CN101287855A - Module for a coating system and associated technology - Google Patents
Module for a coating system and associated technology Download PDFInfo
- Publication number
- CN101287855A CN101287855A CNA200680023277XA CN200680023277A CN101287855A CN 101287855 A CN101287855 A CN 101287855A CN A200680023277X A CNA200680023277X A CN A200680023277XA CN 200680023277 A CN200680023277 A CN 200680023277A CN 101287855 A CN101287855 A CN 101287855A
- Authority
- CN
- China
- Prior art keywords
- separate space
- module
- splash
- lid
- enough
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title abstract description 16
- 239000011248 coating agent Substances 0.000 title abstract description 13
- 238000005516 engineering process Methods 0.000 title description 2
- 230000005611 electricity Effects 0.000 claims description 44
- 239000012530 fluid Substances 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 238000012545 processing Methods 0.000 description 57
- 239000000758 substrate Substances 0.000 description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 37
- 150000001875 compounds Chemical class 0.000 description 28
- 230000000875 corresponding effect Effects 0.000 description 25
- 238000000034 method Methods 0.000 description 23
- 230000033001 locomotion Effects 0.000 description 22
- 239000000463 material Substances 0.000 description 20
- 238000009434 installation Methods 0.000 description 19
- 238000000429 assembly Methods 0.000 description 13
- 230000000712 assembly Effects 0.000 description 13
- 239000012809 cooling fluid Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 12
- 238000007789 sealing Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 239000002826 coolant Substances 0.000 description 9
- 239000000498 cooling water Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 238000012857 repacking Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- IRBAWVGZNJIROV-SFHVURJKSA-N 9-(2-cyclopropylethynyl)-2-[[(2s)-1,4-dioxan-2-yl]methoxy]-6,7-dihydropyrimido[6,1-a]isoquinolin-4-one Chemical compound C1=C2C3=CC=C(C#CC4CC4)C=C3CCN2C(=O)N=C1OC[C@@H]1COCCO1 IRBAWVGZNJIROV-SFHVURJKSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000008093 supporting effect Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- DGLFSNZWRYADFC-UHFFFAOYSA-N chembl2334586 Chemical compound C1CCC2=CN=C(N)N=C2C2=C1NC1=CC=C(C#CC(C)(O)C)C=C12 DGLFSNZWRYADFC-UHFFFAOYSA-N 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Landscapes
- Plasma Technology (AREA)
Abstract
A module, such as a pump module or a sputtering module, comprises a lid assembly sufficient to fit or to cover a compartment, such as a pump compartment or a sputtering compartment, of a coating system, such as a modular coating system. A sputtering module comprises a power supply unit and is sufficient for receiving an electrical input and for delivering an electric output sufficient for sputtering in a sputtering compartment. A pump module, it comprises at least one pump and is sufficient for receiving an electrical input sufficient for operating the pump or pumps. Various connections between the module, external supplies, components or devices, and the compartment may be made automatically and/or manually. A control connection may be such that an external controller or a central controller is able to recognize a particular module that is associated with a particular compartment of the coating system.
Description
The cross reference of related application
The application requires the right of priority of the U.S. Provisional Application No.60/682985 of Philip M.Petrach, and the applying date of this U.S. Provisional Application is on May 20th, 2005, and the document is whole to be incorporated herein by reference.
Background technology
The apparatus and method of coated substrates are very important for various useful purposes.For example, when applying big substrate (for example big sheet glass), use the apparatus and method of vacuum and various processing gases very important sometimes.Big substrate (for example building glass plate) can be coated with various materials, so that change their optics, heat and/or aesthetic characteristic.For example, optical coating can be used to reduce visible optical transmission, is used to reduce energy absorption, is used to reduce reflectivity, and/or is used to obtain the arbitrary combination of these character.Such optical coating can be called solar control coating, low emissivity coatings, anti-reflection coating and/or multi-functional coatings.Title has been introduced the coating of the optical signature that influences glass substrate for the U.S. Patent No. 6589657 and the title of " Anti-reflectionCoatings and Associated Methods " for the U.S. publication application No.2003/0043464 (each document is all whole to be incorporated herein by reference) of " Optical Coatings and Associated Methods " formation and use.
Application system generally includes applicator and some distant place connector elements.Applicator (also can be called application system) generally includes the processing module or the chamber of a plurality of arranged in series, and like this, substrate can lead to next processing module from a processing module.Substrate is usually by roller supporting, and along substrate by line along the upstream direction to the downstream pass through applicator.Substrate usually at one end or upstream extremity enter applicator, by a plurality of processing modules (in these processing modules, it is applied by a kind of material or differing materials), and leave applicator at the other end or downstream end.Substrate can be oriented such that its level or level of approximation, and along level or level of approximation plane process applicator, substrate also can be oriented such that its vertical or near normal, and along vertical or near normal plane process applicator, perhaps otherwise directed and therefore substrate can pass through applicator.The RCU that is connected with applicator can comprise electric equipment, control electronic installation and other peripherals.The coating of big substrate has challenge.For example, building glass is made for big plate usually, is measured as 3.2 meters * 6 meters (126 inches * 236 inches), and it may be difficult in transports in the application system and handle.The application system that is suitable for applying big substrate (for example building glass) may have the hundreds of foot long along the direction of substrate by line, may occupy a large amount of zones in the treatment facility, and its purchase, the place is provided, operation and maintenance may be quite expensive.
Applicator can be used for coating processing, this coating processing comprise when substrate motion during through target compound with the target compound material from plane target compound or the splash of cylindricality target compound to substrate.Be used for coming the system and method for deposition material to introduce in U.S. Patent No. 4166018 (title is " Sputtering Process and Apparatus ") by plane target compound or magnetron like this, the document is whole to be incorporated herein by reference.Be used for coming the system and method for deposition material to introduce in U.S. Patent No. 6736948 (title is " Cylindrical AC/DCMagnetron with Compliant Drive System and Improved Electricaland Thermal Isolation ") by cylindricality target compound or magnetron like this, the document is whole to be incorporated herein by reference.The splash of target compound material may be comprised the large power supply of using suitable splash and uses the suitable thermal control of water coolant that it is overheated for example to avoid to big substrate.
Splash is carried out in vacuum environment usually.In this article, term " vacuum " can refer to be lower than the gas under any pressure of barometric point.Usually, the splash processing that is used for coated glass is carried out under the millitorr scope.In the splash processing that is used for applying big sheet glass, plate can pass through (for example) cylindricality target compound under vacuum, target compound rotation simultaneously, and the target compound material carries out splash.Processing comprises the vacuum environment that keeps being fit to splash in vacuum environment when parts move.In some splashes were handled, gas can be introduced in the splash separate space, so that can react splash.Usually, the reaction splash comprises the interaction or the reaction of gas and splash target compound material, so that form one deck on substrate.The gas volume that can introduce in the splash processing is less usually, and like this, processing pressure keeps below barometric point preferably, and handles separate space and still can think to be under the vacuum.
Figure 1A is the synoptic diagram that can be used for the application system 100 of coated substrates 104 or a plurality of substrates.As shown in the figure, the applicator 102 of application system 100 can comprise for example processing module 106 of a series of processing modules, and substrate for example substrate 104 or a plurality of substrate can pass through this processing module.Processing module 106 can comprise a plurality of separate spaces, and each separate space can be set to splash separate space, pump separate space or be enough to be used in the separate space of some other purposes.Substrate can be coated with material, multilayer material or multiple material in processing module.
Application system can also comprise some (leaving applicator) parts at a distance, for example is used for the power supply of splash, as shown in Figure 1A.The power subsystem (power supply) 112 that is used for splash can be used for providing electric power to the cylindrical magnetron or the planar shaped magnetron of applicator 102, for example controls electric power.A power subsystem totally is used for each splash separate space, but in some cases, two or more power supplys can be connected with a splash separate space.Electricity parts for example power supply are usually located near the support of applicator.When applicator is big, can use a plurality of supports.
For example, electric support 110 can comprise power subsystem 112, as shown in Figure 1A.Power subsystem can be assemblied in the standard electric support, and the floor space of this standard electric support is about 24 inches * 24 inches.Support can be equipped with a plurality of power subsystem that are used for a plurality of separate spaces.Some power supplys are too big for this support, and can be positioned at special-purpose cabinet.The floor space of such cabinet is generally 60 inches * 30 inches or bigger.An example that is used for the power supply of application system is by Advanced Energy Industries, Inc. (Fort Collins, the crystal current source unit of Colorado) buying.For can be near applicator, electric support or cabinet be positioned to leave the applicator certain distance usually.
Application system can also comprise cable 114, and this cable 114 stretches to applicator 102 from electric support 110, as shown in Figure 1A.Cable 114 can be in conduit or the wire way.In some cases, in the duct of these conduits below the walkway and between applicator and power supply, thereby can not hinder the walkway.In some cases, bigger auxiliary ground upper bracket is used to keep conduit or wire way.As shown in Figure 1A, extend between electric support 110 and applicator 102 in duct 116, and carrying cable 114.Common duct be about 36 inches wide and about 30 inches dark.Big applicator can have the splash separate space above 50, therefore can have to surpass 50 power supply, and each power supply has 6 cables.Applicator is delivered to cable 114 in duct 116, then, they at this applicator place along the length of applicator and be distributed in additional trenches or the overhead support.Cable extends to each splash separate space from this point.For bigger applicator, cable can extend beyond 100 feet.Single splash separate space may need a plurality of cables or cable assembly to make external power source at a distance or the power supply that leaves applicator be connected with separate space.For example, the rated current of existing transmission line structure is about 70 ampere electric currents of every cable assembly.When power (this power can be represented by curtage) increased, all adding a building-out cable assembly for each the additional electrical flow in 70 ampere electric current increments (for example, had an add-on assemble for the 71-140 ampere; For 141 to 210 amperes another add-on assemble is arranged).For example, when power is relevant with 180 amperes levels of current, can use three cable assembly with about 70 amperes of rated current.The superpower or the levels of current that are produced by AC power be greater than about 300 ampere electric currents, 400 ampere electric currents for example, and for example, this can make external power source unit, distant place be communicated with the splash separate space by a plurality of cable assembly.Each cable assembly can be included in a plurality of conductors (diameter of this overcoat is greater than 1 inch) in the overall overcoat, so that handle so big electric current.These many cable assembly are very expensive, and price may surpass every foot of $100.For large scale system, the total cost of the cable that uses between power supply and applicator may surpass $100000.
