CN101325239A - Bounce type actuator and minisize motor as well as use thereof - Google Patents
Bounce type actuator and minisize motor as well as use thereof Download PDFInfo
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- CN101325239A CN101325239A CN 200710108462 CN200710108462A CN101325239A CN 101325239 A CN101325239 A CN 101325239A CN 200710108462 CN200710108462 CN 200710108462 CN 200710108462 A CN200710108462 A CN 200710108462A CN 101325239 A CN101325239 A CN 101325239A
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Abstract
The invention relates to a bounce drive actuator (BDA) and a BDA micromotor, and application thereof. The BDA comprises at least one BDA shaft bush with height-to-width ratio less than 1; and at least one BDA flat plate with length less than 75mum. The inventive BDA micromotor comprises at least one BDA, which is composed of a BDA shaft bush with height-to-width ratio less than 1 and a BDA flat plate with length less than 75mum. The inventive BDA and BDA micromotor can be used for assembly of scratch drive actuator (SDA) components and micro-optical communication switches. The inventive BDA adopts a creative design of adjoining a rib with an inner ring as well as a lead angle design, so that the BDA micromotor has longer component service life (more than 100 hours) and higher rotational speed (higher than 30rpm).
Description
Technical field
The present invention relates to a kind of with MEMS (micro electro mechanical system) (Micro electromechanical Systems; MEMS) the miniature rotation motor of fabrication techniques (Micro Rotary Motor), it utilizes bounce type actuator (BDA) driving mechanism and characteristic to improve shortcomings such as the assembly life-span weak point of conventional electrostatic formula driving micro motor, driving voltage height.
Background technology
The microminiaturization technology is the main trend of current science.Known to the public, being integrated circuit (IC) technology and MEMS (micro electro mechanical system) (MEMS) technology the most, also is lead us over the years recently, probes into the preliminary technology in the small world together.
Traditional micro-holding type actuator (Scratch Drive Actuator; SDA) have and accurately to locate and the engineering properties of linear stepping.
As shown in Figure 1, point out that in the research that Bright (Bu Laite) and Linderman (Li Deman) are done under the situation at given driving voltage, dull and stereotyped 6 bendings of SDA make tail end can adsorb action earlier, and contact silicon nitride dielectric layer 2, be called folding and bend action (snaping); When voltage is increased to absorption voltage (PrimingVoltage), the SDA main body produces moderate finite deformation because of electrostatic force, SDA dull and stereotyped 6 can large tracts of land contact silicon nitride dielectric layer 2, and after removing given voltage, be stored in support cantilever beam, SDA dull and stereotyped 6 and tensile stress energy in the SDA axle bush 14 and will promote SDA flat board 6 and move forward and finish step motion one time.
Propose for (coming from the analog results that the people did such as R.J.Linderman and V.M.Bright) in the optimum size document formerly of SDA flat board, be long 78 μ m, wide 65 μ m.
Now developed the miniature rotation motor (Micro Rotary Motor) that utilizes the SDA actuator to be configured to, and the mini-fan (Micro Fan) of present whole world minimum, be of a size of 2mm * 2mm, it utilizes self-packaging technology to increase flabellum at SDA micro motor outer shroud and makes.
The manufacture process of SDA actuator adopts multi-user MEMS processing procedure (the Polysilicon-based surface micromachining Multi-User MEMS Processes of polycrystalline silicon face process technology; MUMPs).
But is micro motor or the mini-fan that main body drives with SDA at present, assembly life-span is short, driving voltage is high because of existing, and has problem such as moment reversal development, has limited its application on commercial product.
Again as shown in Figure 2, the junction of traditional SDA dull and stereotyped 6 and SDA support cantilever beam 7 is because of the flexural rigidity deficiency, so be easy to cause fracture because reverse.
Summary of the invention
At the problems referred to above, main purpose of the present invention is to provide a kind of bounce type actuator (Bounce DriveActuator; BDA) with micro motor and application thereof, it can greatly prolong assembly life-span, improves rotating speed, reduce driving voltage, and realizes the continuity of rotation direction.
