CN101318298A - Method for quickly processing large-area three-dimensional micronano-structure on rotating member - Google Patents
Method for quickly processing large-area three-dimensional micronano-structure on rotating member Download PDFInfo
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- CN101318298A CN101318298A CNA2008100629836A CN200810062983A CN101318298A CN 101318298 A CN101318298 A CN 101318298A CN A2008100629836 A CNA2008100629836 A CN A2008100629836A CN 200810062983 A CN200810062983 A CN 200810062983A CN 101318298 A CN101318298 A CN 101318298A
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Abstract
The invention discloses a method for processing large area of three-dimensional micro-nano structure rapidly on a rotary component. A rapid tool servo control system with a force measuring module uses a piezoelectric actuator servo to control feed motion of a micro diamond tool and uses a micro force sensor to detect contact force and cutting force between the tip of the diamond tool and the surface of a work piece. When a cutting tool contacts with the work piece, the piezoelectric actuator starts vibrating, the micro force sensor outputs stable signal, and the signal output by the micro force sensor and the input cutting depth parameter are calculated by a PID controller, and then the calculating result is output to the piezoelectric actuator to control the cutting tool to process the surface of the work piece, thus realizing processing large area of three-dimensional micro-nano structure rapidly on the surface of the rotary component. The method provided by the invention overcomes the defect of small area and long consuming time of traditional processing methods of such three-dimensional micro-nano structures, as micro lens array and the like, and has the advantages of high precision, rapidity and large area.
Description
Technical field
The present invention relates to a kind of on revolving meber rapid processing go out the method for large-area three-dimensional micro-nano structure.
Background technology
Manufacturing and micro lens array etc. the similarly method of three-dimensional microstructures have machining, photoetching, el, FIB processing etc.Above-mentioned processing method is not only very consuming time, and is not adapted at carrying out processing and fabricating in the large tracts of land scope, can not make the three-dimensional micro-nano structure such as specific morphology such as aspheric surfaces.
Adopt the fast tool servo-control system (FS-FTS, ForceSensitive-Fast Tool Servo) with force-measuring module disclosed by the invention can avoid the shortcoming of above-mentioned various manufacture methods.On the one hand, diamond turning often is used to the processing optical element traditionally as a kind of extra accuracy machining process of maturation, and such as multifaceted prism, plastic lens is first-class.The diamond cutter sharp edges has guaranteed can accurately process softer material relatively on the precisely controlled basis of the motion of cutting tool, thereby the profile that obtains wanting comprises very complicated three-dimension curved surface.The complex-curved three-dimensional micro-nano structure such as lens array that comprises can use the multiple degrees of freedom lathe to make, but the size of micro-nano structure and quantity are often by the very narrow bandwidth restriction of lathe.On the other hand, the FS-FTS system is the good solution that increases diamond stock-removing machine bandwidth.The piezoelectric ceramic actuator that it adopts has the advantage of high bandwidth high rigidity, can allow the single-crystal diamond cutter of lightweight to realize high-speed cruising.In addition, the cost of whole system is very low, can process multiple micro-structural, has excellent economy.Last method disclosed by the invention is integrated power sensor is monitored effectively to whole manufacturing process, thereby has realized the three-dimensional micro-nano structures such as micro lens array of quick manufacturing large-area high-quality.
Summary of the invention
The objective of the invention is for fear of the small size of traditional three-dimensional micro-nano structure manufacture methods such as micro lens array and the shortcoming of length consuming time, provide a kind of on revolving meber rapid processing go out the method for large-area three-dimensional micro-nano structure.
Rapid processing goes out the method for large-area three-dimensional micro-nano structure and is on revolving meber: the fast tool servo-control system with force-measuring module is used the feed motion of the little diamond cutter of piezo-activator SERVO CONTROL, fast tool servo-control system with force-measuring module uses small power sensor to detect the contact force and the cutting force of diamond cutter tip and surface of the work, when cutting tool contacts with workpiece, the piezo-activator starting oscillation, small power sensor output this moment stabilization signal, use the PID controller that the signal of small power sensor output and the cutting depth parameter of input are carried out computing, operation result is outputed to piezo-activator control cutting tool surface of the work is processed, thereby realized going out the large-area three-dimensional micro-nano structure in the surperficial rapid processing of revolving meber.
