CN101318096A

CN101318096A - Epitaxial furnace waste gas purifier

Info

Publication number: CN101318096A
Application number: CNA2008100229759A
Authority: CN
Inventors: 张文光
Original assignee: Individual
Current assignee: Individual
Priority date: 2008-07-04
Filing date: 2008-07-04
Publication date: 2008-12-10

Abstract

The invention relates to a waste gas treating device, in particular to a waste gas purifier for epitaxial furnace for purifying and treating deposited technological waste gas. The device comprises at least two stuffing chambers, which are respectively communicated with a secondary washing chamber by a ventilation pipeline; an inlet of the ventilation pipeline is arranged at the upper part of the secondary washing chamber, while the outlet faces right to a nozzle spraying device for discharge cone of the stuffing chamber; an exhaust pipeline is arranged outside the stuffing chamber; the lower end of the exhaust pipeline is led and connected into the lower part of each stuffing chamber. At least two spraying devices for discharge cone work simultaneously so that the authigenic negative pressure of an equipment can be enhanced and can reach 800Pa at most; a detection device for negative pressure can also detect the amount of the discharged waste gas of the epitaxial furnace in real time, control the rotating speed of an electric motor according to the discharge amount of the tail gas, and control a cycling pump group in the case that little tail gas is discharged in order to achieve the effect of saving energy.

Description

Epitaxial furnace waste gas purifier

Affiliated technical field

The present invention relates to a kind of emission-control equipment, especially a kind of technology waste gas to deposition carries out the epitaxial furnace waste gas purifier of purified treatment.

Background technology

Contain multiple poisonous fume in depositing operation tail gas, these toxic gases just can enter in the atmosphere after must reaching discharge standard through strict processing.What have in these waste gas can react with water, generates SiO ₂With HCl gas etc., and other compositions in gas such as HCl and the waste gas can effectively be absorbed by water, therefore, at present, the U.S., Russia, states such as Japan adopt water absorption-type exhaust treatment system mostly, adopt water column drip washing tail gas and porous aggregate to absorb, but the exhaust emissions amount of epitaxial furnace is not consistent all the time in process of production, most tail gas is to discharge in a short time after an epitaxial deposition finishes, most of the time the inner exhaust gas discharge capacity be not very big, and epitaxial furnace requires than higher exhausted air quantity and negative pressure, the requirement that has reaches 500Pa, also can only reach 400Pa but external import equipment negative pressure is the highest, what have uses the centrifugation apparatus exhausting, but volume is bigger, be subjected to various condition restriction, still can't meet the demands, existing epitaxial furnace tail gas cleaner can not detect the exhaust emissions amount of epitaxial furnace in real time, according to epitaxial furnace exhaust emissions amount control motor speed, and waste energy.

Summary of the invention

During the technical problem to be solved in the present invention: for overcome exhaust emissions amount that existing catalytic converter air inlet negative pressure do not reach and can not detect in real time epitaxial furnace, according to epitaxial furnace exhaust emissions amount control motor speed, and the technical problem that wastes energy, the invention provides a kind of epitaxial furnace waste gas purifier, it can improve the spontaneous negative pressure of equipment, control rotating speed of motor according to the exhaust gas discharging amount, to reach energy-conservation effect.

The technical solution adopted for the present invention to solve the technical problems is: a kind of epitaxial furnace waste gas purifier, has housing, the housing below is provided with airtight water tank, be provided with diaphragm plate and midfeather in the housing, the housing inner chamber is separated into first washing chamber, secondary washing chamber and filler chamber, the secondary washing chamber is located at top, first washing chamber, the diaphragm plate center has blow vent, form water seal when working between diaphragm plate and housing, form water seal when working between bottom, first washing chamber and filler chamber bottom and water tank, air inlet is equipped with on the housing top, air inlet communicates with bottom, first washing chamber by admission line, in the first washing chamber big flow nozzle spray equipment is housed, secondary washing is indoor to be equipped with a plurality of mist high speed nozzle spray equipments, the top of filler chamber is provided with filler chamber's diaphragm plate, porose on filler chamber's diaphragm plate, be filled with filler in the filler chamber of filler chamber diaphragm plate below, the top of filler chamber is equipped with and is drained awl nozzle spray equipment, drain awl nozzle spray equipment below and be provided with Venturi tube, fixedly connected with the filler chamber diaphragm plate in Venturi tube bottom, filler chamber's diaphragm plate also offers the hole that the mouth of pipe with Venturi tube matches at the mouth of pipe place corresponding to Venturi tube, the water supplement port to the water tank moisturizing is equipped with on the water tank top, sewage draining exit and discharging hole are equipped with in the bottom of water tank, be equipped with the bottom and lead to the outer overflow pipe of housing first washing chamber, the overfall of overflow pipe is higher than the bottom surface of first washing chamber, housing is equipped with the circulating pump group outward, the water inlet of circulating pump group feeds under the water tank level, delivery port is by water pipe and big flow nozzle spray equipment, mist high speed nozzle spray equipment and drainage awl nozzle spray equipment link to each other, described filler chamber has two at least, filler chamber communicates with the secondary washing chamber by a breather line respectively, the import of breather line is positioned at top, secondary washing chamber, outlet is over against the drainage awl nozzle spray equipment of filler chamber, discharge duct is equipped with in the outside in filler chamber, and each filler chamber bottom is inserted in the discharge duct lower end.