For achieving the above object, the present invention by the following technical solutions: a kind of bounce type actuator is characterized in that comprising: at least one BDA axle bush, the ratio value of the height and the width of described BDA axle bush is less than 1; At least one BDA flat board, the length of described BDA flat board is less than 75 μ m.
In the invention described above technical scheme, after described actuator applies driving voltage, described BDA flat back contacts the frictional force of described insulating barrier less than the frictional force of described BDA axle bush to described insulating barrier, described BDA flat board is bent upwards and only with rear end small size contact, cause described BDA axle bush to be extruded and in contract; After the voltage shift that applies removed, described BDA flat back contacted the frictional force of described insulating barrier just greater than the frictional force of described BDA axle bush to described insulating barrier, and the tension force of storage makes described actuator eject backward with the pattern of flip-over type.
In the invention described above technical scheme, described actuator is for being fixedly linked on a BDA support cantilever beam, and junction has the lead angle design therebetween.
The present invention can be used for little modular construction assembling and low-light communication switch of exerting oneself.
The present invention also provides a kind of bounce type actuating minisize motor, it is characterized in that comprising: at least one bounce type actuator, described bounce type actuator is made of a BDA axle bush and a BDA flat board, and the height to width ratio of described BDA axle bush is less than 1, and the length of described BDA flat board is less than 75 μ m.
In the above-mentioned bounce type actuating minisize motor, described micro motor be made as the making bounce type actuator, comprise forming one polysilicon structure, two road oxidation sacrifice layers, one insulating barrier with metallic film.
In the above-mentioned bounce type actuating minisize motor, described micro motor utilization oneself packaging technology is combined with a plurality of minitype flabellums, and links with the pi contact therebetween.
Adopt technique scheme, the present invention compares with traditional SDA actuator, have broad and short BDA axle bush, make the forward frictional force of BDA axle bush and insulating barrier increase, the dull and stereotyped length of the BDA of the present invention that arranges in pairs or groups again designs less than 75 μ m, make when given identical driving voltage, the BDA flat board has better flexural rigidity than traditional SDA flat board, therefore after applying driving voltage, the frictional force of BDA flat back contact insulation layer is less than the frictional force of BDA axle bush to insulating barrier, the BDA flat board is bent upwards and only with rear end small size contact insulation layer earlier, so cause the BDA axle bush to be extruded and in contract; After the voltage shift that applies removed, the frictional force of BDA flat back contact insulation layer was just greater than the frictional force of BDA axle bush to insulating barrier, and the tension force of storage will make actuator eject backward with the pattern of flip-over type.Contact area just because of BDA flat board of the present invention is less, so can reduce the insulating barrier abrasion, make micro motor or mini-fan have long assembly life-span (＞100hrs), high rotational speed (＞30rpm), lower driving voltage, and can realize the continuity of rotation direction, overcome many deficiencies of existing SDA actuator, had vast market prospect.
Description of drawings
Fig. 1 is the action diagram of traditional SDA actuator;
Fig. 2 is the section of structure of traditional SDA micro motor;
Fig. 3 is the section of structure of BDA micro motor of the present invention;
Fig. 4 is a lead angle design diagram of the present invention;
Fig. 5 is traditional SDA and BDA axle bush height of the present invention, wide ratio schematic diagram;
Fig. 6 is the action diagram of BDA actuator;
Fig. 7 A is the structural representation of BDA micro motor of the present invention;
Fig. 7 B is the structure cutaway view of BDA micro motor of the present invention;
Fig. 8 A, Fig. 8 B are BDA micro motor process steps schematic diagrames of the present invention;
Fig. 9 is the relation table of motor rotary speed with respect to dull and stereotyped length;
Figure 10 is the relation table of rotating speed with respect to driving frequency;
Figure 11 is the enforcement schematic diagram that BDA of the present invention applies to mini-fan.
Embodiment
Now lifting following examples also is elaborated to structure of the present invention, effect and characteristics in conjunction with the accompanying drawings.
