CN101352826A - Method for polishing inner concave surface of optical elements as well as device - Google Patents
Method for polishing inner concave surface of optical elements as well as device Download PDFInfo
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- CN101352826A CN101352826A CNA200810223239XA CN200810223239A CN101352826A CN 101352826 A CN101352826 A CN 101352826A CN A200810223239X A CNA200810223239X A CN A200810223239XA CN 200810223239 A CN200810223239 A CN 200810223239A CN 101352826 A CN101352826 A CN 101352826A
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Abstract
The invention belongs to the technical field of precision optical polish finish, in particular to a polishing method of the inner concave surface of optical elements and a polishing device. A core mould with a tank circuit and inosculating with the shape of the inner concave surface to be processed is fixed below the inner concave surface of a work piece to be processed, and the work piece rotates around the own rotary shaft, keeps a micro clearance from the core mould and applies magnetic fields to processing regions by an external magnetic pole tool head and an internal magnetic pole exciting coil. When magneto-rheological fluids with polishing abrasives flow through the processing region along the tank circuit, a flexible polishing head is formed under the action of magnetic field and absorbed on the inner concave surface and polishing effects are generated. The polishing method and the device can realize the inner concave surface polishing of conformal optical elements with small curvature radiuses or deep cavity structure and other cyclically symmetric high gradient aspheric surfaces, and can remove distribution by utilizing computer-controlled polishing, and besides the polishing method and the device have the polishing surface shape control ability and both the advantages of high precision and high surface quality.
Description
Technical field
The invention belongs to precision optics polishing processing technique field, particularly a kind of optical element inner concave finishing method and device.
Background technology
Development along with optical design and process technology, the application of non-spherical element more and more widely, high steepness aspherical optical element also is born and grows up, and the part aspherical optical element is conformal optical element even adopt the aspheric surface of the draw ratio ratio of maximum gauge (axial length with) in the 1-3 scope for example.This conformal optical element, major part has the feature of dark chamber cusped arch, it is applied in optical rectification cover, headlight etc. and not only has clear superiority as optical element but also as appearance profile and the occasion that is connected support component, as reduce optical rectification cover air drag, improve the range firing rate of guided missile and enlarge visual field atmosphere etc., satisfied non-optical requirement such as system optics requirement and mechanics, calorifics etc. simultaneously.But conformal optical element has been brought many problems and challenge aspect processing outside the advantage of bringing on the performance.Early stage optical rectification cover adopts the form of concentric spherical more, its processing method is similar with the processing of ordinary optical spherical mirror, in the polishing surfaces externally and internally stage all is to adopt sphere pitch mould to carry out, because the contact-making surface of polished die and workpiece is a sphere, so the composite polishing that can realize swinging and rotate motion, and the processing of conformal radome fairing needs research new processing method and technology because the aspheric characteristics of its high steepness can not adopt traditional polishing mode again in the polishing process segment.
Magnetorheological polishing is COM (optics manufacturing center) invention of U.S.'s Rochester (Rochester) university, and is pushed to the precise polished technology of commercial applications in recent years by U.S. QED company.Magnetic flow liquid is made up of carrier fluid, ferromagnetic microparticles, grinding and polishing agent and auxiliary additive, magnetic flow liquid has rheological characteristic, in magnetic field, can form a kind of viscoplastic Bingham body that has, under suitable external magnetic field gradient, can make the magnetic flow liquid of curing form a flexible polishing mould with shear stress, auxiliary rotation by polishing wheel, make this polished die form polishing required relative motion and pressure distribution, can produce the polishing removal in the processing district and distribute in the area to be machined of workpiece.Because magnetorheological is that constantly circulation is upgraded in the process that forms the flexible polishing mould, so in the regular hour scope, there is not conventional bistrique wear problem, simultaneously Distribution of Magnetic Field and with the constant situation of workpiece relative position relation under, character such as the pressure of this polished die, shearing force and shape also keep relative stability, and distribute so can produce stable removal.By the residence time of computer control polishing mould, just can the face shape of whole processing work be controlled at the finished surface diverse location.