Arc-suppression circuit can be positioned near the magnetron of splash separate space.Such arc-suppression circuit for example can linking to each other or being installed in this covers with the lid (for example lid 130 of Figure 1B) of splash separate space.Change other circuit enter power supply before leading to magnetron and can be positioned near the magnetron entering power supply, for example have certain relation with lid.Power subsystem at a distance still is used to control the power supply that offers magnetron, and is connected with the splash separate space by suitable cable.When a large amount of cables linked to each other with applicator, the operation of applicator may form radio frequency (RF) noise or interference.Particularly, external power source or the power supply that leaves applicator will play the effect of antenna, radiation broadband RF noise to the cable (particularly utilizing in the processing of alternating-current (AC)) of the separate space transmission electricity of applicator from afar.Cable carrying direct current (DC) also may cause interference, particularly for example when the DC process is relevant with serious electric arc.RF interferes may influence the electronic unit of applicator and the parts of the miscellaneous equipment in this zone.The selection of this cable, wiring, shielding and ground connection will note reducing or avoiding these noises or interference usually.
Figure 1B is the schematic sectional view of the splash separate space A in the processing module 106 of Figure 1A.Substrate 118 supports by roller 120 (perhaps be generally a plurality of such rollers, shown in cannot see in the sectional view) and by splash separate space A, this roller substrate along with shown in the vertical direction of section or support this substrate when moving with the vertical direction of paper plane.Target compound 122 (for example cylindricality target compound or rotatable cylindricality target compound) for example is positioned at above the substrate 118, and at one end by end block 124 supportings, is supported by end block 126 at the other end.End block also supports a collection of magnet of target compound inside.Drive end block 124 and make target compound 122 rotate, like this, splash makes target compound more or less corrode equably in its splash zone.Arrange or be installed in the motor 128 that drives above the end block 124 revolving force is provided, this motor is connected with target compound by driving end block.The electric input unit 136 that is connected with water end (W.E.) piece 126 and links to each other with target compound by this water end (W.E.) piece is provided for the electric power of splash.Water end (W.E.) piece 126 also makes water coolant lead to the inside of target compound from the external source (not shown).The explanation of end block and its purposes provides in above-mentioned U.S. Patent No. 6736948.
Driving end block 124 and water end (W.E.) piece 126 are installed in and cover 130 bottom side, and this lid 130 is assemblied in splash separate space A and goes up and seal this splash separate space A.Lid 130 is generally the metal sheet of suitable dimension, so that the open top of assembling or covering splash separate space A.Housing or lid 132 extend on lid 130, so that the part holds or covers and is installed in the parts that cover on 130 tops at least, for example motor 128.Lid 130 forms assembly (cap assemblies) with the parts that are connected thereon.Cap assemblies can raise, so that can enter the inside of splash separate space A, this for example may be fit to safeguard or the target compound conversion.Junctor 134 makes electric input unit 136 to throw off with cap assemblies, and this may be adapted at for example making cap assemblies to carry out before moving.Common junctor makes the metallic cable that exposes be clamped in the feedthrough of conducting metal piece or other suitable dimension.
Fig. 2 is the schematic sectional view of the processing module 106 of Figure 1A.In this view, processing module 106 comprises six separate spaces or compartment.Slit valve (not shown) can be positioned between the adjacent processing module (for example processing module shown in Figure 1A), so that adjacent processing module is isolated mutually.Each processing module (for example processing module shown in Figure 1A) can be respectively to the normal atmosphere ventilation, and this for example can be fit to safeguard.Each separate space of processing module can be set to splash separate space, pump separate space respectively, have the separate space or even the untapped separate space of some other purpose.In different splash separate spaces, different target compound materials can be used, different electric structures can also be used.For example, AC electricity and DC electricity may be used to splash.
In processing module shown in Figure 2 106, pump separate space 203 is positioned at an end of processing module, and pump separate space 205 is positioned at the other end of processing module.Such structure can be used to be reduced in processing module 106 and the air-flow between any processing module at the place, end of this processing module 106.As shown in Figure 2, splash separate space A-D is between two pump separate spaces 203 and 205.Splash separate space B can be the splash separate space that utilizes planar magnetron, as shown in the figure.In common planar splash purposes, a spot of expensive material or high value material at least one planar magnetron from separate space carries out splash.Material is generally like this, comprises that the cylindricality target compound of this material will not wish or prevent too expensive.The example of this material comprises silver (Ag) and nickel-chromium.Splash separate space C can be the splash separate space of AC power supply, and splash separate space D can be the splash separate space of DC power supply, goes out as shown.
Be used for from power subsystem to the cable of the magnetron of arrangement of compartments power supply can to carry out the cable of similar events as different with being used for different arrangement of compartments.For example, the cable that is used to provide the AC electricity to carry out the AC splash is different with the cable that is used to provide the DC electricity to carry out the DC splash usually.And, the number that for example is used for the cable assembly of a special arrangement of compartments can be obviously different with the number that is used for another arrangement of compartments, for example, a cable assembly is used for the separate space of about 70 ampere electric currents of requirement (low power purposes relatively), and about six cable assembly are used for the separate space of about 400 ampere electric currents of requirement (higher power applications relatively).Usually, it is also uneconomical that six cable assembly are linked to each other with each separate space (particularly for example with respect to external power source unit separate space farthest), although do not do the handiness that may limit whole application system like this.Also for example, cable can change according to the position of the special splash separate space in application system.For example, when splash separate space during near an end of applicator, can use suitable longer cable, for example extend beyond 100 feet cable, and when the splash separate space arrived the location point of applicator near cable guide or cable trunking, it was suitable for stub cable to use.In some application systems, all cables all are made for sufficiently long, so that arrive all separate spaces, although this may increase cost, may produce RF noise or interference, and/or may cause the electric losses between power subsystem and splash separate space bigger.In some application systems, each cable customizes according to the structure of splash separate space, and can not exchange with other cable.
Sometimes, application system repacks into like this, and at this moment the exotic materials splash that may carry out in special separate space can be carried out in different separate spaces.Repacking can comprise and makes cap assemblies move to difference or new separate space from its initial separate space like this, and this can be relevant with the special objective thing.This repacking may further include feed cable (this feed cable links to each other with initial separate space) is linked to each other with new separate space, and does not change power subsystem or its position.Also can select, this repacking can also comprise makes the feed cable rewiring to new power.In the process of repacking like this, have problems usually.Initial cable may be too short for new location, and perhaps the cable possible errors connects.For example, power subsystem may be connected with the magnetron of mistake or non-expectation, and magnetron may be connected with the power supply of mistake or non-expectation, may use the cable of wrong or non-expectation, or the like.Usually do not wish these incorrect links,, may cause safety problem because it may produce undesirable treated state, or the like.For example, when power subsystem provides splash when electricity to the magnetron of safeguarding unintentionally, may produce unsafe situation.
Fig. 3 is the schematic block diagram of system, and wherein, the cable 321-324 that links to each other with power subsystem 301-304 is connected with the magnetron 311-314 of the splash separate space A-D of Fig. 2 respectively.In this accompanying drawing, all power subsystem 301-304 are connected with public power.Public power can be specified 380 volts or 480 volts (as shown in the figure), three-phase AC power supplies.Each cable 321-324 is exclusively used in each power subsystem 301-304 respectively.These cables are not interchangeable usually.Mistake be, power subsystem 303 is connected (rather than predetermined magnetron 313) with magnetron 314 by cable 323, power subsystem 304 is connected (rather than magnetron 314 of being scheduled to) with magnetron 313 by cable 324.
As shown in Figure 3, controller 330 is connected with each power subsystem 301-304 and is connected with each magnetron 311-314.The relation of mapping information indication between power subsystem 301-304 and magnetron 311-314 by controller 330 storages.This information is manually imported by operator usually.For example, controller 330 can indicate power subsystem 303 to be connected with magnetron 313, because this is a structure correct, suitable or expection.Because cable connection error, expected structure with shown in practical structures different.Consider expected structure, controller 330 will be used for can to power subsystem 303 send command signals in case control to the power supply of magnetron 313.But, consider practical structures, the command signal that controller 330 sends to power subsystem 303 is with the power supply of working control to magnetron 314, rather than magnetron 313.This may cause wrong processing, and has danger.For example, may wish to close magnetron 314 (allowing to be used for to safeguard) by controller 330 or by powered-down unit 304 (this power subsystem 304 and magnetron 313 incorrect links).In this example, electric power still sends to magnetron 314, because power subsystem 303 by cable 323 and with its incorrect link.This for example may cause the injury to the technician who works on magnetron 314 in maintenance process.This also may cause structure deteriorate.For example, when power subsystem 303 is by DC cable 323 during with AC power supplies unit that magnetron 314 is connected, DC cable 323 may be impaired when its receives from the unitary AC electricity of AC power supplies.
