CN101290395A - Minisize multifunctional optical devices and method for making same - Google Patents
Minisize multifunctional optical devices and method for making same Download PDFInfo
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Abstract
The invention relates to a micro multifunctional optical device and a method for making the same. The optical device is characterized in that: the optical device comprises a fixed electrode, a movable electrode, a support beam, an anchor point, a glass substrate, a light reflection module and optical fiber grooves; the head of the light reflection module is in a triangular shape; an input optical fiber groove is arranged over against the head of the reflection module; corresponding to the reflection surfaces on two sides of the triangular light reflection module, tow output optical fiber grooves are oppositely arranged to be perpendicular to the input optical fiber groove; input optical fiber and output optical fiber are respectively arranged in the input optical fiber groove and the output optical fiber grooves. The optical device realizes adjustable light splitting function and optical switching function through a comb type electrostatic driver moving light reflection module consisting of the fixed electrode and the movable electrode, and realizes light attenuation function through a flat-type electrostatic driver twisted light reflection module consisting of the fixed electrode and the movable electrode at the same time. The optical device is simple in making process and compatible with MEMS device process of various species, and can be used to realize the glimmer integration systems with more powerful functions.
Description
Technical field
The present invention relates to a kind of multi functional optical device and preparation method thereof, particularly about a kind of minisize multifunctional optical devices and preparation method thereof with adjustable beam split, photoswitch and variable optical attenuator mixed function.
Background technology
Adjustable optical splitter, photoswitch and the variable optical attenuator that adopts microelectromechanical systems (MEMS) technology to realize has that volume is little, in light weight, energy consumption is low, steady performance.Along with the develop rapidly of optical fiber communication technology and dense wavelength division multiplexing system, the adjustable optical splitter of MEMS, photoswitch and variable optical attenuator have obtained application more and more widely as important fiber waveguide device.At present about the existing a lot of reports of the research of the adjustable optical splitter of MEMS, photoswitch and variable optical attenuator.These devices all are the form designs with discrete device, make and encapsulation, and can realize adjustable beam split, photoswitch or optical attenuation function well.
Integrated is the main flow of current MEMS technical development, and integrated MEMS device has that volume is littler, weight is lighter, power consumption is lower, cost is lower, reliability is higher, performance is more excellent and advantage such as with better function.By the adjustable optical splitter of integrated MEMS, photoswitch and variable optical attenuator, develop high performance minitype optical device, will improve the performance, integrated level of MEMS communication class optical device greatly and in the degree of flexibility of application facet with adjustable optical splitter, photoswitch and variable optical attenuator mixed function.Yet there are bigger difference in adjustable optical splitter, photoswitch with variable optical attenuator on technology and structural design, therefore realize that such integrated technology exists huge difficulty.Just at present, worldwide, still by the adjustable optical splitter of discrete MEMS, photoswitch and variable optical attenuator are connected and composed adjustable beam split, photoswitch and the variable optical attenuator mixed function that the low-light system realizes integrated high-performance micro optical device by external electrical and optics.The microminiaturization that this will improve equipment cost, reduce system reliability, increases the system maintenance difficulty and be unfavorable for equipment.
Summary of the invention
At the problems referred to above, the purpose of this invention is to provide that a kind of cost is low, system reliability is high, can realize adjustable beam split, the minisize multifunctional optical devices of photoswitch and variable optical attenuator mixed function and preparation method thereof.
For achieving the above object, the present invention takes following technical scheme: a kind of minisize multifunctional optical devices is characterized in that: it comprises fixed electorde, movable electrode, brace summer, anchor point, glass substrate, light reflecting module and optical fiber duct; Described fixed electorde is the flat fixed electorde that is connected the comb-tooth-type fixed electorde of described glass substrate end face both sides and is fixed on described glass substrate end face middle part; Described movable electrode is the two flat movable electrodes that are plugged in two comb-tooth-type movable electrodes between described comb-tooth-type fixed electorde and lay respectively at described flat fixed electorde top; Described brace summer comprises folding crossbeam and combination torsion beam, and described folding crossbeam is connected described two movable electrodes by a Tong Liang with two short beams, and is fixed on the described glass substrate by the anchor point suspension; Described combination torsion beam connects described folding crossbeam and the two movable electrodes outside by two strutbeams, connects described two movable electrode inboards by other two strutbeams, connects described folding crossbeam and light reflecting module by two strutbeams again; The head of described smooth reflecting module is triangular in shape, head over against described reflecting module is provided with an input optical fibre groove, corresponding with the both sides reflecting surface of described triangle light reflecting module, be provided with two output optical fibre grooves with described output optical fibre groove is vertically opposite, be provided with input, output optical fibre in described input, the output optical fibre groove.