But there is certain limitation in this commercial magnetic rheological polishing method polishing inner concave, it adopts polishing wheel to fix, the mode of workpiece rotation and swing is processed, be applicable to the processing of axial symmetry optical element convex surface, but can't adapt to the processing of the little particularly conformal optical rectification cover of the dark concave surface inner concave of radius of curvature, its polishing wheel can't stretch in the chamber, and perhaps the workpiece hunting range is limited, can't satisfy the processing of whole inner concave.
Summary of the invention
The invention provides a kind of optical element inner concave finishing method, it is characterized in that, may further comprise the steps:
(1) processing work is fixed on the polishing rotating disk 14 with anchor clamps 15, regulates the workpiece inner concave and have gap between the core (18) of the tank circuit in the scope of 0.2～0.5mm, core 18 outer surfaces and interior concave shape to be processed are identical, and have the tank circuit;
(2) in liquid storage cylinder 9, add an amount of magnetic flow liquid 10, start agitating device 7, start delivery pump 8, magnetic flow liquid is got back in the liquid storage cylinder by circulation line via the grooved cavity that the tank circuit on circulation line 6 and the core 18 and workpiece inner concave surround under the driving of delivery pump 8 again, does not stop to circulate in whole process;
(3) internal magnetic pole excitation coil 16 energisings, in the tank circuit of core 18, form uniform divergent gradient magnetic field, electromagnet energising work in the outer magnetic pole tool heads 3, the tank circuit zone of the common position of magnetic pole correspondence outside of interior outer magnetic pole forms the add high-intensity magnetic field of an intensity in 300～2000 Gausses; When the magnetic flow liquid of circulation passes through this zone, theomorphism taking place, forms the Bingham body of class solid shape, owing to comprise the grinding and polishing abrasive material in the magnetic flow liquid, thereby form one section flexible polishing mould;
(4) forms of motion of outer magnetic pole tool heads 3 is realized to workbench 4 by vertical index dial 1 of numerical control and Z, outer magnetic pole tool heads 3 can be made reciprocally swinging along the equal space line of the outer surface bus of processing work in process, and remains surperficial vertical with processing work; The polishing relative motion takes place with the workpiece inner concave by 3 controls of outer magnetic pole tool heads in above-mentioned flexible polishing mould under the promotion of fluid, produce material removal effect, and the realization official learns the polishing of element inner concave.
Described magnetic flow liquid is water base or oil base; Water based magnetic rheologic liquid comprises water, carbonyl iron dust, grinding and polishing agent and additive, and wherein the volume fraction of water is 50-70%, and the volume fraction of carbonyl iron dust is 30-50%, and the volume fraction of grinding and polishing agent is 2-15%, and the volume fraction of additive is no more than 5%; The oil base magnetic flow liquid comprises silicone oil, carbonyl iron dust, grinding and polishing agent and additive, wherein the volume fraction of silicone oil is 40-70%, the volume fraction of carbonyl iron dust is 30-60%, and the volume fraction of grinding and polishing agent is 2-20%, and the volume fraction of additive is no more than 5%.
Described grinding and polishing agent comprises alumina abrasive, cerium oxide abrasives, silicon carbide abrasive and diadust.
