CN101349786A - Automatic alignment mechanical device of integrated photon chip and array optical fiber - Google Patents
Automatic alignment mechanical device of integrated photon chip and array optical fiber Download PDFInfo
- Publication number
- CN101349786A CN101349786A CNA2008101431803A CN200810143180A CN101349786A CN 101349786 A CN101349786 A CN 101349786A CN A2008101431803 A CNA2008101431803 A CN A2008101431803A CN 200810143180 A CN200810143180 A CN 200810143180A CN 101349786 A CN101349786 A CN 101349786A
- Authority
- CN
- China
- Prior art keywords
- platform
- axis
- fixed station
- around
- axially
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses an automatic align mechanical device for integrated photon chip and arrayed fibers, wherein a bottom plate (100) is provided with a central platform (200) and is provided with two six-dimension high accuracy movable platforms symmetrically at the left and right of the central platform (200). The invention is provided with two six-dimension high accuracy movable platforms and a compact and reasonable structure, thus is suitable for abutting and packing various plane waveguides demanding high accuracy aligning and is easy to fit external devices as IR-CCD, machine vision, adhesive deposit device, UV solidifier and the like. The invention has simple operation, large motion range and high accuracy.
Description
Technical field
The present invention relates to a kind ofly, specifically be applicable to the sextuple high precision alignment of integrated photonic device such as optical branching device, optical fiber collimator, array waveguide grating etc. and the mechanical hook-up of encapsulation applicable to integrated photon chip and the self-aligning mechanical hook-up of array fibre.
Background technology
Integrated photonic device has compact conformation, volume is little, antijamming capability is strong, consistency of performance is good, reliable and stable, be convenient to outstanding advantages such as automatic batch production, is widely used in optic communication link net and Access Network in recent years Fiber to the home in the technology.The encapsulation of integrated photonic device is to utilize the sub-micrometer precision motion platform that integrated photon chip is aimed at coupling and fixing with array fibre, realizes the high-performance of device.The advanced technology index of estimating at present package quality in the world is that optical loss is lower than 0.15dB, this just requires the mould field distribution between integrated photon chip and array fibre to mate as far as possible, requires the optical axis alignment precision of integrated photon chip optical channel and optical fiber to be controlled at below the 0.1 μ m on the other hand.Therefore a coupling and a bottleneck that is encapsulated into the development of restriction array waveguide device, and packaging cost accounts for 70%～90% of device total cost, the encapsulation time accounts for more than 50% of total production time, thus one stable and fast packaged type will make product have more advantage.
In essence, encapsulation focus on make emission couple light to optical fiber or light to enter the optical power loss that receives waveguide from optical fiber littler.Therefore, aspect the encapsulation and aligning of optical element, mainly be to overcome the insertion loss of the loss of light signal such as optical fiber and reflection loss etc., with the loss that punctual because radial deflection, angular deflection, Waveguide end face is separated, the end face of waveguide core diameter difference and convex surface causes.Can detect and compensate by corresponding fiber-optic signal pick-up unit for inserting loss and reflection loss, also can overcome with corresponding waveguide manufacturing technology and accurate cutting instrument for waveguide core diameter and convex surface of end face, remaining radial deflection, angular deflection and Waveguide end face separates then axial translation that must be by the high-precision aligning mechanical hook-up of 6 DOF and pivot finishes aligning.We can say that sextuple high-precision aligning mechanical hook-up is most important to the raising of the performance of whole optics device package.