Described combination torsion beam and described folding crossbeam are the single-ended jowar of not waiting.
Described single-ended not contour combination torsion beam is concordant with the bottom of described folding crossbeam, and the top is lower than described folding crossbeam.
Described single-ended not contour combination torsion beam is concordant with the top of described folding crossbeam, and the bottom is higher than described folding crossbeam.
Described combination torsion beam and described folding crossbeam are that both-end does not wait jowar.
Described combination torsion beam and described folding crossbeam are single-ended when not waiting jowar, adopt following preparation technology: (1) adopts two N type (100) silicon chips of throwing; (2) on silicon chip, form silicon oxide masking film, etching deep trouth then, the degree of depth of described deep trouth is made fixed electorde on the glass substrate and the gap between the movable electrode; (3) remove silicon oxide masking film, described silicon chip surface is mixed, to form Ohmic contact; (4) on glass substrate, make metal electrode, as the lead-in wire electrode of micro-drive structure; (5) glass substrate and silicon chip are carried out anode linkage, and with the thickness of wafer thinning to fixed electorde; (6) on silicon chip, form silicon oxide masking film, form the photoresist mask on the silicon oxide masking film surface again, and then form the composite mask of monox and photoresist; Be the mask etching deep trouth with the photoresist mask then, make folding crossbeam upper end and the difference in height that makes up the torsion beam upper end; (7) removing the photoresist mask, is the mask etching releasing structure with the silicon oxide masking film, finishes the minitype optical device preparation.
Described combination torsion beam and described folding crossbeam are both-end when not waiting jowar, and adopt following preparation technology: (1) adopts two N type (100) silicon chips of throwing; (2) on silicon chip, form silicon oxide masking film, form the photoresist mask on the silicon oxide mask surface again, and then form the composite mask of monox and photoresist; With the photoresist mask is the mask etching deep trouth, and the degree of depth of deep trouth is made folding crossbeam and the lower end difference in height that makes up torsion beam; (3) removing the photoresist mask, is that the mask etching silicon chip forms deep trouth with the silicon oxide mask, and the degree of depth of deep trouth is made fixed electorde on the glass substrate and the gap between the movable electrode; (4) remove silicon oxide masking film, described silicon chip surface is mixed, to form Ohmic contact; (5) on glass substrate, make metal electrode, as the lead-in wire electrode of micro-drive structure; (6) glass substrate and silicon chip are carried out anode linkage, and with the thickness of wafer thinning to fixed electorde; (7) on silicon chip, form silicon oxide masking film, form the photoresist mask on the silicon oxide masking film surface again, and then form the composite mask of monox and photoresist; Be the mask etching deep trouth with the photoresist mask then, make folding crossbeam upper end and the difference in height that makes up the torsion beam upper end; (8) removing the photoresist mask, is the mask etching releasing structure with the silicon oxide masking film, finishes the minitype optical device preparation.
The present invention is owing to take above technical scheme, it has the following advantages: 1, the present invention adopts the design of electrostatic actuator with interdigitated electrode structure and plate electrostatic actuator simultaneously in the device drive structure, not only can realize adjustable beam split, photoswitch and optical attenuation complex function, and adjustable beam split function, light switch function and optical attenuation function can independent mode control realize, make device have high-isolation between high controllability and difference in functionality control.2, the present invention uses the chip integration with the definition of high precision photoetching technique to become optical fiber duct, can be accurately, positioning optical waveguides firmly, thus realize autoregistration between light reflecting module and the optical fiber duct, reduce the difficulty and the cost of encapsulation.3, the present invention adopts single crystal silicon material to make in minitype optical device, can reduce the internal stress of structure greatly, improves the quality of device architecture.4, preparation method of the present invention can adopt conventional MEMS process equipment, realize making in enormous quantities, and technological process is simple, with polytype MEMS device technology compatibility, can be used for realizing low-light integrated system with better function.
