CN101353897B - Vibrating isolation foundation precise leveling system - Google Patents

Vibrating isolation foundation precise leveling system Download PDF

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Publication number
CN101353897B
CN101353897B CN2008101204049A CN200810120404A CN101353897B CN 101353897 B CN101353897 B CN 101353897B CN 2008101204049 A CN2008101204049 A CN 2008101204049A CN 200810120404 A CN200810120404 A CN 200810120404A CN 101353897 B CN101353897 B CN 101353897B
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China
Prior art keywords
air
valve
vibrating isolation
isolation foundation
control valve
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CN2008101204049A
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Chinese (zh)
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CN101353897A (en
Inventor
李东升
叶树亮
满楠
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中国计量学院
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Publication of CN101353897A publication Critical patent/CN101353897A/en
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Publication of CN101353897B publication Critical patent/CN101353897B/en

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Abstract

The invention discloses a precise leveling system of a vibration isolation foundation bed. The lower bottom surface of the vibration isolation foundation bed is supported by air springs; a precise optical vibration isolation platform is arranged on the vibration isolation foundation bed; one or two level monitors are arranged on the precise optical vibration isolation platform for measuring an included angle between the vibration isolation platform and the absolute level in two mutually vertical directions; flexible leg monitoring devices are respectively connected with the own air springs; the output ends of the level monitors and the flexible leg monitoring devices are respectively connected with the input ends of controllers; the output ends of the controllers are connected with all control valves; an air channel port of each control valve is respectively connected with the own air spring; air supplying devices respectively supply air for each control valve. The precise leveling system realizes vibration isolation of Grade II; the vibration isolation platform has highly precise planarity and meets requirements of various precision instruments for the environment; the control valves realize the air inflow of a small amount during the charging process of the air springs, improve leveling precision and can keep the system stable. The precise leveling system is applicable to ultra precise measurement and processing.

Description

Vibrating isolation foundation precise leveling system
Technical field
The present invention relates to vibrating isolation foundation precise leveling system, especially relate to the vibrating isolation foundation precise leveling system that supports by air spring.
Background technology
The ground vibrating isolation system that is supported by air spring has been applied in ultra precise measurement, the ultraprecise manufacture field.Major part comprises ground, air spring, feeder, height control module in actual air spring vibration isolation system at present.Its height controlling unit is to be benchmark with the earth, utilizes relative displacement between displacement sensor ground and the earth to change the height of ground with the switch of control charging valve.The earth is not an abswolute level, so the basic point difference of every displacement sensor, a plurality of air springs that support ground are difficult to be elevated to sustained height, and the levelness of ground can not guarantee, to influence the performance of equipment on the ground, also can bring error to ultra precise measurement and processing.
Main application switch electromagnetic valve is inflated to air spring in present air spring vibrating isolation system, have only two states of switching, gas flow in unit interval is unadjustable, air spring rigidity is relatively poor, when gas flow is excessive, be unfavorable for the stability in the air spring gas replenishment process, thereby cause drifting about in the whole ground uphill process, ground and ancillary service thereof are all had destructiveness.
Can draw three air springs according to " determining a plane at 3 " just can support vibrating isolation foundation.And in present practical application air spring vibrating isolation system, vibrating isolation foundation is to be supported by the air spring more than three mostly, when vibrating isolation foundation is supported break away from ground after, not necessarily each air spring is all fully stressed and all contact with vibrating isolation foundation, is exactly the normal empty leg situation of saying when some or several air springs fully do not contact with vibrating isolation foundation.Empty leg situation very easily take place and the surface on be difficult for discovering, the equal unbalance stress of vibrating isolation foundation and air spring in this case is the hidden danger of accident such as cause air spring to break, ground is toppled over, various device on the easier damage ground.Therefore, be necessary under the duty of air spring vibrating isolation system, monitor the interior pressure of each air spring constantly or flow into the interior air mass flow of air spring, to avoid empty leg or overload.
In addition, the main application of air spring vibrating isolation system is to place some ultraprecise plant and instrument to carry out ultra precise measurement and ultraprecise processing on vibrating isolation foundation.Vibrating isolation foundation generally by reinforced concrete build form and area bigger, can not realize high precision planeness, do not reach the requirement of ultraprecise plant and instrument.
Summary of the invention
In order to overcome the weak point that exists in the background technology, the object of the present invention is to provide a kind of vibrating isolation foundation precise leveling system.
For achieving the above object, the technical solution used in the present invention is:
Comprise vibrating isolation foundation, precision optics vibration-isolating platform, air spring, feeder, level monitoring device, empty leg monitoring device, controller and control valve; The vibrating isolation foundation bottom surface is by 4,6 or 8 air springs support, the precision optics vibration-isolating platform is positioned on the vibrating isolation foundation, place one or two on the precision optics vibration-isolating platform in order to measure the level monitoring device of vibration-isolating platform and absolute horizon angle on two orthogonal directions, empty leg monitoring device is connected with separately air spring respectively, the output of level monitoring device and empty leg monitoring device is connected with the input of controller respectively, the output of controller is connected with each control valve, the air-path interface of each control valve links to each other with separately air spring respectively, feeder is respectively to each control valve air feed, and the valve openings adjustable size of control valve saves.
Described level monitoring device is single shaft obliquity sensor, double-shaft tilt angle sensor, single-axis acceleration sensors, double-axel acceleration sensor or electrolevel.
Described control valve is electric Proportion valve or choke valve-solenoid operated directional valve combination, and the valve openings size adjustment of described control valve is that the valve openings size of electric Proportion valve is regulated by controller, choke valve-solenoid operated directional valve combined valve size manual adjustments.
Described precision optics vibration-isolating platform is damp type precision optics vibration-isolating platform or air-cushion type precision optics vibration-isolating platform.
Described empty leg monitoring device is baroceptor or baroswitch.
Described empty leg monitoring device is flow meter, flow switch or flow meter.
Compare with background technology, the beneficial effect that the present invention has is:
1, can real-time automatically leveled precision optics vibration-isolating platform, on the basis of vibration isolation, further realize abswolute level, for ultra precise measurement and ultraprecise processing provide good condition.
But 2, select for use the valve adjusting control valve to realize improving micro-air inlet in the air spring gas replenishment process leveling precision, and can keep system stability.
3, can monitor the interior pressure of each air spring or the air mass flow that enters each air spring in real time; and then judge whether each air spring is stressed normal; solve empty leg problem; eliminate the hidden danger of accidents such as air spring breaks, ground is toppled over, the normal operation of precision instrument and equipment on the protection vibration-isolating platform.
4, select for use the precision optics vibration-isolating platform to place on the vibrating isolation foundation and can realize the secondary vibration isolation, strengthen vibration isolating effect, the precision optics vibration-isolating platform has high precision planeness, can satisfy various precision instruments to environment requirement.
The present invention is applicable to ultra precise measurement, ultraprecise processing.
Description of drawings
Fig. 1 is the structural principle schematic diagram of the embodiment of the invention 1.
Fig. 2 is the structural principle schematic diagram of the embodiment of the invention 2.
Fig. 3 is the workflow diagram of the embodiment of the invention 1.
Among the figure: 1, vibrating isolation foundation, 2, damp type precision optics vibration-isolating platform, 3, air spring, 4, two single shaft obliquity sensors, two electrolevels or two single-axis acceleration sensors, 5, controller, 6, feeder, 7, baroceptor or baroswitch, 8, electric Proportion valve, 9, air-cushion type precision optics vibration-isolating platform, 10, double-shaft tilt angle sensor or double-axel acceleration sensor, 11, flow meter, flow meter or flow switch, 12, choke valve, 13 solenoid operated directional valves.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail.
Embodiment 1:
As shown in Figure 1, the present invention includes vibrating isolation foundation 1, damp type precision optics vibration-isolating platform 2, four air springs 3, feeder 6, level monitoring device, empty leg monitoring device, controller 5 and control valves; Support by four air springs 3 respectively on four angles of vibrating isolation foundation 1 bottom surface, damp type precision optics vibration-isolating platform 2 is positioned on the vibrating isolation foundation 1, place two on the damp type precision optics vibration-isolating platform 2 in order to measure the level monitoring device of precision optics vibration-isolating platform and absolute horizon angle on two orthogonal directions, " empty leg " monitoring device is connected with separately air spring 3 respectively, the output of level monitoring device and empty leg monitoring device is connected with the input of controller 5 respectively, the output of controller is connected with each control valve, the air-path interface of each control valve links to each other with separately air spring 3 respectively, feeder 6 is respectively to each control valve air feed, and the valve openings adjustable size of control valve saves.
Described air spring 3 adopts φ 550D air spring; Described level monitoring device is two single shaft obliquity sensors or two electrolevels or two single-axis acceleration sensors 4; Described empty leg monitoring device is baroceptor or baroswitch 7; Described control valve is an electric Proportion valve 8.
Its operating principle is as follows:
As shown in Figure 3, vibrating isolation foundation 1 bottom surface is supported by four air springs 3.Under the off working state, vibrating isolation foundation 1 rest on the ground, and presses in each air spring 3 to be atmospheric pressure, in the raw, breaks away from vibrating isolation foundation 1.During work, give corresponding air spring 3 inflations by the feeder 6 that air purification components and parts such as air compressor, large-scale gasholder, aftercooler, refrigerant type dryer, main line strainer, oil mist separator, odor removal filter are formed by four electric Proportion valves, air spring 3 is expanded and highly increase, contact with vibrating isolation foundation 1 respectively and it is slowly propped up, breaks away from ground until four air springs 3, if reached specified altitude assignment then controller 5 send the instruction closed control valve, stop the inflation.In this process, four baroceptors 7 are measured the interior pressure of corresponding air spring 3 respectively in real time, and numerical value passed to controller 5, controller 5 judges whether whether force value makes comparisons, have empty leg situation that the stressing conditions of four air springs 3 and vibrating isolation foundation 1 takes place and analyzes by the control algolithm analysis within air spring 3 energy tolerance ranges and with four force value.If abnormal conditions are arranged, the present duty of halt system is closed electric Proportion valve 8 immediately, sends warning.Give the little air spring of interior pressure 3 inflations by controller 5 according to control algolithm, make four air springs 3 and vibrating isolation foundation 1 stress balance, eliminate empty leg situation, continue the original duty of system then.
When pressure is eligible in vibrating isolation foundation 1 is elevated to assigned address and each air spring 3, stop inflation.Open automatic horizontal control system this moment, two single shaft obliquity sensors 4 send the angle of inclination value on 2 liang of vertical direction of damp type precision optics vibration-isolating platform to controller 5 (upper computer software), controller 5 is opened corresponding electric Proportion valve 8 according to control algolithm, and according to the valve size of the size adjustment electric Proportion valve 8 of angle of inclination value, valve opening was big when angle value was big, and angle value hour valve opening is little.Give corresponding air spring 3 inflations by feeder 6 then, air spring 3 is highly changed, and then change the angle of inclination value of damp type vibration-isolating platform.Carry out this process repeatedly, when damp type precision optics vibration-isolating platform 2 angle of inclination values arrive within the error ranges, can think leveling.Can move precision instrument this moment, carries out the processing of ultra precise measurement or ultraprecise.
Embodiment 2:
As shown in Figure 2, the present invention includes vibrating isolation foundation 1, air-cushion type precision optics vibration-isolating platform 9, four air springs 3, feeder 6, level monitoring device, empty leg monitoring device, controller 5 and control valves; Support by air spring 3 respectively on four angles of vibrating isolation foundation 1 bottom surface, air-cushion type precision optics vibration-isolating platform 9 is positioned on the vibrating isolation foundation 1, place two on the air-cushion type precision optics vibration-isolating platform 9 in order to measure the level monitoring device of vibration-isolating platform and absolute horizon angle on two orthogonal directions, empty leg monitoring device is connected with separately air spring 3 respectively, the output of level monitoring device and empty leg monitoring device is connected with the input of controller 5 respectively, the output of controller is connected with each control valve, the air-path interface of each control valve links to each other with separately air spring 3 respectively, feeder 6 is respectively to each control valve air feed, and the valve openings adjustable size of control valve saves.
Described air spring 3 adopts φ 550D air spring; Described level monitoring device is double-shaft tilt angle sensor or double-axel acceleration sensor 10; Described empty leg monitoring device is flow meter, flow meter or flow transmitter 11; Described control valve is 13 combinations of choke valve 12-solenoid operated directional valve.
Its operating principle is as follows:
Vibrating isolation foundation 1 rise process is identical with embodiment 1.In this process, four flow meters 11 are measured the air mass flow that flows in the corresponding air spring 3 respectively in real time, and numerical value passed to controller 5, controller 5 judges that whether flow value make comparisons within air spring 3 can tolerance ranges and with four flow values, the stressing conditions by four air springs 3 of control algolithm analysis and vibrating isolation foundation 1 is to check whether empty leg situation takes place.If abnormal conditions are arranged, the present duty of halt system is closed solenoid operated directional valve 13 immediately, sends warning.Give 3 inflations of the little air spring of air mass flow or give the big air spring of air mass flow 3 venting according to control algolithm by controller 5, make in four air springs 3 and vibrating isolation foundation 1 stress balance, eliminate empty leg situation, continue the original duty of system then.
When vibrating isolation foundation 1 is elevated to assigned address and flows into air mass flow in each air spring 3 when eligible, stop inflation.Manual adjustments choke valve 12 realizes that micro-air inlet guarantees the leveling precision.Open automatic horizontal control system this moment, double-shaft tilt angle sensor 10 sends the numerical value at the angle of inclination on 9 liang of vertical direction of air-cushion type precision optics vibration-isolating platform to controller 5 (upper computer software), controller 5 is opened 13 combinations of corresponding choke valve 12-solenoid operated directional valve according to control algolithm, feeder 6 is given corresponding air spring 3 inflations then, air spring 3 is highly changed, and then change the angle of inclination value of air-cushion type vibration-isolating platform.Carry out this process repeatedly, when vibration-isolating platform 9 angle of inclination values arrive within the error ranges, can think leveling.Can move precision instrument this moment, carries out the processing of ultra precise measurement or ultraprecise.

Claims (6)

1. a vibrating isolation foundation precise leveling system is characterized in that: comprise vibrating isolation foundation, precision optics vibration-isolating platform, air spring, feeder, level monitoring device, empty leg monitoring device, controller and control valve; The vibrating isolation foundation bottom surface is by 4,6 or 8 air springs support, the precision optics vibration-isolating platform is positioned on the vibrating isolation foundation, place one or two on the precision optics vibration-isolating platform in order to measure the level monitoring device of vibration-isolating platform and absolute horizon angle on two orthogonal directions, empty leg monitoring device is connected with each self-corresponding air spring respectively, the output of level monitoring device and empty leg monitoring device is connected with the input of controller respectively, the output of controller is connected with each control valve, the air-path interface of each control valve links to each other with each self-corresponding air spring respectively, feeder is respectively to each control valve air feed, and the valve openings adjustable size of control valve saves.
2. a kind of vibrating isolation foundation precise leveling system according to claim 1 is characterized in that: described level monitoring device is single shaft obliquity sensor, double-shaft tilt angle sensor, single-axis acceleration sensors, double-axel acceleration sensor or electrolevel.
3. a kind of vibrating isolation foundation precise leveling system according to claim 1, it is characterized in that: described control valve is electric Proportion valve or choke valve-solenoid operated directional valve combination, the valve openings size adjustment of described control valve is that the valve openings size of electric Proportion valve is regulated by controller, choke valve-solenoid operated directional valve combined valve size manual adjustments.
4. a kind of vibrating isolation foundation precise leveling system according to claim 1 is characterized in that: described precision optics vibration-isolating platform is damp type precision optics vibration-isolating platform or air-cushion type precision optics vibration-isolating platform.
5. a kind of vibrating isolation foundation precise leveling system according to claim 1 is characterized in that: described empty leg monitoring device is baroceptor or baroswitch.
6. a kind of vibrating isolation foundation precise leveling system according to claim 1 is characterized in that: described empty leg monitoring device is flow meter, flow switch or flow meter.
CN2008101204049A 2008-08-26 2008-08-26 Vibrating isolation foundation precise leveling system CN101353897B (en)

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CN102953395A (en) * 2011-08-17 2013-03-06 江苏道达海上风电工程科技有限公司 Adaptive-floating balance system for complex bucket foundation
CN103064432B (en) * 2012-12-19 2015-03-25 哈尔滨工业大学 Air floating vibration isolation platform based on magnetic levitation zero position standard and laser auto-collimation measurements
CN103064431B (en) * 2012-12-19 2015-06-17 哈尔滨工业大学 Gas magnetic vibration isolation platform based on air floatation zero position benchmark and laser auto-collimation measurement
CN103162067B (en) * 2012-12-19 2015-04-22 哈尔滨工业大学 Air flotation vibration isolation platform based on spring zero position criterion and laser self-alignment measurement
CN108022820B (en) * 2016-11-02 2020-03-24 中微半导体设备(上海)股份有限公司 Automatic adjusting device and method for levelness of plasma etching machine
CN108266481B (en) * 2017-12-20 2019-09-06 中国机械工业集团有限公司 A kind of two-stage air-flotation type vibration damping high-low temperature chamber retinue system
CN109000127A (en) * 2018-07-10 2018-12-14 南京航空航天大学 A kind of instrument and equipment self-level(l)ing device and its method
CN109696015A (en) * 2018-08-24 2019-04-30 青岛海尔股份有限公司 Refrigerator levelling device, method and refrigerator
CN110836718A (en) * 2019-10-10 2020-02-25 福建师范大学 Electronic analytical balance with automatic leveling function
CN111022567A (en) * 2019-12-23 2020-04-17 哈尔滨恒信精密气浮科技有限公司 High-precision self-leveling air spring vibration isolation table

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