According to the above, for an aligning mechanical hook-up that how general sextuple high precision is, its basic demand has following three aspects: 1. will have precision, convenience, how general anchor clamps to come the integrated photon chip of clamping different model.2. the high-precision aligning of multiaxis will be arranged.3. shock insulation.For 1. and 3., high precision and convenient general anchor clamps and effectively seismic isolation technology is ripe basically; For 2., can be divided into following requirement again: 1) high-precision position sensing.2) transmission preferably and braking ability.3) axial displacement and angle displacement.4) be easy to control and accurate localization function.5) the combination requirement and the scalability of whole mechanical hook-up.High precision alignment is actual to be to finish by six motions of mechanical hook-up, i.e. X, Y, the axial displacement movement of Z in axial displacement, and Tx, Ty, Tz rotatablely move around axle on angle displacement.But the non-strict orthogonal characteristic in the sextuple motion platform between different degree of freedom motions, make in the optical channel alignment procedures by the dimension position adjustment interference that intercouples, increased the difficulty that realizes multi-pass while high precision alignment and coupling, this just needs optimizing distribution and making up of whole mechanical hook-up.In addition, aim at the space that mechanical hook-up also will be reserved corresponding expanding peripherals equipment,, detect, accurately aim at and encapsulate conveniently to carry out integrated photon chip mould field such as increasing IR-CCD, machine vision, point glue equipment etc.
Summary of the invention
Technical matters to be solved by this invention provides a kind of high precision height, easy to use, how general and integrated photon chip and self-aligning mechanical hook-up of array fibre that the expanding peripherals device space is big aimed at.
In order to solve the problems of the technologies described above, integrated photon chip and the self-aligning mechanical hook-up of array fibre that the present invention adopts, on base plate, be provided with the intermediary movements platform, on described base plate, be provided with two sextuple high-precision motion platforms that distribute with described intermediary movements platform left-right symmetric, described intermediary movements platform is to be provided with fixed station on Gu Litai, on described fixed station, rotate to be provided with and rotate moving platform around Y-axis, on described fixed station, be equipped with by the 3rd high-quality elastic coupling and describedly rotate second stepper motor that moving platform is in transmission connection around Y-axis, be provided with through position on the moving platform described the rotation around Y-axis, above described through position, be furnished with described high-accuracy general integrated photon chip anchor clamps and vacuum suction mouth, the structure of every sextuple high-precision motion platform is to be provided with X-axis axially-movable platform on described base plate, the moving platform of described X-axis axially-movable platform is connected with the fixed station of Z axle axially-movable platform, on the moving platform of described Z axle axially-movable platform, be provided with connector, described connector is connected with the fixed station of Y-axis axially-movable platform, the drive motor tail down of described Y-axis axially-movable platform, the moving platform of described Y-axis axially-movable platform is connected with the fixed station that rotates the Ty motion platform around Y-axis, on the described moving platform that rotates the Ty motion platform around Y-axis, be provided with card extender, described card extender is connected with the fixed station that rotates the Tx motion platform around X-axis, the described moving platform of Tx motion platform that rotates around X-axis is connected with the fixed station that rotates the Tz motion platform around the Z axle, on the moving platform of Z axle rotation Tz motion platform, be provided with the axial micromotion platform of Z axle described, be provided with web joint and anchor clamps on the axial micromotion platform of described Z axle, described high-accuracy general waveguide anchor clamps are located on the described anchor clamps corresponding with described integrated photon chip anchor clamps.
For sextuple high-precision motion platform, layout is X-axis axially-movable platform, Z axle axially-movable platform, Y-axis axially-movable platform successively, rotates the Ty motion platform, rotates the Tx motion platform, rotates the Tz motion platform around the Z axle around X-axis around Y-axis from bottom to up, the wherein drive motor tail down of Y-axis axially-movable platform is connected with Z axle axially-movable platform by connector; Rotate the Ty motion platform and rotate the Tx motion platform around X-axis and then be connected by card extender around Y-axis, this layout can make things convenient for whole platform extension IR-CCD, machine vision, peripheral apparatus such as point glue equipment.
Sextuple high-precision motion platform is considered antidumping moment safety coefficient K, and for guaranteeing the stable of integral platform and the requirement on precision, sextuple high-precision motion platform has center of gravity to be located on the intersection point of X-axis axially-movable platform and Z axle axially-movable platform.