Description of drawings
Fig. 1 is a perspective view of the present invention
Fig. 2 is a planar structure synoptic diagram of the present invention
Fig. 3 reverses the support beam structure synoptic diagram for the present invention's combination
Fig. 4 a～Fig. 4 b is the principle of work synoptic diagram that the present invention realizes variable beam split function
Fig. 5 a～Fig. 5 b is the principle of work synoptic diagram that the present invention realizes light switch function
Fig. 6 a～Fig. 6 b is the principle of work synoptic diagram that the present invention realizes the optical attenuation function
Fig. 7 a～Fig. 7 g is the main preparation process synoptic diagram of minitype optical device that the present invention adopts single-ended not contour brace summer
Fig. 8 a～Fig. 8 d is that the present invention adopts the not crucial preparation process synoptic diagram of minitype optical device of contour brace summer of both-end
Embodiment
Shown in Fig. 1～3, the present invention includes fixed electorde 1,2,3, movable electrode 4,5, brace summer 6,7, glass substrate 8, light reflecting module 9 and optical fiber duct 10.
Fixed electorde 1,2 is for four groups of comb-tooth-type electrodes of the end face both sides that are oppositely arranged on glass substrate 8, and is corresponding with it, and two movable electrodes 4 broach respectively are plugged between the fixed electorde 1,2 of both sides, form two electrostatic actuator with interdigitated electrode structure.Fixed electorde 3 is a plate electrode, it is fixed on the middle part of glass substrate 8 end faces, and two movable electrodes 5 also are plate electrode, and it separates the top that a distance is positioned at fixed electorde 3, and have the certain space spacing between the fixed electorde 3, form a plate electrostatic actuator.
Brace summer comprises folding crossbeam 6 and combination torsion beam 7, folding crossbeam 6 comprises that four suspend by anchor point 61 and to be connected folded spring beam 62 on the fixed electorde 3 both sides glass substrate 8, a logical beam 63 that connects two movable electrodes 4, logical beam 63 connects corresponding two pairs of folded spring beams 62 that are provided with respectively by two short beams 64, is provided with three nodes 65,66,67 that connect the combination torsion beam at the middle part of logical beam 63.
The electrostatic actuator with interdigitated electrode structure that the present invention can utilize fixed electorde 1,2 and movable electrode 4 to form moves light reflecting module 9 and realizes adjustable beam split function.As input optical fibre IN1 during over against light reflecting module 9, after 91,92 reflections of triangle both sides reflecting surface, the luminous power that is assigned to two output optical fibre OUT1, OUT2 is identical basically.Shown in Fig. 4 a, when movable electrode 4 and fixed electorde 1,2 interact, make two movable electrodes 4 when left movement, the folding crossbeam 6 that fuses with movable electrode 4, combination torsion beam 7, movable electrode 5 and light reflecting module 9 are along the X axis left movement, this moment, incident light increased through the luminous power that light reflecting module 9 one lateral reflection faces 91 distribute, and the luminous power that opposite side reflecting surface 92 distributes reduces.Shown in Fig. 4 b, when movable electrode 4 and fixed electorde 1,2 interact, when movable electrode 4 is moved right, the folding crossbeam 6 that fuses with movable electrode 4, combination torsion beam 7, movable electrode 5 and light reflecting module 9 are along the X axis right motion, this moment, incident light reduced through the luminous power that reflecting surface 91 distributes, and the luminous power that opposite side reflecting surface 92 distributes increases.This shows that mobile light reflecting module 9 can realize the luminous power distribution to incident light.
The electrostatic actuator with interdigitated electrode structure that the present invention can utilize fixed electorde 1,2 and movable electrode 4 to form moves light reflecting module 9 and realizes light switch function, shown in Fig. 5 a, when movable electrode 4 and fixed electorde 1,2 interact, make two movable electrodes 4 when left movement, the folding crossbeam 6 that fuses with movable electrode 4, combination torsion beam 7, movable electrode 5 and light reflecting module 9 are along the X axis left movement, this moment, incident light IN1 can only enter optical fiber OUT2 from reflecting surface 92 reflection transmission through light reflecting module 9, and then closed the output to optical fiber OUT1.Shown in Fig. 5 b, when movable electrode 4 and fixed electorde 1,2 interact, when movable electrode 4 is moved right, the folding crossbeam 6 that fuses with movable electrode 4, combination torsion beam 7, movable electrode 5 and light reflecting module 9 are along the X axis right motion, this moment, incident light can only enter optical fiber OUT1 from reflecting surface 91 reflection transmission, and then closed the output of optical fiber OUT1.This shows that mobile light reflecting module 9 can realize that two-way switches to incident light.