Usually wish that development is used for device, the system and method for coated substrates.
Summary of the invention
Module for example pump module or splash module can comprise cap assemblies, and this cap assemblies comprises lid, and this lid is the opening of the separate space (for example pump separate space or splash separate space) of assembling or covering application system (for example moudle type application system) enough.When module was the splash module, it comprised power subsystem, and was enough to receive electricity input (for example standard electric input), and transmitted the electricity output of the splash that enough is used for the splash separate space.When module was pump module, it can comprise at least one pump, and was enough to be used in receiving the electricity input, and this electricity input enough is used for operating pumps.Various connections between module, any external power source, parts or device and separate space can be carried out automatically and/or manually.Control linkage between module and separate space can be for like this, and promptly peripheral control unit can be discerned the special module that links to each other with the special separate space of application system.
The splash module can adopt the unitary form of the single physical that comprises power subsystem and magnetron.For example, power subsystem and magnetron physical connection or be installed on the top and bottom of lid of cap assemblies of splash module respectively.And for example when cap assemblies was arranged in the top of separate space with suitable method, power subsystem can be bearing in above the separate space by lid, and magnetron can be bearing in the separate space by lid, and lid enough seals the top of separate space.The splash module can also comprise housing or lid, lid housing or lid to small part is surrounded the parts that link to each other with the top of lid, power subsystem and connect power subsystem and any tie cable of magnetron for example, like this, relevant with each modular unit does not wish noise or interferes and can for example be limited in the lid more or less.
The splash module can move to another separate space by a separate space from applicator by make the cap assemblies motion with any desired manner housing or the lid of module (for example by).When power subsystem and magnetron can be when the single physical unit link to each other, can relatively easily avoid after this motion of module or any transformation, another power supply being connected with magnetron or another magnetron being connected with power subsystem in inappropriate mode at applicator.And, when power subsystem and magnetron can may not need to use power supply and tie cable at a distance when the single physical unit links to each other.Therefore, application system is relatively economical on total floor space and total cost, and is structurally simple relatively, and/or comparatively safe in operation or maintenance.
A plurality of splash modules of application system can be used public power.At this moment, the internal electric source unit of each splash module can be transformed into the electricity input of public power suitable electricity output, for example is fit to the electricity output that electricity is exported or the splash relevant with the splash module handled of the magnetron of splash module.Public power can link to each other with each splash separate space of applicator.The splash module can be connected with public power, and this public power is by making module and separate space appropriate location and linking to each other with each splash separate space automatically toward each other.Other relevant with separate space with module is suitable to be connected, and (for example with being connected that the supply of heat-eliminating medium is correlated with) can carry out automatically.For example, any aforementioned or other suitable connection can manually and/or automatically be carried out.
Pump module can link to each other with the separate space of applicator.This pump module can comprise at least one pump, and for example, this pump enough provides vacuum to separate space.Pump can or be installed on the top of this lid with the top physical connection of the lid of cap assemblies, and can be surrounded by housing or lid to small part.For example, when cap assemblies placed on the top of separate space with suitable method, pump can be bearing in above the separate space by lid, and lid can enough seal the top of separate space.Pump module can move to another separate space from a separate space of applicator by make the cap assemblies motion housing or the lid of module (for example by) with suitable method.Between pump module and forepump, can provide suitable connection, for example anterior pipeline.Pump module can be connected with anterior pipeline automatically by making the mutual appropriate location of module and separate space.The suitable connection of other relevant with parts with module can carry out automatically.For example, any aforementioned or other suitable connection can manually and/or automatically be carried out.
Central control unit can pass through control linkage device (for example private cable) and link to each other with the single separate space of applicator.Central control unit for example can link to each other with each separate space of applicator by each separate space private cable.Cable can be connected with module, and this module is splash module or pump module, and it is connected or with respect to each separate space appropriate location with each separate space is suitable.Module can link to each other with unique identification, and controller can identify identification module by this, and therefore module is linked to each other with special separate space.In this system, do not need to provide in addition controller with cartographic data (for example artificial data input, its may be easily impaired or be easy to make mistakes).
To further introduce these and various others, feature and embodiment below.
Description of drawings
Here all respects, feature and embodiment will be introduced with reference to the accompanying drawings, these accompanying drawings will be briefly introduced below.Accompanying drawing is schematically, does not need to draw in proportion.Accompanying drawing has been represented diversity of settings material or all respects or feature, and can be totally or part represent one or more embodiment or example.The reference number, letter and/or the mark that are used to represent particular components or feature in an accompanying drawing can be used to represent components identical or feature at other accompanying drawing.
Figure 1A is the diagrammatic side view of application system.
Figure 1B is the schematic sectional view of processing module of the application system of Figure 1A, wherein, section be with the vertical plane of substrate traffic direction in.Figure 1A and Figure 1B can be referred to as Fig. 1 in this article.
Fig. 2 is the schematic sectional view of processing module of the application system of Figure 1A, and wherein, section is in the plane parallel with the substrate traffic direction.
Fig. 3 is the schematic block diagram of system of electricity that is used to provide and controls the separate space of the processing module of leading to Fig. 2.
Fig. 4 is the splash separate space described here and the schematic sectional view of splash module, wherein, section be with the vertical plane of substrate traffic direction in.
Fig. 5 A is the splash separate space described here and the schematic sectional view of splash module, wherein, section be with the vertical plane of substrate traffic direction in.
Fig. 5 B is the upper side view of the part (for example described in Fig. 5 A) of splash separate space and splash module.
Fig. 5 C is the bottom side view of the part (for example described in Fig. 5 A) of splash separate space and splash module.
Fig. 5 D is the upper side view of the part of splash separate space and the part of splash module (for example described in Fig. 5 A).
Fig. 5 E is the bottom side view of the part of splash separate space and the part of splash module (for example described in Fig. 5 A).
Fig. 5 A, Fig. 5 B, Fig. 5 C, Fig. 5 D and Fig. 5 E can be referred to as Fig. 5 in this article.
Fig. 6 A is the schematic sectional view of the part of application system, and wherein, the splash module can be moved, and pump module can move, and as described here, and section is in the plane parallel with the substrate traffic direction.
Fig. 6 B is the synoptic diagram of the part of application system, and this application system comprises splash module and pump module described here, and can move, and as described in conjunction with Fig. 6 A, wherein, section is in the plane parallel with the substrate traffic direction.
Fig. 6 C is the schematic cross sectional views of the part of application system, and this application system comprises pump module described here and separate space, as described in conjunction with Fig. 6 B, wherein, section be with the vertical plane of substrate traffic direction in.
Fig. 6 A, Fig. 6 B and Fig. 6 C can be referred to as Fig. 6 in this article.
Fig. 7 is the schematic block diagram that is used to provide and control the system of the electricity that leads to processing module, as described here.
Fig. 8 is the upper side view of splash module, as described here.
Fig. 9 A is the bottom side view of planar magnetron, and this planar magnetron is associated with splash module described here.
Fig. 9 B is the top sectional side view of the part of planar magnetron, and this planar magnetron is associated with splash module described here.
Fig. 9 A and Fig. 9 B can be referred to as Fig. 9 in this article.
Embodiment
In this application, should be known in that the speech of expression odd number comprises its corresponding plural number, and represent that the speech of plural number comprises its corresponding odd number, unless hint or clearly understanding or explanation in addition.And, should be known in that for any given described parts the optional thing of these parts or surrogate can use separately or mutual arbitrary combination usually, unless hint or clearly understanding or explanation in addition.Should be known in optional thing of any of these or surrogate in addition just schematically, rather than restriction, unless hint or clearly understanding or explanation in addition.And should be known in that any figure or number or amount all be approximate, whether any number range all comprises minimal number and the maximum number of determining this scope, no matter word " is comprised " etc., unless hint or clearly understand or other explanation.Should also be appreciated that any title of use is for convenience, rather than be used for restriction.It is any relatively arbitrarily up to the language of restriction, still less open up to the language of sealing or still less open language up to sealing to should be known in that in addition any random, open or disclosed language will comprise, unless hint or clearly understand or explanation in addition.For example, speech " comprise " can comprise " comprising ", " mainly comprising " and/or " by～form " language of type.
Various terms are introduced usually or are used for conveniently understanding.Should be known in the corresponding overall introduction of these terms or use corresponding language or the phraseological variation or the form that will be applicable to these terms.Should also be appreciated that,, cannot adopt or cannot adopt fully the corresponding common explanation or the use of common explanation or use or any term when term is used for non-commonly or more specifically during mode.Should also be appreciated that for the explanation of specific embodiments, employed term or their explanation are not restriction.Should also be appreciated that described embodiment or described purposes are not restriction, but can change.
The moudle type splash system that comprises a series of separate spaces (for example a plurality of processing or coating separate space and a plurality of pump separate space) can be provided with in many ways, for example in the variety of way described in the U.S. Patent application No.11/382241 of the common pending trial of Michael RobertPerata etc., the title of this U.S. Patent application is " Apparatus and Method for CoatingSubstrates with Approximate Process Isolation ", the applying date is on May 8th, 2006, the document is whole by this paper reference, as just giving an example.Moudle type splash system for example can be flexible relatively in structure or repacking.
Be applicable to the splash separate space in the moudle type splash system and the embodiment of splash module below with reference to Fig. 4 introduction.Schematically illustrated the sectional view of this splash separate space 400 and splash module 410 among Fig. 4, this splash module 410 comprises power subsystem 402, and this power subsystem 402 is connected with the top of lid 404 or is installed on the top of lid.For example, power subsystem 402 can be arranged in water end (W.E.) piece 406 and drive between the position of end block 408 with respect to lid 404 bottom sides layout, as shown in the figure with respect to the top side of lid 404.In the time of near power subsystem 402 is positioned at water end (W.E.) piece 406, as shown in the figure, power subsystem 402 can reduce or eliminate with the danger that the end block of mistake is connected.Splash module 410 can also comprise motor 422, and this motor 422 is connected with the top of lid 404 or is installed on the top of lid, and this motor 422 links to each other with driving end block 408.Splash module 410 also comprises electric input unit and the electric take-off equipment that links to each other with power subsystem 402, as described further herein, and can also comprise housing or lid 414, and as shown in the figure, this housing or lid 414 surround each parts of splash module to small part.
The electric take-off equipment that links to each other with power subsystem 402 can comprise at least one cable 412, and this cable 412 makes the electricity output 418 of power subsystem 402 be communicated with water end (W.E.) piece 406.Cable 412 can be so that power subsystem 402 be connected with the mode that end block 406 is thrown off easily.When power subsystem 402 was not connected or throws off with end block 406, power subsystem may connect with the end block of different splash modules.Cable 412 can be shorter relatively, for example three feet or littler.In the enough short splash module 410 of cable 412, compare with respect to the splash separate space that uses the relative longer cable that links to each other with the remote power source unit, radio frequency (RF) noise relevant with cable 412 or interference and/or transmission electric losses can reduce or eliminate, and cost can reduce.Cable 412 can be surrounded by housing or lid 414 to small part, as shown in the figure, this also can reduce or eliminate the outer RF of housing or lid communicate by letter noise or interference and/or with the interference of miscellaneous equipment.
The electric input unit that links to each other with power subsystem 402 can comprise cable 420, and this cable 420 can be surrounded by housing or lid 414 to small part, as shown in the figure, is used to make the electricity input of self-power supply device 416 to be communicated with power subsystem.Electric supply installation 416 is in the outside of splash module 410.The a plurality of splash modules relevant with applicator or whole splash module can be used for electric supply installation 416.For example, the splash module relevant with applicator can have and enough be used for 416 that is communicated with electric supply installation, that phase is perhaps identical cable or junctor, and like this, such splash module can be exchanged with another.The size that is used for electricity input is supplied with the cable 420 of the power subsystem 402 that links to each other with separate space 400 can be arranged to supply with the peak power that separate space (perhaps any separate space of applicator) may need.Public electric supply installation can link to each other with different separate spaces or magnetron, and at least one isolating switch and/or at least one interlock circuit can link to each other with each separate space or magnetron.The parts of isolating switch and/or interlock circuit can be obtained by a plurality of market supplys source usually, for example Rockwell Automation Allen-Bradley﹠amp; Rockwell Software Brands (Milwaukee, Wisconsin), Siemens Corporation (New York of New York), Square D brand of Schneider Electric SA (Reuil-Malmaison, France) and Moeller Electric Corporation (Houston of Texas), and they can assemble with any desired manner, for example any known means.The electric supply installation that comprises one or more isolating switchs and/or interlock circuit can perhaps can assemble with any desired manner by obtaining on the market usually.At least one wave filter (not shown), at least one trap circuit (not shown) and/or their arbitrary combination can be used to reduce or prevent with splash module 410 to the relevant RF noise of electric supply installation 416 or the transfer of interference.The parts of wave filter and/or trap circuit can be obtained by a plurality of market supplys source usually, and they can assemble with any desired manner, for example any known means.The power supply that comprises one or more wave filters and/or trap circuit can be obtained by market usually, perhaps can assemble with any desired manner.
Electric supply installation 416 can be not regulate domestic power supply, for example standard three-phase AC power supplies.For example, power supply can be from about 380 volts to about 600 volts three-phase AC power supplies, about 50 hertz to about 60 hertz.For example, electric supply installation can be 380 volts, the 50 hertz power supplys in 480 volts of the U.S., 60 hertz of power supplys and other place.Power subsystem 402 is enough in the future, and the electricity input of self-power supply device 416 converts the electricity output 418 that can be used for splash to.For example, power subsystem 402 can convert 480 volts, 60 hertz AC input to about 300 volts to 900 volts DC output, and perhaps about 350 volts AC exports about 1000 volts to.Be suitable for the splash by the cylindricality negative electrode the AC frequency can about 30 kilo hertzs to about 90 kilo hertzs scope.
Power subsystem 402 can comprise at least one feedback control circuit, it be enough to according to predetermined point is set or be provided with pre-determined range keep or change output 418.For example, when output was consistent with the set-point or the scope that is provided with, power subsystem was enough to keep output, and different with the set-point or the scope that is provided with or when departing from, power supply is enough to adjusting or change is exported when output, and like this, it is with the set-point or that scope is set is consistent.Power subsystem 402 can comprise at least one storing unit or storage arrangement, is used to store such set-point or scope is set, and perhaps can comprise and being connected of external storage device or storage arrangement.For example, power subsystem 402 can have power set point, power setting scope, electric current set-point, electric current that scope, voltage set point and/or voltage are set scope is set.Any this set-point or scope is set offers power subsystem 402 by the controller (not shown) of application system.When output 418 when being higher or lower than this set-point or the scope of setting outside, the feedback control circuit of power subsystem 402 can appropriate variation, so that make set-point or the level relevant with the scope that is provided with returned of exporting.The feedback control circuit of power subsystem 402 can comprise to be enough to change electric supply installation and at least one insulated gate polarized lense pipe (IGBT) and/or at least one power set of controlling output is provided.Power subsystem 402 can comprise at least one arc-suppression circuit, and this arc-suppression circuit is enough to detect the electric arc in the splash separate space and carries out significant response, for example cuts off the electricity supply by the short period of time.The example of arc-detection and change-over circuit proposes in U.S. Patent No. 5241152, and the document is whole to be incorporated herein by reference.Feedback controller, storage/storage arrangement, insulated gate polarized lense pipe, the parts that change power device and/or arc-suppression circuit can be obtained by market usually, and they can assemble with any desired manner, for example any known means.The power supply that comprises one or more these parts can be obtained by market usually, perhaps can assemble with any desired manner.The example in the market supply source of the various power supplys relevant with parts is Advanced Energy, and Inc. (Fort Collins, Colorado).
When power subsystem 402 was the DC power subsystem, it can comprise the rectifying circuit that is enough to AC is transformed into DC, and/or can comprise the voltage control circuit that is enough to control the DC output voltage.For example, power subsystem 402 can comprise the transformer that is enough to input AC is transformed into suitable voltage.Power subsystem 402 can produce relatively large heat, therefore wishes or need fully to cool off.The suitable cooling that is used for power subsystem 402 can be provided by suitable heat-eliminating medium or fluid, for example by air or water.In the separate space with the water cooling target compound, for example by 406 coolings of water end (W.E.) piece, it can be suitably or makes water cool off power subsystem 402 easily.
Power subsystem 402 is enough to 400 power supplies of splash separate space for use in the splash purposes.Therefore, do not need remote power source, electric support or cabinet to link to each other with splash separate space 400.The splash module 410 that use links to each other with splash separate space 400 or use respectively the applicator of a plurality of such splash module that links to each other with a plurality of such splash separate spaces 400 can be on the floor space of total system and cost relatively economical, and relatively easily constitute or reequip.
Be applicable to the splash separate space of moudle type splash system and the embodiment of splash module below with reference to Fig. 5 introduction.Fig. 5 A has schematically illustrated the sectional view of splash separate space 500 that comprises the separate space body and the splash module 510 that comprises power subsystem 516 (this power subsystem 516 is connected with the top of lid 512 or is installed on the top of this lid).In this synoptic diagram, splash module 510 is expressed as can be with respect to 500 motions of splash separate space, and this can be fit to reequip applicator, and wherein, splash module 510 moves to for example another separate space of applicator from a separate space (for example the splash separate space 500).The splash module can be designed to be able to carry out such motion, like this, the splash module that can link to each other with a separate space can be at an easy rate left and/or is used for exchanging from this separate space (for example another separate space of applicator), like this, the splash module that links to each other with a separate space can exchange, exchange or be replaced by it with another splash module (this another splash module for example can link to each other with another separate space of applicator).
Should be known in that power subsystem 402 or 516 can be respectively with any desired manner (for example direct, indirect and/or contiguous) and lid 404 or 512 physical connections, respectively shown in Fig. 4 or Fig. 5 A.For example, power subsystem 516 can link to each other with lid 512 physics by housing or lid 514 with any desired manner.For example, power subsystem 516 can be installed in the top or the sidepiece of housing or lid 514, and this housing or lid 514 link to each other with lid 512 physics.Also for example, power subsystem 516 can link to each other with lid (not shown) physics with any desired manner, this lid can be similar to the lid 512 that for example links to each other with near separate space (not shown), for example adjacent separate space, is positioned to leave the separate space of a plurality of separate spaces, for example leaves about 4 separate spaces.Power subsystem 516 can regard in the past covers 512 with housing or lid 514 described any-modes and link to each other with the lid of another separate space.Also for example, power subsystem 516 can be directly or indirectly links to each other with another location physics on the applicator.For example, power subsystem 516 can link to each other with the lid or the lid physics of any position on being positioned at applicator.The example that is used for the correct position of power subsystem 650 (this power subsystem 650 can link to each other with splash module 612) is represented by example (non-limiting) with dotted line at Fig. 6 B.Usually, link to each other with applicator any possible, actual, feasible and/or easily the position can use.Usually, this position is except the position away from applicator.Should be known in that any connection or cable connect can regulate with any desired manner, so that adapt to the position of power subsystem with respect to suitable compartment.
Usually, when the splash module was left the separate space of applicator, the present processing module of separate space was ventilated to normal atmosphere, and with all disconnect any connection (for example any manually-operated connection) of splash module.For example, the convenient cable 900 that is communicated with between splash module 510 and controller (not shown) can disconnect.For example in the view of Fig. 5 A, the control linkage device 902 that links to each other with this cable 900 can be removed from the control input 520 of splash module 510.As shown in Fig. 5 A, when control linkage device 900 was connected with control input 520, it was communicated with power subsystem 516 and splash module controller 582, and this splash module controller 582 is communicated with motor 518.Splash module controller 582 can be used to control the operation (this motor can link to each other with at least one end block) of at least one motor, and be used to monitor at least one interlock circuit, this interlock circuit can link to each other with splash module 510, for example with the existence or the relevant interlock circuit of integrity of target compound rotation, motor torque (for example higher or lower motor torque), end block vacuum (for example vacuum leak), end block cooling fluid flow (for example airflow, current or cooling fluid leak) and Safety cap body.Splash module controller 582 can be used to make that the relevant information of interlock circuit for example is communicated with the main control and/or the user interface of application system.
Also for example, the convenient cable 904 of controlling electricity (for example low pressure control) connection between splash module 510 and auxiliary power supply (not shown, for example 240 volts or 120 volts of AC power supplies) can disconnect.For example, in the view of Fig. 5 A, the auxiliary AC junctor 906 that links to each other with this cable 904 can be away from the auxiliary AC input 522 of splash module 510.As shown in Fig. 5 A, when auxiliary AC junctor 906 was connected with auxiliary AC input 522, it selectively was communicated with power subsystem 516 (shown in dotted line), and is communicated with splash module controller 582, and this splash module controller 582 is communicated with motor 518.When using auxiliary power supply, it can separate with main electric supply installation 580, and this main electric supply installation 580 is provided for the electricity input of splash, as shown in the figure.Accessory power supply can be used for making at least one parts that links to each other with the splash module to turn round, and this splash module has relatively low power requirement.The example of these parts comprises and can be used for rotating the end block that drives splash module 510 and the motor 518 of logic unit (not shown).
In case splash separate space 500 is with the atmosphere ventilation and disconnect suitable the connection, splash module 510 just can raise by appropriate device or method and leave separate space body 530.For example, as shown in the accompanying drawing of Fig. 5 A, at least one erecting device 524 (two flanges for example, each flange provides porose) can be connected or be installed in the housing of splash module 510 or lid 514 and cover on housing or the lid 514, at least one winch gear 908 (for example two hanged hooks, each hanged hook enough is used to engage the hole relevant with flange) can be used to be convenient to the splash module is promoted from separate space body 530.Winch gear 908 not only can promote splash module 510 in for example just described mode, but also can make the splash block motion to other position, and/or reduces the splash module.This or arbitrarily in other suitable method, splash module 510 can be arranged in the splash separate space above, and can reduce, like this, it is arranged on the top of separate space body of this splash separate space.In the view of Fig. 5 A, splash module 520 is expressed as with respect to separate space body 530 and is in raised position, and like this, it can leave the separate space body, for example perhaps moves to the position of another separate space body.
Splash separate space 500 and splash module 510 can design or constitute like this, and when fully raising above the splash module fully is arranged in separate space body 530 or with respect to separate space body 530, at least one between them connects automatic opening.Splash separate space 500 and splash module 510 can design or be arranged to like this, when the splash module arrangement becomes to be enough to contact with separate space body 530 or with respect to separate space body 530 fully during reductions, at least one connection between them is carried out automatically.Such connection can realize easily by automatic coupler (for example automatic coupler shown in Fig. 5 A 534).
Introduce automatic coupler 534 below with reference to Fig. 5 B and 5C, Fig. 5 B provides the view when seeing above the automatic coupler 534 of Fig. 5 A, and Fig. 5 C provides the view when seeing below the automatic coupler 534 of Fig. 5 A.Shown in these two accompanying drawings, main alignment contact pin 536 extends upward from separate space body 530, so as with splash module 510 in respective socket 538 engagements.Another main alignment contact pin (not shown) can stretch out from the another location (for example opposite end) of separate space body 530, so as with splash module 510 in the engagement of respective socket (not shown).The position that should be known in any contact pin can link to each other with splash module 510, and any respective socket can link to each other with separate space body 530.Should also be appreciated that the position of any contact pin can be an any suitable location, the corresponding position of respective socket can be the corresponding position of any appropriate arbitrarily.When main alignment contact pin and respective socket proper engagement, splash module 510 and separate space body 530 fully align, like this, the automatic coupler 534 (seeing Fig. 5 A) of the lid 512 of splash module 510 and the opening 532 of separate space body 530 (seeing Fig. 5 A) and splash module 510 and separate space body 530 is alignment fully, for example is used for can operating with suitable being connected.
In the view of Fig. 5 B and Fig. 5 C, the automatic coupler 534 of Fig. 5 A is expressed as and comprises: junctor 534a, this junctor 534a link to each other with splash module 510 or are installed on this splash module 510; And corresponding connectors 534b, this corresponding connectors 534b links to each other with separate space body 530 or is installed on this separate space body 530.The position that should be known in junctor 534a can link to each other with separate space body 530, and corresponding connectors 534b can link to each other with splash module 510.Should also be appreciated that the position of junctor 534a can be any suitable location, the corresponding position of corresponding connectors 524b can be the corresponding position of any appropriate.When main alignment contact pin and respective socket proper engagement, junctor 534a and junctor 534b at least roughly or fully align.
As shown in Fig. 5 B and Fig. 5 C, alignment contact pin 540 and 542 edges are upward to stretching out from junctor 534b, and respective socket 544 links to each other with junctor 534a with 546. Alignment contact pin 540 and 542 is enough to mesh with respective socket 544 and 546 respectively, and like this, junctor 534a and junctor 534b fully align, for example complete matching.Identical with the situation of above-mentioned various contact pins and socket, the position of just described contact pin and socket can be any suitable location.Junctor 534a can have some the transverse movement degree of freedom with respect to the rest part of splash module 510, and like this, junctor 534a can be in place by for example align contact pin 540 and 542 guiding.Additional alignment contact pin (for example less relatively alignment contact pin) can be used for linking to each other with junctor 534b, and additional respective socket can be used for linking to each other with junctor 534a, for use in the alignment purpose.Identical with the situation of above-mentioned various contact pins and socket, the position of just described additional contact pin and additional respective socket can be an any suitable location.
In the view of Fig. 5 B and Fig. 5 C, connecting element 551a-557a that links to each other with junctor 534a and the corresponding connectors element 551b-557b that links to each other with junctor 534b (they totally are that 7 electrical isolations are to 551-557) have been represented among the figure.Each comprises three electric mortiser pins and respective socket and two align contact pin and respective socket to connecting element.Here also can consider other number, structure and/or the combination of connecting element, electric mortiser pin, alignment contact pin and respective socket.For example, identical with the situation of above-mentioned various contact pins and socket, the position of just described connecting element, electric mortiser pin, alignment contact pin and respective socket can be any suitable location.Connecting element 551a-557a and connecting element 551b-557b can have some transverse movement degree of freedom, like this, gather to a time-out when align contact pin and respective socket, and it is in place that they make that the corresponding connectors element moves.Connecting element separately is to being used for the different ranges of choice that connect, and is for example described arbitrarily here.
When the power supply that at a distance leaves applicator is used for and splash separate space (for example separate space 500 of Fig. 5) when linking to each other, just described connecting element can be for like this, the power supply (not shown) that promptly leaves applicator can be dynamically connected certainly with end block (for example water end (W.E.) piece), and this end block links to each other with the lid of separate space.For example, in Fig. 5 A, being connected of electric supply installation 580 and automatic coupler 534 can be by the power supply (not shown) that leaves applicator by suitable cable or cable assembly and replace with being connected of automatic coupler 534.When the power supply that is used for linking to each other with splash separate space (for example separate space 500 of Fig. 5) links to each other with near or adjacent separate space physics (for example housing or the lid that passes through module, lid and/or link to each other) with adjacent separate space, just described connecting element can be for like this, be that the power supply (not shown) can manually be connected with end block (for example water end (W.E.) piece), this end block links to each other with the lid of separate space.In any above-mentioned situation, the lid 514 that may exist can change, so that can enter the water end (W.E.) piece suitably, is used for just described connection.
When splash module 514 is used for and splash separate space (for example separate space 500 of Fig. 5) when linking to each other, electric supply installation 516 can directly be connected with magnetron or target compound, as shown in the figure.In this case, the electric supply installation that enters can be the common power supply device, for example by at least one other splash module and/or the electric supply installation that uses by at least one other parts of equipment, rather than from the control power supply of power subsystem.For example, when 480 volts of uses, three-phase common power supply device, three connecting elements (for example connecting element 551b-553b) can be used for connecting in the source mutually with three AC, and other connecting element (for example connecting element 554b) can be used for being connected with the ground connection source.In this case, all contact pins of each connecting element of connecting element 551b-554b can link together, and like this, for example can handle the big electric current of use suitably.In some cases, for example other connecting element (for example connecting element 555b) can be used for being connected with auxiliary power supply.In this case, single connecting element is enough to handle the relatively less electric current relevant with auxiliary power supply, for example up to about 200 amperes electric current, and each contact pin that links to each other with single connecting element can be used for being connected with special or difference in functionality or special or different parts.For example, a contact pin of connecting element can be used for being connected with charged or single-phase, and the neutral source of junctor can be used for being connected with the ground connection source with another contact pin.
Another connecting element (for example connecting element 556b) or (when needing) a plurality of connecting elements can be used for being connected with interlock circuit (not shown) or a plurality of interlock circuit.For example, interlock circuit can be used to prevent splash module 510 operation or prevent that electric current from flowing through splash module 510 (when this operation or stream may be dangerous).For example, maybe ought not have cooling-water flowing out-of-date in 514 dismountings of housing or lid when being used to safeguard, its may be dangerous, perhaps operate splash module 510 or to 510 power supplies of splash module with dangerous.Interlock circuit generally includes at least one parts for example switch and/or transmitter, and it is enough to indicate the state relevant with splash module 510, and for example whether housing or lid 514 be in place.When thinking state safety, interlock circuit returns the signal of indication safe condition usually, so the splash module can operate or provide electricity, no matter automatically, manually still otherwise.When thinking that state is dangerous, interlock circuit returns the signal of indication unsafe condition usually, so the splash module can not operate or power, no matter automatically, manually still otherwise.
When interlocking with when being electrically connected physical sepn, one during these connect will be connected with other and carry out physical connection or disconnection dividually, and just there is the risk that disconnects connection in this.When tie cable when a separate space moves to another separate space particularly like this.In this case, interlock circuit may return wrong signal for "speed OK".When interlocking be electrically connected that mutual physics links to each other (for example provide with a junctor physics and link to each other) and therefore one be connected when connecting physical connection and disconnection with other, will almost not have or not have the danger of incorrect link.In this case, interlock circuit will can not return wrong signal for "speed OK" usually.
At least one standby circuit can connect by automatic coupler 534.For example, the pilot circuit that splash module 510 is connected with the controller (not shown) can connect by automatic coupler 534.In some cases, the connection that is hopeful or needs (for example electricity, control and/or other connection) can be carried out automatically.In this case, may not wish or not need additional the connection.Should be known in that automatic coupler 534 is not limited to any special connecting element number, any special contact pin structure etc.Can use various structures, for example can depend on any structure of the character of the connection that the character of the circuit that will connect maybe will be carried out.
Should be known in that any suitable connecting element can use.For example, can not connecting element 551a-557a and the corresponding connectors element 551b-557b of Fig. 5 B and Fig. 5 C, but can use connecting element 582a-588a that is blade receptor form and the corresponding connectors element 582b-588b that is form of a blade, as shown in Fig. 5 D and 5E.Shown in Fig. 5 D and 5E, some connecting elements (for example connecting element 587a and 588a) and corresponding connectors element (for example corresponding connectors element 587b and 588b) can be divided into two or more sub-elements, three sub-elements for example, as shown in the figure.This may be very favourable when sub-element is enough to handle the electricity input that it receives, and like this, do not wish or need whole element.The connecting element that should be known in any appropriate can be used for any appropriate purpose.For example, connecting element 582a can be used for being connected with the ground connection source with corresponding connectors element 582b.
Fig. 5 B and the view of Fig. 5 C have represented that a pair of 560 connecting element 560a that link to each other with junctor 534a are with the connecting element 560b that links to each other with junctor 534b and another is to 561 connecting element 561a that link to each other with junctor 534a and the connecting element 561b that links to each other with junctor 534b.Be expressed as in a side 560, and be expressed as at opposite side 551-557 to 561 to 551-557.Should be known in that any connecting element 560a can link to each other with junctor 534b with 561a, corresponding connectors element 560b can correspondingly link to each other with 534a with 561b arbitrarily.Should also be appreciated that the position of these connecting elements can be any suitable location arbitrarily, and the corresponding position of these corresponding connectors elements can be the corresponding position of any appropriate arbitrarily.Should also be appreciated that these connecting elements are relevant with fluid stream, this fluid flow often comprises water or water, and like this, they can make things convenient for and unrestrictedly be called the water connector element.Water connector element 560a and 560b are relatively large, quick disconnection, self-packing connecting element, and they form when connecting and connect (not shown) to 560.Water connector element 561a and 561b are relatively large, quick disconnection, self-packing connecting element, and they form when connecting and connect (not shown) to 561.Connection is to usually by with water connector element 560a with 560b is pushed into together and water connector element 561a and 561b be pushed into together form.
For example when splash module 510 is in the position of abundant reduction with respect to splash separate space 500 or separate space body 530, will form and connect 560 and 561, like this, cooling fluid or water freely flow through splash module 510.Under this pattern, connection is convenient to cooling fluid or water supply splash module 510 to 560 and 561 and is made cooling fluid or water return from splash module 510.When splash module 510 fully is arranged in splash separate space 500 or fully raise above the separate space body 530 or with respect to this splash separate space 500 or separate space body 530, disconnect 560 and 561, and the water connector element 560a, 560b, 561a and the 561b that disconnect close.For example these elements closes the leakage that prevents cooling fluid or water with suitable.
Cylindrical magnetron can be operating as or can need the cooling fluid or the every target compound of water coolant of about 30 gallons of per minutes (gpm), so that fully cool off when superpower.For example, the cooling fluid of about 60gpm or the cylindrical magnetron splash module that water can be used to comprise two target compounds.The refrigerative power subsystem can be operating as or can need the cooling fluid of about 15gpm or water coolant to be used for abundant cooling.For example, about 75gpm or more cooling fluid or water can be used to comprise the cylindrical magnetron splash module of two target compounds and a power subsystem.
When splash module 510 is in respect to splash separate space 500 or the separate space body 530 abundant positions (can be called and dip) that reduce and fully aligns, cover 512 openings 532 that cross in the separate space body 530 and extend.In this case, lid 512 is enough to sealed open 532, and like this, splash separate space 510 can be pumped to for example desirable vacuum level suitably.Can use the sealing member of any appropriate, for example single sealing member or double seal.Suitable sealing member can (shape of this O shape ring can be similar to this letter or different with letter " O " by for example using two " O shape rings " 564 and 566 around the opening in the top of separate space body 530 532, be round rectangle for example, obtain as shown in the figure).In this case, two " O shape ring " can separate by cavity 568, and can for example be enough to form double seal 570, as shown in the figure.The vacuum pump (not shown) can link to each other with cavity 568, thereby high quality seal is provided.The pressure transmitter (not shown) can link to each other with cavity, like this, can detect or indicate any seal failure.For example, can raise by pressure in the fault of " O shape ring " sealing member of atmospheric side and to represent, represent and can reduce by pressure in the fault of " O shape ring " sealing member of inlet side.When any such fault of indication, " the O shape ring " relevant with this fault changed between can be when appropriate, when for example separate space body 534 is ventilated next time.
At least one module (for example pump module or splash module) can move to another separate space the application system from a separate space, as following with reference to as described in the figure 6.For example, splash module 612 can move to separate space Z from separate space Y, is schematically shown as Fig. 6 A and 6B.When preparing this motion, (processing module as shown in the figure) can be ventilated with atmosphere for for example separate space Y and Z, perhaps separate space X, Y and Z to comprise a plurality of separate spaces.For example, the single processing module that is included in the isolation slit valve (not shown) of each end can be ventilated like this, promptly by closing this isolation slit valve, closes the pump that links to each other with processing module, and gas (for example cavity or rare gas element) is introduced processing module.And for example, a plurality of processing modules can be ventilated so simultaneously, and promptly the isolation slit valve at the different positions place by being closed in whole application system cuts out the pump that links to each other with processing module, and gas is introduced in the processing module.Appropriate slots valve or slit valve chamber are (for example described in the U.S. Patent application No.11/150360, they will be with reference to shown in Fig. 5-9 of this application and described, the title of this U.S. Patent application is " Dual Gate IsolatingMaintenance Slit Valve Chamber with Pumping Option ", the document is whole to be incorporated herein by reference) can be used for correct position, for example between adjacent processing module.Suitable connection (when sometimes, for example manually connecting) can disconnect, and can setting in motion.
Motion can be used the device or the method for any appropriate.For example, winch can be by being installed on the splash module 612 in the mounting points on the splash module, and the body that is used for relative separate space Y fully promotes the splash module, like this, being dynamically connected certainly of any appropriate (for example relevant with splash module electric supply installation connection, interlocking connection, water coolant connect and/or other suitable being dynamically connected certainly arbitrarily) all disconnects, and the introduction that be connected with this by this motion for Fig. 5 as can be known.Then, splash module 612 can be towards the motion of another separate space, the correct position of transverse movement to separate space Z for example, and as shown in Figure 6A, so it can reduce with respect to separate space Z, shown in Fig. 6 B.When splash module 612 is fully located with respect to separate space Z and is reduced, will carry out suitable being dynamically connected certainly, for example power and supply with being connected of water coolant, by as can be known for this motion of Fig. 5 and the introduction that should be connected.
Should be known in the motion that just described automatic power connects does not need cable.For example, any separate space of processing module (for example separate space Y and Z or separate space X, Y and Z) can provide suitable, compatible or identical power supply and is connected to supply with water coolant and is connected.In this case, when splash module 612 when separate space Y moves to separate space Z, it can with the electric supply installation that links to each other with separate space Z from being dynamically connected, by as can be known for this motion of Fig. 5 and the introduction that should be connected.In this case, do not need supply cable is re-arranged to another separate space from a separate space.Also can carry out other or artificial connect (when sometimes), the introduction that is connected with auxiliary power supply by this control for Fig. 5 as can be known.In case carry out suitable being dynamically connected certainly (for example power supply connect is connected) with water coolant and carry out any appropriate other or manually be connected (when sometimes), can prepare separate space Z and be used for splash and operate, for example by pumping, reequip and do not need to add.In this case, do not need to provide mapping information to controller.
As mentioned above, at least one module (for example pump module or splash module) can move to another separate space the application system from a separate space, as following about as described in Fig. 6.For example, pump module 610 can move to separate space Y from separate space X, is schematically shown as Fig. 6 A and 6B.Pump module 610 covers 614, and this lid is enough to cooperate or cover separate space opening 600, for example standard size separate space opening.Pump module 610 can comprise at least one pump, three vacuum pumps 618,620 and 622 shown in Fig. 6 C for example, and they link to each other or are installed in this with lid 614 and cover, and they can be covered or encirclement by housing or lid 616 to small part.Can use the pump of any appropriate, for example turbomolecular pump (turbo-pump).Pump module 610 can move to separate space Y from separate space X with any desired manner, for example by on regard to the described any rising of motion, location and the reduction campaign of splash module 612.When preparing this motion, comprise that the processing module (as shown in the figure) of separate space X and Y or separate space X, Y and Z can be ventilated with normal atmosphere.Any appropriate relevant with pump module 610 connects (for example any artificial connection) and can disconnect.
For example, when preparing to make pump module 610 when a separate space moves to another separate space, pump module 610 will disconnect with being connected of anterior pipeline 624.Anterior pipeline 624 is generally the vacuum piping that makes that at least one pump (for example three vacuum pumps 618,620 and 622 shown in Fig. 6 C) is connected with the forepump (not shown).Though a plurality of anterior pipelines can be used when needed, anterior pipeline 624 can be by the shared common anterior pipeline of a plurality of pump modules.Anterior pipeline 624 can be common to all pump modules that link to each other with processing module, perhaps is common to all pump modules in the application system, although can use a plurality of anterior pipelines when needing.At least one so anterior pipeline 624 is enough to keep the desired vacuum level that links to each other with the discharge side of at least one turbo-pump usually, like this, turbo-pump can valid function, and the vacuum level of processing module can equal several millitorrs, and for example about 1 millitorr is to about 9 millitorrs.When pump module fully raises with respect to the body of separate space X, anterior pipeline 624 can be automatically and pump module 610 disconnect, for example by anterior line branches 626 described below.
Anterior pipeline 624 can be equipped with at least one junctor, for example three junctor 628x, 628y and 628z, and they link to each other with at least one separate space, for example link to each other with Z with three separate space X, Y respectively, as shown in Figure 6A and 6B.When any junctor (for example 628x and the 628z of the 628y of Fig. 6 A and 628z and Fig. 6 B) when not using, for example when it linked to each other with the separate space that is different from the pump separate space, it can be in closed, can not enter or blockage state.If junctor (for example 628y of the 628x of Fig. 6 A and Fig. 6 B) will be used arbitrarily, when it linked to each other with the pump separate space, it can be in opened maybe and can get the hang of.When separate space Y (pump module 610 positive motions are to this separate space Y) when not constituting the pump separate space at first, as shown in Figure 6A, separate space Y can provide anterior line branches 626, shown in Fig. 6 B and Fig. 6 C, this front portion line branches 626 is convenient to pump module and junctor 628Y, therefore being connected to anterior pipeline 624.This front portion line branches 626 can extend to the top of separate space Y more or less, shown in Fig. 6 B and 6C, and can comprise corrugated tube 630 or links to each other with this corrugated tube 630.Should be known in addition or also and can select that the corrugated tube (not shown) can link to each other with the base section of pump line line 636.Corrugated tube 630 can comprise or link to each other with flange 632 that this flange 632 is enough to be operable to respective flanges 634 (this respective flanges 634 links to each other with pump module 610) and is communicated with.Flange 632 and respective flanges 634 can be clamped together, and perhaps otherwise link to each other, so that abundant connection is provided.For example, clamping may not need, and like this, pump module 610 can fully locate and reduce, so flange 634 and flange 632 meets, aligns and/or fully interact, so that pump module 610 is linked to each other with anterior line branches 626 operations.When splash module 610 reduced, the alignment feature (for example align contact pin and/or socket) relevant with pump module 610 can make things convenient for flange 632 to feel relieved with respect to flange 634 or align.When pump module 610 fully reduced, corrugated tube 630 can compress.Corrugated tube 630 can make flange 632 that some freedoms of motion are arranged, so that align with flange 634.By this way or any other suitable method, when pump module moved, anterior pipeline 624 and pump module 610 can be dynamically connected and disconnect certainly.
The pump module 610 of Fig. 6 B and another view of separate space Y have been represented among Fig. 6 C.In this view, anterior pipeline 624, anterior line branches 626 and corrugated tube 630 are expressed as the side at separate space Y.As shown in the figure, flange 632 links to each other with flange 634 operations of pump module 610.Flange 632 can link to each other by the spring action of corrugated tube 630 like this with 634, and this corrugated tube 630 can compress by pump module 610.As previously mentioned, corrugated tube can also or selectively link to each other with vacuum pipeline 636, for example near the flange 634.Flange 632 can mutual operation link to each other by normal atmosphere with 634, for example passes through the suitable pumping of separate space Y.At least one vacuum pipeline 636 can be used for being operatively connected at least one pump (for example pump 618,620 and 622 at least one) and anterior line branches 626, and therefore connect anterior pipeline 624.
Usually, for example pump module 610 utilizable operating powers are lower than relevant with splash module (for example splash module 612) usually power (this power can be higher relatively) for pump module, for example approximately up to the every module of 6kW or up to the every module of the every pump of about 1kW.Pump module 610 can provide abundant power by for example auxiliary power supply, and this auxiliary power supply can manually be connected with pump module.The pump that links to each other with pump module can cool off by the cooling fluid or the water of relatively small amount, for example about 3gpm.Cooling fluid or water can provide by less relatively cooling water pipeline, and this cooling water pipeline can manually be connected with pump module.Electricity, cooling and/or control linkage can be artificial connections, or are dynamically connected certainly, for example are convenient to by automatic coupler as previously mentioned connect.Separate space can have connection, and for example standard connects, and this connection can be used for being connected with module, no matter this module is pump module or splash module.When module is pump module, also provide anterior pipeline to connect, as previously mentioned.For example anterior line branches can occupy the space of separate space sidepiece, otherwise this space can be occupied by the automatic coupler that links to each other with separate space.In this case, when pump module linked to each other with separate space, the automatic coupler that links to each other with separate space can be removed, and anterior line branches can be provided, and as previously mentioned, and electricity, control is connected with water coolant and can manually carries out.Separate space can link to each other with anterior line branches, and carries out electricity automatically and be connected with water, and like this, separate space can be arranged for pumping or splash.In this case, with respect to separate space suitably-arranged module separate space is arranged to as pump separate space or splash module simply.
When separate space (for example separate space X of Fig. 6 B) when not using, its opening can for example block or close by covering 638.Sealing member can be formed at cover 638 and the body of separate space X between so that be created in the lid of pump module or splash module and the sealing between the separate space body, like this, separate space X is vacuum-sealing.Because a variety of causes, applicator can be arranged to obsolete separate space.For example, the capacity of wishing after applicator can be arranged in for example applies purposes by expansion.Not use separate space in the moudle type application system can be arranged for relatively easy and pumping or splash apace, as described here.
Central control unit can be used to control splash module and other parts of application system.Central control unit can be that programmable logic controller (PLC), Personal Computer (PC), host computer or some are enough to carry out the system of control software.Each separate space can link to each other with special-purpose control linkage part, and whether these special-purpose control linkage parts or not when separate space moves.When moving to new separate space, it is connected with the control linkage part that is used for this new separate space when module (no matter it is pump module or splash module).Module can link to each other with unique identification, and like this, by sending signal from new separate space to controller, controller thinks that the module of unique identification is connected with new separate space.Similarly, characteristic or a plurality of characteristic of unique identification module can be recognized or write down to controller.For example, controller can think that module is as AC splash module or as DC splash module.When not having thing to be connected with the control linkage part that links to each other with separate space, controller can suppose that separate space does not use.Can be used to make the example of the system that controller is connected with one or more splash modules and/or pump module to comprise Devicenet system and Profibus system.Unique identification can link to each other with other parts with the splash module by being arranged on the wire jumper (jumper) on the parts.
For example, in the situation shown in Fig. 6 B, the control linkage device that links to each other with separate space X is not connected with anything, like this, controller will think separate space X as and obsolete separate space; The control linkage device that links to each other with separate space Y will be connected with pump module 610, and like this, controller will think that pump module links to each other with separate space Y; And the control linkage device that links to each other with separate space Z will be connected with splash module 612, and like this, controller will think that splash module 612 links to each other with separate space Z.Like this, the user does not need cartographic data is imported controller (for example by artificial input).Therefore, can avoid cartographic data being imported relevant possible errors of controller or error with this user.Recognize special module for example when pump module or splash module when controller, it can carry out control software or the control algolithm that is applicable to this module.
The moudle type splash system that comprises four separate spaces below in conjunction with the block diagram of Fig. 7.Four separate spaces of system link to each other with the splash module separately, have therefore represented four splash modules 702,704,706 and 708.Each splash module comprises power subsystem and the magnetron that is electrically connected mutually by cable.Therefore, 722,724,726 and 728 and four cables 732,734,736 and 738 of 712,714,716 and 718, four magnetrons of four power subsystem have been represented.Cable can be shorter, and can be surrounded by housing or lid to small part, for example can reduce or eliminate the lid of the RF interference of lid outside.For example, each is organized power subsystem, magnetron and cable (for example power subsystem 712, magnetron 722 and cable 732) and can be arranged in for example splash module of single physical unit 702.Such structure may be very favourable, and wherein, it can be used to the one or more power subsystem of the system of eliminating and the incorrect link of magnetron, and for example earlier in respect of figures 3 is described.Four splash modules 702,704,706 and 708 can shared public electric supply installation 740, as shown in the figure, like this, and needs not exceed the special cable that the splash module is stretched out.Four communication cable 752,754,756 and 758 are exclusively used in special separate space separately, and can provide information about the splash module (or other module) that links to each other with this separate space to controller 760.
Introduce the splash module below with reference to Fig. 8.Splash module 800 is expressed as its housing or lid part and removes.Be used for to driving the end that end block and target compound (Fig. 8 is invisible) provide the motor 810 of revolving force can be positioned at splash module 800, as shown in the figure.The power and water web member 812 that is used for the water-facing end piece and provides power and water can be positioned at the other end of splash module 800, as shown in the figure.In addition, be used for the middle portion that the water-facing end piece provides electric power subsystem 820 can be positioned at splash module 800, as shown in the figure.Power subsystem 820 can provide cooling fluid or the water that enough is used to cool off this power subsystem.If power supply sealing and close other high-power equipment, the cooling of power subsystem is very important so.
Should be known in that the splash system can comprise at least one planar shaped magnetron.In this case, planar shaped magnetron 910 can be by any suitable means or means and with the lid 912 of module 914 or in addition the other lid physics of module link to each other or be installed in above it, this other module links to each other with near or adjacent separate space (not shown) or is positioned at somewhere on the applicator, as being schematically shown among Fig. 9 A.Automatic coupler 918 can comprise connecting element 916 (totally), they become contact pin, blade and/or other suitable form, they are fit to be connected with corresponding connectors element (not shown, as to link to each other with unshowned separate space), for example in earlier in respect of figures 5 described modes.When using the planar shaped magnetron, do not need end block, like this, need be for the described end block web member of the splash module of Fig. 5 and Fig. 8.As being schematically shown among Fig. 9 B, with the power of the negative electrode 930 of planar shaped magnetron 910 or be electrically connected and undertaken by electric feedthrough 920, perhaps with the power of the anode 932 of planar shaped magnetron 910 or be electrically connected and undertaken by another electric feedthrough 922.With the electrical connection of negative electrode 930 and anode 932 can by with carry out the negative output and being connected of positive output of power subsystem (not shown) the power subsystem that links to each other with module 914 for example.
Operable various variations, processing and multiple structure have been known here.Different aspect, feature and embodiment can be by understanding, view, principles, suppose and/or work or estimate that example explains or illustrate, although should be known in any special understanding, view, principle, suppose and/or work or estimate that example is not restriction.Although introduced all respects and feature, should be known in that they are not to limit for the application's accessory claim or with entire area that the application's related right requires by here different embodiment and particular instance.
Claims (14)
1. module, it is used for linking to each other with applicator, and this applicator comprises at least one separate space, and this module comprises:
Lid, this lid is enough to cooperate with the opening of separate space; And
Power supply, this power supply links to each other with lid physics, and another covers with neighbouring separate space or applicator and links to each other, and this power supply is enough to receive the electricity input, and the electricity that is enough to be used in the splash in separate space output is provided.
2. module according to claim 1, wherein: according to predetermined point or pre-determined range, power supply is enough to keep or changes electricity export.
3. module according to claim 1, wherein: electricity is input as from about 380 volts extremely about 600 volts and about 50 hertz of extremely about 60 hertz three-phase alternating current inputs.
4. module according to claim 1 also comprises: the magnetron that links to each other with lid physics.
5. module according to claim 4, wherein: magnetron is selected from planar shaped magnetron and cylindrical magnetron.
6. module according to claim 4, wherein: magnetron is a cylindrical magnetron, and module also comprises and lid physics first end block and second end block that link to each other, this first end block and second end block are enough to support cylindrical magnetron together.
7. module according to claim 1 also comprises: lid, this covers to small part encirclement power supply.
8. module according to claim 1 also comprises: lid, wherein power supply links to each other with this lid physics by lid.
9. module, it is used for linking to each other with applicator, and this applicator comprises at least one separate space and at least one the separate space junctor that links to each other with this separate space, and this module comprises:
Comprise the module that is enough to the lid that cooperates with the opening of separate space;
Power supply, this power supply links to each other with lid physics, and perhaps another covers with neighbouring separate space or applicator and links to each other, and this power supply is enough to receive the electricity input, and the electricity that is enough to be used in the splash in separate space output is provided; And
Junctor, this junctor links to each other with module physics, and it is enough to be used in being connected with the separate space junctor when lid is fully located relative to each other with separate space, like this, provides electric connection between power supply and separate space.
10. module, it is used for linking to each other with applicator, and this applicator comprises at least one separate space and at least one the separate space junctor that links to each other with this separate space, and this module comprises:
Comprise the module that is enough to the lid that cooperates with the opening of separate space;
Power supply, this power supply links to each other with lid physics, and another covers with neighbouring separate space or applicator and links to each other, and this power supply is enough to receive the electricity input, and the electricity that is enough to be used in the splash in separate space output is provided; And
Junctor, this junctor links to each other with module physics, and it is enough to be used in being connected with the separate space junctor when lid is fully located relative to each other with separate space, like this, provides fluid to be communicated with between fluid supply source and separate space.
11. a module, it is used for linking to each other with applicator, and this applicator comprises at least one separate space and at least one the control linkage device that links to each other with this separate space, and this module comprises:
Comprise the module that is enough to the lid that cooperates with the opening of separate space;
Power supply, this power supply links to each other with lid physics, and another covers with neighbouring separate space or applicator and links to each other, and this power supply is enough to receive the electricity input, and the electricity that is enough to be used in the splash in separate space output is provided; And
Wherein, module is enough to be used in being connected with the control linkage device, like this, provides the electric connection of control between power supply and separate space.
12. a module, it is used for linking to each other with applicator, and this applicator comprises at least one separate space and at least one the control linkage device that links to each other with this separate space and be enough to be communicated with controller, and this module comprises:
Comprise the module that is enough to the lid that cooperates with the opening of separate space;
Power supply, this power supply links to each other with lid physics, and another covers with neighbouring separate space or applicator and links to each other, and this power supply is enough to receive the electricity input, and the electricity that is enough to be used in the splash in separate space output is provided;
Wherein, module is enough to be used in being connected with the control linkage device, and links to each other with sign, and this sign is enough to be discerned by controller.
13. a module, it is used for linking to each other with applicator, and this applicator comprises at least one separate space, at least one anterior pipeline and at least one the anterior pipe connector that links to each other with this front portion pipeline physics, and this module comprises:
Lid, this lid is enough to cooperate with the opening of separate space;
At least one pump, this pump links to each other with lid physics, and is enough to provide vacuum to separate space; And
Modular connector, this modular connector links to each other with module physics, and it is enough to be used in that oneself is dynamically connected with anterior pipe connector when fully locating relative to each other when lid and separate space.
14. module according to claim 13, wherein: at least one junctor in anterior pipe connector and the modular connector comprises corrugated tube.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US68298505P | 2005-05-20 | 2005-05-20 | |
| US60/682,985 | 2005-05-20 | ||
| US11/382,240 | 2006-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101287855A true CN101287855A (en) | 2008-10-15 |
Family
ID=40059322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA200680023277XA Pending CN101287855A (en) | 2005-05-20 | 2006-05-10 | Module for a coating system and associated technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101287855A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109863574A (en) * | 2016-10-17 | 2019-06-07 | 应用材料公司 | Power for high-power impulse magnetron sputtering (HiPIMS) conveys |
-
2006
- 2006-05-10 CN CNA200680023277XA patent/CN101287855A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109863574A (en) * | 2016-10-17 | 2019-06-07 | 应用材料公司 | Power for high-power impulse magnetron sputtering (HiPIMS) conveys |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20060260938A1 (en) | Module for Coating System and Associated Technology | |
| US20050201882A1 (en) | Vacuum pumping system | |
| BR9704259A (en) | System composed of modules for installation of kitchen utensils and / or kitchen utensils | |
| KR101995483B1 (en) | Tunnel for underground distribution line prevention structure | |
| US20220255492A1 (en) | Radiative micron-gap thermophotovoltaic system with transparent emitter | |
| CN104952684A (en) | Apparatus for treating substrate | |
| CN101287855A (en) | Module for a coating system and associated technology | |
| JP2010103575A (en) | Apparatus for vacuum treatment | |
| JP2006080347A (en) | Plasma processor | |
| EP0624946A2 (en) | Cellular motor control network | |
| US20090101638A1 (en) | Induction module, arrangement of several induction modules and method for installing such an induction module | |
| CN103574834B (en) | A kind of air-conditioner set energy-saving control cabinet | |
| CN105840899B (en) | Split type electrical actuating mechanism controls case | |
| CN105932564A (en) | Multifunctional integrated photovoltaic box type transformer substation | |
| CN205781221U (en) | Split type electrical actuating mechanism controls case | |
| NO864795L (en) | STEERING EQUIPMENT PROTECTION. | |
| EP1761121B1 (en) | Arrangement for the cooling of liquid-cooled electrical equipment | |
| KR100660087B1 (en) | Energy and media connection for a coating installation comprising several chambers | |
| CN108565766A (en) | A kind of gas insulation switch cabinet and simultaneously cabinet combination | |
| EP3044530A2 (en) | System and method of using graphene enriched products for distributing heat energy | |
| JP2009078325A (en) | Manufacturing device, manufacturing device control system, and manufacturing device control method | |
| US20010033081A1 (en) | Power generation system interchangeability device and related methods | |
| EP2280229B1 (en) | Space Heater | |
| CN206948637U (en) | A kind of large-scale orientation electric hot plate | |
| CN110661187A (en) | Intelligent heat exchange unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20081015 |