Described X-axis axially-movable platform, the structure of Z axle axially-movable platform and Y-axis axially-movable platform is to be provided with the linear slide block guide rail on first fixed station, described linear slide block guide rail two ends are provided with zero-bit switch and limit switch, on described linear slide block guide rail, slide and be provided with first moving platform, AC servo motor is installed on described first fixed station and by high-quality elastic coupling by erecting bed and is connected with high-accuracy ball screw, described high-accuracy ball screw is connected with described first moving platform by slide block, on described first fixed station, be provided with the RS232 interface, on described first moving platform, be provided with the grating chi.Adopt AC servo machinery driving and grating chi to realize closed-loop control, the RS232 interface, bilateral repeatable accuracy reaches ± 0.1 μ m, and the theoretical resolution of grating chi reaches 10nm, and motor is connected by high-quality elastic coupling with ball screw;
Describedly rotate the Ty motion platform, rotate the Tx motion platform and be on second fixed station, to slide to be provided with second moving platform around the structure of Z axle rotation Tz motion platform around X-axis around Y-axis, first stepper motor is installed on described second fixed station and by the second high-quality elastic coupling and is connected with worm screw, on described second moving platform, be provided with the worm gear with described worm mesh, on described first stepper motor, be provided with the RS232 interface.The worm and gear structure of its high-accuracy rotary axis and accurate bedding-in has limit function, initial zero-bit function, adopt first stepper motor to realize open loop control, RS232 interface, the theoretical resolution of stepper motor are 0.0001 °, bilateral repeatable accuracy reaches ± and 0.001 °.
The axial micromotion platform of described Z axle adopts piezoelectric ceramics to drive, and kinematic accuracy reaches nanoscale.
Said intermediary movements platform comprise around the Y-axis rotation platform, it comprises the worm and gear structure of high-accuracy rotary axis, precision bearing guide rail and accurate bedding-in respectively, adopt second stepper motor to realize open loop control, the RS232 interface, the theoretical resolution of second stepper motor is 0.0001 °, bilateral repeatable accuracy reaches ± and 0.001 °, and second stepper motor is connected by the 3rd high-quality elastic coupling with ball screw.
In sum, the present invention is a kind of high precision height, easy to use, how general and integrated photon chip and self-aligning mechanical hook-up of array fibre that the expanding peripherals device space is big aimed at.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural representation of intermediary movements platform of the present invention;
Fig. 3 is the structural representation of axially-movable platform;
Fig. 4 is the structural representation of platform of pivoting;
Fig. 5 is the principle sketch that there is radial deflection in two Waveguide arrays;
Fig. 6 is the principle sketch that there is angular deflection in two Waveguide arrays;
Fig. 7 is the principle sketch that two waveguides exist Waveguide end face to separate.
Embodiment
The invention will be further described below in conjunction with the drawings and specific embodiments.
