CN101338966A - Pressure storage type uniform air cooling structure - Google Patents

Pressure storage type uniform air cooling structure Download PDF

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Publication number
CN101338966A
CN101338966A CNA2007101229342A CN200710122934A CN101338966A CN 101338966 A CN101338966 A CN 101338966A CN A2007101229342 A CNA2007101229342 A CN A2007101229342A CN 200710122934 A CN200710122934 A CN 200710122934A CN 101338966 A CN101338966 A CN 101338966A
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China
Prior art keywords
exhaust
pressure
storage type
air cooling
pressure accumulation
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CNA2007101229342A
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Chinese (zh)
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CN101338966B (en
Inventor
巫吉生
赖志勇
张义斌
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ZHISHENG INDUSTRY Co Ltd
C Sun Manufacturing Ltd
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ZHISHENG INDUSTRY Co Ltd
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Publication of CN101338966A publication Critical patent/CN101338966A/en
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Publication of CN101338966B publication Critical patent/CN101338966B/en
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Abstract

The invention provides a pressure accumulation homogeneous air cooling structure, which comprises an inlet end, an outlet end, and a processing area arranged between the inlet end and the outlet end. The inlet end is provided with a pressure accumulation space. A pressure accumulation plate is arranged between the pressure accumulation space and the processing area. Thus, air coming into the pressure accumulation space from the inlet end can be stored in the accumulation space for accumulation of pressure; after the air pressure reaches the rated value of the pressure accumulation plate, air flows into the processing area uniformly. The pressure accumulation homogeneous air cooling structure improves the defects of the prior manufacturing equipment that uniformity of cooling air flow varies with the distance from the air inlet and the air outlet, and the yield of products is reduced due to ineffective heat elimination.