The present invention also provides a kind of optical element inner concave burnishing device, it is characterized in that, polishing turret base 5 is fixedlyed connected with numerical control XY worktable 11, internal magnetic pole excitation coil 16 and internal magnetic pole iron core 17 and core 18 are formed one and are fixed on the numerical control XY worktable 11, and keep concentric with polishing turret base 5; Anchor clamps 15 are fixed on processing work 19 on the polishing rotating disk 14, polishing rotating disk 14 adopts bearing to be connected with polishing turret base 5, make and under the effect of turntable driving motor 12 and drive 13, rotate together with processing work 19, the dead in line of rotary middle spindle and core 18, and keeping the inner concave of processing work 19 and the minim gap between the core 18, any contact does not take place in two surfaces in rotation process; Magnetic flow liquid 10 is stored in the liquid storage cylinder 9, and agitator 7 is fixed in liquid storage cylinder 9 tops, and paddle extend in the middle of the magnetic flow liquid; Liquid storage cylinder 9 bottoms are circular arc; Circulation line 6 is divided into three sections and is fixedly connected on respectively between polishing turret base 5 and the liquid storage cylinder 9, between liquid storage cylinder 9 and the delivery pump 8, between delivery pump 8 and the polishing turret base 5; In polishing turret base 5 inside, the other end of circulation line 6 that is connected with liquid storage cylinder 9 and the circulation line 6 that is connected with delivery pump 8 docks with the tank circuit two ends of core 18 respectively, the cavity and the transfer pipeline 10 that surround by the inner concave of the tank circuit and processing work 19, liquid storage cylinder 9, delivery pump 8 constitutes the whole magnetic flow liquid circulatory system; Outer magnetic pole tool heads 3 is fixedlyed connected with instrument headstock 2, instrument headstock 2 bottoms are fixed on the calibration card of the vertical index dial 1 of numerical control, fixedly connected to vertical table 4 table tops with numerical control Z in the vertical index dial of numerical control 1 bottom, make that outer magnetic pole tool heads 3 can keep vertical with processing work 19 surfaces in the process, and keep certain interval, make reciprocally swinging along the outer surface bus equal space line of processing work 19.
Described delivery pump 8 is a variable pump, flow velocity and pressure in the control circulation line, flow velocity≤2.5m/s in the process, loine pressure≤0.3MPa.
Described core 18 outer surfaces and interior concave shape to be processed are coincide.
Described core 18 is made by the nonmagnetic easy rapidoprint that comprises aluminum alloy materials, Cu alloy material, ABS engineering plastics, nylon material, has the tank circuit on it.
Described outer magnetic pole tool heads 3 adopts the utmost point or multipole composite pole head, and can form rotation external reinforcing magnetic field around self central shaft rotation.
Described internal magnetic pole iron core 17 changes the permanent magnetism form into and replaces original internal magnetic pole iron core and internal magnetic pole excitation coil 16, or outer magnetic pole tool heads 3 adopts the permanent magnetism forms, or the inside and outside permanent magnetism form that all adopts, and changes magnetic field intensity by regulating each magnetic pole to the distance of processing district.
Described device is not installed the vertical index dial 1 of numerical control, instrument headstock 2, outer magnetic pole tool heads 3 and numerical control Z to vertical table 4, is used for the optical element inner concave is carried out the evenly trace removal finishing polish stage.
Beneficial effect of the present invention is: utilize magnetic flow liquid to form flexible circulation polished die and be adsorbed in inner concave and process, and can adopt computer control polishing removal amount and surface figure accuracy, the present invention has inherited the high accuracy and the high controllability of magnetorheological processing when adopting new version; It is applicable to the inner concave polishing processing of the symmetrical optical element of various revolutions, comprise the inner concave processing of sphere, aspheric surface and the conformal optical aspherical surface of high steepness, and possesses computer-aided control polishing function, can obtain deterministic polishing and remove distribution, very high practical value be arranged for the automation batch machining; (K9) can obtain nano level surface roughness for optical glass, by the apolegamy to abrasive material in the magnetic flow liquid, equally also is suitable for the polishing processing of radome fairing infra-red material (MgF2 etc.).
Description of drawings
Fig. 1 is the structural representation of device of the present invention;
Fig. 2 is that the position of trough of belt road core and workpiece to be machined concerns schematic diagram;
Fig. 3 is the polishing movement relation schematic diagram of device of the present invention;
Fig. 4 is the structural representation of device described in the embodiment 5.
Number in the figure:
The vertical index dial of 1-numerical control; 2-instrument headstock; 3-outer magnetic pole tool heads; Z is to vertical table in the 4-numerical control; 5-polishes turret base; The 6-circulation line; The 7-agitator; The 8-delivery pump; The 9-liquid storage cylinder; The 10-magnetic flow liquid; 11-numerical control XY worktable; The 12-turntable driving motor; The 13-drive; 14-polishes rotating disk; The 15-anchor clamps; 16-internal magnetic pole excitation coil; 17-internal magnetic pole iron core; The 18-core; The 19-workpiece.
The specific embodiment
The invention provides a kind of optical element inner concave finishing method and device, the present invention will be further described below by description of drawings and the specific embodiment.