Referring to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, on base plate 100, be provided with intermediary movements platform 200, on base plate 100, be provided with the first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400 that distribute with intermediary movements platform 200 left-right symmetric, intermediary movements platform 200 is to be provided with fixed station 2013 on Gu Litai 202, on fixed station 2013, rotate to be provided with and rotate moving platform 2014 around Y-axis, on fixed station 2013, be equipped with by the 3rd high-quality elastic coupling 2012 with rotate second stepper motor 2011 that moving platform 2014 is in transmission connection around Y-axis, be provided with through position 203 on the moving platform 2014 rotating around Y-axis, above through position 203, be furnished with high-accuracy general integrated photon chip anchor clamps 503 and vacuum suction 5031, the structure of the first sextuple high-precision motion platform 300 is to be provided with the first X-axis axially-movable platform 301 on base plate 100, the moving platform of the first X-axis axially-movable platform 301 is connected with the fixed station of a Z axle axially-movable platform 302, on the moving platform of a Z axle axially-movable platform 302, be provided with first connector 304, first connector 304 is connected with the fixed station of the first Y-axis axially-movable platform 303, the drive motor tail down of the first Y-axis axially-movable platform 303, the moving platform of the first Y-axis axially-movable platform 303 is connected with first fixed station that rotates Ty motion platform 306 around Y-axis, on rotating the moving platform of Ty motion platform 306, Y-axis is provided with first card extender 305 first, first card extender 305 is connected with first fixed station that rotates Tx motion platform 307 around X-axis, first moving platform that rotates Tx motion platform 307 around X-axis is connected with first fixed station around Z axle rotation Tz motion platform 308, first moving platform 308 around Z axle rotation Tz motion platform is connected with the fixed station of the axial micromotion platform 309 of a Z axle, the moving platform of the axial micromotion platform 309 of the one Z axle is provided with first web joint 500 and first anchor clamps 501, is provided with the high-accuracy general first waveguide anchor clamps 502 corresponding with integrated photon chip anchor clamps 503 on first anchor clamps 501; The structure of the second sextuple high-precision motion platform 400 is to be provided with the second X-axis axially-movable platform 401 on base plate 100, the moving platform of the second X-axis axially-movable platform 401 is connected with the fixed station of the 2nd Z axle axially-movable platform 402, on the moving platform of the 2nd Z axle axially-movable platform 402, be provided with second connector 404, second connector 404 is connected with the fixed station of the second Y-axis axially-movable platform 403, the drive motor tail down of the second Y-axis axially-movable platform 403, the moving platform of the second Y-axis axially-movable platform 403 is connected with second fixed station that rotates Ty motion platform 406 around Y-axis, on rotating the moving platform of Ty motion platform 406, Y-axis is provided with second card extender 405 second, second card extender 405 is connected with second fixed station that rotates Tx motion platform 407 around X-axis, second moving platform that rotates Tx motion platform 407 around X-axis is connected with second fixed station around Z axle rotation Tz motion platform 408, second moving platform around Z axle rotation Tz motion platform 408 is connected with the fixed station of the axial micromotion platform 409 of the 2nd Z axle, the moving platform of the axial micromotion platform 409 of the 2nd Z axle is provided with second web joint 506 and second anchor clamps 505, is provided with the high-accuracy general second waveguide anchor clamps 504 corresponding with integrated photon chip anchor clamps 503 on second anchor clamps 505.
For the first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400, for avoid in the optical channel alignment procedures by the dimension position adjustment interference that intercouples, Ty on angle displacement, Tx, Tz should overlap with the central point of integrated photon chip as far as possible around the center of rotatablely moving of axle, for satisfying this condition, its structure layout from bottom to up is X-axis axially-movable platform 301/401 successively, Z axle axially-movable platform 302/402, Y-axis axially-movable platform 303/403, rotate Ty motion platform 306/406 around Y-axis, rotate Tx motion platform 307/407 around X-axis, around Z axle rotation T z motion platform 308/408.The wherein drive motor tail down of Y-axis axially-movable platform 303/403 is connected with Z axle axially-movable platform 302/402 by connector 304/404; Rotate the Ty motion platform and rotate the Tx motion platform around X-axis and then be connected around Y-axis by card extender 305/405.This layout can make things convenient for whole platform extension IR-CCD, machine vision, peripheral apparatus such as point glue equipment.
The first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400 are considered antidumping moment safety coefficient K, for guaranteeing the stable of integral platform and the requirement on precision, sextuple motion platform center of gravity must be on the intersection point of X-axis axially-movable platform and Z axle axially-movable platform, if upsetting moment M
kExcessive, can increase antidumping moment M by certain counterweight
q
For reaching certain precision, structure in the first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400 is to be provided with linear slide block guide rail 3013 on first fixed station 3018, linear slide block guide rail 3013 two ends are provided with zero-bit switch and limit switch, on linear slide block guide rail 3013, slide and be provided with first moving platform 30110, AC servo motor 3016 is installed on first fixed station 3018 and by high-quality elastic coupling 3015 and is connected with high-accuracy ball screw 3012 by installing 3014, high-accuracy ball screw 3012 is connected with first moving platform 30110 by slide block 3011, on first fixed station 3018, be provided with RS232 interface 3017, on first moving platform 30110, be provided with grating chi 3019, adopt AC servo motor 3016 and grating chi 3019 to realize closed-loop control, RS232 interface 3017, bilateral repeatable accuracy reaches ± 0.1 μ m, the theoretical resolution of grating chi 3019 is 10nm, and AC servo motor 3016 is connected by high-quality elastic coupling 3015 with high-accuracy ball screw 3012, as shown in Figure 3.