The present invention also is provided with the negative-pressure detection device of the negative pressure condition of real-time detection air inlet, the frequency converter of PID controller and control circulating pump group motor speed, negative-pressure detection device is installed at the air inlet place, negative-pressure detection device inserts the input of PID controller, frequency converter inserts the output of PID controller, negative-pressure detection device detects in real time to the negative pressure condition of air inlet, and constantly the data that detect are imported in the PID controller, the PID controller compares calculating and combines the rotating speed of motor that frequency converter is controlled the circulating pump group with the technique initialization data detecting data, realizes the PID control to the circulating pump group.Can guarantee that the negative pressure of epitaxial furnace exhaust port satisfies technological requirement so on the one hand; On the other hand, under the fewer situation of the exhaust emissions amount of epitaxial furnace, the motor low-speed running of control circulating pump group reaches energy-conservation effect in epitaxial deposition process.

The invention has the beneficial effects as follows: drain the awl spray equipment at least two and work simultaneously, can improve the spontaneous negative pressure of equipment, maximum can reach 800Pa, negative-pressure detection device is installed can be detected in real time to extension furnace exhaust discharge capacity, according to exhaust emissions amount control motor speed, under the fewer situation of exhaust emissions, control circulating pump group low-speed running is to reach energy-conservation effect.

Description of drawings

The present invention is further described below in conjunction with drawings and Examples.

Fig. 1 is a structural representation of the present invention.

Fig. 2 is the side view of Fig. 1.

Among the figure: 1. housing, 2. water tank, 5. first washing chamber, 6. secondary washing chamber, 7. filler chamber, 8. air inlet, 9. admission line, 10. breather line, 11. big flow nozzle spray equipments, 12. mist high speed nozzle spray equipment, 13. fillers, 14. drain awl nozzle spray equipment, 15. blast pipe, 15-1. exhaust outlet, 16. Venturi tubes, 17. water supplement port, 18. sewage draining exit, 19. discharging holes, 20. overflow pipes, 21. circulating pump group, 22. water pipe, 23. filler chamber's diaphragm plates, 34. negative-pressure detection devices, 35.PID controller, 36. frequency converters.

The specific embodiment

As Fig. 1, shown in 2, a kind of most preferred embodiment of epitaxial furnace waste gas purifier, has housing 1, housing 1 below is provided with airtight water tank 2, be provided with diaphragm plate 3 and midfeather 4 in the housing 1, the housing inner chamber is separated into first washing chamber 5, secondary washing chamber 6 and filler chamber 7, secondary washing chamber 6 is located at 5 tops, first washing chamber, diaphragm plate 3 centers have blow vent, form water seal during 1 work of diaphragm plate 3 and housing, form water seal during 2 work of first 5 bottoms, washing chamber and filler chamber 7 bottoms and water tank, air inlet 8 is equipped with on housing 1 top, air inlet 8 communicates with 5 bottoms, first washing chamber by admission line 9, in the first washing chamber 5 big flow nozzle spray equipment 11 is housed, a plurality of mist high speed nozzle spray equipments 12 are housed in the secondary washing chamber 6, the top of filler chamber 7 is provided with filler chamber's diaphragm plate 23, porose on filler chamber's diaphragm plate 23, be filled with filler 13 in the filler chamber 7 of filler chamber's diaphragm plate 23 belows, the top of filler chamber 7 is equipped with and is drained awl nozzle spray equipment 14, drain awl nozzle spray equipment 14 belows and be provided with Venturi tube 16, fixedly connected with filler chamber diaphragm plate 23 in Venturi tube 16 bottoms, filler chamber's diaphragm plate 23 also offers the hole that the mouth of pipe with Venturi tube 16 matches at the mouth of pipe place corresponding to Venturi tube 16, the water supplement port 17 to water tank 2 moisturizings is equipped with on water tank 2 tops, sewage draining exit 18 and discharging hole 19 are equipped with in the bottom of water tank 2, the overflow pipe 20 that leads to outside the housing 1 is equipped with in 5 bottoms in first washing chamber, the overfall of overflow pipe 20 is higher than the bottom surface of first washing chamber 5, the housing 1 outer circulating pump group 21 that is equipped with, the water inlet of circulating pump group 21 feeds under water tank 2 liquid levels, delivery port is by water pipe 22 and big flow nozzle spray equipment 11, mist high speed nozzle spray equipment 12 and drainage awl nozzle spray equipment 14 link to each other, described filler chamber 7 has two at least, filler chamber 7 communicates with secondary washing chamber 6 by a breather line 10 respectively, the import of breather line 10 is positioned at 6 tops, secondary washing chamber, outlet is over against the drainage awl nozzle spray equipment 14 of filler chamber 7, discharge duct 15 is equipped with in 7 outsides in filler chamber, each filler chamber 7 bottom is inserted in discharge duct 15 lower ends, and the upper end of discharge duct 15 is exhaust outlet 15-1.