As Fig. 2, shown in Figure 3, can more traditional micro-holding type actuator (SDA) micro motor and the difference that on agent structure, exists of bounce type actuator (BDA) micro motor:
The present invention can not cause fracture because of reversing in order to make BDA support cantilever beam 9, utilize the 3rd layer of polysilicon 5 BDA of construction simultaneously flat boards 8, BDA support cantilever beam 9, interior ring 10 and loam cake 12 especially, and with a framing system 11 adjoin in the ring 10, thus, can increase the flexural rigidity and the raising assembly life-span of BDA micro motor.
As shown in Figure 4, be the lead angle 13 of innovative design of the present invention, lead angle 13 is in order to increase the structural strength of BDA support cantilever beam 9, to make BDA flat board 8 under the situation that activates, can not causing component faults to lose efficacy because of twisting and breaking.Lead angle 13 can clearly be observed by sweep electron microscope.
Ring 10 the design and the design of lead angle 13 in framing system 11 of the present invention adjoins, make the BDA micro motor have longer assembly life-span (＞100 hours) and higher rotating speed (＞30rpm).
As shown in Figure 5, (a) and (b) are traditional SDA and BDA axle bush height of the present invention, wide ratio schematic diagram and section of structure among Fig. 5, and by can finding out significantly among the figure that BDA flat board 8 is shorter than SDA dull and stereotyped 6, and BDA axle bush 15 is also short and wide than SDA axle bush 14.
As shown in Figure 6, be motion mode of the present invention, because the length of BDA flat board 8 of the present invention is shorter than traditional SDA dull and stereotyped 6, so have flexural rigidity preferably, and after applying driving voltage, the frictional force of the dull and stereotyped 8 back end in contact silicon nitride dielectric layers 2 of BDA is less than the frictional force of 15 pairs of silicon nitride dielectric layers 2 of BDA axle bush, BDA flat board 8 is bent upwards and only with the minimum area contact silicon nitride dielectric layer 2 of rear end earlier, so cause BDA axle bush 15 to be extruded and in contract.After the voltage shift that applies removed, the frictional force of the dull and stereotyped 8 back end in contact silicon nitride dielectric layers 2 of BDA was just greater than the frictional force of 15 pairs of silicon nitride dielectric layers 2 of BDA axle bush, and stored tension force can order about actuator and eject backward with the pattern of flip-over type.
Shown in Fig. 7 A, Fig. 7 B, layout designs and section of structure for BDA micro motor of the present invention, ring 10 in the present invention is adjoined with framing system 11, and cooperate lead angle 13 to improve component characteristic, avoid BDA support cantilever beam 9 situation that fracture causes component faults to lose efficacy when distortion.
Shown in Fig. 8 A, Fig. 8 B, be the making step of BDA micro motor of the present invention:
(1) use LPCVD (low-pressure chemical vapor deposition) system on silicon substrate 20, to deposit low stress (250MPa) silicon nitride film (Si
3N
4) as insulating barrier 21, and utilize the exposed region of the first road photolithography and dry-etching technology definition silicon substrate 20, as the contact window 22 of bottom electrode silicon substrate.
(2) use LPCVD system deposition ground floor low stress (200MPa) doped polycrystalline silicon film 23, thickness is 1.5 μ m, and chip is inserted horizontal boiler tube carry out phosphorous diffusion and high annealing processing procedure, utilize the outer loop orbit 24 and top electrode zone of the second road photolithography and reaction equation coupled plasma (ICP) dry-etching technology definition BDA micro motor at last.
(3) use PECVD (plasma enhanced chemical vapor deposition) system to deposit the thick ground floor low stress phosphorus silicon thin film 26 of 2 μ m, and utilize the 3rd road photolithography and dry-etching technology to define miniature prominent some contact window 27 and axle bush contact window 28 as ground floor low stress (300MPa) sacrifice layer.
(4) use the LPCVD system to deposit the thick second layer low stress doped polycrystalline silicon film 29 of 2 μ m, and chip is inserted horizontal boiler tube carry out phosphorous diffusion and high annealing processing procedure, utilize the 4th road photolithography and dry-etching technology definition framing system (Rib) 30 at last.
(5) use the PECVD system to deposit the thick second layer low stress phosphorus silicon thin film 31 of 1.5 μ m, and utilize the 5th road photolithography and dry-etching technology to define miniature prominent some contact window 32 and axle bush contact window 34 as second layer low stress sacrifice layer.
(6) then carry out the 6th road optical photomicrography resolution, and utilize dry-etching technology etching anchoring part contact window 35 to define loam cake (cover) figure.
(7) use the LPCVD system to deposit the 3rd layer of thick low stress doped polycrystalline silicon film 36 of 2 μ m as the main structure layer, and chip is inserted horizontal boiler tube carry out phosphorous diffusion and high annealing processing procedure, utilize the main structure zone of the 7th road photolithography and dry-etching technology definition BDA micro motor again, and this main structure zone comprises at least one miniature prominent point 37, cantilever beam 38, interior ring 39, loam cake 40, axle bush 41 and BDA motor rotor 42.
(8) utilize E-beam (electron beam evaporation plating machine) the vapor deposition 200nm/250nm Cr/Au of system metallic film, and utilize the 8th road photolithography and Wet-type etching technology to define top electrode 44 and bottom electrode 45 patterns.
(9) working concentration dilution is 49% HF (hydrofluoric acid) etching ground floor and the main structure layer of second layer low stress phosphorus silicon thin film 26,31 with release BDA micro motor.Through experimental verification, working concentration dilution is that the etch-rate of 49% hydrofluoric acid is fast, but the rapid release structure sheaf, and the effect that reaches is best.
Learn according to kinetic measurement, when dull and stereotyped length during greater than 75 μ m (for example 78～88 μ m), the BDA micro motor presents the characteristic of SDA micro motor and forward running (and have moment counter-rotating), start under given 900Hz, sinusoidal wave 90Vo-p driving voltage, its rotating speed approximately has only 1rpm.And when dull and stereotyped contraction in length arrives less than 75 μ m (for example 68 μ m, 58 μ m or 33 μ m), assembly just presents characteristic and " oppositely " running of BDA micro motor, and under identical driving voltage and frequency, rotating speed can reach more than the 30rpm.Again as shown in Figure 9, be the relation table of rotating speed with respect to dull and stereotyped length, by can obviously finding out in this table, short flat board is under identical driving voltage, and its rotating speed is very fast.
As shown in figure 10, be the relation table of frequency, have linear relationship by given frequency and the rotating speed that can find out the BDA micro motor in this table with respect to rotating speed.
As shown in figure 11, be applied to make mini-fan for BDA micro motor 50.This mini-fan combines BDA micro motor 50 and eight minitype flabellums 51 that utilize self-packaging technology to develop, and the actuating force that the pi contact 52 of connection BDA micro motor 50 and minitype flabellum 51 lifts flabellum then is to utilize the pi material process surface tension that high-temperature baking produced itself.
In addition, the present invention also is applicable to the structure assembling and low-light communication switch of little assembly of exerting oneself.
The above only is a preferable enforcement kenel of the present invention, and all equivalent structures of doing according to specification of the present invention, claims or accompanying drawing change, and all should be included in the scope of patent protection of the present invention.
Claims (8)
1, a kind of bounce type actuator is characterized in that comprising:
At least one BDA axle bush, the ratio value of the height and the width of described BDA axle bush is less than 1;
At least one BDA flat board, the length of described BDA flat board is less than 75 μ m.
2, bounce type actuator as claimed in claim 1, it is characterized in that: after described actuator applies driving voltage, described BDA flat back contacts the frictional force of described insulating barrier less than the frictional force of described BDA axle bush to described insulating barrier, described BDA flat board is bent upwards and only with rear end small size contact, cause described BDA axle bush to be extruded and in contract; After the voltage shift that applies removed, described BDA flat back contacted the frictional force of described insulating barrier just greater than the frictional force of described BDA axle bush to described insulating barrier, and the tension force of storage makes described actuator eject backward with the pattern of flip-over type.