Rotate the Ty motion platform around Y-axis, rotate the Tx motion platform and be on second fixed station 3065, to slide to be provided with second moving platform 3061 around X-axis around the structure of Z axle rotation Tz motion platform, first stepper motor 3063 is installed on second fixed station 3065 and by the second high-quality elastic coupling 3062 and is connected with worm screw 3066, on second moving platform 3061, be provided with worm gear 3067 with worm screw 3066 engagements, on first stepper motor 3063, be provided with RS232 interface 3064, the worm and gear structure of its high-accuracy rotary axis and accurate bedding-in, has limit function, initial zero-bit function, adopt first stepper motor 3063 to realize open loop control, the theoretical resolution of first stepper motor 3063 is 0.0001 °, bilateral repeatable accuracy reaches ± and 0.001 °, as shown in Figure 4.High-precision position sensing and transmission preferably and braking ability are so not only arranged, and be easy to control and the accurate localization function is arranged.
The drive motor of the first Y-axis axially-movable platform 303 and the second Y-axis axially-movable platform 403 is arranged in the below of motion platform in the first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400, avoid like this causing other peripheral apparatus such as machine vision etc. to work, and expansion other peripheral apparatus in platform anchor clamps upper end are convenient because of motor is excessive.
The axial micromotion platform 309 of the one Z axle on the top of the first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400 and the axial micromotion platform 409 of the 2nd Z axle, adopt piezoelectric ceramics to carry out the actuation movement precision and reach nanoscale, can guarantee the accurate aligning of integrated photon chip on the Z axle is axial.
Aim at for convenient, said intermediary movements platform 200 comprise around Y-axis rotation platform 2014, its feature comprises the worm and gear structure of high-accuracy rotary axis, precision bearing guide rail and accurate bedding-in respectively, adopt second stepper motor 2011 to realize open loop control, the RS232 interface, the theoretical resolution of second stepper motor 2011 is 0.0001 °, bilateral repeatable accuracy reaches ± and 0.001 °, and second stepper motor 2011 is connected by high-quality elastic coupling 2012 with ball screw.
With the aligning of 1 * N array fibre and integrated photon chip be encapsulated as example, the specific embodiment when the present invention works is described:
1, clamping: with the integrated photon chip clamping of cleaning on integrated photon chip anchor clamps 503; 1 * N array fibre is distinguished clamping on the first waveguide anchor clamps 502 and the second waveguide anchor clamps 504.
2, aim at: the position of regulating above-mentioned array fibre by the first sextuple high-precision motion platform 300 and the second sextuple high-precision motion platform 400, use machine vision or infrared camera to carry out preliminary coarse alignment, carry out fine alignment by the above-mentioned sextuple platform of corresponding algorithm controls again, to reach the luminous power minimum of loss.
3, encapsulation: carry out a glue by point glue equipment, uviol lamp solidifies, and encapsulates.