Description

Pressure storage type uniform air cooling structure
Technical field
The present invention relates to a kind of pressure storage type uniform air cooling structure.
Background technology
Shine the object of corresponding energy gap with the light source of CF, can make the electronics that is positioned at valence band originally jump to the conduction band, producing bigger activity and specific reaction, the processing mode that this kind utilizes specific light source to shine, applied to widely various manufacturing equipment in;
Operation high-frequency light source, during for example ultraviolet contour frequency light source, considerable heat is supervened in inevasible meeting, these heats often are not needed in the manufacturing, or even must avoid in making, therefore various cooling design just needs to arrange in pairs or groups in the manufacturing equipment, wherein more common is air cooling system, by equipment such as compressors cryogenic gas is imported in the manufacturing equipment, so that be subjected to the objects such as substrate of illumination, can take away unnecessary heat by air-flow, make objects such as substrate can keep at a certain temperature, to keep product quality;
Existing manufacturing equipment cooling device such as U.S. Pat 3994073, US4646446 number etc., it is all simply with a compressor or air blast, cryogenic gas is blown into the treatment region of manufacturing equipment by an inlet end, gas after by exhaust end temperature being raise is again discharged, this kind mode is if be used on the manufacturing equipment with larger process district, then inlet end is nearer with at a distance from air inlet, its gas pressure distributes obviously different, so its gas flow of flowing through differs a lot of, cause the air-flow of treatment region inhomogeneous, and then make and differed by the object radiating effects such as substrate of illumination, the part substrate can't efficiently radiates heat, and the not good yield of quality descends;
Moreover, existing structure also has the uneven problem of identical air-flow at exhaust end, if the treatment region space is bigger, then slower away from the gas flow rate of exhaust end exhaust ports, and very fast near the gas flow rate of exhaust ports, so more can worsen the uneven situation of air-flow.
Summary of the invention
Technical problem underlying to be solved by this invention is, overcome the above-mentioned defective that prior art exists, and provide a kind of pressure storage type uniform air cooling structure, it can improve that existing manufacturing equipment cold gas fails to be convened for lack of a quorum can't be even along with the distance of distance air inlet, exhaust outlet, and radiating effect is not good to make degradation shortcoming under the product yield.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of pressure storage type uniform air cooling structure is characterized in that, its body has an inlet end, an exhaust end, and a treatment region that is positioned between inlet end and exhaust end, and this inlet end is provided with a pressure accumulation space, is provided with a pressure accumulation plate between this pressure accumulation space and the treatment region; Whereby, the gas that makes inlet end feed the pressure accumulation space can store up and be pressed in the pressure accumulation space, treats that air pressure evenly flows to treatment region again when arriving the rated value of pressure accumulation plate.
Aforesaid pressure storage type uniform air cooling structure, wherein exhaust end has an exhaust outlet, and exhaust outlet and treatment region are separated with a wind net, this wind has several pores that varies in size on the net, the big or small arrangement mode of this pore is less near the pore of exhaust outlet, away from the bigger mode of the pore of exhaust outlet.
Aforesaid pressure storage type uniform air cooling structure, wherein exhaust end is provided with an exhaust space and an exhaust outlet, and this exhaust space is less away from exhaust ports, and near the bigger form of exhaust ports.
Aforesaid pressure storage type uniform air cooling structure, wherein exhaust end is provided with a wind net exhaust outlet, exhaust space and treatment region is separated, the size of the corresponding exhaust space of this wind net and oblique arrangement.
Aforesaid pressure storage type uniform air cooling structure, wherein inlet end is provided with an aeroscopic plate.
Aforesaid pressure storage type uniform air cooling structure, wherein body is a ultraviolet multihearth.
Aforesaid pressure storage type uniform air cooling structure, wherein aeroscopic plate can be vertically and laterally is crisscross arranged.
Aforesaid pressure storage type uniform air cooling structure, wherein the pressure accumulation plate is replaceable is the pressure accumulation plate of different specified blast.
Aforesaid pressure storage type uniform air cooling structure, wherein the pressure accumulation plate is replaceable is the pressure accumulation plate of different nominal air deliveries.
Aforesaid pressure storage type uniform air cooling structure, wherein aeroscopic plate can be adjusted wind direction by different switching degree.
By above-mentioned structure, when sub-cooled gas is blown into the pressure accumulation space of inlet end by air blast by air inlet, this gas can be cut off by the pressure accumulation plate resistance earlier and can't flow to treatment region at once, when treating that gas pressure in the pressure accumulation space is increased to the rated value of pressure accumulation plate gradually, gas can pass through the pressure accumulation plate, and flow in each disposable plates of body treatment region via the directional trim of aeroscopic plate, the gas of this moment is because of being collected to earlier higher air pressure in the pressure accumulation space, so the gas pressure in the whole pressure accumulation space is the state that is evenly distributed, distribution of gas in the pressure accumulation space does not have pressure differential, therefore the sub-cooled gas that flows to each disposable plates of body treatment region also presents the situation of an even no difference in flow, and each disposable plates cooling-down effect can effectively be provided; And cross disposable plates and after absorbing heat when air communication, it can be discharged by the exhaust outlet of exhaust end, this exhaust end is provided with a wind net between exhaust space and treatment region, the pore of this wind net is to be bigger away from the air vent aperture of exhaust outlet, and the less arrangement mode of air vent aperture of close exhaust outlet, therefore less, bigger near the suffered resistance of air-flow of exhaust ports away from the suffered resistance of the air-flow of exhaust ports, so also can put down, and make the air-flow of each disposable plates of treatment region when discharging, also keep uniform state towards the pressure differential at exhaust end exhaust space place.
The invention has the beneficial effects as follows that it can improve that existing manufacturing equipment cold gas fails to be convened for lack of a quorum can't be even along with the distance of distance air inlet, exhaust outlet, radiating effect is not good to make degradation shortcoming under the product yield.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is the decomposition texture schematic diagram of pressure storage type uniform air cooling structure of the present invention.