3, bounce type actuator as claimed in claim 1 is characterized in that: described actuator is for being fixedly linked on a BDA support cantilever beam, and junction has the lead angle design therebetween.
4, bounce type actuator as claimed in claim 1 is used for little modular construction assembling of exerting oneself.
5, bounce type actuator as claimed in claim 1 is used for the low-light communication switch.
6, a kind of bounce type actuating minisize motor is characterized in that comprising:
At least one bounce type actuator, described bounce type actuator is made of a BDA axle bush and a BDA flat board, and the height to width ratio of described BDA axle bush is less than 1, and the length of described BDA flat board is less than 75 μ m.
7, bounce type actuating minisize motor as claimed in claim 6 is characterized in that: described micro motor be made as the making bounce type actuator, comprise forming one polysilicon structure, two road oxidation sacrifice layers, one insulating barrier with metallic film.
8, bounce type actuating minisize motor as claimed in claim 6 is characterized in that: described micro motor utilization oneself packaging technology is combined with a plurality of minitype flabellums, and links with the pi contact therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710108462 CN101325239B (en) | 2007-06-14 | 2007-06-14 | Bounce type actuator and minisize motor as well as use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710108462 CN101325239B (en) | 2007-06-14 | 2007-06-14 | Bounce type actuator and minisize motor as well as use thereof |
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| Publication Number | Publication Date |
|---|---|
| CN101325239A true CN101325239A (en) | 2008-12-17 |
| CN101325239B CN101325239B (en) | 2011-05-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710108462 Active CN101325239B (en) | 2007-06-14 | 2007-06-14 | Bounce type actuator and minisize motor as well as use thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103197414A (en) * | 2013-03-26 | 2013-07-10 | 北京大学 | Electrostatic drive type miniature torsion device based on electroplating process and preparation method thereof |
| CN105278309A (en) * | 2015-11-30 | 2016-01-27 | 中国科学院重庆绿色智能技术研究院 | Geometric hypersurface-based dynamic holography method |
| CN107346355A (en) * | 2017-06-21 | 2017-11-14 | 中国电子产品可靠性与环境试验研究所 | The stepped micro- fixed beam structure detection method of electrostatic drive and system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201075395Y (en) * | 2007-06-14 | 2008-06-18 | 建凖电机工业股份有限公司 | Bounce type actuator and micromotor |
-
2007
- 2007-06-14 CN CN 200710108462 patent/CN101325239B/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103197414A (en) * | 2013-03-26 | 2013-07-10 | 北京大学 | Electrostatic drive type miniature torsion device based on electroplating process and preparation method thereof |
| CN103197414B (en) * | 2013-03-26 | 2014-01-08 | 北京大学 | Electrostatic drive type miniature torsion device based on electroplating process and preparation method thereof |
| CN105278309A (en) * | 2015-11-30 | 2016-01-27 | 中国科学院重庆绿色智能技术研究院 | Geometric hypersurface-based dynamic holography method |
| CN105278309B (en) * | 2015-11-30 | 2018-03-13 | 中国科学院重庆绿色智能技术研究院 | A kind of dynamic holographic method for surpassing surface based on geometry |
| CN107346355A (en) * | 2017-06-21 | 2017-11-14 | 中国电子产品可靠性与环境试验研究所 | The stepped micro- fixed beam structure detection method of electrostatic drive and system |
| CN107346355B (en) * | 2017-06-21 | 2020-10-30 | 中国电子产品可靠性与环境试验研究所 | Electrostatic driving step type micro-clamped beam structure detection method and system |
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| Publication number | Publication date |
|---|---|
| CN101325239B (en) | 2011-05-18 |
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Address after: The new Taiwan China Ya Lu Kaohsiung City No. 30 Lane 296 Patentee after: Jianzhun Dynamo Ind Co., Ltd. Address before: Are Chinese Taiwan 802 Kaohsiung City No. 120 Lingya District 12 floor Patentee before: Jianzhun Dynamo Ind Co., Ltd. |