Claims (5)
1, the self-aligning mechanical hook-up of a kind of integrated photon chip and array fibre, comprise integrated photon chip anchor clamps (503) and waveguide anchor clamps, it is characterized in that: on base plate (100), be provided with intermediary movements platform (200), on described base plate (100), be provided with two sextuple high-precision motion platforms that distribute with described intermediary movements platform (200) left-right symmetric, described intermediary movements platform (200) is to be provided with fixed station (2013) on Gu Litai (202), on described fixed station (2013), rotate to be provided with and rotate moving platform (2014) around Y-axis, on described fixed station (2013), be equipped with by the 3rd high-quality elastic coupling (2012) and rotate second stepper motor (2011) that moving platform (2014) is in transmission connection around Y-axis with described, be provided with through position (203) on the moving platform (2014) described the rotation around Y-axis, be furnished with described high-accuracy general integrated photon chip anchor clamps (503) and vacuum suction mouth (5031) in described through position (203) top, the structure of every sextuple high-precision motion platform is to be provided with X-axis axially-movable platform on described base plate (100), the moving platform of described X-axis axially-movable platform is connected with the fixed station of Z axle axially-movable platform, on the moving platform of described Z axle axially-movable platform, be provided with connector, described connector is connected with the fixed station of Y-axis axially-movable platform, the drive motor tail down of described Y-axis axially-movable platform, the moving platform of described Y-axis axially-movable platform is connected with the fixed station that rotates the Ty motion platform around Y-axis, on the described moving platform that rotates the Ty motion platform around Y-axis, be provided with card extender, described card extender is connected with the fixed station that rotates the Tx motion platform around X-axis, the described moving platform of Tx motion platform that rotates around X-axis is connected with the fixed station that rotates the Tz motion platform around the Z axle, on the moving platform of Z axle rotation Tz motion platform, be provided with the axial micromotion platform of Z axle described, be provided with web joint and anchor clamps on the axial micromotion platform of described Z axle, described high-accuracy general waveguide anchor clamps are located on the described anchor clamps corresponding with described integrated photon chip anchor clamps (503).
2, according to integrated photon chip described in the claim 1 and the self-aligning mechanical hook-up of array fibre, it is characterized in that: the center of gravity of described sextuple high-precision motion platform is located on the intersection point of described X-axis axially-movable platform and described Z axle axially-movable platform.
3, the self-aligning mechanical hook-up of integrated photon chip according to claim 1 and 2 and array fibre, it is characterized in that: described X-axis axially-movable platform, the structure of Z axle axially-movable platform 302/402 and Y-axis axially-movable platform is to be provided with the linear slide block guide rail on first fixed station, described linear slide block guide rail two ends are provided with zero-bit switch and limit switch, on described linear slide block guide rail, slide and be provided with first moving platform, AC servo motor is installed on described first fixed station and by high-quality elastic coupling by erecting bed and is connected with high-accuracy ball screw, described high-accuracy ball screw is connected with described first moving platform by slide block, on described first fixed station, be provided with the RS232 interface, on described first moving platform, be provided with the grating chi.
4, the self-aligning mechanical hook-up of integrated photon chip according to claim 1 and 2 and array fibre, it is characterized in that: describedly rotate the Ty motion platform, rotate the Tx motion platform and be on second fixed station, to slide to be provided with second moving platform around the structure of Z axle rotation Tz motion platform around X-axis around Y-axis, first stepper motor is installed on described second fixed station and by the second high-quality elastic coupling and is connected with worm screw, on described second moving platform, be provided with the worm gear with described worm mesh, on described first stepper motor, be provided with the RS232 interface.