The plate electrostatic actuator that the present invention can also utilize fixed electorde 3 and movable electrode 5 to form reverses light reflecting module 9 and realizes the optical attenuation function.Shown in Fig. 6 a, because the texture ratio of folding crossbeam 6 is thicker, rigidity is also big, the structure of combination torsion beam 7 is very tiny, rigidity is also less, therefore when two movable electrodes 5 and fixed electorde 3 interactions, movable electrode 5 is done when face (downwards) moves in the Z direction, folding crossbeam 6 rigidity can not be moved greatly substantially, be equivalent to fixed beam, and each strutbeam rigidity of combination torsion beam 7 is little, wherein two strutbeams 71,72 can be with two nodes 65 of folding crossbeam 6 under the drive of movable electrode 5,67 is axle, makes clockwise direction and rotates (shown in Fig. 6 b), two strutbeams 73 in addition, 74 under the drive of movable electrode 5, can drive light reflecting module 9 and two strutbeams 75,76 nodes 66 with folded beam 6 are axle, do counterclockwise to rotate, and this rotation moves up light reflecting module 9, and be an angle with reflecting surface, the reflected light direction becomes ROUT2, and the luminous energy that enters output optical fibre OUT2 is changed, and the windup-degree of light decrement and light reflecting module 9 is proportional.
Embodiment 1: adopt following steps when making the minitype optical device of single-ended not contour brace summer:
1, parent material adopts two N type (100) silicon chip 11 (shown in Fig. 7 a) that throw, and thickness is 400 ± 10 microns;
2, form monox 12 masks on silicon chip 11, the etching deep trouth 13 then, and the degree of depth of deep trouth 13 is made fixed electorde 3 on the glass substrate and the gap between the movable electrode 5;
3, shown in Fig. 7 b, remove silicon oxide masking film 12, silicon chip 11 surfaces adopt ion to inject or diffusion technique mixes 14, to form Ohmic contact;
4, shown in Fig. 7 c, on glass substrate 8, make metal electrode 15, as the lead-in wire electrode of micro-drive structure;
5, shown in Fig. 7 d, glass substrate 8 and silicon chip 11 are carried out anode linkage, and silicon chip 11 is thinned to the thickness that fixed electorde 1,2,3 needs;
6, on silicon chip 11, form silicon oxide masking film 16, form photoresist mask 17 (shown in Fig. 7 e) on silicon oxide masking film 16 surfaces again, and then form the composite mask of monox and photoresist; Be mask etching deep trouth 18 (shown in Fig. 7 f) with photoresist mask 17 then, the degree of depth of deep trouth 18 is made the difference in height (shown in Fig. 7 g) of combination torsion beam 7 upper ends and folding crossbeam 6 upper ends, also is simultaneously the difference in height of combination torsion beam 7 upper ends and other component upper ends;
7, removing photoresist mask 17, is the mask etching releasing structure with silicon oxide mask 16, forms single-ended not contour brace summer, finishes the preparation of the minitype optical device of single-ended not contour brace summer.
Embodiment 2: make both-end and do not adopt following technology during the minitype optical device of contour brace summer:
1, parent material adopts two N type (100) silicon chip 11 (shown in Fig. 7 a) that throw, and thickness is 400 ± 10 microns;
2, at first on silicon chip 11, form silicon oxide masking film 19, form photoresist mask 20 (shown in Fig. 8 a) on silicon oxide mask 19 surfaces again, and then form the composite mask of monox and photoresist; Be mask etching deep trouth 21 (shown in Fig. 8 b) with photoresist 20 then, the degree of depth of deep trouth 21 is made the lower end difference in height (shown in Fig. 8 c) of combination torsion beam 7 and folding crossbeam 6 (comprising 71,72,73 beams such as grade);
3, removing photoresist mask 20, be mask etching silicon chip 11 formation deep trouths 22 with silicon oxide mask 19, and the degree of depth of deep trouth 22 is made fixed electorde 3 on the glass substrate and the gap between the movable electrode 5;
4, carry out according to the step 3～step 7 among the embodiment 1 then, finish the not preparation of the miniature optical device of contour brace summer of both-end (shown in Fig. 8 d).