Fig. 1 is the structural representation of device of the present invention, and Fig. 2 is that the position of trough of belt road core and workpiece to be machined concerns schematic diagram.To polish turret base 5 and fixedly connected with numerical control XY worktable 11, internal magnetic pole excitation coil 16 and internal magnetic pole iron core 17 and core 18 are formed one and are fixed on the numerical control XY worktable 11, and keep concentric with polishing turret base 5; Anchor clamps 15 are fixed on processing work 19 on the polishing rotating disk 14, polishing rotating disk 14 adopts bearing to be connected with polishing turret base 5, make and under the effect of turntable driving motor 12 and drive 13, rotate together with processing work 19, the dead in line of rotary middle spindle and core 18, and keeping the inner concave of processing work 19 and the minim gap between the core 18, any contact does not take place in two surfaces in rotation process; Magnetic flow liquid 10 is stored in the liquid storage cylinder 9, and agitator 7 is fixed in liquid storage cylinder 9 tops, and paddle extend in the middle of the magnetic flow liquid; Circulation line 6 is divided into three sections and is fixedly connected on respectively between polishing turret base 5 and the liquid storage cylinder 9, between liquid storage cylinder 9 and the delivery pump 8, between delivery pump 8 and the polishing turret base 5, delivery pump is a variable pump, can control flow velocity and pressure in the circulation line, flow velocity≤2.5m/s in the process, loine pressure≤0.3MPa; In polishing turret base 5 inside, the other end of circulation line 6 that is connected with liquid storage cylinder 9 and the circulation line 6 that is connected with delivery pump 8 docks with the tank circuit two ends of core 18 respectively, the cavity and the transfer pipeline 10 that surround by the inner concave of the tank circuit and processing work 19, liquid storage cylinder 9, delivery pump 8 constitutes the whole magnetic flow liquid circulatory system; Outer magnetic pole tool heads 3 is fixedlyed connected with instrument headstock 2, instrument headstock 2 bottoms are fixed on the calibration card of the vertical index dial 1 of numerical control, fixedly connected to vertical table 4 table tops with numerical control Z in the vertical index dial of numerical control 1 bottom, make that outer magnetic pole tool heads 3 can keep vertical with processing work 19 surfaces in the process, and keep certain interval, make reciprocally swinging along the outer surface bus equal space line of processing work 19.The assembly work of device is finished.
Use described device that the optical element inner concave is polished processing steps to be:
(1) workpiece to be processed is fixed on the polishing rotating disk 14 with anchor clamps 15, as shown in Figure 3, workpiece 19 is around self gyroaxis rotation; Regulate the workpiece inner concave and have gap between the core 18 of the tank circuit in 0.2 to 0.5 millimeter scope, guarantee to drive that inner concave does not take place directly to contact with the core outer surface in the process of workpiece rotation at rotating disk;
(2) in liquid storage cylinder 9, add an amount of magnetic flow liquid 10, start agitating device 7, start delivery pump 8; Magnetic flow liquid is got back in the liquid storage cylinder by circulation line via the grooved cavity that the tank circuit on circulation line 6 and the core and workpiece inner concave surround under the driving of delivery pump again, does not stop to circulate in whole process;
(3) internal magnetic pole excitation coil 16 energisings, in the core tank circuit, form uniform divergent gradient magnetic field, the work of also switching on of electromagnet in the outer magnetic pole tool heads 3, the tank circuit zone of the common position of magnetic pole correspondence outside of interior outer magnetic pole forms the add high-intensity magnetic field of an intensity in 300-2000 Gauss; When the magnetic flow liquid of circulation passes through this zone, theomorphism takes place, form the Bingham body of class solid shape, thereby form one section flexible polishing mould, the polishing relative motion takes place with the workpiece inner concave in this flexible polishing mould under the promotion of fluid, produce material and remove under the effect of grinding and polishing agent, because magnetic field and fluid flow and cyclic process all is in controlled and stable state, the i.e. unit's of the polishing removal of the removal amount of bill of materials bit time function also is a stable and controllable;
(4) forms of motion of outer magnetic pole tool heads 3 is realized to workbench 4 by vertical index dial 1 of numerical control and Z, outer magnetic pole tool heads 3 can be made reciprocally swinging along the equal space line of the outer surface bus of processing work in process, and remains surperficial vertical with processing work; The outer magnetic pole tool heads can be that the single swing also can be a reciprocally swinging at a slow speed in process, can improve the uniformity of processing, and promotes the smoothness of processing district magnetic flow liquid circulation; By controlling to the numerical control motion control of outer magnetic pole tool heads with to the rotation of polishing turntable, the whole inner concave of processing work is effectively polished, on the basis of improving surface quality, can also grasp the face shape removal distribution of processing by computer control, realize revising and improving the function of surface figure accuracy.