5, the self-aligning mechanical hook-up of integrated photon chip according to claim 1 and 2 and array fibre is characterized in that: the axial micromotion platform of described Z axle adopts piezoelectric ceramics to drive, and kinematic accuracy reaches nanoscale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101431803A CN101349786B (en) | 2008-09-10 | 2008-09-10 | Automatic alignment mechanical device of integrated photon chip and array optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101431803A CN101349786B (en) | 2008-09-10 | 2008-09-10 | Automatic alignment mechanical device of integrated photon chip and array optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101349786A true CN101349786A (en) | 2009-01-21 |
| CN101349786B CN101349786B (en) | 2010-09-29 |
Family
ID=40268637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101431803A Expired - Fee Related CN101349786B (en) | 2008-09-10 | 2008-09-10 | Automatic alignment mechanical device of integrated photon chip and array optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101349786B (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221734A (en) * | 2011-06-14 | 2011-10-19 | 中南大学 | SDOF (Single Degree of Freedom) jogging platform for packaging and aligning optoelectronic device |
| CN102672639A (en) * | 2012-05-18 | 2012-09-19 | 江苏格雷特机器人有限公司 | Clamp special for manufacturing optical fiber connector |
| CN103513335A (en) * | 2013-10-09 | 2014-01-15 | 中南大学 | Array waveguide device alignment method and device based on coupling model |
| CN104007522A (en) * | 2014-05-26 | 2014-08-27 | 上海大学 | Coupling and packing system and method for full-automatic PLC subdivider |
| CN104914520A (en) * | 2015-05-25 | 2015-09-16 | 中南大学 | Automatic coupling device of three-in-one coaxial type photoelectronic device |
| CN105336748A (en) * | 2012-01-18 | 2016-02-17 | 斯考皮欧技术有限公司 | Vertical integration of CMOS electronics with photonic devices |
| CN105945841A (en) * | 2016-06-28 | 2016-09-21 | 深圳市顶点视觉自动化技术有限公司 | Three-freedom-degree center oscillation platform |
| CN107507789A (en) * | 2017-08-03 | 2017-12-22 | 宁波尚进自动化科技有限公司 | One kind rotation grain-clamping table |
| CN111590308A (en) * | 2020-05-29 | 2020-08-28 | 成都优博创通信技术有限公司 | Processing table |
| CN113634894A (en) * | 2021-08-30 | 2021-11-12 | 中南大学 | Automatic optical fiber tube penetrating and packaging device and using method thereof |
| US11183492B2 (en) | 2010-12-08 | 2021-11-23 | Skorpios Technologies, Inc. | Multilevel template assisted wafer bonding |
| CN114952288A (en) * | 2022-07-27 | 2022-08-30 | 深圳皓影医疗科技有限公司 | Ultrasonic transducer's assembly quality |
| US11482513B2 (en) | 2009-10-13 | 2022-10-25 | Skorpios Technologies, Inc. | Heterogeneous substrate bonding for photonic integration |
-
2008
- 2008-09-10 CN CN2008101431803A patent/CN101349786B/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11482513B2 (en) | 2009-10-13 | 2022-10-25 | Skorpios Technologies, Inc. | Heterogeneous substrate bonding for photonic integration |
| US11183492B2 (en) | 2010-12-08 | 2021-11-23 | Skorpios Technologies, Inc. | Multilevel template assisted wafer bonding |
| CN102221734B (en) * | 2011-06-14 | 2012-11-07 | 中南大学 | SDOF (Single Degree of Freedom) jogging platform for packaging and aligning optoelectronic device |
| CN102221734A (en) * | 2011-06-14 | 2011-10-19 | 中南大学 | SDOF (Single Degree of Freedom) jogging platform for packaging and aligning optoelectronic device |
| CN105336748B (en) * | 2012-01-18 | 2019-05-03 | 斯考皮欧技术有限公司 | The Vertical collection of CMOS electronic device and photonic device |
| CN105336748A (en) * | 2012-01-18 | 2016-02-17 | 斯考皮欧技术有限公司 | Vertical integration of CMOS electronics with photonic devices |
| CN102672639A (en) * | 2012-05-18 | 2012-09-19 | 江苏格雷特机器人有限公司 | Clamp special for manufacturing optical fiber connector |
| CN103513335A (en) * | 2013-10-09 | 2014-01-15 | 中南大学 | Array waveguide device alignment method and device based on coupling model |