During the minitype optical device of the single-ended not contour brace summer of above-mentioned making, if single-ended not contour combination torsion beam 7 is concordant with the top of described folding crossbeam 6, when the bottom is higher than described folding crossbeam 6, can be with reference to above-mentioned two process implementing examples, technology is adjusted individually, can realize, not repeat them here.
The various embodiments described above are only enumerated for explanation the present invention, and all equivalent variations of carrying out on the basis of technical solution of the present invention all should not got rid of outside protection scope of the present invention.
Claims (7)
1, a kind of minisize multifunctional optical devices is characterized in that: it comprises fixed electorde, movable electrode, brace summer, anchor point, glass substrate, light reflecting module and optical fiber duct;
Described fixed electorde is the flat fixed electorde that is connected the comb-tooth-type fixed electorde of described glass substrate end face both sides and is fixed on described glass substrate end face middle part;
Described movable electrode is the two flat movable electrodes that are plugged in two comb-tooth-type movable electrodes between described comb-tooth-type fixed electorde and lay respectively at described flat fixed electorde top;
Described brace summer comprises folding crossbeam and combination torsion beam, and described folding crossbeam is connected described two movable electrodes by a Tong Liang with two short beams, and is fixed on the described glass substrate by the anchor point suspension; Described combination torsion beam connects described folding crossbeam and the two movable electrodes outside by two strutbeams, connects described two movable electrode inboards by other two strutbeams, connects described folding crossbeam and light reflecting module by two strutbeams again;
The head of described smooth reflecting module is triangular in shape, head over against described reflecting module is provided with an input optical fibre groove, corresponding with the both sides reflecting surface of described triangle light reflecting module, be provided with two output optical fibre grooves with described output optical fibre groove is vertically opposite, be provided with input, output optical fibre in described input, the output optical fibre groove.
2, a kind of minisize multifunctional optical devices as claimed in claim 1 is characterized in that: described combination torsion beam and described folding crossbeam are the single-ended jowar of not waiting.
3, a kind of minisize multifunctional optical devices as claimed in claim 2 is characterized in that: described single-ended not contour combination torsion beam is concordant with the bottom of described folding crossbeam, and the top is lower than described folding crossbeam.
4, a kind of minisize multifunctional optical devices as claimed in claim 2 is characterized in that: described single-ended not contour combination torsion beam is concordant with the top of described folding crossbeam, and the bottom is higher than described folding crossbeam.
5, a kind of minisize multifunctional optical devices as claimed in claim 1 is characterized in that: described combination torsion beam and described folding crossbeam are that both-end does not wait jowar.
6, as the preparation method of a kind of minisize multifunctional optical devices as described in the claim 1～3, it mainly comprises following technology:
(1) adopts two N type (100) silicon chips of throwing;
(2) on silicon chip, form silicon oxide masking film, etching deep trouth then, the degree of depth of described deep trouth is made fixed electorde on the glass substrate and the gap between the movable electrode;
(3) remove silicon oxide masking film, described silicon chip surface is mixed, to form Ohmic contact;
(4) on glass substrate, make metal electrode, as the lead-in wire electrode of micro-drive structure;
(5) glass substrate and silicon chip are carried out anode linkage, and with the thickness of wafer thinning to fixed electorde;
(6) on silicon chip, form silicon oxide masking film, form the photoresist mask on the silicon oxide masking film surface again, and then form the composite mask of monox and photoresist; Be the mask etching deep trouth with the photoresist mask then, make folding crossbeam upper end and the difference in height that makes up the torsion beam upper end;
(7) removing the photoresist mask, is the mask etching releasing structure with the silicon oxide masking film, finishes the minitype optical device preparation.
7, as the preparation method of a kind of minisize multifunctional optical devices as described in claim 1 or 5, it mainly comprises following technology:
(1) adopts two N type (100) silicon chips of throwing;
(2) on silicon chip, form silicon oxide masking film, form the photoresist mask on the silicon oxide mask surface again, and then form the composite mask of monox and photoresist; With the photoresist mask is the mask etching deep trouth, and the degree of depth of deep trouth is made folding crossbeam and the lower end difference in height that makes up torsion beam;
(3) removing the photoresist mask, is that the mask etching silicon chip forms deep trouth with the silicon oxide mask, and the degree of depth of deep trouth is made fixed electorde on the glass substrate and the gap between the movable electrode;
(4) remove silicon oxide masking film, described silicon chip surface is mixed, to form Ohmic contact;
(5) on glass substrate, make metal electrode, as the lead-in wire electrode of micro-drive structure;
(6) glass substrate and silicon chip are carried out anode linkage, and with the thickness of wafer thinning to fixed electorde;
(7) on silicon chip, form silicon oxide masking film, form the photoresist mask on the silicon oxide masking film surface again, and then form the composite mask of monox and photoresist; Be the mask etching deep trouth with the photoresist mask then, make folding crossbeam upper end and the difference in height that makes up the torsion beam upper end;
(8) removing the photoresist mask, is the mask etching releasing structure with the silicon oxide masking film, finishes the minitype optical device preparation.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101881881A (en) * | 2010-06-08 | 2010-11-10 | 北京大学 | Variable optical attenuator and preparation method thereof |
| CN103086316A (en) * | 2011-10-28 | 2013-05-08 | 中国科学院上海微系统与信息技术研究所 | MEMS vertical comb micro-mirror surface driver manufacturing method |
| CN110799886A (en) * | 2017-07-06 | 2020-02-14 | 浜松光子学株式会社 | Optical device |
| CN113640983A (en) * | 2021-08-11 | 2021-11-12 | 李青云 | Anti-suction flat plate type MEMS galvanometer |
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| CN114077047A (en) * | 2020-08-20 | 2022-02-22 | 安徽中科米微电子技术有限公司 | MEMS micro-mirror with symmetrical folding elastic beam structure and manufacturing method thereof |
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| CN101881881A (en) * | 2010-06-08 | 2010-11-10 | 北京大学 | Variable optical attenuator and preparation method thereof |
| CN101881881B (en) * | 2010-06-08 | 2012-07-18 | 北京大学 | Variable optical attenuator and preparation method thereof |
| CN103086316A (en) * | 2011-10-28 | 2013-05-08 | 中国科学院上海微系统与信息技术研究所 | MEMS vertical comb micro-mirror surface driver manufacturing method |
| CN103086316B (en) * | 2011-10-28 | 2015-07-22 | 中国科学院上海微系统与信息技术研究所 | MEMS vertical comb micro-mirror surface driver manufacturing method |
| CN110799886A (en) * | 2017-07-06 | 2020-02-14 | 浜松光子学株式会社 | Optical device |
| US20210132368A1 (en) | 2017-07-06 | 2021-05-06 | Hamamatsu Photonics K.K. | Optical device |
| US11740452B2 (en) | 2017-07-06 | 2023-08-29 | Hamamatsu Photonics K.K. | Optical device |
| US11187872B2 (en) | 2017-07-06 | 2021-11-30 | Hamamatsu Photonics K.K. | Optical device |
| US11733509B2 (en) | 2017-07-06 | 2023-08-22 | Hamamatsu Photonics K.K. | Optical device |
| CN110799886B (en) * | 2017-07-06 | 2022-06-28 | 浜松光子学株式会社 | Optical device |
| US11635613B2 (en) | 2017-07-06 | 2023-04-25 | Hamamatsu Photonics K.K. | Optical device |
| US11681121B2 (en) | 2017-07-06 | 2023-06-20 | Hamamatsu Photonics K.K. | Optical device |
| US11693230B2 (en) | 2017-11-15 | 2023-07-04 | Hamamatsu Photonics K.K. | Optical device |
| US11906727B2 (en) | 2017-11-15 | 2024-02-20 | Hamamatsu Photonics K.K. | Optical device production method |
| US11953675B2 (en) | 2017-11-15 | 2024-04-09 | Hamamatsu Photonics K.K. | Optical device production method |
| CN114077047A (en) * | 2020-08-20 | 2022-02-22 | 安徽中科米微电子技术有限公司 | MEMS micro-mirror with symmetrical folding elastic beam structure and manufacturing method thereof |
| CN113640983A (en) * | 2021-08-11 | 2021-11-12 | 李青云 | Anti-suction flat plate type MEMS galvanometer |
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