field is loaded into matrix 111.Fig. 8 represents the second yoke Y21 and the second secondary yoke Y23 that this Y frame driving mechanism possesses.As mentioned above, on this second yoke Y21, be adhesively fixed with magnet MG2 (with reference to Fig. 5), thereby constitute the second conjugant YM2.

On matrix shown in Figure 8 111, possess guide part 111G, one side this guide part 111G and the second conjugant YM2, in being connected that the Y direction is extended, and become the guiding of this second conjugant when Y direction position adjustments.In addition, possess countervane 114C on the member 114 at lid, this countervane 114C and matrix 111 guide part 111G between clamp the second conjugant YM2, and cooperate with this guide part 111G, YM2 play the guiding role when the Y direction is carried out position adjustments at this second conjugant.This lid member 114 also possesses first back side guide part 114D, and the back side when the Y frame is seen of this first back side guide part 114D and second conjugant is connected, and guides the back side of second conjugant.

At this, front and back mark with the aid of pictures describes the formation of carrying out this sensitivity adjusting part.

Figure 11 is the figure of formation and the relation of the position between conjugant YM1, YM2 and Hall element h1, h2 and first, the 3rd, second, the 4th yoke Y11, Y12, Y21, Y22 and first, second secondary yoke Y13, the Y23 of expression magnet MG1, MG2.

Coil substrate

1131A, 1131B and the position relation of each yoke Y11～Y23, Y21～Y23 and the position of Hall element h1, h2 that Figure 11 (a) expression has illustrated by Fig. 7.The position relation of Figure 11 (b) expression first yoke Y11 or the second yoke Y21 and the 3rd yoke Y12 or the 4th yoke Y22 and the first coil substrate 1131A or the second coil substrate 1131B.In addition, the arrangement of Figure 10 (c), Figure 10 (d) expression magnet MG1 or MG2.

In addition, Figure 12 be explanation make conjugant along guide part 111G shown in Figure 8 etc. the figure of the variation of the output of the Hall element h1 of (direction of arrow among the figure) or h2 when mobile.

On the first conjugant YM1 or the second conjugant YM2, be provided with the long cave HL1 that is communicated with, constitutes the Fixed Division with the screw hole of matrix side.In this long cave HL1, insert the core shift pin, and conjugant YM or YM2 are moved at directions X or Y direction along guide part 111G (with reference to Fig. 8), carry out position adjustments thus.In addition, carrying out after the position adjustments, getting, screw is inserted the Fixed Division and also just first, second conjugant is being fixed on the matrix except that the core shift pin.

In addition, shown in Figure 11 (a), have on X frame driving mechanism or Y frame driving mechanism: the first secondary yoke Y13 or the second secondary yoke Y23, its width compare the first yoke Y11 on directions X or Y direction, Y21 is narrower for this second yoke.The first yoke Y11 or the second yoke Y21 are that its width is compared wideer member with the first magnet MG1 or the second magnet MG2 on directions X or Y direction.The first conjugant YM1 or the second conjugant YM2 be fixed in the inside first yoke Y11 or the second yoke Y21, when the first magnet MG1 or magnet MG2 see, with this first magnet MG1 or the opposed position of this second magnet MG2.The position of the variation range that these secondary yoke Y13, Y23 are arranged on the utmost point that can contain magnet MG1, MG2 (with reference to Figure 11 (c)).At this, when thickening first yoke and second yoke, cause yoke to maximize, so by attenuation, and first secondary yoke 13, the second secondary yoke 13 only is set at essential position, can carries out thus to the packing into of narrow space, simultaneously, can reduce the leakage of the magnetic flux in the magnetism loop that forms by magnet MG1, MG2 and yoke Y11～Y13, Y21～Y23 by these secondary yokes, thereby more efficiently coil be applied magnetic force.

In addition, shown in Figure 11 (c), (d), on the magnet of the voice coil motor of present embodiment, alternately be disposed with the two poles of the earth (S, N) magnet, when each frame is positioned at the scope center of stroke of each frame, regulate the position of each conjugant so that Hall element h1, h2 near with the opposed position, border of the N utmost point and the S utmost point of this dipolar (side who represents with the symbol B1 among the figure).In addition, with regard to

coil substrate

1131A, 1131B, Hall element h1, h2 with the border (B1) of magnet be the center and only with the extremely opposed scope of N of the S utmost point of upside and downside in move.

Figure 12 is illustrated in the variation of the output of the Hall element when moving conjugant when regulating.