| CN103513335B (en) * | 2013-10-09 | 2017-03-15 | 中南大学 | A kind of array waveguide device alignment methods and device based on coupling model |
| CN104007522A (en) * | 2014-05-26 | 2014-08-27 | 上海大学 | Coupling and packing system and method for full-automatic PLC subdivider |
| CN104007522B (en) * | 2014-05-26 | 2016-02-17 | 上海大学 | Full-automatic PLC shunt coupling package system and method |
| CN104914520A (en) * | 2015-05-25 | 2015-09-16 | 中南大学 | Automatic coupling device of three-in-one coaxial type photoelectronic device |
| CN104914520B (en) * | 2015-05-25 | 2016-07-06 | 中南大学 | A kind of three-body type coaxial type opto-electronic device automatic coupling device |
| CN105945841A (en) * | 2016-06-28 | 2016-09-21 | 深圳市顶点视觉自动化技术有限公司 | Three-freedom-degree center oscillation platform |
| CN107507789A (en) * | 2017-08-03 | 2017-12-22 | 宁波尚进自动化科技有限公司 | One kind rotation grain-clamping table |
| CN111590308A (en) * | 2020-05-29 | 2020-08-28 | 成都优博创通信技术有限公司 | Processing table |
| CN111590308B (en) * | 2020-05-29 | 2021-10-08 | 成都优博创通信技术有限公司 | Processing table |
| CN113634894A (en) * | 2021-08-30 | 2021-11-12 | 中南大学 | Automatic optical fiber tube penetrating and packaging device and using method thereof |
| CN113634894B (en) * | 2021-08-30 | 2022-04-22 | 中南大学 | Automatic optical fiber tube penetrating and packaging device and using method thereof |
| CN114952288A (en) * | 2022-07-27 | 2022-08-30 | 深圳皓影医疗科技有限公司 | Ultrasonic transducer's assembly quality |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101349786B (en) | 2010-09-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101349786B (en) | Automatic alignment mechanical device of integrated photon chip and array optical fiber | |
| CN100592117C (en) | Automatic alignment apparatus of integrated photon chip and array optical fiber | |
| CN101498816A (en) | Mechanical device for high-precision auto-alignment package of waveguide device | |
| CN102869949B (en) | Surface sensing device with optical monitoring system | |
| CN204694882U (en) | A kind of fused fiber splice machine core | |
| EP1284426B1 (en) | Method of manufacturing optical waveguide device by use of a jig | |
| US5022619A (en) | Positioning device of table for semiconductor wafers | |
| US7346242B2 (en) | Optical connector assembly, coupling device and method for aligning such a coupling device and a waveguide structure | |
| CN105372760B (en) | A kind of light shutter device automatic coupling and uv cure system based on relay | |
| CN110058355A (en) | A kind of automatic coupling device and automatic coupling method | |
| JP6550438B2 (en) | Optical transmission and reception optical assembly | |
| CN101363947B (en) | Multi-dimensions aligning platform for array wave-guide device | |
| CN2784875Y (en) | Novel micro three-dimensional topography measurer based on fiber-optic image bundles | |
| CN105204125A (en) | Automatic coupling system of reflection-type optoelectronic device | |
| CN1987342A (en) | Digital electronic cutting speckle interferometer | |
| CN104471457B (en) | Optical module and the method being used for assembling optical module | |
| CN116136394B (en) | Laser measuring head device integrating dotted line and double modes and structural curved surface measuring method | |
| CN107398637A (en) | A kind of coupling welding machine | |
| KR900008299B1 (en) | Measuring method and apparatus of light fiber | |
| AU2020100781A4 (en) | A multi-core optical fiber exchanger based on an MEMS reflectors array | |
| US6681496B2 (en) | Method of active fiber alignment with movable V-groove precision control microstructures | |
| CN102221734A (en) | SDOF (Single Degree of Freedom) jogging platform for packaging and aligning optoelectronic device | |
| CN216526405U (en) | Micro-lens coupling optical path system and micro-lens coupling device | |
| CN207139107U (en) | A kind of coupling welding machine | |
| CN2533484Y (en) | Mechanical photoswitch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100929 Termination date: 20200910 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |