CN101319922A - Vaccum bench and method for supporing object - Google Patents
Vaccum bench and method for supporing object Download PDFInfo
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- CN101319922A CN101319922A CNA2008101446438A CN200810144643A CN101319922A CN 101319922 A CN101319922 A CN 101319922A CN A2008101446438 A CNA2008101446438 A CN A2008101446438A CN 200810144643 A CN200810144643 A CN 200810144643A CN 101319922 A CN101319922 A CN 101319922A
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Abstract
The invention discloses a method for supporting an object and a vacuum table. The vacuum table comprises: a vacuum plate comprising a flat upper surface and a first group of holes; a supporting element comprising at least a cavity through which air is pumped; and a replaceable adapter arranged between the supporting element and the vacuum plate; wherein, the replaceable adapter comprises a second group of holes; wherein, the holes of the second group of holes are obviously smaller than the corresponding holes of the first group of holes; wherein, the holes of the second group of holes are at least partial lapped with the holes of the first group of holes; and wherein, the vacuum plate is obviously thicker than the replaceable adapter.
Description
Related application
It is the right of priority of 60/911892 temporary patent application that the application requires in the sequence number that on April 15th, 2007 submitted to, and its content is hereby incorporated by.
Technical field
The present invention relates to vaccum bench and a kind of method of supporting object.
Background technology
In scanning process, the object that is scanned by the high resolving power check system should suitably be kept.These objects are placed on the flat board and by providing vacuum to keep between object and flat board.
Dull and stereotyped being made also by rigid material should have very smooth upper surface.
In order to make flat board, dull and stereotyped necessary thick with very smooth upper surface.Dull and stereotyped thickness limits the minimum dimension and the shape in the hole that can on flat board, form.These restrictions have reflected the ultimate strength of the drill bit that is used for forming these holes.In other words, very thin drill bit can't penetrate the very thick flat board of being made by rigid material.
Vacuum can form by the hole suction air from flat board.The hole that is covered by object (in case object is placed onboard) applies suction to object.The hole that is covered by object does not cause vacuum leak.
Be necessary to reduce vacuum leak by these holes.If the expectation check system is checked the object of identical size and shape, plate can be designed to reduce the quantity in the hole that (perhaps even eliminate) do not covered by object so.
In many cases, check that different objects big or small and shape need independent check system.
Be necessary to provide vaccum bench and a kind of inspection to have the method for the object of different sizes and shape.
Summary of the invention
Vaccum bench comprises: the evacuated panel that comprises smooth upper surface and first group of hole; The supporting element that comprises at least one cavity, air is sucked by this at least one cavity; Be arranged on the interchangeable adapter between supporting element and the evacuated panel; Wherein, described interchangeable adapter comprises second group of hole; Wherein, the hole in described second group of hole is significantly less than the respective aperture in first group of hole; Wherein, overlap at least in the hole in the hole in described second group of hole and first group of hole; And wherein, described evacuated panel is significantly thick than described interchangeable adapter.
A kind of method that is used to support object, described method comprises: select interchangeable adapter according to object features from one group of interchangeable adapter; Chosen interchangeable adapter is placed between evacuated panel and the supporting element; Wherein, described evacuated panel comprises smooth upper surface and first group of hole; Described supporting element comprises at least one cavity, and air is sucked by this at least one cavity; Wherein, selected described interchangeable adapter comprises second group of hole; Wherein, the hole in described second group of hole is significantly less than the respective aperture in first group of hole; Wherein, overlap at least in the hole in the hole in described second group of hole and first group of hole; Wherein, described evacuated panel is significantly thick than described interchangeable adapter; And object is placed on the described evacuated panel, and the hole suction air by described first and second groups of holes.
A kind of object is affixed to method on the check system, described method comprises: the vacuum unit that is suitable for vacuum is incorporated into the evacuated panel that comprises a plurality of holes is provided, and the adapter that comprises the hole is provided, the shape in described hole and size are suitable for reducing the air-flow by evacuated panel; Object is placed on the evacuated panel; And object is attached on the evacuated panel by introducing vacuum.
Description of drawings
The present invention will more fully be understood and understand to following detailed description in conjunction with the drawings, wherein:
Fig. 1 is the exploded view of back-up system according to an embodiment of the invention;
Fig. 2 a and Fig. 2 b are the part of evacuated panel according to an embodiment of the invention and the sectional view of interchangeable adapter;
Fig. 3 a-3c shows the hole according to different embodiments of the invention;
Fig. 4 has shown and a kind ofly according to one embodiment of the invention object has been affixed to method on the check system;
Fig. 5 has shown a kind of method according to an embodiment of the invention.
Embodiment
Be noted that each figure draws in proportion.In addition, for the purpose of simplifying the description, some figure do not comprise all features of shown element.
Plate (being also referred to as evacuated panel) has very smooth upper surface and can support object (such as circuit).This circuit can be carefully closing or the like of printed circuit board (PCB), a plurality of printed circuit board (PCB)s.
Before the evacuated panel is the interchangeable adapter (evacuated panel is placed on the interchangeable adapter that can have aperture) that can have aperture, and the size of this aperture and shape are decided according to size that will be placed on the object on the evacuated panel and shape.Less object may need to comprise the interchangeable adapter than the hole on the zonule that is distributed in interchangeable adapter.When the back-up system support has object than smooth lower surface, can use less hole.Be noted that the size in hole refers to one or more sizes in hole, cross section.It can refer to the area in this hole, the diameter of circular port, the length in elongation thin-and-long hole etc.
The hole of interchangeable adapter can form the combination of elongated slot or a plurality of (partly overlapping) elongated slot.Owing to form air turbulence in its vicinity when these Kong Wei are capped, these shapes in hole have reduced vacuum leak.Therefore, these shapes have reduced the air leakage that is placed on the hole that object covered on the evacuated panel by the end.
Evacuated panel is connected (for example using screw) to supporting element (being also referred to as main body) separably with interchangeable adapter, therefore allows to remove them and replace interchangeable adapter fast.
One group of interchangeable adapter can be provided.Interchangeable adapter can differ from one another owing to the position in its hole, in addition or alternately, interchangeable adapter can differ from one another owing to the size in its hole.Easily, the shape in hole can make interchangeable adapter differ from one another.
Each interchangeable adapter can far be thinner than evacuated panel, because it does not contact object and does not need the same smooth with the upper surface of evacuated panel.Extremely thin interchangeable adapter can comprise aperture even very little hole.Interchangeable adapter can by place it between evacuated panel and the supporting element or by with evacuated panel fastening (or fastening) to supporting element and stretched.
Utilization has according to the shape of object and size determines that the interchangeable adapter in the hole of position and size can reduce vacuum leak and obtain energy-conservation result.In addition or alternately, use aperture or even very little hole can reduce vacuum leak and obtain energy-conservation result.
The hole by making interchangeable adapter and the shape of object and size coupling can reduce the noise level that is generated by vaccum bench.
Interchangeable adapter can be made by durable material (such as stainless steel or other metals).It is very thin, therefore allows to form aperture on interchangeable adapter.
Easily, the shape in the hole in second group of hole and size make and can forms laminar flow when object be on the hole, and if object be not positioned on these holes, then near them, generate turbulent flow (so that the vacuum leak in restricted passage hole).
Fig. 1 is the exploded view of the part 8 of check system according to an embodiment of the invention.
Check system can comprise optical device, image processor, mechanical stage etc.Mechanical stage can be connected on the vaccum bench, especially is connected on the supporting element 30.Check system can scan the object that is placed on the part 8.Object can be attached on the evacuated panel 10 by the distinct methods that comprises vacuum.Evacuated panel 10 (being also referred to as main evacuated panel) has smooth upper surface and first group of hole.Evacuated panel 10 also can comprise fastener hole, and a plurality of screws 12 can insert by this fastener hole.These screws help evacuated panel 10 and interchangeable adapter 20 are connected on the supporting element 30 (being also referred to as main body) separably.Fig. 1 has also shown alignment element 14, and this alignment element is suitable for making object to align with evacuated panel 10.
Interchangeable adapter 20 (being also referred to as sheet metal) comprises a plurality of holes that can form second group of hole.It can also comprise fastener hole.
Evacuated panel 10 is thicker and have a smooth lower surface than interchangeable adapter 20.Supporting element 30 far is thinner than interchangeable adapter 20 and can has flat (such as the flat structures 33 of the bottom that is positioned at recess 32), and this flat is supported the edge of interchangeable adapter 20.When adapter 20 is placed on the flat and under evacuated panel 10 time, and when evacuated panel 10 was secured on the supporting element 30, then interchangeable adapter 20 can be stretched, even did not influence the smooth degree of flat upper surfaces basically.
Supporting element 30 comprises a plurality of vacuum inlets (such as inlet 42), and these a plurality of vacuum inlets are formed in the rectangular slab 40 that is connected to supporting element 30 bottoms.This supporting element has air by its one or more cavitys 31 that are sucked.Interchangeable adapter 20 is placed on the flat structures 33 and covers described one or more cavity 31.At least a portion of interchangeable adapter 20 and evacuated panel 10 is positioned in the recess 32.
In order to reduce vacuum leak, supporting element 30 can comprise a plurality of cavitys, and each cavity receives vacuum separately.These cavitys receive vacuum corresponding to the expectation of object size and shape.
The suction of the air that carries out from these cavitys is first group of hole by evacuated panel 10 and second group of hole suction air by interchangeable adapter 20 just.The hole of interchangeable adapter 20 less than in addition much smaller than the hole of evacuated panel 10 and limited total air flow by these holes.
The hole in second group of hole is significantly less than the respective aperture in first group of hole.Overlap at least in the hole in the hole in second group of hole and first group of hole.
Fig. 2 a has shown when object is not placed on the evacuated panel 10, near the turbulent flow that forms second hole 28.These turbulent flows have reduced the air-flow by second hole 28.
Fig. 2 b has shown the laminar airflow (showing by two horizontal arrows of dotted line) between object 8 upper surfaces and the evacuated panel 10.This stream helps object 8 is remained on the evacuated panel 10.
Fig. 3 a has shown circle first hole 18 of first plate on level second hole 28 that is positioned at interchangeable adapter 20.First hole 18 is much larger than second hole 28, makes the restriction that is subjected to the second less hole 28 by the air-flow in first hole 18.Second hole 28 is positioned at the center in first hole 18, but this is not essential.
Fig. 3 b shown vertical second hole 28 that is positioned at interchangeable adapter 20 ' on circle first hole 18 of first plate.First hole 18 much larger than second hole 28 ', make air-flow by first hole 18 be subjected to the second less hole 28 ' restriction.Second hole 28 ' be positioned at the center in first hole 18, but this is not essential.
Fig. 3 c has shown circle first hole 18 of first plate on a pair of vertical second hole 28 " with a pair of water second hole 28 " that is positioned at interchangeable adapter 20.These holes are approaching each other but not overlapping.They are arranged to the structure of cross-like.The restriction that first hole 18 is much larger than these second holes 28 " each, make that the air-flow by first hole 18 is subjected to the second less hole 28 ".
The institute in second group of hole is porose can be of similar shape and size, but this is not essential, thereby second group of hole can comprise difform hole, in addition or alternately, can comprise the holes of different sizes.
A plurality of holes in second group of hole can have round-shaped, can have the elongated slot shape or the combination of the directed a plurality of elongated slot that are relative to each other.Thereby these a plurality of elongated slot can be overlapped and be formed cruciform, flower shape or the like.
The size in the hole in first group of hole (being formed on the evacuated panel 10) and the thickness of evacuated panel 10 are proportional, and the thickness of the size in the hole in second group of hole (being formed on the interchangeable adapter 20) and interchangeable adapter 20 is proportional.Because interchangeable adapter 20 is much thinner, it can comprise more much smaller hole.
Fig. 4 has shown method 100 according to an embodiment of the invention.
Easily, a plurality of holes have round-shaped.
Easily, a plurality of holes have the elongated slot shape.
Easily, a plurality of holes have the directed a plurality of elongated slot that are relative to each other.
Be that object is placed on step 120 on the evacuated panel after the step 110.
Be object to be affixed to step 130 on the evacuated panel after the step 120 by introducing vacuum.
Fig. 5 has shown method 200 according to an embodiment of the invention.
Easily, different interchangeable adapters allow the air communication of varying level to cross their hole.In response to being placed on the evacuated panel the desired air levels of leakage in the hole that the back expection can not cover by object and execution in step 210 at object by interchangeable adapter.
Easily, the hole of different interchangeable adapters has different sizes.Step 210 is carried out in response to the size in hole.
Easily, the hole of different interchangeable adapters has different sizes.The hole size of selected interchangeable adapter and the smooth degree of object size and object lower are inversely proportional to.
Easily, the hole of different interchangeable adapters has different sizes.The vacuum that step 210 is associated in response to the object with this method placement requires and carries out.
Easily, a plurality of holes in second group of hole have round-shaped.
Easily, a plurality of holes in second group of hole have the elongated slot shape.
Easily, a plurality of holes in second group of hole have the directed a plurality of elongated slot that are relative to each other.
Easily, the size in the hole in first group of hole and the thickness of evacuated panel are proportional, and wherein, the size in the hole in second group of hole and the thickness of interchangeable adapter are proportional.
After the step 210 is step 220, and this step 220 is placed into selected interchangeable adapter between evacuated panel and the supporting element.Evacuated panel comprises smooth upper surface and first group of hole.Supporting element comprises at least one cavity, and air is sucked by this at least one cavity.Selected interchangeable adapter comprises second group of hole.The hole in second group of hole is significantly less than the respective aperture in first group of hole.Overlap at least in the hole in the hole in second group of hole and first group of hole.Evacuated panel is significantly thick than interchangeable adapter.
Easily, thus evacuated panel is detachably connected to and makes interchangeable adapter to be replaced fast by another interchangeable adapter on the supporting element.
Easily, step 220 comprises when evacuated panel is secured to supporting element, stretches chosen interchangeable adapter by evacuated panel and do not influence the smooth degree of flat upper surfaces basically.
After the step 220 is step 230, and this step 230 is organized the hole suction air in hole for object is placed on the evacuated panel and by first and second.
Those of ordinary skill in the art will expect modification, modification and other executive modes of scheme described here and not break away from spirit and scope as the present invention for required protection.Therefore, the present invention does not limit by above exemplary description, but is limited by the essence and the scope of following claim.
Claims (32)
1, vaccum bench comprises:
Evacuated panel, described evacuated panel comprise smooth upper surface and first group of hole;
Supporting element, described supporting element comprises at least one cavity, air is sucked by described at least one cavity; And
Interchangeable adapter, described interchangeable adapter is not put between supporting element and evacuated panel; Wherein, described interchangeable adapter comprises second group of hole; Wherein, the hole in described second group of hole is significantly less than the respective aperture in described first group of hole; Wherein, overlap at least in the hole in the hole in described second group of hole and described first group of hole, and wherein, described evacuated panel is significantly thick than described interchangeable adapter.
2, vaccum bench according to claim 1, wherein, a plurality of holes in described second group of hole have round-shaped.
3, vaccum bench according to claim 1, wherein, a plurality of holes in described second group of hole have the elongated slot shape.
4, vaccum bench according to claim 1, wherein, a plurality of holes in described second group of hole comprise the directed a plurality of elongated slot that are relative to each other.
5, vaccum bench according to claim 1, wherein, described evacuated panel removably is connected to supporting element, thereby interchangeable adapter can be replaced fast by another interchangeable adapter.
6, vaccum bench according to claim 1, wherein, when described evacuated panel was fastened on the supporting element, evacuated panel stretched interchangeable adapter and does not influence the smooth degree of described smooth upper surface basically.
7, vaccum bench according to claim 1, wherein, described supporting element comprises a plurality of cavitys, wherein each cavity is connected to different vacuum passages.
8, vaccum bench according to claim 1, wherein, the size in the hole in described first group of hole and the thickness of evacuated panel are proportional, and wherein, the size in the hole in described second group of hole and the thickness of interchangeable adapter are proportional.
9, vaccum bench according to claim 1, wherein, according to be placed on described vaccum bench on the vacuum that is associated of object require to select the size in the hole in described second group of hole.
10, vaccum bench according to claim 1, wherein, the air that the formed shape in a plurality of holes in described second group of hole is suitable for reducing by not being placed on the hole that object covered on the evacuated panel leaks.
11, vaccum bench according to claim 1, wherein, described evacuated panel connects and keeps device, described maintenance device to be used for optical check process at object keeping being placed on object on the evacuated panel.
12, a kind of method that is used to support object, described method comprises:
From one group of interchangeable adapter, select interchangeable adapter according to object features;
Chosen interchangeable adapter is placed between evacuated panel and the supporting element; Wherein, described evacuated panel comprises smooth upper surface and first group of hole; Described supporting element comprises at least one cavity, and air is sucked by described at least one cavity; Wherein, selected described interchangeable adapter comprises second group of hole; Wherein, the hole in described second group of hole is significantly less than the respective aperture in described first group of hole; Wherein, overlap at least in the hole in the hole in described second group of hole and described first group of hole; Wherein, described evacuated panel is significantly thick than described interchangeable adapter; And
Described object is placed on the described evacuated panel, and the hole suction air by described first and second groups of holes.
13, method according to claim 12, wherein, different interchangeable adapters allows the varying level air communication to cross their hole; Wherein, carry out described selection in response to the desired air levels of leakage that is placed on the evacuated panel hole that the back expection can not cover by object at object by interchangeable adapter.
14, method according to claim 12, wherein, the varying in size of the hole of different interchangeable adapters; Wherein said selection is carried out in response to the size in hole.
15, method according to claim 12, wherein, the varying in size of the hole of different interchangeable adapters; Wherein, the smooth degree of the hole size of chosen interchangeable adapter and object size and object lower is inversely proportional to.
16, method according to claim 12, wherein, the varying in size of the hole of different interchangeable adapters; Wherein,, the vacuum that is associated with object that described method will be placed carries out described selection in response to requiring.
17, method according to claim 12, wherein, a plurality of holes in described second group of hole have round-shaped.
18, method according to claim 12, wherein, a plurality of holes in described second group of hole have the elongated slot shape.
19, method according to claim 12, wherein, a plurality of holes in described second group of hole comprise the directed a plurality of elongated slot that are relative to each other.
20, method according to claim 12, wherein, described evacuated panel removably is connected to supporting element, thereby interchangeable adapter can be replaced fast by another interchangeable adapter.
21, method according to claim 12 comprises: when described evacuated panel is fastened on the described supporting element, by evacuated panel chosen interchangeable adapter is stretched and do not influence the smooth degree of flat upper surfaces basically.
22, method according to claim 12, wherein, the size in the hole in described first group of hole and the thickness of described evacuated panel are proportional, and wherein, the size in the hole in described second group of hole and the thickness of described interchangeable adapter are proportional.
23, a kind of object is affixed to method on the check system, described method comprises:
Provide to be suitable for vacuum is incorporated into the vacuum unit of the evacuated panel that comprises a plurality of holes and the adapter that comprises the hole is provided, the shape in described hole and size are suitable for reducing the air-flow by evacuated panel;
Object is placed on the described evacuated panel; And
By introducing vacuum object is attached on the evacuated panel.
24, method according to claim 23, wherein, described adapter is interchangeable adapter, described hole is significantly less than the respective aperture of evacuated panel; Overlap at least in described hole and described hole; Described evacuated panel is significantly thick than adapter.
25, method according to claim 23, wherein, a plurality of holes have round-shaped.
26, method according to claim 23, wherein, a plurality of holes have the elongated slot shape.
27, equipment according to claim 1, wherein, when the shape in a plurality of holes in described second group of hole and size are suitable on object is not placed on these holes, in they contiguous turbulent flows that causes.
28, equipment according to claim 1, wherein, the shape in a plurality of holes in described second group of hole and size are suitable at evacuated panel and are placed between the object on the evacuated panel producing lamina air flow.
29, method according to claim 12, wherein, when the shape in a plurality of holes in described second group of hole and size are suitable on object is not placed on these holes, in they contiguous turbulent flows that causes.
30, method according to claim 12, wherein, the shape in a plurality of holes in described second group of hole and size are suitable at evacuated panel and are placed between the object on the evacuated panel producing lamina air flow.
31, method according to claim 23, wherein, the shape in a plurality of holes in described second group of hole and size are suitable for when object is not placed on these holes, in they contiguous turbulent flows that causes.
32, method according to claim 23, wherein, the shape in a plurality of holes in described second group of hole and size are suitable at evacuated panel and are placed between the object on the evacuated panel producing lamina air flow.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US91189207P | 2007-04-15 | 2007-04-15 | |
| US60/911,892 | 2007-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101319922A true CN101319922A (en) | 2008-12-10 |
| CN101319922B CN101319922B (en) | 2011-04-06 |
Family
ID=40180098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101446438A Active CN101319922B (en) | 2007-04-15 | 2008-04-14 | Vaccum bench and method for supporing object |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2009028888A (en) |
| CN (1) | CN101319922B (en) |
| IL (1) | IL190763A0 (en) |
| TW (1) | TW200848338A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101745903B (en) * | 2008-12-15 | 2011-05-18 | 财团法人石材暨资源产业研究发展中心 | Combined type platform with air flotation and adsorption two-way function |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL203353A (en) | 2010-01-17 | 2015-10-29 | Orbotech Ltd | Vacuum hold-down apparatus |
| US9885671B2 (en) | 2014-06-09 | 2018-02-06 | Kla-Tencor Corporation | Miniaturized imaging apparatus for wafer edge |
| US9645097B2 (en) | 2014-06-20 | 2017-05-09 | Kla-Tencor Corporation | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning |
| KR101863587B1 (en) | 2018-04-05 | 2018-07-05 | 조경대 | Vacuum Tables for Aircraft Tail Wing Parts Processing |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161133A (en) * | 1984-08-31 | 1986-03-28 | Olympus Optical Co Ltd | Liquid crystal spectacles |
| JPH03103206U (en) * | 1990-02-09 | 1991-10-28 | ||
| JPH07214442A (en) * | 1994-01-28 | 1995-08-15 | Roland D G Kk | Vacuum table |
| JP3341990B2 (en) * | 1998-10-27 | 2002-11-05 | 株式会社東京精密 | Workpiece chuck table |
-
2008
- 2008-04-09 IL IL190763A patent/IL190763A0/en unknown
- 2008-04-14 CN CN2008101446438A patent/CN101319922B/en active Active
- 2008-04-14 JP JP2008104686A patent/JP2009028888A/en active Pending
- 2008-04-14 TW TW97113461A patent/TW200848338A/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101745903B (en) * | 2008-12-15 | 2011-05-18 | 财团法人石材暨资源产业研究发展中心 | Combined type platform with air flotation and adsorption two-way function |
Also Published As
| Publication number | Publication date |
|---|---|
| IL190763A0 (en) | 2008-12-29 |
| CN101319922B (en) | 2011-04-06 |
| JP2009028888A (en) | 2009-02-12 |
| TW200848338A (en) | 2008-12-16 |
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Effective date of registration: 20180910 Address after: Hongkong, Tongluowan, China Patentee after: Kang Dai image technology program Limited Hong Kong Company Address before: Israel Migdal Emek Patentee before: Camtek Ltd. |