For example, electricity monitors the output of Hall element, and conjugant YM1, YM2 are moved to either party's direction, detect the maximum output of Hall element, when detecting maximum output, this just makes conjugant YM1, YM2 move round about, thereby detects the minimum output of Hall element.Under the situation of the output that draws both sides, when conjugant being moved to this output valve divided by the position of 2 backs and the value that obtains, regulate, so that Hall element h1, h2 just in time are positioned at the opposed position, border (side's who represents with the symbol B1 of Figure 11 border) of the N utmost point and the S utmost point of magnet MG1, MG2.

When carrying out such adjusting, even in fact coil substrate moves range, the output of Hall element is also unsaturated, and linear (rectilinearity) obtains the output of Hall element according to the variation of position, and therefore very the accuracy of detection of position is improved on the highland.

Like this, keeping voice coil motor under the state of driving force up to now can be installed on to high-density with the narrow space of comparing up to now in.

At this, the words reposition describes the formation of XY frame with reference to Fig. 9, Figure 10.

Fig. 9 represent to see along the line shown in the symbol R among Fig. 5 block block after the Y sectional view of face.The ground plan of Figure 10 presentation graphs 5.

Fig. 9 is the figure identical with Fig. 6, but represents to have the configuration of zoom motor ZM among Fig. 9 owing to the direction of seeing with Fig. 6.In addition, Figure 10 is the figure identical with Fig. 8, promptly represents the formation of X frame driving mechanism.Identical with Fig. 8, the first deflection division FPC3 of flexible substrate FPC can be installed in the narrow space aptly as can be known.

Like this, with the XY frame 110 lens mirror body 100 of packing into, thus the filming apparatus 1 of pie graph 1.

But, at present, need respectively four axis of guides to be aimed at adjusting, so there is the problem of assembling difficulty.So as mentioned above, present embodiment does not need to aim at adjusting thus by amounting to three-point support X frame, Y frame, CCD support, thereby realize the simplification of assembling.

Referring again to Fig. 5, is describing of how being easy to assemble to the XY frame of present embodiment.

In addition, as shown in Figure 5, be equipped with X frame 113A, Y frame 113B according to the mode of surrounding central shaft.These

frames

113A, 113B are supported on the matrix by each axis of guide is embedded the groove of being located at the U word shape on the matrix.Reach the precision of the squareness and the depth of parallelism in the processing of matrix easily, therefore the U groove that will have the squareness and the depth of parallelism in advance is located at matrix, again each axis of guide and bolster are embedded in the groove of this U word shape, can be easy to obtain squareness, the depth of parallelism of each thus.So, respectively each is regulated shown in present example with regard to not needing.

Like this, in these grooves, embed the both ends that the mode that two bearing A1, A2 possessing with break-through X frame are arranged is inserted the first logical axis of guide G1, and also embedding has with respect to first axis of guide G1 to the first outstanding bolster G2 of directions X.Like this, when the X frame 113A that names a person for a particular job by three of bearing A1, A2 and bolster G2 was supported on the matrix 111, X frame 113A was supported on the matrix with high flatness.

In addition, with regard to Y frame 113B, the same both ends that embed slotting the 4th axis of guide G4 that leads to of mode quilt that two bearing A3, A4 possessing with break-through Y frame are arranged, and, also embed with respect to the 4th axis of guide G4 to the second outstanding bolster G5 of Y direction.Like this, when the Y rack support of naming a person for a particular job by three of two bearing A3, A4 and bolster G5 during in matrix, Y frame 113B is supported on matrix 111 with high flatness.

Like this, if keep the plane of X frame 113A and Y frame 113B accurately, then being moved frame by these rack supports, thus, is also can access high flatness on the CCD support being moved frame.

In addition, in the example of Fig. 5, on Y frame 113B, possesses second axis of guide G3, this second axis of guide G3 extends along directions X, and be fixedly attached to Y frame 113B, therefore, be moved frame be provided with on the CCD support 112 on the Y direction restricted and on directions X, be supported on two bearing B1 of above-mentioned second axis of guide G3 sliding freely, B2, be provided with the bearing B3 that on directions X and Y direction both sides all are supported on first axis of guide G1 without restriction simultaneously, be moved frame by being supported on two bearing B1 of second axis of guide G3, the three-point support altogether of a B2 and a bearing B3 who is supported on first axis of guide G1 is stipulated its posture with respect to matrix 111 thus.As shown in FIG., on bearing B1, B2, constitute the bearing that Z direction and Y direction have the angle, on bearing B3, be provided with the bearing of U word shape.In addition, the CCD support etc. that will contain the CCD sheet by the spring SP 1 that is provided with by lid member 114 is to the inboard application of force of paper, so both sides' bearing all plays the posture that regulation is moved the Z direction of member.Therefore, can obtain higher plane.

Like this, any opposed 3 points of CCD support when by 2 points of clamping the Y frame side that obtains high flatness and the X frame side that obtains identical high flatness during supporting CCD support, can access high-precision flatness on the CCD support.