One of Fig. 1 is the local enlarged diagram of the horizontal air guide port of aeroscopic plate of pressure storage type uniform air cooling structure of the present invention.
Fig. 2 is the stereoscopic schematic diagram of pressure storage type uniform air cooling structure of the present invention.
Fig. 3 is the stereoscopic schematic diagram of another angle of pressure storage type uniform air cooling structure of the present invention.
One of Fig. 3 is the local enlarged diagram of the vertical air guide port of aeroscopic plate of pressure storage type uniform air cooling structure of the present invention.
Fig. 4 is the schematic diagram of pressure storage type uniform air cooling structure treatment region installing disposable plates of the present invention.
Fig. 5 is the schematic diagram of pressure storage type uniform air cooling structure uniform air flow direction of the present invention.
The number in the figure explanation:
1---body 10---treatment region
101---disposable plates
102---air blast 20---inlet end
21---air inlet
22---pressure accumulation space 23---pressure accumulation plate
24---aeroscopic plate
241---air guide port 242---air guide port
30---exhaust end
31---exhaust outlet 32---exhaust space
33---the wind net
331---pore
The specific embodiment
The present invention is a kind of pressure storage type uniform air cooling structure, see also Fig. 1 to shown in Figure 3, this pressure storage type uniform air cooling structure mainly comprises the body 1 of a manufacturing equipment, and this body 1 is to be that structure describes with a ultraviolet multihearth in the present embodiment, but not as limit;
This body 1 mainly has a treatment region 10, this treatment region 10 can be for several disposable plates 101 movable settings, can install uviol lamp and carrier etc. in this disposable plates 101 and make dependency structure, this body 1 below is provided with an air blast 102 (seeing also Fig. 5) in addition, this is general existing ultraviolet multihearth structural design, does not repeat them here.
These body 1 treatment region 10 1 sides are to be provided with an inlet end 20, and this inlet end 20 has an air inlet 21 and a pressure accumulation space 22, make the low-temperature airflow of air blast 102 be entered among the pressure accumulation space 22 by air inlet 21; Be provided with pressure accumulation plate 23 and aeroscopic plate 24 between this pressure accumulation space 22 and the treatment region 10, this pressure accumulation plate 23 only can pass through by air feed stream when pressure accumulation space 22 internal gas pressures reach default rated value, and visual different demand and replace the pressure accumulation plate 23 of different specified blast or air quantity, this aeroscopic plate 24 then as one of Fig. 1 and Fig. 33 shown in, it is can be set to laterally with vertical, and forming horizontal air guide port 241 and air guide port 242 longitudinally, also visual its required and switching degree of adjusting aeroscopic plate 24 of user is to adjust wind direction;
These body 1 treatment region 10 opposite sides are provided with an exhaust end 30, and this exhaust end 30 has an exhaust outlet 31 and an exhaust space 32, and this exhaust outlet 31 can be discharged the gas that absorbs treatment region 10 heats; Be to be provided with wind net 33 between this exhaust space 32 and the treatment region 10, borrow this wind net 33 that treatment region 10 and exhaust outlet 31 are separated, and this wind net 33 is provided with the pore 331 that several exhausts are used, this pore 331 can be square, circular, or shape such as ellipse, the size of this pore 331 is not quite similar, the big or small arrangement mode of this pore 331 is less near the pore 331 of exhaust outlet 31, away from the bigger mode of the pore 331 of exhaust outlet 31, that is pore 331 is more less near the aperture of exhaust outlet 31, and bigger away from the aperture of exhaust outlet 31.
Please cooperate again and consult Fig. 4 and shown in Figure 5, the present invention in use, this treatment region 10 can be inserted several disposable plates 101 as shown in Figure 4 simultaneously to raise the efficiency, and each disposable plates 101 is because of the position difference of distance inlet end 20 air inlets 21, exhaust end 30 exhaust outlets 31, so need by inlet end 20 of the present invention, the exhaust end 30 particular design flow with even refrigerating gas;
As shown in Figure 5, when sub-cooled gas is blown into the pressure accumulation space 22 of inlet end 20 by air blast 102 by air inlet 21, this gas can be blocked by pressure accumulation plate 23 earlier and can't flow to treatment region 10 at once, when treating that pressure accumulation space 22 interior gas pressures are increased to the rated value of pressure accumulation plate 23 gradually, gas can pass through pressure accumulation plate 23, and flow in body 1 treatment region 10 each disposable plates 101 via the directional trim of aeroscopic plate 24, the gas of this moment is because of being collected to earlier higher air pressure in pressure accumulation space 22, so the gas pressure in the whole pressure accumulation space 22 is the state that is evenly distributed, distribution of gas in the pressure accumulation space 22 does not have pressure differential, therefore the sub-cooled gas that flows to body 1 treatment region 10 each disposable plates 101 also presents the situation of an even no difference in flow, and can effectively make each disposable plates 101 reach cooling-down effect;
Moreover, when air communication cross disposable plates 101 and absorb heat after, it can be discharged by the exhaust outlet 31 of exhaust end 30, this exhaust end 30 is to be provided with a wind net 33 between exhaust space 32 and treatment region 10, the pore 331 of this wind net 33 is to be bigger away from pore 331 apertures of exhaust outlet 31, and the less arrangement mode in pore 331 apertures of close exhaust outlet 31, therefore less away from the suffered resistance of air-flow at exhaust outlet 31 places, the suffered resistance of air-flow near exhaust outlet 31 places is bigger, so also can put down, and make the air-flow of treatment region 10 each disposable plates 101 when discharging, also keep uniform state towards the pressure differential at exhaust end 30 exhaust spaces 32 places.
Exhaust end 30 of the present invention is except that first embodiment adopts the wind net 33 of the pore 331 that varies in size, also this exhaust space 32 can be embodied as away from exhaust outlet 31 places less, and near the bigger form in exhaust outlet 31 places, size variation by accommodation space, offset apart from the exhaust outlet 31 far and near different flow velocity differences that caused, or cooperate the wind net 33 that is obliquely installed again, so also can reach the effect identical with first embodiment.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, every foundation technical spirit of the present invention all still belongs in the scope of technical solution of the present invention any simple modification, equivalent variations and modification that above embodiment did.
In sum, the present invention is on structural design, use practicality and cost benefit, it is required to meet industry development fully, and the structure that is disclosed also is to have unprecedented innovation structure, have novelty, creativeness, practicality, the regulation that meets relevant patent of invention important document is so mention application in accordance with the law.