Described fast tool servo-control system with force-measuring module comprises the fast tool Servocontrol device with force-measuring module, the PID controller, driving amplifier, fast tool Servocontrol device with force-measuring module comprises cutting tool, front shroud, adapter sleeve, preload, shell, piezo actuator, small power sensor, small power sensor holder, be provided with small power sensor in the small power sensor holder, small power sensor holder is provided with adapter sleeve outward, piezo actuator, adapter sleeve, piezo actuator is provided with shell outward, shell front end inboard is provided with preload, adapter sleeve is provided with front shroud, and cutting tool is installed on the front shroud.
The present invention compares the beneficial effect that has with background technology: avoided the small size of traditional three-dimensional micro-nano structure processing methods such as micro lens array and the shortcoming of length consuming time, the FS-FST system of power sensor that only needed application integration, because the high speed of diamond cutting, the high rigidity advantage, add and accurately control fast and executive system, and contact situation and the abrasion condition of the cutter precision that guaranteed processing of integrated power sensor by detecting cutter and workpiece, a kind of high accuracy is provided based on this, fast, large tracts of land, towards multiple material, the method of the three-dimensional micro-nano structures such as micro lens array of any three-dimension curved surface of processing on revolving meber.
Description of drawings
Fig. 1 is the theory diagram with fast tool servo-control system (FS-FTS) of force-measuring module;
Fig. 2 is the structure chart of FS-FST system topping machanism and small force checking device;
Fig. 3 is the workpiece schematic diagram that the present invention specifically implements time processing;
Fig. 4 adopts FS-FST system single-crystal diamond cutter cutting scheme schematic diagram;
Among the figure: cutting tool 1, front shroud 2, adapter sleeve 3, preload 4, shell 5, piezo actuator 6, small power sensor 7, small power sensor holder 8.
The specific embodiment
Rapid processing goes out the method for large-area three-dimensional micro-nano structure and is on revolving meber: the fast tool servo-control system with force-measuring module is used the feed motion of the little diamond cutter of piezo-activator SERVO CONTROL, fast tool servo-control system with force-measuring module uses small power sensor to detect the contact force and the cutting force of diamond cutter tip and surface of the work, when cutting tool contacts with workpiece, the piezo-activator starting oscillation, small power sensor output this moment stabilization signal, use the PID controller that the signal of small power sensor output and the cutting depth parameter of input are carried out computing, operation result is outputed to piezo-activator control cutting tool surface of the work is processed, thereby realized going out the large-area three-dimensional micro-nano structure in the surperficial rapid processing of revolving meber.
As Fig. 1, shown in 2, fast tool servo-control system with force-measuring module comprises the fast tool Servocontrol device with force-measuring module, the PID controller, driving amplifier, fast tool Servocontrol device with force-measuring module comprises cutting tool 1, front shroud 2, adapter sleeve 3, preload 4, shell 5, piezo actuator 6, small power sensor 7, small power sensor holder 8, be provided with small power sensor 7 in the small power sensor holder 8, the small power sensor holder 8 outer adapter sleeves 3 that are provided with, piezo actuator 6, adapter sleeve 3, the piezo actuator 6 outer shells 5 that are provided with, shell 5 front end inboards are provided with preload 4, adapter sleeve 3 is provided with front shroud 2, and cutting tool 1 is installed on the front shroud 2.
Fast tool servo-control system (FS-FTS with force-measuring module, Force Sensitive-Fast ToolServo) is installed on the transverse axis of diamond turning lathe, revolving meber is installed in the rotating shaft of lathe, uses the feed motion of piezo-activator SERVO CONTROL diamond cutter.The FS-FST system combines contact force and the cutting force that the power sensor is measured tool tip and surface of the work.When making that the micro-cutting cutter contacts with workpiece, allow piezo-activator with certain specific hunting of frequency, this moment, the output of power sensor was stable, simultaneously surface of the work was processed, thereby had been realized going out the large-area three-dimensional micro-nano structure in the Surface Machining of revolving meber.
Be the workpiece (LCD light-conducting board mold) that utilizes the processing of FS-FST system as shown in Figure 3.Wherein working (finishing) area can reach 1000mm * 1000mm, and precision can reach form error ± below 1%.The specific embodiment is:
Select one
55 * 150mm aluminium revolving meber because have only when workpiece is revolving meber, just can be accomplished large tracts of land processing with the FS-FST system.
Main shaft gyration is counted 5rpm, process time 0.5min/line.
Select sine wave signal, amplitude 100nm, wavelength 100mm.
Among the present invention processing unit (plant) when operation workpiece and tool motion direction as shown in Figure 4, the direction of feed of cutter is the depth direction of processing, thereby has controlled the waveform of three-dimensional micro-nano structure.