In addition, pass through said structure, even on X frame, Y frame and CCD support, obtain the flatness of same degree with respect to matrix, but when rocking of bearing portion strengthened, be moved frame and be CCD support or X frame, the Y frame is also shaking in either direction is slided, that might cause X frame and Y frame mobilely latens slowly, and the action of CCD support simultaneously latens slow.

So, as mentioned above, present embodiment is studied, consequently can absorb X frame, Y frame rocking in slip; Utilize and cover member 114 and to be located at the spring SP 1 covered on the member 114 and the shape of bearing, can reduce to be moved frame as much as possible is rocking in slip such as CCD support.

As mentioned above, on matrix, be provided with: two first support BE1, BE2 of U groove shape, the two ends of its fixed bearing first axis of guide G1 and towards lid member 114 openings; Two second support BE3, BE4 of U groove shape, the two ends of its fixed bearing the 4th axis of guide G4 and towards lid member 114 openings; The 3rd support BE5 of U groove shape, it supports the first bolster G2 and sliding freely towards lid member 114 openings on directions X; The 4th support BE6 of U groove shape, it supports the second bolster G5 and sliding freely towards lid member 114 openings on the Y direction.

In addition, corresponding with these, be provided with on the member 114 at lid: two first press sections, its push first axis of guide G1, be supported on the each several part of two first support BE1, BE2 respectively; Two second press sections, its push the 4th axis of guide G4, be supported on the each several part of two second support BE3, BE4 respectively; First patch, its stop up the 3rd support BE5, towards the opening of this lid member 114 and with the common first support holes 114B that forms the above-mentioned first bolster G2 break-through of the 3rd support BE5; Second patch, its stop up the 4th support BE6, towards the opening of this lid member 114 and with the common second support holes 114B that forms the second bolster G5 break-through of the 4th support BE6.

Paper table side to Fig. 5 is that the Z direction covers X frame 113A, Y frame 113B and is moved frame 112, loads onto and covers member 114, and lid member 114 and matrix 111 cooperations constitute bearing.

Fig. 5 is in order to represent above-mentioned formation, and the structure of extracting each support BE1～BE6 is represented.

First press section is identical with the structure of second press section, so Fig. 5 only represents a side the 4th axis of guide G4, among two the second support BE1, the BE2.Shown in the enlarged drawing of Fig. 5, axis of guide G4 embeds the position of U groove, by press section 114 lid member 114, that be made of the step of end axis of guide G4 elasticity is pressed into.Like this, when by first support and second support part supports, first axis of guide and the 4th axis of guide, with respect to matrix 111 fixed bearings, first axis of guide G1 and the 4th axis of guide G4.

In addition, the structure of the 3rd support BE5 and first patch is identical with the structure of the 4th support BE6 and second patch, therefore only represents the 3rd support BE5 and first patch.Shown in the enlarged drawing among Fig. 5, patch by lid member 114 stops up the U groove, form support holes 114B thus, and this support holes of break-through 114B, when supporting the first bolster G2, the second bolster G5 sliding freely, X frame 113A, Y frame 113B are supported on matrix 111 in the mode of level and smooth slip respectively.

In addition, to each

frame

113A, 113B with to be moved frame be that the linking part of CCD support 112 has also carried out well-designed.In this example,,, and carry out well-designed to 3 the B1 of bearing portion, the shape of B2, B3 by three-point support CCD support 112 according to the mode that moves that moves of CCD support 112 with X frame 113A and Y frame 113B with being quick on the draw.

As mentioned above, on CCD support 112, two bearing B1, B2 that are limited and support sliding freely along directions X by second axis of guide G3 upper edge Y direction of extending at directions X and be fixedly attached to Y frame 113B and the both sides of first axis of guide G1 upper edge directions X and Y direction all without restriction these 3 of bearing B3 of supporting support, stipulate the posture of CCD support 112 thus with respect to matrix 111.

So, utilization by be located at the spring SP 1 covered on the member 114 with CCD support 112 towards the inboard application of force of paper, supporting is: with bearing B3 this CCD support 112, that be supported on first axis of guide G1 in the upper shed of Y direction, the bearing of the U groove shape of this first axis of guide G1 is clamped in formation, and the axis of guide is leaned on to side's lateral deviation of U word, thereby determine the posture of the Z direction of CCD support 112.In addition, two bearing B1, B2 CCD support 112, that be supported on second axis of guide G3 have the angle respectively on Z direction and Y direction, and be provided with the reach through hole of the rectangle of second axis of guide G3 break-through, and rely on side's side of the reach through hole of rectangle, move rocking of central Y direction thereby absorb the CCD support, and supporting CCD support.

In addition, with the B4 of bearing portion CCD support 112, that be supported on the 3rd axis of guide G6 in the upper shed of Z direction, the bearing of the U groove shape of the 3rd axis of guide G6 is clamped in formation, and make the 3rd axis of guide G6 be positioned at this U groove all the time, make the 3rd axis of guide G6 unrestricted and to the mobile restricted system of directions X, supporting CCD support 112 also can on the Z direction.

As mentioned above, CCD support 112 by spring SP 2 to the directions X application of force.Therefore, the 3rd axis of guide G6 is to side's bias of the U groove of the B4 of bearing portion.Rocking of directions X when thus, absorption CCD support 112 moves.

The B4 of this bearing portion be located at when CCD support 112 is slided on directions X along first axis of guide G1 and the 3rd axis of guide G3, by both party axis of guide G1, G2 be applied to the position that the moment of CCD support 112 just in time is eliminated, so CCD support 112 moves on directions X smoothly.

Like this, absorb rocking of directions X, Y direction moving in, be that the CCD support also can remain in slip in the posture of Z direction even be moved frame, constitute the XY frame of the level and smooth and quick reaction-limited system of CCD support 112 thus.

Shown in as described above,, realize the XY frame, wherein obtain flatness and assembling easily and sought the manufacturing expenses reduction according to XY frame of the present invention; With the filming apparatus that possesses this XY frame.

In addition, also realize can taking place hardly friction force etc. useless power, can with the moving synchronously and the XY frame of mobile sensitively CCD support of frame.

Claims

1, a kind of XY frame, it possesses: matrix and with this matrix along being moved frame with respect to what this matrix can relatively move in the XY plane of the orthogonality of center shaft of Z direction break-through, it is characterized in that, comprising:

The X frame, it surrounds half cycle with described central shaft, be supported on the described matrix in the mode of sliding freely at directions X, simultaneously with the described frame that is moved to support in mode restricted on the directions X and that on the Y direction, slide freely, make this be moved frame by slip and move along directions X along directions X;

The Y frame, it surrounds half cycle with described central shaft, thus with described X frame jointly surround this central shaft full the week, be supported on described matrix in the mode of on the Y direction, sliding freely, simultaneously the described frame that is moved is supported in mode restricted on the Y direction and that slide freely on directions X, make this be moved frame by slip and move along the Y direction along the Y direction;

X frame driving mechanism, it drives described X frame along directions X; With

Y frame driving mechanism, it drives described Y frame along the Y direction;

Described X frame driving mechanism possesses:

Described Y frame driving mechanism possesses:

2, XY frame as claimed in claim 1 is characterized in that, described matrix has: first guide, one side itself and described first conjugant, in joining of extending on the directions X and the guide when becoming this first conjugant to the directions X position adjustments; With second guide, one side itself and described second conjugant, upwardly extendingly in Y side join and become the guide of this second conjugant when Y direction position adjustments, in addition,

3, XY frame as claimed in claim 2 is characterized in that,

Described lid member also has:

4, XY frame as claimed in claim 1 or 2 is characterized in that,

Described matrix and described first conjugant have first Fixed Division, and this first Fixed Division will communicate with each other, and are used for the directions X position adjustments of this first conjugant, simultaneously, are used for fixing to described matrix of after position adjustments this first conjugant,

5, as each described XY frame in the claim 1～4, it is characterized in that,

Has first flexible substrate, this first flexible substrate is fixed on described first coil substrate, and the transmission road of the detection signal that is formed with the stream of the electric current of supplying with to described first coil and obtains by described first Hall element, described first Hall element is loaded on this first flexible substrate, this first flexible substrate is fixed in this first coil substrate, thus this first Hall element is fixed on this first coil substrate

Has second flexible substrate, this second flexible substrate is fixed on described second coil substrate, and the transmission road of the detection signal that is formed with the stream of the electric current of supplying with to described second coil and obtains by described second Hall element, described second Hall element is loaded on this second flexible substrate, this second flexible substrate is fixed in this second coil substrate, thus this second Hall element is fixed on this second coil substrate.

6, XY frame as claimed in claim 5 is characterized in that, the flexible substrate that described first flexible substrate and described second flexible substrate are integrated.

7, as each described XY frame in the claim 1～6, it is characterized in that it possesses capturing element, this capturing element is fixed in described being moved also accepts to be taken the imaging of body and the picture signal of this body that is taken of output expression on the frame.

8, a kind of filming apparatus is characterized in that, comprising:

The described XY frame of claim 7;

The imaging capture lens of body that is taken on described capturing element; With

Drive division, it drives described XY frame with the shake of correction by the image of the picture signal performance of described capturing element output.