Claims (10)

1. a pressure storage type uniform air cooling structure is characterized in that, its body has an inlet end, an exhaust end, and a treatment region that is positioned between inlet end and exhaust end, and this inlet end is provided with a pressure accumulation space, is provided with a pressure accumulation plate between this pressure accumulation space and the treatment region;
Whereby, the gas that makes inlet end feed the pressure accumulation space can store up and be pressed in the pressure accumulation space, treats that air pressure evenly flows to treatment region again when arriving the rated value of pressure accumulation plate.
2. pressure storage type uniform air cooling structure according to claim 1, it is characterized in that described exhaust end has an exhaust outlet, and exhaust outlet and treatment region are separated with a wind net, this wind has several pores that varies in size on the net, the big or small arrangement mode of this pore is less near the pore of exhaust outlet, away from the bigger mode of the pore of exhaust outlet.
3. pressure storage type uniform air cooling structure according to claim 1 is characterized in that described exhaust end is provided with an exhaust space and an exhaust outlet, and this exhaust space is less away from exhaust ports, and near the bigger form of exhaust ports.
4. pressure storage type uniform air cooling structure according to claim 3 is characterized in that described exhaust end is provided with a wind net exhaust outlet, exhaust space and treatment region are separated, the size of the corresponding exhaust space of this wind net and oblique arrangement.
5. according to claim 1,2,3 or 4 described pressure storage type uniform air cooling structures, it is characterized in that described inlet end is provided with an aeroscopic plate.
6. according to claim 1,2,3 or 4 described pressure storage type uniform air cooling structures, it is characterized in that described body is a ultraviolet multihearth.
7. pressure storage type uniform air cooling structure according to claim 5 is characterized in that described aeroscopic plate can be vertically and laterally is crisscross arranged.
8. pressure storage type uniform air cooling structure according to claim 1 is characterized in that described pressure accumulation plate is replaceable and is the pressure accumulation plate of different specified blast.
9. pressure storage type uniform air cooling structure according to claim 1 is characterized in that described pressure accumulation plate is replaceable and is the pressure accumulation plate of different nominal air deliveries.
10. pressure storage type uniform air cooling structure according to claim 5 is characterized in that described aeroscopic plate can adjust wind direction by different switching degree.
CN2007101229342A 2007-07-05 2007-07-05 Pressure storage type uniform air cooling structure Expired - Fee Related CN101338966B (en)

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Application Number Priority Date Filing Date Title
CN2007101229342A CN101338966B (en) 2007-07-05 2007-07-05 Pressure storage type uniform air cooling structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2007101229342A CN101338966B (en) 2007-07-05 2007-07-05 Pressure storage type uniform air cooling structure

Publications (2)

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CN101338966A true CN101338966A (en) 2009-01-07
CN101338966B CN101338966B (en) 2010-06-23

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105674376A (en) * 2016-03-10 2016-06-15 祝铭泽 Solid heat storage device
CN105783564A (en) * 2016-03-10 2016-07-20 祝铭泽 Solid heat storage device
CN106679184A (en) * 2017-02-27 2017-05-17 广东万家乐燃气具有限公司 Smoke-recyclable gas instantaneous water heater
CN110332587A (en) * 2019-07-05 2019-10-15 河北建筑工程学院 Hold over system and heating equipment

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2463768Y (en) * 2001-02-07 2001-12-05 青岛海洋化工有限公司 Drying tunnel
CN2543007Y (en) * 2002-03-05 2003-04-02 文登市宏达机械设备总厂 Cocoon drying machine
CN2795229Y (en) * 2005-01-12 2006-07-12 宝山钢铁股份有限公司 Air jet cooler

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105674376A (en) * 2016-03-10 2016-06-15 祝铭泽 Solid heat storage device
CN105783564A (en) * 2016-03-10 2016-07-20 祝铭泽 Solid heat storage device
CN106679184A (en) * 2017-02-27 2017-05-17 广东万家乐燃气具有限公司 Smoke-recyclable gas instantaneous water heater
CN110332587A (en) * 2019-07-05 2019-10-15 河北建筑工程学院 Hold over system and heating equipment

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