Embodiment 2
In the present embodiment, the internal magnetic pole iron core of optical element inner concave burnishing device 17 adopts the permanent magnetism forms to replace internal magnetic pole excitation coil 16, and outer magnetic pole tool heads 3 also adopts the permanent magnetism form, changes magnetic field intensity by regulating magnetic pole to the distance of processing district.The apparatus structure of other parts is identical with embodiment 1 with processing method.
In the present embodiment, the outer magnetic pole tool heads 3 of optical element inner concave burnishing device adopts multipole composite pole head, and can form rotation external reinforcing magnetic field around self central shaft rotation.The apparatus structure of other parts is identical with embodiment 1 with processing method.
Fig. 4 is the structural representation of the described device of present embodiment.In the present embodiment, optical element inner concave burnishing device is not installed the vertical index dial 1 of numerical control, instrument headstock 2, outer magnetic pole tool heads 3 and numerical control Z to vertical table 4.This apparatus structure is used for the optical element inner concave is carried out the evenly trace removal finishing polish stage, has saved the partial devices as the control of face shape.The apparatus structure of other parts is identical with embodiment 1 with processing method.
Claims (10)
1. an optical element inner concave finishing method is characterized in that, may further comprise the steps:
(1) processing work is fixed on the polishing rotating disk (14) with anchor clamps (15), regulate the workpiece inner concave and have gap between the core (18) of the tank circuit in the scope of 0.2～0.5mm, core (18) outer surface and interior concave shape to be processed are coincide, and have the tank circuit;
(2) in liquid storage cylinder (9), add an amount of magnetic flow liquid (10), start agitating device (7), start delivery pump (8), magnetic flow liquid is got back in the liquid storage cylinder by circulation line via the grooved cavity that the tank circuit on circulation line (6) and the core (18) and workpiece inner concave surround under the driving of delivery pump (8) again, does not stop to circulate in whole process;
(3) internal magnetic pole excitation coil (16) energising, in the tank circuit of core (18), form uniform divergent gradient magnetic field, electromagnet energising work in the outer magnetic pole tool heads (3), the tank circuit zone of the common position of magnetic pole correspondence outside of interior outer magnetic pole forms the add high-intensity magnetic field of an intensity in 300～2000 Gausses; When the magnetic flow liquid of circulation passes through this zone, theomorphism taking place, forms the Bingham body of class solid shape, owing to comprise the grinding and polishing abrasive material in the magnetic flow liquid, thereby form one section flexible polishing mould;
(4) forms of motion of outer magnetic pole tool heads (3) is realized to workbench (4) by vertical index dial of numerical control (1) and Z, outer magnetic pole tool heads (3) can be made reciprocally swinging along the equal space line of the outer surface bus of processing work in process, and remains surperficial vertical with processing work; The polishing relative motion takes place with the workpiece inner concave by outer magnetic pole tool heads (3) control in above-mentioned flexible polishing mould under the promotion of fluid, produce material removal effect, realizes the polishing of optical element inner concave.
2. a kind of optical element inner concave finishing method according to claim 1 is characterized in that described magnetic flow liquid is water base or oil base; Water based magnetic rheologic liquid comprises water, carbonyl iron dust, grinding and polishing agent and additive, and wherein the volume fraction of water is 50-70%, and the volume fraction of carbonyl iron dust is 30-50%, and the volume fraction of grinding and polishing agent is 2-15%, and the volume fraction of additive is no more than 5%; The oil base magnetic flow liquid comprises silicone oil, carbonyl iron dust, grinding and polishing agent and additive, wherein the volume fraction of silicone oil is 40-70%, the volume fraction of carbonyl iron dust is 30-60%, and the volume fraction of grinding and polishing agent is 2-20%, and the volume fraction of additive is no more than 5%.
3. a kind of optical element inner concave finishing method according to claim 2 is characterized in that described grinding and polishing agent comprises alumina abrasive, cerium oxide abrasives, silicon carbide abrasive and diadust.
4. optical element inner concave burnishing device, it is characterized in that, polishing turret base (5) is fixedlyed connected with numerical control XY worktable (11), internal magnetic pole excitation coil (16) and internal magnetic pole iron core (17) and core (18) are formed one and are fixed on the numerical control XY worktable (11), and keep concentric with polishing turret base (5); Anchor clamps (15) are fixed on processing work (19) on the polishing rotating disk (14), polishing rotating disk (14) adopts bearing to be connected with polishing turret base (5), make and under the effect of turntable driving motor (12) and drive (13), rotate together with processing work (19), the dead in line of rotary middle spindle and core (18), and keeping the inner concave of processing work (19) and the minim gap between the core (18), any contact does not take place in two surfaces in rotation process; Magnetic flow liquid (10) is stored in the liquid storage cylinder (9), and agitator (7) is fixed in liquid storage cylinder (9) top, and paddle extend in the middle of the magnetic flow liquid; Liquid storage cylinder (9) bottom is circular arc; Circulation line (6) is divided into three sections and is fixedly connected on respectively between polishing turret base (5) and the liquid storage cylinder (9), between liquid storage cylinder (9) and the delivery pump (8), between delivery pump (8) and the polishing turret base (5); In polishing turret base (5) inside, the other end of circulation line (6) that is connected with liquid storage cylinder (9) and the circulation line (6) that is connected with delivery pump (8) docks with the tank circuit two ends of core (18) respectively, the cavity and the transfer pipeline (10) that surround by the inner concave of the tank circuit and processing work (19), liquid storage cylinder (9), delivery pump (8) constitutes the whole magnetic flow liquid circulatory system; Outer magnetic pole tool heads (3) is fixedlyed connected with instrument headstock (2), instrument headstock (2) bottom is fixed on the calibration card of the vertical index dial of numerical control (1), fixedly connected to vertical table (4) table top with numerical control Z in the vertical index dial of numerical control (1) bottom, make that outer magnetic pole tool heads (3) can keep vertical with processing work (19) surface in the process, and keep certain interval, make reciprocally swinging along the outer surface bus equal space line of processing work (19).
5. optical element inner concave burnishing device according to claim 4 is characterized in that described delivery pump (8) is a variable pump, flow velocity and pressure in the control circulation line, flow velocity≤2.5m/s in the process, loine pressure≤0.3MPa.
6. optical element inner concave burnishing device according to claim 4 is characterized in that, described core (18) outer surface and interior concave shape to be processed are coincide.
7. optical element inner concave burnishing device according to claim 4, it is characterized in that, described core (18) is made by the nonmagnetic easy rapidoprint that comprises aluminum alloy materials, Cu alloy material, ABS engineering plastics, nylon material, has the tank circuit on it.
8. optical element inner concave burnishing device according to claim 4 is characterized in that, described outer magnetic pole tool heads (3) adopts the utmost point or multipole composite pole head, and around self central shaft rotation, forms rotation external reinforcing magnetic field.
9. optical element inner concave burnishing device according to claim 4, it is characterized in that, described internal magnetic pole iron core (17) changes the permanent magnetism form into and replaces original internal magnetic pole iron core and internal magnetic pole excitation coil (16), or outer magnetic pole tool heads (3) adopts the permanent magnetism form, or the inside and outside permanent magnetism form that all adopts, change magnetic field intensity by regulating each magnetic pole to the distance of processing district.
10. optical element inner concave burnishing device according to claim 4, it is characterized in that, described device is not installed the vertical index dial of numerical control (1), instrument headstock (2), outer magnetic pole tool heads (3) and numerical control Z to vertical table (4), is used for the optical element inner concave is carried out the evenly trace removal finishing polish stage.
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