As shown in Figure 1, negative-pressure detection device 34 is installed at described air inlet 8 places, negative-pressure detection device 34 inserts the input of PID controller 35, frequency converter 36 inserts the output of PID controller 35, negative-pressure detection device 34 can detect in real time to the negative pressure of exhaust outlet 15-1, according to exhaust emissions amount control motor speed, realize control to circulating pump group 21.

Claims

1. epitaxial furnace waste gas purifier, has housing (1), housing (1) below is provided with airtight water tank (2), be provided with diaphragm plate (3) and midfeather (4) in the housing (1), the housing inner chamber is separated into first washing chamber (5), secondary washing chamber (6) and filler chamber (7), secondary washing chamber (6) is located at top, first washing chamber (5), diaphragm plate (3) center has blow vent, form water seal when working between diaphragm plate (3) and housing (1), form water seal when working between bottom, first washing chamber (5) and filler chamber (7) bottom and water tank (2), air inlet (8) is equipped with on housing (1) top, air inlet (8) communicates with bottom, first washing chamber (5) by admission line (9), in the first washing chamber (5) big flow nozzle spray equipment (11) is housed, a plurality of mist high speed nozzle spray equipments (12) are housed in the secondary washing chamber (6), the top of filler chamber (7) is provided with filler chamber's diaphragm plate (23), filler chamber's diaphragm plate (23) is gone up porose, be filled with filler (13) in the filler chamber (7) of filler chamber's diaphragm plate (23) below, the top of filler chamber (7) is equipped with and is drained awl nozzle spray equipment (14), drain awl nozzle spray equipment (14) below and be provided with Venturi tube (16), fixedly connected with filler chamber's diaphragm plate (23) in Venturi tube (16) bottom, filler chamber's diaphragm plate (23) also offers the hole that the mouth of pipe with Venturi tube (16) matches at the mouth of pipe place corresponding to Venturi tube (16), the water supplement port (17) to water tank (2) moisturizing is equipped with on water tank (2) top, sewage draining exit (18) and discharging hole (19) are equipped with in the bottom of water tank (2), be equipped with the bottom and lead to the outer overflow pipe (20) of housing (1) first washing chamber (5), the overfall of overflow pipe (20) is higher than the bottom surface of first washing chamber (5), the outer circulating pump group (21) that is equipped with of housing (1), the water inlet of circulating pump group (21) feeds under water tank (2) liquid level, delivery port is by water pipe (22) and big flow nozzle spray equipment (11), mist high speed nozzle spray equipment (12) and drainage awl nozzle spray equipment (14) link to each other, it is characterized in that: described filler chamber (7) has two at least, filler chamber (7) communicates with secondary washing chamber (6) by a breather line (10) respectively, the import of breather line (10) is positioned at top, secondary washing chamber (6), outlet is over against the drainage awl nozzle spray equipment (14) of filler chamber (7), discharge duct (15) is equipped with in the outside in filler chamber (7), and each filler chamber (7) bottom is inserted in discharge duct (15) lower end.

2. a kind of epitaxial furnace waste gas purifier according to claim 1, it is characterized in that: the frequency converter (36) that also has negative-pressure detection device (34), PID controller (35) and control circulating pump group (21) motor speed of the negative pressure condition of real-time detection air inlet (8), air inlet (8) locates to install negative-pressure detection device (34), negative-pressure detection device (34) inserts the input of PID controller (35), and frequency converter (36) inserts the output of PID controller (35).