The present invention is used for driving the single-crystal diamond cutter, and its point of a knife has big angle of inclination, reaches 30 °, helps to reach very big cutting depth.In addition, in order to obtain better dynamic response, adopt PID open loop control when making three-dimensional micro-nano structure, but this moment, piezo-activator will produce displacement error.In order to eliminate this error FEEDBACK CONTROL has been adopted in the displacement of piezo-activator.In the piezo-activator of hollow type, load onto displacement transducer and obtain the real displacement data of piezo-activator, displacement under the more satisfactory situation and real displacement can calculate the error amount under this pattern, on this basis, just can revise original signal, thereby obtain desirable three-dimensional micro-nano structure.
The breakage abrasion that the FS-FST system that adopts the power sensor integrated both can reduce cutting tool also can guarantee the safe operation of whole system of processing.
Claims (2)
1, a kind of on revolving meber rapid processing go out the method for large-area three-dimensional micro-nano structure, it is characterized in that: the fast tool servo-control system with force-measuring module is used the feed motion of the little diamond cutter of piezo-activator SERVO CONTROL, fast tool servo-control system with force-measuring module uses small power sensor to detect the contact force and the cutting force of diamond cutter tip and surface of the work, when cutting tool contacts with workpiece, the piezo-activator starting oscillation, small power sensor output this moment stabilization signal, use the PID controller that the signal of small power sensor output and the cutting depth parameter of input are carried out computing, operation result is outputed to piezo-activator control cutting tool surface of the work is processed, thereby the surperficial rapid processing that is implemented in revolving meber goes out the large-area three-dimensional micro-nano structure.
2, a kind of method of on revolving meber, making large tracts of land micro lens array fast according to claim 1, it is characterized in that described fast tool servo-control system with force-measuring module comprises the fast tool Servocontrol device with force-measuring module, the PID controller, driving amplifier, fast tool Servocontrol device with force-measuring module comprises cutting tool 1, front shroud 2, adapter sleeve 3, preload 4, shell 5, piezo actuator 6, small power sensor 7, small power sensor holder 8, be provided with small power sensor 7 in the small power sensor holder 8, the small power sensor holder 8 outer adapter sleeves 3 that are provided with, piezo actuator 6, adapter sleeve 3, the piezo actuator 6 outer shells 5 that are provided with, shell 5 front end inboards are provided with preload 4, adapter sleeve 3 is provided with front shroud 2, and cutting tool 1 is installed on the front shroud 2.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100629836A CN101318298A (en) | 2008-07-17 | 2008-07-17 | Method for quickly processing large-area three-dimensional micronano-structure on rotating member |
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| CNA2008100629836A CN101318298A (en) | 2008-07-17 | 2008-07-17 | Method for quickly processing large-area three-dimensional micronano-structure on rotating member |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102189272A (en) * | 2011-04-21 | 2011-09-21 | 宁波大学 | High-frequency-response non-circular cutting device and control method thereof |
| CN108415366B (en) * | 2018-03-05 | 2021-01-29 | 高邑县云发专用机床厂 | Cutting depth feedback method based on servo technology and intelligent cutting method and system |
| CN115431100A (en) * | 2022-09-30 | 2022-12-06 | 杭州电子科技大学 | Cutting force monitoring and displacement control system of quick cutter servo device |
| CN117102899A (en) * | 2023-10-20 | 2023-11-24 | 浙江大学 | Curved surface grating processing device and method based on ultra-precise servo processing system |
-
2008
- 2008-07-17 CN CNA2008100629836A patent/CN101318298A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102189272A (en) * | 2011-04-21 | 2011-09-21 | 宁波大学 | High-frequency-response non-circular cutting device and control method thereof |
| CN102189272B (en) * | 2011-04-21 | 2012-10-24 | 宁波大学 | High-frequency-response non-circular cutting device and control method thereof |
| CN108415366B (en) * | 2018-03-05 | 2021-01-29 | 高邑县云发专用机床厂 | Cutting depth feedback method based on servo technology and intelligent cutting method and system |
| CN115431100A (en) * | 2022-09-30 | 2022-12-06 | 杭州电子科技大学 | Cutting force monitoring and displacement control system of quick cutter servo device |
| CN115431100B (en) * | 2022-09-30 | 2024-04-05 | 杭州电子科技大学 | Cutting force monitoring and displacement control system of rapid cutter servo device |
| CN117102899A (en) * | 2023-10-20 | 2023-11-24 | 浙江大学 | Curved surface grating processing device and method based on ultra-precise servo processing system |
| CN117102899B (en) * | 2023-10-20 | 2024-01-09 | 浙江大学 | Curved surface grating processing device and method based on ultra-precise servo processing system |
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